Point source crucible for evaporation equipment

Abstract

The invention discloses a point source crucible for evaporation equipment. The point source crucible is characterized in that sieve pores are formed in a crucible cover; the sieve pores are used for providing an evaporation path for volatile substances in the crucible body; a heat conduction part is arranged on the side edge of the crucible cover, and when the crucible cover is arranged on the crucible body, the heat conduction part is attached to the outer wall of the crucible body; the crucible cover is made of a conductor with good heat conduction; the heat conduction part is made of a metal material; a heat receiving part is arranged at the end, away from the crucible cover, of the heat conduction part and transmits received heat to the crucible cover, so that the temperature of the crucible cover is higher than that of the opening of the crucible body. According to the point source crucible for the evaporation equipment, the situation that materials in the crucible are ejected out during heating is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of evaporation, in particular to a point source crucible for an evaporation device. BACKGROUND

[0002] When preparing perovskite by using evaporation method, resistance wire is used to heat and evaporate organic salt material with decomposition property. After the organic salt material is heated and decomposed, volatile gas is generated, which causes the vacuum degree of the evaporation chamber to be unable to be maintained in the high vacuum interval of 5E-4Pa. Moreover, as the deposition rate increases, the initial pressure of the reaction chamber increases. The average free path decreases with the increase of the pressure, the normalized flux at the substrate decreases, and high pressure affects the deposition uniformity. When the vacuum rises, the deposition precision and the material evaporation rate stability are affected.

[0003] Therefore, how to provide a crucible to stabilize the evaporation of organic salt material has become a technical problem to be solved in the industry. SUMMARY

[0004] In order to solve the defects of the prior art, the purpose of the present application is to provide a point source crucible for an evaporation device, which avoids the situation that the material in the crucible is pushed out when heated.

[0005] To achieve the above-mentioned purpose, the present application provides a point source crucible for an evaporation device, comprising: The crucible cover is provided with a sieve hole; The sieve hole is used to provide an evaporation path for volatile substances in the crucible body; A heat conduction part is arranged on the side of the crucible cover, and when the crucible cover is arranged on the crucible body, the heat conduction part is in contact with the outer wall of the crucible body; The crucible cover is made of a good heat conductor; The heat conduction part is made of metal; The end of the heat conduction part away from the crucible cover is provided with a heat receiving part, and the heat receiving part transmits the received heat to the crucible cover, so that the temperature of the crucible cover is higher than that of the opening of the crucible body.

[0006] Preferably, when the crucible cover is arranged on the crucible body, the heat conduction part extends to the lower part of the crucible body.

[0007] Preferably, the outer side of the crucible body is provided with a limiting part, and the limiting part is provided with an opening; The end of the heat conduction part away from the crucible cover is further provided with a bending part, and the bending part is matched with the opening on the limiting part.

[0008] Preferably, the heat conducting part is provided with a plurality of.

[0009] Preferably, the plurality of heat conducting parts are evenly distributed on the side of the crucible cover.

[0010] Preferably, a metal pipe is arranged inside the crucible body, and the metal pipe is used to conduct the volatile gas in the lower part of the crucible body to the direction of the sieve hole.

[0011] Preferably, the metal pipe is hollow, and the metal pipe is provided with a hole on at least the side wall of the lower part, and the volatile gas enters the metal pipe through the hole.

[0012] Preferably, the length of the heat conducting part is not greater than the height of the crucible body, and is not less than one third of the height of the crucible body.

[0013] Preferably, a protruding angle plate is arranged on the inner wall of the crucible body, and the material in the crucible body is first deposited on the lower surface of the angle plate after evaporation, and then evaporates from the lower surface of the angle plate and finally leaves the inside of the crucible body.

[0014] Preferably, the angle plate comprises a plurality of; The angle plate is arranged in multiple layers in the crucible body.

[0015] The above technical scheme, the arrangement of the crucible cover and the sieve hole arranged on the crucible cover avoid the material escaping from the inside of the crucible body when the crucible body is heated, and also facilitate the volatile substances in the crucible body to run out of the sieve hole; the design of the heat conducting part utilizes the heat of the outer wall of the crucible body, so that the temperature of the crucible cover is not less than the temperature inside the crucible body, avoiding the problem of material blocking the sieve hole caused by the temperature of the crucible cover being lower than the temperature inside the crucible body; the design of the metal pipe makes the gas generated by the material in the crucible body when heated evaporate into the inside of the crucible body as soon as possible, so that the pressure inside the crucible body is maintained stable, avoiding the problem of material shaking caused by the accumulation of volatile gas changing the pressure inside the crucible body, which affects the stability of the evaporation rate, thereby improving the stability of the material used in the subsequent process; the arrangement of the angle plate is beneficial to the treatment of the material in the crucible body when there are impurities or the purity is not high, and also can separate and evaporate a plurality of materials; the cooperation of the bending part and the limiting part avoids the phenomenon of the crucible cover being lifted up.

