Target material quick replacement device and replacement method

Abstract

The invention relates to the technical field of vacuum coating equipment, and discloses a target material quick-changing device and method, the target material quick-changing device comprises a son clamp, a mother clamp, a plug connector and a fixing assembly, the mother clamp is provided with a slot, the plug connector is inserted into the slot, a pushing block and a supporting rod are slidably arranged on the mother clamp, a clamping jaw is rotatably arranged on the mother clamp, and the fixing assembly is arranged on the clamping jaw. The pushing block is provided with an inclined face, one end of the supporting rod is attached to the inclined face in a sliding mode, the other end of the supporting rod is connected to one end of the clamping jaw, and the other end of the clamping jaw can clamp a plug connector so that the child clamp can be fixed relative to the mother clamp. The pushing block moves in the first direction and drives the supporting rod to move in the second direction, the clamping jaw rotates relative to the mother clamp and clamps the plug connector, clamping and fixing between the son clamp and the mother clamp, disconnection of compressed air, separation of the plug connector from the inserting groove and separation of the son clamp and the mother clamp are achieved, manual screw dismounting and mounting are not needed, the production efficiency is improved, inclined face positioning is adopted, and the production efficiency is improved. And the risk of unsmooth installation of the clamp is reduced.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating equipment technology, and in particular to a quick-change device and method for changing target materials. Background Technology

[0002] Sputtering target clamps are critical components in vacuum coating equipment used for mounting and securing sputtering targets. Their performance directly affects the stability of the coating process and the utilization rate of the target. Currently, a mechanical connection method using bolts is commonly adopted. Multiple fastening screws are used to rigidly connect the clamp to the equipment cavity or back plate to achieve accurate positioning and reliable clamping of the target. This structural design is relatively mature and widely used in continuous production scenarios involving a single type of target.

[0003] However, in actual production, especially in flexible processing scenarios involving multiple varieties and small batches, existing technologies have revealed significant shortcomings. Because different types of targets often require specialized fixtures, changing targets necessitates manual removal of all fastening screws, removal of the old fixture, installation of the new fixture, and then realignment and tightening of all screws one by one. This process is entirely manual, cumbersome, time-consuming, and labor-intensive, significantly extending equipment downtime, resulting in low production efficiency. Furthermore, frequent manual operations increase the risk of installation errors and stripped screws, making it difficult to meet the urgent demands of modern intelligent manufacturing for rapid changeover and efficient production. (Invention Content)

[0004] According to one aspect of the present invention, a quick-change device for target materials is provided to solve the aforementioned problems existing in target material fixing clamps in the related art.

[0005] To address the aforementioned problems in the existing technology, the present invention adopts the following technical solution:

[0006] A quick-change device for target materials, comprising:

[0007] Sub-clamp, the sub-clamp being used to connect the target material;

[0008] A female clamp, which has a slot, is used to connect a sputtering cathode;

[0009] A connector, wherein the connector is disposed on the sub-clamp and is inserted into the slot;

[0010] A fixing assembly includes a push block, a support rod, and a clamp. The push block is slidably disposed on the female clamp along a first direction, and the support rod is slidably disposed on the female clamp along a second direction, which is perpendicular to the first direction. The clamp is rotatably disposed on the female clamp. The push block has an inclined surface. One end of the support rod slides against the inclined surface, and the other end of the support rod is connected to one end of the clamp. The other end of the clamp can clamp the connector, thereby fixing the sub-clamp relative to the female clamp.

[0011] As an optional technical solution, a rotating shaft is also included, which is rotatably mounted on the female clamp and fixedly connected to the gripper.

[0012] As an optional technical solution, the gripper includes two clamping members, each clamping member including a connecting part, a rotating part, and a clamping part. The rotating part is located between the connecting part and the clamping part. The connecting part is connected to the support rod, the rotating part is connected to the rotating shaft, and the clamping part can abut against the plug-in member.

