Humidifier, air conditioning device, and flow path member

Abstract

A humidifier (20) according to one embodiment has a flow path member (22) and a humidifier body (21) that supplies steam. The flow path member (22) has a receiving port (22a) for receiving steam from the humidifier body (21), an inlet (22b) for receiving air, and an outlet (22c) for discharging the air received by the inlet (22b). A wall portion (23) of the flow path member (22) extending from the inlet (22b) to the outlet (22c) forms a flow path for air flowing from the inlet (22b) to the outlet (22c). The receiving port (22a) is disposed upstream of the outlet (22c) in the flow path so as to supply steam to the air. A tapered portion (23t) having a flow path cross-sectional area gradually decreasing toward the outlet (22c) is at least partially formed in the wall portion (23).

Description

Technical Field

[0001] This invention relates to humidifiers, air conditioning devices, and flow path components. Background Technology

[0002] In semiconductor manufacturing equipment, variations in temperature and / or humidity can affect yield. For example, the film-forming state of the photoresist used in semiconductor manufacturing changes depending on temperature or humidity. Such changes in film-forming state can lead to deviations in the finished product, potentially affecting the yield. Therefore, high-precision temperature and humidity control is typically implemented in semiconductor manufacturing equipment.

[0003] In view of the above background, the applicant has previously proposed technologies related to improving the accuracy of humidity control in Patent Documents 1 and 2.

[0004] Existing technical documents

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent No. 6159865

[0007] Patent Document 2: Japanese Patent No. 6140878 Summary of the Invention

[0008] Air conditioning systems are typically used to control the temperature and humidity inside cleanrooms and manufacturing equipment in semiconductor manufacturing facilities. These systems usually supply air to the cleanrooms and manufacturing equipment after controlling air cooling, heating, humidification, etc. Here, humidification is achieved by supplying, for example, steam to the air flowing towards the cleanroom.

[0009] The inventors of this application have discovered that when air is humidified as described above, if stagnation or turbulence occurs in the air flow, the humidification state will change even when air is supplied at a specified flow rate, and the accuracy of humidity control may deviate.

[0010] The present invention was made in light of the above background, and its purpose is to provide a humidifier, an air conditioning device, and a flow path component capable of controlling the humidity of air with high precision.

[0011] The present invention relates to the following methods.

[0012] <1> A humidifier comprising: a humidifier body that provides steam or mist of water; and a flow path component having a receiving port for receiving the steam or mist of water from the humidifier body, an air inlet for receiving air, and an outlet for allowing the air received by the inlet to flow out, wherein a wall portion of the flow path component extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, the receiving port being configured in the flow path upstream of the outlet in such a way as to provide the steam or mist of water to the air, and a tapered portion having at least partially formed therein a flow path cross-sectional area that gradually decreases toward the outlet.

[0013] <2> The humidifier according to <1>, wherein the cone-shaped portion is formed at least in the range between the portion of the receiving port closest to the inlet and the outlet.

[0014] <3> The humidifier according to <1> or <2>, wherein the humidifier body has an outlet for releasing the steam or the mist-like moisture, the receiving port is opposite to the outlet, the inlet opens to one side in a direction that intersects the directions of the receiving port and the outlet, the outlet opens to the other side in the intersecting direction, and the conical portion is formed at least within the length range of the receiving port in the intersecting direction.

[0015] <4> The humidifier according to any one of <1> to <3>, wherein the wall portion includes a pair of sidewall portions arranged at a distance in a horizontal direction, the receiving port is located between the lower ends of the pair of sidewall portions, and the pair of sidewall portions are formed to approach each other at least partially toward the outlet, thereby forming the conical portion.

[0016] <5> The humidifier according to <4>, wherein the wall portion further includes a top wall portion that closes the upper ends of the pair of side walls, and the outlet is open in the horizontal direction.

[0017] <6> The humidifier according to <4> or <5>, wherein the inlet and the outlet are open in the horizontal direction, and the humidifier is further provided with a partition plate that covers the area below the center of the outlet in the vertical direction from the lower end of the outlet.

[0018] <7> The humidifier according to any one of <1> to <6>, wherein the upstream end of the conical portion forms the inlet.

[0019] <8> An air conditioning device having a humidifier and a temperature control module as described in any one of <1> to <7>, the temperature control module comprising: an air duct section connected to the inlet of the flow path component, allowing air to flow from the inlet into the interior of the flow path component; and a temperature control unit disposed inside the air duct section for controlling the temperature of the air.

[0020] <9> The air conditioning device according to <8>, wherein the air duct section and the flow path component are connected in an L-shape or a crank shape.

[0021] <10> A flow path component having: a receiving port for receiving steam or mist-like moisture; an inlet for receiving air; and an outlet for allowing the air received by the inlet to flow out, wherein a wall portion of the flow path component extending from the inlet to the outlet forms a flow path for the air flowing from the inlet to the outlet, the receiving port being configured in the flow path upstream of the outlet to provide the steam or mist-like moisture to the air, and at least partially forming a tapered portion of the wall portion having a flow path cross-sectional area that gradually decreases from the inlet to the outlet.

