Automatic multi-task control method for single-thread semiconductor processing equipment

Abstract

An automated multi-task control method for a single-thread semiconductor processing device, the method comprising: receiving a plurality of production tasks from a manufacturing execution system, each production task being associated with a standard mechanical interface; creating a thread for a production task corresponding to each standard mechanical interface, and allocating a thread identifier and an execution priority specified by the manufacturing execution system for each thread; creating a thread state table for recording the priority and the real-time state of each thread; and controlling the access authority of each thread to the single-thread semiconductor processing equipment based on the thread state table, so that only one thread can issue an instruction to the single-thread semiconductor processing equipment at the same time. According to the invention, the single-thread semiconductor processing equipment has the capability of automatically and continuously executing a plurality of production tasks, so that the utilization rate and the overall productivity of the equipment are remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to an automated multi-task control method for a single-threaded semiconductor processing equipment. Background Technology

[0002] In highly automated semiconductor manufacturing, equipment automation programs (EAPs) serve as the core hub connecting the manufacturing execution system (MES) with the underlying process equipment. Modern advanced semiconductor equipment (such as new coating and developing machines, scanners, etc.) typically possess native multi-job (JOB) queuing and multi-SMIF (Standard Mechanical Interface) collaborative operation capabilities. EAPs can leverage standardized protocols (such as SECS / GEM) to call the machine's built-in multi-task management interface, enabling the batch issuance, automatic sorting, and sequential execution of multiple production tasks. This significantly reduces machine idle time and improves overall equipment utilization.

[0003] For single-threaded devices, both their hardware and control systems are designed for single-threaded operation. They lack both a built-in job queuing mechanism and the ability to coordinate control across multiple SMIF ports. In actual production, to ensure process stability, EAP typically only issues a single job at a time, waiting for the next job to complete before issuing the next one. This single-task operation mode results in significant idle waiting time between task switches, leading to extremely low machine utilization. This makes it unsuitable for modern flexible, small-batch, multi-variety production demands, becoming a bottleneck for the entire production line's capacity.

[0004] Current mainstream EAP systems primarily focus on supporting new multi-tasking devices during feature iterations, leaving a significant gap in functionality coverage for single-threaded devices and lacking effective software solutions to compensate for their insufficient hardware capabilities. Summary of the Invention

[0005] The summary section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. The summary section of this invention is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, one embodiment of the present invention provides an automated multi-task control method for a single-threaded semiconductor processing equipment, executed by an equipment automation program, the method comprising: Receives multiple production tasks from the manufacturing execution system, each of which is associated with a standard mechanical interface; A thread is created for each production task corresponding to the standard mechanical interface, and a thread identifier and an execution priority specified by the manufacturing execution system are assigned to each thread; Create a thread state table to record the priority and real-time status of each thread; The access rights of each thread to the single-threaded semiconductor processing equipment are controlled based on the thread state table, so that only one thread can issue instructions to the single-threaded semiconductor processing equipment at any given time.

[0007] In one embodiment, the real-time states recorded in the thread state table include at least one of the following: created, queued, running, frozen, and completed.

[0008] In one embodiment, controlling the access rights of each thread to the single-threaded semiconductor processing device based on the thread state table includes: Based on the execution priority, select a thread to be executed from the threads in the queued state and set its state to running; When it is determined that the thread to be executed has gained control of the single-threaded semiconductor processing equipment, the state of all other threads is set to frozen.

[0009] In one embodiment, after the step of determining that the thread to be executed has acquired control of the single-threaded semiconductor processing equipment, the method further includes: Continuously monitor the status of the single-threaded semiconductor processing equipment; When it is determined that the single-threaded semiconductor processing equipment has completed the current task and is in an idle state, the status of the currently running thread is updated to complete, and the step of selecting the next thread to be executed is triggered.

