Automatic clamping part correction device for semiconductor test equipment

Abstract

The invention relates to the technical field of part correction devices, in particular to an automatic clamping part correction device for semiconductor test equipment, which comprises a clamping mechanism, a correction mechanism and a driving mechanism, the clamping mechanism is used for clamping a blank; the correcting mechanism comprises a correcting head, a connecting rod, a sliding rod, two protective covers and an opening control mechanism, the correcting head, the connecting rod and the sliding rod are sequentially and coaxially connected, the number of the protective covers is two, and the opening control mechanism is used for controlling the included angle between the two protective covers. The driving mechanism is used for driving the correcting head to move in the axis direction of the sliding rod. According to the invention, the double protective covers of the correction mechanism are matched with the opening control mechanism, the driving mechanism and the clamping mechanism, so that correction force transmission deviation caused by non-uniform storage resistance of the protective covers is eliminated.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of part correction devices, in particular to an automatic clamping part correction device for semiconductor testing equipment. BACKGROUND

[0002] In the production and manufacturing process of semiconductor processing machinery parts, the correction process is a core link to ensure the precision of the parts and the assembly adaptability. The existing semiconductor part correction device is usually equipped with a protective seat structure for bump protection of the precision correction head to avoid deformation or precision deviation of the correction head due to external force collision.

[0003] Patent No. CN114789334B discloses a part correction device for semiconductor processing machinery, and the working principle is that when the electric telescopic rod of the driving part is extended, the sliding rod B is driven to move forward, the protective seat contacts the blank when the sliding rod B moves forward by 5 cm, and the protective seat is retracted along the sliding rod C during the process of the sliding rod B continuing to move forward by 2 cm, thereby realizing the insertion correction of the correction head and the blank.

[0004] Although the above-mentioned scheme realizes the automatic storage and reset of the protective seat through the cooperation of the elastic member B and the sliding rod C, after the protective seat contacts the blank, the contraction resistance of the protective seat is transmitted to the flange B through the sliding rod C, thereby affecting the advancing precision of the sliding rod B, causing the movement trajectory of the correction head to deviate slightly, and at the same time, the contraction stroke of the protective seat is affected by factors such as the elastic force characteristics of the elastic member B and the surface flatness of the blank, and the contraction to place time is inconsistent, which causes the difference between the starting points of the correction head and the blank each time, and cannot guarantee the consistency of the correction of multiple batches of parts, in addition, the friction resistance between the protective seat and the sliding rod C during the contraction process also aggravates the vibration of the correction head, further reducing the correction precision. SUMMARY

[0005] In view of the above problems, an automatic clamping part correction device for semiconductor testing equipment is provided, which eliminates the correction force transmission deviation caused by the uneven storage resistance of the double protective cover of the correction mechanism and the opening control mechanism, and the correction starting point deviation problem caused by the uncertain contact position through the cooperation of the double protective cover of the correction mechanism and the opening control mechanism, the driving mechanism and the clamping mechanism.

[0006] To address the problems of existing technologies, this invention provides an automatic clamping component calibration device for semiconductor testing equipment, comprising a clamping mechanism, a calibration mechanism, and a driving mechanism. The clamping mechanism is disposed on one side of the calibration mechanism and is used to clamp a blank component. The calibration mechanism includes a calibration head, a connecting rod, a sliding rod, a protective cover, and an opening control mechanism. The calibration head, the connecting rod, and the sliding rod are coaxially connected in sequence, and the connecting rod and the sliding rod are connected via a first flange and a second flange. Two protective covers are provided, each disposed on one side of the connecting rod. One end of each protective cover is hinged to the first flange. The opening control mechanism is connected to the two protective covers and is used to control the included angle between the two protective covers. When the two protective covers are in a retracted state, the calibration head is in a retracted state; when the two protective covers are in an open state, the calibration head is in an exposed state. The driving mechanism is used to drive the calibration head to move along the axial direction of the sliding rod.

[0007] Preferably, the opening control mechanism includes an opening frame and two opening components; the two ends of the opening frame are symmetrically arranged on both sides of the connecting rod; the two opening components are respectively arranged at both ends of the opening frame, and the opening components are connected to two protective covers.

[0008] Preferably, the opening control mechanism further includes two synchronous movement components, which are respectively disposed at both ends of the opening frame. The synchronous movement components are used to control the opening frame and the connecting rod to move synchronously.

[0009] Preferably, the opening control mechanism further includes a second reset component, which is used to control the opening frame and the opening component and the synchronous movement component on it to reset.

