MEMS (Micro Electro Mechanical System) frequency modulation single-shaft gyroscope

Abstract

The invention relates to the technical field of gyroscopes, and discloses an MEMS frequency modulation single-axis gyroscope which comprises a driving mass block and a detection mass block, and further comprises at least one electrostatic frequency modulation assembly, each electrostatic frequency modulation assembly comprises an electrostatic abutting piece, an electrostatic movable pole block and an electrostatic fixed pole plate, the static abutting piece is connected with the driving mass block or the detection mass block, the static movable pole block and the static fixed pole plate are arranged at an interval, and the static fixed pole plate is configured to be selectively electrified so as to change the static attraction force between the static movable pole block and the static fixed pole plate to enable the static movable pole block to abut against the static abutting piece. Therefore, the driving frequency of the MEMS frequency modulation single-axis gyroscope in the driving direction or the detection frequency of the MEMS frequency modulation single-axis gyroscope in the detection direction is changed. According to the MEMS frequency modulation single-axis gyroscope disclosed by the invention, the effect that the working frequency of the gyroscope chip is adjustable is realized, and the problems of poor anti-interference performance and weak safety caused by fixed frequency of the existing gyroscope chip are solved.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a MEMS frequency-modulated single-axis gyroscope. Background Technology

[0002] As a core inertial sensor, the reliability of gyroscope chips directly impacts the safety of critical systems such as navigation and stability control. The operating principle of mainstream micromechanical gyroscope chips is based on the resonant effect of mechanical structures like tuning forks or vibrating beams, with their operating frequency fixed after manufacturing. While this fixed operating frequency simplifies circuit design and calibration processes, it also means that the chip's operating parameters are public and unchangeable. From a security perspective, this characteristic makes the fixed frequency itself a predictable and exploitable attack surface, posing a serious vulnerability. In complex electromagnetic environments or under targeted attacks, attackers can easily detect and lock onto this single operating point through frequency scanning. Subsequent injection of high-intensity interference at the same frequency will force the resonant structure to overload, leading to anything from permanent performance drift to irreversible damage and functional failure of the mechanical structure. For high-value products such as drones and precision industrial equipment, such physical layer attacks mean direct hardware damage and significant economic losses, and may trigger secondary risks such as system shutdowns. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a MEMS frequency-modulated single-axis gyroscope that achieves adjustable operating frequency of the gyroscope chip, thus solving the problems of poor anti-interference performance and weak security caused by the fixed frequency of existing gyroscope chips.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A MEMS frequency-modulated single-axis gyroscope includes a driving mass block and a detection mass block. The MEMS frequency-modulated single-axis gyroscope further includes at least one electrostatic frequency modulation component. Each electrostatic frequency modulation component includes an electrostatic contact member, an electrostatic movable electrode block, and an electrostatic fixed electrode plate. The electrostatic contact member is connected to either the driving mass block or the detection mass block. The electrostatic movable electrode block and the electrostatic fixed electrode plate are spaced apart. The electrostatic fixed electrode plate is configured to be optionally energized to change the electrostatic attraction between the electrostatic movable electrode block and the electrostatic fixed electrode plate, causing the electrostatic movable electrode block to contact the electrostatic contact member, thereby changing the driving frequency of the MEMS frequency-modulated single-axis gyroscope in the driving direction or the detection frequency in the detection direction.

[0005] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the electrostatic frequency modulation assembly includes two electrostatic contact members, one electrostatic fixed electrode plate, and one electrostatic movable electrode block. The electrostatic fixed electrode plate is located between the two electrostatic contact members and directly opposite the middle of the electrostatic movable electrode block. The two electrostatic contact members correspond to the two ends of the electrostatic movable electrode block and are symmetrically distributed relative to the electrostatic fixed electrode plate. When the electrostatic fixed electrode plate is in a de-energized state, the distance between the two electrostatic contact members and the electrostatic movable electrode block is equal.