[0016] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings are included to provide a further understanding of the present application, and constitute a part of the specification, and together with the embodiments of the present application, serve to explain the present application, and do not constitute a limitation to the present application. In the drawings: Figure 1 A schematic diagram of a point source crucible structure for a vapor deposition apparatus according to an embodiment of the present application; Figure 2 A schematic diagram of a crucible cover structure according to an embodiment of the present application; Figure 3 A schematic diagram of a crucible body outer structure according to an embodiment of the present application; Figure 4 A schematic diagram of a crucible body inner structure according to an embodiment of the present application; Figure 5 A schematic diagram of a metal tube structure according to an embodiment of the present application.

[0018] Reference Signs: 101 - crucible body; 102 - crucible cover; 103 - heat conduction part; 1031 - bent part; 104 - metal tube; 105 - base; 106 - angle plate; 107 - hole; 108 - limiting part; 109 - mesh. DETAILED DESCRIPTION

[0019] The preferred embodiments of the present application will be described herein below with reference to the accompanying drawings. It is to be understood that the preferred embodiments described herein are merely illustrative and explanatory and are not to be used in a restrictive sense.

[0020] Embodiments of the present application will be described below in greater detail with reference to the accompanying drawings. While certain embodiments of the present application are shown in the drawings, it is to be understood that the present application can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein, but rather should be construed in a broader sense. It is to be understood that the drawings and embodiments of the present application are only for illustrative purposes and are not intended to limit the scope of protection of the present application.

[0021] The term "comprising" and variations thereof as used herein are used in an open-ended manner to mean "including, but not limited to". The term "based on" is "based, at least in part, on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". Related terms are defined in the following description.

[0022] It should be noted that the terms "first", "second", and the like in the present application can be used to distinguish different devices, components or parts, and are not intended to limit the order or interdependence of the functions performed by these devices, components or parts.

[0023] It should be noted that the modification of "one", "a plurality of" mentioned in the present application is illustrative but not restrictive, and those skilled in the art should understand that unless the context clearly indicates otherwise, it should be understood as "one or more". "A plurality" should be understood as two or more.

[0024] The point source crucible for evaporation equipment according to the present application comprises: a crucible body 101 and a crucible cover 102; The crucible cover 102 is provided with a sieve hole; The sieve hole is used to provide an evaporation path for the volatile substance in the crucible body 101; A heat conduction part 103 is provided on the side of the crucible cover 102, and when the crucible cover 102 is arranged on the crucible body 101, the heat conduction part 103 is in close contact with the outer wall of the crucible body 101; The crucible cover 102 is made of a good heat conductor; The heat conduction part 103 is made of metal; The end of the heat conduction part 103 away from the crucible cover 102 is provided with a heat receiving part, which transmits the received heat to the crucible cover 102, so that the temperature of the crucible cover 102 is higher than that of the opening of the crucible body 101.

[0025] In order to make the purpose, technical scheme and advantages of the present application clearer, the embodiments of the present application will be described in further detail below with reference to the drawings.

[0026] Embodiment 1 Figure 1 The structure diagram of the point source crucible for evaporation equipment according to the present application embodiment is as follows, Figure 2 The structure diagram of the crucible cover according to the present application embodiment is as follows, Figure 3 The structure diagram of the outer part of the crucible body according to the present application embodiment is as follows, Figure 4 The structure diagram of the inner part of the crucible body according to the present application embodiment is as follows, Figure 5 The structure diagram of the metal pipe according to the present application embodiment is as follows, Figures 1 to 5 The point source crucible for evaporation equipment according to the present application embodiment comprises: a crucible body 101 and a crucible cover 102.

[0027] In an exemplary embodiment, in use, the crucible cover 102 is arranged above the opening of the crucible body 101, and is used to shield the material in the crucible body 101 from the inside of the crucible, that is, the size of the crucible cover 102 matches the size of the opening of the crucible body 101.

[0028] In an exemplary embodiment, the crucible cover 102 is provided with a sieve hole 109, and according to the need, the crucible cover 102 is provided with a plurality of uniformly distributed sieve holes 109.