[0010] In one embodiment, determining that the thread to be executed has acquired control of the single-threaded semiconductor processing equipment includes: It was detected that the instruction issued by the thread to be executed had entered the single-threaded semiconductor processing equipment, and that the single-threaded semiconductor processing equipment had started operation.

[0011] In one embodiment, the execution priority is specified by the manufacturing execution system when issuing production tasks.

[0012] In one embodiment, there is a one-to-one mapping relationship between the thread and the standard mechanical interface.

[0013] In one embodiment, the single-threaded semiconductor processing equipment includes a single-threaded exposure machine.

[0014] Another aspect of the present invention provides a computing device, comprising: At least one processor; and A memory that is communicatively connected to the at least one processor; The memory stores instructions that can be executed by the at least one processor to enable the computing device to implement the method described above.

[0015] In another aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the method described above.

[0016] The automated multi-task control method, computing device, and computer-readable storage medium for single-threaded semiconductor processing equipment of this invention enable automated continuous production of multiple SMIFs for single-threaded semiconductor processing equipment that does not have native multi-task capabilities through software-level multi-threaded scheduling and state locking mechanisms, significantly improving equipment utilization and capacity. Attached Figure Description

[0017] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0018] In the attached image: Figure 1 A schematic flowchart of an automated multitasking control method for a single-threaded semiconductor processing equipment according to a specific embodiment of the present invention is shown. Figure 2 A schematic flowchart of an automated multitasking control method for a single-threaded exposure machine according to a specific embodiment of the present invention is shown. Detailed Implementation

[0019] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the invention. However, it will be apparent to those skilled in the art that the invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid obscuring the invention.

[0020] It should be understood that the invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0021] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this invention, the first element, component, area, layer, or portion discussed below may be referred to as the second element, component, area, layer, or portion.

[0022] Spatial relation terms such as “below,” “under,” “below,” “below,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “below” other elements or features will be oriented “above” other elements or features. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0023] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0024] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0025] Equipment Automation Program (EAP) is a core middleware in the semiconductor intelligent manufacturing system, connecting the Manufacturing Execution System (MES) with various process equipment. Its core function is to automate equipment status monitoring, production data acquisition, process parameter issuance, and task instruction flow through standardized interfaces, thereby reducing manual intervention and improving the stability and traceability of the production process. In highly automated semiconductor manufacturing scenarios, EAP acts as a "translator" between the equipment and the upper-level management system, translating the production tasks (JOBs) issued by the MES into instructions that the equipment can recognize, and also feeding back real-time operating data and alarm information from the equipment to the management system, forming a closed-loop control.

[0026] From a technical compatibility perspective, the current mainstream EAP systems have long been designed and iterated with a core focus on supporting modern machines that natively possess multi-job execution capabilities. These machines (such as new coating and developing machines) are equipped with independent task scheduling modules at the hardware level and native functions such as job queue storage, priority sorting, and breakpoint resume at the software level. When EAP interfaces with these machines, it only needs to call the machine's built-in multi-job management interface through a standardized protocol to achieve batch distribution, automatic sorting, and sequential execution of multiple production tasks. For example, when the MES system issues a set of job queues containing different product models and process parameters, EAP can sort them according to preset rules (such as delivery date and process priority) and push them to the machine. The machine, leveraging its multi-threaded processing capabilities, automatically loads the next task after completing the current job, without any manual intervention.

[0027] However, current EAP systems in factories primarily support machines with native multi-job operation and multi-SMIF compatibility for their multi-SMIF control and multi-task scheduling functions. Their adaptability to single-threaded exposure machines like the Cannon 3000 FPA is insufficient. Because these machines cannot autonomously queue jobs and lack the foundation for multi-SMIF collaborative control, most 6-inch fabs, in order to ensure production stability, have to restrict them to a single-job, single-SMIF operation mode, significantly reducing production efficiency.

