Perovskite solar cell and preparation method and application thereof

By incorporating a doped transparent semiconductor material layer into perovskite solar cells, the efficiency reduction and stability issues caused by the barrier layer are resolved, resulting in higher photoelectric conversion efficiency and improved stability.

CN121751868APending Publication Date: 2026-03-27WUXI UTMOST LIGHT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-26
Publication Date
2026-03-27

AI Technical Summary

Technical Problem

Existing perovskite solar cells suffer from reduced photoelectric conversion efficiency and poor photothermal stability due to the barrier layer between the hole transport layer and the perovskite light-absorbing layer.

Method used

A doped transparent semiconductor material layer is placed between the perovskite light-absorbing layer and the hole transport layer. It is formed by magnetron sputtering and has hole transport function. The hole transport layer is passivated to enhance hole transport performance.

Benefits of technology

This improved the photoelectric conversion efficiency and stability of perovskite solar cells, and enhanced the photothermal stability of the cells.

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Abstract

The invention provides a perovskite solar cell and a preparation method and application thereof, and the perovskite solar cell comprises a conductive substrate layer, an electrode layer, and an active layer disposed between the conductive substrate layer and the electrode layer. The active layer comprises an electron transport layer, a perovskite light absorption layer, a doped transparent semiconductor material layer and a hole transport layer which are stacked in sequence. The doped transparent semiconductor material layer is arranged between the perovskite light absorption layer and the hole transport layer, so that a certain passivation effect can be achieved on the hole transport layer, hole transport can be enhanced, and the stability of the cell is improved while the conversion efficiency of the cell is improved.
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Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of solar cells, and relates to a perovskite solar cell and a preparation method and application thereof. BACKGROUND

[0002] The most promising and leading solar cell in the current photovoltaic industry is a perovskite solar cell because it has relatively high theoretical conversion efficiency and relatively low production cost. However, the stability of the perovskite still has certain problems, such as poor light-heat stability of a module, apparent color change, and poor cold-heat cycle stability.

[0003] CN118450725A discloses a perovskite solar cell, a preparation method thereof, and an electrical equipment, the perovskite solar cell sequentially comprises a first electrode layer, a hole transport layer, a barrier layer, a perovskite absorption layer, an electron transport layer, and a second electrode layer, the hole transport layer comprises NiO x ; the barrier layer comprises a SAM material and an amine salt halide.

[0004] The above scheme sets a barrier layer between the hole transport layer and the perovskite light absorption layer to improve the device performance of the perovskite solar cell, but the barrier layer reduces the hole transport of the hole transport layer and the light-heat stability of the light absorption layer, resulting in a decrease in the photoelectric conversion efficiency of the cell. SUMMARY

[0005] The application aims to provide a perovskite solar cell and a preparation method and application thereof, and the application sets a doped transparent semiconductor material layer between the perovskite light absorption layer and the hole transport layer, which not only has a certain passivation effect on the hole transport layer but also enhances the transport of holes, improves the conversion efficiency of the cell, and improves the stability of the cell.

[0006] To achieve the application purpose, the following technical scheme is adopted.

[0007] In a first aspect, the application provides a perovskite solar cell, which comprises a conductive substrate layer, an electrode layer, and an active layer arranged between the conductive substrate layer and the electrode layer, and the active layer comprises an electron transport layer, a perovskite light absorption layer, a doped transparent semiconductor material layer, and a hole transport layer arranged in sequence.

[0008] The perovskite solar cell can be a formal one or a reverse one, wherein, if the perovskite solar cell is a formal perovskite solar cell, the hole transport layer of the active layer is close to the side of the electrode layer, and if the perovskite solar cell is a reverse perovskite solar cell, the hole transport layer of the active layer is close to the side of the conductive substrate layer.

[0009] The application sets a doped transparent semiconductor material layer between the perovskite light-absorbing layer and the hole transport layer, the doped transparent semiconductor material layer has no loss in light transmission, and the doped transparent semiconductor material layer has hole-electron pairs, can play a good passivation role on the hole transport layer, can enhance the transmission of holes, and can improve the conversion efficiency of the battery and the light-thermal stability of the perovskite light-absorbing layer.

[0010] Preferably, the thickness of the doped transparent semiconductor material layer is 3-5 nm, for example, 3 nm, 3.5 nm, 4 nm, 4.5 nm or 5 nm, etc., not limited to the listed values, and other values not listed in the value range are also applicable.

