Translation door system of vacuum equipment
By employing a sliding door system in vacuum equipment, and utilizing the cooperation of guide rails, rollers, and filling blocks, precise closing and opening of vacuum equipment doors are achieved, optimizing space utilization, enhancing flexibility, and solving the problem of large space occupation for vacuum equipment door operation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-23
- Publication Date
- 2026-03-24
AI Technical Summary
The doors of vacuum equipment occupy a large amount of space when operated, which affects the space utilization rate of the front of the vacuum chamber.
The sliding door system includes guide rails, sliding doors, and rollers. It utilizes positioning grooves and filling blocks, and achieves precise closing and opening of the sliding door through reset components and fixing assemblies. Combined with telescopic rods and conversion channels, the movement path of the sliding door is optimized.
It reduces the space occupied by the sliding door during operation, improves the space utilization of the front of the vacuum chamber, and enhances the flexibility and applicability of the sliding door.
Smart Images
Figure CN121719447A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of vacuum equipment, and in particular to a sliding door system for vacuum equipment. Background Technology
[0002] Vacuum technology is an important engineering technology with wide applications in many fields. For example, in the semiconductor industry, processes such as vapor deposition need to be carried out in a vacuum environment; in the aerospace industry, specially designed equipment for testing in vacuum environments is required to ensure that spacecraft operate normally under extreme conditions; in the medical device field, medical devices such as MRI scanners and radioisotope therapy need to operate in a high vacuum environment, and so on.
[0003] Vacuum equipment is often known for its large size. In traditional vacuum equipment, the sealing doors are mostly hinged, meaning that rotary door seals are the primary method. Rotary seals occupy space on the front of the vacuum chamber during opening and closing, requiring a significant amount of space to be left there. Another method uses an automatic trolley that moves along the front of the vacuum chamber to advance the seal. This requires not only sufficient space for the trolley to move but also sufficient operational space between the trolley and the vacuum chamber, which greatly impacts the utilization of the space on the front of the vacuum chamber.
[0004] Regarding the aforementioned technologies, the doors of vacuum equipment require a relatively large amount of space to operate. Summary of the Invention
[0005] To improve space utilization, this application provides a sliding door system for vacuum equipment.
[0006] This application provides a sliding door system for vacuum equipment, adopting the following technical solution: A sliding door system for a vacuum equipment includes a guide rail and a sliding door slidably mounted on the guide rail. The guide rail is fixedly mounted on the vacuum chamber. The sliding door includes a door panel and two rollers. Each roller is rotatably connected to a rotating shaft. The rollers are located inside the guide rail, and the rotating shaft extends out of the guide rail and is fixedly connected to the door panel. When the rollers slide along the guide rail, a gap is maintained between the rotating shaft and the guide rail. Positioning grooves are provided on the guide rail, with each roller corresponding to a positioning groove. Filler blocks are installed in the positioning grooves of the guide rail, and the filler blocks are fitted against the inner wall of the positioning grooves. A connection is provided between the two filler blocks. The connecting rod has a connecting groove in the guide rail for connecting the two positioning grooves. The connecting rod is located in the connecting groove. A slider is rotatably connected to the middle of the connecting rod. The slider slides up and down on the guide rail. When the two filling blocks are simultaneously subjected to a downward force, the filling blocks and the positioning grooves form a sliding contact relationship. The filling blocks and the slider move downward until the rotating shaft abuts against the guide rail. A reset component is installed in the guide rail to drive the filling blocks to always have an upward movement tendency. The sliding door is equipped with a sealing ring. The system also includes a fixing component for driving the sealing ring to fit against the vacuum chamber door frame.
