Boat bearing device and semiconductor process equipment

Abstract

The invention discloses a boat bearing device and semiconductor process equipment, and relates to the technical field of semiconductor preparation, and the boat bearing device comprises a driving mechanism, a first bearing arm and a second bearing arm, and the driving mechanism is connected with the first bearing arm and the second bearing arm. The first bearing arm and the second bearing arm are driven to be close to or far away from each other in a translation manner; under the condition that the first bearing arm and the second bearing arm are close to each other, the first bearing arm and the second bearing arm are used for bearing boat lugs on the two opposite sides of the bearing boat respectively. Due to the fact that the first bearing arm and the second bearing arm move relatively in a translation mode, the gravity of the bearing boat is not prone to generating component force in the moving direction of the first bearing arm and the second bearing arm, and the first bearing arm and the second bearing arm are not prone to being opened due to stress. Therefore, the bearing boat can be in a stable matching state with the first bearing arm and the second bearing arm, and the reliability of the bearing boat in the bearing process is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor fabrication technology, and in particular to a boat support device and semiconductor process equipment. Background Technology

[0002] Currently, silicon wafers are widely used in optoelectronic device fabrication, semiconductor manufacturing, and other fields. For some high-temperature processing steps involving silicon wafers, a quartz boat is required as a carrier to load the silicon wafers into the quartz boat, and then a transport device is used to transfer the quartz boat to a predetermined workstation.

[0003] In related technologies, the transport device includes two robotic arms that can move closer or further apart by rotating around an axis to grip or release a quartz boat. However, for schemes where the robotic arms grip the quartz boat by rotation, the reliability of the gripping depends on the gripping force applied by the robotic arms. If the gripping force of the robotic arms is insufficient due to factors such as wear and aging of components, the two robotic arms are prone to opening up under force, resulting in poor reliability and making it easy for the quartz boat to fall off, causing unnecessary losses. Summary of the Invention

[0004] This application discloses a boat support device and semiconductor process equipment to solve the problem of poor reliability in related technologies where a robotic arm holds a quartz boat by rotation.

[0005] To solve the above-mentioned technical problems, this application is implemented as follows: In a first aspect, embodiments of this application disclose a boat support device for supporting a carrying boat. The boat support device includes a drive mechanism, a first support arm, and a second support arm. The drive mechanism is connected to the first support arm and the second support arm respectively to drive the first support arm and the second support arm to move closer to or further away from each other by translation. When the first support arm and the second support arm are close to each other, the first support arm and the second support arm are respectively used to support the boat ears on opposite sides of the support boat.

[0006] Secondly, this application discloses a semiconductor process apparatus, which includes a carrier boat and the aforementioned boat support device. The carrier boat has boat ears on both opposite sides, and the boat support device is used to support the boat ears.

[0007] The technical solution adopted in this application can achieve the following technical effects: The boat support device disclosed in this application improves upon related technologies. The disclosed boat support device includes a drive mechanism, a first support arm, and a second support arm. The drive mechanism is connected to both the first and second support arms to drive them to move closer or further apart through translation. When the first and second support arms are close together, they support the boat ears on opposite sides of the carrying boat. Using this boat support device, the carrying boat can be stably placed on the first and second support arms solely by its own weight. Because the first and second support arms move relative to each other through translation, the weight of the carrying boat is less likely to generate a component force in the direction of movement of the first and second support arms. Therefore, the first and second support arms are less prone to opening due to force, resulting in a more stable cooperation between the carrying boat and the first and second support arms. This reduces the risk of the carrying boat detaching from the support arms and improves the reliability of the boat support process. Attached Figure Description

[0008] Figure 1 This is a schematic diagram of the assembly of the boat support device and the carrying boat disclosed in the embodiments of this application; Figure 2 This is one of the front structural schematic diagrams of the drive mechanism disclosed in the embodiments of this application; Figure 3 This is a second front structural schematic diagram of the drive mechanism disclosed in the embodiments of this application; Figure 4 This is the third front structural schematic diagram of the drive mechanism disclosed in the embodiments of this application; Figure 5 This is one of the schematic diagrams of the rear structure of the drive mechanism disclosed in the embodiments of this application; Figure 6 This is a second schematic diagram of the rear structure of the drive mechanism disclosed in the embodiments of this application; Figure 7 This is the third schematic diagram of the rear structure of the drive mechanism disclosed in the embodiments of this application; Figure 8 This is a schematic diagram showing the first and second racks of the present application being far apart from each other, as disclosed in the embodiments of this application. Figure 9 This is a schematic diagram showing the first and second racks of the present application approaching each other in an embodiment; Figure 10 This is a schematic diagram of the structure of the first bearing arm disclosed in an embodiment of this application; Figure 11 This is a schematic diagram showing the cooperation between the positioning part and the scaphoid ear as disclosed in the embodiments of this application; Figure 12 This is one of the structural schematic diagrams of the positioning part disclosed in the embodiments of this application; Figure 13 This is a second schematic diagram of the positioning part disclosed in the embodiments of this application; Figure 14 This is the third schematic diagram of the positioning part disclosed in the embodiments of this application; Figure 15 This is a schematic diagram showing the linear arrangement of multiple carrier boats disclosed in the embodiments of this application; Figure 16 This is one of the structural schematic diagrams of the carrier boat disclosed in the embodiments of this application; Figure 17 This is a second schematic diagram of the structure of the carrier boat disclosed in the embodiments of this application; Figure 18 This is a schematic diagram of the structure of the semiconductor process equipment disclosed in the embodiments of this application; Figure 19 This is a schematic diagram of the assembly of the carrier boat and the reaction chamber disclosed in the embodiments of this application.

