Vacuumizing device

Abstract

The invention relates to a vacuumizing device. The vacuumizing device comprises an air outlet pipeline and an air exhaust mechanism, wherein the air outlet pipeline is provided with an air inlet end; the air exhaust mechanism is connected with the air outlet pipeline and arranged on the same side with the air inlet end, the air exhaust mechanism is provided with a plurality of first air exhaust openings deviating from the air inlet end, and all the first air exhaust openings are distributed in the same horizontal plane, communicate with the air inlet end and jointly form a honeycomb structure in the same horizontal plane; and the lengths of the flow channels formed between the first extraction openings and the air inlet end are equal. All the first extraction openings of the vacuumizing device jointly form the honeycomb structure, and the lengths of the runners formed between the first extraction openings and the air inlet end are equal, so that the extraction rates of the first extraction openings during extraction are the same, and the negative pressure applied to the substrate during extraction is equal. In other words, the pressure applied to each part of the substrate is consistent as much as possible, and the film forming uniformity of the perovskite coating on the substrate is improved.

Description

Technical Field

[0001] This application relates to the field of auxiliary tool technology, and in particular to a vacuum pumping device. Background Technology

[0002] In the fabrication of perovskite solar cells, the use of a vacuum pump is beneficial for crystal nucleation and gradual film formation of the perovskite coating on the substrate. However, during the air extraction stage around the coating, the different air flow rates applied to different parts of the coating by the vacuum pump result in varying air pressures at different locations, leading to uneven coating thickness in the final product. Summary of the Invention

[0003] This application addresses the problem that existing vacuum pumping devices, when extracting gas near the coating of a substrate, result in uneven coating film formation due to unequal gas pressure at different parts of the coating. The proposed vacuum pumping device achieves the technical effect of ensuring consistent gas flow rate at different parts of the coating, thereby improving the uniformity of coating film formation.

[0004] A vacuum pumping device, comprising:

[0005] The air outlet pipe has an air inlet end;

[0006] An air extraction mechanism is connected to the air outlet pipe and is disposed on the same side as the air inlet. The air extraction mechanism has a plurality of first air extraction ports disposed away from the air inlet. All the first air extraction ports are distributed on the same horizontal plane and are all connected to the air inlet. The first air extraction ports are constructed in a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first air extraction port and the air inlet is equal.

[0007] In one embodiment, the air extraction mechanism is located below the air outlet pipe and includes multiple air extraction components. All the air extraction components are stacked and each has an opening that penetrates through it. Two adjacent air extraction components are fluidly connected through their corresponding openings.

[0008] The opening of the bottom-level air extraction component is configured as the first air extraction port, and the opening of the top-level air extraction component is connected to the air inlet. From the air inlet to the first air extraction port, the number of openings corresponding to each air extraction component gradually increases.

[0009] In one embodiment, all the air extraction components include a first air extraction component, a second air extraction component, and a third air extraction component stacked from the first air extraction port to the air inlet end. The opening of the second air extraction component is configured as a second air extraction port. There are multiple third air extraction components, and the opening of each third air extraction component is configured as a third air extraction port.

[0010] Each of the third exhaust ports is connected to an equal number of second exhaust ports to uniformly distribute the gas passing through all the second exhaust ports, and each of the second exhaust ports is also connected to an equal number of first exhaust ports to uniformly distribute the gas passing through all the first exhaust ports.

[0011] In one embodiment, all of the third air extraction components are arranged in an array; and / or, all of the second air extraction ports are constructed in a honeycomb structure; and / or, the first air extraction port, the second air extraction port and the third air extraction port have the same structure and are all constructed as cones.

[0012] In one embodiment, the opening areas of the third air intake, the second air intake, and the first air intake gradually decrease from the air intake end toward the first air intake.

[0013] In one embodiment, the opening area decreases sequentially in a proportional manner, and the proportional range is 0, 6 to 0, 8.

