Automatic calibration device of laser interferometer

Abstract

The invention relates to the field of laser measuring instruments, and discloses an automatic calibration device of a laser interferometer, which comprises a bearing driving mechanism, an element and an automatic calibration structure, the bearing driving mechanism is positioned on an arc-shaped sliding frame and is used for bearing the electronic interferometer, and the levelness can be automatically calibrated and measured; the sub-lens bearing mechanism is located on the bearing driving mechanism, is used for bearing a sub-lens structure of the laser interferometer in cooperation with the longitudinal sliding frame and the lead screw output piece, and can perform displacement calibration along the bearing driving mechanism; and the shielding extension mechanism is positioned on the bearing driving mechanism, and is matched with the operation bearing table and the central sliding table to form a shielding cover structure in the laser generation area. A suspension frame for bearing a core element is separated from a bearing table which may be directly vibrated through a first bridging table, a second bridging table, a parallel bearing rod and a hydraulic damping rod of a damping bearing mechanism, the hydraulic damping rod is specially used for absorbing and dissipating impact energy, and the parallel bearing rod limits unnecessary swing.

Description

Technical Field

[0001] This invention relates to the field of laser measuring instrument technology, specifically to an automated calibration device for a laser interferometer. Background Technology

[0002] Laser interferometry, as a core technology for micro- and nano-level linear displacement detection, has been deeply integrated into high-end fields such as precision machining, semiconductor manufacturing equipment, and defense technology. Its measurement accuracy is directly related to equipment performance, making instrument calibration a crucial step in quality assurance. Precise optical alignment of the laser transmitter and receiver is required before measurement.

[0003] The optical path calibration of traditional laser interferometers, which requires the beam splitter, reflector, and receiver to be strictly coaxial, is a purely manual process. It demands highly skilled and experienced operators who repeatedly and meticulously adjust the angle and position of the mount, visually observing the light spot until optimal conditions are achieved. This process is time-consuming, labor-intensive, and the results are uncertain; differences can arise even between different operators or at different times by the same operator. Laser interferometers are extremely sensitive to vibration. In environments with unstable foundations, such as factory workshops or laboratories, the optical path can continuously vibrate or even break down, rendering measurements impossible or reducing data reliability. Traditional vibration isolation platforms are often bulky, passive, and unable to cope with continuous low-frequency vibrations. In industrial environments filled with motors, frequency converters, and wireless equipment, electromagnetic interference (EMI) can severely contaminate the electrical signals acquired by the laser interferometer detectors, introducing noise and reducing measurement resolution and accuracy. Traditionally, this problem has often been overlooked or difficult to solve. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an automated calibration device for laser interferometers, which solves the problems of traditional laser interferometers relying entirely on manual calibration, being time-consuming and labor-intensive, and producing unstable results. Furthermore, its measurements are highly susceptible to environmental vibrations and electromagnetic interference, leading to unreliable data or even malfunction.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an automated calibration device for a laser interferometer, comprising:

[0006] A load-bearing platform is used to fix the structure of the automated calibration device for laser interferometers;

[0007] The suspension frame is located on the load-bearing platform to form a limiting structure for the center of gravity offset and to fix the structure of the laser interferometer;

[0008] The curved carriage is located on the suspension frame and is used to form a track structure for adjusting the levelness offset;

[0009] The shock-absorbing load-bearing mechanism is located on the load-bearing platform and is used to support the suspension frame and the calibration structure of the laser interferometer;

[0010] The load-bearing drive mechanism is located on the arc-shaped carriage and is used to support the components of the electronic interferometer and the automatic calibration structure, while also being able to autonomously calibrate the measured levelness.

[0011] The split-lens support mechanism is located on the support drive mechanism. It works with the longitudinal slide and the lead screw output component to support the split-lens structure of the laser interferometer and can be calibrated along the displacement of the support drive mechanism.

[0012] The shielding extension mechanism is located on the load-bearing drive mechanism and works with the working load table and the central slide to form a shielding structure in the laser generation area;

[0013] The opposing alignment mechanism is located on the arc-shaped carriage, and together with the horizontal bottom carriage and synchronous push rod, it forms an opposing bearing area to support the reflector and laser receiving element, and to place them on a horizontal line;

[0014] The assembly extension mechanism is located on the load-bearing drive mechanism, and works with the extension slot of the embedded slot seat and the push plate structure of the nut sleeve to unfold and retract the laser-generated structure.

[0015] Preferably, the suspension frame is suspended above the load-bearing platform by shock-absorbing load-bearing mechanisms distributed on both sides, the arc-shaped carriage is linearly distributed and fixed on the suspension frame, the load-bearing drive mechanism is supported and installed on the suspension frame by the arc-shaped carriage, the storyboard load-bearing mechanism moves along the load-bearing drive mechanism, the shielding extension mechanism is disposed on the load-bearing drive mechanism and fits against the storyboard load-bearing mechanism, the opposing alignment mechanism is on both sides and is distributed on the load-bearing drive mechanism in an opposing form, and the assembly extension mechanism is embedded in the load-bearing drive mechanism.

[0016] Preferably, the shock-absorbing load-bearing mechanism includes a first support platform and a second support platform. The first support platform is fixed to the side wall of the load-bearing platform on both sides, and the second support platform is fixed to the suspension frame on both sides. Parallel bearing rods are connected between the first support platform and the second support platform, and hydraulic damping rods are connected between the parallel bearing rods.

