Alignment device and substrate storage device

Abstract

The invention provides an aligning device and a substrate storage device, and the aligning device comprises a first support which is provided with an accommodation space for accommodating a cartridge; the correcting mechanism is arranged on the first support, the correcting mechanism comprises a first adjusting piece and a second adjusting piece, and the first adjusting piece can move in the first horizontal direction; the second adjusting part can move in the second horizontal direction, and the first horizontal direction intersects with the second horizontal direction. According to the aligning device, the aligning mechanism is arranged, the positions of the base plate in the first horizontal direction and the second horizontal direction can be adjusted through the first adjusting piece and the second adjusting piece of the aligning mechanism, so that the base plate is moved to the preset position, and when the base plate is taken away by a downstream manipulator, the base plate only needs to be directly moved to the preset position; and positioning according to the position of the substrate is not needed, so that the production efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of display screen manufacturing, and more specifically, to a straightening device and a substrate storage device. Background Technology

[0002] With technological advancements, equipment automation efficiency is increasing. The current automated production line operation mode involves a feeding device placing the glass substrate onto the production line during display production, with upstream and downstream automated equipment transporting the glass substrate between process devices. Due to the asynchronous efficiency of upstream and downstream process equipment, during the transportation of the glass substrate, it is necessary to either store the glass substrate in a cassette or remove it from the cassette and place it onto the process line.

[0003] However, when storing glass substrates in a cassette, the positions of the glass substrates in each layer of the cassette are inconsistent. Therefore, when it is necessary to remove the glass substrate from the cassette and send it to the next work station, the robot arm needs to first locate the glass substrate according to its position before taking it out, which affects production efficiency. Summary of the Invention

[0004] The present invention aims to at least solve the problem in the prior art that the glass substrates in each layer of the cartridge are not in the same position, and each time they need to be positioned and then taken out, which affects the production efficiency. The present invention proposes a straightening device and a substrate storage device.

[0005] To achieve the purpose of this invention, a straightening device is provided for adjusting the movement of a substrate in a cartridge to a preset position. The straightening device includes: a first support having a receiving space for accommodating the cartridge; and a straightening mechanism disposed on the first support. The straightening mechanism includes: a first adjusting member and a second adjusting member. The first adjusting member is movable along a first horizontal direction for adjusting the position of the substrate in the cartridge in the first horizontal direction; the second adjusting member is movable along a second horizontal direction for adjusting the position of the substrate in the cartridge in the second horizontal direction, so that the substrate moves to the preset position, wherein the first horizontal direction intersects the second horizontal direction.

[0006] Optionally, the alignment mechanism further includes: a mounting plate, the mounting plate being arranged horizontally, the mounting plate having a vertically penetrating clearance opening for avoiding the cartridge; a first adjusting member being movably disposed on the mounting plate along the first horizontal direction, the first adjusting member being adjacent to the clearance opening in the first horizontal direction, the first adjusting member being used to push the substrate to move along the first horizontal direction by moving along the first horizontal direction and abutting against the substrate; and a second adjusting member being movably disposed on the mounting plate along the second horizontal direction, the second adjusting member being adjacent to the clearance opening in the second horizontal direction, the second adjusting member being used to push the substrate to move along the second horizontal direction by moving along the second horizontal direction and abutting against the substrate.

[0007] Optionally, there are two first adjusting members spaced apart in the first horizontal direction, the clearance opening is located between the two first adjusting members, the two first adjusting members move closer or further apart from each other along the first horizontal direction, and the two first adjusting members adjust the substrate offset in the first horizontal direction to a preset position by moving closer to each other; and / or there are two second adjusting members spaced apart in the second horizontal direction, the clearance opening is located between the two second adjusting members, the two second adjusting members move closer or further apart from each other along the second horizontal direction, and the two second adjusting members adjust the substrate offset in the second horizontal direction to a preset position by moving closer to each other.

[0008] Optionally, the alignment mechanism further includes: a first drive assembly disposed on the mounting plate, the first drive assembly being drivenly connected to the first adjusting member to drive the first adjusting member to move along the first horizontal direction; a second drive assembly disposed on the mounting plate, the second drive assembly being drivenly connected to the second adjusting member to drive the second adjusting member to move along the second horizontal direction; and a first transmission member being drivenly connected to the first drive assembly and the second drive assembly respectively, so that the first adjusting member and the second adjusting member move synchronously.

[0009] Optionally, the first driving assembly includes: a first screw, a first slider, and a first gear; the first screw is disposed on the mounting plate along the first horizontal direction and is rotatable about its own axis; the first slider is fixedly connected to the first adjusting member, the first screw passes through the first slider and is threadedly engaged, and the first screw drives the first slider to move along the first horizontal direction by rotation, thereby causing the first adjusting member to move along the first horizontal direction; the first gear is rotatably disposed on the mounting plate, the rotation axis of the first gear is disposed along the vertical direction, the first gear drives the first screw to rotate, and the first gear is driven to connect with the first transmission member. ; and / or the second drive assembly includes: a second screw, a second slider, and a second gear. The second screw is disposed on the mounting plate along the second horizontal direction and is rotatable about its own axis. The second slider is fixedly connected to the second adjusting member. The second screw passes through the second slider and is threadedly engaged. The second screw drives the second slider to move along the second horizontal direction by rotation, thereby causing the second adjusting member to move along the second horizontal direction. The second gear is rotatably disposed on the mounting plate. The rotation axis of the second gear is disposed along the vertical direction. The second gear drives the second screw to rotate. The second gear is drivenly connected to the first transmission member.