[0006] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the electrostatic frequency modulation assembly includes two electrostatic fixed plates, one electrostatic contact member, and one electrostatic movable plate. The electrostatic contact member is directly opposite the middle of the electrostatic movable plate. The two electrostatic fixed plates correspond to the two ends of the electrostatic movable plate and are symmetrically distributed relative to the electrostatic contact member. The two electrostatic fixed plates are configured such that when energized, their electrostatic attraction is equal to that of the electrostatic movable plate.

[0007] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the electrostatic frequency modulation component further includes: The first anchor point for frequency modulation is fixed on the substrate; A frequency-modulated elastic beam, one end of which is connected to the first frequency-modulated anchor point, and the other end of which is connected to the electrostatic movable electrode block, wherein the frequency-modulated elastic beam can deform along the movement direction of the electrostatic movable electrode block; The second frequency-modulated anchor point is fixed on the substrate, and the electrostatic abutment is fixed on the second frequency-modulated anchor point.

[0008] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the electrostatic contact element includes: An electrostatic connection straight beam extends along the movement direction of the electrostatic movable electrode block and one end of it is connected to the driving mass block or the detection mass block. An electrostatic abutment plate is connected to the other end of the electrostatic connection straight beam, and the electrostatic abutment plate is fixed on the two frequency modulation second anchor points.

[0009] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the number of electrostatic frequency-modulated components is at least two and they are divided into: An electrostatic drive frequency modulation assembly, wherein the electrostatic abutment of the electrostatic drive frequency modulation assembly is an electrostatic drive connecting beam, the electrostatic drive connecting beam is connected to the drive mass block, the electrostatic movable electrode block is an electrostatic drive movable electrode plate, the electrostatic fixed electrode plate is an electrostatic drive fixed electrode plate, the drive direction is a second direction, and the electrostatic drive frequency modulation assembly is provided at both ends of the drive mass block along the first direction. An electrostatic detection frequency modulation assembly is provided, wherein the electrostatic contact member of the electrostatic detection frequency modulation assembly is an electrostatic detection connecting beam, the electrostatic detection connecting beam is connected to the detection mass block, the electrostatic movable electrode block is an electrostatic detection movable electrode plate, the electrostatic fixed electrode plate is an electrostatic detection fixed electrode plate, the detection direction is a first direction, and the electrostatic detection frequency modulation assembly is provided at both ends of the detection mass block along the second direction.

[0010] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the MEMS frequency-modulated single-axis gyroscope further includes two decoupling mass blocks, two detection mass blocks, and one driving mass block. The two decoupling mass blocks are elastically connected to the driving mass block along a first direction and are located on both sides of the driving mass block along a second direction. The two detection mass blocks are located on both sides of the driving mass block along the first direction.

[0011] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the number of electrostatic drive frequency modulation components is two, and the two electrostatic drive frequency modulation components are located at both ends of the drive mass block along the first direction; The number of electrostatic detection frequency tuning components is four, and each detection mass block corresponds to two electrostatic detection frequency tuning components, with the two electrostatic detection frequency tuning components located at both ends of the detection mass block along the second direction.

[0012] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the MEMS frequency-modulated single-axis gyroscope further includes: The decoupling beam is driven to deform along the second direction, with one end connected to the decoupling mass block and the other end connected to the detection mass block. The detection decoupling beam is capable of deforming along the first direction, with one end connected to the decoupling mass block and the other end connected to the driving mass block.

[0013] As a preferred embodiment of a MEMS frequency-modulated single-axis gyroscope, the MEMS frequency-modulated single-axis gyroscope further includes: A driving electrode is disposed on the driving mass block and configured to drive the driving mass block to move along a second direction; A drive reading electrode is disposed on the drive mass block and configured to read the real-time displacement of the drive mass block; The detection electrode is disposed on the detection mass block and configured to detect the angular velocity in a third direction.