[0010] Preferably, the opening assembly includes a fixing block and two connecting rods; the fixing block is connected to the opening frame, and the fixing block and the connecting rods are set at the same height; the two connecting rods are respectively disposed at the upper and lower ends of the fixing block, and the two ends of the connecting rods are respectively hinged to the fixing block and the protective cover.

[0011] Preferably, the correction mechanism further includes a fixed-axis sliding assembly, which is used to fix the sliding rod to move along its own axis.

[0012] Preferably, the clamping mechanism includes a clamping frame, two clamping blocks, and a clamping drive structure; the clamping frame is vertically arranged; the two clamping blocks are arranged vertically and parallel to each other; the clamping drive structure is connected to the drive mechanism, and the clamping drive structure is used to drive the two clamping blocks to clamp the blank.

[0013] Preferably, the clamping drive structure includes two drive components and a drive plate; the two drive components are respectively connected to the two clamping blocks; the middle part of the drive plate is connected to the sliding rod, and the two ends of the drive plate are respectively connected to the two drive components.

[0014] Preferably, the clamping drive structure further includes two buffer components, which are respectively disposed at both ends of the drive plate and are disposed between the drive components and the drive plate.

[0015] Preferably, the clamping mechanism further includes a first reset component, which is used to control the two clamping blocks to reset to a separated state.

[0016] The advantages of this invention application compared to the prior art are: 1. This invention application sets up a clamping mechanism, a correction mechanism, and a driving mechanism. Through the cooperation of the double protective cover of the correction mechanism with the opening control mechanism, the driving mechanism, and the clamping mechanism, the protective function of the protective cover is adapted to the correction operation of the correction head. That is, when the protective cover is not working, it closes and wraps around the correction head to prevent it from being bumped and damaged. During the correction operation, it automatically opens to avoid the correction path, does not contact the blank, and does not interfere with the movement of the correction head and the transmission of correction force. This eliminates the deviation in the transmission of correction force caused by uneven resistance of the protective cover, as well as the problem of the correction starting point offset caused by the uncertain contact position.

[0017] 2. This invention application provides an opening frame and two opening components. The two opening components at both ends of the opening frame operate synchronously, applying symmetrical opening driving forces to the protective covers on both sides. During the rotation of the protective covers, the forces on both sides are uniform, without any unilateral offset or jamming. The two opening components reset synchronously, applying symmetrical closing forces to the protective covers. Under the action of symmetrical pulling forces, the protective covers rotate synchronously in opposite directions around the hinge point, with balanced forces and no tilting. Through the design of the opening frame symmetrically supporting the two opening components, the protective covers are synchronously subjected to opening or closing forces of the same magnitude on both sides, thereby ensuring uniform forces on the protective covers during rotation and guaranteeing the stability of the opening and closing actions of the protective covers.

[0018] 3. This invention application provides two synchronous moving components. The first flange moves to a position that abuts against the limiting ring in the synchronous moving component. By abutting against the limiting ring, the first flange drives the second guide rod, the opening frame, and the opening component installed on the opening frame to move synchronously. After the protective cover opens, it can move synchronously with the correction head, avoiding the problem of relative displacement with the correction head caused by the fixed position of the protective cover after it opens. Attached Figure Description

[0019] Figure 1 This is a perspective view of a component calibration device for an automatically clamping semiconductor testing equipment according to the present invention.

[0020] Figure 2 This is a perspective cross-sectional view of a component calibration device for an automatically clamping semiconductor testing equipment according to this invention application.

[0021] Figure 3 This is a perspective view of the calibration head, connecting rod, sliding rod, protective cover, opening control mechanism, and fixed-axis sliding assembly in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0022] Figure 4 This is a perspective view of the calibration head, connecting rod, protective cover, opening frame, opening component, and synchronous movement component in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0023] Figure 5 This is a perspective view of the opening frame, first flange, opening assembly, and synchronous movement assembly in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0024] Figure 6 This is a perspective view of the opening frame, opening component, synchronous movement component, and second reset component in an automatic clamping semiconductor testing equipment component calibration device according to the present invention application.

[0025] Figure 7 This is a perspective view of the sliding rod and fixed-axis sliding assembly in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0026] Figure 8 This is a perspective view of the clamping frame, clamping block, clamping drive structure, first reset component, sliding rod, and fixed-axis sliding component in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0027] Figure 9 This is a perspective view of the clamping block, driving assembly, driving board, buffer assembly, and first reset assembly in an automatic clamping semiconductor testing equipment component calibration device according to the present invention.

[0028] Figure 10 This is a perspective view of the clamping block, driving assembly, driving board, and buffer assembly in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0029] Figure 11 This is a perspective view of the clamping block, the first guide rod, and the first spring in an automatic clamping semiconductor testing equipment component calibration device according to this invention application.