[0007] By adopting the above technical solution, the guide rail guides the sliding door. The positioning grooves and rollers on the guide rail correspond one-to-one. When the sliding door slides into the first positioning groove along the guide rail, the filling block in the positioning groove is subjected to part of the weight of the roller and the sliding door. However, since the two filling blocks are rotatably connected, when one filling block is subjected to downward pressure, the other filling block is not subjected to downward pressure, and both filling blocks remain stationary. The roller can smoothly pass through the non-corresponding positioning grooves. When the two rollers roll into the corresponding positioning grooves, the two filling blocks are simultaneously subjected to downward force. The filling blocks slide downward while moving the slider downward, and the sliding door sinks close to the vacuum chamber door frame. The sealing ring can fit against the vacuum chamber door frame. The positioning groove and filling block play a positioning role for the sliding door, so that the sliding door can accurately seal the vacuum chamber. The sliding door is then fixed by the fixing components, so that the sealing ring fits against the vacuum chamber door frame. When the vacuum is drawn, the sliding door is attracted, achieving a completely sealed state. After the work is completed, the vacuum chamber is vented. After the venting, the sliding door will not be attracted by the vacuum chamber due to the pressure difference. The control fixing component will no longer fix the sliding door. When the sliding door is manually lifted to make the roller leave the positioning groove, the roller can move along the guide rail, so that the sliding door can slide open. The reset component drives the filling block to reset, waiting for the next time to cooperate with the roller. The process of opening or closing the sliding door of the vacuum chamber does not take up much space, and the movement of the sliding door does not affect the utilization rate of the front space of the vacuum chamber.
[0008] Optionally, the fixing assembly includes a vacuum chamber back plate and a sliding door back plate rotatably mounted on the vacuum chamber back plate. The vacuum chamber back plate includes a fixed plate and a rotating plate. The fixed plate is fixedly mounted on the outer wall of the vacuum chamber. One end of the rotating plate is rotatably connected to the vacuum chamber back plate, and the other end of the rotating plate is rotatably connected to the sliding door back plate. The fixing assembly also includes a push-pull rod and an abutment plate. The push-pull rod is threaded onto the sliding door back plate, and the abutment plate is rotatably mounted on one end of the push-pull rod.
[0009] By adopting the above technical solution, the design of the rotating plate allows the back panel of the sliding door to rotate away from the sliding door, making way for the sliding door to move. Alternatively, the back panel of the sliding door can be rotated to be parallel to the sliding door, and then the push-pull rod can be rotated to make the abutment plate press against the sliding door, thereby driving the sealing ring on the sliding door to fit tightly against the vacuum chamber door frame.
[0010] Optionally, two round rods are rotatably mounted on the filling block, with the round rods partially embedded inside the filling block. When the roller slides into the filling block, the two round rods are tangent to the roller.
[0011] By adopting the above technical solution, when the roller enters the positioning groove and contacts the filling plate, the round rod can increase the friction of the roller. It also plays a certain limiting role for the roller, thereby informing the operator that the roller has entered the positioning groove. When both rollers have entered the corresponding positioning grooves, the operator can also pull down the sliding door to assist the sliding door in sinking.
[0012] Optionally, the pivot of the sliding door is a telescopic rod, which includes an inner rod and an outer rod. One end of the inner rod is inserted into the outer rod, and the outer rod is fixedly installed on the sliding door. The roller is rotatably installed on the inner rod.
[0013] By adopting the above technical solution, the telescopic rod also increases the movement direction of the sliding door, allowing the sliding door to move not only along the length of the guide rail, but also towards or away from the vacuum chamber. When the sliding door is not yet in place to close the vacuum chamber, the sealing ring of the sliding door does not contact the vacuum chamber door frame as the sliding door sinks. After the sliding door sinks into place, it is pushed towards the vacuum chamber, so that the sealing ring fits against the vacuum chamber door frame, reducing the friction between the sealing ring and the vacuum chamber door, thereby protecting the sealing ring.
[0014] Optionally, a telescopic rod is also installed on the part of the sliding door near the vacuum chamber door frame. A ball bearing is rolled on the inner end of the telescopic rod away from the outer end of the telescopic rod, and the ball bearing is in contact with the vacuum chamber door frame.