[0014] The beneficial effects of this invention are as follows: The MEMS frequency-modulated single-axis gyroscope disclosed in this invention generates an electrostatic attraction between the electrostatic movable electrode and the electrostatic fixed electrode when a voltage is applied to the electrostatic fixed electrode. This causes the electrostatic movable electrode to move toward and abut against an electrostatic contactor. This contact can change the driving frequency of the driving mass block connected to the electrostatic contactor in the driving direction, or change the detection frequency of the detection mass block connected to the electrostatic contactor in the detection direction. This allows the operating frequency of the MEMS frequency-modulated single-axis gyroscope to be actively adjusted, and the operating frequency is related to the magnitude of the voltage applied to the electrostatic fixed electrode, thereby achieving continuous and controllable change of the operating frequency. This MEMS frequency-modulated single-axis gyroscope with a variable operating frequency can effectively avoid resonance interference or malicious attacks from fixed operating frequencies, significantly improving its anti-interference capability and safety in complex electromagnetic environments. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a MEMS frequency-modulated single-axis gyroscope provided in a specific embodiment of the present invention; Figure 2 This is a schematic diagram of the electrostatic frequency modulation component of a MEMS frequency-modulated single-axis gyroscope provided in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of a MEMS frequency-modulated single-axis gyroscope in a driving state, provided in a specific embodiment of the present invention; Figure 4 This is a schematic diagram of a MEMS frequency-modulated single-axis gyroscope in a detection state, provided in a specific embodiment of the present invention; Figure 5 This is a schematic diagram of the electrostatic frequency modulation component of a MEMS frequency-modulated single-axis gyroscope provided in other embodiments of the present invention.

[0017] In the picture: 11. Drive mass block; 12. Drive electrode; 13. Drive read electrode; 21. Detection mass block; 22. Detection electrode; 3. Electrostatic frequency modulation assembly; 301. Electrostatic drive frequency modulation assembly; 302. Electrostatic detection frequency modulation assembly; 31. Electrostatic abutment component; 311. Electrostatic connection straight beam; 312. Electrostatic abutment plate; 32. Electrostatic movable electrode block; 33. Electrostatic fixed electrode plate; 34. First frequency modulation anchor point; 35. Frequency modulation elastic beam; 36. Second frequency modulation anchor point; 41. Decoupling mass block; 42. Driving the decoupling beam; 43. Detecting the decoupling beam. Detailed Implementation

[0018] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0021] This embodiment provides a MEMS frequency-modulated single-axis gyroscope, such as Figure 1 and Figure 2 As shown, the device includes a drive mass block 11, a detection mass block 21, and six electrostatic frequency tuning components 3. Each electrostatic frequency tuning component 3 includes an electrostatic contact member 31, an electrostatic movable electrode block 32, and an electrostatic fixed electrode plate 33. The electrostatic contact member 31 is connected to either the drive mass block 11 or the detection mass block 21. The electrostatic movable electrode block 32 and the electrostatic fixed electrode plate 33 are spaced apart. The electrostatic fixed electrode plate 33 is configured to be optionally energized to change the electrostatic attraction between the electrostatic movable electrode block 32 and the electrostatic fixed electrode plate 33, causing the electrostatic movable electrode block 32 to contact the electrostatic contact member 31, thereby changing the drive frequency of the MEMS frequency-tuned single-axis gyroscope in the drive direction or the detection frequency in the detection direction.

[0022] It should be noted that, as Figure 1As shown, in this embodiment, two of the six electrostatic frequency tuning components 3 are connected to the driving mass block 11, and four are connected to the detection mass block 21. The electrostatic frequency tuning components 3 connected to the driving mass block 11 can change the driving frequency of the MEMS frequency-tuned single-axis gyroscope in the driving direction, while the electrostatic frequency tuning components 3 connected to the detection mass block 21 can change the detection frequency of the MEMS frequency-tuned single-axis gyroscope in the detection direction. In other embodiments of the present invention, the number of electrostatic frequency tuning components 3 can be two, four, or more than six, depending on actual needs. The electrostatic contact 31 of the electrostatic frequency tuning component 3 is only connected to the driving mass block 11, in which case only the driving frequency in the driving direction changes; or, the electrostatic contact 31 of the electrostatic frequency tuning component 3 is only connected to the detection mass block 21, in which case only the detection frequency in the detection direction changes; or, some of the electrostatic contact 31 of the electrostatic frequency tuning components 3 are connected to the driving mass block 11, while the electrostatic contact 31 of the remaining electrostatic frequency tuning components 3 are connected to the detection mass block 21, in which case both the driving frequency and the detection frequency change, depending on actual needs.

