Irradiation equipment and oxygen control system thereof

Abstract

Irradiation equipment comprises a light source device, a conveying system and an oxygen control system. The oxygen control system comprises a gas range limiting device used for defining an oxygen control area around a light source device, a gas supply module used for supplying gas to the light source device and the oxygen control area, and an oxygen content detector used for detecting the oxygen concentration of the oxygen control area. The control module is connected with and controls the gas range limiting device, the gas supply module and the oxygen content detector, and the control module controls the gas supply module according to the oxygen concentration so as to adjust the gas supply condition of the gas, so that the oxygen concentration of the oxygen control area is maintained in a set range.

Description

Technical Field

[0001] This invention relates to an irradiation device and its oxygen control system, and particularly to an irradiation device and its oxygen control system that can simultaneously and effectively control the oxygen concentration in the irradiation area and the oxygen concentration in the air around the device. It can be widely used in semiconductor manufacturing, biotechnology, materials science and other technical fields that require precise control of the oxygen environment. Background Technology

[0002] Irradiation equipment has a variety of uses and is widely used in various fields. For example, deep ultraviolet (DUV) light with wavelengths between 100nm and 300nm (excimer lasers (ArF, KrF), fluoride lasers, etc.) can be used for semiconductor lithography, microfabrication, material modification, sterilization, etc.; ultraviolet (UV) light with wavelengths between 300nm and 400nm (mercury lamps, xenon lamps, UV LEDs, etc.) can be used for photochemical reactions, UV curing, surface cleaning, biomedical applications, etc.; visible light with wavelengths between 400nm and 700nm (white LEDs, laser diodes, halogen lamps, OLEDs, etc.) can be used for lighting, displays, biooptics, phototherapy, visual inspection, etc. Near-infrared (NIR) radiation with wavelengths between 700nm and 1400nm (NIR laser diodes, LED light sources, blackbody radiation sources, etc.) can be used for spectral analysis, medical imaging, heat processing, optical communication, etc.; mid-infrared (MIR) radiation with wavelengths between 1400nm and 3000nm (CO2 lasers, quantum cascade lasers, xenon arc lamps, etc.) can be used for molecular spectroscopy, environmental monitoring, gas detection, medical diagnosis, etc.; far-infrared (FIR) radiation with wavelengths between 3000nm and 1mm (high-power CO2 lasers, blackbody radiation sources, etc.) can be used for thermal imaging, far-infrared heating, astronomical observation, remote sensing technology, etc.

[0003] Irradiation equipment requires the use of gas, such as an inert gas, to fill the area around its lamp tubes in order to minimize the oxygen concentration within the irradiated area and thus increase illuminance. However, when the irradiation equipment is used in an open configuration for continuous irradiation, problems can arise such as gas not concentrating within the irradiated area and gas escaping during operation, affecting the composition of the surrounding air. For example, if the gas does not concentrate easily, the oxygen concentration in the irradiated area will increase, resulting in reduced illuminance and affecting operational efficiency. Furthermore, excessive gas escape may cause the oxygen concentration in the surrounding air to become too low, potentially causing headaches, vomiting, or even fainting and respiratory arrest in operators.

[0004] Since most gases are difficult to detect by smell, hazards often occur unnoticed. Therefore, how to increase the illuminance of irradiation equipment while ensuring the safety of operators during operation is indeed an important issue in this field. Summary of the Invention

[0005] The purpose of this invention is to provide an irradiation device and its oxygen control system, wherein the oxygen control system defines an oxygen control zone around the light source device by setting a gas range limiting device, and effectively controls the oxygen concentration within the oxygen control zone to achieve the effect of improving illuminance.

[0006] Another objective of this invention is to provide an irradiation device and its oxygen control system, wherein the oxygen control system effectively controls the amount of gas escaping by setting up an air extraction device, thereby preventing the oxygen concentration in the air around the irradiation device from being too low, so as to maintain the safety of the operators.

