Deposition Early Warning Method and System for Gas Flow Standard Devices Using Sonic Nozzles

By identifying the transient risk window of the sonic nozzle gas flow standard device and performing coherent demodulation analysis, the deposition problem that traditional monitoring methods cannot predict was solved, enabling early detection and quantitative assessment of deposition and improving the metering accuracy of the device.

CN121740199BActive Publication Date: 2026-05-26XIAN JINGZHUN ELECTRON CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIAN JINGZHUN ELECTRON CO LTD
Filing Date
2026-02-25
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

The silent inaccuracy in the metering performance of existing sonic nozzle gas flow standard devices caused by transient phase change deposition during pressure regulation is difficult to detect and quantify, and traditional steady-state monitoring methods cannot provide effective early warning.

Method used

By collecting dynamic pressure signals to identify transient risk windows, emitting ultrasonic detection signals and performing coherent demodulation analysis, extracting coherent acoustic features, and comparing them with the benchmark feature spectrum to generate early warning information, the control parameters of the pressure regulating valve are dynamically adjusted to reduce risks.

Benefits of technology

This technology enables early in-situ detection and quantitative assessment of deposition phenomena in sonic nozzle gas flow standard devices, improving the reliability and measurement accuracy of the device's detection results.

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Abstract

This application relates to the field of gas flow metering technology and discloses a deposition early warning method and system for a sonic nozzle gas flow standard device. The method includes: acquiring the dynamic pressure signal of the gas upstream of the sonic nozzle, identifying and segmenting the transient risk window; emitting an ultrasonic detection signal into the gas flow inside the sonic nozzle and receiving its penetration signal, extracting coherent acoustic features to characterize the boundary layer state of the nozzle throat wall; comparing and analyzing the coherent acoustic features with a pre-established benchmark feature spectrum to generate early warning information. This application solves the fundamental technical dilemma of the silent inaccuracy caused by deposition in sonic nozzle gas flow standard devices being difficult to detect and quantify by constructing a progressive and precise diagnostic chain from macroscopic fluid dynamic capture to microscopic surface effect detection, and then to quantitative assessment of metering risks, thereby improving the reliability of the device's detection results.
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