[0023] Specifically, the distance between the movable electrostatic electrode 32 and the fixed electrostatic electrode 33 is greater than the distance between the movable electrostatic electrode 32 and the electrostatic contact member 31. When a voltage is applied to the fixed electrostatic electrode 33, an electrostatic attraction is generated between the movable electrostatic electrode 32 and the fixed electrostatic electrode 33. Under the action of this electrostatic attraction, the movable electrostatic electrode 32 is displaced. Once the electrostatic attraction is large, the movable electrostatic electrode 32 can come into contact with the electrostatic contact member 31. The contact end face of the electrostatic contact member 31 is squeezed and pressure is generated. This pressure changes the stiffness of the electrostatic contact member 31. At this time, if the driving mass block 11 is connected to the electrostatic contact member 31, the driving frequency of the MEMS frequency-modulated single-axis gyroscope in the driving direction can be changed. If the detection mass block 21 is connected to the electrostatic contact member 31, the detection frequency of the MEMS frequency-modulated single-axis gyroscope in the detection direction can be changed. Ultimately, the operating frequency of the MEMS frequency-modulated single-axis gyroscope is changed, achieving the effect of frequency modulation. It should be noted that when the electrostatic fixed electrode plate 33 is energized, although electrostatic attraction is generated between the electrostatic movable electrode block 32 and the electrostatic fixed electrode plate 33, the two do not come into contact. Only the electrostatic movable electrode block 32 comes into contact with the electrostatic contacting member 31.

[0024] The MEMS frequency-modulated single-axis gyroscope provided in this embodiment generates an electrostatic attraction between the electrostatic movable electrode 32 and the electrostatic fixed electrode 33 when a voltage is applied to the electrostatic fixed electrode 33. This causes the electrostatic movable electrode 32 to move toward and abut against the electrostatic contact member 31. This contact action can change the driving frequency of the driving mass block 11 connected to the electrostatic contact member 31 in the driving direction. At the same time, it changes the detection frequency of the detection mass block 21 connected to the electrostatic contact member 31 in the detection direction, so that the operating frequency of the MEMS frequency-modulated single-axis gyroscope can be actively adjusted. The operating frequency is related to the voltage applied to the electrostatic fixed electrode 33, thereby realizing a continuous and controllable change in the operating frequency. This MEMS frequency-modulated single-axis gyroscope with a variable operating frequency can effectively avoid resonance interference or malicious attacks of fixed operating frequencies, and significantly improve its anti-interference ability and safety in complex electromagnetic environments.

[0025] Specifically, such as Figure 4 and Figure 5 As shown, the six electrostatic frequency modulation components 3 in this embodiment are divided into electrostatic drive frequency modulation components 301 and electrostatic detection frequency modulation components 302. The electrostatic drive frequency modulation component 301 has an electrostatic abutment 31 that is an electrostatic drive connecting beam connected to the drive mass block 11. The electrostatic movable electrode block 32 is an electrostatic drive movable electrode plate, and the electrostatic fixed electrode plate 33 is an electrostatic drive fixed electrode plate. The driving direction is the second direction, and the drive mass block 11 is provided with electrostatic drive frequency modulation components 301 at both ends along the first direction. The electrostatic detection frequency modulation component 302 has an electrostatic abutment 31 that is an electrostatic detection connecting beam connected to the detection mass block 21. The electrostatic movable electrode block 32 is an electrostatic detection movable electrode plate, and the electrostatic fixed electrode plate 33 is an electrostatic detection fixed electrode plate. The detection direction is the first direction, and the detection mass block 21 is provided with electrostatic detection frequency modulation components 302 at both ends along the second direction.