[0013] As an optional technical solution, a top ball is also included. The top ball is disposed in the clamping part, and the plug has a first positioning groove, in which the top ball can be engaged.

[0014] As an optional technical solution, there are two top beads, and the first positioning grooves are respectively opened on both sides of the connector, and the two top beads are respectively snapped into the first positioning grooves.

[0015] As an optional technical solution, a positioning element is also included. The positioning element is disposed on the sub-clamp, and the female clamp is further provided with a second positioning groove. The positioning element can be inserted into the second positioning groove, so that the connector can be positioned and inserted into the slot.

[0016] As an optional technical solution, the female clamp is provided with a guide surface, which is located at the opening of the second positioning groove and is used to guide the positioning component into the second positioning groove.

[0017] As an optional technical solution, the longitudinal cross-sectional shape of both the connector and the slot is trapezoidal or triangular.

[0018] According to another aspect of the present invention, the present invention provides a target replacement method, wherein the target replacement method includes the following steps through the implementation of the above-described quick-change target device:

[0019] S100: The connector is inserted into the slot;

[0020] S200: When compressed air is turned on, the push block can move along the first direction under the driving action of the compressed air, so that the support rod can slide relative to the inclined plane and move along the second direction;

[0021] S300: The gripper rotates relative to the female clamp and is able to clamp the connector, and the sub-clamp is fixed relative to the female clamp;

[0022] S400: Disconnect the compressed air, allowing the connector to detach from the slot.

[0023] As an optional technical solution, the target quick-change device further includes a positioning component, which is disposed on the sub-clamp. The female clamp is also provided with a second positioning groove, and the positioning component can be inserted into the second positioning groove so that the insertion component can be positioned and inserted into the slot.

[0024] The target replacement method also includes the part prior to S100:

[0025] S10: When the sub-clamp and the female clamp are assembled, the positioning element cooperates with the second positioning groove.

[0026] The target quick-change device and replacement method provided by the present invention have at least the following beneficial effects:

[0027] The target quick-change device includes a sub-clamp, a female clamp, a connector, and a fixing assembly. The sub-clamp is used to connect the target, and the female clamp has a slot for connecting the sputtering cathode. The connector is disposed in the sub-clamp and inserted into the slot. The fixing assembly includes a push block, a support rod, and a gripper. The push block is slidably disposed in the female clamp along a first direction, and the support rod is slidably disposed in the female clamp along a second direction, which is perpendicular to the first direction. The gripper is rotatably disposed in the female clamp. The push block has an inclined surface, one end of the support rod slides against the inclined surface, and the other end of the support rod is connected to one end of the gripper. The other end of the gripper can clamp the connector, fixing the sub-clamp relative to the female clamp. When the connector is inserted into the slot, compressed air is connected, pushing the push block to move along the first direction and the support rod to move along the second direction, causing the gripper to rotate relative to the female clamp and press against the connector in the slot, thus achieving clamping and fixing between the sub-clamp and the female clamp. When changing to a different type of target material, the compressed air is disconnected, the connector separates from the slot, and the female and male clamps separate. No manual screw removal is required, improving production efficiency. The use of angled positioning reduces the risk of uneven clamp installation.

[0028] This target replacement method utilizes a quick-change device. The connector is inserted into the slot, and compressed air is supplied. Driven by the compressed air, the push block moves in a first direction, allowing the support rod to slide relative to the inclined plane and move in a second direction. The gripper rotates relative to the female fixture and clamps the connector, while the female fixture is fixed relative to the female fixture. Disconnecting the compressed air allows the connector to separate from the slot. This eliminates the need for manual screw removal, improving production efficiency. The inclined plane positioning reduces the risk of uneven fixture installation. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the target quick-change device before installation in Embodiment 1 of the present invention;

[0030] Figure 2 This is a schematic diagram of the target quick-change device after installation in Embodiment 1 of the present invention;

[0031] Figure 3 This is a flowchart of the target replacement method in Embodiment 2 of the present invention.