[0009] Explanation of reference numerals in the attached figures: 100-Boat support device; 110-Drive mechanism; 111-Base; 1111-First mounting plate; 1112-Second mounting plate; 1113-Third mounting plate; 1114-Strip hole; 112-Drive body; 1121-Gear; 113-Transmission part; 1131-First rack; 1132-Second rack; 1133-First slider; 1134-Second slider; 1135-First connector; 1136-Second connector; 1137-First slide rail; 1138-Second slide rail; 1139-Third slide rail; 120-First bearing arm; 121-Bearing arm body; 122-Connecting part; 123-Positioning part; 1231-Base plate; 1232-First guide plate; 1233-Second guide plate; 1234-Guide surface; 130-Second bearing arm; 140-First direction. 200-Bearing boat, 210-Boat ear, 220-Detection mating part, 230-Separator, 240-First positioning groove, 250-Boat and paddle mating part, 251-Second positioning groove 300-Conveying device 400-Lifting mechanism 500 - Push-pull boat, 501 - Oar, 600-Reaction Chamber. Detailed Implementation

[0010] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0011] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and are not used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and are not limited in number; for example, a first object can be one or more.

[0012] The technical solutions disclosed in the various embodiments of this application are described in detail below with reference to the accompanying drawings.

[0013] During silicon wafer processing, several high-temperature processing steps are involved. These steps typically utilize a carrier boat as a platform to load the silicon wafers, which are then transported to a designated workstation by a conveyor system. In related technologies, the conveyor system usually includes two robotic arms. These arms are driven by built-in motors, rotary cylinders, and other drive devices, allowing them to move closer or further apart by rotating around an axis to grip or release the carrier boat.

[0014] Regarding the solution of using a robotic arm to grip a carrier boat via rotation, the aforementioned drive device needs to continuously apply rotational driving force to ensure stable gripping. This causes the robotic arm to be constantly under load, leading to wear and aging of its internal components. The reliability of the carrier boat gripping depends on the robotic arm's ability to consistently apply gripping force. If the gripping force is insufficient due to wear or aging of components, the weight of the carrier boat will generate a component force in the gripping direction of the two robotic arms. Under the action of this component force, the two robotic arms are prone to opening, resulting in poor reliability and potentially causing the quartz boat to detach, causing unnecessary losses.

[0015] Based on the above issues, please refer to Figures 1 to 19This application discloses a boat support device 100 for supporting a carrier boat 200, which may include a quartz boat, a graphite boat, etc. Taking the diffusion process of silicon-based solar cells as an example, a quartz boat is used as a carrier to load silicon wafers into the quartz boat, and the support device supports the quartz boat. With the help of lifting equipment, horizontal moving equipment, etc., the quartz boat loaded with silicon wafers is transferred to or removed from the diffusion furnace.

[0016] like Figure 1 As shown, the supporting device may include a drive mechanism 110, a first supporting arm 120, and a second supporting arm 130. The drive mechanism 110 is connected to both the first supporting arm 120 and the second supporting arm 130 to drive the first supporting arm 120 and the second supporting arm 130 to move closer to or further away from each other by translation. It should be noted that translation refers to the first supporting arm 120 and the second supporting arm 130 moving towards or away from each other in a straight line within the same plane. This plane can be a horizontal plane, a vertical plane, or another plane that forms an angle with the horizontal or vertical plane.

[0017] The drive mechanism 110 may include a power source and a transmission device. The power source may include a motor, a rotary cylinder, or other devices. The transmission device may include at least one or more combinations of components such as transmission gears, connecting rods, lead screws, and conveyor belts. The power source is connected to the first support arm 120 and the second support arm 130 through the transmission device. The driving force generated by the power source can be transmitted to the first support arm 120 and the second support arm 130 through the transmission device to drive the first support arm 120 and the second support arm 130 to move relative to each other.