[0022] According to the present invention, the humidity of the air can be controlled with high precision. Attached Figure Description

[0023] Figure 1 This is a side view of an air conditioning device according to one embodiment.

[0024] Figure 2 Viewed from an oblique angle Figure 1 A three-dimensional view of the cross-section of the air conditioning device shown.

[0025] Figure 3 Viewed from an oblique angle Figure 1 A perspective view of the longitudinal section of the air conditioning device shown.

[0026] Figure 4 yes Figure 1 The image shows a longitudinal sectional view of the air conditioning unit.

[0027] Figure 5 yes Figure 1 A cross-sectional view of the air conditioning unit shown.

[0028] Figure 6 It shows about the Figure 1 The graph shown is a curve of the humidity of the air controlled by the air conditioning device.

[0029] Figure 7 This is a longitudinal sectional view of the air conditioning device of the first modified example.

[0030] Figure 8 This is a longitudinal sectional view of the air conditioning device in the second variation.

[0031] Figure 9 This is a longitudinal sectional view of the air conditioning device of the third variation.

[0032] Figure 10 This is a diagram showing the fourth variation. Figure 10 (A) is a longitudinal sectional view of the air conditioning device of the fourth modified example. Figure 10 (B) is a cross-sectional view of the air conditioning device of the fourth variation.

[0033] Figure 11 This is a diagram showing the fifth variation. Figure 11 (A) is a longitudinal sectional view of the air conditioning device of the fifth modified example. Figure 11 (B) is shown Figure 5 A longitudinal sectional view of a modified example of the structure of (A).

[0034] Figure 12 This is a longitudinal sectional view of the air conditioning device of the sixth variation. Detailed Implementation

[0035] The following describes one implementation method.

[0036] <Structure of Air Conditioning Unit>

[0037] Figure 1 This is a side view of an air conditioning device 1 according to one embodiment. The air conditioning device 1 includes a temperature control module 10, a humidifier 20, a blower 30, an air distribution box 40, and a frame 50.

[0038] The temperature control module 10, humidifier 20, blower 30, and air distribution box 40 are supported by a frame 50. The frame 50 is positioned on, for example, the ground along a horizontal plane, to support the temperature control module 10, humidifier 20, blower 30, and air distribution box 40.

[0039] In the air conditioning unit 1, air is first drawn into the temperature control module 10 by the drive of the blower 30. The air drawn into the temperature control module 10 is then transported from the temperature control module 10 to the humidifier 20, and after passing through the humidifier 20, it is drawn into the blower 30. Then, the air drawn into the blower 30 is transported to the air distribution box 40, and from the air distribution box 40 it is transported to the temperature-controlled object.

[0040] exist Figure 1In the diagram, the arrow indicated by label UD represents the vertical direction. The arrow indicated by label H1 represents the first horizontal direction in the horizontal plane. Additionally, label H2 represents the second horizontal direction in the horizontal plane, perpendicular to both the vertical direction UD and the first horizontal direction H1. The arrows used in the following descriptions... Figure 1 In addition to the above figures, arrows or positions indicating the vertical direction UD, the first horizontal direction H1, and the second horizontal direction H2 are also shown in appropriate locations.

[0041] (Temperature control module)

[0042] The temperature control module 10 has an air duct section 11, a cooling section 12, and a heating section 13. Figure 2 This is a three-dimensional view of the cross-section of the air conditioning unit 1 as seen from an obliquely upward angle. Figure 3 This is a perspective view of the longitudinal section of the air conditioning unit 1, viewed from an obliquely upward angle. (For example...) Figure 2 and Figure 3 As shown, an inlet 11A and an outlet 11B are formed in the air duct section 11.

[0043] In the temperature control module 10, air is introduced into the interior of the air duct section 11 through the inlet 11A. In this embodiment, the air introduced into the air duct section 11 passes sequentially through the cooling section 12 and the heating section 13. The air can be cooled and dehumidified by the cooling section 12 and heated by the heating section 13. Then, the air that has passed through the heating section 13 is delivered to the humidifier 20 from the outlet 11B.

[0044] An inlet 11A is located at the lower part of the air duct section 11, and an outlet 11B is located at the upper part of the air duct section 11. Therefore, air introduced into the air duct section 11 flows upward toward the outlet 11B. Specifically, the inlet 11A and the outlet 11B open in opposite directions in the first horizontal direction H1. Thus, air introduced into the air duct section 11 flows upward toward the outlet 11B along a crank-shaped or S-shaped path. However, the positions of the inlet 11A and the outlet 11B are not particularly limited; for example, the positions of the inlet 11A and the outlet 11B in the vertical direction UD may remain unchanged.

[0045] In this embodiment, the inlet 11A is covered by the filter 14 (see reference). Figure 1 Therefore, air with particles removed by filter 14 is introduced into the interior of air duct section 11 from inlet 11A.