[0011] Preferably, the sheet resistance of the doped transparent semiconductor material layer is 5×10 6 -1×10 7 Ω / □, for example, 5×10 6 Ω / □, 6×10 6 Ω / □, 7×10 6 Ω / □, 8×10 6 Ω / □ or 1×10 7 Ω / □, etc.

[0012] Preferably, the doped transparent semiconductor material layer includes a doped indium oxide.

[0013] Preferably, the doping elements in the doped indium oxide include any one or a combination of at least two of cerium, tungsten, tin or zinc, and a typical but non-limiting combination includes a combination of cerium and zinc, a combination of cerium and tungsten, or a combination of tin and zinc, etc.

[0014] Preferably, the doped indium oxide includes any one or a combination of at least two of cerium-doped indium oxide (ICO), tungsten-doped indium oxide (IWO), tungsten-tin-doped indium oxide (IWTO) or zinc-doped indium oxide (IZO).

[0015] The material of the perovskite light-absorbing layer is Cs m FA 1-m PbI3, 0

[0016] Preferably, the thickness of the perovskite light-absorbing layer is 450-550 nm, for example, 450 nm, 480 nm, 500 nm, 520 nm or 550 nm, etc., not limited to the listed values, and other values not listed in the value range are also applicable.

[0017] Preferably, the hole transport layer includes nickel oxide.

[0018] Preferably, the thickness of the hole transport layer is 15-25 nm, for example, 15 nm, 18 nm, 20 nm, 22 nm or 25 nm, etc. The range of values is not limited to the listed values, and other values not listed in the range are also applicable.

[0019] Preferably, the electron transport layer comprises any one or a combination of at least two of a fullerene derivative, C 60 , titanium oxide, tin oxide or zinc oxide, typically but not limited to a combination of a fullerene derivative and titanium oxide, a combination of a fullerene derivative and tin oxide or zinc oxide, a combination of C 60 and titanium oxide, a combination of a fullerene derivative and tin oxide or zinc oxide, a combination of C 60 and tin oxide or a combination of a fullerene derivative and C 60 , etc.

[0020] Preferably, the thickness of the electron transport layer is 20-50 nm, for example, 20 nm, 25 nm, 30 nm, 40 nm or 50 nm, etc. The range of values is not limited to the listed values, and other values not listed in the range are also applicable.

[0021] Preferably, the conductive substrate layer comprises ITO conductive glass or FTO conductive glass.

[0022] Preferably, the electrode layer comprises a laminated electrode.

[0023] Preferably, the laminated electrode comprises any one or a combination of at least two of a molybdenum copper laminated electrode, a molybdenum copper molybdenum laminated electrode, a molybdenum aluminum chromium laminated electrode, an ITO silver ITO laminated electrode or an ITO copper laminated electrode.

[0024] In a second aspect, the present application provides a preparation method of the perovskite solar cell according to the first aspect, the preparation method comprising the following steps:

[0025] depositing a hole transport layer on the conductive substrate layer; preparing a doped transparent semiconductor material layer on the hole transport layer; preparing a perovskite light-absorbing layer on the doped transparent semiconductor material layer; sequentially depositing an electron transport layer and an electrode layer on the perovskite light-absorbing layer to obtain a perovskite solar cell;

[0026] or, depositing an electron transport layer on the conductive substrate layer; forming a perovskite light-absorbing layer on the electron transport layer; preparing a doped transparent semiconductor material layer on the perovskite light-absorbing layer; sequentially depositing a hole transport layer and an electrode layer on the doped transparent semiconductor material layer to obtain a perovskite solar cell.

[0027] The present application can select to prepare a formal perovskite solar cell or a reverse perovskite solar cell as needed.

[0028] The application makes the doped transparent semiconductor material layer have the function of holes by means of magnetron sputtering, and has certain passivation effect on the hole transport layer due to the transparent and hole characteristics, and does not affect the characteristics of the hole transport layer, thereby improving the stability of the battery. Preferably, the method for preparing the doped transparent semiconductor material layer comprises magnetron sputtering.

[0029] Preferably, the base vacuum degree of the magnetron sputtering is less than 3x10 -3 Pa.

