Vertical glass detection equipment

Abstract

The invention provides vertical glass detection equipment, which comprises an air floatation bearing plate, a bearing base, a detection mechanism and at least one switching mechanism, and is characterized in that the air floatation bearing plate is obliquely arranged and is used for bearing the side surface of glass; the bearing base is arranged below the air floatation bearing plate and is used for bearing the bottom edge of the glass; the detection mechanism comprises a detection guide part, an image acquisition part and a detection moving part, and the detection moving part drives the image acquisition part to move along the detection guide part; the inclination angle of the detection guide piece is the same as that of the air floatation bearing plate; the switching mechanism comprises a telescopic switching supporting rod, and the switching supporting rod is used for abutting against the side face of the glass and driving the glass to incline till the inclination angle of the switching supporting rod is the same as the inclination angle of the air floating bearing plate. According to the vertical glass detection equipment provided by the invention, the glass can be stably put in and placed, the image acquisition component is kept to be stably focused on the detection target surface in the detection process, and the detection quality and the detection efficiency are improved.

Description

Technical Field

[0001] This invention relates to the field of glass processing technology, and in particular to a vertical glass inspection device. Background Technology

[0002] High-purity quartz glass substrates (clear glass) are transparent glass substrates made of ultra-high purity silicon dioxide. They possess high optical transmittance, a low coefficient of thermal expansion, and excellent heat resistance, making them suitable as substrates for photomasks. They also have wide applications in other optical components and semiconductor fields. Chrome-plated photomask substrates (chrome-plated plates) are used for... Microfabrication Hard photomask materials used in photomask fabrication belong to Photomask substrate It features high photosensitivity, high resolution, and low defect density.

[0003] Surface defects on glass substrates and mask substrates can affect photoresist coating and etching, or cause exposure errors, leading to a decline in the quality of the final product. Therefore, defect detection is essential for quality assurance, especially for large-size substrates. Moving large-size glass and inspecting the entire area is challenging, and it's crucial to prevent dust and impurities from contaminating the glass during inspection. This places higher demands on the inspection equipment, which existing glass inspection devices struggle to meet. Summary of the Invention

[0004] To address the technical problems existing in current glass inspection devices, this invention provides a vertical glass inspection device. The vertical glass inspection device provided by this application ensures that the glass is placed smoothly and stably, and maintains the image acquisition component in focus on the target surface during the inspection process, thereby improving inspection quality and efficiency.

[0005] A vertical glass testing device includes: an air flotation support plate, a support base, a testing mechanism, and at least one transfer mechanism. The air flotation support plate is inclined to support the side of the glass; The support base is located below the air flotation support plate and is used to support the bottom edge of the glass; The detection mechanism includes a detection guide, an image acquisition component, and a detection moving component. The detection moving component drives the image acquisition component to move along the detection guide. The tilt angle of the detection guide is the same as the tilt angle of the air-bearing support plate. The adapter mechanism includes a telescopic adapter rod, which is used to abut against the side of the glass and tilt it to the same tilt angle as the air flotation support plate.

[0006] Preferably, the air flotation support plate includes a first air flotation support plate and a second air flotation support plate arranged at intervals, and a vertical detection seam is formed between the first air flotation support plate and the second air flotation support plate; It is also provided with a support base moving mechanism, which drives the support base to move horizontally, and the moving direction is parallel to the surface where the air flotation support plate is located; The detection guide is a detection guide rail that is aligned with the detection seam and vertically arranged; The transfer mechanism is located on the upper part or side of the air flotation support plate.

[0007] Preferably, a detection mechanism is provided on each side of the air flotation support plate; and / or, The support base is provided with a clamping groove for placing the bottom edge of the glass.

[0008] Preferably, each of the detection mechanisms is provided with two or more image acquisition components, which move along the same detection guide.

[0009] Preferably, the support base is provided with grippers and a gripper drive mechanism for driving the grippers to open and close. A clamping groove is formed between the grippers, and the width of the clamping groove is adjusted by opening and closing the grippers.