[0017] Preferably, the load-bearing drive mechanism includes a work platform, a counterweight structure fixed at the center of the bottom of the work platform, and opposing inclined extended support legs fixed at the bottom of the work platform. The extended support legs are embedded in the arc-shaped slide and suspended on the suspension frame. The longitudinal slide is fixed to the top of the work platform in a longitudinal manner. The transverse bottom slide is distributed and fixed in parallel on the inner bottom wall of the work platform and close to the output direction of the work platform. The embedded slot is located on the side of the work platform away from the transverse bottom slide, and its extension slot extends to the side of the work platform close to the transverse bottom slide. The lead screw output component is located on the work platform and between the extended support legs.

[0018] Preferably, the beam splitter support mechanism includes a central slide, which slides along a longitudinally placed slide on the working support platform. The synchronous push rods are rotatably distributed on both sides of the central slide and extend to the shielding extension mechanisms distributed on both sides. The nut sleeve is fixed to the bottom of the central slide and is sleeved on the screw structure of the lead screw output component. The push plate structure of the nut sleeve is fixed to the bottom of the nut sleeve and extends into the extension groove of the embedded slot seat. A beam splitter component is provided on the top of the central slide.

[0019] Preferably, the shielding extension mechanism includes a large-diameter sleeve, a medium-diameter sleeve, and a small-diameter sleeve. The large-diameter sleeve is fixed to the side wall of the central slide, and the small-diameter sleeve is fixed to the side of the working platform away from the embedded slot. It also fits against the top surface of the working platform along with the large-diameter sleeve and the medium-diameter sleeve. The large-diameter sleeve is embedded into the inner wall of the medium-diameter sleeve, and the medium-diameter sleeve is embedded into the inner wall of the small-diameter sleeve.

[0020] Preferably, the opposing alignment mechanism includes opposing slides and multi-track slides. The opposing slides are distributed opposite each other on the top surface of the work platform, and reflectors and laser receiving elements can be installed on the top surfaces of the opposing slides on both sides respectively. The multi-track slides themselves slide on the horizontal bottom slide frame through vertical slots, and the side walls of the multi-track slides are provided with slide structures with two-sided obstructions. The bottom of the opposing slides is fixed with a bottom extension frame, and the extension end of the bottom extension frame is provided with a sliding sleeve structure, which is sleeved on the side slide of the multi-track slide.

[0021] Preferably, the assembly extension mechanism includes an embedded slide and an embedded slide bar. A laser generating element is fixedly installed on the top of the embedded slide and is slidably embedded in the embedded slot. The embedded slide bar is embedded in the extension slot of the embedded slot and has baffle structures at both ends. The baffles at both ends of the embedded slide bar are movable on both sides of the nut sleeve push plate structure and can contact the nut sleeve push plate structure respectively. An inclined slide bar is fixed on the side of the embedded slide bar near the shielding extension mechanism and extends to the top surface of the working platform and is placed below the embedded slide. A trapezoidal push platform is fixed at the end of the inclined slide bar and the inclined surface can contact the embedded slide.

[0022] Preferably, a positioning rod is slidably embedded in the extension groove of the horizontal bottom slide, and a retaining spring structure is sleeved between the rod and the extension groove.

[0023] Preferably, the large-diameter sleeve has an extended convex ring at the insertion end, the inner walls of the medium-diameter sleeve have an extended convex ring on both sides, and the end of the sleeve embedded in the small-diameter sleeve has an extended convex ring. The inner wall of the small-diameter sleeve has an extended convex ring on the side near the medium-diameter sleeve.

[0024] This invention provides an automated calibration device for a laser interferometer. It offers the following advantages:

[0025] 1. This invention combines active and passive vibration damping capabilities: Through the "vibration damping load-bearing mechanism"—including two mounting platforms, parallel bearing rods, and hydraulic damping rods—the "suspension frame" supporting the core components is isolated from the "load-bearing platform" which may be directly subjected to vibration. The hydraulic damping rods are specifically designed to absorb and dissipate impact energy, while the parallel bearing rods limit unnecessary swaying. The "tumbler" mechanism, composed of an "arc-shaped slide" and "counterweights," actively counteracts the tilting and overturning of the equipment, mitigating not only vertical vibrations from the ground but also effectively suppressing horizontal swaying and impacts. This provides a completely "quiet" working environment for precision instruments like laser interferometers, which are extremely sensitive to vibration. Traditional leveling is fixed once completed, but this system's "tumbler" mechanism operates continuously and dynamically. Even if slight tilting occurs during measurement due to soft ground or human contact, the system can automatically and instantly restore horizontality, ensuring the perpetual stability of the reference during long-term measurements. This significantly reduces the risk of measurement errors caused by minor environmental changes.

[0026] 2. This invention features fully automatic optical path calibration: one-click coaxial calibration requires only driving one "lead screw output component," which, through the movement of the "splitter support mechanism," drives the "opposing alignment mechanisms" on both sides to unfold. When the "central slide" moves to the midpoint, the beam splitter, reflector, and receiver are automatically and precisely calibrated to the same measurement axis. The rigid limits and guides of the mechanical structure (such as multi-track slides and the ends of side slides) ensure that the relative positions of the optical elements have extremely high repeatability each time they are unfolded. This is not only fast but also completely eliminates the uncertainty caused by human factors, ensuring that the measurement benchmark is completely consistent for each deployment.