[0015] By adopting the above technical solution, the addition of the telescopic rod enhances the connection between the sliding door and the vacuum chamber door frame, enabling the sliding door to maintain an indirect connection with the vacuum chamber even when it is far away from it, thereby enhancing the stability of the sliding door during actual operation. The ball bearings reduce the friction between the telescopic rod and the vacuum chamber door frame.
[0016] Optionally, the inner rod on which the ball is mounted is provided with a compression spring, one end of which abuts against the ball.
[0017] By adopting the above technical solution, the compression spring allows the ball bearing to move closer to the telescopic rod. The distance between the sliding door and the vacuum chamber can be finely adjusted through the design of the ball bearing and the compression spring. If the sliding door is very close to the vacuum chamber door frame, it is only necessary to drive the ball bearing closer to the vacuum chamber through the compression spring, without having to specially lengthen the telescopic rod.
[0018] Optionally, the guide rail includes a bend, and the two ends of the guide rail are not on the same horizontal plane.
[0019] By adopting the above technical solution, the telescopic rod can change the distance between the sliding door and the vacuum chamber, and also increase the flexibility of the sliding door when it slides on the guide rail. When the sliding door slides to the turning part of the guide rail, the length of the telescopic rod can be extended to increase the distance between the sliding door and the guide rail, so that the sliding door can smoothly slide through the turning part. The sliding door can be closed to vacuum chambers facing different directions.
[0020] Optionally, the guide rail has multiple sliding doors, and the system also includes a conversion channel and a conversion track. The conversion channel is located above the guide rail, and a first through groove is provided at the bottom of the conversion channel. A second through groove is provided on the side wall of the conversion channel. The roller enters the conversion channel through the first through groove. The conversion channel and the conversion track are connected through the second through groove. The conversion track and the conversion channel are arranged in parallel. The conversion track has a clearance groove for the roller's shaft to enter.
[0021] By adopting the above technical solution, multiple sliding doors close their corresponding vacuum chambers by being guided by guide rails. When the vacuum chamber in the middle needs to be opened, the sliding door needs to move parallel to the guide rail to leave the vacuum chamber. The sliding door moves between two vacuum chambers. If two adjacent vacuum chambers are very close, the middle sliding door can move upward into the conversion channel and then move into the conversion track. The movement of the sliding door into the conversion track and the track on the guide rail do not interfere with each other, thereby further saving the operating space of the sliding door and appropriately reducing the distance between two adjacent vacuum chambers.
[0022] In summary, this application includes at least one of the following beneficial effects: 1. By optimizing the fit structure between the sliding door and the guide rail and the vacuum chamber door frame, the space occupied by the sliding door during opening or closing can be reduced; 2. When multiple sliding doors slide on a single guide rail, the design of the conversion channel and conversion track can reduce the length of the guide rail and appropriately reduce the distance between two adjacent vacuum chambers, thereby further reducing the space occupied by the sliding doors; 3. The curved section design of the guide rail enables the sliding door system to adapt to more complex vacuum chamber structures, improving the flexibility and applicability of the sliding door. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application; Figure 2 This is a side sectional view of an embodiment of this application showing the roller located within the guide rail; Figure 3 This is a side cross-sectional view illustrating the contact between the roller and the filler block in an embodiment of this application; Figure 4 This is a front cross-sectional view illustrating the contact between the roller and the filler block in an embodiment of this application; Figure 5 This is a perspective view illustrating the contact between the roller and the filler block in an embodiment of this application; Figure 6 This is a schematic diagram illustrating the cooperation between the fixed components and the sliding door in an embodiment of this application; Figure 7 This is a schematic diagram illustrating the specific structure of the side that is moved closer to the vacuum chamber in an embodiment of this application; Figure 8 This is a cross-sectional view illustrating the mounting structure of the ball and compression spring in an embodiment of this application; Figure 9 This is a perspective view illustrating that the two sliding doors are located in the guide rail and the conversion rail, respectively, according to an embodiment of this application. Figure 10 This is a side view of an embodiment of the present application showing two sliding doors located in the guide rail and the conversion rail, respectively.