[0046] The cooling section 12 can also be the evaporator in a cooling circuit where the compressor, condenser, expansion valve, and evaporator are connected in sequence via piping to circulate the heat medium. Alternatively, the cooling section 12 can be a heat exchange section through which cooling water, such as brine, is passed after being cooled by the evaporator in the cooling circuit. Furthermore, the heater 4 can be an electric heater or the like, or it can be part of the heat medium that is at a high temperature in the aforementioned cooling circuit.

[0047] (humidifier)

[0048] The humidifier 20 has a humidifier body 21 and a flow path component 22. The flow path component 22 forms a flow path for air supplied from the temperature control module 10. The humidifier body 21 provides steam to the air flowing in the flow path component 22.

[0049] like Figure 2 and Figure 3 As shown, the humidifier body 21 has a water storage tank 21A and a heater section 21B disposed within the tank 21A. The humidifier body 21 heats the water in the tank 21A using the heater section 21B, thereby generating steam. The humidifier body 21 has an outlet section 21A1 formed by an upwardly opening portion in the tank 21A, from which steam is released upwards.

[0050] In this embodiment, the humidifier body 21 is in the form of generating steam by heating water, but the form of the humidifier body 21 is not particularly limited. For example, the humidifier body 21 may also be in the form of releasing mist-like water by ultrasonic vibration.

[0051] The flow path component 22 has a receiving port 22a for receiving steam from the humidifier body 21, an air inlet 22b for receiving air, and an outlet 22c for expelling air received by the inlet 22b. The flow path component 22 is arranged such that the receiving port 22a is opposite to the outlet portion 21A1 of the humidifier body 21. Specifically, in this embodiment, the receiving port 22a and the outlet portion 21A1 are opposite each other in the vertical direction, and the flow path component 22 receives steam from the humidifier body 21 from below via the receiving port 22a.

[0052] The flow path component 22 has a wall portion 23 extending from the inlet 22b to the outlet 22c. The wall portion 23 forms a flow path for air flowing from the inlet 22b to the outlet 22c. The receiving port 22a is positioned upstream of the outlet 22c in the flow path formed by the wall portion 23 in such a way that it supplies steam from the humidifier body 21 to the air in the flow path.

[0053] In this embodiment, the wall portion 23 includes a pair of sidewall portions 24, 24, a top wall portion 25, and a terminal wall portion 26. The pair of sidewall portions 24, 24 are disposed above the humidifier body 21. The pair of sidewall portions 24, 24 rise upwards from the humidifier body 21 and are spaced apart in the second horizontal direction H2. In this embodiment, the pair of sidewall portions 24, 24 extend parallel to the vertical direction UD.

[0054] The top wall portion 25 closes the upper ends of a pair of side wall portions 24, 24. The pair of side wall portions 24, 24 are spaced apart, with one end of a first horizontal direction H1 perpendicular to the second horizontal direction H2 on the horizontal plane facing the temperature control module 10. The terminal wall portion 26 is disposed between the other ends of the pair of side wall portions 24, 24 in the first horizontal direction H1.

[0055] In this embodiment, the lower ends of the pair of sidewall portions 24, 24 contact the upper part of the groove 21A of the humidifier body 21. Furthermore, the receiving port 22a is located between the lower ends of the pair of sidewall portions 24, 24. More specifically, in this embodiment, the lower ends of the pair of sidewall portions 24, 24 are spaced apart from each other, thereby forming the receiving port 22a.

[0056] An inlet 22b is formed in the first horizontal direction H1 between one end of a pair of sidewall portions 24, 24 facing the temperature control module 10. Specifically, the ends of the pair of sidewall portions 24, 24 in the first horizontal direction H1 are spaced apart, thus forming the inlet 22b. An outlet 22c is formed in the terminal wall portion 26. In this embodiment, as an example, the outlet 22c is formed in a circular (perfect circle) shape. The inlet 22b opens to one side in a direction intersecting the direction opposite to the receiving port 22a and the discharging portion 21A1 (in this example, the vertical direction UD) (in this example, the first horizontal direction H1). The outlet 22c opens to the other side in a direction intersecting the direction opposite to the receiving port 22a and the discharging portion 21A1 (in this example, the vertical direction UD). In this embodiment, in the direction of airflow, the inlet 22b, the receiving port 22a, and the outlet 22c are arranged sequentially from the upstream side to the downstream side. However, the inlet 22b and the receiving port 22a may also be formed at the same position in the direction of airflow.

[0057] like Figure 2 As shown, in this embodiment, a flange 27 extending outward (opposite to the flow path side) is provided at one end of a pair of sidewall portions 24, 24 facing the temperature control module 10. The flange 27 contacts and is fixed to the wall surface of the periphery of the outlet 11B of the temperature control module 10 (air duct portion 11). Thus, in this embodiment, the temperature control module 10 is connected to the flow path component 22.

[0058] In this embodiment, the air duct section 11 of the temperature control module 10 is connected to the flow path component 22 in an L-shape. As a result, the air flowing from the temperature control module 10 to the flow path component 22 mainly flows upward in the temperature control module 10, and then flows laterally (in this example, horizontally) through the flow path component 22.