[0010] Preferably, the first air flotation support plate and the second air flotation support plate each include a transport air flotation area and a precision air flotation area, with the precision air flotation area located near the detection seam; It also includes an air supply pipeline, which includes air supply branches corresponding to each transport air flotation zone and precision air flotation zone, and each air supply branch is equipped with a regulating valve.

[0011] Preferably, the air film thickness of the transport air flotation zone is 80-120 μm; the air film thickness of the precision air flotation zone is 30-50 μm.

[0012] Preferably, the adapter mechanism further includes an adapter drive mechanism, which drives the adapter rod to extend and retract in a direction perpendicular to the plane of the air-bearing support plate, and drives the adapter rod 61 to rise and fall. The end of the adapter rod that contacts the glass is also provided with two buffer rollers, which are used to clamp the upper edge of the glass.

[0013] Preferably, a vibration isolation base is also provided, and the air flotation support plate, support base, detection mechanism, and transfer mechanism are all installed on the vibration isolation base.

[0014] Preferably, the angle between the air-floating support plate and the vertical direction is 3-5°.

[0015] This application first provides a vertical glass inspection device, including: an air-float support plate, a support base, an inspection mechanism, and at least one transfer mechanism. The air-float support plate is inclined to support the side of the glass; the support base is located below the air-float support plate to support the bottom edge of the glass; the inspection mechanism includes an inspection guide, an image acquisition component, and an inspection moving component, the inspection moving component driving the image acquisition component to move along the inspection guide; the inclination angle of the inspection guide is the same as the inclination angle of the air-float support plate; the transfer mechanism includes a retractable transfer rod, the transfer rod being used to abut against the side of the glass and drive it to tilt to the same inclination angle as the air-float support plate. The vertical glass inspection equipment provided in this application inspects vertically placed glass, which reduces deformation and dust adhesion problems compared to inspecting flat glass. The inclined air-float support plate in this application tilts the glass as well, ensuring stable placement of the glass during inspection. Simultaneously, the tilt angle of the inspection guide is the same as that of the air-float support plate, maintaining a constant distance between the image acquisition component and the glass surface during movement. This ensures stable focus on the target surface (i.e., the glass surface), eliminating the need to adjust the focusing surface of the image acquisition component during movement, thus improving inspection quality and efficiency. Furthermore, the equipment provided in this application includes a transfer mechanism comprising a retractable transfer rod. This rod abuts against the side of the glass and tilts it to the same tilt angle as the air-float support plate, buffering the glass placement and tilting process and preventing damage during glass loading. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 Figure 1 This is a three-dimensional schematic diagram of the vertical glass inspection device of the present invention; Figure 2 for Figure 1 A magnified view of a portion of the image; Figure 3 This is a front view schematic diagram of the vertical glass inspection device of the present invention; Figure 4 This is a left-side view of the vertical glass inspection device of the present invention; Figure 5 for Figure 4 A magnified view of a portion of the image; Figure 6 This is a top view schematic diagram of the vertical glass inspection device of the present invention; Figure 7 This is a three-dimensional structural diagram of the support base of the present invention; Figure 8 This is a side view of the support base of the present invention; Figure 9 for Figure 8 A magnified view of a portion of the image; Figure 10 This is a three-dimensional structural diagram of the adapter mechanism of the present invention; Figure 11 for Figure 10 A magnified view of a portion of the image; Reference numerals: 1-Air-float support plate; 11-First air-float support plate; 12-Second air-float support plate; 13-Detection seam; 2-Support base; 21-Clamping groove; 22-Gripper; 23-Gripper drive mechanism; 3-Detection mechanism; 31-Detection guide; 32-Image acquisition component; 33-Detection moving component; 4-Support base moving mechanism; 5-Vibration isolation base; 51-Column; 6-Transfer mechanism; 61-Transfer support rod; 62-Transfer drive mechanism; 63-Buffer roller. Detailed Implementation

[0018] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly set on the other component; when a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to the other component.