[0026] In this embodiment, the electrostatic driving fixed plate of the electrostatic driving frequency modulation component 301 and the electrostatic detection fixed plate of the electrostatic detection frequency modulation component 302 are simultaneously energized or de-energized to ensure that the difference between the driving frequency in the driving direction and the detection frequency in the detection direction of the MEMS frequency-modulated single-axis gyroscope is a preset frequency. In other words, to ensure the stable operation of the MEMS frequency-modulated single-axis gyroscope, the electrostatic driving fixed plate and the electrostatic detection fixed plate need to operate synchronously to ensure that the difference between the driving frequency in the driving direction and the detection frequency in the detection direction of the MEMS frequency-modulated single-axis gyroscope is stable at the preset frequency, which is related to the structure of the gyroscope itself. In other embodiments, if necessary, the electrostatic driving frequency modulation component 301 and the electrostatic detection frequency modulation component 302 can operate asynchronously, depending on actual needs.

[0027] Specifically, such as Figure 1As shown, the first direction is the X-axis direction, and the second direction is the Y-axis direction. That is, in the driving mode, the driving mass 11 moves along the Y-axis direction, and in the detection mode, the detection mass 21 moves along the X-axis direction. In other words, when the single-axis gyroscope detects the angular velocity in the Z-axis direction, the detection mass 21 moves along the X-axis direction due to the Coriolis force along the X-axis direction. It should be noted that in other embodiments of the present invention, the first direction can be the Y-axis direction, the second direction the X-axis direction, and the single-axis gyroscope can be used to detect the angular velocity in the Z-axis direction.

[0028] Furthermore, such as Figure 2 As shown, the electrostatic frequency modulation assembly 3 of this embodiment includes two electrostatic contact members 31, an electrostatic fixed electrode plate 33, and an electrostatic movable electrode block 32. The electrostatic fixed electrode plate 33 is located between the two electrostatic contact members 31 and directly opposite the middle of the electrostatic movable electrode block 32. The two electrostatic contact members 31 correspond to the two ends of the electrostatic movable electrode block 32 and are symmetrically distributed relative to the electrostatic fixed electrode plate 33. When the electrostatic fixed electrode plate 33 is de-energized, the distance between the two electrostatic contact members 31 and the electrostatic movable electrode block 32 is equal. This structure ensures that when the two electrostatic contact members 31 are in contact with the electrostatic movable electrode block 32, the two electrostatic contact members 31 experience the same force, thereby ensuring that the two ends of the drive mass block 11 or the detection mass block 21 connected to the electrostatic contact members 31 experience the same force, enabling the MEMS frequency-modulated single-axis gyroscope to operate smoothly.

[0029] It should be noted that, in other embodiments of the present invention, the structure of the electrostatic frequency modulation component 3 is not limited to the above-described limitations, such as... Figure 3 As shown, the electrostatic frequency modulation assembly 3 may also include two electrostatic fixed plates 33, an electrostatic contact member 31, and an electrostatic movable electrode block 32. The electrostatic contact member 31 is directly opposite the middle of the electrostatic movable electrode block 32. The two electrostatic fixed plates 33 correspond to the two ends of the electrostatic movable electrode block 32 and are symmetrically distributed with respect to the electrostatic contact member 31. The two electrostatic fixed plates 33 are configured to have the same electrostatic attraction force as the electrostatic movable electrode block 32 when energized.