[0014] In one embodiment, the air outlet pipe includes a main pipe, a plurality of first branch pipes and a plurality of second branch pipes. All the first branch pipes are connected between the main pipe and the second branch pipes and divert the flow from the main pipe. The end of the main pipe away from the first branch pipes is provided with the air inlet. Each first branch pipe is connected to an equal number of second branch pipes at its end away from the main pipe. The ends of the second branch pipes away from the first branch pipes are connected to the third air extraction port and correspond one-to-one.

[0015] In one embodiment, the air extraction mechanism further includes an air replenishment component, which is installed on the first air extraction component and disposed on the same side as the first air extraction port.

[0016] In one embodiment, the air replenishment component includes a horizontal pipe and a vertical pipe, the plane formed by the horizontal pipe and the vertical pipe is parallel to the horizontal plane where the first air extraction port is distributed, and the horizontal pipe and the vertical pipe are each provided with an air replenishment port along their respective extension directions.

[0017] In one embodiment, the air supply component further includes a pressure regulating member installed on the transverse pipe and at least one end of the transverse pipe along its respective extension direction; and / or, the first air extraction member is recessed to form a groove, the groove containing the transverse pipe and the longitudinal pipe.

[0018] All the first air extraction ports of the aforementioned vacuum device form a honeycomb structure, and the length of the flow channel formed between each first air extraction port and the air inlet is equal. Therefore, the extraction rate of each first air extraction port is the same, and the negative pressure applied to the substrate during extraction is equal. That is, the pressure on all parts of the substrate is as uniform as possible, which improves the film uniformity of the perovskite coating on the substrate. The reason for constructing all the first air extraction ports into a honeycomb structure is that each hole (first air extraction port) of the honeycomb structure can form an air isolation layer, which can maintain the stability of the vacuum environment during the vacuuming process. Moreover, considering each first air extraction port and its corresponding flow channel as a unit, each unit can evenly distribute external forces, reduce the probability of local deformation of the vacuuming mechanism, and improve the impact resistance of the vacuuming mechanism. In addition, the honeycomb structure can also reduce the weight of the vacuuming mechanism itself. Attached Figure Description

[0019] Figure 1 A perspective view of a vacuuming device provided in some embodiments of this application.

[0020] Figure 2 Exploded view of a vacuuming device provided in some embodiments of this application.

[0021] Figure 3 This is a bottom view of a vacuuming device provided in some embodiments of this application.

[0022] Figure 4 This is a top view of the second pumping component of a vacuuming device provided in some embodiments of this application.

[0023] Figure 5 This is a bottom view of the second pumping component of a vacuuming device provided in some embodiments of this application.

[0024] Figure 6 This is a top view of the third pumping component of a vacuuming apparatus provided in some embodiments of this application.

[0025] Figure 7 A bottom view of the third pumping component of a vacuuming device provided in some embodiments of this application.

[0026] Explanation of reference numerals in the attached figures:

[0027] 10. Outlet pipe; 11. Main pipe; 111. Inlet end; 12. First branch pipe; 13. Second branch pipe; 20. Suction mechanism; 21. First suction component; 211. First suction port; 22. Second suction component; 221. Second suction port; 23. Third suction component; 231. Third suction port; 30. Air replenishment component; 31. Horizontal pipe; 32. Longitudinal pipe; 33. Pressure regulating component; 40. Vacuum angle valve; 50. Vacuum butterfly valve; 100. Vacuuming device. Detailed Implementation

[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0030] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the communication between two internal sections of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0032] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0033] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0034] See Figures 1 to 3 This application provides a vacuum device 100, which includes an outlet pipe 10 and a vacuuming mechanism 20. The outlet pipe 10 has an inlet end 111; the vacuuming mechanism 20 is connected to the outlet pipe 10 and is disposed on the same side as the inlet end 111. The vacuuming mechanism 20 has a plurality of first vacuum ports 211 disposed away from the inlet end 111. All the first vacuum ports 211 are distributed on the same horizontal plane and are all connected to the inlet end 111. The first vacuum ports 211 are constructed in a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first vacuum port 211 and the inlet end 111 is equal.