[0027] 3. This invention features intelligent functional integration and collaborative operation: the movement of the "split-lens carrying mechanism" is the core driving force, simultaneously triggering three key functions: optical path calibration pushes the opposing alignment mechanism to unfold; electromagnetic shielding drives the shielding extension mechanism to unfold layer by layer to form a shielding cover; and laser positioning uses a push plate and inclined slider to lift the laser generating element. Through ingenious mechanical design, these functions are organically linked together. With a single "deployment" command from the user, the system automatically completes all preparations, achieving a seamless one-click transition from "transportation state" to "precision measurement state." The automatic unfolding of the electromagnetic shielding cover ensures protection against electromagnetic interference in complex industrial environments; and the automatic lifting of the laser ensures the accuracy of the optical path height. These functions are not independent options but rather part of the standard deployment process, thus comprehensively guaranteeing measurement quality.

[0028] 4. This invention possesses strong anti-interference and protection capabilities: The "shielding extension mechanism" automatically forms a complete cylindrical shield around the laser path through the nesting and expansion of large, medium, and small diameter shells. The "tumbler" mechanism itself is also a form of physical protection, preventing the equipment from completely overturning and damaging expensive optical components when it accidentally tipes over. It actively isolates electromagnetic interference, which is crucial for laser interferometers using high-sensitivity detectors. It can effectively improve the signal-to-noise ratio and stability of the measurement signal, and its advantages are particularly evident in industrial environments with severe high-frequency electromagnetic pollution.

[0029] 5. This invention features a controllable folding mechanism: all unfolding mechanisms are reversible. When the "central slide" returns, it sequentially triggers the shield to retract, the laser to descend, and the opposing alignment mechanism to fold. This allows a large system used for precision measurement to be compactly folded up when not in use, greatly reducing the size of the equipment. The smaller size means easier transportation between workshops and laboratories, and easier deployment in narrow spaces, truly achieving a balance between "high precision" and "high portability". Attached Figure Description

[0030] Figure 1 This is a three-dimensional schematic diagram of the main structure of the present invention. Figure 1 ;

[0031] Figure 2 This is a three-dimensional schematic diagram of the main structure of the present invention. Figure 2 ;

[0032] Figure 3 This is a schematic diagram showing the unfolded main structure of the present invention;

[0033] Figure 4 This is a schematic diagram of the installation of the load-bearing drive mechanism structure of the present invention;

[0034] Figure 5 This is a schematic diagram of the shock-absorbing load-bearing mechanism of the present invention;

[0035] Figure 6 This is a schematic diagram of the load-bearing drive mechanism of the present invention. Figure 1 ;

[0036] Figure 7 This is a schematic diagram of the load-bearing drive mechanism of the present invention. Figure 2 ;

[0037] Figure 8 This is a schematic diagram of the installation state of the split-view support mechanism of the present invention;

[0038] Figure 9 This is a cross-sectional schematic diagram of the split-view support mechanism of the present invention;

[0039] Figure 10 This is a schematic diagram of the combination of the split-view support mechanism and the shielding extension mechanism of the present invention;

[0040] Figure 11 This is a schematic diagram of the opposing alignment mechanism of the present invention;

[0041] Figure 12 This is a schematic diagram of the assembly extension mechanism of the present invention.

[0042] Among them, 1. Load-bearing platform; 2. Suspension frame; 3. Arc-shaped carriage; 4. Vibration-damping load-bearing mechanism; 5. Load-bearing drive mechanism; 6. Mirror load-bearing mechanism; 7. Shielding extension mechanism; 8. Alignment and alignment mechanism; 9. Assembly extension mechanism; 41. Mounting platform one; 42. Mounting platform two; 43. Parallel load-bearing rod; 44. Hydraulic damping rod; 51. Working platform; 52. Extended support leg; 53. Longitudinal carriage; 54. Horizontal base. 55. Carriage; 56. Embedded slot seat; 57. Lead screw output component; 68. Positioning marker; 69. Center slide table; 60. Synchronous push rod; 61. Nut sleeve; 72. Large diameter sleeve; 73. Medium diameter sleeve; 74. Small diameter sleeve; 85. Opposing slide table; 86. Bottom extension frame; 87. Multi-rail slide; 98. Embedded slide seat; 99. Laser generating element; 90. Embedded slide bar; 91. Angled slide bar; 92. Trapezoidal push table. Detailed Implementation