[0007] To achieve the aforementioned objectives, the present invention provides an irradiation device comprising a light source, a conveying system, and an oxygen control system. The conveying system is disposed below the light source to convey the object to be irradiated through the light source, and the conveying system has a conveying direction from the upstream inlet to the downstream outlet of the irradiation device. The oxygen control system comprises a gas range limiting device, a gas supply module, an oxygen detector, and a control module. The gas range limiting device defines an oxygen control zone around the light source. The gas supply module supplies gas to the light source and the oxygen control zone. The oxygen detector detects the oxygen concentration in the oxygen control zone. The control module connects to and controls the gas flow range limiting device, the gas supply module, and the oxygen detector, and adjusts the gas supply conditions according to the oxygen concentration to maintain the oxygen concentration in the oxygen control zone within a set range.

[0008] To achieve the aforementioned objectives, the present invention also provides an oxygen control system for an irradiation device. The irradiation device includes a light source, a conveying system, and an oxygen control system. The conveying system is disposed below the light source to convey the object to be irradiated through the light source, and the conveying system has a conveying direction from the upstream inlet to the downstream outlet of the irradiation device. The oxygen control system includes a gas range limiting device, a gas supply module, an oxygen detector, and a control module. The gas range limiting device defines an oxygen control zone around the light source. The gas supply module supplies gas to the light source and the oxygen control zone. The oxygen detector detects the oxygen concentration in the oxygen control zone. The control module connects to and controls the gas range limiting device, the gas supply module, and the oxygen detector, and adjusts the gas supply conditions according to the oxygen concentration to maintain the oxygen concentration in the oxygen control zone within a set range. Attached Figure Description

[0009] Figure 1 A schematic diagram of an irradiation device according to an embodiment of the present invention is shown.

[0010] Figure 2 A side view of an irradiation device according to an embodiment of the present invention is shown.

[0011] Figure 3This shows a top view of an irradiation device according to an embodiment of the present invention.

[0012] Figure 4 A block diagram of the oxygen control system of the irradiation device according to an embodiment of the present invention is shown.

[0013] Figure 5 This diagram illustrates the conveying of an object to be irradiated by an irradiation device according to an embodiment of the present invention.

[0014] Figure 6 This diagram illustrates the flow of gas in an irradiation device according to an embodiment of the present invention.

[0015] The reference numerals in the attached figures are explained as follows:

[0016] 1: Irradiation equipment

[0017] 10: Light source device

[0018] 11: Light tube

[0019] 12: Lampshade

[0020] 20: Conveying System

[0021] 21: Conveyor Belt

[0022] 30: Oxygen Control System

[0023] 31: Control Module

[0024] 32: Oxygen Detector

[0025] 33: Gas Detector

[0026] 34: Gas range limiting device

[0027] 35: Gas Supply Module

[0028] 36: Air extraction device

[0029] 37: Setting up the platform

[0030] 38: Covering parts

[0031] 40: User Interface

[0032] 50: Object to be irradiated

[0033] 60: Gas Control Space

[0034] 70: Oxygen-controlled area

[0035] A: Upstream feed end

[0036] B: Downstream discharge end

[0037] D: Conveying direction

[0038] H1, H4: Height

[0039] H2, H3: Distance Detailed Implementation

[0040] Some typical embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the present invention can have various variations in different implementations, all of which do not depart from the scope of the present invention, and the descriptions and illustrations herein are for illustrative purposes only and not intended to limit the present invention.

[0041] It should be noted that, in order to facilitate the description of the relationship between one component or feature and another component(s) or feature(s) in the accompanying drawings, spatially related terms, such as "upper," "lower," "top," "bottom," "front," "rear," and similar terms, are used. In addition to the orientations shown in the drawings, spatially related terms are used to cover different orientations of the device in use or operation. Furthermore, although terms such as "first," "second," etc., can be used to describe different elements / devices / circuits, these elements / devices / circuits should not be limited by these terms. These terms are only used to distinguish different elements / devices / circuits. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of the embodiment.