[0059] In this embodiment, at least a portion of the wall 23 of the flow path component 22 described above is formed with a tapered portion 23t whose cross-sectional area gradually decreases toward the outlet 22c. For example... Figures 1 to 3 As shown, in this embodiment, a pair of sidewall portions 24, 24 and a top wall portion 25 form a conical portion 23t. The conical portion 23t will be described in detail below.

[0060] Figure 4 This is a longitudinal sectional view of the air conditioning unit 1. Figure 5 This is a cross-sectional view of the air conditioning unit 1. Also refer to these. Figure 4 and Figure 5 In this embodiment, a pair of sidewall portions 24, 24 are formed such that they approach each other at least partially toward the outlet 22c. This forms a conical portion 23t. Specifically, in this embodiment, the pair of sidewall portions 24, 24 are formed such that they approach each other toward the outlet 22c in a first horizontal direction. Alternatively, the pair of sidewall portions 24, 24 may also have a structure with a portion having a constant flow path cross-sectional area that partially faces the outlet 22c. Furthermore, in this embodiment, an inlet 22b is formed at the upstream end of the conical portion 23t.

[0061] The conical portion 23t guides the air flowing in from the temperature control module 10 toward the center or inner side of the outlet 23c. Furthermore, the conical portion 23t increases the airflow velocity by gradually decreasing the cross-sectional area of ​​the flow path. In this embodiment, when viewed from above, both of the pair of sidewall portions 24, 24 are inclined relative to the line connecting the center of the inlet 22b and the center of the outlet 22c. However, it is also possible that one of the pair of sidewall portions 24, 24 is parallel to the line connecting the center of the inlet 22b and the center of the outlet 22c, while the other of the pair of sidewall portions 24, 24 extends inclined relative to the line connecting the center of the inlet 22b and the center of the outlet 22c.

[0062] exist Figure 4 and Figure 5In this embodiment, the reference numeral P denotes the portion of the receiving port 22a closest to the inlet 22b. In this embodiment, the portion P of the receiving port 22a closest to the inlet 22b corresponds to the lower end of the inlet 22b. The conical portion 23t is formed at least in the range between the portion P of the receiving port 22a closest to the inlet 22b and the outlet 22c; in other words, it is formed at least between portion P and the outlet 22c. More specifically, in this embodiment, the conical portion 23t is formed at least within the length of the receiving port 22a in the first horizontal direction H1; in other words, it is formed at least between the two ends of the receiving port 22a in the first horizontal direction H1. More specifically, the conical portion 23t extends continuously from the upstream end forming the inlet 22b to the downstream end connected to the periphery of the outlet 22c (in this example, the terminal wall portion 26), gradually decreasing the flow path cross-sectional area, traversing the entire receiving port 22a.

[0063] In addition, such as Figure 5 As shown, a pair of sidewall portions 24 are positioned inwards from both ends of the upwardly open portion of the trough 21A in the second horizontal direction H2. Therefore, the area between the two ends of the upwardly open portion of the trough 21A in the second horizontal direction H2 and the pair of sidewall portions 24 is not covered by the flow path component 22. In this embodiment, a cover material 70 is provided in the area of ​​the upwardly open portion of the trough 21A that is not covered by the flow path component 22. This suppresses unnecessary diffusion of steam from the humidifier body 21.

[0064] In this embodiment, the pair of sidewall portions 24, 24 are rectangular plates. Therefore, the conical portion 23t can be easily formed without much effort. Furthermore, the pair of sidewall portions 24, 24, as plates, are formed so that they approach each other towards the outlet 22c, thereby forming the conical portion 23t. In this case, the cross-sectional area of ​​the flow path formed between the pair of sidewall portions 24 gradually decreases with a smooth change, thus ensuring smooth airflow.

[0065] In addition, such as Figure 3 and Figure 4 As shown, the humidifier 20 in this embodiment has a partition plate 28 that covers a portion of the outlet 22c. Figure 4 In the diagram, label L indicates the position of the upper end of partition plate 28. Label C2 indicates the central axis of outlet 22c. Figure 4 It can be seen that the partition plate 28 covers the area from the lower end of the outlet 22c to below the center of the outlet 22c in the vertical direction. In detail, the partition plate 28 extends upward from the lower end of the outlet 22c, covering the area from that lower end to a position slightly below the center of the outlet 22c in the vertical direction.

[0066] The partition plate 28 prevents water condensed from the steam from mixing with air and flowing out from the outlet 22c. Around the tank 21A in the humidifier 20, airflow tends to stagnate and become turbulent. Furthermore, steam coming into contact with such stagnant and turbulent airflow is prone to condensation (liquefaction). The partition plate 28 prevents moisture that may accumulate around the tank 21A from flowing downstream. This stabilizes humidification control. The partition plate 28 can be a metal plate or a plate made of a porous material.

[0067] Furthermore, in this embodiment, the inlet 22b of the flow path component 22 overlaps with the periphery of the outlet 11B of the temperature control module 10, thereby allowing the opening range of the airflow inlet 22b to be smaller than the actual size of the inlet 22b. Here, Figure 4 The label C1 in the diagram indicates the central axis of the opening range of inlet 22b. (The rest of the text appears to be a fragment and requires further context for accurate translation.) Figure 4 It can be seen that the center of the opening range of inlet 22b in the vertical direction is located above the center of the outlet 22c in the vertical direction. In this case, the amount of air flowing towards the humidifier body 21 can be suppressed, thereby suppressing stagnation and turbulence on the side near the trough 21A.