[0010] Optionally, the alignment mechanism further includes: a first sliding assembly disposed on the mounting plate along the first horizontal direction, the first adjusting member being connected to the first sliding assembly to allow the first adjusting member to move relative to the mounting plate along the first horizontal direction; and a second sliding assembly disposed on the mounting plate along the second horizontal direction, the second adjusting member being connected to the second sliding assembly to allow the second adjusting member to move relative to the mounting plate along the second horizontal direction.

[0011] Optionally, both the first adjusting member and the second adjusting member have a contact portion for abutting against the substrate; the first adjusting member has at least two contact portions and they are spaced apart along the second horizontal direction; the second adjusting member has at least two contact portions and they are spaced apart along the first horizontal direction.

[0012] Optionally, the abutting part is a roller.

[0013] Optionally, the alignment device further includes a lifting mechanism, which is mounted on the first bracket. The alignment mechanism is connected to the lifting mechanism. The lifting mechanism drives the alignment mechanism to rise and fall, so that the alignment mechanism corresponds to the substrates at different heights in the cassette and adjusts the substrates at different heights to preset positions so that the orthographic projections of the substrates at different heights coincide in the vertical direction.

[0014] Optionally, the lifting mechanism includes: a plurality of third screws, each of which is mounted on the first bracket along the vertical direction and is rotatable about its own axis, the plurality of third screws surrounding the clearance opening; a plurality of third sliders, each corresponding to one of the third screws, each third slider being connected to the mounting plate, the third screws passing through the corresponding third sliders and driving the corresponding third sliders to rise and fall by rotation; and a second transmission member, drivingly connected to all the third screws, the third screws rotating synchronously through the second transmission member to drive the mounting plate to rise and fall.

[0015] Optionally, the first bracket includes: a bracket body having all the accommodating spaces; a support platform disposed at the bottom of the accommodating spaces and connected to the bracket body for supporting the cartridge; a positioning part disposed on the support platform for positioning and engaging with the cartridge in the horizontal direction so that the position of the cartridge corresponds to the position of the clearance opening; and a clamping part movably disposed on the support platform, the clamping part having an abutting position for abutting against the cartridge and a clearance position for avoiding the cartridge. In the abutting position, the clamping part abuts the cartridge against the positioning part so that the cartridge is fixed relative to the straightening mechanism.

[0016] According to a second aspect of the present invention, a substrate storage device is also disclosed, comprising: the above-described straightening device and a cartridge, the cartridge being disposed within the receiving space.

[0017] Optionally, the cartridge includes: a second bracket having an internal accommodating space for accommodating a substrate; and a plurality of support structures spaced apart in the accommodating space in a vertical direction, the support structures being used to support the substrate.

[0018] Optionally, the support structure includes: a plurality of support ropes, each of the support ropes being arranged along the first horizontal direction, and both ends of each of the support ropes being respectively connected to the second bracket, the plurality of support ropes being spaced apart along the second horizontal direction to support the substrate.

[0019] Optionally, the support structure further includes a tensioning member disposed between the support rope and the second bracket for tensioning the support rope.

[0020] The alignment device of the present invention, by setting an alignment mechanism, can adjust the position of the substrate in the first horizontal direction and the second horizontal direction through the first adjustment member and the second adjustment member of the alignment mechanism, thereby moving the substrate to a preset position. When the downstream robot arm comes to pick up the substrate, it can simply move it directly to the preset position without having to locate it according to the position of the substrate, thereby improving production efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the cartridge structure in related technologies;

[0022] Figure 2 This is a schematic diagram of the structure of the correction device according to an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the structure of a substrate storage device according to an embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram illustrating the cooperation between the straightening device and the cartridge in an embodiment of the present invention;

[0025] Figure 5 This is a schematic diagram of the straightening mechanism of the straightening device according to an embodiment of the present invention;

[0026] Figure 6 This is an assembly diagram of the first transmission component of the straightening device according to an embodiment of the present invention;

[0027] Figure 7 This is an assembly diagram of the mounting plate and the third screw of the straightening device according to an embodiment of the present invention;

[0028] Figure 8 This is a schematic diagram of the support platform of the straightening device according to an embodiment of the present invention;

[0029] Figure 9 This is a schematic diagram of the positioning part of the straightening device according to an embodiment of the present invention;

[0030] Figure 10 This is a schematic diagram of the clamping part of the straightening device according to an embodiment of the present invention;

[0031] Figure 11 This is a schematic diagram showing the usage state of the clamping part of the straightening device according to an embodiment of the present invention;

[0032] Figure 12 This is a schematic diagram showing the relative positions of the positioning part and the clamping part of the straightening device according to an embodiment of the present invention;

[0033] Figure 13 This is a schematic diagram of the support structure of the cartridge of the substrate storage device according to an embodiment of the present invention;

[0034] List of reference numerals in the attached diagram:

[0035] 10. First bracket; 11. Bracket body; 12. Support platform; 13. Positioning part; 14. Clamping part; 15. Cylinder; 16. Caster wheel; 20. Alignment mechanism; 21. First adjusting component; 211. First adjusting arm; 212. First connecting plate; 22. Second adjusting component; 221. Second adjusting arm; 222. Second connecting plate; 23. Mounting plate; 231. First plate body; 232. Second plate body; 233. Clearance opening; 24. First sliding assembly; 241. First guide rail; 242. First guide block; 25. Second sliding assembly; 251. Second guide rail; 252. 26. Second guide block; 26. First drive assembly; 261. First screw; 262. First slider; 263. First gear; 264. First motor; 27. Second drive assembly; 271. Second screw; 272. Second slider; 273. Second gear; 28. First transmission component; 29. ​​Abutment part; 30. Casing; 31. Second bracket; 32. Support structure; 321. Support rope; 322. Tensioning component; 40. Lifting mechanism; 41. Third screw; 42. Third slider; 43. Second transmission component; 44. Second tensioning wheel; 45. Second motor; 50. Base plate. Detailed Implementation

[0036] To enable those skilled in the art to better understand the technical solution of the present invention, the alignment device and substrate storage device provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0037] With technological advancements, equipment automation efficiency is increasing. The current automated production line operation mode involves a feeding device placing the glass substrate onto the production line during display production, with upstream and downstream automated equipment transporting the glass substrate between process devices. Due to the asynchronous efficiency of upstream and downstream process equipment, during the transportation of the glass substrate, it is necessary to either store the glass substrate in a cassette or remove it from the cassette and place it onto the process line.