[0042] The following detailed description, in conjunction with the accompanying drawings, illustrates some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other, and identical or similar concepts will not be repeated.

[0043] Please refer to the following: Figures 1 to 6The irradiation device 1 of the present invention includes a light source device 10, a conveying system 20, and an oxygen control system 30. The light source device 10 includes a lamp tube 11 and a lampshade 12, and is disposed above the conveying system 20. The conveying system 20 has a conveyor belt 21 to carry the object 50 to be irradiated, and the conveyor belt 21 has a conveying direction D to convey the object 50 to be irradiated from the upstream feed end A of the irradiation device 1 to the downstream discharge end B. In other words, the object 50 to be irradiated continuously passes under the light source device 10 and is irradiated in a non-enclosed space. Therefore, the irradiation time of each object 50 can be changed by adjusting the conveying speed of the conveyor belt 21, thereby adapting to various different irradiation needs. Furthermore, by replacing different lamps 11, the irradiation device 1 can provide different irradiation wavelengths to meet the irradiation needs of different types of objects 50 to be irradiated. For example, the wavelength can be between 100nm and 300nm for applications such as semiconductor lithography, microfabrication, material modification, and sterilization; between 300nm and 400nm for applications such as photochemical reactions, UV curing, surface cleaning, and biomedical applications; between 400nm and 700nm for applications such as lighting, displays, biooptics, phototherapy, and visual inspection; between 700nm and 1400nm for applications such as spectral analysis, medical imaging, heat treatment, and optical communication; between 1400nm and 3000nm for applications such as molecular spectroscopy, environmental monitoring, gas detection, and medical diagnostics; or between 3000nm and 1mm for applications such as thermal imaging, far-infrared heating, astronomical observation, and remote sensing technology. Therefore, there are various possibilities, and the application is unrestricted.

[0044] Oxygen control system 30, such as Figure 4As shown, the system includes a control module 31, an oxygen detector 32, a gas detector 33, a gas range limiting device 34, a gas supply module 35, and a vacuum device 36. The gas supply module 35 supplies gas to the light source device 10. The type of gas can be selected according to the different irradiation wavelengths of the lamp 11, the different types of objects 50 to be irradiated, and / or the different application requirements. Inert gases are typically used, such as nitrogen, argon, and / or helium, but are not limited to these. The gas range limiting device 34 is located around the light source device 10 to limit the gas range around it. The vacuum device 36 is located around the irradiation device 1, for example, near the upstream feed end A and near the downstream discharge end B, to draw in gas. In this configuration, gas released at the light source device 10 will be drawn in by the vacuum device 36, thus preventing gas escape and ensuring operator safety. Additionally, the oxygen control system 30 also includes a mounting platform 37 and a shielding member 38. The mounting platform 37 is used to mount the light source device 10, the gas range limiting device 34, and the exhaust device 36. The shielding member 38 is located on both outer sides of the conveyor belt 21, which are generally parallel to the conveying direction D, and is disposed between the mounting platform 37 and the conveying system 20.

[0045] With the above configuration, such as Figure 6 As shown, since the gas range limiting device 34 is located around the light source device 10, an oxygen control zone 70 can be defined between the light source device 10 and the conveyor belt 21. Furthermore, the oxygen detector 32 is used to detect the oxygen concentration within the oxygen control zone 70, and based on the measured oxygen concentration, the control module 31 can control the gas supply conditions to maintain the oxygen concentration in the oxygen control zone 70 within the desired set range. For example, the control module 31 can be implemented to automatically adjust the gas supply based on the measured oxygen concentration. Here, the gas supply conditions include, but are not limited to, the gas supply volume, gas supply rate, gas ratio, and other controllable conditions, such as the gas supply volume and gas supply rate, and the gas-to-air gas ratio. Furthermore, as is well known to those skilled in the art, reducing the oxygen concentration in the irradiated area can increase the lamp illuminance and enhance the irradiation energy. Therefore, in principle, the lower the oxygen concentration in the oxygen-controlled area, the better. Thus, the oxygen concentration setting range in the oxygen-controlled area can be set, for example, below 100 ppm, to provide an environment conducive to irradiation, but this is not a limitation. Different oxygen concentration setting ranges can be selected according to different gases and different irradiation wavelengths.