[0030] The diagram is labeled as follows: 1. Clamping mechanism; 11. Clamping frame; 111. Baffle; 12. Clamping block; 13. Clamping drive structure; 131. Drive assembly; 1311. Slide rod; 1312. Slider; 1313. Transmission rod; 132. Drive plate; 133. Buffer assembly; 1331. Sliding sleeve; 1332. First spring; 14. First reset assembly; 141. First guide rod; 142. Second spring; 2. Correction mechanism; 21. Correction head; 22. Connecting rod; 221. First flange; 23. Sliding rod; 231. Second flange; 24. Protective cover; 25. Opening control mechanism; 251. Opening frame; 252. Opening assembly; 2521. Fixing block; 2522. Connecting rod; 253. Synchronous movement assembly; 2531. Second guide rod; 2532. Limiting ring; 254. Second reset assembly; 2541. U Frame; 2542, Third guide rod; 2543, Third spring; 26, Fixed axis sliding assembly; 261, Regular prism; 262, Roller assembly; 3, Drive mechanism; 31, Electric telescopic rod; 32, Transmission plate. Detailed Implementation

[0031] To further understand the features, technical means, and specific objectives and functions achieved by this invention application, the invention application will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0032] Reference Figures 1 to 11 As shown: A component calibration device for an automatic clamping semiconductor testing equipment includes a clamping mechanism 1, a calibration mechanism 2, and a driving mechanism 3. The clamping mechanism 1 is disposed on one side of the calibration mechanism 2 and is used to clamp a blank component. The calibration mechanism 2 includes a calibration head 21, a connecting rod 22, a sliding rod 23, a protective cover 24, and an opening control mechanism 25. The calibration head 21, the connecting rod 22, and the sliding rod 23 are coaxially connected in sequence, and the connecting rod 22 and the sliding rod 23 are connected by a first flange 221 and a second flange 231. The protective cover 24... There are two covers 24, which are respectively disposed on both sides of the connecting rod 22. One end of the cover 24 is hinged to the first flange 221. The opening control mechanism 25 is connected to the two covers 24 and is used to control the included angle between the two covers 24. When the two covers 24 are in the closed state, the correction head 21 is in the retracted state. When the two covers 24 are in the open state, the correction head 21 is in the exposed state. The driving mechanism 3 is used to drive the correction head 21 to move along the axial direction of the sliding rod 23.

[0033] Specifically, the drive mechanism 3 includes an electric telescopic rod 31 and a transmission plate 32. The output end of the electric telescopic rod 31 is connected to the transmission plate 32, and the transmission plate 32 is connected to the end of the sliding rod 23.

[0034] When the drive mechanism 3 is not in operation, the two protective covers 24 are in a retracted state, completely enclosing the correction head 21 to prevent the correction head 21 from being damaged or losing accuracy due to impact. At this time, the correction head 21, connecting rod 22, and sliding rod 23 remain coaxial and stationary, and the clamping mechanism 1 is in the initial position to be clamped. The blank is placed in the clamping mechanism 1, and the clamping mechanism 1 completes the fixation of the blank. Subsequently, the drive mechanism 3 is activated, the electric telescopic rod 31 extends and pushes the transmission plate 32 to move, and the transmission plate 32 drives the sliding rod 23, connecting rod 22, and correction head 21 to move synchronously along the axis toward the clamped blank. In the initial stage of the correction head 21 moving toward the blank, the two protective covers 24 move synchronously with the correction head 21, and at the same time, the opening control mechanism 25 starts to work, controlling the two protective covers 24 to rotate around the hinge point with the first flange 221, and the included angle gradually increases. The protective covers 24 continue to rotate until they are nearly perpendicular to the connecting rod 22. At this time, the correction head 21 is completely exposed, and there is no protective structure to block the correction path. The drive mechanism 3 continues to push the sliding rod 23 forward, and the exposed correction head 21 contacts the blank and performs the correction operation. During this process, the protective cover 24 remains open, without contacting the blank or interfering with the movement of the correction head 21 or the transmission of the correction force. After the correction operation is completed, the electric telescopic rod 31 retracts, driving the transmission plate 32, sliding rod 23, connecting rod 22, and correction head 21 to reset in the opposite direction. In the initial stage of reset, the two protective covers 24 remain open, moving away from the blank synchronously with the correction head 21. When the correction head 21 is completely separated from the blank, the opening control mechanism 25 drives the two protective covers 24 to move closer to each other and rotate in the opposite direction around the hinge point until they return to the retracted state, completely enveloping the correction head 21 again. Through the design of the double protective cover 24 hinged in conjunction with the opening control mechanism 25, contact between the protective cover 24 and the blank is avoided, thereby eliminating the deviation in the transmission of correction force caused by uneven resistance of the protective cover 24 during retraction, as well as the problem of the correction starting point offset caused by the uncertain contact position.