[0035] The exhaust pipe 10 is used to collect the gas extracted by the suction mechanism 20 and discharge the extracted gas in a concentrated manner. The flow channels formed between each first suction port 211 and the inlet end 111 of the suction mechanism 20 are independently configured, and each flow channel has an equal length. The gas transported in these channels converges at the inlet end 111 and is then concentrated and transported through the exhaust pipe 10. The shape of the first suction port 211 can be, but is not limited to, circular or hexagonal.

[0036] When using the vacuum device 100, a substrate coated with a layer (such as perovskite) is placed on a work platform located below the vacuum device 100, with the first suction port 211 of the vacuum device 100 facing the substrate. Then, the vacuum device 100 is activated, and the first suction port 211 begins to pump air to control the crystal nucleation rate of the perovskite coating on the substrate. Because all the first suction ports 211 together form a honeycomb structure, and the length of the flow channel formed between each first suction port 211 and the air inlet 111 is equal, the pumping rate of each first suction port 211 is the same, and the negative pressure applied to the substrate during pumping is equal. That is, the pressure on each part of the substrate is as uniform as possible, improving the film uniformity of the perovskite coating on the substrate.

[0037] The reason for constructing all the first exhaust ports 211 as a honeycomb structure is that each hole (first exhaust port 211) of the honeycomb structure can form an air isolation layer, which can maintain the stability of the vacuum environment during the vacuuming process. Moreover, by treating each first exhaust port 211 and its corresponding flow channel as a unit, each unit can evenly distribute external forces, reducing the probability of local deformation of the exhaust mechanism 20, thereby improving the impact resistance of the exhaust mechanism 20. In addition, the honeycomb structure can also reduce the weight of the exhaust mechanism 20 itself.

[0038] like Figure 2 As shown, in some embodiments, the air extraction mechanism 20 is located below the air outlet pipe 10 and includes multiple air extraction components. All air extraction components are stacked and each has an opening that penetrates it. Adjacent air extraction components are fluidly connected through their corresponding openings. The opening of the air extraction component at the bottom layer is configured as the first air extraction port 211, and the opening of the air extraction component at the top layer is connected to the air inlet 111. From the air inlet 111 to the first air extraction port 211, the number of openings corresponding to each air extraction component gradually increases to achieve uniform flow distribution through the openings.

[0039] For example, there are two extraction components. For ease of explanation, the extraction component located at the bottom layer is named the bottom layer extraction component, and the extraction component at the top layer is named the top layer extraction component. Both the top layer extraction component and the bottom layer extraction component are connected through openings formed on themselves to extract air around the substrate to the exhaust pipe 10. The top layer extraction component has fewer openings than the bottom layer extraction component. Each opening of the top layer extraction component is connected to an equal number of openings on the bottom layer extraction component to uniformly distribute the gas passing through the top layer extraction component and the bottom layer extraction component.

[0040] This configuration ensures that the flow rate of fluid passing through each opening in the bottom layer is as consistent as possible, and that the resulting negative pressure is also as equal as possible. Furthermore, maximizing the number of openings in the bottom layer allows for the extraction of air from as many areas of the substrate as possible at the same rate, thereby improving the uniformity of the perovskite coating on the substrate.

[0041] Please continue reading. Figure 2 In some embodiments, all the air extraction components include a first air extraction component 21, a second air extraction component 22 and a third air extraction component 23 stacked from the first air extraction port 211 to the air inlet end 111. The opening of the second air extraction component 22 is configured as a second air extraction port 221. There are multiple third air extraction components 23, and the opening of each third air extraction component 23 is configured as a third air extraction port 231.

[0042] Each of the third exhaust ports 231 is connected to an equal number of second exhaust ports 221 to evenly distribute the gas passing through all the second exhaust ports 221. Each of the second exhaust ports 221 is also connected to an equal number of first exhaust ports 211 to evenly distribute the gas passing through all the first exhaust ports 211.