[0046] In actual implementation, after obtaining the oxygen concentration measured by the oxygen detector 32, the control module 31 determines whether the current oxygen concentration falls within the set range and the difference between it and the critical value of the set range. For example, if the set range is an oxygen concentration below 100 ppm, the control module 31 will determine whether the current oxygen concentration is below 100 ppm and the difference between it and 100 ppm. Then, the control module 31 adjusts the gas supply in real time by controlling at least one gas supply condition to achieve the effect of controlling the oxygen concentration in the oxygen control zone 70. For example, if the current oxygen concentration falls within the set range, the control module 31 can maintain the current gas supply conditions. If the current oxygen concentration exceeds the set range, it indicates that the oxygen concentration needs to be reduced. The control module 31 can achieve the purpose of reducing the oxygen concentration by increasing the gas supply volume / supply rate and / or increasing the gas-to-air supply ratio. Therefore, through such a design, even if the irradiation device 1 of the present invention is a non-sealed system, the irradiation environment required by the light source device 10 can still be effectively maintained.

[0047] In one embodiment, the gas range limiting device 34 may be implemented as including a barrier airflow generating device, and a gas, such as an inert gas, is supplied by a gas supply module 35, thereby defining an oxygen control zone 70 around the light source device 10 using the barrier airflow. When using a barrier airflow generating device, it is preferable to generate a top-down airflow so that the gas supplied to the light source device 10 is confined within the oxygen control zone 70 between the light source device 10 and the conveying system 20. In another embodiment, the gas range limiting device 34 may be implemented as including a gas barrier member disposed around the light source device 10 to define the oxygen control zone 70 by means of hardware barrier, and can be of various member forms, as long as it does not affect the conveying of the object to be irradiated 50 on the conveyor belt 21. In another embodiment, the gas range limiting device 34 may be implemented as including both a barrier airflow generating device and a gas barrier member. Therefore, the gas range limiting device 34 may have various embodiments and is not limited to those described above and in the accompanying drawings.

[0048] Specifically, the oxygen control system used in the irradiation equipment of the present invention defines an oxygen control zone in a semi-open space by setting a gas range limiting device, and can precisely control the oxygen concentration in the oxygen control zone during irradiation to optimize the irradiation effect or meet the needs of other technical applications. Therefore, the oxygen control system can be used with different types of irradiation equipment and can provide a stable and efficient operating environment under various process conditions. For example, it can be widely used in irradiation equipment for semiconductor manufacturing, biotechnology, materials science, and industrial processing. In addition, it is also suitable for other technical fields that require precise control of the oxygen environment, such as chemical reaction control, precision manufacturing, and materials processing.

[0049] On the other hand, in the above configuration, since the platform 37, the shielding member 38, and the conveyor belt 21 have roughly defined a semi-open space above the conveying system 20 for the object 50 to pass through, when an exhaust device 36 (e.g., located at the upstream inlet A and the downstream outlet B) is used to effectively extract any gas that may escape from the self-controlled oxygen zone 70, then... Figure 6 As shown, a gas control space 60 can be formed between the platform 37, the shielding member 38, and the conveyor belt 21, and between the upstream feed end A and the downstream discharge end B. Further, a gas detector 33 is disposed around the irradiation device 1 to detect the gas composition in the air surrounding the device. For example, it can be disposed at a location where gas can easily escape, such as on one side of the platform 37 at the upstream feed end A and on the other side at the downstream discharge end B. Based on the measured gas composition, the control module 31 can control the extraction conditions of the extraction device 36, such as, but not limited to, extraction volume and extraction rate, to ensure that the gas composition in the air surrounding the irradiation device 1 meets safety standards. In one embodiment, the oxygen concentration in the air can be controlled to fall within a safe range where no abnormalities will occur to the human body, for example, an oxygen concentration greater than 18%. In another embodiment, further, when the oxygen concentration in the air exceeds the safe range, for example, when the oxygen concentration is below 18%, an alarm can be generated to notify the operator, and / or the irradiation device 1 can be directly shut down to avoid further harm.