[0028] To address the above problems, this invention proposes an automated multi-task control method for a single-threaded semiconductor processing equipment, executed by the equipment's automation program. The method includes: In step S101, multiple production tasks are received from the manufacturing execution system, wherein each production task is associated with a standard mechanical interface; In step S102, a thread is created for each production task corresponding to the standard mechanical interface, and a thread identifier and an execution priority specified by the manufacturing execution system are assigned to each thread; In step S103, a thread state table is created to record the priority and real-time status of each thread; In step S104, the access permissions of each thread to the single-threaded semiconductor processing device are controlled based on the thread state table, so that only one thread can issue instructions to the single-threaded semiconductor processing device at any given time.

[0029] The aforementioned control method is implemented within an automated system environment in a semiconductor manufacturing workshop. This method is executed by an equipment automation program, which is middleware software deployed on a dedicated computing device (such as an industrial server or high-performance industrial PC). The computing device includes at least one processor and memory communicatively connected to the processor. The equipment automation program plays a central role in the system, responsible for bidirectional communication: on the one hand, it interacts with the upper-level Manufacturing Execution System (MES), i.e., the factory-level management system responsible for managing production orders, process flows, and scheduling decisions, to receive multiple production tasks from the MES; on the other hand, it connects with single-threaded semiconductor processing equipment in the workshop through equipment communication protocols (such as the semiconductor industry standard SECS / GEM protocol) to achieve instruction issuance and status monitoring.

[0030] Single-threaded semiconductor processing equipment refers to devices that, due to hardware design or firmware limitations, lack native multitasking queuing and processing capabilities. A typical example is an exposure machine without native multitasking queuing functionality, such as the Cannon 3000 FPA model used in some 6-inch production lines. Such equipment can only receive and execute one production task instruction at a time.

[0031] The method of this invention aims to overcome the limitations of single-threaded machines, such as the Cannon 3000 FPA exposure machine, which is restricted to single-threaded operation due to the lack of a built-in JOB queuing mechanism, enabling it to adapt to modern multi-JOB continuous production modes; to fill the functional gap of existing EAP systems for single-threaded machines, by developing multi-queuing functions for EAP, thus building equivalent multi-JOB management capabilities for such machines; and to change the current situation where most 6-inch and 8-inch wafer production lines can only adopt a single-JOB operation mode due to the limitations of such machines, realizing automated connection of JOB flow between the exposure machine and front- and back-end equipment such as coating and developing machines, reducing manual intervention costs.

[0032] Specifically, in step S101, the equipment automation program receives multiple production tasks from the manufacturing execution system. These tasks can be multiple sub-tasks within a batch or multiple independent emergency insertion tasks. Each production task is associated with a standard mechanical interface (SMIF). A standard mechanical interface (e.g., SMIF) is a hermetically sealed container used for transferring and storing semiconductor wafers in an isolated environment, and its physical port for interfacing with the equipment. Each interface typically carries one batch of wafers. In one embodiment, there is a one-to-one mapping between threads and standard mechanical interfaces, meaning that one production task on one SMIF port corresponds to one independent thread.

[0033] Next, in step S102, the equipment automation program creates an independent thread for each production task received in step S101. A thread is the basic unit of scheduling by the operating system and can execute logic concurrently or in parallel. Each thread can be assigned a unique thread identifier, which can be strongly associated with an SMIF number or task ID for easy tracking.

[0034] In addition, the equipment automation program assigns an execution priority to each thread. The execution priority can be directly specified by the manufacturing execution system when issuing production tasks (for example, marked as P1-P5 according to order delivery date or process urgency, with P1 being the highest priority and P5 being the lowest priority), or it can be assigned according to other actual process requirements.