[0029] In an exemplary embodiment, the sieve holes 109 are used to provide a vaporization path for the volatile substances in the crucible body 101, and it can be understood that when the crucible cover 102 covers the crucible body 101, the crucible cover 102 not only blocks the substances in the crucible body 101 from running out, but also facilitates the volatile substances in the crucible body 101 to run out from the sieve holes 109.

[0030] In an exemplary embodiment, the size of the sieve holes 109 is set according to requirements, for example, the crucible cover 102 is circular, the sieve holes 109 are distributed in a ring shape outwardly from the center of the crucible cover 102, and the diameter of the sieve holes 109 is one fifteenth of the diameter of the crucible cover 102; according to requirements, the diameter of the sieve holes 109 is, for example, 1.5 mm.

[0031] In an exemplary embodiment, the heat conduction part 103 is provided on the side of the crucible cover 102.

[0032] In an exemplary embodiment, when the crucible cover 102 is arranged on the crucible body 101, the heat conduction part 103 is in contact with the outer wall of the crucible body 101.

[0033] In an exemplary embodiment, the heat conduction part 103 and the crucible cover 102 are both made of a good heat conductor, the heat conduction part 103 is made of metal, and according to requirements, the heat conduction part 103 and the crucible cover 102 can be made of the same material, for example, the crucible cover 102 is made of metal, and the heat conduction part 103 is integrally formed with the crucible cover 102.

[0034] In an exemplary embodiment, the material of the crucible cover 102 is, for example, tantalum, copper, stainless steel, etc.

[0035] In an exemplary embodiment, when the crucible cover 102 is arranged on the crucible body 101, the heat conduction part 103 extends to the lower part of the crucible body 101.

[0036] In an exemplary embodiment, when the heat conduction part 103 extends to the lower part of the crucible body 101, the length of the heat conduction part 103 is at least one third of the height of the crucible body 101, and at least the end of the extension of the heat conduction part 103 is in contact with the outer side wall of the crucible body 101; of course, the heat conduction part 103 can be in contact with the outer side wall of the crucible body 101.

[0037] In an exemplary embodiment, the heat conducting part 103 is provided with a heat receiving part at the end away from the crucible cover 102, the heat receiving part transfers the received heat to the crucible cover 102, so that the temperature of the crucible cover 102 is higher than the temperature at the opening of the crucible body 101; it can be understood that the heat receiving part at the lower end of the heat conducting part 103 receives the heat of the outer sidewall of the crucible body 101, and then conducts the heat back to the crucible cover 102, so that the temperature of the crucible cover 102 is higher than the temperature at the opening of the crucible body 101.

[0038] In an exemplary embodiment, because the point source crucible for evaporation equipment in the embodiment of the present application is heated, the heating wire is usually wrapped around the middle and lower part of the crucible body 101, so the temperature value at the opening of the crucible body 101 is usually lower than the temperature value of the middle and lower part of the crucible body 101, and the heat conducting part 103 can conduct the heat of the middle and lower part of the crucible body 101 to the crucible cover 102, thereby making the temperature of the crucible cover 102 higher than the temperature at the opening of the crucible body 101.

[0039] In an exemplary embodiment, the length of the heat conducting part 103 is not greater than the height of the crucible body 101, and is not less than one third of the height of the crucible body 101.

[0040] In an exemplary embodiment, the heat conducting part 103 is provided with a plurality of heat conducting parts, which can be understood as a plurality of strip-shaped parts, and the overall structure of the heat conducting part 103 on the crucible cover 102 is similar to a claw-shaped structure.

[0041] In an exemplary embodiment, the crucible cover 102 and the heat conducting part 103 thereon are matched with the crucible body 101, for example, the outer wall of the crucible body 101 is vertically arranged on the bottom.

[0042] In an exemplary embodiment, the plurality of heat conducting parts 103 are uniformly distributed on the side edges of the crucible cover 102, for example, the heat conducting part 103 is provided with two heat conducting parts 103, and the two heat conducting parts 103 are symmetrically distributed on the two sides of the crucible cover 102.

[0043] In an exemplary embodiment, because the point source crucible is heated, the heating wire is usually wrapped around the outer wall of the crucible body 101, for example, the heating wire is wrapped around the middle and lower part of the crucible body 101, and of course the height of the heating wire can be the same as the height of the crucible body 101 when the heating wire is wrapped around the crucible body 101 according to the need.