[0068] (Blower / Air Distribution Box)

[0069] like Figure 1 As shown, the blower 30 has a housing 31 and an impeller 32 rotatably housed within the housing 31. As an example, the blower 30 is a centrifugal blower that delivers air introduced along the axial direction of the impeller 32 radially outward. The blower 30 is connected to the outlet 22c of the humidifier 20 via a connecting pipe 60. The blower 30 has an upward-opening outlet that delivers air upward. Furthermore, the blower 30 is not limited to centrifugal type; it can also be an axial flow type.

[0070] An air distribution box 40 is positioned above the blower 30. The air distribution box 40 has one or more supply ports (not shown). The air distribution box 40 receives air from the blower 30 and supplies air from the one or more supply ports to an external temperature-controlled object. The temperature-controlled object may be, for example, a cleanroom or a semiconductor manufacturing facility, but is not particularly limited thereto.

[0071] <Operation of the air conditioning unit>

[0072] Next, refer to Figures 2 to 5 The operation of the air conditioning device 1 in this embodiment will be explained.

[0073] In the air conditioning unit 1, air is drawn into the temperature control module 10 (air duct section 11) through the inlet 11A driven by the blower 30. The air drawn into the temperature control module 10 passes sequentially through the cooling section 12 and the heating section 13. At this time, the air can be cooled and dehumidified by the cooling section 12 and heated by the heating section 13. Then, the air that has passed through the heating section 13 is delivered to the humidifier 20 through the outlet 11B.

[0074] Air supplied from outlet 11B to humidifier 20 flows through inlet 22b of flow path component 22 in the flow path formed by wall 23 of flow path component 22. The air flowing into the flow path formed by wall 23 passes through humidifier body 21. At this time, the air mixes with steam supplied into the flow path from receiving port 22a of flow path component 22. Thus, the air is humidified. The humidified air then flows towards outlet 22c.

[0075] Furthermore, in this embodiment, a conical portion 23t is formed in the wall portion 23 of the air flow path, with the cross-sectional area of ​​the flow path gradually decreasing toward the outlet 22c.

[0076] The conical portion 23t guides the air flowing in from the temperature control module 10 toward the center or inner side of the outlet 23c. This prevents the air mixed with steam from colliding with the outer periphery of the outlet 23c (terminal wall 26). In this case, air stagnation or turbulence is suppressed. Furthermore, collisions between the air and the outer periphery of the outlet 23c are prevented, causing condensation of steam in the air and the collected moisture to flow downstream. Moreover, the conical portion 23t avoids structures such as sudden angles, steps, or abrupt changes in the flow path cross-sectional area, effectively guiding the air mixed with steam toward the center or inner side of the outlet 22c, thus effectively suppressing stagnation or turbulence.

[0077] In addition, the conical portion 23t can increase the air velocity by gradually reducing the cross-sectional area of ​​the flow path. Even in the case of stagnation and turbulence, the increased air velocity can suppress stagnation and turbulence.

[0078] After passing through the humidifier 20, air is drawn in by the blower 30. The air drawn into the blower 30 is then transported to the air distribution box 40, and from there to the temperature-controlled object. The air supplied in this way has its humidity precisely controlled by a cone-shaped section 23t, and is then supplied to the temperature-controlled object.

[0079] Figure 6 It shows about the Figure 1 The diagram shows the humidity curve of the air in which the air conditioning device 1 has implemented humidity control. More specifically, Figure 6 (A) is a graph showing the humidity of the air controlled by air conditioning unit 1. Figure 6 (B) is a graph showing the humidity of the air controlled by the air conditioning device of the comparative example. In the air conditioning device of the comparative example, the cone-shaped portion 23t is not formed, and the structure corresponding to the side wall portion 24 adopts a structure that extends straight from the temperature control module 10 side in parallel with each other.

[0080] Figure 6 (A) and Figure 6 (B) shows the results of humidity control with a target humidity (%RH). The vertical axis represents the humidity of the air supplied from the air distribution box 40, i.e., the usage humidity (%RH), and the horizontal axis represents time.

[0081] like Figure 6 As shown in (A), in the humidity control of the air conditioning device 1 of this embodiment, the deviation from the target humidity can be suppressed to a very small range. On the other hand, in the comparative example, the deviation from the target humidity is larger compared to the results of the embodiment. Based on such results, it can also be confirmed that the conical portion 23t is advantageous.