[0035] Reference Figure 2 and Figure 4 As shown: The opening control mechanism 25 includes an opening frame 251 and two opening components 252; the two ends of the opening frame 251 are symmetrically arranged on both sides of the connecting rod 22; the two opening components 252 are respectively arranged at both ends of the opening frame 251, and the opening components 252 are connected to two protective covers 24.

[0036] After the blank is fixed by the clamping mechanism 1, the drive mechanism 3 is activated. The electric telescopic rod 31 pushes the transmission plate 32, which in turn moves the sliding rod 23, the connecting rod 22, and the straightening head 21 toward the blank. As the drive mechanism 3 advances, the opening control mechanism 25 is activated simultaneously. The two opening components 252 at both ends of the opening frame 251 move synchronously, applying symmetrical opening driving forces to the protective covers 24 on both sides. Under the force of the opening components 252, the two protective covers 24 rotate synchronously around the hinge point with the first flange 221, and the included angle gradually increases. Due to the symmetrical support of the opening frame 251 and the synchronous force application of the opening components 252, the protective covers 24 are subjected to uniform force on both sides during rotation, without any unilateral offset or jamming, until they rotate to a state that is nearly perpendicular to the connecting rod 22, and the straightening head 21 is completely exposed. When the alignment head 21 contacts the blank and performs the alignment operation, the opening component 252 remains in its current state. Through the stable support of the opening frame 251, the protective cover 24 maintains an open posture perpendicular to the connecting rod 22, without interfering with the movement trajectory and alignment force transmission of the alignment head 21 throughout the process. After alignment is completed, the electric telescopic rod 31 drives the alignment head 21 to reverse and reset. When the alignment head 21 is completely separated from the blank, the opening control mechanism 25 drives the two opening components 252 to reset synchronously, applying a symmetrical closing force to the protective cover 24. Under the action of the symmetrical force, the protective cover 24 rotates synchronously in the opposite direction around the hinge point, with balanced force and no tilting, eventually returning to a closed state that completely encloses the alignment head 21. The design of the opening frame 251 symmetrically supporting the two opening components 252 ensures that both sides of the protective cover 24 are simultaneously subjected to opening or closing forces of equal magnitude, thereby ensuring uniform force on the protective cover 24 during rotation and guaranteeing the smoothness of the opening and closing actions of the protective cover 24.

[0037] Reference Figure 4 and Figure 5 As shown: The opening control mechanism 25 further includes two synchronous movement components 253, which are respectively disposed at both ends of the opening frame 251. The synchronous movement components 253 are used to control the opening frame 251 and the connecting rod 22 to move synchronously.

[0038] Specifically, the synchronous moving component 253 includes a second guide rod 2531 and a limiting ring 2532. The second guide rod 2531 is parallel to the connecting rod 22, and both ends of the second guide rod 2531 are connected to the opening frame 251. The second guide rod 2531 passes through the first flange 221. The limiting ring 2532 is fixedly sleeved on the second guide rod 2531. When the first flange 221 moves to abut against the limiting ring 2532, the first flange 221 drives the opening frame 251 to move through the limiting ring 2532 and the second guide rod 2531.

[0039] As the connecting rod 22 and the straightening head 21 move toward the blank, the connecting rod 22 synchronously drives the first flange 221 to slide along the second guide rod 2531. During this process, the opening components 252 at both ends of the opening frame 251 move synchronously, applying symmetrical driving force to the protective covers 24 on both sides, causing the protective covers 24 to rotate and open synchronously around the hinge point with the first flange 221. Until the protective cover 24 rotates to a state that is nearly perpendicular to the connecting rod 22, the straightening head 21 is completely exposed. At this time, the first flange 221 just moves to the position where it abuts against the limiting ring 2532. The first flange 221, by abutting against the limiting ring 2532, drives the second guide rod 2531, the opening frame 251, and the opening components 252 mounted on the opening frame 251 to move synchronously. At this time, the protective cover 24 remains open and moves forward synchronously with the straightening head 21, without obstructing the straightening path or interfering with the blank or the straightening head 21, ensuring that the straightening head 21 is accurately aligned with the blank and performs the straightening operation. Through the linkage structure of the synchronous moving component 253, the protective cover 24 can move synchronously with the calibration head 21 after it is opened, thus avoiding the problem of relative displacement between the protective cover 24 and the calibration head 21 caused by the fixed position of the protective cover 24 after it is opened.

[0040] Reference Figure 6 As shown: The opening control mechanism 25 further includes a second reset component 254, which is used to control the opening frame 251 and the opening component 252 and the synchronous movement component 253 on it to reset.