[0020] It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size should still fall within the scope of the technical content disclosed in this application, provided that they do not affect the effects and purposes that this application can produce.

[0021] This invention provides a vertical glass testing device, comprising: an air flotation support plate 1, a support base 2, a testing mechanism 3, and at least one transfer mechanism 6. The air flotation support plate 1 is inclined and is used to support the side of the glass; The support base 2 is located below the air flotation support plate 1 and is used to support the bottom edge of the glass; The detection mechanism 3 includes a detection guide 31, an image acquisition component 32, and a detection moving component 33. The detection moving component 33 drives the image acquisition component 32 to move along the detection guide 31. The tilt angle of the detection guide 31 is the same as the tilt angle of the air-bearing support plate 1. The adapter mechanism 6 includes a telescopic adapter rod 61, which is used to abut against the side of the glass and tilt it to the same tilt angle as the air flotation support plate 1.

[0022] This application first provides a vertical glass inspection device, including: an air-float support plate 1, a support base 2, an inspection mechanism 3, and at least one transfer mechanism 6. The air-float support plate 1 is inclined and used to support the side of the glass; the support base 2 is located below the air-float support plate 1 and is used to support the bottom edge of the glass; the inspection mechanism 3 includes an inspection guide 31, an image acquisition component 32, and an inspection moving component 33, the inspection moving component 33 drives the image acquisition component 32 to move along the inspection guide 31; the inclination angle of the inspection guide 31 is the same as the inclination angle of the air-float support plate 1; the transfer mechanism 6 includes a telescopic transfer rod 61, the transfer rod 61 is used to abut against the side of the glass and drive it to tilt to the same inclination angle as the air-float support plate 1. The vertical glass inspection equipment provided in this application inspects vertically placed glass, which reduces deformation and dust adhesion problems compared to inspecting flat glass. The inclined air-float support plate in this application tilts the glass as well, ensuring stable placement of the glass during inspection. Simultaneously, the tilt angle of the inspection guide is the same as that of the air-float support plate, maintaining a constant distance between the image acquisition component and the glass surface during movement. This ensures stable focus on the target surface (i.e., the glass surface), eliminating the need to adjust the focusing surface of the image acquisition component during movement, thus improving inspection quality and efficiency. Furthermore, the equipment provided in this application includes a transfer mechanism 6, which includes a retractable transfer rod 61. The transfer rod 61 abuts against the side of the glass and tilts it to the same tilt angle as the air-float support plate 1, buffering the glass placement and tilting process and preventing damage during glass loading. Additionally, during unloading, the transfer rod 61 extends to push the glass back to an upright position, completing the unloading process.

[0023] Specifically, the vertical glass inspection equipment provided in this application supplies gas to the inclined air-floating support plate 1, using buoyancy to support the gaps in the glass. The gas support has high accuracy and stability, and can reduce the risk of glass damage. The glass is placed on the vertical glass inspection equipment of this application by an upstream robotic arm or other transportation mechanism. The bottom edge is supported by the support base 2, and one side is supported by the air-floating support plate 1. The glass naturally presents the same tilt angle as the air-floating support plate 1, which allows the glass to be inspected in a slightly tilted vertical state. This avoids the problems of large deformation and easy breakage of the glass when it is laid flat. Moreover, the vertical position reduces the adhesion of dust and impurities on the glass surface compared to the horizontal position, and the tilt also ensures the stability of the glass placement. The image acquisition component 32 moves along the detection guide 31 under the drive of the detection moving component 33. Since the tilt angle of the detection guide 31 is the same as the tilt angle of the air-bearing support plate 1, that is, the same as the angle of the glass placed on the air-bearing support plate 1, the moving plane of the image acquisition component 32 is actually parallel to the plane where the glass surface is located, and the focal length does not change, so the image acquisition of the glass can be completed quickly and efficiently. The moving range of the image acquisition component 32 on the detection guide 31 is greater than or equal to the size of the glass, so that the complete inspection of the glass can be completed. At the same time, the glass delivered by the upstream robot or other machinery is first held against the side by the extended transfer rod 61, and then the transfer rod 61 slowly retracts, and the glass tilts accordingly until it is supported by the air film of the air-bearing support plate 1. The transfer rod 61 continues to retract and separates from the side of the glass, realizing the transfer of the glass.