[0035] In step S103, the device automation program creates and maintains a thread state table in global variables. Global variables are storage units whose data can be accessed by all relevant functional modules within the program during its execution. This thread state table is used to record the real-time state of each thread, that is, to record the entire lifecycle state of each thread. For example, the recorded states include at least one of the following: created, queued, running, frozen, and completed. Furthermore, the thread state table is also used to record the execution priority of threads. An example of the initial states of the thread state table is shown in the table below: It should be noted that the table above is only a non-restrictive example of a thread state table. The field design, state values, and specific content of the thread state table can be adjusted according to the actual application scenario.

[0036] In step S104, by freezing inactive threads and unfreezing pending threads, the access permissions of each thread to the single-threaded semiconductor processing device are controlled, ensuring that only one thread can issue instructions to the single-threaded semiconductor processing device at any given time. This step is repeated continuously until all threads are in the completed state.

[0037] Specifically, the scheduler of the equipment automation program queries the thread status table in the global status table. From all threads in the "queued" state, it selects the thread with the highest priority as the next thread to be executed, based on the execution priority from high to low. For example, Thread_001 (P1) is selected first. Subsequently, the scheduler updates the status of this thread from "queued" to "running".

[0038] Next, the equipment automation program allows the activated thread (Thread_001) to issue its corresponding production task instructions to the single-threaded semiconductor processing equipment. After the instructions are issued, the system needs to determine whether this thread has gained control of the equipment and started issuing work instructions. The determination method includes, but is not limited to, confirming through the equipment communication protocol that the single-threaded semiconductor processing equipment's status has changed from idle to processing. For example, when the equipment automation program receives a message from the equipment status changing from IDLE to PROCESS via protocols such as SECS / GEM, it can confirm that Thread_001 has successfully gained control of the equipment.

[0039] Once it is determined that a thread (Thread_001) has acquired control of the device, the device automation program immediately performs a freeze operation, setting the state of all other threads (Thread_002 and Thread_003) in the thread state table to frozen. Threads in the frozen state still have their logic, but are prohibited from issuing any instructions to the device, effectively temporarily revoking their access rights. This implements a software-level mutex lock, ensuring exclusive use of the hardware. Determining whether a thread has acquired control of the single-threaded semiconductor processing device includes: detecting that an instruction issued by the thread has entered the single-threaded semiconductor processing device, and detecting that the single-threaded semiconductor processing device has started operation (is in the PROCESS state).

[0040] During the processing operation (in PROCESS state) of the single-threaded semiconductor processing equipment, the equipment automation program continuously monitors the status of the single-threaded semiconductor processing equipment to prepare for the next unfreezing operation.

[0041] The prerequisite for performing the unfreezing operation is that the equipment's automation program determines that the single-threaded semiconductor processing equipment has completed its current task and is in an idle state. The determination methods include, but are not limited to, the following two: One approach is the monitoring method, which involves listening for specific state change messages (such as SFY messages) emitted by a single-threaded semiconductor processing device to determine if the device state has changed from PROCESS to IDLE. This method offers timely response and low system overhead.

[0042] The second method is proactive querying, which involves actively querying the status of single-threaded semiconductor processing equipment to determine if it has completed its task and is idle. This method serves as a supplement or backup to event-driven methods and offers high reliability.

[0043] When the device is determined to be idle, the device automation program performs a unfreezing operation. First, the status of the thread that has completed its task (Thread_001) is updated to "Completed". Then, the thread status table is queried, and the status of the next thread to be executed is updated to "Running" according to the execution priority from high to low. The next thread to be executed is the thread with the highest priority that is in the queue. In this example, Thread_003 (P2) has a higher priority than Thread_002 (P3), so Thread_003 is selected, and its status is updated from "Frozen" to "Running". At the same time, this thread (Thread_003) is allowed to issue its corresponding production task instruction to the single-threaded semiconductor processing device. Then, a new round of control confirmation, freezing, execution, and unfreezing loop begins.

[0044] When the status of all threads in the global status table is "complete", it indicates that all production tasks of all associated SMIFs in this batch have been completed, and the entire control flow ends.