[0043] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] Please see the appendix Figure 1 -Appendix Figure 3This invention provides an automated calibration device for a laser interferometer, comprising: a support platform 1 for fixing the structure of the automated calibration device for the laser interferometer; a suspension frame 2 located on the support platform 1 for forming a limiting structure for center of gravity offset and fixing the structure of the laser interferometer; an arc-shaped carriage 3 located on the suspension frame 2 for forming a track structure for adjusting horizontal offset; the suspension frame 2 is suspended above the support platform 1 by shock-absorbing support mechanisms 4 distributed on both sides; the arc-shaped carriage 3 is linearly distributed and fixed on the suspension frame 2; a load-bearing drive mechanism 5 is supported and installed on the suspension frame 2 by the arc-shaped carriage 3; a split-lens support mechanism 6 moves along the load-bearing drive mechanism 5; and a shielding extension mechanism 7 is disposed on the load-bearing drive mechanism 5 and fits against the split-lens support mechanism 6. The opposing alignment mechanism 8 is located on both sides and is arranged oppositely on the load-bearing drive mechanism 5. The assembly extension mechanism 9 is embedded in the load-bearing drive mechanism 5. This equipment is mainly designed for the synchronous deployment and calibration of the laser interferometer during operation. The overall equipment structure is fixed with the load-bearing platform 1 as the center. The structure mainly responsible for supporting the various components of the laser interferometer is installed on the suspension frame 2. The suspension frame 2 is installed on the load-bearing platform 1 through the vibration damping load-bearing mechanism 4, which is distributed between the suspension frame 2 and the load-bearing platform 1. At the same time, the vibration damping load-bearing mechanism 4 dampens the vibration of the suspension frame 2 and simultaneously drives the laser interferometer to provide vibration protection during operation. The load-bearing drive mechanism 5, which is mainly responsible for the various components of the laser interferometer, is installed along the suspension frame 2. The device rotates and moves on the arc-shaped carriage 3, and can displace along the arc angle of the carriage 3. In the event of an accidental tipping over, the load-bearing drive mechanism 5 will displace along the guide trajectory of the arc-shaped carriage 3. Combined with the counterweight structure added to the center of the bottom of the load-bearing drive mechanism 5, it creates a self-sustaining effect. By adjusting the center of gravity of the load-bearing drive mechanism 5, it maintains a horizontal load-bearing state, ensuring the horizontality of the laser interferometer being deployed. The beam splitter, mainly responsible for carrying the laser beam splitting and transmission, is arranged on the load-bearing drive mechanism 5 via the beam splitter support mechanism 6, located on the central axis of the load-bearing drive mechanism 5, without changing the center of gravity of the load-bearing drive mechanism 5, thus ensuring automatic horizontality. To ensure calibration accuracy, the beam splitter support mechanism 6 can be driven to move by the support drive mechanism 5, pushing the two sets of opposing alignment mechanisms 8 to extend parallel to both sides until the beam splitter support mechanism 6 reaches between the two sets of opposing alignment mechanisms 8, automatically aligning all three in a straight line. The two sets of beam splitter support mechanisms 6 respectively install the reflector and receiver elements required by the laser interferometer, thus ensuring that during equipment operation, the beam splitter, reflector, and receiver elements are automatically aligned to the same measurement axis. Simultaneously, the movement of the beam splitter support mechanism 6 drives the shielding extension mechanism 7, automatically forming an electromagnetic shield in the laser generation area. Furthermore, as the beam splitter support mechanism 6 moves between the opposing alignment mechanisms 8, it simultaneously drives the assembly extension mechanism 9.This causes it to automatically calibrate within the laser-generating structure of the supporting drive mechanism 5 and be raised to the measurement height.

[0045] Please see the appendix Figure 1 -Appendix Figure 5 The vibration damping and load-bearing mechanism 4 is located on the load-bearing platform 1 and is used to support the suspension frame 2 and the calibration structure of the laser interferometer. The vibration damping and load-bearing mechanism 4 includes a first mounting platform 41 and a second mounting platform 42. The first mounting platform 41 is fixed to the side walls of the load-bearing platform 1 on both sides, and the second mounting platform 42 is fixed to the suspension frame 2 on both sides. Parallel bearing rods 43 are connected between the first mounting platform 41 and the second mounting platform 42, and hydraulic damping rods 44 are connected between the parallel bearing rods 43. The load-bearing platform 1 serves as a base platform, and the suspension frame 2 is suspended through the vibration damping and load-bearing mechanism 4 to reduce vibration. The vibration-bearing mechanism 4 consists of a first support platform 41 and a second support platform 42 connected by a parallel support rod 43, with a hydraulic damping rod 44 in the middle to absorb external vibrations. The first support platform 41 is fixed to the side wall of the support platform 1, and the second support platform 42 is fixed to the bottom of the suspension frame 2. The two are connected by the parallel support rod 43, with the hydraulic damping rod 44 in the middle. The principle is that when external vibrations are transmitted to the support platform 1, the hydraulic damping rod 44 absorbs the impact energy, and the parallel support rod 43 limits the swing amplitude of the suspension frame 2, ensuring the stability of the main structure of the laser interferometer and protecting the precision components of the laser interferometer.

[0046] Please see the appendix Figure 1 -Appendix Figure 9The load-bearing drive mechanism 5 is located on the arc-shaped carriage 3 and is used to support the components of the electronic interferometer and the automatic calibration structure. It can also autonomously calibrate and measure the levelness. The load-bearing drive mechanism 5 includes a work platform 51, with a counterweight structure fixed at the center of its bottom. Opposite inclined extended support legs 52 are fixed to the bottom of the work platform 51 and are embedded within the arc-shaped carriage 3, while being suspended on the suspension frame 2. A longitudinal carriage 53 is fixed to the top of the work platform 51 in a longitudinal configuration. A transverse bottom carriage 54 is arranged in parallel and fixed to the inner bottom wall of the work platform 51, near the output direction of the work platform 51. An embedded slot 55 is located on the side of the work platform 51 away from the transverse bottom carriage 54, and its extension slot extends to the side of the work platform 51 near the transverse bottom carriage 54. A lead screw output component 56 is located on the work platform... On the support platform 51, between the extended support legs 52, a positioning rod 57 is embedded in the extension groove of the horizontal bottom slide 54, and a snap ring structure is sleeved between it and the extension groove. The support drive mechanism 5 is embedded in the arc-shaped slide 3 through the extended support legs 52 at the bottom, and can slide along the arc-shaped trajectory. When the equipment tilts, the counterweight structure at the bottom of the work support platform 51 causes its center of gravity to sink, and it automatically resets along the arc-shaped slide 3, always maintaining a horizontal state. The work support platform 51 has a counterweight at the bottom center, and the extended support legs 52 on both sides are embedded in the arc-shaped slide 3. The arc-shaped slide 3 is fixed on the suspension frame 2 and is in the shape of an arc-shaped track. When the equipment tilts, the counterweight causes the center of gravity of the work support platform 51 to sink, and the extended support legs 52 slide along the arc-shaped slide 3, automatically resetting to a horizontal position like a "roly-poly toy". The curvature of the counterweight and the arc-shaped track are matched to ensure that the center of gravity quickly returns to horizontal after shifting, ensuring the stability of the measurement benchmark.