[0018] like Figure 1 and Figure 10 As shown, the first support arm 120 and the second support arm 130 adopt a wrap-around design, which can surround the periphery of the support boat 200 to support the support boat 200. The first support arm 120 and the second support arm 130 can have the same structure and can be made of materials such as stainless steel and aluminum alloy. The opposite sides of the support boat 200 are respectively provided with boat ears 210, which protrude from the side of the support boat 200. The first support arm 120 and the second support arm 130 can support the support boat 200 through the boat ears 210.

[0019] In the actual process of supporting the carrier boat 200, taking translation along the horizontal plane as an example, the first carrier arm 120 and the second carrier arm 130 can be controlled to move away from each other in the horizontal direction. The space enclosed by the first carrier arm 120 and the second carrier arm 130 is relatively large, which makes it easy to place the first carrier arm 120 and the second carrier arm 130 on the periphery of the carrier boat 200 respectively. After the first carrier arm 120 and the second carrier arm 130 are on the periphery of the carrier boat 200, the first carrier arm 120 and the second carrier arm 130 can be controlled to move closer to each other in the horizontal direction and gradually approach the bottom of the boat ear 210 of the carrier boat 200. After the upper surfaces of the first carrier arm 120 and the second carrier arm 130 are respectively located directly below the boat ear 210, the carrier boat 200 can be supported upward.

[0020] The first bearing arm 120 and the second bearing arm 130 moving closer to or further apart by translating along the horizontal plane have the following advantages: Firstly, the drive mechanism 110 only needs to apply driving force during the translation of the first support arm 120 and the second support arm 130. Once the first support arm 120 and the second support arm 130 are in place, the driving force can be removed. The support boat 200 can be stably placed on the first support arm 120 and the second support arm 130 by relying solely on its own gravity. For the drive mechanism 110, the load is small and wear is not easy to occur, thereby improving the durability of the drive mechanism 110.

[0021] Secondly, the first support arm 120 and the second support arm 130 support the support boat 200 in the vertical direction. The gravity on the support boat 200 is not likely to generate a component force in the translational direction of the first support arm 120 and the second support arm 130. Therefore, the first support arm 120 and the second support arm 130 will not open due to the component force, which improves the stability of the support process.

[0022] Thirdly, by adopting a translational method, the first support arm 120 and the second support arm 130 can move closer to or further away from each other from the lower area of ​​the boat ear 210 to support the two sides of the boat 200. Compared with the solution of rotating and clamping the support boat 200 by a robotic arm, it does not need to get too close to the top of the support boat 200, thereby avoiding interference with the relevant structures on the top of the support boat 200 and reducing the probability of the support boat 200 being bumped or damaged.

[0023] Fourth, since the movement pattern of the first support arm 120 and the second support arm 130 when they move relative to each other is relatively simple, it is easy to adjust the level of the first support arm 120 and the second support arm 130. The adjustment process of the level of the first support arm 120 and the second support arm 130 is also relatively easy, thereby avoiding the problem of the support boat 200 tilting due to the difference in level of the first support arm 120 and the second support arm 130.

[0024] Fifth, since the first support arm 120 and the second support arm 130 only involve horizontal movement during translation, and the resistance and resistance arm do not change during the movement, compared with the solution of rotating the mechanical arm to clamp the support boat 200, it is less likely to cause uneven wear of parts, thereby improving the durability and stability of the device.

[0025] As described above, the boat support device 100 disclosed in this application improves upon related technologies. The boat 200 can be stably placed on the first support arm 120 and the second support arm 130 solely by its own weight. Since the first support arm 120 and the second support arm 130 move relative to each other in a translational manner, the weight of the boat 200 is less likely to generate a component force in the direction of movement of the first support arm 120 and the second support arm 130. Therefore, the first support arm 120 and the second support arm 130 are less likely to open under stress, thereby enabling the boat 200 to be in a relatively stable cooperative state with the first support arm 120 and the second support arm 130, reducing the risk of the boat falling off the support arm, and thus improving the reliability of the boat support process.

[0026] like Figures 2 to 9 As shown, the aforementioned drive mechanism 110 may include a base 111, a drive body 112, and a transmission part 113. The base 111 serves as the mounting base for the drive body 112, the transmission part 113, the first support arm 120, and the second support arm 130. The drive body 112 is mounted on the base 111 and is used to provide driving force to the first support arm 120 and the second support arm 130. The drive body 112 may include a motor, a rotary cylinder, or other devices. The connection method between the drive body 112 and the base 111 may include bolt connection, snap-fit ​​connection, or the like.

[0027] The transmission unit 113 is slidably connected to the base 111. The direction in which the transmission unit 113 slides relative to the base 111 can be horizontal, which helps to maintain the horizontality of the first support arm 120 and the second support arm 130 during transmission. The transmission unit 113 may include at least one or more combinations of components such as transmission gears, connecting rods, lead screws, and conveyor belts. The drive body 112 can be connected to the first support arm 120 and the second support arm 130 through the transmission unit 113. The driving force generated by the drive body 112 can be transmitted to the first support arm 120 and the second support arm 130 through the transmission unit 113 to drive the first support arm 120 and the second support arm 130 to move relative to each other.