[0024] In this application, one or more transfer mechanisms 6 can be provided, preferably multiple, to transfer the glass from different positions, which distributes the force more widely and provides support to each position of the glass, making it more stable and further reducing the probability of damage during the transfer process.

[0025] In this field, there are already mature systems for analyzing the acquired images and determining whether there are defects or other problems. In this application, an existing mature system can be purchased to process and analyze the images acquired by the image acquisition component 32, thereby obtaining the glass quality results.

[0026] In this application, the detection moving part 33 can use a power source (such as a motor) and transmission structure (such as a transmission belt, transmission screw, etc.) known in the art to drive the image acquisition part 32.

[0027] Preferably, the air flotation support plate 1 includes a first air flotation support plate 11 and a second air flotation support plate 12 arranged at intervals, and a vertical detection seam 13 is formed between the first air flotation support plate 11 and the second air flotation support plate 12. It is also provided with a support base moving mechanism 4, which drives the support base 2 to move horizontally, and the moving direction is parallel to the plane where the air flotation support plate 11 is located. The detection guide 31 is a detection guide rail that is aligned with the detection seam 13 and vertically arranged; The transfer mechanism 6 is located on the upper part or side of the air flotation support plate 1.

[0028] The inspection of glass involves a comprehensive inspection of both the front and back surfaces to ensure that every part of the glass surface has been inspected. The inspection coverage of the flat surfaces can be achieved by keeping the glass stationary while the image acquisition unit 32 moves within the plane; or by having the glass move along a first direction while the image acquisition unit 32 moves along a second direction, with the first and second directions being perpendicular to each other.

[0029] Preferably, both the glass and the image acquisition component 32 are movable. The specific structure is as follows: The air-bearing support plate 1 includes a first air-bearing support plate 11 and a second air-bearing support plate 12 spaced apart, forming a vertical detection seam 13 between the first air-bearing support plate 11 and the second air-bearing support plate 12; a support base moving mechanism 4 is also provided, which drives the support base 2 to move horizontally (i.e., perpendicular to the detection seam 13), and the direction of movement is parallel to the plane where the air-bearing support plate 11 is located; the detection guide 31 is a detection guide rail aligned with the detection seam 13 and vertically arranged (i.e., arranged along the extension direction of the detection seam 13). By setting the support base moving mechanism 4 to drive the support base 2 to move horizontally, while simultaneously causing the image acquisition component 32 to move vertically, the movement directions of the image acquisition component 32 and the glass are perpendicular to each other, and the movement path is greater than or equal to the dimension of the corresponding direction of the glass. This allows for detection coverage of all areas on the glass surface without missing any areas. Furthermore, the image acquisition component 32 acquires images at the detection seam 13, which can avoid interference from the air-bearing support plate 1 and further improve the quality.

[0030] The number of detection guide rails can be one or more, and they can all be used in conjunction with the image acquisition component 32 to guide it.

[0031] In this application, the supporting base moving mechanism 4 can be driven by a power source (such as a motor) and a transmission structure (such as a transmission belt, transmission screw, etc.) known in the art. It can also be equipped with a guide rail to guide the movement of the supporting base 2 and ensure that its direction does not deviate.

[0032] Preferably, a detection mechanism 3 is provided on each side of the air flotation support plate 1; and / or, The support base 2 is provided with a clamping groove 21, which is used to place the bottom edge of the glass.