[0047] Please see the appendix Figure 1 -Appendix Figure 10The segmentation frame support mechanism 6 is located on the support drive mechanism 5. It works in conjunction with the longitudinal slide 53 and the lead screw output component 56 to support the segmentation frame structure of the laser interferometer. It can also be calibrated along the displacement of the support drive mechanism 5. The segmentation frame support mechanism 6 includes a central slide 61, which slides along the longitudinal slide 53 on the working support platform 51. Synchronous push rods 62 are rotatably distributed on both sides of the central slide 61 and extend to the shielding extension mechanisms 7 distributed on both sides. A nut sleeve 63 is fixed to the bottom of the central slide 61 and sleeved on the screw structure of the lead screw output component 56. The push plate structure of the nut sleeve 63 is fixed to the bottom of the central slide 61 and extends into the extension groove of the embedded slot 55. A beam splitter component is provided at the top of the 61. The beam splitter support mechanism 6 moves along the longitudinal slide 53 via the central slide 61. The displacement is controlled by the nut sleeve 63 driven by the lead screw output component 56. When the central slide 61 moves, the opposing slides 81 of the two opposing alignment mechanisms 8 are pushed to both sides along the multi-track slide 83 by the synchronous push rod 62 until the beam splitter support mechanism 6 is centered and supports the beam splitter. The beam splitter support mechanism 6 is linked with the opposing alignment mechanism 8. The lead screw output component 56 rotates and drives the nut sleeve 63 to move the central slide 61 along the longitudinal slide 53 toward the center of the equipment. The beam splitter at the top of the central slide 61 moves to the central axis of the work support platform 51. The synchronous push rod 62 of the central slide 61 pushes the opposing slides 81 on both sides.

[0048] Please see the appendix Figure 1 -Appendix Figure 10The shielding extension mechanism 7 is located on the bearing drive mechanism 5 and works with the working bearing platform 51 and the central slide 61 to form a shielding structure in the laser generation area. The shielding extension mechanism 7 includes a large-diameter sleeve 71, a medium-diameter sleeve 72, and a small-diameter sleeve 73. The large-diameter sleeve 71 is fixed to the side wall of the central slide 61, and the small-diameter sleeve 73 is fixed to the side of the working bearing platform 51 away from the embedded slot 55. At the same time, it follows the large-diameter sleeve 71 and the medium-diameter sleeve 72 and fits against the top surface of the working bearing platform 51. The large-diameter sleeve 71 is embedded into the inner wall of the medium-diameter sleeve 72, and the medium-diameter sleeve 72 is embedded into the inner wall of the small-diameter sleeve 73. The embedded end of the large-diameter sleeve 71 is provided with an outwardly extending protruding ring, and the two openings on both sides of the inner wall of the medium-diameter sleeve 72 are provided with inwardly extending protruding rings. The end embedded into the small-diameter sleeve 73 is provided with an outwardly extending protruding ring. The inner wall of the small-diameter sleeve 73, near the middle-diameter sleeve 72, has an extended convex ring. When the central slide 61 reaches the middle of the two opposing slides 81, the three are collinear. The beam splitter, reflector, and receiver are coaxial. The side slide of the multi-track slide 83 restricts the displacement direction, ensuring that the reflector and receiver are absolutely parallel. The two opposing slides 81 are respectively equipped with reflectors and receivers, and the three automatically align to the same measurement axis. The large-diameter sleeve 71 is fixed to the central slide 61, and the middle-diameter sleeve 72 and small-diameter sleeve 73 are fixed to the working support platform 51. The three are nested through the convex ring. When the central slide 61 moves, the large-diameter sleeve 71 extends out from the middle-diameter sleeve 72, and the middle-diameter sleeve 72 extends out from the small-diameter sleeve 73, unfolding layer by layer to form a cylindrical shield that covers the laser path and isolates electromagnetic interference.