[0041] Specifically, the second reset assembly 254 includes a U-shaped frame 2541 and a third guide rod 2542. The two ends of the U-shaped frame 2541 are covered outside the opening frame 251. There are multiple third guide rods 2542, which are divided into two groups and respectively set at both ends of the opening frame 251. The third guide rods 2542 are parallel to the connecting rod 22 and are slidably connected to the U-shaped frame 2541. A third spring 2543 is sleeved on the third guide rod 2542, and the two ends of the third spring 2543 are respectively connected to the ends of the U-shaped frame 2541 and the third guide rod 2542.

[0042] After the two protective covers 24 are fully opened, the first flange 221 abuts against the limiting ring 2532, causing the opening frame 251, the opening component 252, and the synchronous movement component 253 to slide synchronously along the third guide rod 2542. During this process, the opening frame 251 compresses the third spring 2543 on the third guide rod 2542, causing the third spring 2543 to gradually compress and store elastic potential energy, providing power for the subsequent reset action. When the correction head 21 contacts the blank and performs the correction operation, the third spring 2543 remains compressed, and the opening frame 251, the opening component 252, and the synchronous movement component 253 move stably and synchronously with the correction head 21. The protective covers 24 maintain an open posture perpendicular to the connecting rod 22, without interfering with the correction operation. After the correction is completed, the electric telescopic rod 31 drives the correction head 21 to reset in the opposite direction. The third spring 2543 releases its elastic potential energy first, pushing the opening frame 251, the opening component 252, and the synchronous movement component 253 to retreat synchronously with the correction head 21. When the opening frame 251 moves to the end position of the third guide rod 2542, the opening frame 251 stops moving, and the alignment head 21 continues to move back to its original position. The first flange 221 separates from the limiting ring 2532 and moves with the alignment head 21. Subsequently, the opening assembly 252 drives the two protective covers 24 to move closer to each other and re-wrap the alignment head 21. By utilizing the elastic potential energy of the third spring 2543 to drive the opening frame 251 and its components to reset, the reset action and the linkage of the alignment head 21 can be achieved without an additional power source.

[0043] Reference Figure 4 and Figure 6 As shown: The opening assembly 252 includes a fixing block 2521 and two connecting rods 2522; the fixing block 2521 is connected to the opening frame 251, and the fixing block 2521 is set at the same height as the connecting rod 22; the two connecting rods 2522 are respectively set at the upper and lower ends of the fixing block 2521, and the two ends of the connecting rods 2522 are respectively hinged to the fixing block 2521 and the protective cover 24.

[0044] Two connecting rods 2522 and two protective covers 24 together form a parallelogram linkage structure. After the blank is fixed by the clamping mechanism 1, the drive mechanism 3 is activated, and the electric telescopic rod 31 pushes the transmission plate 32 to move the sliding rod 23, the connecting rod 22, and the correction head 21 toward the blank. During this process, the fixing block 2521 remains stationary with the opening frame 251, and the connecting rod 22 drives the first flange 221 to slide along the second guide rod 2531. Through the linkage of the parallelogram structure, the two connecting rods 2522 synchronously push the two protective covers 24 outward, so that the protective covers 24 rotate synchronously around the hinge point with the first flange 221. Due to the constraint of the parallelogram structure, the rotation angle of the two protective covers 24 remains consistent until they rotate to a state that is close to perpendicular to the connecting rod 22, at which point the correction head 21 is completely exposed, and the first flange 221 just abuts against the limiting ring 2532. The drive mechanism 3 continues to advance, and the first flange 221 drives the opening frame 251, the fixing block 2521, and the connecting rod 2522 to move synchronously through the limiting ring 2532. The parallelogram structure maintains its current shape, keeping the protective cover 24 in an open position and moving forward synchronously with the correction head 21. After correction, the electric telescopic rod 31 drives the correction head 21 to reset in the opposite direction. Through the linkage of the parallelogram structure, the two protective covers 24 are pulled to rotate synchronously in the opposite direction, finally returning to the closed state that completely covers the correction head 21. The two connecting rods 2522 and the two protective covers 24 form a parallelogram linkage structure, ensuring that the two protective covers 24 maintain synchronous movement throughout the opening and closing process, effectively avoiding the problem of one protective cover 24 moving excessively and coming into contact with the correction head 21.

[0045] Reference Figure 2 and Figure 7 As shown: The correction mechanism 2 further includes a fixed-axis sliding assembly 26, which is used to fix the sliding rod 23 to move along its own axis.