[0045] The following explanation uses the Cannon 3000 FPA exposure machine as an example. This model is a typical single-threaded device in a 6-inch wafer production line, lacking a built-in JOB queuing mechanism and unable to natively support multi-SMIF collaborative operations.

[0046] For the control of the exposure machine, the Equipment Automation Program (EAP) will execute the following control loop: After receiving multiple production tasks from the Manufacturing Execution System (MES), EAP creates an independent thread for each SMIF (e.g., Thread_1 corresponds to SMIF 1) and assigns execution priorities specified by MES (e.g., P1-P5). Simultaneously, a thread status table is created in global variables to record the full lifecycle status of each thread in real time (creation, queuing, running, frozen, completed). The scheduler selects the highest-priority thread (e.g., Thread_1 at level P1) to enter the "running" state and controls it to send JOB instructions to the exposure machine. When the exposure machine's state changes from IDLE to PROCESS via a device communication protocol (e.g., SECS / GEM), it is determined that Thread_1 has gained control of the device. Subsequently, EAP sets the state of all other threads in the status table (e.g., Thread_2, Thread_3) to "frozen," thereby locking the instruction sending channel and ensuring exclusive use of hardware resources.

[0047] During the exposure machine's processing, EAP continuously monitors its status. When it is determined by listening to events or actively querying that the device has completed processing and returned to the IDLE state, EAP updates the status of the completed thread to "completed". Then, it queries the status table and updates the status of the next thread to be executed (such as Thread_3 at the P2 level) from "frozen" to "running" according to priority, and allows it to issue instructions to start the next cycle.

[0048] In summary, addressing the single-threaded hardware limitations of the Cannon 3000 FPA exposure machine, this embodiment of the invention constructs a virtual multi-tasking environment for it through the software scheduling mechanism in the Equipment Automation Program (EAP). Specifically, the thread management module creates an independent thread for each production task corresponding to each SMIF. The thread control engine serializes the execution instructions of multiple tasks and records the status (running, frozen, queued) of each thread and its resource usage on the device instruction channel in real time through a thread status table in global variables.

[0049] When a thread determines that it has acquired control of the exposure unit, the thread control engine sets the status of all other threads in the thread state table to "frozen," thus enabling exclusive use of hardware resources. When the exposure unit is determined to be idle, the engine then updates the status of the next thread to be executed to "running" based on execution priority, thereby achieving a smooth adaptation from "software multithreading" to "hardware single-threading."

[0050] Through the implementation of the above embodiments, the embodiments of the present invention bring significant technological advancements and economic benefits to single-thread exposure machines such as the Cannon 3000 FPA, specifically reflected in: Multi-SMIF automated operation has been achieved: the hardware limitation of single-threaded operation of this type of machine has been successfully overcome, upgrading it from a mode that can only run a single SMIF and a single LOT to a continuous production mode that can support multiple SMIFs to be automatically queued and executed in sequence. This enables the exposure machine to achieve automated connection with equipment such as coating and developing machines with multi-tasking capabilities in the front and back rows to achieve JOB flow. Machine utilization optimization and capacity improvement: Before the upgrade, when the processed lot size was small (e.g., two lots each contained only one wafer), a large number of work units inside the machine would be idle. Quantitative calculations showed that such idle time resulted in an average loss of about 35 minutes of effective time per shift, leading to a machine utilization loss of about 5.4%. After applying this invention, the machine idle waiting time caused by task switching was completely eliminated. It is estimated that it can boost capacity by 285 wafers per month, and a cumulative increase of 3,420 wafers per year, directly enhancing output capacity from the equipment efficiency perspective. Significant economic benefits: Based on increased production capacity and optimized equipment utilization, the cost reduction benefits generated over RMB 2 million over the 10-year depreciation period of the equipment, resulting in a significant return on investment.