[0044] In an exemplary embodiment, when the height dimension of the heating wire is the same as the height dimension of the crucible body 101, the design of the heat conduction part 103 also makes the temperature of the crucible cover 102 higher than the temperature at the opening of the crucible body 101, because the heating wire is around the crucible body 101, and the temperature of the central area of the opening of the crucible body 101 is usually slightly lower than the temperature of the side wall of the crucible body 101, and the heat conduction of the crucible cover 102 through the heat conduction part 103 makes the crucible cover 102 receive the heat of the side wall of the crucible body 101, so that the temperature of the crucible cover 102 is higher than the temperature at the opening of the crucible body 101.

[0045] In an exemplary embodiment, according to the needs, the end of the heat conduction part 103 away from the crucible cover 102 is also provided with a bending part 1031, for example, after the crucible cover 102 covers the crucible body 101, the bending part 1031 is uniformly bent to the right; the outer side of the crucible body 101 is provided with a limiting part 108, the limiting part 108 is provided with an opening, the opening is uniformly arranged to the left, and the bending part 1031 matches the opening on the limiting part 108; after the crucible cover 102 covers the opening of the crucible body 101, the bending part 1031 is inserted into the opening of the limiting part 108 by counterclockwise rotation of the crucible cover 102, as shown in Figures 1 to 3

[0046] In an exemplary embodiment, through the design of the bending part 1031 inserted into the opening of the limiting part 108, the phenomenon of the crucible cover 102 being lifted by the volatile gas in the crucible body 101 can be further avoided, and the spattering and material loss phenomenon of the material in the crucible body 101 can be avoided.

[0047] In an exemplary embodiment, a metal pipe 104 is arranged in the interior of the crucible body 101.

[0048] In an exemplary embodiment, according to the needs, the metal pipe 104 is in the shape of a tower or a column.

[0049] In an exemplary embodiment, the metal pipe 104 is a hollow structure.

[0050] In an exemplary embodiment, the metal pipe 104 is provided with holes 107 on at least the lower side wall, and the volatile gas enters the metal pipe 104 through the holes 107.

[0051] In an exemplary embodiment, the side wall of the metal pipe 104 is densely covered with holes 107.

[0052] In an exemplary embodiment, according to the needs, the metal pipe 104 can be arranged in the interior of the crucible body 101 through the base 105 or can be placed in the interior of the crucible body 101 alone.

[0053] ​In an exemplary embodiment, the metal tube 104 is arranged inside the crucible body 101 in a vertical manner.

[0054] In an exemplary embodiment, the melting point of the metal tube 104 is higher than the temperature required for the material inside the crucible body 101 to be heated and evaporated. It is understood that the material of the metal tube 104 is selected according to the material to be evaporated inside the crucible body 101, provided that the metal tube 104 does not melt and deform when the material inside the crucible body 101 is evaporated.

[0055] In an exemplary embodiment, the length of the metal tube 104 is set according to the requirement, for example, the length of the metal tube 104 is less than the height of the crucible body 101, and is not less than one third of the height of the crucible body 101. The length of the metal tube 104 is usually selected to be two thirds to seven eighths of the height of the crucible body 101 according to the requirement.

[0056] In an exemplary embodiment, when the point source crucible is heated, the heating wire around the outer wall of the crucible body 101 heats the outer wall of the crucible body 101 to the highest temperature, and the material inside the crucible body 101 starts to evaporate by conducting heat through the crucible wall of the crucible body 101. During the evaporation process, the material leaves a conical appearance, and the uniform distribution of the plurality of sieve holes 109 on the crucible cover 102 facilitates the evaporation of the material inside the crucible body 101.

[0057] In an exemplary embodiment, when the point source crucible is heated, the heat conducted by the heat conduction part 103 to the crucible cover 102 on the outer wall of the crucible body 101 avoids the problem of the sieve holes 109 being blocked by volatile substances due to the temperature of the crucible cover 102 being lower than the temperature inside the crucible body 101.

[0058] In an exemplary embodiment, the metal tube 104 is arranged to solve the problem of pressure change caused by the accumulation of volatile gas after the material inside the crucible body 101 is heated and decomposed.

[0059] In an exemplary embodiment, an angle plate 106 is arranged inside the crucible body 101 according to the requirement, for example, the angle plate 106 is arranged on the inner wall of the crucible body 101.

[0060] In an exemplary embodiment, the angle plate 106 protrudes towards the center area of the crucible body 101, and the angle plate 106 can be provided with a plurality of angle plates 106, which can be arranged in multiple layers inside the crucible body 101.

[0061] In an exemplary embodiment, the material in the crucible body 101 is first deposited on the lower surface of the angle plate 106 after evaporation, and then evaporated from the lower surface of the angle plate 106 and finally leaves the interior of the crucible body 101; it can be understood that the material arranged at the bottom of the crucible body 101 is first deposited on the lower surface of the lowermost angle plate 106 when heated and evaporated, and then the material deposited on the lower surface of the lowermost angle plate 106 is evaporated and deposited on the lower surface of the upper angle plate 106 until it is deposited on the substrate.