[0024] Explanation of reference numerals in the attached drawings: 10, vacuum chamber; 100, guide rail; 110, guide groove; 120, positioning groove; 130, filling block; 131, round rod; 140, connecting rod; 150, connecting groove; 160, slider; 170, guide bar; 180, return spring; 190, vertical rod; 200, sliding door; 210, door panel; 211, sealing part; 212, connecting part; 213, observation window; 220, roller; 221, rotating shaft; 2 30. Sealing ring; 240. Compression spring; 250. Ball bearing; 300. Fixing assembly; 310. Vacuum chamber back plate; 311. Fixing plate; 312. Rotating plate; 320. Sliding door back plate; 330. Push-pull rod; 331. Handle; 340. Abutment plate; 400. Conversion channel; 410. First through groove; 420. Second through groove; 500. Conversion track; 510. Clearance groove; 520. Long groove; 600. Support cylinder. Detailed Implementation
[0025] The following is in conjunction with the appendix Figure 1-10 This application will be described in further detail.
[0026] This application discloses a sliding door system for a vacuum device. (See also...) Figure 1 A sliding door system for a vacuum device is installed on the vacuum device. The sliding door system includes a guide rail 100 and a sliding door 200 slidably mounted on the guide rail 100. The guide rail 100 is fixedly mounted on the vacuum chamber 10. The sliding door 200 includes a door panel 210 and rollers 220. The door panel 210 includes a sealing part 211 and a connecting part 212, which are integrally formed. The vertical cross-section of the door panel 210 is Z-shaped, and the sealing part 211 and the connecting part 212 are not on the same horizontal plane. The sealing part 211 is used to seal the vacuum chamber 10 and has an observation window 213. The rollers 220 are rotatably mounted on the connecting part 212 of the door panel 210 via a pivot 221. Two rollers 220 are provided, spaced apart. The roller 220 extends into the guide rail 100 and is rotatably mounted in the guide groove 110 of the guide rail 100. There is a gap between the rotating shaft 221 and the guide rail 100.
[0027] Reference Figure 3 and Figure 4 The bottom of the guide groove 110 of the guide rail 100 is provided with a positioning groove 120, and two positioning grooves 120 are provided corresponding to the rollers 220. A filler block 130 is installed in the positioning groove 120 of the guide rail 100. The filler block 130 has a rectangular structure and its four sides are in contact with the inner wall of the positioning groove 120. The filler block 130 can slide up and down in the positioning groove 120. A connecting rod 140 is connected between the two filler blocks 130. A connecting groove 150 is provided in the guide rail 100 to connect the two positioning grooves 120, and the connecting rod 140 is located in the connecting groove 150.
[0028] Reference Figure 4 and Figure 5 A slider 160 is rotatably connected to the middle of the connecting rod 140. A vertical guide bar 170 is fixedly installed on the inner wall of the guide rail 100 and the connecting groove 150. The slider 160 has a U-shaped cross-section, and the guide bar 170 has a rectangular cross-section. The guide bar 170 is inserted into the slider 160, and the slider 160 slides up and down within the guide bar 170. There is friction between the slider 160 and the guide bar 170, and force needs to be applied for the slider 160 to slide along the guide bar 170.
[0029] Reference Figure 4 When the sliding door 200 slides along the guide rail 100 from left to right, when the right-hand roller 220 passes through the first positioning groove 120, the upper surface of the filling block 130 is flush with the bottom of the guide groove 110, and the roller 220 contacts the upper surface of the filling block 130, exerting downward pressure on the filling block 130. However, the filling block 130 is restricted by another filling block 130 through the connecting rod 140, and the other filling block 130 is not subjected to downward pressure. Therefore, the filling block 130 pressed down by the roller 220 is not easy to sink, and the roller 220 passes through the filling block 130 at a certain speed, so the roller 220 can smoothly pass through the first positioning groove 120. When the right-hand roller 220 enters the second positioning groove 120, the left-hand roller 220 enters the first positioning groove 120. Two rollers 220 simultaneously press down on the filling blocks 130, and also support the weight of the sliding door 200. The rollers 220 drive the two filling blocks 130 downwards simultaneously, and the slider 160 slides downwards along the guide strip 170, causing the rollers 220 to partially enter the positioning groove 120. The rollers 220 stop moving downwards after the rotating shaft 221 contacts the guide rail 100. Through dimensional design, when the sliding door 200 enters the positioning groove 120, it sinks towards the vacuum chamber 10 until the rotating shaft 221 and guide rail 100 abut. After the sliding door 200 sinks into place, it seals the vacuum chamber 10. The design of the positioning groove 120 and the filling blocks 130 plays a crucial role in accurately sealing the vacuum chamber 10 with the sliding door 200.