[0043] For example, there are eight third exhaust components 23, each with a third exhaust port 231. The second exhaust components 22 are divided into eight regions, each with four second exhaust ports 221. Each region corresponds to one third exhaust component 23, and all the second exhaust ports 221 in each region are connected to the same third exhaust port 231.

[0044] The first suction component 21 is also divided into eight regions, corresponding to the eight regions of the second suction component 22. However, each region of the first suction component 21 is further divided into four sub-regions corresponding to the single second suction port 221 within each region of the second suction component 22, and each sub-region is provided with four first suction ports 211.

[0045] When the gas passes through the first suction member 21, the second suction member 22, and the third suction member 23, it can be diverted and pressure divided in sequence. In this way, while ensuring that the negative pressure formed at the first suction port 211 meets the requirements, as many first suction ports 211 as possible can be set to extract gas from different parts of the substrate through different first suction ports 211, thereby improving the film uniformity of the perovskite coating on the substrate.

[0046] It should be noted that the first suction component 21, the second suction component 22, and the third suction component 23 can all be connected by threaded connections, snap-fit ​​connections, or other methods that facilitate disassembly and assembly, so as to reduce the installation difficulty of the first suction component 21, the second suction component 22, and the third suction component 23, and reduce the maintenance cost of the suction mechanism 20.

[0047] Furthermore, in some embodiments, all the third extraction elements 23 are arranged in an array.

[0048] Thus, the structure formed by all the third air extraction ports 231 is similar to a honeycomb structure, which improves the impact resistance of the third air extraction component 23 while allowing the individual third air extraction component 23 to be removed.

[0049] Furthermore, such as Figure 4 and Figure 5 As shown, all the second air extraction ports 221 are constructed together to form a honeycomb structure.

[0050] This design improves the impact resistance of the second air extraction component 22, which has a second air extraction port 221.

[0051] Please see Figures 4 to 7 In some embodiments, the first air extraction port 211, the second air extraction port 221 and the third air extraction port 231 have the same structure and are all constructed as cones.

[0052] For example, such as Figure 6 and Figure 7 As shown, the bottom step of the cone is square, with the bottom positioned close to the base plate. The top cross-section of the cone is circular, and the inclination angle of the inner wall of the cone is 150°. This configuration increases the air intake area on the air intake side of the extraction port and compresses the extracted gas, thereby improving the extraction speed.

[0053] Specifically, in some embodiments, the opening areas of the third air intake 231, the second air intake 221, and the first air intake 211 gradually decrease from the air intake end 111 toward the first air intake 211.

[0054] Thus, by setting as many air extraction ports as possible on each air extraction component along the direction from the air inlet 111 to the first air extraction port 211, the gas from each part of the substrate can be uniformly extracted by aligning it with different parts of the substrate.

[0055] More specifically, in some embodiments, the opening area decreases proportionally in sequence, with the ratio ranging from 0.6 to 0.8.

[0056] This setup allows for even distribution of air to the air intake ports on the next lower level without affecting the extraction efficiency of each port.

[0057] like Figure 2As shown, in some embodiments, the air outlet pipe 10 includes a main pipe 11, a plurality of first branch pipes 12 and a plurality of second branch pipes 13. All the first branch pipes 12 are connected between the main pipe 11 and the second branch pipes 13 and divert the main pipe 11. The end of the main pipe 11 away from the first branch pipes 12 is provided with an air inlet 111. The ends of each first branch pipe 12 away from the main pipe 11 are connected to an equal number of second branch pipes 13. The ends of the second branch pipes 13 away from the first branch pipes 12 are connected to the third air extraction port 231 and correspond one-to-one.

[0058] The first branch pipe 12 is used to divert the gas flowing through the outlet pipe 10, and the second branch pipe 13 is used to divert the gas flowing through the first branch pipe 12.