[0050] Furthermore, in order to confine the gas as much as possible within the gas control space 60, the conveyor belt 21 is preferably made of an airtight material or a material with low gas permeability, for example, a meshless conveyor belt. In one embodiment, a gas detector 33 may also be installed below the conveying system 20 to more completely detect changes in air composition caused by gases outside the gas control space 60.

[0051] In actual implementation, after obtaining the gas composition measured by the gas detectors 33 at various locations, the control module 31 comprehensively judges whether the current oxygen concentration in the air surrounding the irradiation device 1 falls within a safe range, for example, whether it is higher than 18%, and then controls the extraction device 36 based on the obtained oxygen concentration. For example, if the current oxygen concentration in the air falls within a safe range, the control module 31 maintains the current extraction conditions of the extraction device 36. If the current oxygen concentration in the air exceeds a safe range, for example, below 18%, the control module 31 changes the extraction conditions of the extraction device 36 accordingly, such as increasing the extraction volume / extraction rate, to reduce gas escape. At the same time, the control module 31 can issue a warning to notify the operator to pay attention to any abnormal physical conditions. Furthermore, if the oxygen concentration in the air still cannot return to a safe range within a set time, the control module 31 can stop the operation of the irradiation device 1 to prevent the harm from spreading. Therefore, with this configuration, the gas can be confined to the gas control space 60 to the greatest extent, and the air around the irradiation device 1 can be maintained at a state suitable for the operator, effectively ensuring the safety of the operator.

[0052] It should be noted that, in the configuration of the present invention, the number of gas range limiting devices 34 and gas extraction devices 36 may vary depending on the actual implementation. For example, it may be implemented as a single gas range limiting device, such as a single barrier airflow generating device with multiple barrier airflow generating openings, or a single gas blocking member. It may also be implemented as two gas range limiting devices 34 (e.g., two barrier airflow generating devices, or two gas blocking members, or one barrier airflow generating device with one gas blocking member) arranged on the upstream and downstream sides of the light source device 10 relative to the conveying direction D. It may also be implemented as more gas range limiting devices 34 (barrier airflow generating devices and / or gas blocking members) arranged around the light source device 10, etc. As long as the arrangement can maintain the oxygen control area 70 around the light source device 10, it is within the scope of the present invention. In addition, multiple gas extraction devices 36 may also be implemented, as long as they are used to extract gas at locations where leakage may occur to maintain the gas control space 60 between the platform 37, the conveyor belt 21, and the shield 38, it is within the scope of the present invention. In addition, the number and location of oxygen detectors 32 and gas detectors 33 can be increased or decreased according to actual needs. The key is to obtain the required oxygen concentration and / or gas composition as a basis for effectively controlling the operation of gas range limiting device 34 and gas extraction device 36.