[0038] like Figure 1 As shown, the existing cartridge 1 is a cubic frame structure. The cartridge 1 has an opening in the first horizontal direction for inserting or removing the glass substrate 3. The cartridge 1 contains multiple support structures for supporting the glass substrate 3, which are spaced apart vertically. Each support structure supports one glass substrate 3. Each support structure includes two support plates 2, each extending along the first horizontal direction. The two support plates 2 are spaced apart in the second horizontal direction to support the glass substrate 3 on both sides in the second horizontal direction. The first horizontal direction, the second horizontal direction, and the vertical direction are mutually perpendicular, with the vertical direction being... Figure 1 The vertical direction in the middle, the first horizontal direction is Figure 1The middle vertical page orientation, the second horizontal orientation is Figure 1 The left and right directions in the middle.

[0039] During the process, the upstream equipment places the glass substrate 3 into the support structure of the cassette 1 through the pick-and-place port, waiting for the downstream equipment to take it out. However, when storing the glass substrate in the cassette 1, the positions of the glass substrate 3 in each layer of the cassette 1 are inconsistent. Therefore, when it is necessary to take the glass substrate 3 out of the cassette 1 and send it to the next work station, the robot arm needs to first locate the position of the glass substrate 3 before taking it out, which affects the production efficiency.

[0040] In addition, since the support plate 2 is supported on both sides of the glass substrate 3, the middle of the glass substrate 3 lacks support, which can easily cause the glass substrate 3 to deform under the action of gravity, thereby affecting the quality of the display screen.

[0041] To solve the above problems, such as Figure 2 and Figure 3 As shown, this invention discloses a alignment device and a substrate storage device. The alignment device is used to adjust the substrate 50 in the cassette 30 to a preset position, thereby facilitating the removal of the glass substrate 50 by downstream equipment.

[0042] like Figures 3 to 5 As shown, the alignment device includes a first support 10 and an alignment mechanism 20. The first support 10 has a receiving space for accommodating the cartridge 30; the alignment mechanism 20 is disposed on the first support 10 and includes a first adjusting member 21 and a second adjusting member 22. The first adjusting member 21 is movable along a first horizontal direction and is used to adjust the position of the substrate 50 in the cartridge 30 in the first horizontal direction; the second adjusting member 22 is movable along a second horizontal direction and is used to adjust the position of the substrate 50 in the cartridge 30 in the second horizontal direction, so that the substrate 50 moves to a preset position. The first horizontal direction is the x-axis direction, the second horizontal direction is the y-axis direction, and the vertical direction is the z-axis direction. The first horizontal direction, the second horizontal direction, and the vertical direction intersect each other.

[0043] The alignment device of the present invention, by setting the alignment mechanism 20, can adjust the position of the substrate 50 in the first horizontal direction and the second horizontal direction through the first adjusting member 21 and the second adjusting member 22 of the alignment mechanism 20, thereby moving the substrate 50 to a preset position. When the downstream robot arm comes to take away the substrate 50, it can simply move it to the preset position without having to locate it according to the position of the substrate 50, thereby improving production efficiency.

[0044] like Figure 3As shown, the alignment device also includes a lifting mechanism 40. The lifting mechanism 40 is mounted on the first bracket 10, and the alignment mechanism 20 is connected to the lifting mechanism 40. The lifting mechanism 40 is used to drive the alignment mechanism 20 to rise and fall, so that the alignment mechanism 20 corresponds to the substrates 50 at different height positions in the cassette 30, and adjusts the substrates 50 at different height positions to preset positions, so that the orthographic projections of the substrates 50 at different heights coincide in the vertical direction.

[0045] The alignment device of the present invention, by setting up a lifting mechanism 40, can drive the alignment mechanism 20 to rise and fall, thereby allowing the alignment mechanism 20 to adjust the position of substrates 50 at different heights, so that the orthographic projections of substrates 50 at different heights coincide in the vertical direction. That is to say, after the lifting mechanism 40 and the alignment mechanism 20 cooperate, all substrates 50 only differ in height in the vertical direction, while their positions in the first horizontal direction and the second horizontal direction are the same. Therefore, when the robot arm of the downstream equipment picks up substrates 50 multiple times, its position in the first horizontal direction and the second horizontal direction is the same each time, and no positioning is required. It only needs to adjust the height in the vertical direction to be the same as that of the substrate 50, without having to perform positioning in the first horizontal direction and the second horizontal direction each time, thereby improving production efficiency.