[0030] Preferably, the working pressure of the magnetron sputtering is 1x10 -1 ~ 5x10 -1 Pa, for example: 1x10 -1 Pa, 2x10 - 1 Pa, 3x10 -1 Pa, 4x10 -1 Pa or 5x10 -1 Pa, etc. The values within the range are also applicable.

[0031] Preferably, the power of the magnetron sputtering is 1~3kW, for example: 1kW, 1.5kW, 2kW, 2.5kW or 3kW, etc. The values within the range are also applicable.

[0032] Preferably, the target material of the magnetron sputtering comprises IWO target and / or In2O3 target.

[0033] Preferably, the atmosphere of the magnetron sputtering comprises oxygen and protective gas.

[0034] Preferably, the protective gas comprises argon.

[0035] Preferably, the volume ratio of oxygen in the atmosphere of the magnetron sputtering is 50~70%, for example: 50%, 55%, 60%, 65% or 70%, etc. The values within the range are also applicable.

[0036] The application can control the sheet resistance of the doped transparent semiconductor material layer by controlling the oxygen ratio when preparing the doped transparent semiconductor material layer, and can prepare the doped transparent semiconductor material layer which has certain passivation effect on the hole transport layer and does not affect the hole transport layer.

[0037] Preferably, the method for depositing the hole transport layer comprises magnetron sputtering method.

[0038] The hole transport layer and the doped transparent semiconductor material layer can be prepared by magnetron sputtering, equipment and processes are saved, and only the proportion of oxygen needs to be adjusted during deposition of the hole transport layer and the doped transparent semiconductor material layer, but an atmosphere isolation chamber is generally arranged between the hole transport layer and the doped transparent semiconductor material layer to change the film deposition atmosphere.

[0039] Preferably, the method for depositing the electron transport layer comprises a chemical deposition method.

[0040] Compared with the prior art, the present application has the following beneficial effects:

[0041] The present application sets the doped transparent semiconductor material layer between the perovskite light-absorbing layer and the hole transport layer, which not only has a certain passivation effect on the hole transport layer, but also enhances the transmission of holes, improves the conversion efficiency of the battery and improves the stability of the battery. BRIEF DESCRIPTION OF DRAWINGS

[0042] Figure 1 is a light-thermal aging comparison chart of the perovskite solar cell prepared in Examples 1-7 of the present application. DETAILED DESCRIPTION

[0043] The technical solutions of the present application will be further described through specific embodiments. Those skilled in the art should understand that the embodiments are only used to help understand the present application and should not be regarded as specific limitations on the present application.

[0044] The examples and comparative examples of the present application all take a single sub-cell perovskite solar cell as an example.

[0045] Example 1

[0046] The present embodiment provides a perovskite solar cell, which is prepared by the following method:

[0047] First, a nickel oxide layer is deposited on an FTO glass substrate by magnetron sputtering to form a hole transport layer, and the thickness of the hole transport layer is 25 nm. Then, an IWO layer with a thickness of 3 nm is formed on the surface of the nickel oxide layer away from the FTO by magnetron sputtering using an IWO target material. During the sputtering process, the base vacuum is less than 3.0*10 -3 Pa, argon and oxygen are introduced into the chamber, and the working pressure is 3*10 - 1 Pa, the amount of argon and oxygen is kept unchanged, the power is turned on, the power is 2kW, and the proportion of oxygen is adjusted to 60%. Then, a Cs 0.15 FA 0.85 PbI3 perovskite light-absorbing layer is prepared by spin coating, and the thickness of the perovskite light-absorbing layer is 500 nm. Then, a C 60An electron transport layer with a thickness of 20 nm is then prepared, and a Cu electrode layer with a thickness of 100 nm is then prepared to obtain the perovskite solar cell.

[0048] The perovskite solar cell is a transverse perovskite solar cell, and comprises, in sequence, an FTO glass conductive substrate layer, a NiO x A hole transport layer, an IWO layer, Cs 0.15 FA 0.85 A PbI3 perovskite light-absorbing layer, an electron transport layer, and a Cu electrode layer.