[0033] Preferably, a detection mechanism 3 is provided on each side of the air-float support plate 1. When the glass moves through the detection seam 13, both sides of the glass can be detected, without having to flip the glass over and perform another detection after one side has been detected, thus further improving the detection efficiency.

[0034] The preferred support base 2 is provided with a clamping groove 21, which serves to protect and limit the movement of the glass. The bottom edge of the glass is located in the clamping groove 21 to avoid slippage and other problems during movement.

[0035] Preferably, each of the detection mechanisms 3 is provided with two or more image acquisition components 32, and the image acquisition components 32 move along the same detection guide 31.

[0036] The preferred detection mechanism 3 is equipped with two or more image acquisition components 32 to acquire images of the glass in segments. This reduces the distance that a single image acquisition component 32 needs to move, thus improving the acquisition efficiency. The image acquisition components 32 can move up and down simultaneously along the same detection guide 31, keeping the distance between adjacent image acquisition components 32 constant. Other control methods can also be used.

[0037] For example, if the inspection mechanism 3 is equipped with two image acquisition components 32, then one side of the glass is divided into two areas according to the top and bottom. One image acquisition component 32 acquires the image of the upper area of ​​the glass when it passes through the inspection seam 13, and the other image acquisition component 32 acquires the image of the lower area of ​​the glass when it passes through the inspection seam 13. The inspection mechanism 3 on the other side is also set up in the same way, and the four image acquisition components 32 on both sides of the inspection seam 13 jointly complete the acquisition of the glass image.

[0038] Preferably, the support base 2 is provided with grippers 22 and a gripper drive mechanism 23 for driving the grippers 22 to open and close. A clamping groove 21 is formed between the grippers 22, and the opening and closing of the grippers 22 adjusts the width of the clamping groove 21.

[0039] The preferred support base 2 is provided with a gripper 22 and a gripper drive mechanism 23 for driving the gripper 22 to open and close. A clamping groove 21 is formed between the grippers 22. The opening and closing of the gripper 22 adjusts the width of the clamping groove 21, thereby adapting to the needs of placing glass of different thicknesses and playing a limiting role.

[0040] The gripper 22 includes two claw plates, and the gripping groove 21 is located between the two claw plates and is lower than the height of the claw plates. When the glass is placed in the gripping groove 21, it is limited by the claw plates on both sides. The distance between the grippers 22 can be adjusted by moving both claw plates simultaneously, or by fixing one claw plate while the other moves. The gripper drive mechanism 23 is equipped with a corresponding transmission structure (such as a screw with two opposite threads, or a transmission belt, transmission gear, etc.) to drive the grippers 22.

[0041] Preferably, the first air flotation support plate 11 and the second air flotation support plate 12 respectively include a transport air flotation area and a precision air flotation area, wherein the precision air flotation area is close to the detection seam 13; It also includes an air supply pipeline, which includes air supply branches corresponding to each transport air flotation zone and precision air flotation zone, and each air supply branch is equipped with a regulating valve.

[0042] Preferably, the first air-float support plate 11 and the second air-float support plate 12 each include a transport air-float area and a precision air-float area, with the precision air-float area close to the detection seam 13. By dividing the air-float force provided by the air-float support plates into zones, the air-float force in the area close to the detection seam 13 is precisely controlled to ensure the flatness of the glass when passing through the detection seam 13, as well as the stability of the distance between the glass and the air-float support plate 1 at this time, thereby ensuring the quality of image acquisition by the detection mechanism 3. The area far from the detection seam 13 serves as the transport air-float area, where the thickness requirement of the air film is reduced, only needing to meet the needs of glass support and transport.