[0030] Reference Figure 4A reset element, a reset spring 180, is installed inside the guide rail 100 to drive the filling block 130 to always move upward. The reset spring 180 rebounds when compressed. The reset spring 180 is fixedly installed on the bottom of the positioning groove 120, and its upper end is fixedly connected to the filling block 130. Multiple reset springs 180 are provided, and some reset springs 180 form a mating relationship with the connecting rod 140. A vertical rod 190 is fixedly connected to the filling block 130 and the connecting rod 140 for the reset spring 180 to fit onto. The vertical rod 190 guides the reset spring 180 and the filling block 130. The lower end of the vertical rod 190 is inserted into the guide rail 100, which has an insertion hole communicating with the positioning groove 120. The lower end of the vertical rod 190 is inserted into the insertion hole, always maintaining a gap between it and the bottom of the insertion hole. When the sliding door 200 closes the vacuum chamber 10, the reset spring 180 is in a compressed state. When the sliding door 200 moves upward to open the vacuum chamber 10, the reset spring 180 drives the filling block 130 to reset, and the upper surface of the filling block 130 continues to be flush with the bottom surface of the guide groove 110.
[0031] Reference Figure 4 and Figure 5 Two round rods 131 are rotatably mounted on the filling block 130, with parts of the rods 131 embedded within the filling block 130. When the roller 220 slides into the filling block 130, the two round rods 131 are tangent to the roller 220, and the round rods 131 can position the roller 220, ensuring that the roller 220 is accurately positioned on the filling block 130. When only one roller 220 is in contact with the filling block 130, a slight force is needed to push the sliding door 200 to move the roller 220 away from the filling block 130. When both rollers 220 are positioned on their respective filling blocks 130, the rollers 220 press down on the filling blocks 130, and the sliding door 200 sinks towards the vacuum chamber 10.
[0032] Reference Figure 6The sliding door system also includes a fixing assembly 300 for keeping the sliding door 200 in a closed vacuum chamber 10 state. The fixing assembly 300 includes a vacuum chamber back plate 310 and a sliding door back plate 320 rotatably mounted on the vacuum chamber back plate 310. The vacuum chamber back plate 310 includes a fixing plate 311 and a rotating plate 312. The fixing plate 311 is fixedly mounted on the side wall of the vacuum chamber 10. The rotating plate 312 is a long strip, with one end of the rotating plate 312 rotatably mounted to the fixing plate 311 along its length, and the other end of the rotating plate 312 rotatably mounted on the sliding door back plate 320. The rotation center of the rotating plate 312 and the rotation center of the sliding door back plate 320 are parallel to each other. The fixing assembly 300 also includes a push-pull rod 330 and an abutment plate 340. The push-pull rod 330 is threaded onto the sliding door back plate 320, and the abutment plate 340 is rotatably mounted on one end of the push-pull rod 330. The other end of the push-pull rod 330 is connected to a handle 331. The sliding door back panel 320 is rotated until it is parallel to the sliding door 200. The push-pull rod 330 is rotated by the handle 331, and the abutment plate 340 drives the sliding door 200 to be pressed together. Each sliding door 200 has four sets of fixing components 300, so that the sealing rings 230 of the sliding door 200 are all pressed against the door frame of the vacuum chamber 10.