[0053] In this invention, to accommodate objects 50 at different heights to be irradiated, the platform 37 is configured to be adjustable in height according to actual needs; that is, the platform 37 can move towards and away from the conveying system 20. For example... Figure 5As shown, the distance H2 between the top of the platform 37 and the conveying system 20 can vary according to the height H1 of the object 50 to be irradiated, thereby adjusting the distance H3 between the top of the object 50 and the light source device 10. This accommodates objects 50 of various heights and helps optimize the irradiation effect. Furthermore, in addition to the platform 37 being able to move up and down to adjust the distance H3, the height of the shielding member 38 relative to the conveying system 20 (i.e., as shown) Figure 2 The height H4 of the shielding member 38 relative to the conveying system 20 can also change as the setting platform 37 moves up and down. Specifically, the shielding member 38, whose upper edge connects to the setting platform 37 and whose lower edge connects to the conveying system 20, can extend and retract in the height direction, expanding and contracting as the setting platform 37 rises and falls. This has the advantage that, regardless of the height H1 of the object 50 to be irradiated, the gas can be effectively confined within the gas control space 60. In one embodiment, the shielding member 38 is implemented with a foldable structure, allowing adjustment of the shielding range by folding and unfolding the structure. In another embodiment, the shielding member 38 is made of an elastic material, allowing the material's elasticity to cover the desired shielding range. For example, the extension / retraction range of the height H4 of the shielding member 38 can fall between 3mm and 60mm for different heights H1 of the object 50 to be irradiated, providing good adaptability. Therefore, a suitable form of shielding member can be selected according to actual needs, without being limited thereto.

[0054] In addition, an airtight structure may be further included at the location where the platform 37 is combined with the light source device 10, the gas range limiting device 34, and the exhaust device 36. For example, a seal such as a silicone gasket or other feasible means may be provided to cooperate with the locking between the rigid structures to prevent gas in the gas control space 60 from escaping from the gap at the junction, thereby further ensuring the safety of the air around the irradiation device 1.

[0055] Furthermore, the irradiation device 1 of the present invention may further include an operation interface 40 for operators to operate and control the operation of the irradiation device 1, such as starting / stopping the device, setting the set range of oxygen concentration in the oxygen control zone 70, setting the safe range of oxygen concentration in the air around the device, and / or raising and lowering the platform 37, etc.

[0056] In summary, the irradiation device of this invention ensures that the oxygen concentration within the irradiation range of the light source falls within a set range that helps to increase illuminance and enhance energy by setting a gas range limiting device around the light source and cooperating with oxygen concentration detection. Simultaneously, it also ensures that the oxygen concentration in the surrounding air remains within a safe range that does not harm the human body by incorporating an exhaust device. Therefore, through the design of this invention, the non-enclosed irradiation device effectively achieves a balance between improving operational efficiency and maintaining operator safety. Furthermore, the irradiation device of this invention provides a vertically movable platform with a retractable shield, which not only adapts to various objects to be irradiated, broadening its application range, but also minimizes gas escape, increasing applicability while improving operational safety.

[0057] It should be noted that the above are merely preferred embodiments for illustrating the present invention, and the present invention is not limited to the described embodiments. The scope of the present invention is determined by the claims. Furthermore, the present invention can be modified in various ways by those skilled in the art, all of which shall not depart from the protection sought by the claims.

Claims

1. An irradiation apparatus, comprising: a light source device; a conveying system disposed below the light source device to convey an object to be irradiated through the light source device, the conveying system having a conveying direction from an upstream feeding end to a downstream discharging end of the irradiation apparatus; and an oxygen control system, comprising: a gas range limiting device to define an oxygen control region around the light source device; a gas supply module to supply a gas to the light source device and the oxygen control region; an oxygen content detector to detect an oxygen concentration of the oxygen control region; and a control module connected to control the gas range limiting device, the gas supply module and the oxygen content detector, and to control the gas supply module according to the oxygen concentration to adjust a gas supply condition of the gas to maintain the oxygen concentration of the oxygen control region within a set range.

2. The irradiation apparatus of claim 1, wherein the oxygen control system comprises a setting platform located above the conveying system, the conveying system comprising a conveying belt to carry the object to be irradiated, and a distance between the setting platform and the conveying belt varies according to a height of the object to be irradiated relative to the conveying belt to adjust a distance between the light source device and the object to be irradiated.

3. The irradiation apparatus of claim 2, wherein the oxygen control system further comprises two shielding members respectively located at two outer sides of the conveying belt parallel to the conveying direction and disposed between the setting platform and the conveying system to form a gas control space between the setting platform, the conveying belt, the upstream feeding end and the downstream discharging end.