[0030] like Figure 2As shown, each electrostatic frequency modulation component 3 in this embodiment further includes two frequency modulation first anchor points 34, two frequency modulation elastic beams 35, and four frequency modulation second anchor points 36. The two frequency modulation first anchor points 34 are fixed on the substrate, and the two frequency modulation first anchor points 34 correspond one-to-one with the two frequency modulation elastic beams 35. One end of each frequency modulation elastic beam 35 is connected to one frequency modulation first anchor point 34, and the other end of each frequency modulation elastic beam 35 is connected to the electrostatic movable electrode block 32. The frequency modulation elastic beam 35 can deform along the movement direction of the electrostatic movable electrode block 32. The four frequency modulation second anchor points 36 are fixed on the substrate, and each electrostatic abutment 31 corresponds to one of the two frequency modulation second anchor points 36. The electrostatic abutment 31 is fixed on the frequency modulation second anchor point 36. Specifically, the electrostatic abutment component 31 includes an electrostatic connecting straight beam 311 and an electrostatic abutment plate 312. The electrostatic connecting straight beam 311 extends along the movement direction of the electrostatic movable electrode block 32 of its corresponding electrostatic frequency modulation component 3. One end of the electrostatic connecting straight beam 311 is connected to the driving mass block 11 or the detection mass block 21, and the electrostatic abutment plate 312 is connected to the other end of the electrostatic connecting straight beam 311. The electrostatic abutment plate 312 is fixed on two frequency modulation second anchor points 36.

[0031] like Figure 1 As shown, the MEMS frequency-modulated single-axis gyroscope of this embodiment also includes two decoupling mass blocks 41, two detection mass blocks 21, and one driving mass block 11. The two decoupling mass blocks 41 are elastically connected to the driving mass block 11 along a first direction, and the two decoupling mass blocks 41 are located on both sides of the driving mass block 11 along a second direction. The two detection mass blocks 21 are located on both sides of the driving mass block 11 along the first direction, and the two decoupling mass blocks 41 are located between the two detection mass blocks 21.

[0032] like Figure 1 As shown, in this embodiment, there are two electrostatic drive frequency modulation components 301, located at both ends of the driving mass block 11 along the first direction. The two electrostatic drive frequency modulation components 301 are simultaneously applied with the same voltage to ensure that when the two electrostatic drive frequency modulation components 301 come into contact with the same driving mass block 11, the driving mass block 11 experiences forces of equal magnitude and opposite direction along the X-axis. There are four electrostatic detection frequency modulation components 302, with each detection mass block 21 corresponding to two electrostatic detection frequency modulation components 302, located at both ends of the detection mass block 21 along the second direction. The two electrostatic detection frequency modulation components 302 at both ends of each detection mass block 21 are simultaneously supplied with the same voltage to ensure that when the two electrostatic detection frequency modulation components 302 come into contact with the same detection mass block 21, the detection mass block 21 experiences forces of equal magnitude and opposite direction along the Y-axis.

[0033] like Figure 1As shown, the MEMS frequency-modulated single-axis gyroscope of this embodiment also includes a drive decoupling beam 42 and a detection decoupling beam 43. The drive decoupling beam 42 is deformable along a second direction, with one end connected to the decoupling mass block 41 and the other end connected to the detection mass block 21. The detection decoupling beam 43 is deformable along a first direction, with one end connected to the decoupling mass block 41 and the other end connected to the drive mass block 11. There are eight drive decoupling beams 42, with each decoupling mass block 41 corresponding to four drive decoupling beams 42, and the four drive decoupling beams 42 are located at the four corners of the decoupling mass block 41. There are four detection decoupling beams 43, with each decoupling mass block 41 corresponding to two detection decoupling beams 43, located at both ends of the decoupling mass block 41 along the first direction to ensure the smoothness of the movement of the decoupling mass block 41 along the first direction.