[0082] In the air conditioning device 1 of this embodiment described above, the humidifier 20 includes a humidifier body 21 for providing steam and a flow path component 22. The flow path component 22 has a receiving port 22a for receiving steam from the humidifier body 21, an air inlet 22b for receiving air, and an outlet 22c for the air received by the inlet 22b to flow out. Furthermore, the wall portion 23 of the flow path component 22, extending from the inlet 22b to the outlet 22c, forms a flow path for air flowing from the inlet 22b to the outlet 22c. The receiving port 22a is arranged upstream of the outlet 22c in the flow path to provide steam to the air. Moreover, a conical portion 23t is formed in the wall portion 23, with the cross-sectional area of ​​the flow path gradually decreasing towards the outlet 22c.

[0083] In this structure, the conical portion 23t guides the air flowing from the temperature control module 10 toward the center or inner side of the outlet 23c. This prevents the air mixed with steam from colliding with the outer periphery of the outlet 23c (terminal wall 26). This suppresses air stagnation or turbulence. Furthermore, it prevents air from colliding with the outer periphery of the outlet 23c, causing condensation of steam in the air and the collected moisture to flow downstream. Moreover, the conical portion 23t avoids structures such as sudden angles, steps, or abrupt changes in the flow path cross-sectional area, guiding the steam-mixed air toward the center or inner side of the outlet 22c, thus effectively suppressing stagnation or turbulence.

[0084] In addition, the conical portion 23t can increase the air velocity by gradually reducing the cross-sectional area of ​​the flow path. Even in the case of stagnation and turbulence, the increased air velocity can suppress stagnation and turbulence.

[0085] Therefore, according to this embodiment, stagnation or turbulence in the flow of humidity-controlled air can be effectively suppressed, thereby enabling high-precision control of air humidity.

[0086] Furthermore, in this embodiment, the conical portion 23t is formed at least in the area between the portion P closest to the inlet 22b and the outlet 22c in the receiving port 22a. Specifically, the humidifier body 21 has a steam outlet 21A1, and the receiving port 22a is opposite to the steam outlet 21A1. The inlet 22b opens to one side in a direction (first horizontal direction H1) that intersects the directions opposite to the receiving port 22a and the steam outlet 21A1, and the outlet 22c opens to the other side of the intersecting direction. Moreover, the conical portion 23t is formed at least in the area where the receiving port 22a is located in the intersecting direction (first horizontal direction H1).

[0087] In this situation, the generation of stagnation and turbulence around the receiving port 22a, which may have a greater impact on the humidification state due to stagnation and turbulence, can be effectively suppressed. Therefore, the humidity control accuracy can be effectively improved.

[0088] In this embodiment, the wall portion 23 includes a pair of sidewall portions 24, 24 spaced apart in the second horizontal direction H2. The receiving port 22a is located between the lower ends of the pair of sidewall portions 24, 24. Furthermore, the pair of sidewall portions 24, 24 are formed into a conical portion 23t by being at least partially close to each other towards the outlet 22c. Additionally, an inlet 22b is formed at the upstream end of the conical portion 23t.

[0089] In this case, the flow path component 22 with the conical portion 23t does not become a complex structure, and the conical portion 23t can be simply formed.

[0090] In addition, in this embodiment, the wall portion 23 also includes a top wall portion 25 that closes the upper ends of a pair of side wall portions 24, 24, and the outlet 22c is open in the horizontal direction.

[0091] In this case, air can flow towards outlet 22c without waste. In particular, in this embodiment, air with an upward component can flow into the humidifier 20, but the top wall portion 25 can suppress the air from flowing in an undesirable direction.

[0092] Furthermore, the humidifier 20 is also provided with a partition plate 28 covering the area from the lower end of the outlet 22c to below the center of the outlet 22c in a vertical direction. The partition plate 28 prevents water condensed from the steam from mixing with the air and flowing out of the outlet 22c. Around the tank 21A in the humidifier 20, airflow tends to stagnate and become turbulent. Steam in contact with such stagnant and turbulent flow is prone to condensation (liquefaction). The partition plate 28 prevents moisture that may be generated around the tank 21A from flowing downstream. As a result, humidification control can be stabilized.

[0093] <Variation Example>

[0094] Hereinafter, variations of the above embodiments will be described. Components in the variations that are the same as those in the above embodiments will be labeled with the same reference numerals, and repeated descriptions will be omitted.

[0095] (First variation)

[0096] Figure 7 This is a longitudinal sectional view of the air conditioning device 1r1 of the first modified example. In the first modified example, the construction of the flow path component 22 in the humidifier 20 is different from that in the above embodiment. In the flow path component 22 of the first modified example, the wall portion 23 has a pair of first side wall portions 241, 241 that are spaced apart and opposite each other in the first horizontal direction H1, and a pair of second side wall portions 242, 242 that are spaced apart and opposite each other in the second horizontal direction H2.

[0097] The first sidewall portions 241, 241 and the second sidewall portions 242, 242 are connected in such a way that they form a flow path with a quadrilateral cross-section. A top wall portion 25 is provided at the upper end of the first sidewall portions 241, 241 and the upper end of the second sidewall portions 242, 242. A steam receiving port 22a is formed at the lower end of the first sidewall portions 241, 241 and the lower end of the second sidewall portions 242, 242. An inlet 22b is formed in the first sidewall portion 241, 241, near the temperature control module 10. An outlet 22c is formed in the top wall portion 25.