[0059] For example, in Figure 2 In the example shown, there are two first branch pipes 12 and eight second branch pipes 13. One end of each first branch pipe 12 is connected to the main pipe 11, and the other end is connected to four second branch pipes 13. These four second branch pipes 13 are then connected to the third exhaust port 231 of the corresponding third exhaust component 23.

[0060] In this way, the flow path length and path between each first air extraction port 211 and the air inlet 111 are limited by the corresponding branch pipes, and the airflow flowing through the second air extraction component 22 and the third air extraction component 23 are sequentially diverted to better divide the flow and pressure.

[0061] like Figure 2 and Figure 3 As shown, in some embodiments, the air extraction mechanism 20 further includes an air replenishment component 30, which is installed on the first air extraction component 21 and disposed on the same side as the first air extraction port 211.

[0062] The gas replenishment component 30 is used to release gas to the substrate. When the pumping mechanism 20 evacuates the air around the perovskite coating on the substrate, the environment around the coating is created as a vacuum. Subsequently, the gas replenishment component 30 is activated, injecting gas into the aforementioned vacuum environment. The gas blown in by the gas replenishment component 30 can form a stable and uniform airflow region within the vacuum environment, avoiding the generation of local eddies, thereby regulating the pressure balance within the vacuum environment, optimizing the thin film deposition environment, and ensuring the stability of the thin film deposition process, thus improving the quality and uniformity of thin film crystallization.

[0063] Furthermore, such as Figure 3 As shown, in some embodiments, the air replenishment component 30 includes a transverse pipe 31 and a longitudinal pipe 32. The plane formed by the transverse pipe 31 and the longitudinal pipe 32 is parallel to the horizontal plane where the first air extraction port 211 is distributed. The transverse pipe 31 and the longitudinal pipe 32 are each provided with an air replenishment port along their respective extension directions.

[0064] For example, in Figure 3 In the example shown, the gas replenishment assembly 30 includes three transverse pipes 31 and five longitudinal pipes 32. All transverse pipes 31 are parallel and spaced apart, as are all longitudinal pipes 32. The shape formed by the transverse pipes 31 and longitudinal pipes 32 located around the periphery of the substrate is roughly similar to the outer contour of the substrate. The remaining transverse pipes 31 and longitudinal pipes 32 are located in the central region of the substrate, dividing it into multiple areas. Gas replenishment ports on the transverse pipes 31 and longitudinal pipes 32 are positioned for different areas, ensuring that the gas flowing from the gas replenishment ports is evenly distributed across all areas of the substrate, thereby further improving the quality and uniformity of thin film crystallization.

[0065] Furthermore, such as Figure 2 As shown, in some embodiments, the air supply assembly 30 further includes a pressure regulating member 33, which is installed on the transverse pipe 31 and at least one end of the transverse pipe 31 along its respective extension direction.

[0066] In other words, each transverse pipe 31 can be equipped with a pressure regulating component 33 (such as a precision pressure regulating valve) at one end, or a pressure regulating component 33 can be installed at both ends of the pipe to more accurately adjust the internal pressure of each pipe, thereby adjusting the pressure of the gas blown out from the gas inlet and thus improving the airflow in the vacuum environment.

[0067] In some embodiments, the first air extraction member 21 is recessed to form a groove, and a transverse pipe 31 and a longitudinal pipe 32 are provided in the groove.

[0068] When a vacuuming operation is performed on the substrate, at least a portion of the substrate can be located within the groove, meaning the surface of the substrate coated with the perovskite coating is located within the groove. In this way, the substrate and the groove wall together form a sealed chamber, which becomes a vacuum chamber after the vacuuming mechanism evacuates the substrate. Furthermore, the vacuum chamber contains a transverse pipe 31 and a longitudinal pipe 32, facilitating timely replenishment of gas into the vacuum chamber via these pipes.

[0069] Thus, by improving the structure of the first vacuum member 21 to cooperate with the substrate and form a vacuum chamber during vacuuming, the stability of the environment for vacuuming the substrate is improved.