[0046] like Figure 5As shown, the alignment mechanism 20 includes: a mounting plate 23, a first adjusting member 21, and a second adjusting member 22. The mounting plate 23 is arranged in the horizontal direction and is connected to the lifting mechanism 40. A through hole 233 penetrating in the vertical direction is provided on the mounting plate 23, and the through hole 233 is used to avoid the cartridge 30 when the alignment mechanism 20 is lifted or lowered. The first adjusting member 21 is movably arranged on the mounting plate 23 along the first horizontal direction, and the first adjusting member 21 is arranged adjacent to the through hole 233 in the first horizontal direction. The first adjusting member 21 is used to abut against the substrate 50 by moving along the first horizontal direction, so as to push the substrate 50 to move along the first horizontal direction; the second adjusting member 22 is movably arranged on the mounting plate 23 along the second horizontal direction, and the second adjusting member 22 is arranged adjacent to the through hole 233 in the second horizontal direction. The second adjusting member 22 is used to abut against the substrate 50 by moving along the second horizontal direction, so as to push the substrate 50 to move along the second horizontal direction. By providing the mounting plate 23 and connecting it to the lifting mechanism 40, the lifting mechanism 40 can drive the first adjusting member 21 and the second adjusting member 22 to be lifted or lowered through the mounting plate 23, so as to adjust substrates 50 at different heights. The first adjusting member 21 is movably arranged on the mounting plate 23 along the first horizontal direction, and can abut against the side edge of the substrate 50 in the first horizontal direction by moving, so as to make the substrate 50 move along the first horizontal direction and realize the position adjustment in the first horizontal direction. The second adjusting member 22 is movably arranged on the mounting plate 23 along the second horizontal direction, and can abut against the side edge of the substrate 50 in the second horizontal direction by moving, so as to make the substrate 50 move along the second horizontal direction and realize the position adjustment in the second horizontal direction.

[0047] Exemplarily, as Figure 5 shown, the mounting plate 23 has a "hui" - shaped structure, which includes: two first plate bodies 231 and two second plate bodies 232. The length direction of the first plate body 231 is arranged along the second horizontal direction, and the width direction is arranged along the first horizontal direction. The two first plate bodies 231 are spaced apart in the first horizontal direction; the length direction of the second plate body 232 is arranged along the first horizontal direction, and the width direction is arranged along the second horizontal direction. The two second plate bodies 232 are spaced apart in the second horizontal direction; and both ends of the two second plate bodies 232 are respectively connected to both ends of the two first plate bodies 231, thus forming a "hui" - shaped structure, and the middle part of the mounting plate 23 is the through hole 233. By providing the through hole 233, during the lifting or lowering process of the mounting plate 23, the cartridge 30 can be avoided, so as to prevent interference with the cartridge 30.

[0048] For example, there are two first adjusting members 21, spaced apart in the first horizontal direction. The clearance opening 233 is located between the two first adjusting members 21. The two first adjusting members 21 move closer or further apart from each other along the first horizontal direction. By moving closer together, the two first adjusting members 21 adjust the substrate 50, which is offset in the first horizontal direction, to a preset position. That is, the two first adjusting members 21 are respectively disposed on the two first plates 231, and each first adjusting member 21 is movable relative to the first plate 231 it is located on along the first horizontal direction. Since the two first adjusting members 21 move closer or further apart from each other during adjustment, regardless of which of the two first adjusting members 21 the initial position of the substrate 50 is biased towards, it can be adjusted by the corresponding first adjusting member 21, thereby pushing the substrate 50 toward the center of the clearance opening 233 in the first horizontal direction.

[0049] Similarly, there are two second adjusting members 22, spaced apart in the second horizontal direction. The clearance opening 233 is located between the two second adjusting members 22. The two second adjusting members 22 move closer or further apart from each other along the second horizontal direction. By moving closer together, the two second adjusting members 22 adjust the substrate 50, which is offset in the second horizontal direction, to a preset position. That is, the two second adjusting members 22 are respectively disposed on the two second plates 232, and each second adjusting member 22 is movable relative to the second plate 232 it is on along the second horizontal direction. Since the two second adjusting members 22 move closer or further apart from each other during adjustment, regardless of which of the two second adjusting members 22 the initial position of the substrate 50 is biased towards, it can be adjusted by the corresponding second adjusting member 22, thereby pushing the substrate 50 toward the center of the clearance opening 233 in the second horizontal direction.

[0050] The alignment device of this invention uses two first adjusting members 21 in the first horizontal direction and two second adjusting members 22 in the second horizontal direction. By bringing the opposing adjusting members closer together, the substrate 50 is pushed to the center position of the clearance opening 233. Since each adjusting member moves the same distance each time it adjusts a different substrate 50, the position of each substrate 50 is the same in both the first and second horizontal directions after adjustment, with only the vertical height differing. In other words, the orthographic projections of all substrates 50 in the vertical direction coincide. Therefore, the robot arm in the downstream equipment does not need to be positioned in the first and second horizontal directions each time it picks up a substrate 50; it only needs to adjust the vertical height to match the substrate 50, thereby improving production efficiency.

[0051] It should be noted that in this embodiment, there are two first adjusting members 21 and two second adjusting members 22. However, this is not limiting. In some other embodiments not shown in the figures, there may be two first adjusting members 21 or two second adjusting members 22. Without departing from the inventive concept and technical principles of this invention, the above-mentioned situations also fall within the protection scope of this invention.

[0052] It is understood that the alignment mechanism 20 also includes: a first sliding assembly 24 and a second sliding assembly 25. The first sliding assembly 24 is disposed on the mounting plate 23 along a first horizontal direction, and a first adjusting member 21 is connected to the first sliding assembly 24 so that the first adjusting member 21 moves relative to the mounting plate 23 along the first horizontal direction; the second sliding assembly 25 is disposed on the mounting plate 23 along a second horizontal direction, and a second adjusting member 22 is connected to the second sliding assembly 25 so that the second adjusting member 22 moves relative to the mounting plate 23 along the second horizontal direction.

[0053] For example, such as Figure 5 As shown, both the first sliding component 24 and the second sliding component 25 are guide rails and guide blocks that slide with the guide rails. The first sliding component 24 includes two first guide rails 241 and two first guide blocks 242. The first guide rails 241 are fixedly connected to the first plate 231 along a first horizontal direction. The two first guide rails 241 are spaced apart and parallel to each other along a second horizontal direction. The two first guide blocks 242 are correspondingly arranged with the first guide rails 241 and are slidably connected to their respective first guide rails 241.