[0028] The drive body 112 is provided with an output shaft. When the output shaft of the drive body 112 rotates, the output shaft can drive the transmission part 113 to slide relative to the base 111, thereby driving the first bearing arm 120 and the second bearing arm 130 to move relative to each other, supporting the bearing boat 200 or separating from the bearing boat 200.

[0029] like Figures 2 to 9 As shown, the transmission unit 113 may include a first rack 1131 and a second rack 1132. The first rack 1131 and the second rack 1132 are slidably connected to the base 111, and the direction in which the first rack 1131 and the second rack 1132 slide relative to the base 111 may be horizontal. The first bearing arm 120 is drivenly connected to the first rack 1131, and the second bearing arm 130 is drivenly connected to the second rack 1132. The specific transmission connection method may include screw drive, gear 1121 drive, etc. The output shaft of the drive body 112 is provided with a gear 1121. The gear 1121 is fixedly connected to the output shaft and can rotate synchronously. The first rack 1131 and the second rack 1132 are located on opposite sides of the gear 1121 and mesh with the gear 1121 respectively.

[0030] When the drive body 112 drives the gear 1121 to rotate via the output shaft, the gear 1121 can drive the first rack 1131 and the second rack 1132 to move towards or away from each other, thereby causing the first support arm 120 and the second support arm 130 to move closer or further apart, so as to support the support boat 200 or separate from the support boat 200. Since the rotational driving force applied by the drive body 112 can drive the first rack 1131 and the second rack 1132 to perform reciprocating linear motion through the cooperation of the gear 1121 and the rack, the movement direction of the first rack 1131 and the second rack 1132 can be consistent with the movement direction of the first support arm 120 and the second support arm 130, thereby improving the stability of the drive mechanism 110.

[0031] Please continue to refer to this. Figures 2 to 9 The transmission unit 113 further includes a first slider 1133, a second slider 1134, a first connector 1135, and a second connector 1136. The first slider 1133 and the second slider 1134 are slidably connected to the base 111. The first rack 1131 is connected to the first slider 1133 via the first connector 1135, and the second rack 1132 is connected to the second slider 1134 via the second connector 1136. Specific connection methods may include bolt connection, welding, riveting, etc. The first bearing arm 120 is connected to the first slider 1133, and the first rack 1131 is drivenly connected to the first bearing arm 120 via the first connector 1135 and the first slider 1133. The second bearing arm 130 is connected to the second slider 1134, and the second rack 1132 is drivenly connected to the second bearing arm 130 via the second connector 1136 and the second slider 1134. The connection methods between the above components may include bolt connection, snap-fit, etc.

[0032] When gear 1121 rotates, the first rack 1131 moves synchronously with the first slider 1133, and the second rack 1132 moves synchronously with the second slider 1134, so as to drive the first support arm 120 and the second support arm 130 to move relative to each other. Figure 8 The diagram shows the first rack 1131 and the second rack 1132 moving away from each other. At this time, the first slider 1133 and the second slider 1134 respectively drive the first support arm 120 and the second support arm 130 to also be in a state of moving away from each other. The first support arm 120 and the second support arm 130 can be separated from the support boat 200. Then, the gear 1121 can be controlled to rotate counterclockwise. Figure 9 A schematic diagram is shown showing the first rack 1131 and the second rack 1132 approaching each other. At this time, the first slider 1133 and the second slider 1134 respectively drive the first support arm 120 and the second support arm 130 to also be in a state of approaching each other, which can support the support boat 200.

[0033] like Figure 1 As shown, the length extension direction of the first bearing arm 120 or the second bearing arm 130 can be defined as the first direction 140 (…). Figure 1 (As indicated by the arrow in the diagram), the first support arm 120 and the second support arm 130 are provided with drive mechanisms 110 at both ends along the first direction 140. The two drive mechanisms 110 can have the same structure so as to provide support and driving force to the first support arm 120 and the second support arm 130 at the same time, thereby improving the load capacity and operational stability of the first support arm 120 and the second support arm 130.

[0034] like Figures 2 to 8 As shown, the base 111 may include a first mounting plate 1111, a second mounting plate 1112, and a third mounting plate 1113. The first mounting plate 1111 and the second mounting plate 1112 are located on the same side of the third mounting plate 1113 and are connected through the third mounting plate 1113. The specific connection method may include welding, bolt connection, etc. The first mounting plate 1111, the second mounting plate 1112, and the third mounting plate 1113 form an installation space. The drive body 112 is connected to the first mounting plate 1111, and the output shaft of the drive body 112 extends into the installation space. Taking a motor as an example, the motor housing can be fixed to the first mounting plate 1111 by bolts, and the output shaft of the motor extends into the installation space.