[0046] Specifically, the fixed-axis sliding assembly 26 includes a regular prism 261 and a plurality of roller groups 262. The regular prism 261 is coaxially arranged with the sliding rod 23, and the plurality of roller groups 262 are arranged at equal angles around the axis of the regular prism 261 inside the regular prism 261, and the plurality of roller groups 262 abut against the sliding rod 23.

[0047] When the sliding rod 23 moves, it rolls relative to the multiple roller sets 262 within the regular prism 261. The roller sets 262 replace sliding friction with rolling friction, significantly reducing motion resistance and preventing diameter changes in the sliding rod 23 due to frictional wear. During this process, the equally angled roller sets 262 exert a uniform circumferential constraint force on the sliding rod 23, strictly limiting its direction of movement and ensuring that the sliding rod 23 always translates along its own axis without radial offset or torsion. This, in turn, keeps the connecting rod 22 and the correction head 21 in the same axial direction. The fixed-axis sliding assembly 26, formed by the regular prism 261 and the equally angled roller sets 262, can precisely fix the direction of movement of the sliding rod 23, forcing it to translate along its own axis. This effectively prevents radial offset and torsion problems, ensuring that the correction head 21, coaxially connected to the sliding rod 23, maintains its preset axial direction during advancement and resetting, achieving precise docking with the blank.

[0048] Reference Figure 2 and Figure 8 As shown: The clamping mechanism 1 includes a clamping frame 11, two clamping blocks 12 and a clamping drive structure 13; the clamping frame 11 is vertically arranged and a baffle 111 is provided on one side of the clamping frame 11; the two clamping blocks 12 are arranged vertically and parallel to each other; the clamping drive structure 13 is connected to the drive mechanism 3 and is used to drive the two clamping blocks 12 to clamp the blank.

[0049] The blank is placed between two clamping blocks 12 within the clamping frame 11, with one end of the blank abutting against the baffle 111 of the clamping frame 11, achieving initial axial positioning. After the drive mechanism 3 is activated, it simultaneously drives the correction mechanism 2 toward the blank while simultaneously driving the two clamping drive structures 13. The two clamping drive structures 13 apply synchronous driving forces to their corresponding upper and lower clamping blocks 12, pushing the two clamping blocks 12 closer together. As the two clamping blocks 12 continue to approach each other until they are tightly fitted against the outer wall of the blank, a stable clamping of the blank is achieved. At this point, under the axial positioning of the baffle 111 and the radially symmetrical clamping action of the clamping blocks 12, the axial position of the blank is precisely fixed, maintaining collinearity with the axis of the correction head 21 of the correction mechanism 2. Subsequently, when the correction head 21 advances, it can precisely align with the blank, smoothly performing the correction operation; during the correction process, the clamping blocks 12 maintain stable clamping, preventing the blank from shifting and affecting the correction accuracy. By using the clamping blocks 12 arranged in parallel and the synchronous clamping drive structure 13, along with the positioning function of the baffle 111 of the clamping frame 11, the blank is subjected to symmetrical and balanced clamping force when it is clamped, which effectively avoids tilting or offset during the clamping process and ensures that the axis of the blank is collinear with the axis of the correction head 21 after clamping.

[0050] Reference Figure 8 ,Figure 9 and Figure 10 As shown: The clamping drive structure 13 includes two drive components 131 and a drive plate 132; the two drive components 131 are respectively connected to the two clamping blocks 12; the middle part of the drive plate 132 is connected to the sliding rod 23, and the two ends of the drive plate 132 are respectively connected to the two drive components 131.

[0051] Specifically, the drive assembly 131 includes a slide rod 1311, a slider 1312, and a transmission rod 1313. The slide rod 1311 is parallel to the connecting rod 22. The slider 1312 is slidably mounted on the slide rod 1311. The two ends of the transmission rod 1313 are respectively hinged to the slider 1312 and the clamping block 12.

[0052] After the blank is placed in the clamping frame 11 and abuts against the baffle 111, the drive mechanism 3 is activated. The electric telescopic rod 31 pushes the transmission plate 32 to move the sliding rod 23 toward the blank. The drive plate 132, connected to the sliding rod 23, moves horizontally forward synchronously with the sliding rod 23. Simultaneously, a thrust is applied to both ends of the drive plate 132, causing the sliders 1312 in the two drive components 131 to slide horizontally away from the drive plate 132 along their respective sliding rods 1311. The sliding rods 1311 provide stable guidance for the sliders 1312, ensuring accurate movement trajectory. When the sliders 1312 move horizontally, the horizontal motion is converted into vertical motion of the clamping blocks 12 via the hinged transmission rods 1313. Because the two drive components 131 are symmetrically arranged, and the drive plate 132 synchronously drives the two sliders 1312, the movement trajectories and strokes of the two transmission rods 1313 are completely consistent, thereby causing the upper and lower clamping blocks 12 to synchronously approach each other in the vertical direction. During this process, the hinge structure of the transmission rod 1313 can adaptively adjust its angle to ensure smooth power transmission and stable, uninterrupted movement of the clamping block 12. Through the symmetrical linkage structure of the drive plate 132 and the dual drive assembly 131, and with the guidance of the slide rod 1311 and the coordination of the motion conversion of the transmission rod 1313, the synchronous movement of the two clamping blocks 12 under the drive of a single power source is achieved.