[0032] In the picture:

[0033] 1. Sub-clamp;

[0034] 2. Female clamp; 21. Slot; 22. Second positioning slot; 23. Guide surface;

[0035] 3. Connector; 31. First positioning groove;

[0036] 4. Push block; 41. Inclined surface;

[0037] 5. Support poles;

[0038] 6. Gripper; 61. Connecting part; 62. Rotating part; 63. Clamping part;

[0039] 7. Shaft;

[0040] 8. Top bead;

[0041] 9. Positioning components. Detailed Implementation

[0042] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0043] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Furthermore, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0044] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0045] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0046] Example 1

[0047] like Figures 1 to 2As shown, this embodiment provides a quick-change target device, which includes a sub-clamp 1, a female clamp 2, a connector 3, and a fixing assembly. The sub-clamp 1 is used to connect the target material. The female clamp 2 has a slot 21 for connecting the sputtering cathode. The connector 3 is disposed in the sub-clamp 1 and inserted into the slot 21. The fixing assembly includes a push block 4, a support rod 5, and a gripper 6. The push block 4 is slidably disposed in the female clamp 2 along a first direction. The support rod 5 is slidably disposed in the female clamp 2 along a second direction, which is perpendicular to the first direction. The gripper 6 is rotatably disposed in the female clamp 2. The push block 4 has an inclined surface 41. One end of the support rod 5 slides against the inclined surface 41, and the other end of the support rod 5 is connected to one end of the gripper 6. The other end of the gripper 6 can clamp the connector 3, thus fixing the sub-clamp 1 relative to the female clamp 2.

[0048] The first direction is AB, and the second direction is CD. The mother clamp 2 is fixed on the sputtering cathode of the equipment. The daughter clamp 1 is an adapter plate that is bound to a specific type of target material. Outside the production workshop, the target material has been installed and calibrated on the daughter clamp 1 by means of screws or welding to form an integral target material assembly.

[0049] The connector 3 is protruding on one side of the sub-clamp 1 by means of casting or other methods. The corresponding position of the female clamp 2 is provided with a connector groove. The longitudinal cross-sectional shape of the connector 3 and the slot 21 is trapezoidal or triangular. The size of the connector groove is adapted to the size of the connector 3 so that the connector 3 can be inserted into the connector groove.

[0050] The female clamp 2 has a receiving cavity, and the fixing component is disposed in the receiving cavity. The push block 4 is slidably engaged with the female clamp 2 via a slide rail. The slide rail is located in the receiving cavity and installed on the fixing component. The push block 4 is slidably connected to the slide rail and can slide relative to the fixing component in a first direction. The outer peripheral surface of the push block 4 is set as an inclined surface 41. In a second direction, support rods 5 are provided on both sides of the inclined surface 41 of the push block 4. One end of the support rod 5 is always in contact with the inclined surface 41 and can slide relative to the inclined surface 41. The support rod 5 can slide with the push block 4 through the groove opened in the inclined surface 41. The nozzle of the compressed air source faces the push block 4, and the nozzle is connected to the air tank through a switch valve. When the switch valve is opened, the nozzle sprays high-pressure gas, which pushes the push block 4 through the air pressure of the compressed air source. The push block 4 can move in the first direction, and the end of the support rod 5 slides along the inclined surface 41. At the same time, under the action of the inclined surface 41, the support rod 5 can move in the second direction. Optionally, the telescopic end of the telescopic cylinder is connected to the push block 4, and the push block 4 is moved by the telescopic cylinder. The other end of the support rod 5 is rotatably connected to one end of the gripper 6, and the middle position of the gripper 6 is rotatably connected to the female clamp 2. The side wall of the slot 21 has an insertion hole, and the other end of the gripper 6 can pass through the insertion hole and abut against the outer periphery of the plug-in 3 in the slot 21. Under the action of the support rod 5, the gripper 6 can rotate relative to the female clamp 2 and clamp and fix the plug-in 3, so that the sub-clamp 1 and the female clamp 2 are relatively fixed.