[0054] For example, such as Figure 5 As shown, the first adjusting member 21 includes a first adjusting arm 211 and a first connecting plate 212. The first adjusting arm 211 is arranged along a first horizontal direction and has a first end and a second end. The first end of the first adjusting arm 211 faces the substrate 50. There are two first adjusting arms 211, which are spaced apart along a second horizontal direction. The two ends of the first connecting plate 212 are respectively connected to the second ends of the two first adjusting arms 211, and two first guide blocks 242 are respectively fixedly connected to the first connecting plate 212. That is, the first adjusting member 21 achieves relative sliding with the first plate 231 through the first sliding assembly 24.

[0055] For example, such as Figure 5 As shown, the second sliding component 25 includes two second guide rails 251 and two second guide blocks 252. The second guide rails 251 are fixedly connected to the second plate 232 along the second horizontal direction. The two second guide rails 251 are spaced apart and parallel to each other along the first horizontal direction. The two second guide blocks 252 are correspondingly arranged with the second guide rails 251 and are slidably connected to the corresponding second guide rails 251.

[0056] For example, such as Figure 5 As shown, the second adjusting member 22 includes a second adjusting arm 221 and a second connecting plate 222. The second adjusting arm 221 is arranged along a second horizontal direction and has a first end and a second end. The first end of the second adjusting arm 221 faces the substrate 50. There are two second adjusting arms 221, which are spaced apart along the first horizontal direction. The two ends of the second connecting plate 222 are respectively connected to the second ends of the two second adjusting arms 221, and the two second guide blocks 252 are respectively fixedly connected to the second connecting plate 222. That is, the second adjusting member 22 achieves relative sliding with the second plate 232 through the second sliding assembly 25.

[0057] like Figure 5 As shown, both the first adjusting member 21 and the second adjusting member 22 have abutting portions 29 for abutting against the substrate 50; the first adjusting member 21 has at least two abutting portions 29 and they are spaced apart along the second horizontal direction; the second adjusting member 22 has at least two abutting portions 29 and they are spaced apart along the first horizontal direction.

[0058] For example, the first adjusting member 21 has two abutting portions 29, which are respectively disposed at the first end of the first adjusting arm 211 and used to abut against the side edge of the substrate 50. Similarly, the second adjusting member 22 has two abutting portions 29, which are respectively disposed at the first end of the second adjusting arm 221 and used to abut against the side edge of the substrate 50. The abutting portions 29 are rollers. Since the first adjusting member 21 and the second adjusting member 22 adjust the substrate 50 simultaneously, when the substrate 50 moves along the first horizontal direction, it will move against the second adjusting member 22, resulting in friction. Conversely, when the substrate 50 moves along the second horizontal direction, it will move against the first adjusting member 21, resulting in friction. By providing rollers, the surface-to-surface friction between the edge of the substrate 50 and the adjusting arm can be transformed into rolling friction, thereby reducing wear between the substrate 50 and the adjusting arm and protecting the substrate 50.

[0059] like Figure 5As shown, the alignment mechanism 20 further includes a first driving assembly 26, a second driving assembly 27, and a first transmission member 28. The first driving assembly 26 is mounted on the mounting plate 23 and is drivenly connected to the first adjusting member 21 to drive the first adjusting member 21 to move along a first horizontal direction. The second driving assembly 27 is also mounted on the mounting plate 23 and is drivenly connected to the second adjusting member 22 to drive the second adjusting member 22 to move along a second horizontal direction. The first transmission member 28 is drivenly connected to both the first driving assembly 26 and the second driving assembly 27 to ensure synchronous movement of the first adjusting member 21 and the second adjusting member 22. By configuring the first driving assembly 26, the second driving assembly 27, and the first transmission member 28, synchronous movement of the first adjusting member 21 and the second adjusting member 22 can be achieved, thereby enabling synchronous adjustment of the substrate 50 in both the first and second horizontal directions and improving adjustment efficiency.

[0060] For example, such as Figure 5 As shown, the first driving assembly 26 includes a first screw 261, a first slider 262, and a first gear 263. The first screw 261 is mounted on the mounting plate 23 along a first horizontal direction and is rotatable about its own axis. The first slider 262 is fixedly connected to the first adjusting member 21, and the first screw 261 passes through the first slider 262 and is threadedly engaged. The first screw 261 drives the first slider 262 to move along the first horizontal direction by rotation, thereby causing the first adjusting member 21 to move along the first horizontal direction. The first gear 263 is rotatably mounted on the mounting plate 23, and the rotation axis of the first gear 263 is set along the vertical direction. The first gear 263 drives the first screw 261 to rotate, and the first gear 263 is drivenly connected to the first transmission member 28.

[0061] In other words, the first screw 261 is mounted on the first plate 231 along the first horizontal direction, and the first slider 262 is fixedly connected to the first connecting plate 212. When the first screw 261 rotates, the first slider 262 drives the first connecting plate 212 to move along the first horizontal direction, thereby causing the first adjusting member 21 to move along the first horizontal direction. It can be understood that the first gear 263 is connected to the first plate 231 via a rotating shaft, which is vertically oriented. The rotating shaft of the first gear 263 and the end of the first screw 261 are respectively provided with meshing bevel gears, thereby causing the first gear 263 to rotate and drive the first screw 261 to rotate.

[0062] For example, such as Figure 5As shown, the second drive assembly 27 includes: a second screw 271, a second slider 272, and a second gear 273. The second screw 271 is mounted on the mounting plate 23 along a second horizontal direction and is rotatable about its own axis. The second slider 272 is fixedly connected to the second adjusting member 22, and the second screw 271 passes through the second slider 272 and is threadedly engaged. The second screw 271 drives the second slider 272 to move along the second horizontal direction by rotation, thereby causing the second adjusting member 22 to move along the second horizontal direction. The second gear 273 is rotatably mounted on the mounting plate 23, and the rotation axis of the second gear 273 is set along the vertical direction. The second gear 273 drives the second screw 271 to rotate, and the second gear 273 is drivenly connected to the first transmission member 28.