[0053] Reference Figure 9 and Figure 10 As shown: The clamping drive structure 13 further includes two buffer components 133, which are respectively disposed at both ends of the drive plate 132, and the buffer components 133 are disposed between the drive component 131 and the drive plate 132.

[0054] Specifically, the buffer assembly 133 includes a sliding sleeve 1331 and a first spring 1332. The sliding sleeve 1331 is fixed to the end of the drive plate 132 and is slidably disposed on the slide rod 1311. The first spring 1332 is sleeved on the slide rod 1311, and the two ends of the first spring 1332 abut against the sliding sleeve 1331 and the slider 1312 respectively.

[0055] After the blank is placed in the clamping frame 11 and abuts against the baffle 111, the drive mechanism 3 is activated, and the sliding rod 23 drives the drive plate 132 to move horizontally toward the blank in sync. The drive plate 132 pushes the first spring 1332 through the sliding sleeves 1331 at both ends, and the first spring 1332 then transmits the driving force to the slider 1312, causing the slider 1312 to slide along the sliding rod 1311 away from the drive plate 132. When the two clamping blocks 12 are tightly abutted against the outer wall of the blank, completing the initial clamping of the blank, the electric telescopic rod 31 continues to push the correction head 21 toward the blank, and the drive plate 132 moves forward in sync with the sliding rod 23. At this time, the slider 1312 is restricted from moving further by the reaction force of the blank, and the sliding sleeve 1331 continues to slide along the sliding rod 1311 toward the slider 1312, squeezing the first spring 1332 to gradually compress it and store elastic potential energy. The elastic force of the first spring 1332 continuously acts on the slider 1312, providing a constant clamping force to the clamping block 12, ensuring that the blank is firmly clamped, while buffering the continuous pushing force of the drive plate 132 to prevent excessive clamping force from damaging the blank. After the correction is completed, the sliding rod 23 drives the drive plate 132 to reset in the opposite direction, and the sliding sleeve 1331 moves backward with the drive plate 132. The first spring 1332 gradually releases its elastic potential energy, continuously applying a pushing force towards the blank to the slider 1312. During this process, the slider 1312 always remains under force, and the clamping block 12 continues to firmly clamp the blank until the correction head 21 is completely separated from the blank. After the correction head 21 returns to its initial position, the drive plate 132 continues to move backward, pulling the sliding sleeve 1331 further away from the slider 1312. The slider 1312 resets with the sliding sleeve 1331, and the transmission rod 1313 drives the clamping blocks 12 to move away from each other, releasing the clamping. By using the sliding sleeve 1331 of the buffer assembly 133 in conjunction with the first spring 1332, the flexible transmission of driving force is achieved, avoiding the clamping impact caused by rigid drive. At the same time, the clamping force can be maintained by the elastic potential energy of the spring during the reset phase of the correction head 21, ensuring that the blank is always in a stable clamping state before the correction head 21 separates from the blank.

[0056] Reference Figure 8 and Figure 11 As shown: The clamping mechanism 1 further includes a first reset component 14, which is used to control the two clamping blocks 12 to reset to the separated state.

[0057] Specifically, the first reset assembly 14 includes a first guide rod 141 and a second spring 142. The first guide rod 141 is vertically disposed in the clamping frame 11, and both clamping blocks 12 are slidably connected to the first guide rod 141. The second spring 142 is sleeved on the first guide rod 141, and both ends of the second spring 142 abut against the two clamping blocks 12 respectively.