[0033] Reference Figure 7 Once the vacuum process begins, the sliding door 200 will be drawn in by the pressure difference, achieving a complete seal. Operators can then observe the process through the observation window 213. An electron gun mounting position (not shown in the figure) is located in the center of the inner surface of the sliding door 200. The installation of the electron gun is existing technology and will not be elaborated upon in this embodiment. The electron gun's role in vacuum coating is to heat metal or non-metal materials, causing them to evaporate and form a thin film on the substrate surface.
[0034] Reference Figure 7 The electron gun may slightly protrude from the inner surface of the sliding door 200. To avoid interfering with the installation of the electron gun and the normal movement of the sliding door 200, the sliding door 200 is equipped with multiple telescopic rods, including an outer rod and an inner rod, with the inner rod slidably installed inside the outer rod. The pivot 221 of the sliding door 200, which is used to rotatably connect with the roller 220, is also a telescopic rod, with the roller 220 rotatably installed on the inner rod. The telescopic rods increase the movement direction of the sliding door 200, allowing it to move towards or away from the vacuum chamber 10.
[0035] Reference Figure 7 and Figure 8Other telescopic rods are installed on the inner surface of the sliding door 200 near the vacuum chamber 10. The outer rod is embedded in the sliding door 200. The inner rod is equipped with a compression spring 240 and a ball bearing 250. The inner rod has a receiving groove for accommodating the compression spring 240 and the ball bearing 250. The spring and the ball bearing 250 cooperate with each other. The ball bearing 250 is rotatably mounted on the inner rod and partially extends out of the inner rod.
[0036] The ball bearing 250 makes rolling contact with the vacuum chamber 10 door frame. Since a sealing ring 230 is installed on the inner surface of the sliding door 200, friction will occur if the sealing ring 230 contacts the vacuum chamber 10 door frame when the sliding door 200 descends. The telescopic rod and compression spring 240 ensure a gap between the sealing ring 230 and the vacuum door frame when the sliding door 200 is not yet closed to the vacuum chamber 10, reducing friction between the sealing ring 230 and the vacuum chamber 10.
[0037] Before the sliding door 200 is fixed in a fixed state by the fixing component 300 to close the vacuum equipment, most of the inner rod slides out of the outer rod, leaving a gap between the sliding door 200 and the vacuum chamber 10. However, the roller 220 is still located inside the guide rail 100, and the ball bearing 250 is in contact with the door frame of the vacuum chamber 10. After the sliding door 200 sinks into place, it is pushed closer to the vacuum chamber 10 to make the sealing ring 230 fit against the door frame of the vacuum chamber 10.
[0038] Reference Figure 1 Multiple sliding doors 200 can slide on the guide rail 100, each corresponding to a chamber of a vacuum device. To further save space occupied by the multiple sliding doors 200, the guide rail 100 may have a bend, and the two ends of the guide rail 100 are not on the same horizontal plane, allowing the sliding doors 200 to close facing different vacuum chambers 10. The telescopic rod also provides a gap between the sliding doors 200, the guide rail 100, and the vacuum chambers 10, allowing the sliding doors 200 to move more smoothly when turning. Reference Figure 9 and Figure 10The sliding door system also includes a conversion channel 400 and a conversion track 500. The conversion channel 400 is located above the guide rail 100. The lower end of the conversion channel 400 is fixedly connected to the guide rail 100, and the upper sidewall of the conversion channel 400 is fixedly connected to the conversion track 500. The conversion channel 400 has a first through groove 410 for the roller 220 to enter. The conversion track 500 and the conversion channel 400 are arranged parallel to each other. The conversion track 500 has a clearance groove 510 for the pivot 221 to enter, and a long groove 520 for the pivot 221 to move along the conversion track 500. The long groove 520 extends along the length direction of the conversion track 500. The conversion channel 400 has a second through groove 420, and the conversion channel 400 and the conversion track 500 are connected through the second through groove 420. The roller 220 enters the conversion track 500 from the conversion channel 400 through the second through groove 420. The conversion track 500 and the guide rail 100 are the same length in both directions.