[0049] Example 2

[0050] The perovskite solar cell is prepared by the following method:

[0051] First, a nickel oxide layer is deposited on the FTO glass substrate by magnetron sputtering to form a hole transport layer with a thickness of 25 nm, and then an IWTO layer with a thickness of 5 nm is formed on the side surface of the nickel oxide layer away from the FTO by magnetron sputtering using an IWTO target material, during the sputtering process, the base vacuum is less than 3.0*10 -3 Pa, argon and oxygen are introduced into the chamber, the working gas pressure is 3*10 -1 Pa, the amount of argon and oxygen is kept unchanged, the power is turned on, the power is 2kW, and the proportion of oxygen is adjusted to 50%. A Cs 0.15 FA 0.85 A PbI3 perovskite light-absorbing layer with a thickness of 450 nm is then prepared, and a C 60 An electron transport layer with a thickness of 15 nm is then prepared, and a Cu electrode layer with a thickness of 80 nm is then prepared to obtain the perovskite solar cell. The perovskite solar cell is a transverse perovskite solar cell, and comprises, in sequence, an FTO glass conductive substrate layer, a NiO x A hole transport layer, an IWTO doped transparent semiconductor material layer, Cs 0.15 FA 0.85 A PbI3 perovskite light-absorbing layer, an electron transport layer, and a Cu electrode layer.

[0052] Example 3

[0053] The perovskite solar cell is prepared by the following method:

[0054] First, a nickel oxide layer is deposited on the FTO glass substrate by magnetron sputtering to form a hole transport layer with a thickness of 25 nm, and then an ICO layer with a thickness of 4 nm is formed on the side surface of the nickel oxide layer away from the FTO by magnetron sputtering using an ICO target material, during the sputtering process, the base vacuum is less than 3.0*10 -3Pa, argon and oxygen were introduced into the chamber, and the working pressure was 3x10 - 1 Pa, the amount of argon and oxygen was kept unchanged, the power was turned on, the power was 2kW, and the proportion of oxygen was adjusted to 70%. Then, Cs 0.15 FA 0.85 PbI3perovskite light-absorbing layer, the thickness of the perovskite light-absorbing layer was 550nm, then a fullerene derivative electron transport layer was prepared, the thickness was 50nm, then a Cu electrode layer was prepared, the thickness was 50nm, and a perovskite solar cell was obtained.

[0055] The perovskite solar cell is a transverse perovskite solar cell, which comprises a FTO glass conductive substrate layer, a NiO x hole transport layer, an ICO doped transparent semiconductor material layer, a Cs 0.15 FA 0.85 PbI3perovskite light-absorbing layer, an electron transport layer and a Cu electrode layer.

[0056] Example 4

[0057] The difference between this embodiment and example 1 is only that the volume proportion of oxygen in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer is 40%, and other conditions and parameters are completely the same as those in example 1.

[0058] Example 5

[0059] The difference between this embodiment and example 1 is only that the volume proportion of oxygen in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer is 80%, and other conditions and parameters are completely the same as those in example 1.

[0060] Example 6

[0061] The difference between this embodiment and example 1 is only that the thickness of the doped transparent semiconductor material layer is 2nm, and other conditions and parameters are completely the same as those in example 1.

[0062] Example 7

[0063] The difference between this embodiment and example 1 is only that the thickness of the doped transparent semiconductor material layer is 6nm, and other conditions and parameters are completely the same as those in example 1.

[0064] Comparative Example 1

[0065] The difference between this comparative example and example 1 is only that the doped transparent semiconductor material layer is not provided, and other conditions and parameters are completely the same as those in example 1.

[0066] Comparative Example 2

[0067] The comparative example differs from example 1 only in that undoped indium oxide is used as the transparent semiconductor material layer, and other conditions and parameters are exactly the same as example 1.

[0068] Performance test:

[0069] The doped transparent semiconductor material layers prepared in the examples and comparative examples are tested, and the test results are shown in Table 1

[0070] Table 1

[0071]

[0072]

[0073] Photoelectric conversion efficiency test: the perovskite solar cells prepared in the examples and comparative examples are tested by using a solar light simulator to emit a standard sunlight (spectrum AM1.5G, incident power 100 mW / cm 2 , temperature 25℃). The efficiency of the 0.72 m 2 area cell is tested, Pmax is the power of the cell; Isc is the series current of the cell, Voc is the open circuit voltage of the cell; Rs is the series resistance of the cell; Rsh is the parallel resistance of the cell; Eff is the conversion efficiency of the cell, FF is the fill factor of the cell, and the test results are shown in Table 2:

[0074] Table 2

[0075]

[0076]