[0051] The working process of this quick-change target device is as follows: The connector 3 is inserted into the slot 21, the sub-clamp 1 and the female clamp 2 are joined, compressed air is connected, and high-pressure air is continuously sprayed towards the push block 4, pushing the push block 4 to move in the first direction. Under the action of the inclined plane 41, the support rod 5 moves in the second direction, causing the gripper 6 to rotate relative to the female clamp 2 and press against the connector 3 in the slot 21, thus achieving clamping and fixing between the sub-clamp 1 and the female clamp 2. When it is necessary to change to a different type of target, the compressed air is disconnected, the fixing component loses its force, that is, the gripper 6 exerts no force on the connector 3. The operator's two hands respectively grasp the sub-clamp 1 and the female clamp 2 and exert force outwards, the connector 3 separates from the slot 21, and the sub-clamp 1 and the female clamp 2 can be separated. No manual disassembly or assembly of screws is required, improving production efficiency. The use of the inclined plane 41 for positioning reduces the risk of uneven clamp installation.

[0052] Furthermore, referring to Figures 1-2 The target quick-change device also includes a rotating shaft 7, which is rotatably mounted on the female clamp 2 and fixedly connected to the gripper 6. The rotating shaft 7 is rotatably mounted on the female clamp 2 via bearings, and the gripper 6 is fixedly connected to the rotating shaft 7 by welding or other means. The push block 4 is pushed to move in the first direction, and under the action of the inclined plane 41, the support rod 5 moves in the second direction. The support rod 5 drives the gripper 6 to rotate relative to the female clamp 2 under the action of the rotating shaft 7, so that the gripper 6 can clamp and fix the connector 3.

[0053] It should be noted that a torsion spring is sleeved on the rotating shaft 7, and the gripper 6 is rotatably connected to the female clamp 2 through the torsion spring. When the push block 4 loses external driving force, the compressed air is disconnected. Under the elastic action of the torsion spring, the gripper 6 rotates in the opposite direction and returns to the initial position. At the same time, the support rod 5 moves relative to the female clamp 2 in the second direction. The support rod 5 can push the inclined surface 41, so that the push block 4 moves in the first direction and returns to the initial position, which is convenient for the next clamping and fixing.

[0054] Furthermore, referring to Figures 1-2 The target quick-change device also includes a top bead 8, which is disposed in the clamping part 63. The plug-in part 3 has a first positioning groove 31, and the top bead 8 can be engaged in the first positioning groove 31. The gripper 6 includes two clamping parts, each of which includes a connecting part 61, a rotating part 62, and a clamping part 63. The rotating part 62 is located between the connecting part 61 and the clamping part 63. The connecting part 61 is connected to the support rod 5, the rotating part 62 is connected to the rotating shaft 7, and the clamping part 63 can abut against the plug-in part 3.

[0055] There are two top beads 8. The two sides of the connector 3 are respectively provided with first positioning grooves 31, and the two top beads 8 are respectively engaged in the first positioning grooves 31. The push block 4 is provided with support rods 5 and clamping parts on both sides. The rotating part 62 is fixedly connected to the rotating shaft 7. The connecting part 61 is rotatably connected to the end of the support rod 5 by hinge. The side wall of the slot 21 is provided with insertion holes. The clamping part 63 can pass through the insertion holes and extend into the slot 21. The top beads 8 can be engaged in the first positioning grooves 31 of the connector 3, thereby clamping and fixing the connector 3, so that the sub-clamp 1 and the female clamp 2 are relatively fixed.

[0056] Furthermore, referring to Figures 1-2 The target quick-change device also includes a positioning element 9, which is disposed on the sub-clamp 1. The female clamp 2 is also provided with a second positioning groove 22. The positioning element 9 can be inserted into the second positioning groove 22, so that the connector 3 can be positioned and inserted into the slot 21.