[0058] Initially, the second spring 142 is in a naturally extended state with no elastic deformation. The two clamping blocks 12 remain far apart under the spring tension, leaving sufficient space for the blank. After the blank is placed in the clamping frame 11 and initially positioned, the drive mechanism 3 is activated, and the clamping drive structure 13 drives the two clamping blocks 12 to move closer to each other synchronously along the first guide rod 141. During this process, the two clamping blocks 12 compress the second spring 142 in the middle, causing the second spring 142 to gradually compress and store elastic potential energy. The first guide rod 141 provides vertical guidance for the clamping blocks 12, ensuring accurate movement trajectory and avoiding deviation. At the same time, the reaction force of the second spring 142 can buffer the approach speed of the clamping blocks 12, preventing rigid clamping from damaging the blank. When the clamping blocks 12 are tightly attached to the blank and a stable clamping is completed, the second spring 142 remains compressed. After the correction is completed, the drive mechanism 3 drives the clamping drive structure 13 to reset, releasing the driving force on the clamping blocks 12. At this time, the second spring 142 releases its stored elastic potential energy, applying a symmetrical pushing force to the two clamping blocks 12, pushing them to move away from each other synchronously along the first guide rod 141. Through the combination of the first guide rod 141 guiding and the second spring 142 elastically resetting, the synchronous resetting and separation of the two clamping blocks 12 can be achieved without an additional power source.

[0059] The above embodiments only illustrate one or more implementation methods of this invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this invention, and these all fall within the protection scope of this invention. Therefore, the protection scope of this invention should be determined by the appended claims.

Claims

1. A component calibration device for an automatically clamped semiconductor testing equipment, characterized in that, It includes a clamping mechanism (1), a correction mechanism (2), and a driving mechanism (3); The clamping mechanism (1) is disposed on one side of the correction mechanism (2), and the clamping mechanism (1) is used to clamp the blank; The correction mechanism (2) includes a correction head (21), a connecting rod (22), a sliding rod (23), a protective cover (24), and an opening control mechanism (25). The correction head (21), the connecting rod (22), and the sliding rod (23) are coaxially connected in sequence, and the connecting rod (22) and the sliding rod (23) are connected by a first flange (221) and a second flange (231). There are two protective covers (24), which are respectively disposed on both sides of the connecting rod (22). One end of the protective cover (24) is hinged to the first flange (221). The opening control mechanism (25) is connected to the two protective covers (24) and is used to control the included angle between the two protective covers (24). When the two protective covers (24) are in the retracted state, the correction head (21) is in the retracted state. When the two protective covers (24) are in the open state, the correction head (21) is in the exposed state. The drive mechanism (3) is used to drive the correction head (21) to move along the axis of the sliding rod (23).

2. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 1, characterized in that, The opening control mechanism (25) includes an opening frame (251) and two opening components (252); The two ends of the opening frame (251) are symmetrically arranged on both sides of the connecting rod (22); Two opening components (252) are respectively disposed at both ends of the opening frame (251), and the opening components (252) are connected to two protective covers (24).

3. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 2, characterized in that, The opening control mechanism (25) further includes two synchronous moving components (253), which are respectively disposed at both ends of the opening frame (251). The synchronous moving components (253) are used to control the opening frame (251) and the connecting rod (22) to move synchronously.

4. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 3, characterized in that, The opening control mechanism (25) further includes a second reset component (254), which is used to control the opening frame (251) and the opening component (252) and the synchronous movement component (253) thereon to reset.

5. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 2, characterized in that, The opening assembly (252) includes a fixing block (2521) and two connecting rods (2522); The fixing block (2521) is connected to the opening frame (251), and the fixing block (2521) and the connecting rod (22) are set at the same height; The two connecting rods (2522) are respectively disposed at the upper and lower ends of the fixed block (2521), and the two ends of the connecting rods (2522) are respectively hinged to the fixed block (2521) and the protective cover (24).

6. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 1, characterized in that, The correction mechanism (2) further includes a fixed-axis sliding assembly (26), which is used to fix the sliding rod (23) to move along its own axis.

7. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 1, characterized in that, The clamping mechanism (1) includes a clamping frame (11), two clamping blocks (12) and a clamping drive structure (13). The clamping frame (11) is set vertically; The two clamping blocks (12) are arranged vertically and in parallel. The clamping drive structure (13) is connected to the drive mechanism (3), and the clamping drive structure (13) is used to drive the two clamping blocks (12) to clamp the blank.

8. The component calibration device for an automatically clamped semiconductor testing equipment according to claim 7, characterized in that, The clamping drive structure (13) includes two drive components (131) and a drive plate (132). The two drive components (131) are respectively connected to the two clamping blocks (12); The middle part of the drive plate (132) is connected to the sliding rod (23), and the two ends of the drive plate (132) are respectively connected to the two drive components (131).

9. A component calibration device for an automatically clamped semiconductor testing equipment according to claim 7, characterized in that, The clamping drive structure (13) further includes two buffer components (133), which are respectively disposed at both ends of the drive plate (132) and are disposed between the drive component (131) and the drive plate (132).

10. A component calibration device for an automatically clamped semiconductor testing equipment according to claim 7, characterized in that, The clamping mechanism (1) further includes a first reset component (14), which is used to control the two clamping blocks (12) to reset to the separated state.

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