[0098] Furthermore, in the first modification, the portions of the first sidewall portions 241, 241 that are higher than the inlet 22b are formed to approach each other towards the outlet 22c. This results in a tapered portion 23t whose flow path cross-sectional area gradually decreases towards the outlet 23c. In the first modification, the tapered portion 23t is also formed at least in the area between the portion P of the receiving port 22a closest to the inlet 22b and the outlet 22c.

[0099] In addition, in the first modification, the flow path component 22 is configured to protrude upward relative to the temperature control module 10. As a result, the air duct portion 11 of the temperature control module 10 is connected to the flow path component 22 in a crank-shaped manner.

[0100] In the first variation described above, the same effect as the above embodiment can also be obtained. In particular, the air velocity increases in the conical portion 23t, thereby making it less likely for air to flow towards the humidifier body 21. As a result, air stagnation and turbulence are less likely to occur on the humidifier body 21 side. Consequently, the influence of stagnation and turbulence on humidification control can be suppressed.

[0101] (Second variation)

[0102] Figure 8 This is a longitudinal sectional view of the air conditioning device 1r2 in the second modification. In the second modification, the construction of the flow path component 22 in the humidifier 20 differs from that in the embodiment described above. In the flow path component 22 of the second modification, the top wall portion 25 of the wall portion 23 extends obliquely downward from the temperature control module 10 toward the outlet 22c.

[0103] In the second variation, the same effects as in the above-described embodiment can also be obtained. Furthermore, it is advantageous in that it can effectively suppress condensation of steam above outlet 22c.

[0104] (Third variation)

[0105] Figure 9 This is a longitudinal sectional view of the air conditioning device 1r3 in the third modification. In this third modification, the connection method between the temperature control module 10 and the humidifier 20 differs from that in the above-described embodiment. In this third modification, the temperature control module 10 and the humidifier 20 are linearly connected to each other.

[0106] In the third variation, the same effect as the above-described embodiment can also be obtained.

[0107] (Fourth variation)

[0108] Figure 10 This is a diagram illustrating the fourth variation. In detail, Figure 10 (A) is a longitudinal sectional view of the air conditioning device 1r4 of the fourth modified example. Figure 10 (B) is a cross-sectional view of the air conditioning unit 1r4.

[0109] In the fourth variation, the construction of the flow path component 22 in the humidifier 20 differs from that in the above embodiment. In the flow path component 22 of the fourth variation, the wall portion 23 is composed of only a pair of sidewall portions 24, 24. A receiving port 22a is formed at the lower end of the pair of sidewall portions 24, 24. An inlet 22b is formed at the upstream end of the pair of sidewall portions 24, 24. An outlet 22c is formed at the downstream end of the pair of sidewall portions 24, 24. Furthermore, the pair of sidewall portions 24, 24 are arranged so as to approach each other toward the outlet 22c, thereby forming a conical portion 23t.

[0110] In the fourth variation, a pair of sidewall portions 24, 24 are respectively provided on the upper part of the groove 21A of the humidifier body 21. Moreover, the pair of sidewall portions 24, 24 are covered by the housing 80 from above and horizontally. The housing 80 is connected to the temperature control module 10 and to the connecting pipe 60.

[0111] In the fourth variation, the same effects as in the above-described embodiment can also be obtained. Furthermore, it is advantageous that the conical portion 23t can be formed extremely easily. This is particularly advantageous for existing air conditioning devices that do not have the conical portion 23t, as it allows for the simple addition of the conical portion 23t.

[0112] (Fifth variation)

[0113] Figure 11 This is a diagram illustrating the fifth variation. In detail, Figure 11 (A) is a longitudinal sectional view of the air conditioning device 1r5 of the fifth modification. In the fifth modification, similar to the first modification, the wall portion 23 has a pair of first sidewall portions 241, 241 that are spaced apart and opposite each other in the first horizontal direction H1, and a pair of second sidewall portions 242, 242 that are spaced apart and opposite each other in the second horizontal direction H2. However, in the fifth modification, the cone-shaped portion 23t is formed differently from the first modification.

[0114] In detail, in the fifth variation, a pair of first sidewall portions 241, 241 and second sidewall portions 242, 242 are parallel to each other. A pair of inner members 243, 243 extending toward each other towards the outlet 22c are provided inside such a pair of first sidewall portions 241, 241 and second sidewall portions 242, 242, thereby forming a conical portion 23t.

[0115] in addition, Figure 11 (B) is Figure 11 A variation of (A). In Figure 11 In the structure of (B), a conical portion 23t is formed by an internal component 243. The internal component 243 is configured to approach one of a pair of first sidewall portions 241, 241 (the first sidewall portion on the temperature control module 10 side) as it approaches the outlet 22c. Thus, the conical portion 23t is formed.

[0116] In the fifth variation, the same effects as in the above-described embodiment can also be obtained. Furthermore, it is advantageous that the conical portion 23t can be formed extremely easily. This is particularly advantageous for existing air conditioning devices that do not have the conical portion 23t, as it allows for the simple addition of the conical portion 23t. Additionally, in Figure 11 In this example, the internal component 243 is plate-shaped, but it is not limited to this form. The internal component 243 can also be a block-shaped component.