[0049] Please see the appendix Figure 1 -Appendix Figure 11The opposing alignment mechanism 8 is located on the arc-shaped slide 3, and works with the horizontal bottom slide 54 and synchronous push rod 62 to form an opposing bearing area to support the reflector and laser receiving element, and is on a horizontal line. The opposing alignment mechanism 8 includes opposing slides 81 and multi-track slides 83. The opposing slides 81 are distributed opposite each other on the top surface of the working bearing platform 51, and the top surfaces of the opposing slides 81 on both sides can be respectively installed with reflectors and laser receiving elements. The multi-track slide 83 slides on the horizontal bottom slide 54 through a vertical sleeve groove, and the side wall of the multi-track slide 83 is provided with a slide structure with two side barriers. The bottom extension frame 82 is fixed to the bottom of the opposing slide 81, and the extension end of the bottom extension frame 82 is provided with a sliding sleeve structure, which is sleeved on the side slide of the multi-track slide 83. When the central slide 61 moves, it moves through the same... The push rod 62 pushes the opposing slides 81 of the two opposing alignment mechanisms 8 to extend to both sides along the multi-track slide 83 until the split-lens support mechanism 6 is centered and supports the beam splitter. The split-lens support mechanism 6 is linked with the opposing alignment mechanism 8, and the lead screw output component 56 rotates. The drive nut sleeve 63 drives the central slide 61 to move along the longitudinal slide frame 53 toward the center of the equipment. The beam splitter on the top of the central slide 61 moves to the central axis of the work support platform 51. The synchronous push rod 62 of the central slide 61 pushes the two opposing slides 81. The opposing slides 81 move parallel to both sides along the side slide of the multi-track slide 83 through the bottom extension frame 82. When they reach the end of the side slide of the multi-track slide 83, they push the multi-track slide 83 to slide outward continuously along the transverse bottom slide frame 54, so as to ensure the stable extension of the opposing slides 81 and the extension distance.

[0050] Please see the appendix Figure 1 -Appendix Figure 12The assembly extension mechanism 9 is located on the load-bearing drive mechanism 5. It works in conjunction with the extension groove of the embedded slot 55 and the push plate structure of the nut sleeve 63 to expand and contract the laser generating structure. The assembly extension mechanism 9 includes an embedded slide 91 and an embedded slide bar 93. A laser generating element 92 is fixedly mounted on the top of the embedded slide 91 and is slidably embedded into the embedded slot 55. The embedded slide bar 93 is embedded into the extension groove of the embedded slot 55 and has baffle structures at both ends. The two end baffles of 93 are movable on both sides of the push plate structure of the nut sleeve 63 and can contact the push plate structure of the nut sleeve 63 respectively. An inclined slide 94 is fixed on the side of the embedded slide 93 near the shielding extension mechanism 7, and the inclined slide 94 extends to the top surface of the working support platform 51 and is placed below the embedded slide 91. A trapezoidal push platform 95 is fixed at the end of the inclined slide 94, and the inclined surface can contact the embedded slide 91. The laser generating element 92 is installed on the top of the embedded slide 91, and the bottom... A trapezoidal pusher 95 is connected to an inclined slide bar 94. An embedded slide bar 93 has baffles at both ends and is embedded in an embedded groove 55. The push plate of the nut sleeve 63 contacts the baffles of the embedded slide bar 93, pushing it to slide along the embedded groove 55. The embedded slide bar 93 drives the inclined slide bar 94 to move. The inclined surface of the trapezoidal pusher 95 at the top of the inclined slide bar 94 lifts the embedded slide 91, raising the laser generator element 92 to the measurement height, completing the optical path calibration. When the central slide bar 61 returns, it will... After moving a certain distance, it contacts the stop bar at the other end of the embedded slide bar 93, thereby driving the embedded slide bar 93 and the inclined slide bar 94 to retract. The trapezoidal pusher 95 gradually disengages from the embedded slide base 91, causing the support force at its bottom to disappear. The embedded slide base 91 also drives the laser generating element 92 back into the embedded slot 55. The two sets of opposing alignment mechanisms 8 also finish unfolding and begin to fold as they are pulled by the central slide table 61, thereby reducing the overall unfolded volume for easy transportation.