[0035] The first rack 1131 and the second rack 1132 are both located within the installation space. The first rack 1131 and the second rack 1132 are slidably connected to the second mounting plate 1112. The slidable connection between the first rack 1131 and the second rack 1132 and the second mounting plate 1112 can be achieved by setting pulleys on the first rack 1131, the second rack 1132 and the second mounting plate 1112, or by setting sliders on the first rack 1131 and the second rack 1132 respectively, and setting a slide rail on the second mounting plate 1112, thereby achieving the slidable connection by utilizing the cooperation between the slider and the slide rail.

[0036] The first slider 1133 and the second slider 1134 are slidably connected to the surface of the third mounting plate 1113 facing away from the mounting space, respectively, so that the first slider 1133 and the second slider 1134 can be connected to the first support arm 120 and the second support arm 130, respectively. Considering that the first rack 1131 needs to be connected to the first slider 1133 through the first connector 1135, and the second rack 1132 needs to be connected to the second slider 1134 through the second connector 1136, and the first rack 1131 and the second rack 1132 are located on the inner side of the third mounting plate 1113 (the side of the third mounting plate 1113 facing the mounting space), and the first slider 1133 and the second slider 1134 are located on the outer side of the third mounting plate 1113 (the side of the third mounting plate 1113 facing away from the mounting space), the first slider 1133 and the second slider 1134 are located on the outer side of the third mounting plate 1113 (the side of the third mounting plate 1113 facing away from the mounting space). To prevent the third mounting plate 1113 from obstructing the first connector 1135 and the second connector 1136, a strip hole 1114 can be provided on the third mounting plate 1113. The strip hole 1114 can extend along the direction of relative movement of the first rack 1131 and the second rack 1132. The first connector 1135 and the second connector 1136 are both inserted into the strip hole 1114, thereby ensuring the normal movement of the first connector 1135 and the second connector 1136.

[0037] like Figure 6 As shown, the transmission unit 113 also includes a first slide rail 1137, a second slide rail 1138, and a third slide rail 1139. The first slide rail 1137 and the second slide rail 1138 are both disposed on the second mounting plate 1112. The first rack 1131 is slidably connected to the first slide rail 1137, and the second rack 1132 is slidably connected to the second slide rail 1138. The first slide rail 1137 and the second slide rail 1138 can limit the relative movement direction of the first rack 1131 and the second rack 1132, thereby improving the stability of the operation of the first rack 1131 and the second rack 1132.

[0038] The third slide rail 1139 is connected to the surface of the mounting space opposite to the third mounting plate 1113, and the first slider 1133 and the second slider 1134 are slidably connected to the third slide rail 1139 respectively. Since the first slider 1133 and the second slider 1134 are set on the same slide rail, their running trajectories are consistent, which helps to improve the flatness of the first support arm 120 and the second support arm 130.

[0039] like Figures 10 to 14 As shown, the first support arm 120 and the second support arm 130 can have the same structure, and both include a support arm body 121, a connecting part 122 and a positioning part 123. The support arm body 121 is the main support component. The support arm body 121 can be connected to the drive mechanism 110 through the connecting part 122. In actual assembly, the connecting part 122 can be fixed to the first slider 1133 or the second slider 1134 of the drive mechanism 110 by means of bolt connection, riveting or other methods.

[0040] like Figure 11 As shown, the positioning part 123 is disposed on the support arm body 121. The positioning part 123 can be connected to the support arm body 121 by means of bolt connection, snap-fit, etc. Specifically, the positioning part 123 can be connected to the top surface of the support arm body 121. It should be noted that the cross-section of the support arm body 121 along the first direction 140 can be rectangular. Correspondingly, the support arm body 121 can include a top surface, a bottom surface and two side surfaces. The top surface and the bottom surface are connected by the two side surfaces respectively. The top surface of the support arm body 121 is actually the surface of the support arm body 121 used to support the support boat 200.

[0041] When the main body 121 of the support arm supports the support boat 200, it actually contacts the boat ear 210 through the positioning part 123. In order to prevent the boat ear 210 from slipping off the main body 121 of the support arm, the positioning part 123 can limit the boat ear 210 in at least two directions. The positioning part 123 may include positioning grooves, positioning protrusions, etc. In addition, the positioning part 123 can also adjust the position data of the support boat 200 by limiting the boat ear 210. The position data of the support boat 200 may include vertical height, horizontal position, etc. By adjusting and correcting the position data of the support boat 200, it is beneficial to improve the efficiency of subsequent processes.