[0043] As is known in the art, buoyancy is achieved by a stable gas supply from a gas source, which passes through holes or slits in the air-float support plate 1 to form a high-pressure gas film, thereby supporting the gaps in the glass. The gas source can simultaneously supply gas to one or more vertical glass inspection devices. When the air-float support plate is configured with buoyancy zones, the device is equipped with a gas supply pipeline with multiple gas supply branches. The number of gas supply branches corresponds to the number of different air-float zones, and each branch is equipped with a regulating valve. The positive and negative pressure of the regulating valves is used to control the needs of different air-float zones. One end of the gas supply pipeline is connected to the gas source, and the other end is connected to the vents of different air-float zones through different branches. After being regulated in the air-float branches, the gas passes through gas films of different thicknesses in different air-float zones.

[0044] Preferably, the air film thickness of the transport air flotation zone is 80-120 μm; the air film thickness of the precision air flotation zone is 30-50 μm.

[0045] More preferably, the air film thickness of the transport air flotation zone is 80-120μm; the air film thickness of the precision air flotation zone is 30-50μm.

[0046] Preferably, the adapter mechanism 6 further includes an adapter drive mechanism 62, which drives the adapter support rod 61 to extend and retract in a direction perpendicular to the plane of the air-bearing support plate 1, and drives the adapter support rod 61 to rise and fall. The end of the adapter rod 61 that contacts the glass is also provided with two buffer rollers 63, which are used to clamp the upper edge of the glass.

[0047] The preferred transfer mechanism 6 also includes a transfer drive mechanism 62. The transfer drive mechanism 62 drives the transfer support rod 61 to extend and retract in a direction perpendicular to the plane of the air flotation support plate 1. When extended, it abuts against the side of the glass. During the retraction process, the glass moves with the transfer support rod 61 until the glass rotates to be supported by the air film of the air flotation support plate 1, and the support rod continues to retract and separate from the glass. In addition, the transfer drive mechanism 62 also drives the transfer support rod 61 to rise and fall, which, together with the buffer rollers 63, achieves clamping and releasing of the upper edge of the glass. Specifically, the end of the transfer support rod 61 that contacts the glass is also provided with two buffer rollers 63. The initial height of the transfer support rod 61 is higher than the height of the upper edge of the glass. Then, the transfer support rod 61 descends to clamp the upper edge of the glass between the two buffer rollers 63 for fixation. Then, the transfer support rod 61 extends and retracts to adjust the angle of the glass. During unloading, the transfer support rod 61 makes the glass return to an upright state. After the unloading robot or other structure fixes the glass, the transfer support rod 61 rises and disengages from the glass.

[0048] The adapter drive mechanism 62 enables the adapter rod 61 to move in two different directions: extension and retraction, and lifting and lowering. This can be achieved by the cooperation of two power sources (such as motors) and a transmission structure.

[0049] Preferably, a vibration isolation base 5 is also provided, and the air flotation support plate 1, support base 2, detection mechanism 3, and transfer mechanism 6 are all installed on the vibration isolation base 5.

[0050] The preferred vertical glass inspection system also includes a vibration isolation base 5, which uses a flexible isolation layer (such as an air cushion or rubber pad) to isolate vibration. The air-floating support plate 1, the support base 2, the inspection mechanism 3, and the transfer mechanism 6 are all mounted on the vibration isolation base 5, which can prevent vibrations transmitted from the ground from adversely affecting the inspection. When the support base moving mechanism 4 is provided, it is also mounted on the vibration isolation base 5.

[0051] The vibration isolation base 5 can be a combination of an equipment platform that supports the above structure and a support leg that has a vibration isolation function. The vibration isolation base 5 can also adopt other structures to support and isolate the above structure.

[0052] The vibration isolation base 5 can also be equipped with columns 51, and the detection mechanism 3 is installed on the columns 51 to maintain its stability. When two detection mechanisms 3 are set, two columns 51 can be set on both sides of the air flotation support plate 1 to install the detection mechanisms 3. The tops of the two columns 51 can also be connected by crossbeams to form a "door" shaped structure.

[0053] Preferably, the angle between the air-floating support plate 1 and the vertical direction is 3-5°.