[0117] (Sixth variation)

[0118] Figure 12 This is a longitudinal sectional view of the air conditioning device 1r6 of the sixth modification. In the sixth modification, the construction of the flow path component 22 in the humidifier 20 differs from that in the above embodiment. In the flow path component 22 of the sixth modification, a receiving port 22a is formed between the lower ends of a pair of sidewalls 24, 24 in the wall portion 23. Furthermore, a tapered portion 23t is formed only in the portion of the wall portion 23 upstream of the receiving port 22a.

[0119] In the sixth variation, the same effect as the above-described implementation can also be obtained.

[0120] The above-described embodiments and variations illustrate one example of implementing the present invention, which can be implemented in various other ways. For example, various modifications, substitutions, omissions, or combinations thereof can be made without departing from the spirit of the invention. Such modifications, substitutions, omissions, etc., are also included within the scope of the present invention, and similarly within the scope of the invention as described in the claims and its equivalents.

[0121] Label Explanation

[0122] 1: Air conditioning unit; 10: Temperature control module; 11: Air duct section; 11A: Inlet; 11B: Outlet; 12: Cooling section; 13: Heating section; 14: Filter; 20: Humidifier; 21: Humidifier body; 21A: Slot; 21A1: Discharge section; 21B: Heater section; 22: Flow path component; 22a: Receiving port; 22b: Inlet; 22c: Outlet; 23: Wall section; 23t: Conical section; 24: Side wall section; 25: Top wall section; 26: Terminal wall section; 27: Flange section; 28: Partition plate; 30: Blower; 31: Outer shell; 32: Impeller; 40: Air distribution box; 50: Frame; 60: Connecting pipe; 70: Cover material.

Claims

1. A humidifier having: a humidifier body that supplies steam or mist-like moisture; and a flow path member that has a receiving port that receives the steam or mist-like moisture from the humidifier body, an inlet that receives air, and an outlet that causes the air received by the inlet to flow out, a wall portion of the flow path member that extends from the inlet to the outlet forms a flow path of the air flowing from the inlet to the outlet, the receiving port is disposed at a position in the flow path that is upstream of the outlet in a manner that supplies the steam or mist-like moisture to the air, and the wall portion is at least partially formed with a tapered portion in which a cross-sectional area of the flow path gradually decreases toward the outlet.

2. The humidifier according to claim 1, wherein the tapered portion is formed at least in a range between a portion of the receiving port that is closest to the inlet and the outlet.

3. The humidifier according to claim 1, wherein the humidifier body has a discharge portion that discharges the steam or mist-like moisture, the receiving port opposes the discharge portion, the inlet is open to one side in a direction that intersects a direction in which the receiving port and the discharge portion oppose each other, the outlet is open to the other side in the intersecting direction, and the tapered portion is formed at least in a range of a length of the receiving port in the intersecting direction.

4. The humidifier according to claim 1, wherein the wall portion includes a pair of side wall portions that are disposed apart from each other in a horizontal direction, the receiving port is positioned between lower ends of the pair of side wall portions, and the pair of side wall portions are formed so as to at least partially approach each other toward the outlet, thereby forming the tapered portion.

5. The humidifier according to claim 4, wherein the wall portion further includes a top wall portion that closes between upper ends of the pair of side wall portions, and the outlet is open in the horizontal direction.

6. The humidifier according to claim 4 or 5, wherein the inlet and the outlet are open in the horizontal direction, and the humidifier further includes a partitioning plate that covers a range from a lower end of the outlet to below a central portion in a vertical direction of the outlet.

7. The humidifier according to claim 1, wherein an upstream end of the tapered portion forms the inlet.

8. An air conditioning device having the humidifier according to claim 1 and a temperature control module, the temperature control module including: a duct portion that is connected to the inlet of the flow path member so as to cause the air to flow from the inlet to an inside of the flow path member; and a temperature control portion that is disposed in the inside of the duct portion so as to control the temperature of the air.

9. The air conditioning device according to claim 8, wherein the duct portion is connected to the flow path member in an L shape or a crank shape.

10. A flow path member having: a receiving port that receives steam or mist-like moisture; an inlet that receives air; and an outlet that causes the air received by the inlet to flow out, wherein a wall portion of the flow path member that extends from the inlet to the outlet forms a flow path of the air flowing from the inlet to the outlet, the receiving port is disposed at a position in the flow path that is upstream of the outlet in a manner that supplies the steam or mist-like moisture to the air, and the wall portion is at least partially formed with a tapered portion in which a cross-sectional area of the flow path gradually decreases toward the outlet. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ A wall portion of the flow path member extending from the inlet to the outlet forms a flow path of the air flowing from the inlet to the outlet, and the receiving port is disposed at a position in the flow path on an upstream side from the outlet in a manner to supply the steam or the misted moisture to the air, The wall portion is at least partially formed with a tapered portion in which a cross-sectional area of the flow path gradually decreases from the inlet to the outlet.

Images