[0039] To ensure the sliding door 200 moves upwards and accurately enters the conversion channel 400, the first through slot 410 of the conversion channel 400 is located directly above the positioning slot 120. After the sliding door 200 moves upwards away from the positioning slot 120, it continues to move upwards and enters the first through slot 410. Then, the sliding door 200 is pulled away from the front of the vacuum chamber 10, allowing it to enter the conversion track 500.
[0040] When there are multiple vacuum chambers, if you want to open the middle vacuum chamber, you can push the sliding door 200 upwards to let the sliding door 200 enter the conversion channel 400, and then push the sliding door 200 into the conversion track 500 so that the sliding door 200 can move along the conversion track 500. The two sliding doors 200 can be placed side by side.
[0041] To reduce labor costs, a support cylinder 600 can be installed to push the sliding door 200 upward. The support cylinder 600 is mounted on the ground. When the support cylinder 600 is activated, the piston rod pushes the sliding door 200 upward, allowing it to leave the positioning groove 120 or enter the conversion channel 400. Alternatively, a sliding cylinder (not shown in the figure) can be installed in the rotating channel. The piston rod of the sliding cylinder pushes the sliding door 200 into the conversion track 500, thus making the movement of the sliding door 200 less strenuous.
[0042] The implementation principle of the sliding door system of the vacuum equipment in this application embodiment is as follows: The guide rail 100 guides the sliding door 200. When the sliding door 200 slides along the guide rail 100 into the first positioning groove 120, the filling block 130 in the positioning groove 120 is supported by the roller 220 and part of the weight of the sliding door 200. However, since the two filling blocks 130 are rotatably connected, when one filling block 130 is subjected to downward pressure, the other filling block 130 is not subjected to downward pressure, and both filling blocks 130 remain stationary. The roller 220 moves forward at a certain speed. When the two rollers 220 roll into the corresponding positioning grooves 120 respectively, the two filling blocks 130 are simultaneously subjected to a downward force. As the two filling blocks 130 slide downward, they also move the slider 160 downward. The sliding door 200 sinks down and approaches the door frame of the vacuum chamber 10. The sealing ring 230 fits against the door frame of the vacuum chamber 10. The positioning grooves 120 and filling blocks 130 play a positioning role for the sliding door 200, so that the sliding door 200 can accurately seal the vacuum chamber 10. Rotate the sliding door back panel 320, rotate the push-pull rod 330 to make the abutment plate 340 press against the sliding door back panel 320, and make the sealing ring 230 of the sliding door 200 press against the door frame of the vacuum chamber 10; After the work is completed, the vacuum chamber 10 is vented. After venting, the sliding door 200 will not be attracted by the vacuum chamber 10 due to the pressure difference. The control fixing component 300 will no longer fix the sliding door 200. When the sliding door 200 is manually lifted to make the roller 220 leave the positioning groove 120, the roller 220 can move along the guide rail 100, so that the sliding door 200 moves to the side along the track. The reset component drives the filling block 130 to reset, waiting for the next cooperation with the roller 220. If two adjacent vacuum chambers 10 are very close together, the operation of opening the middle sliding door 200 is as follows: first move it upward into the conversion channel 400, and then pull the sliding door 200 into the conversion track 500. The movement of the sliding door 200 into the conversion track 500 does not interfere with the track on the guide rail 100. The distance between two adjacent vacuum chambers 10 can be appropriately reduced, thereby further saving the operating space of the sliding door 200.