[0057] The positioning element 9 is a protrusion, and the female clamp 2 is provided with a guide surface 23. The guide surface 23 is located at the opening of the second positioning groove 22 and is used to guide the positioning element 9 into the second positioning groove 22. When the male clamp 1 and the female clamp 2 need to be assembled, the positioning element 9 and the second positioning groove 22 cooperate to guide and position the components. At the same time, the plug-in element 3 is set with a trapezoidal structure, and the corresponding slot 21 is also set with a trapezoidal groove structure. Through the waist-shaped guiding effect of the trapezoidal structure, it is ensured that the plug-in element 3 can be accurately inserted into the slot 21.

[0058] Example 2

[0059] like Figure 3 As shown, this embodiment provides a target replacement method. Through the implementation of the above-mentioned quick-change target device, the target replacement method includes the following steps:

[0060] S10: When the sub-clamp 1 and the female clamp 2 are assembled, the positioning element 9 cooperates with the second positioning groove 22.

[0061] The positioning element 9 is provided on the sub-clamp 1, and the female clamp 2 is also provided with a second positioning groove 22. The positioning element 9 can be inserted into the second positioning groove 22. When the sub-clamp 1 and the female clamp 2 need to be assembled, the positioning element 9 and the second positioning groove 22 cooperate to guide and position, ensuring that the connector 3 can be accurately inserted into the slot 21.

[0062] S100: Connector 3 is inserted into slot 21.

[0063] The connector 3 is protruding on one side of the sub-clamp 1 by means of casting or other methods. The corresponding position of the female clamp 2 is provided with a connector groove, which is adapted to the size of the connector 3 so that the connector 3 can be inserted into the connector groove.

[0064] S200: When compressed air is turned on, the push block 4 can move in the first direction under the driving action of compressed air, so that the support rod 5 can slide relative to the inclined plane 41 and move in the second direction.

[0065] The fixing assembly includes a push block 4, a support rod 5, and a gripper 6. The push block 4 is slidably mounted on the female clamp 2 along a first direction, and the support rod 5 is slidably mounted on the female clamp 2 along a second direction, which is perpendicular to the first direction. The gripper 6 is rotatably mounted on the female clamp 2. The push block 4 is provided with an inclined surface 41. One end of the support rod 5 is slidably attached to the inclined surface 41, and the other end of the support rod 5 is connected to one end of the gripper 6. The other end of the gripper 6 can clamp the connector 3, thus fixing the sub-clamp 1 relative to the female clamp 2. When compressed air is turned on, high-pressure air is continuously sprayed towards the push block 4, pushing the push block 4 to move along the first direction. Under the action of the inclined surface 41, the support rod 5 moves along the second direction.

[0066] S300: The gripper 6 rotates relative to the female clamp 2 and can clamp the connector 3, while the sub-clamp 1 is fixed relative to the female clamp 2.

[0067] Under the action of the support rod 5, the gripper 6 is driven to rotate relative to the female clamp 2 and can press against the plug-in 3 in the slot 21, thus realizing the clamping and fixing between the sub-clamp 1 and the female clamp 2.

[0068] S400: Disconnect the compressed air, and the connector 3 can be separated from the slot 21.

[0069] When changing to a different type of target material, the compressed air is disconnected, and the fixing assembly loses its force. That is, the gripper 6 exerts no force on the connector 3. The operator holds the sub-clamp 1 and the female clamp 2 with both hands respectively and applies force outward. The connector 3 separates from the slot 21, thus separating the sub-clamp 1 and the female clamp 2. No manual disassembly or reassembly of screws is required, improving production efficiency. The use of inclined plane 41 for positioning reduces the risk of uneven clamp installation.

[0070] This embodiment provides a target replacement method. Through the implementation of a quick-change device, the connector 3 is inserted into the slot 21. Compressed air is connected, and under its driving force, the push block 4 can move in a first direction, causing the support rod 5 to slide relative to the inclined plane 41 and move in a second direction. The gripper 6 rotates relative to the female clamp 2 and clamps the connector 3, while the female clamp 1 is fixed relative to the female clamp 2. When the compressed air is disconnected, the connector 3 can be separated from the slot 21. This eliminates the need for manual screw removal, improving production efficiency. The use of the inclined plane 41 for positioning reduces the risk of uneven clamp installation.