[0051] Working Principle: The load-bearing platform 1 serves as the basic platform, and the suspension frame 2 is suspended by the shock-absorbing load-bearing mechanism 4. The shock-absorbing load-bearing mechanism 4 consists of a first support platform 41 and a second support platform 42 connected by a parallel bearing rod 43, with a hydraulic damping rod 44 in the middle to absorb external vibrations. The first support platform 41 is fixed to the side wall of the load-bearing platform 1, and the second support platform 42 is fixed to the bottom of the suspension frame 2. The two are connected by the parallel bearing rod 43, with the hydraulic damping rod 44 in the middle. When external vibrations are transmitted to the load-bearing platform 1, the hydraulic damping rod 44 absorbs the impact energy, and the parallel bearing rod 43 limits the swing amplitude of the suspension frame 2, ensuring the stability of the main structure of the laser interferometer and protecting the precision components of the laser interferometer. The load-bearing drive mechanism 5 is embedded in the arc-shaped slide 3 through the extended support legs 52 at the bottom, and can move along the arc-shaped track. When the equipment tilts, the counterweight structure at the bottom of the work platform 51 lowers its center of gravity, causing it to automatically return to a horizontal position along the arc-shaped slide 3. The work platform 51 has a counterweight at its center and extended support legs 52 on both sides embedded in the arc-shaped slide 3. The arc-shaped slide 3 is fixed to the suspension frame 2 and forms an arc-shaped track. When the equipment tilts, the counterweight lowers the center of gravity of the work platform 51, and the extended support legs 52 slide along the arc-shaped slide 3, automatically returning to a horizontal position like a "roly-poly toy." The curvature of the counterweight matches that of the arc-shaped track, ensuring rapid recovery to horizontal after a shift in the center of gravity, thus ensuring stable measurement reference. The split-lens support mechanism 6 moves along the longitudinal slide 53 via the central slide 61, and its displacement is controlled by the lead screw output component 56 driving the nut sleeve 63. When 61 moves, the synchronous push rod 62 pushes the opposing slides 81 of the two opposing alignment mechanisms 8 to unfold to both sides along the multi-rail slide 83 until the split-lens carrying mechanism 6 is centered and carries the beam splitter. The split-lens carrying mechanism 6 is linked with the opposing alignment mechanism 8, and the lead screw output component 56 rotates, driving the nut sleeve 63 to move the central slide 61 along the longitudinal slide frame 53 toward the center of the equipment. The beam splitter on the top of the central slide 61 moves to the central axis of the working support platform 51. The synchronous push rod 62 of the central slide 61 pushes the two opposing slides 81. The opposing slides 81 move parallel to both sides along the side slide of the multi-rail slide 83 through the bottom extension frame 82. When they reach the end of the side slide of the multi-rail slide 83, they push the multi-rail slide 83 to continue sliding outward along the transverse bottom slide frame 54. This ensures the stable extension and extension distance of the opposing slides 81. When the central slide 61 reaches the center of the two opposing slides 81, the three are collinear. The beam splitter, reflector, and receiver are coaxial. The side slides of the multi-track slide 83 limit the displacement direction, ensuring that the reflector and receiver are absolutely parallel. The two opposing slides 81 are respectively equipped with reflectors and receivers, and the three automatically align to the same measurement axis. The large-diameter sleeve 71 is fixed to the central slide 61, and the medium-diameter sleeve 72 and small-diameter sleeve 73 are fixed to the working support platform 51. The three are nested by convex rings. When the central slide 61 moves, the large-diameter sleeve 71 extends from the medium-diameter sleeve 72, and the medium-diameter sleeve 72 extends from the small-diameter sleeve 73, unfolding layer by layer to form a cylindrical shield that covers the laser path and isolates electromagnetic interference.A laser generating element 92 is mounted on the top of the embedded slide 91, and a trapezoidal pusher 95 is connected to the bottom via an inclined slide bar 94. The embedded slide bar 93 has baffles at both ends and is embedded in an embedded groove 55. The push plate of the nut sleeve 63 contacts the baffles of the embedded slide bar 93, pushing it to slide along the embedded groove 55. The embedded slide bar 93 causes the inclined slide bar 94 to move. The inclined surface of the trapezoidal pusher 95 at the top of the inclined slide bar 94 lifts the embedded slide bar 91, raising the laser generating element 92 to the measurement height, completing the optical path calibration. Meanwhile, the center... When the slide table 61 returns, it will travel a certain distance and then contact the stop bar at the other end of the embedded slide bar 93, thereby driving the embedded slide bar 93 and the inclined slide bar 94 to retract. The trapezoidal pusher 95 gradually disengages from the embedded slide base 91, causing its bottom support to disappear. The embedded slide base 91 then pulls the laser generating element 92 back into the embedded slot 55. The two sets of opposing alignment mechanisms 8 also finish unfolding following the traction of the central slide table 61 and begin to fold, thereby reducing the overall unfolded volume for easier transportation.

[0052] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An automated calibration device for a laser interferometer, characterized in that, include: A load-bearing platform (1) is used to fix the structure of the automated calibration device for the laser interferometer; The suspension frame (2) is located on the support platform (1) to form a limiting structure for the center of gravity offset and to fix the structure of the laser interferometer; The arc-shaped carriage (3) is located on the suspension frame (2) and is used to form a track structure for adjusting the horizontal offset; The shock-absorbing load-bearing mechanism (4) is located on the load-bearing platform (1) and is used to support the suspension frame (2) and the calibration structure of the laser interferometer; The load-bearing drive mechanism (5) is located on the arc-shaped carriage (3) and is used to carry the components of the electronic interferometer and the automatic calibration structure, while also being able to autonomously calibrate the measurement level. The split-lens support mechanism (6) is located on the support drive mechanism (5), and works with the longitudinal slide (53) and the lead screw output component (56) to support the split-lens structure of the laser interferometer, and can be calibrated by displacement along the support drive mechanism (5); The shielding extension mechanism (7) is located on the bearing drive mechanism (5) and works with the working bearing platform (51) and the central slide (61) to form a shielding structure in the laser generation area; The opposing alignment mechanism (8) is located on the arc-shaped carriage (3), and works with the horizontal bottom carriage (54) and the synchronous push rod (62) to form an opposing bearing area to support the reflector and the laser receiving element, and to be on a horizontal line; The assembly extension mechanism (9) is located on the load-bearing drive mechanism (5) and works with the extension slot of the embedded slot seat (55) and the push plate structure of the nut sleeve (63) to unfold and retract the laser generation structure.

2. The automated calibration device for a laser interferometer according to claim 1, characterized in that, The suspension frame (2) is suspended above the load-bearing platform (1) by shock-absorbing load-bearing mechanisms (4) distributed on both sides. The arc-shaped carriage (3) is linearly distributed and fixed on the suspension frame (2). The load-bearing drive mechanism (5) is supported and installed on the suspension frame (2) by the arc-shaped carriage (3). The segmentation frame load-bearing mechanism (6) moves along the load-bearing drive mechanism (5). The shielding extension mechanism (7) is set on the load-bearing drive mechanism (5) and fits against the segmentation frame load-bearing mechanism (6). The opposing alignment mechanism (8) is on both sides and is distributed on the load-bearing drive mechanism (5) in an opposing manner. The assembly extension mechanism (9) is embedded in the load-bearing drive mechanism (5).