[0063] In other words, the second screw 271 is mounted on the second plate 232 along the second horizontal direction, and the second slider 272 is fixedly connected to the second connecting plate 222. When the second screw 271 rotates, the second slider 272 drives the second connecting plate 222 to move along the second horizontal direction, thereby causing the second adjusting member 22 to move along the second horizontal direction. It can be understood that the second gear 273 is connected to the second plate 232 via a rotating shaft, which is vertically oriented. The rotating shaft of the second gear 273 and the ends of the second screw 271 are respectively provided with meshing bevel gears, thus causing the second gear 273 to rotate and drive the second screw 271 to rotate.

[0064] For example, such as Figure 6 As shown, the first transmission component 28 is a transmission belt with internal teeth. The first transmission component 28 is sleeved on the first gear 263 and the second gear 273, and the first gear 263 and the second gear 273 mesh with the transmission belt, thereby realizing the synchronous rotation of the first gear 263 and the second gear 273. It can be understood that, in order to avoid interference between the transmission belt and the cartridge 30, four first tensioning pulleys are also provided at the connection position of the first plate 231 and the second plate 232, so that the first transmission component 28 avoids the position of the clearance opening 233, and at the same time, it can also ensure the tight cooperation between the first transmission component 28 and the first gear 263 and the second gear 273.

[0065] It is understood that the first drive assembly 26 also includes a first motor 264, which is drivenly connected to the first gear 263 to drive the first adjusting member 21 and the second adjusting member 22 to move synchronously through the first transmission member 28.

[0066] It should be noted that in this embodiment, the first driving component 26 includes a first screw 261, a first slider 262, and a first gear 263, and the second driving component 27 includes a second screw 271, a second slider 272, and a second gear 273. However, this is not limiting. In some other embodiments not shown in the figures, the first driving component 26 may include a first screw 261, a first slider 262, and a first gear 263, or the second driving component 27 may include a second screw 271, a second slider 272, and a second gear 273. Without departing from the inventive concept and technical principles of this invention, the above-mentioned situations also fall within the protection scope of this invention.

[0067] like Figure 3 , Figure 4 and Figure 7 As shown, the lifting mechanism 40 includes: a third screw 41, a third slider 42, a second transmission component 43, and a second tensioning wheel 44. There are multiple third screws 41, each vertically mounted on the first bracket 10, and each screw 41 is rotatable around its own axis. Multiple third screws 41 are arranged around the clearance opening 233. There are multiple third sliders 42, each corresponding to one of the third screws 41. Each third slider 42 is connected to the mounting plate 23, and the third screw 41 passes through the corresponding third slider 42, driving the corresponding third slider 42 to rise or fall through rotation. The second transmission component 43 is drivingly connected to all the third screws 41, and the third screws 41 rotate synchronously through the second transmission component 43 to drive the mounting plate 23 to rise or fall.

[0068] For example, such as Figure 5 , Figure 7 and Figure 8 As shown, there are four third screws 41 and four third sliders 42. The mounting plate 23 has four mounting holes at the connection point between the first plate 231 and the second plate 232. The outer peripheral wall of the third slider 42 is fixedly connected to the inner peripheral wall of the mounting hole. Each third screw 41 corresponds to one third slider 42, and the third screw 41 passes through the corresponding third slider 42 and is threaded into it. Each third screw 41 has a transmission gear at its top. The second transmission component 43 is a transmission belt with internal teeth, which is sleeved on and meshes with the four transmission gears, thereby achieving synchronous rotation of the four third screws 41, which in turn drives the straightening mechanism 20 to rise and fall. By using a screw and slider combination to achieve the rising and falling of the straightening mechanism 20, the accuracy of the lifting and falling adjustment can be guaranteed.

[0069] It is understood that the lifting mechanism 40 also includes a second motor 45, which is driven by any third screw 41 to drive the third screw 41 to rotate, thereby realizing the lifting of the straightening mechanism 20.

[0070] like Figure 9 and Figure 11 As shown, the first bracket 10 includes: a bracket body 11, a support platform 12, a positioning part 13, and a clamping part 14. The bracket body 11 has all the accommodating spaces; the support platform 12 is disposed at the bottom of the accommodating spaces and connected to the bracket body 11, for supporting the cartridge 30; the positioning part 13 is disposed on the support platform 12, for positioning and engaging with the cartridge 30 in the horizontal direction, so that the position of the cartridge 30 corresponds to the position of the clearance opening 233; the clamping part 14 is movably disposed on the support platform 12, and the clamping part 14 has an abutting position for abutting with the cartridge 30 and a clearance position for clearance from the cartridge 30. In the abutting position, the clamping part 14 presses the cartridge 30 against the positioning part 13, so that the cartridge 30 is fixed relative to the alignment mechanism 20. By providing the positioning part 13 and the clamping part 14, it can be ensured that the position of the cartridge 30 is the same each time it is assembled, avoiding the cartridge 30 from shifting, thereby improving the accuracy of the position adjustment of the substrate 50.

[0071] For example, such as Figure 9 and Figure 10 As shown, there are two support platforms 12, with their length direction arranged along a first horizontal direction and their spacing along a second horizontal direction. The bottom of the cartridge 30 is located on both sides of the two support platforms 12 in the second horizontal direction.

[0072] Both support platforms 12 have a first end and a second end in a first horizontal direction. A positioning part 13 is fixedly disposed at the first end of one of the support platforms 12, while a clamping part 14 is movably disposed at the second end of the other support platform 12. That is, as shown... Figure 12 As shown, the positioning part 13 and the clamping part 14 are arranged diagonally.