[0042] like Figures 12 to 14As shown, the positioning part 123 may include a base plate 1231, a first guide plate 1232, and a second guide plate 1233. The base plate 1231 can be connected to the top surface of the support arm body 121 by means of bolts, snap-fit, etc. The first guide plate 1232 and the second guide plate 1233 are located on the side of the base plate 1231 facing away from the support arm body 121, and the first guide plate 1232 and the second guide plate 1233 are intersecting. The base plate 1231, the first guide plate 1232, and the second guide plate 1233 can be an integral structure, or they can be manufactured separately and then assembled together by means of welding, riveting, etc.

[0043] The base plate 1231, the first guide plate 1232, and the second guide plate 1233 form a limiting space for accommodating the boat lug 210. Within this limiting space, the base plate 1231 can support the boat lug 210 vertically, and the first guide plate 1232 and the second guide plate 1233 can limit the boat lug 210 from at least two directions. The number of limiting spaces can be one, two, or more, specifically selected according to the number of boat lugs 210 on the carrier boat 200. For example, as shown... Figures 12 to 14 As shown, two boat ears 210 are provided on one side of the support boat 200. Correspondingly, the bottom plate 1231, the first guide plate 1232 and the second guide plate 1233 can form two limiting spaces that cooperate with the boat ears 210 respectively. The area between the two limiting spaces is used to accommodate fasteners such as screws and rivets.

[0044] The support direction of the main body 121 of the support arm to the positioning part 123 is vertically upward, and the positioning part 123 is only subjected to the gravity applied by the support boat 200. The support boat 200 will not pull the positioning part 123 in other directions, thereby avoiding the problem of the positioning part 123 falling off or being damaged.

[0045] To ensure the boat ear 210 can slide smoothly along the first guide plate 1232 and the second guide plate 1233 onto the base plate 1231 for stable support, a guide surface 1234 can be provided on at least one of the first guide plate 1232 and the second guide plate 1233. By utilizing the guiding cooperation between the guide surface 1234 and the boat ear 210, the boat ear 210 can slide smoothly onto the base plate 1231. The guide surface 1234 adopts an inclined surface design, such as... Figure 12 As shown, the area near the top of the guide surface 1234 is thinner, which can free up a larger space to accommodate the boat ear 210. The guide surface 1234 gradually thickens from top to bottom, and the boat ear 210 can slide from the top of the guide surface 1234 along the slope to the bottom until it contacts the bottom surface.

[0046] Please refer to Figures 1 to 19This application embodiment also provides a semiconductor process apparatus. The disclosed semiconductor process apparatus may include a carrier boat 200 and the aforementioned boat support device 100. Carrier boat 200 has boat ears 210 on both opposite sides, and the boat support device 100 is used to support the boat ears 210.

[0047] As described above, the boat support device 100 disclosed in this application improves upon related technologies. The boat 200 can be stably placed on the first support arm 120 and the second support arm 130 solely by its own weight. Since the first support arm 120 and the second support arm 130 move relative to each other in a translational manner, the weight of the boat 200 is less likely to generate a component force in the direction of movement of the first support arm 120 and the second support arm 130. Therefore, the first support arm 120 and the second support arm 130 are less likely to open under stress, thereby enabling the boat 200 to be in a relatively stable cooperative state with the first support arm 120 and the second support arm 130, reducing the risk of the boat falling off the support arm, and thus improving the reliability of the boat support process.

[0048] like Figures 15 to 17 As shown, in order to improve production efficiency, there can be multiple carrier boats 200. The multiple carrier boats 200 can be arranged linearly along the first direction 140. The length extension direction of the first carrier arm 120 and the second carrier arm 130 is consistent with the arrangement direction of the multiple carrier boats 200.

[0049] During the operation of the carrier boat 200, it is necessary to use detection devices such as infrared sensors and image sensors to detect the operating parameters of the carrier boat 200. The operating parameters of the carrier boat 200 may include operating speed, quantity, etc. In order to facilitate the detection of the detection devices, a protruding detection mating part 220 can be provided on the top of the carrier boat 200. The detection mating part 220 can cooperate with the detection device.

[0050] To ensure uniform contact between the process gas and the silicon wafer within the carrier boat 200, a separator 230 can be provided in at least one of two adjacent carrier boats 200. For two adjacent carrier boats 200, the side of one boat is positioned opposite the side of the other. The separator 230 can protrude from the side of one carrier boat 200 and contact the side of the other carrier boat 200. The separator 230 and the carrier boat 200 can be an integral structure or fabricated separately and then assembled together by welding or other methods. The separator 230 creates a flow gap between the two adjacent carrier boats 200, allowing the process gas to enter the interior of the carrier boat 200 through this gap and make full contact with the silicon wafer.

[0051] like Figure 18 and Figure 19As shown, the semiconductor process equipment may also include a conveying device 300. The bottom of the carrier boat 200 is provided with a first positioning groove 240. When the carrier boat 200 is transported by the conveying device 300, the positioning structure on the conveying device 300 can be positioned and cooperated with the first positioning groove 240 at the bottom of the carrier boat 200. Thus, the carrier boat 200 can be adjusted and corrected by the conveying device 300 to avoid the carrier boat 200 from shifting its position during transportation.