[0077] The perovskite solar cells prepared in the examples and comparative examples are tested by using a solar light simulator to emit a standard sunlight (spectrum AM1.5G, incident power 100 mW / cm 2 , temperature 50℃), and the data tested after different light-heat time, the efficiency of the 0.72 m 2 area cell is tested, and the test results are shown in Table 3:

[0078] Table 3

[0079] initial 100H 250H 500H 750H 1000H decay rate Example 1 105.03 104.30 103.80 102.20 101.30 100.90 -3.94% Example 2 104.13 103.70 102.90 101.60 100.80 99.90 -4.06% Example 3 104.71 103.90 102.80 101.60 100.90 100.50 -4.02% Example 4 99.75 98.40 96.50 94.10 93.02 91.90 -7.87% Example 5 99.97 98.60 96.60 94.31 93.25 92.30 -7.67% Example 6 100.19 99.03 97.65 95.31 94.12 93.40 -6.78% Example 7 98.04 97.13 95.66 93.38 92.26 91.50 -6.67% Comparative Example 1 101.74 100.06 98.75 96.89 95.38 93.87 -7.74% Comparative Example 2 93.58 91.45 89.56 86.48 84.89 83.78 -10.47%

[0080] As can be seen from Tables 1-3, it can be obtained from Examples 1-7 that the Pmax of the perovskite solar cell comprising the doped transparent semiconductor material layer prepared according to the application can reach 98.04 W or more, the Isc can reach 1.74 A or more, the Voc can reach 79.03 V or more, the FF can reach 70.91% or more, the Eff can reach 13.85% or more, the Rs can reach 5.87 Ω or less, the Rsh can reach 2332 Ω or less, and the attenuation rate using 1000 h can reach 7.87% or less. In addition, by controlling the preparation conditions and thickness of the doped transparent semiconductor material layer, the Pmax of the perovskite solar cell prepared in Examples 1-3 can reach 104.13 W or more, the Isc can reach 1.74 A or more, the Voc can reach 79.51 V or more, the FF can reach 74.40% or more, the Eff can reach 14.46% or more, the Rs can reach 5.83 Ω or less, the Rsh can reach 920 Ω or less, and the attenuation rate using 1000 h can reach 4.02% or less.

[0081] As can be obtained from the comparison between Example 1 and Examples 4-5, the oxygen volume ratio in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer will affect the performance of the perovskite solar cell during the preparation process of the perovskite solar cell according to the application. When the oxygen volume ratio in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer is controlled to be 50-70%, the sheet resistance of the doped transparent semiconductor material layer is in a suitable range, and the performance of the perovskite solar cell prepared is better. If the oxygen volume ratio in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer is too low, the sheet resistance of the doped transparent semiconductor material layer is small, the number of electrons in the material is increased, and the material exhibits electronic characteristics, i.e., a conductor, which is not the hole characteristics of the non-conductive material used in the application. If the oxygen volume ratio in the magnetron sputtering atmosphere for preparing the doped transparent semiconductor material layer is too high, the sheet resistance of the doped transparent semiconductor material layer is large, the number of holes in the material is too large, and the material is an insulating oxide, and the holes move slowly, which affects the transmission performance. That is, the doped transparent semiconductor material layer in the application is based on the hole characteristics and has a small amount of electrons, which can increase the transmission performance of the holes.

[0082] As can be obtained from the comparison between Example 1 and Examples 6-7, the thickness of the doped transparent semiconductor material layer in the perovskite solar cell according to the application will affect the performance of the perovskite solar cell. If the thickness of the doped transparent semiconductor material layer is too small or too large, it is not conducive to the improvement of the power and stability of the module.

[0083] As can be seen from the comparison between Example 1 and Comparative Example 1, the present invention provides a doped transparent semiconductor material layer between the perovskite light-absorbing layer and the hole transport layer. The doped transparent semiconductor material layer does not lose light transmission, and the doped transparent semiconductor material layer has electron-hole pairs, which can effectively passivate the hole transport layer and enhance hole transport, thereby improving the conversion efficiency of the battery and the photothermal stability of the perovskite light-absorbing layer.

[0084] As can be seen from the comparison between Example 1 and Comparative Example 2, pure In2O3 has high insulation properties and is expensive. The present invention reduces its price by doping and improves the electron-hole pairs in its structure. By different resistance performances, a better hole ratio is achieved, which improves the material's mobility and enables better transport.