[0073] like Figure 9 As shown, the clamping part 14 consists of two limiting posts, which are fixedly connected to the support platform 12. The two limiting posts are spaced apart from each other. One limiting post is used to abut against the cartridge 30 in the first horizontal direction and the other limiting post is used to abut against the cartridge 30 in the second horizontal direction.

[0074] like Figure 10 As shown, the clamping part 14 consists of two movable columns fixedly connected together. The clamping part 14 is driven by a cylinder 15 and moves via the cylinder 15. The moving direction of the clamping part 14 forms an angle with the first horizontal direction and the second horizontal direction, respectively. The clamping part 14 moves away from or towards the positioning part 13. One movable column of the clamping part 14 is used to abut and limit the movement of the cartridge 30 in the first horizontal direction, and the other movable column is used to abut and limit the movement of the cartridge 30 in the second horizontal direction. Figure 11As shown, when the clamping part 14 moves away from the positioning part 13, the two moving posts respectively avoid the cartridge 30 so that the cartridge 30 can move. When the clamping part 14 moves close to the positioning part 13, the two moving posts respectively abut against one side of the cartridge 30 in the first horizontal direction and one side in the second horizontal direction, thereby cooperating with the positioning part 13 to fix the cartridge 30.

[0075] Understandably, this is to facilitate the movement of the cartridge 30, such as Figure 9 and Figure 10 As shown, the support platform 12 is also equipped with casters 16, which are used to support the cartridge 30 to reduce the resistance when the cartridge 30 moves.

[0076] According to a second aspect of the present invention, a substrate storage device is also disclosed, comprising: the above-described straightening device and a cartridge 30, the cartridge 30 being disposed within a receiving space.

[0077] The cartridge 30 includes a second bracket 31 and a support structure 32. The second bracket 31 has an accommodating space for accommodating the substrate 50; a plurality of support structures 32 are arranged at intervals along the vertical direction in the accommodating space, and the support structures 32 are used to support the substrate 50.

[0078] like Figure 12 As shown, the support structure 32 includes a plurality of support ropes 321, each support rope 321 being arranged along a second horizontal direction, and both ends of each support rope 321 being connected to a second bracket 31. The plurality of support ropes 321 are spaced apart along a first horizontal direction to support the substrate 50. By providing a plurality of support ropes 321, support can be provided for the middle part of the substrate 50, thereby preventing deformation of the substrate 50.

[0079] like Figure 13 As shown, the support structure 32 further includes a tensioning member 322, which is disposed between the support rope 321 and the second bracket 31 for tensioning the support rope 321. Exemplarily, the support rope 321 has a first end and a second end. The first end of the support rope 321 is fixedly connected to the second bracket 31, and the other end of the support rope 321 extends to the outside of the second bracket 31. The tensioning member 322 is a spring, which is sleeved on the second end of the support rope 321. One end of the spring abuts against the outside of the second bracket 31, and the other end is fixedly connected to the second end of the support rope 321. The spring applies an outward force to the second end of the support rope 321 through elastic extension, thereby keeping the support rope 321 taut. This ensures the levelness of the substrate 50.

[0080] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A straightening device for adjusting the movement of a base plate (50) in a cartridge (30) to a preset position, characterized in that, The correction device includes: The first support (10) has a receiving space for accommodating the cartridge (30); A straightening mechanism (20) is disposed on the first bracket (10). The straightening mechanism (20) includes a first adjusting member (21) and a second adjusting member (22). The first adjusting member (21) is movable along a first horizontal direction and is used to adjust the position of the substrate (50) in the cartridge (30) in the first horizontal direction. The second adjusting member (22) is movable along a second horizontal direction and is used to adjust the position of the substrate (50) in the cartridge (30) in the second horizontal direction so that the substrate (50) moves to a preset position. The first horizontal direction intersects with the second horizontal direction.

2. The alignment device according to claim 1, characterized in that, The regulating mechanism (20) further includes: a mounting plate (23); The mounting plate (23) is arranged in a horizontal direction, and the mounting plate (23) is provided with a vertical through-hole (233), which is used to avoid the cartridge (30); The first adjusting member (21) is movably disposed on the mounting plate (23) along the first horizontal direction. The first adjusting member (21) is disposed adjacent to the clearance opening (233) in the first horizontal direction. The first adjusting member (21) is used to push the substrate (50) to move along the first horizontal direction by moving along the first horizontal direction and abutting against the substrate (50). The second adjusting member (22) is movably disposed on the mounting plate (23) along the second horizontal direction. The second adjusting member (22) is disposed adjacent to the clearance opening (233) in the second horizontal direction. The second adjusting member (22) is used to push the substrate (50) to move along the second horizontal direction by moving along the second horizontal direction to abut against the substrate (50).

3. The alignment device according to claim 2, characterized in that, The first adjusting member (21) is two and spaced apart in the first horizontal direction. The clearance opening (233) is located between the two first adjusting members (21). The two first adjusting members (21) move closer to or further away from each other along the first horizontal direction. By moving closer to each other, the two first adjusting members (21) adjust the substrate (50) that is offset in the first horizontal direction to a preset position; and / or The second adjustment member (22) is two and is spaced apart in the second horizontal direction. The clearance opening (233) is located between the two second adjustment members (22). The two second adjustment members (22) move closer to each other or further away from each other in the second horizontal direction. The two second adjustment members (22) adjust the substrate (50) that is offset in the second horizontal direction to a preset position by moving closer to each other.