[0052] Additionally, semiconductor process equipment may also include a lifting mechanism 400, a push-pull boat 500, and a reaction chamber 600. In a specific process, the boat support device 100 can be connected to the lifting mechanism 400. The carrier boat 200 is first transferred to the station of the lifting mechanism 400 via the conveying device 300. The lifting mechanism 400 drives the boat support device 100 to rise or fall, thereby driving the carrier boat 200 to rise or fall to a predetermined position. The lifting mechanism 400 can also provide a horizontal transfer function, enabling the carrier boat to... The carrier boat 200 moves to the station of the push-pull boat 500, which is positioned opposite the reaction chamber 600. The push-pull boat 500 is equipped with a paddle 501, which can be made of silicon carbide. The paddle 501 supports the carrier boat 200, and its horizontal movement pushes the carrier boat 200 into the reaction chamber 600. The carrier boat 200 has feet at its bottom, which, in conjunction with the inner wall of the reaction chamber 600, stably position the carrier boat 200 within the chamber. After the process is completed, the push-pull boat 500 uses the paddle 501 to remove the carrier boat 200 from the reaction chamber 600. Then, the lifting mechanism 400, the boat support device 100, and the conveying device 300 transport the carrier boat 200 to the next process step.

[0053] During the transport process of the carrier boat 200, in order to improve the stability of the cooperation between the carrier boat 200 and the paddle 501, a paddle engagement part 250 can be provided at the bottom of the carrier boat 200. The paddle engagement part 250 can overlap the paddle 501. Both ends of the paddle engagement part 250 extend away from the carrier boat 200, thereby forming a second positioning groove 251 on the paddle engagement part 250. When the carrier boat 200 is placed on the paddle 501, the second positioning groove 251 can accommodate the paddle 501 and limit the outer side of the paddle 201, so that the carrier boat 200 and the paddle 501 are not prone to positional displacement. In addition, the groove wall of the second positioning groove 251 can also be positioned and engaged with the paddle 501 to ensure that the carrier boat 200 can be placed in the predetermined position of the paddle 501.

[0054] The above embodiments of this application focus on describing the differences between the various embodiments. As long as the different technical features between the various embodiments are not contradictory, they can be combined to form more specific embodiments. For the sake of brevity, they will not be described in detail here.

[0055] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A boat support device for supporting a carrier boat (200), characterized in that, The boat support device (100) includes a drive mechanism (110), a first support arm (120), and a second support arm (130). The drive mechanism (110) is connected to the first support arm (120) and the second support arm (130) respectively, so as to drive the first support arm (120) and the second support arm (130) to move closer to or further away from each other by translation. When the first support arm (120) and the second support arm (130) are close to each other, the first support arm (120) and the second support arm (130) are respectively used to support the boat ears (210) on opposite sides of the support boat (200).

2. The boat support device according to claim 1, characterized in that, The drive mechanism (110) includes a base (111), a drive body (112), and a transmission part (113). The driving body (112) is disposed on the base (111), the transmission part (113) is slidably connected to the base (111), and the driving body (112) is connected to the first bearing arm (120) and the second bearing arm (130) respectively through the transmission part (113); When the output shaft of the drive body (112) rotates, the transmission part (113) slides relative to the base (111) to drive the first support arm (120) and the second support arm (130) to move relative to each other.

3. The boat support device according to claim 2, characterized in that, The transmission unit (113) includes a first rack (1131) and a second rack (1132), the first rack (1131) and the second rack (1132) are slidably connected to the base (111), the first bearing arm (120) is drivenly connected to the first rack (1131), and the second bearing arm (130) is drivenly connected to the second rack (1132). The output shaft of the drive body (112) is provided with a gear (1121), and the first rack (1131) and the second rack (1132) are located on opposite sides of the gear (1121) and mesh with the gear (1121) respectively. When the drive body (112) drives the gear (1121) to rotate through the output shaft, the gear (1121) drives the first rack (1131) and the second rack (1132) to move towards or away from each other, so as to drive the first support arm (120) and the second support arm (130) to move relative to each other respectively.

4. The boat support device according to claim 3, characterized in that, The transmission unit (113) further includes a first slider (1133), a second slider (1134), a first connector (1135), and a second connector (1136). The first slider (1133) and the second slider (1134) are slidably connected to the base (111). The first rack (1131) is connected to the first slider (1133) through the first connector (1135), and the second rack (1132) is connected to the second slider (1134) through the second connector (1136). The first support arm (120) is connected to the first slider (1133), and the second support arm (130) is connected to the second slider (1134). When the gear (1121) rotates, the first rack (1131) moves synchronously with the first slider (1133), and the second rack (1132) moves synchronously with the second slider (1134) to drive the first support arm (120) and the second support arm (130) to move relative to each other.