[0085] The power attenuation comparison diagram of perovskite solar cells prepared in various embodiments and comparative examples of the present invention is shown in the figure below. Figure 1 As shown, combined with Figure 1 As shown in Table 1, the volume percentage of oxygen in the magnetron sputtering atmosphere for preparing doped transparent semiconductor material layers affects the sheet resistance of the doped transparent semiconductor material layers, which in turn significantly affects the power and decay rate of perovskite solar cells. When the sheet resistance of the doped transparent semiconductor material layers is controlled within a suitable range, the perovskite solar cells have higher power and slower decay. If the sheet resistance is exceeded, the power of the perovskite solar cells will decrease significantly, and the decay rate will also increase significantly.

[0086] The applicant declares that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention fall within the protection and disclosure scope of the present invention.

Claims

1. A perovskite solar cell, characterized in that, The perovskite solar cell includes a conductive substrate layer, an electrode layer, and an active layer disposed between the conductive substrate layer and the electrode layer. The active layer includes an electron transport layer, a perovskite light-absorbing layer, a doped transparent semiconductor material layer, and a hole transport layer stacked sequentially.

2. The perovskite solar cell as described in claim 1, characterized in that, The thickness of the doped transparent semiconductor material layer is 3–5 nm.

3. The perovskite solar cell as described in claim 1 or 2, characterized in that, The sheet resistance of the doped transparent semiconductor material layer is 5 × 10⁻⁶. 6 ~1×10 7 Ω / □.

4. The perovskite solar cell according to any one of claims 1-3, characterized in that, The doped transparent semiconductor material layer includes doped indium oxide; Preferably, the doping element in the doped indium oxide includes any one or a combination of at least two of cerium, tungsten, tin, or zinc.

5. The perovskite solar cell according to any one of claims 1-4, characterized in that, The perovskite light-absorbing layer is made of Cs. m FA 1-m PbI3,0 <m<1。 6. The perovskite solar cell according to any one of claims 1-5, characterized in that, The hole transport layer comprises nickel oxide, and the thickness of the hole transport layer is 15–25 nm.

7. The perovskite solar cell according to any one of claims 1-6, characterized in that, The electron transport layer includes fullerene derivatives and C. 60 The electron transport layer is composed of any one or a combination of at least two of titanium oxide, tin oxide, or zinc oxide, and the thickness of the electron transport layer is 20–50 nm. Preferably, the conductive substrate layer comprises ITO conductive glass or FTO conductive glass; Preferably, the electrode layer comprises a stacked electrode; Preferably, the multilayer electrode comprises any one or a combination of at least two of the following: molybdenum-copper multilayer electrode, molybdenum-copper-molybdenum multilayer electrode, molybdenum-aluminum-chromium multilayer electrode, ITO-silver-ITO multilayer electrode, or ITO-copper multilayer electrode.

8. A method for preparing a perovskite solar cell as described in any one of claims 1-7, characterized in that, The preparation method includes the following steps: A hole transport layer is deposited on a conductive substrate; a doped transparent semiconductor material layer is fabricated on the hole transport layer; a perovskite light-absorbing layer is fabricated on the doped transparent semiconductor material layer; an electron transport layer and an electrode layer are sequentially deposited on the perovskite light-absorbing layer to obtain a perovskite solar cell. Alternatively, an electron transport layer is deposited on a conductive substrate; a perovskite light-absorbing layer is formed on the electron transport layer; a doped transparent semiconductor material layer is prepared on the perovskite light-absorbing layer; and a hole transport layer and an electrode layer are sequentially deposited on the doped transparent semiconductor material layer to obtain a perovskite solar cell.

9. The preparation method according to claim 8, characterized in that, The method for preparing a doped transparent semiconductor material layer includes magnetron sputtering, wherein the working gas pressure of the magnetron sputtering is 1×10⁻⁶. -1 ~5×10 -1 Pa, the power of the magnetron sputtering is 1-3 kW, and the background vacuum of the magnetron sputtering is <3 × 10 Pa. -3 Pa; Preferably, the magnetron sputtering target includes an IWO target and / or an In2O3 target.

10. The preparation method according to claim 9, characterized in that, The atmosphere for magnetron sputtering includes oxygen and a protective gas; Preferably, the protective gas includes argon; Preferably, the volume percentage of oxygen in the magnetron sputtering atmosphere is 50-70%.