4. The alignment device according to claim 2, characterized in that, The regulation agency (20) also includes: A first drive assembly (26) is disposed on the mounting plate (23). The first drive assembly (26) is driven to connect with the first adjustment member (21) to drive the first adjustment member (21) to move along the first horizontal direction. A second drive assembly (27) is disposed on the mounting plate (23). The second drive assembly (27) is drivenly connected to the second adjusting member (22) to drive the second adjusting member (22) to move along the second horizontal direction. The first transmission component (28) is driven to connect with the first drive assembly (26) and the second drive assembly (27) respectively, so that the first adjustment component (21) and the second adjustment component (22) move synchronously.

5. The alignment device according to claim 4, characterized in that, The first driving assembly (26) includes: a first screw (261), a first slider (262), and a first gear (263); the first screw (261) is disposed on the mounting plate (23) along the first horizontal direction, and the first screw (261) is rotatable about its own axis; the first slider (262) is fixedly connected to the first adjusting member (21), the first screw (261) passes through the first slider (262) and is threadedly engaged, the first screw (261) drives the first slider (262) to move along the first horizontal direction by rotation, so that the first adjusting member (21) moves along the first horizontal direction; the first gear (263) is rotatably disposed on the mounting plate (23), the rotation axis of the first gear (263) is disposed along the vertical direction, the first gear (263) drives the first screw (261) to rotate, and the first gear (263) is drivenly connected to the first transmission member (28); and / or The second drive assembly (27) includes: a second screw (271), a second slider (272), and a second gear (273). The second screw (271) is disposed on the mounting plate (23) along the second horizontal direction and is rotatable about its own axis. The second slider (272) is fixedly connected to the second adjusting member (22). The second screw (271) passes through the second slider (272) and is threadedly engaged. The second screw (271) drives the second slider (272) to move along the second horizontal direction by rotation, so that the second adjusting member (22) moves along the second horizontal direction. The second gear (273) is rotatably disposed on the mounting plate (23). The rotation axis of the second gear (273) is disposed along the vertical direction. The second gear (273) drives the second screw (271) to rotate. The second gear (273) is drivenly connected to the first transmission member (28).

6. The alignment device according to claim 2, characterized in that, The regulation agency (20) also includes: A first sliding assembly (24) is disposed on the mounting plate (23) along the first horizontal direction, and a first adjusting member (21) is connected to the first sliding assembly (24) so ​​that the first adjusting member (21) moves relative to the mounting plate (23) along the first horizontal direction; A second sliding assembly (25) is disposed on the mounting plate (23) along the second horizontal direction, and a second adjusting member (22) is connected to the second sliding assembly (25) so that the second adjusting member (22) moves relative to the mounting plate (23) along the second horizontal direction.

7. The alignment device according to claim 1, characterized in that, Both the first adjusting member (21) and the second adjusting member (22) have a contact portion (29) for contacting the substrate (50); The first adjusting member (21) has at least two abutting portions (29) which are spaced apart along the second horizontal direction; The abutting portion (29) on the second adjusting member (22) is at least two and is spaced apart along the first horizontal direction.

8. The alignment device according to claim 7, characterized in that, The contact part (29) is a roller.

9. The alignment device according to claim 2, characterized in that, The correction device also includes: A lifting mechanism (40) is mounted on the first bracket (10), and the alignment mechanism (20) is connected to the lifting mechanism (40). The lifting mechanism (40) is used to drive the alignment mechanism (20) to lift and lower, so that the alignment mechanism (20) corresponds to the base plate (50) at different height positions in the cassette (30).

10. The alignment device according to claim 9, characterized in that, The lifting mechanism (40) includes: Multiple third screws (41) are provided, each of which is arranged on the first bracket (10) along the vertical direction. Each third screw (41) is rotatable about its own axis. Multiple third screws (41) are arranged around the clearance opening (233). Multiple third sliders (42) are provided one-to-one with the third screw (41). Each third slider (42) is connected to the mounting plate (23). The third screw (41) passes through the corresponding third slider (42) and drives the corresponding third slider (42) to rise and fall by rotating. The second transmission component (43) is driven to connect with all the third screws (41), and the third screws (41) rotate synchronously through the second transmission component (43) to drive the mounting plate (23) to rise and fall.

11. The alignment device according to claim 2, characterized in that, The first support (10) includes: The support body (11) has all the accommodating spaces; A support platform (12) is disposed at the bottom of the accommodating space and connected to the bracket body (11) for supporting the cartridge (30); A positioning part (13) is provided on the support platform (12) for positioning and cooperating with the cartridge (30) in the horizontal direction so that the position of the cartridge (30) corresponds to the position of the clearance opening (233); A clamping part (14) is movably disposed on the support platform (12). The clamping part (14) has an abutting position for abutting the cartridge (30) and a clearance position for avoiding the cartridge (30). In the abutting position, the clamping part (14) abuts the cartridge (30) against the positioning part (13) so that the cartridge (30) is fixed relative to the straightening mechanism (20).

12. A substrate storage device, characterized in that, include: The straightening device and cartridge (30) according to any one of claims 1 to 11, wherein the cartridge (30) is disposed within the receiving space.

13. The substrate storage device according to claim 12, characterized in that, The cartridge (30) includes: The second support (31) has an internal accommodating space for accommodating the substrate (50); Multiple support structures (32) are arranged at intervals in the accommodating space along the vertical direction, and the support structures (32) are used to support the substrate (50).

14. The substrate storage device according to claim 13, characterized in that, The support structure (32) includes: Multiple support ropes (321) are provided, each of which is arranged along the first horizontal direction and both ends of each of which are connected to the second bracket (31). The multiple support ropes (321) are spaced apart along the second horizontal direction to support the base plate (50).

15. The substrate storage device according to claim 14, characterized in that, The support structure (32) also includes: A tensioning element (322) is disposed between the support rope (321) and the second bracket (31) for tensioning the support rope (321).

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