[0054] The preferred angle between the air flotation support plate 1 and the vertical direction is 3-5°, which can ensure the glass is placed stably and keep the glass in an upright position, making it easy to inspect and reducing the adhesion of dust and impurities.

[0055] The above description is merely an embodiment of the present invention. It should be noted that those skilled in the art can make improvements without departing from the inventive concept of the present invention, but these improvements all fall within the protection scope of the present invention.

Claims

1. A vertical glass testing device, characterized in that, include: The air flotation support plate (1), the support base (2), the testing mechanism (3), and at least one transfer mechanism (6). The air flotation support plate (1) is inclined and used to support the side of the glass; The support base (2) is located below the air flotation support plate (1) and is used to support the bottom edge of the glass; The detection mechanism (3) includes a detection guide (31), an image acquisition component (32), and a detection moving component (33), wherein the detection moving component (33) drives the image acquisition component (32) to move along the detection guide (31); The tilt angle of the detection guide (31) is the same as the tilt angle of the air-bearing support plate (1); The adapter mechanism (6) includes a telescopic adapter rod (61) for abutting against the side of the glass and tilting it to the same tilt angle as the air-float support plate (1).

2. The vertical glass testing equipment according to claim 1, characterized in that, The air flotation support plate (1) includes a first air flotation support plate (11) and a second air flotation support plate (12) arranged at intervals, and a vertical inspection seam (13) is formed between the first air flotation support plate (11) and the second air flotation support plate (12). It is also provided with a support base moving mechanism (4), which drives the support base (2) to move horizontally, and the moving direction is parallel to the plane where the air flotation support plate (11) is located; The detection guide (31) is a detection guide rail that is aligned with the detection seam (13) and vertically arranged; The transfer mechanism (6) is located on the upper part or side of the air flotation support plate (1).

3. The vertical glass testing equipment according to claim 1, characterized in that, A detection mechanism (3) is provided on each side of the air flotation support plate (1); and / or, The support base (2) is provided with a clamping groove (21) for placing the bottom edge of the glass.

4. The vertical glass testing equipment according to claim 3, characterized in that, Each of the detection mechanisms (3) is provided with two or more of the image acquisition components (32), which move along the same detection guide (31).

5. The vertical glass testing equipment according to claim 3, characterized in that, The support base (2) is provided with a gripper (22) and a gripper drive mechanism (23) for driving the gripper (22) to open and close. A clamping groove (21) is formed between the grippers (22), and the opening and closing of the grippers (22) adjusts the width of the clamping groove (21).

6. The vertical glass testing equipment according to any one of claims 2-5, characterized in that, The first air flotation support plate (11) and the second air flotation support plate (12) respectively include a transport air flotation area and a precision air flotation area, wherein the precision air flotation area is close to the detection seam (13). It also includes an air supply pipeline, which includes air supply branches corresponding to each transport air flotation zone and precision air flotation zone, and each air supply branch is equipped with a regulating valve.

7. The vertical glass testing equipment according to claim 6, characterized in that, The air film thickness of the transport air flotation zone is 80-120μm; the air film thickness of the precision air flotation zone is 30-50μm.

8. The vertical glass testing equipment according to any one of claims 1-5 and 7, characterized in that, The adapter mechanism (6) further includes an adapter drive mechanism (62), which drives the adapter support rod (61) to extend and retract in a direction perpendicular to the plane of the air-float support plate (1), and drives the adapter support rod (61) to rise and fall. The adapter rod (61) is also provided with two buffer rollers (63) at the end that contacts the glass. The buffer rollers (63) are used to hold the upper edge of the glass.

9. The vertical glass testing equipment according to claim 1, characterized in that, It is also provided with a vibration isolation base (5), and the air flotation support plate (1), support base (2), detection mechanism (3) and transfer mechanism (6) are all installed on the vibration isolation base (5).

10. The vertical glass testing equipment according to claim 1, characterized in that, The angle between the air-floating support plate (1) and the vertical direction is 3-5°.

Images