[0062] In an exemplary embodiment, the angle plate is arranged to control the heating temperature value of the corresponding angle plate 106 by controlling the heating power of the heating wire at the position of the corresponding angle plate 106 when facing the impurities in the material to be evaporated, thereby realizing the purpose of removing the impurities in the material in the crucible body 101 and sequentially evaporating the material according to the needs.

[0063] In an exemplary embodiment, the size of the angle plate 106 extending from the inner wall of the crucible body 101 to the center is not more than the radius of the crucible body 101, and when the metal pipe 104 is not arranged in the crucible body 101, the extension length of the angle plate 106 can be equal to the radius of the crucible body 101 or five-sixths of the radius of the crucible body 101; when the angle plate 106 is used in cooperation with the metal pipe 104, the sum of the extension length of the angle plate 106 and the radius of the metal pipe 104 is not greater than the radius of the crucible body 101.

[0064] In an exemplary embodiment, when the angle plate 106 is divided into multiple layers, the multiple layers can be arranged in a staggered manner, that is, the bottom projections of the upper and lower layers do not cover each other or only a small part covers each other.

[0065] In an exemplary embodiment, the angle plate 106 can be a metal piece or can be integrally formed with the crucible body 101 according to the needs; when the angle plate 106 is a metal piece, its melting point requirement is the same as that of the metal pipe 104, and when the angle plate 106 is a metal piece, its material can be the same as that of the metal pipe 104.

[0066] In an exemplary embodiment, the point source crucible for evaporation equipment according to the embodiments of the present application is also suitable for materials whose decomposition temperature is lower than or the same as the evaporation temperature, such as organic salt materials related to perovskite.

[0067] Those skilled in the art can understand that the above are only the preferred embodiments of the present application, and are not used to limit the present application, and although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements to some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A point source crucible for use in an evaporation apparatus, characterized in that, The utility model relates to a crucible, which comprises: a crucible body and a crucible cover; a plurality of sieve holes are arranged on the crucible cover; the sieve holes provide evaporation paths for volatile substances in the crucible body; a heat conduction part is arranged on the side of the crucible cover, and the heat conduction part is in contact with the outer wall of the crucible body when the crucible cover is arranged on the crucible body; the crucible cover is made of a good heat conductor; the heat conduction part is made of metal; a heat receiving part is arranged at the end of the heat conduction part away from the crucible cover, and the heat receiving part transmits the received heat to the crucible cover, so that the temperature of the crucible cover is higher than that of the opening of the crucible body.

2. The point source crucible for an evaporation apparatus according to claim 1, characterized in that, When the crucible cover is arranged on the crucible body, the heat conduction part extends to the lower part of the crucible body.

3. The point source crucible for an evaporation apparatus according to claim 2, characterized in that, a limiting part is arranged on the outer side of the crucible body, and the limiting part is provided with an opening; the end of the heat conduction part away from the crucible cover is also provided with a bending part, and the bending part is matched with the opening on the limiting part.

4. The point source crucible for an evaporation apparatus according to claim 1, characterized by, The heat conduction part is provided with a plurality of heat conduction parts.

5. The point source crucible for an evaporation apparatus according to claim 1, characterized by, The plurality of heat conduction parts are uniformly distributed on the side of the crucible cover.

6. The point source crucible for an evaporation apparatus according to claim 1, characterized by, a metal pipe is arranged in the crucible body, and the metal pipe is used for conducting the volatile gas in the lower part of the crucible body to the direction of the sieve holes.

7. The point source crucible for an evaporation apparatus according to claim 6, characterized in that, The metal pipe is hollow, and the metal pipe is provided with a hole on at least the side wall of the lower part, and the volatile gas enters the metal pipe through the hole.

8. The point source crucible for an evaporation apparatus according to claim 1, characterized by, The length of the heat conduction part is not greater than the height of the crucible body, and is not less than one third of the height of the crucible body.

9. The point source crucible for an evaporation apparatus according to claim 1, characterized in that, a convex angle plate is arranged on the inner wall of the crucible body, and the material in the crucible body is first deposited on the lower surface of the angle plate after evaporation, and then evaporates from the lower surface of the angle plate and finally leaves the inside of the crucible body.

10. The point source crucible for an evaporation apparatus according to claim 9, characterized in that, The angle plate comprises a plurality of angle plates; the angle plates are arranged in multiple layers in the crucible body.

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