[0071] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A quick-change device for target materials, characterized in that, include: Sub-clamp (1), the sub-clamp (1) is used to connect the target material; The female clamp (2) has a slot (21) and is used to connect the sputtering cathode; A connector (3) is disposed on the sub-clamp (1) and is inserted into the slot (21); The fixing component includes a push block (4), a support rod (5), and a clamp (6). The push block (4) is slidably disposed on the female clamp (2) along a first direction, and the support rod (5) is slidably disposed on the female clamp (2) along a second direction. The second direction is perpendicular to the first direction. The clamp (6) is rotatably disposed on the female clamp (2). The push block (4) is provided with an inclined surface (41). One end of the support rod (5) is slidably attached to the inclined surface (41), and the other end of the support rod (5) is connected to one end of the clamp (6). The other end of the clamp (6) can clamp the plug-in (3) so that the sub-clamp (1) is fixed relative to the female clamp (2).

2. The target quick-change device according to claim 1, characterized in that, It also includes a rotating shaft (7), which is rotatably mounted on the female clamp (2) and is fixedly connected to the jaw (6).

3. The target quick-change device according to claim 2, characterized in that, The gripper (6) includes two clamping parts, each of which includes a connecting part (61), a rotating part (62), and a clamping part (63). The rotating part (62) is located between the connecting part (61) and the clamping part (63). The connecting part (61) is connected to the support rod (5), the rotating part (62) is connected to the rotating shaft (7), and the clamping part (63) can abut against the plug-in part (3).

4. The target quick-change device according to claim 3, characterized in that, It also includes a top bead (8), which is disposed in the clamping part (63). The plug-in (3) has a first positioning groove (31), and the top bead (8) can be engaged in the first positioning groove (31).

5. The target quick-change device according to claim 4, characterized in that, There are two top beads (8), and the first positioning groove (31) is provided on both sides of the connector (3). The two top beads (8) are respectively snapped into the first positioning groove (31).

6. The target quick-change device according to claim 1, characterized in that, It also includes a positioning element (9), which is disposed on the sub-clamp (1). The female clamp (2) is also provided with a second positioning groove (22). The positioning element (9) can be inserted into the second positioning groove (22), so that the plug-in element (3) can be positioned and inserted into the slot (21).

7. The target quick-change device according to claim 6, characterized in that, The female clamp (2) is provided with a guide surface (23), which is located at the opening of the second positioning groove (22) and is used to guide the positioning member (9) into the second positioning groove (22).

8. The target quick-change device according to claim 1, characterized in that, The longitudinal cross-sectional shape of both the connector (3) and the slot (21) is trapezoidal or triangular.

9. A method for replacing a target material, characterized in that, By implementing the target replacement device as described in any one of claims 1-8, the target replacement method includes the following steps: S100: The connector (3) is inserted into the slot (21); S200: When compressed air is turned on, the push block (4) can move along the first direction under the driving action of compressed air, so that the support rod (5) can slide relative to the inclined plane (41) and move along the second direction; S300: The jaw (6) rotates relative to the female clamp (2) and can clamp the connector (3), and the sub-clamp (1) is fixed relative to the female clamp (2); S400: Disconnect the compressed air, and the connector (3) can be separated from the slot (21).

10. The target replacement method according to claim 9, characterized in that, The target quick-change device also includes a positioning component (9), which is disposed on the sub-clamp (1). The female clamp (2) is also provided with a second positioning groove (22). The positioning component (9) can be inserted into the second positioning groove (22), so that the plug-in component (3) can be positioned and inserted into the slot (21). The target replacement method also includes the part prior to S100: S10: When the sub-clamp (1) and the mother clamp (2) are assembled, the positioning member (9) cooperates with the second positioning groove (22).

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