4. The irradiation apparatus of claim 3, wherein heights of the two shielding members relative to the conveying belt vary with the distance between the setting platform and the conveying belt.

5. The irradiation apparatus of claim 2, wherein the light source device comprises at least one lamp tube and a lamp cover, and the oxygen control region is defined by the lamp cover, the conveying belt and the gas range limiting device.

6. The irradiation apparatus of claim 2, wherein a joint of the setting platform is provided with a gas-tight structure.

7. The irradiation apparatus of claim 2, wherein the conveying belt is made of a gas-tight material or a material with low gas permeability.

8. The irradiation apparatus of claim 1, wherein the oxygen control system further comprises a gas extraction device to extract the gas escaping from the oxygen control region.

9. The irradiation apparatus of claim 8, wherein the oxygen control system further comprises a gas detector to detect a gas composition around the irradiation apparatus as a basis for the gas extraction device to adjust an extraction condition.

10. The irradiation apparatus of claim 1, wherein the gas range limiting device comprises at least one barrier gas flow generating device, and the gas supply module supplies the gas to the at least one barrier gas flow generating device, and the at least one barrier gas flow generating device generates at least one barrier gas flow using the gas to define the oxygen control region around the light source device.

11. The irradiation apparatus of claim 1, wherein the gas range limiting device comprises at least one gas blocking member to define the oxygen control region by hardware blocking.

12. The irradiation apparatus of claim 1, wherein the gas comprises an inert gas.

13. The irradiation apparatus of claim 1, wherein the set range of the oxygen concentration in the oxygen-controlled region is less than 100 ppm.

14. The irradiation apparatus of claim 1, wherein the irradiation wavelength of the light source device comprises one of the following ranges: 100 nm to 300 nm, 100 nm to 400 nm, 400 nm to 700 nm, 700 nm to 1400 nm, 1400 nm to 3000 nm, and 3000 nm to 1 mm.

15. An oxygen-controlled system for an irradiation apparatus, wherein the irradiation apparatus comprises a light source device, a conveying system disposed below the light source device for conveying an object to be irradiated through the light source device, and the conveying system has a conveying direction from an upstream feeding end to a downstream discharging end of the irradiation apparatus, the oxygen-controlled system comprising: a gas range limiting device for defining an oxygen-controlled region around the light source device; a gas supply module for supplying a gas to the light source device and the oxygen-controlled region; an oxygen-containing detector for detecting an oxygen concentration in the oxygen-controlled region; and a control module connected to control the gas range limiting device, the gas supply module, and the oxygen-containing detector, and according to the oxygen concentration, the control module controls the gas supply module to adjust a gas supply condition of the gas, so as to maintain the oxygen concentration in the oxygen-controlled region within a set range.

16. The oxygen-controlled system of claim 15, further comprising a gas extraction device for extracting the gas discharged from the oxygen-controlled region.

17. The oxygen-controlled system of claim 16, further comprising a gas detector for detecting a gas composition around the irradiation apparatus as a basis for the gas extraction device to adjust an extraction condition.

18. The oxygen-controlled system of claim 15, wherein the gas range limiting device comprises at least one barrier gas flow generating device, and the gas supply module supplies the gas to the at least one barrier gas flow generating device, and the at least one barrier gas flow generating device utilizes the gas to form at least one barrier gas flow to define the oxygen-controlled region around the light source device.

19. The oxygen-controlled system of claim 15, wherein the gas range limiting device comprises at least one gas blocking member to define the oxygen-controlled region by a hardware blocking manner.

20. The oxygen-controlled system of claim 15, wherein the gas comprises an inert gas.

21. The oxygen-controlled system of claim 15, wherein the set range of the oxygen concentration in the oxygen-controlled region is less than 100 ppm. ​ ​ ​ ​

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