[0034] like Figure 1 As shown, the MEMS frequency-modulated single-axis gyroscope of this embodiment further includes a driving electrode 12, a driving readout electrode 13, and a detection electrode 22. The driving electrode 12 is disposed on the driving mass block 11 and can drive the driving mass block 11 to reciprocate along a second direction. The driving readout electrode 13 is disposed on the driving mass block 11 and configured to read the real-time displacement of the driving mass block 11 and feed it back to the driving electrode 12, so that the driving mass block 11 moves smoothly along the second direction in the driving mode. The detection electrode 22 is disposed on the detection mass block 21 and configured to detect the angular velocity in a third direction. Specifically, in this embodiment, the driving electrode 12 is a driving comb electrode, the driving readout electrode 13 is a driving readout comb electrode, and the detection electrode 22 is a detection electrode. In other embodiments, the detection electrode 22 can also be a detection comb electrode, depending on actual needs, which will not be elaborated here.

[0035] In the driving mode, such as Figure 4 As shown, the driving electrode 12 drives the driving mass block 11 to move along the Y-axis. The electrostatic driving fixed plates of the two electrostatic driving frequency modulation components 301 are subjected to the same voltage. Under the drive of the detection decoupling beam 43, the two decoupling mass blocks 41 move in the same direction along the Y-axis with the driving mass block 11. At this time, the deformation of the driving decoupling beam 42 along the Y-axis can absorb the movement along the Y-axis, so that the detection mass block 21 connected to the driving decoupling beam 42 will not move along the Y-axis with the decoupling mass block 41.

[0036] In the detection mode, such as Figure 5As shown, when detecting the angular velocity in the Z-axis direction, the decoupling mass block 41 is subjected to a Coriolis force along the X-axis direction and moves along the X-axis direction. Driven by the driving decoupling beam 42, the detection mass block 21 moves along the X-axis direction with the decoupling mass block 41. At the same time, the electrostatic detection fixed plates of the four electrostatic detection frequency modulation components 302 are subjected to the same voltage, and the deformation of the detection decoupling beam 43 along the X-axis direction can absorb the movement along the X-axis direction, so that the driving mass block 11 connected to the detection decoupling beam 43 will not move along the X-axis direction with the decoupling mass block 41.

[0037] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A MEMS frequency-modulated single-axis gyroscope, comprising a driving mass block and a sensing mass block, characterized in that, The MEMS frequency-modulated single-axis gyroscope also includes: At least one electrostatic frequency modulation component, each of the electrostatic frequency modulation components including an electrostatic contact member, an electrostatic movable electrode block, and an electrostatic fixed electrode plate, wherein the electrostatic contact member is connected to the driving mass block or the detection mass block, the electrostatic movable electrode block and the electrostatic fixed electrode plate are spaced apart, and the electrostatic fixed electrode plate is configured to be optionally energized to change the electrostatic attraction between the electrostatic movable electrode block and the electrostatic fixed electrode plate so that the electrostatic movable electrode block abuts against the electrostatic contact member, thereby changing the driving frequency of the MEMS frequency-modulated single-axis gyroscope in the driving direction or the detection frequency in the detection direction.

2. The MEMS frequency-modulated single-axis gyroscope according to claim 1, characterized in that, The electrostatic frequency modulation assembly includes two electrostatic contact members, one electrostatic fixed electrode plate, and one electrostatic movable electrode block. The electrostatic fixed electrode plate is located between the two electrostatic contact members and faces the middle of the electrostatic movable electrode block. The two electrostatic contact members correspond to the two ends of the electrostatic movable electrode block and are symmetrically distributed relative to the electrostatic fixed electrode plate. When the electrostatic fixed electrode plate is de-energized, the distance between the two electrostatic contact members and the electrostatic movable electrode block is equal.

3. The MEMS frequency-modulated single-axis gyroscope according to claim 1, characterized in that, The electrostatic frequency modulation assembly includes two fixed electrostatic plates, one electrostatic contact member, and one movable electrostatic electrode. The electrostatic contact member is directly opposite the middle of the movable electrostatic electrode. The two fixed electrostatic plates are respectively corresponding to the two ends of the movable electrostatic electrode and are symmetrically distributed with respect to the electrostatic contact member. The two fixed electrostatic plates are configured such that when energized, their electrostatic attraction is equal to that of the movable electrostatic electrode.