5. The boat support device according to claim 1, characterized in that, The drive mechanism (110) is provided at both ends of the first support arm (120) and the second support arm (130) along the first direction (140), wherein the first direction (140) is the length extension direction of the first support arm (120) or the second support arm (130).

6. The boat support device according to claim 4, characterized in that, The base (111) includes a first mounting plate (1111), a second mounting plate (1112), and a third mounting plate (1113). The first mounting plate (1111) and the second mounting plate (1112) are located on the same side of the third mounting plate (1113) and are connected by the third mounting plate (1113). The first mounting plate (1111), the second mounting plate (1112), and the third mounting plate (1113) form an installation space. The drive body (112) is connected to the first mounting plate (1111), and the output shaft extends into the mounting space. The first rack (1131) and the second rack (1132) are both located in the mounting space and are slidably connected to the second mounting plate (1112). The first slider (1133) and the second slider (1134) are slidably connected to the surface of the third mounting plate (1113) facing away from the mounting space, respectively; The third mounting plate (1113) is provided with a strip hole (1114), which extends along the direction of relative movement of the first rack (1131) and the second rack (1132), and the first connector (1135) and the second connector (1136) are both inserted into the strip hole (1114).

7. The boat support device according to claim 6, characterized in that, The transmission unit (113) further includes a first slide rail (1137), a second slide rail (1138) and a third slide rail (1139). The first slide rail (1137) and the second slide rail (1138) are both disposed on the second mounting plate (1112). The first rack (1131) is slidably connected to the first slide rail (1137), and the second rack (1132) is slidably connected to the second slide rail (1138). The third slide rail (1139) is connected to the surface of the third mounting plate (1113) facing away from the mounting space, and the first slider (1133) and the second slider (1134) are slidably connected to the third slide rail (1139).

8. The boat support device according to claim 1, characterized in that, The first support arm (120) and the second support arm (130) have the same structure, and both include a support arm body (121), a connecting part (122) and a positioning part (123). The support arm body (121) is connected to the drive mechanism (110) through the connecting part (122). The positioning part (123) is located on the top surface of the support arm body (121) and is used to limit the engagement with the boat ear (210).

9. The boat support device according to claim 8, characterized in that, The positioning part (123) includes a base plate (1231), a first guide plate (1232), and a second guide plate (1233). The base plate (1231) is connected to the top surface of the support arm body (121). The first guide plate (1232) and the second guide plate (1233) are disposed on the side of the base plate (1231) facing away from the support arm body (121), and the first guide plate (1232) and the second guide plate (1233) are intersecting. The base plate (1231), the first guide plate (1232), and the second guide plate (1233) form a limiting space for accommodating the boat ear (210). At least one of the first guide plate (1232) and the second guide plate (1233) is provided with a guide surface (1234), which is used to guide and cooperate with the boat ear (210).

10. A semiconductor process apparatus, characterized in that, It includes a carrier boat (200) and a boat support device (100) as described in any one of claims 1-9, wherein the carrier boat (200) is provided with boat ears (210) on both opposite sides, and the boat support device (100) is used to support the boat ears (210).

11. The semiconductor process equipment according to claim 10, characterized in that, The number of the carrier boats (200) is multiple, and the multiple carrier boats (200) are arranged linearly. The first carrier arm (120) and the second carrier arm (130) extend along the arrangement direction of the multiple carrier boats (200).

12. The semiconductor process equipment according to claim 11, characterized in that, The top of the carrier boat (200) is provided with a protruding detection mating part (220), which is used to cooperate with the detection device.

13. The semiconductor process equipment according to claim 11, characterized in that, At least one of the two adjacent carrier boats (200) is provided with a separator (230) which protrudes from the side of the carrier boat (200) and contacts the side of the other carrier boat (200) to form a flow gap between the two adjacent carrier boats (200).

14. The semiconductor process equipment according to claim 10, characterized in that, The semiconductor process equipment also includes a conveying device (300), and the bottom of the carrier boat (200) is provided with a first positioning groove (240), which is used to position and cooperate with the conveying device (300).

15. The semiconductor process equipment according to claim 10, characterized in that, The semiconductor process equipment also includes a push-pull boat (500) and a reaction chamber (600). The push-pull boat (500) is arranged opposite to the reaction chamber (600). The push-pull boat (500) includes a paddle (501). The paddle (501) is used to support the carrier boat (200) and drive the carrier boat (200) in and out of the reaction chamber (600). The bottom of the carrier boat (200) is provided with a paddle fitting part (250). The two ends of the paddle fitting part (250) extend away from the carrier boat (200) to form a second positioning groove (251) on the paddle fitting part (250). The second positioning groove (251) is used to accommodate the paddle (501) and is positioned and engaged with the paddle (501).

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