3. The automated calibration device for a laser interferometer according to claim 1, characterized in that, The shock-absorbing load-bearing mechanism (4) includes a first mounting platform (41) and a second mounting platform (42). The first mounting platform (41) is fixed to the side wall of the load-bearing platform (1) on both sides. The second mounting platform (42) is fixed to the suspension frame (2) on both sides. Parallel bearing rods (43) are connected between the first mounting platform (41) and the second mounting platform (42). Hydraulic damping rods (44) are connected between the parallel bearing rods (43).

4. The automated calibration device for a laser interferometer according to claim 1, characterized in that, The load-bearing drive mechanism (5) includes a work platform (51), a counterweight structure is fixed at the center of the bottom of the work platform (51), and opposing inclined extension support legs (52) are fixed at the bottom of the work platform (51). The extension support legs (52) are embedded in the arc-shaped slide (3) and suspended on the suspension frame (2). The longitudinal slide (53) is fixed to the top of the work platform (51) in a longitudinal manner. The transverse bottom slide (54) is distributed and fixed in parallel on the inner bottom wall of the work platform (51) and close to the output direction of the work platform (51). The embedded slot seat (55) is set on the side of the work platform (51) away from the transverse bottom slide (54), and its extension slot extends to the side of the work platform (51) close to the transverse bottom slide (54). The screw output component (56) is set on the work platform (51) and located between the extension support legs (52).

5. An automated calibration device for a laser interferometer according to claim 1, characterized in that, The splitter support mechanism (6) includes a central slide (61), which slides along the longitudinal slide (53) on the work support platform (51). The synchronous push rod (62) is rotatably distributed on both sides of the central slide (61) and extends to the shielding extension mechanism (7) distributed on both sides. The nut sleeve (63) is fixed at the bottom of the central slide (61) and sleeved on the screw structure of the lead screw output component (56). The push plate structure of the nut sleeve (63) is fixed at the bottom of the nut sleeve (63) and extends into the extension groove of the embedded slot (55). The top of the central slide (61) is provided with a beam splitter component.

6. The automated calibration device for a laser interferometer according to claim 1, characterized in that, The shielding extension mechanism (7) includes a large-diameter sleeve (71), a medium-diameter sleeve (72), and a small-diameter sleeve (73). The large-diameter sleeve (71) is fixed to the side wall of the central slide (61), and the small-diameter sleeve (73) is fixed to the side of the working platform (51) away from the embedded slot (55). At the same time, it follows the large-diameter sleeve (71) and the medium-diameter sleeve (72) and fits against the top surface of the working platform (51). The large-diameter sleeve (71) is embedded into the inner wall of the medium-diameter sleeve (72), and the medium-diameter sleeve (72) is embedded into the inner wall of the small-diameter sleeve (73).

7. The automated calibration device for a laser interferometer according to claim 1, characterized in that, The opposing alignment mechanism (8) includes opposing slides (81) and multi-track slides (83). The opposing slides (81) are distributed opposite each other on the top surface of the work platform (51), and reflectors and laser receiving elements can be installed on the top surfaces of the opposing slides (81) on both sides respectively. The multi-track slide (83) slides on the horizontal bottom slide frame (54) through a vertical sleeve groove. The side wall of the multi-track slide (83) is provided with a slide structure with two side barriers. The bottom of the opposing slide (81) is fixed with a bottom extension frame (82), and the extension end of the bottom extension frame (82) is provided with a sliding sleeve structure, which is sleeved on the side slide of the multi-track slide (83).

8. An automated calibration device for a laser interferometer according to claim 1, characterized in that, The assembly extension mechanism (9) includes an embedded slide (91) and an embedded slide bar (93). A laser generating element (92) is fixedly installed on the top of the embedded slide (91) and is embedded and slidably inserted into the embedded slot (55). The embedded slide bar (93) is embedded into the extension slot of the embedded slot (55) and has baffle structures at both ends. The baffles at both ends of the embedded slide bar (93) are movable on both sides of the push plate structure of the nut sleeve (63) and can contact the push plate structure of the nut sleeve (63) respectively. An inclined slide bar (94) is fixed on the side of the embedded slide bar (93) near the shielding extension mechanism (7), and the inclined slide bar (94) extends to the top surface of the work support platform (51) and is placed below the embedded slide (91). A trapezoidal push platform (95) is fixed at the end of the inclined slide bar (94), and the inclined surface can contact the embedded slide bar (91).

9. An automated calibration device for a laser interferometer according to claim 4, characterized in that, The horizontal bottom slide (54) has a positioning rod (57) embedded in its extension groove, and a snap ring structure is sleeved between the rod and the extension groove.

10. An automated calibration device for a laser interferometer according to claim 6, characterized in that, The large-diameter sleeve (71) is provided with an extended convex ring at the embedded end, the inner wall of the medium-diameter sleeve (72) is provided with an extended convex ring on both sides, and the end embedded into the small-diameter sleeve (73) is provided with an extended convex ring. The inner wall of the small-diameter sleeve (73) is provided with an extended convex ring on the side near the medium-diameter sleeve (72).

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