4. The MEMS frequency-modulated single-axis gyroscope according to claim 1, characterized in that, The electrostatic frequency modulation component also includes: The first anchor point for frequency modulation is fixed on the substrate; A frequency-modulated elastic beam, one end of which is connected to the first frequency-modulated anchor point, and the other end of which is connected to the electrostatic movable electrode block, wherein the frequency-modulated elastic beam can deform along the movement direction of the electrostatic movable electrode block; The second frequency-modulated anchor point is fixed on the substrate, and the electrostatic abutment is fixed on the second frequency-modulated anchor point.

5. The MEMS frequency-modulated single-axis gyroscope according to claim 4, characterized in that, The electrostatic contact element includes: An electrostatic connection straight beam extends along the movement direction of the electrostatic movable electrode block and one end of it is connected to the driving mass block or the detection mass block. An electrostatic abutment plate is connected to the other end of the electrostatic connection straight beam, and the electrostatic abutment plate is fixed on the two frequency modulation second anchor points.

6. The MEMS frequency-modulated single-axis gyroscope according to claim 1, characterized in that, The number of electrostatic frequency modulation components is at least two and they are divided into: An electrostatic drive frequency modulation assembly, wherein the electrostatic abutment of the electrostatic drive frequency modulation assembly is an electrostatic drive connecting beam, the electrostatic drive connecting beam is connected to the drive mass block, the electrostatic movable electrode block is an electrostatic drive movable electrode plate, the electrostatic fixed electrode plate is an electrostatic drive fixed electrode plate, the drive direction is a second direction, and the electrostatic drive frequency modulation assembly is provided at both ends of the drive mass block along the first direction. An electrostatic detection frequency modulation assembly is provided, wherein the electrostatic contact member of the electrostatic detection frequency modulation assembly is an electrostatic detection connecting beam, the electrostatic detection connecting beam is connected to the detection mass block, the electrostatic movable electrode block is an electrostatic detection movable electrode plate, the electrostatic fixed electrode plate is an electrostatic detection fixed electrode plate, the detection direction is a first direction, and the electrostatic detection frequency modulation assembly is provided at both ends of the detection mass block along the second direction.

7. The MEMS frequency-modulated single-axis gyroscope according to claim 6, characterized in that, The MEMS frequency-modulated single-axis gyroscope further includes two decoupled mass blocks, two detection mass blocks, and one driving mass block. The two decoupled mass blocks are elastically connected to the driving mass block along a first direction and are located on both sides of the driving mass block along a second direction. The two detection mass blocks are located on both sides of the driving mass block along the first direction.

8. The MEMS frequency-modulated single-axis gyroscope according to claim 7, characterized in that, The number of electrostatic drive frequency modulation components is two, and the two electrostatic drive frequency modulation components are located at both ends of the drive mass block along the first direction; The number of electrostatic detection frequency tuning components is four, and each detection mass block corresponds to two electrostatic detection frequency tuning components, with the two electrostatic detection frequency tuning components located at both ends of the detection mass block along the second direction.

9. The MEMS frequency-modulated single-axis gyroscope according to claim 8, characterized in that, The MEMS frequency-modulated single-axis gyroscope also includes: The decoupling beam is driven to deform along the second direction, with one end connected to the decoupling mass block and the other end connected to the detection mass block. The detection decoupling beam is capable of deforming along the first direction, with one end connected to the decoupling mass block and the other end connected to the driving mass block.

10. The MEMS frequency-modulated single-axis gyroscope according to claim 1, characterized in that, The MEMS frequency-modulated single-axis gyroscope also includes: A driving electrode is disposed on the driving mass block and configured to drive the driving mass block to move along a second direction; A drive reading electrode is disposed on the drive mass block and configured to read the real-time displacement of the drive mass block; The detection electrode is disposed on the detection mass block and configured to detect the angular velocity in a third direction.

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