[0070] In addition, in some embodiments, the exhaust pipe 10 is also equipped with a vacuum angle valve 40, a vacuum butterfly valve 50, and a motor. The motor controls the opening and closing angles of the vacuum butterfly valve 50 to adjust the air flow rate. The vacuum angle valve 40 controls the on / off state of the exhaust pipe 10.

[0071] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A vacuum pumping device, characterized in that, include: The air outlet pipe has an air inlet end; An air extraction mechanism is connected to the air outlet pipe and is disposed on the same side as the air inlet. The air extraction mechanism has a plurality of first air extraction ports disposed away from the air inlet. All the first air extraction ports are distributed on the same horizontal plane and are all connected to the air inlet. The first air extraction ports are constructed in a honeycomb structure on the same horizontal plane, and the length of the flow channel formed between each first air extraction port and the air inlet is equal.

2. The vacuum pumping device according to claim 1, characterized in that, The air extraction mechanism is located below the air outlet pipe and includes multiple air extraction components. All the air extraction components are stacked and each has an opening that penetrates through it. Two adjacent air extraction components are fluidly connected through their corresponding openings. The opening of the bottom-level air extraction component is configured as the first air extraction port, and the opening of the top-level air extraction component is connected to the air inlet. From the air inlet to the first air extraction port, the number of openings corresponding to each air extraction component gradually increases.

3. The vacuum pumping device according to claim 2, characterized in that, All of the aforementioned air extraction components include a first air extraction component, a second air extraction component, and a third air extraction component stacked from the first air extraction port to the air inlet end. The opening of the second air extraction component is configured as a second air extraction port. There are multiple third air extraction components, and the opening of each of the third air extraction components is configured as a third air extraction port. Each of the third exhaust ports is connected to an equal number of second exhaust ports to uniformly distribute the gas passing through all the second exhaust ports, and each of the second exhaust ports is also connected to an equal number of first exhaust ports to uniformly distribute the gas passing through all the first exhaust ports.

4. The vacuum pumping device according to claim 3, characterized in that, All of the third air extraction components are arranged in an array; and / or all of the second air extraction ports are constructed in a honeycomb structure; and / or the first air extraction port, the second air extraction port and the third air extraction port have the same structure and are all constructed as cones.

5. The vacuum pumping device according to claim 3, characterized in that, From the air inlet end toward the first air outlet, the opening areas of the third air outlet, the second air outlet, and the first air outlet gradually decrease.

6. The vacuum pumping device according to claim 5, characterized in that, The opening area decreases proportionally in sequence, and the proportion ranges from 0.6 to 0.

8.

7. The vacuum pumping device according to claim 3, characterized in that, The air outlet pipe includes a main pipe, multiple first branch pipes and multiple second branch pipes. All the first branch pipes are connected between the main pipe and the second branch pipes and divert the flow from the main pipe. The end of the main pipe away from the first branch pipe is provided with the air inlet. Each first branch pipe is connected to an equal number of second branch pipes at its end away from the main pipe. The ends of the second branch pipes away from the first branch pipes are connected to the third air extraction port and correspond one-to-one.

8. The vacuum pumping device according to claim 3, characterized in that, The air extraction mechanism also includes an air replenishment component, which is installed on the first air extraction component and disposed on the same side as the first air extraction port.

9. The vacuum pumping device according to claim 8, characterized in that, The air supply component includes a horizontal pipe and a vertical pipe. The plane formed by the horizontal pipe and the vertical pipe is parallel to the horizontal plane where the first air extraction port is distributed. The horizontal pipe and the vertical pipe are each provided with an air supply port along their respective extension directions.

10. The vacuum pumping device according to claim 9, characterized in that, The air supply assembly further includes a pressure regulating component, which is installed on the transverse pipe and at least one end of the transverse pipe along its respective extension direction; and / or, the first air extraction component is recessed to form a groove, and the transverse pipe and the longitudinal pipe are disposed in the groove.

Images