[0043] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A sliding door system for a vacuum equipment, characterized in that: The system includes a guide rail (100) and a sliding door (200) slidably mounted on the guide rail (100). The guide rail (100) is fixedly mounted on the vacuum chamber (10). The sliding door (200) includes a door panel (210) and two rollers (220). Each roller (220) is rotatably connected to a rotating shaft (221). The rollers (220) are located inside the guide rail (100), and the rotating shaft (221) extends out of the guide rail (100) and onto the door. The plate (210) is fixedly connected. When the roller (220) slides along the guide rail (100), there is a gap between the rotating shaft (221) and the guide rail (100). The guide rail (100) is provided with a positioning groove (120). The roller (220) and the positioning groove (120) correspond one-to-one. A filling block (130) is installed in the positioning groove (120) of the guide rail (100). The filling block (130) fits against the inner wall of the positioning groove (120). The two filling blocks ( A connecting rod (140) is connected between the two positioning slots (130). A connecting groove (150) is provided in the guide rail (100) to connect the two positioning slots (120). The connecting rod (140) is located in the connecting groove (150). A slider (160) is rotatably connected to the middle of the connecting rod (140). The slider (160) slides up and down on the guide rail (100). When the two filling blocks (130) are simultaneously subjected to a downward force, the filling block (130) and the positioning slot... (120) A sliding contact relationship is formed, the filling block (130) and the slider (160) move downwards until the rotating shaft (221) abuts against the guide rail (100), the guide rail (100) is equipped with a reset member that drives the filling block (130) to always have an upward moving tendency, the sliding door (200) is equipped with a sealing ring (230), and the system also includes a fixing component (300) for driving the sealing ring (230) to fit against the door frame of the vacuum chamber (10).
2. The sliding door system of the vacuum equipment according to claim 1, characterized in that: The fixing assembly (300) includes a vacuum chamber back plate (310) and a sliding door back plate (320) rotatably mounted on the vacuum chamber back plate (310). The vacuum chamber back plate (310) includes a fixing plate (311) and a rotating plate (312). The fixing plate (311) is fixedly mounted on the outer wall of the vacuum chamber (10). One end of the rotating plate (312) is rotatably connected to the vacuum chamber back plate (310), and the other end of the rotating plate (312) is rotatably connected to the sliding door back plate (320). The fixing assembly (300) also includes a push-pull rod (330) and an abutment plate (340). The push-pull rod (330) is threaded onto the sliding door back plate (320), and the abutment plate (340) is rotatably mounted on one end of the push-pull rod (330).
3. The sliding door system of the vacuum equipment according to claim 1, characterized in that: Two round rods (131) are rotatably mounted on the filling block (130). The round rods (131) are partially embedded in the filling block (130). When the roller (220) slides into the filling block (130), the two round rods (131) and the roller (220) are tangent.
4. The sliding door system of the vacuum equipment according to claim 1, characterized in that: The pivot (221) of the sliding door (200) is a telescopic rod, which includes an inner rod and an outer rod. One end of the inner rod is inserted into the outer rod, and the outer rod is fixedly installed on the sliding door (200). The roller (220) is rotatably installed on the inner rod.
5. The sliding door system of the vacuum equipment according to claim 4, characterized in that: The sliding door (200) near the door frame of the vacuum chamber (10) is also equipped with a telescopic rod. The inner rod of the telescopic rod is rolled with a ball bearing (250) at the end away from the outer rod. The ball bearing (250) is in contact with the door frame of the vacuum chamber (10).
6. The sliding door system of the vacuum equipment according to claim 5, characterized in that: The inner rod on which the ball (250) is mounted is provided with a compression spring (240), one end of which abuts against the ball (250).
7. The sliding door system of the vacuum equipment according to claim 4, characterized in that: The guide rail (100) includes a turning section, and the two ends of the guide rail (100) are not on the same horizontal plane.
8. The sliding door system of the vacuum equipment according to claim 7, characterized in that: The guide rail (100) has multiple sliding doors (200) that slide on it. The system also includes a conversion channel (400) and a conversion track (500). The conversion channel (400) is located above the guide rail (100). A first through groove (410) is provided at the bottom of the conversion channel (400). A second through groove (420) is provided on the side wall of the conversion channel (400). The roller (220) enters the conversion channel (400) through the first through groove (410). The conversion channel (400) and the conversion track (500) are connected through the second through groove (420). The conversion track (500) and the conversion channel (400) are arranged in parallel. The conversion track (500) has a clearance groove (510) for the roller (220) to enter.