[0051] Another aspect of this invention provides a computing device configured to execute the aforementioned automated multi-task control method for a single-threaded semiconductor processing equipment. Specifically, this computing device may be an industrial server deployed in a semiconductor manufacturing workshop. The server includes at least one processor with multiple physical cores and threads, providing a hardware foundation for concurrent processing of multiple threads; and a memory communicatively connected to the at least one processor for storing the execution instructions and data of the Equipment Automation Program (EAP). In this embodiment, the EAP software system runs on this industrial server. When the instructions stored in the memory are executed by the processor, the computing device specifically performs the steps of the aforementioned method. Through the collaborative work of its processor and memory, this computing device enables the use of a general-purpose industrial server to improve the efficiency of single-threaded equipment.

[0052] Another aspect of this invention provides a computer-readable storage medium for storing a computer program that implements the aforementioned automated multi-task control method. Specifically, the storage medium may be a solid-state drive (SSD). This SSD stores the computer program, which, when executed by the processor of the EAP server, enables the EAP system, which was originally only capable of single-task control, to gain the ability to perform multi-task scheduling on single-threaded semiconductor processing equipment. By deploying the program from this SSD to different EAP servers within the workshop, the performance of similar equipment on multiple production lines can be upgraded in batches.

[0053] The present invention has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit the invention to the scope of the described embodiments. Furthermore, those skilled in the art will understand that the present invention is not limited to the above embodiments, and many more variations and modifications can be made based on the teachings of the present invention, all of which fall within the scope of protection claimed by the present invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method of automated multitasking control of single-thread semiconductor processing equipment, characterized by, The method is performed by a device automation program, and the method comprises: receiving a plurality of production tasks from a manufacturing execution system, wherein each production task is associated with a standard mechanical interface; creating a thread for each production task corresponding to the standard mechanical interface, and assigning a thread identifier and an execution priority specified by the manufacturing execution system to each thread; creating a thread state table for recording the priority and real-time state of each thread; controlling the access right of each thread to the single-thread semiconductor processing equipment based on the thread state table, so that only one thread can issue an instruction to the single-thread semiconductor processing equipment at the same time.

2. The method of claim 1, wherein, The real-time state recorded by the thread state table includes at least one of the following: creation, queuing, running, freezing and completion.

3. The method of claim 2, wherein, The step of controlling the access right of each thread to the single-thread semiconductor processing equipment based on the thread state table comprises: selecting a to-be-executed thread from the threads in the queuing state according to the execution priority, and setting the state of the to-be-executed thread to running; when it is determined that the to-be-executed thread obtains the control right of the single-thread semiconductor processing equipment, setting the state of all other threads to frozen.

4. The method of claim 3, wherein, After the step of determining that the to-be-executed thread obtains the control right of the single-thread semiconductor processing equipment, the method further comprises: continuously monitoring the state of the single-thread semiconductor processing equipment; when it is determined that the single-thread semiconductor processing equipment completes the current job and is in an idle state, updating the state of the currently running thread to completion, and triggering the step of selecting a next to-be-executed thread.

5. The method of claim 3, wherein, The step of determining that the to-be-executed thread obtains the control right of the single-thread semiconductor processing equipment comprises: detecting that the instruction issued by the to-be-executed thread has entered the single-thread semiconductor processing equipment, and detecting that the single-thread semiconductor processing equipment has started the job.

6. The method of claim 1, wherein, The execution priority is specified by the manufacturing execution system when the production task is issued.

7. The method of claim 1, wherein, The thread and the standard mechanical interface have a one-to-one mapping relationship.

8. The method of claim 1, wherein, The single-thread semiconductor processing equipment comprises a single-thread exposure machine.

9. A computing device, comprising: The computing device comprises: at least one processor; and a memory connected in communication with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the computing device to implement the method according to any one of claims 1 to 8.

10. A computer-readable storage medium having stored thereon a computer program, characterized in that, When the computer program is executed by the processor, the method according to any one of claims 1 to 8 is implemented.

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