Real-time monitoring method and system for total organic carbon of ultrapure water based on bidirectional excitation

By using a monitoring method based on bidirectional excitation, optimizing the excitation mode and environmental compensation mechanism, the adaptability and accuracy issues in monitoring total organic carbon in ultrapure water are solved, achieving real-time monitoring with high stability and high accuracy, which is applicable to ultrapure water monitoring in fields such as semiconductors and pharmaceuticals.

CN121805336BActive Publication Date: 2026-06-26HANGZHOU SULI TECH CO LTD
View PDF 3 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HANGZHOU SULI TECH CO LTD
Filing Date
2026-03-09
Publication Date
2026-06-26

Smart Images

  • Figure CN121805336B_ABST
    Figure CN121805336B_ABST
Patent Text Reader

Abstract

The application discloses a kind of based on bidirectional excitation's ultra-pure water total organic carbon real-time monitoring method and system, it is related to organic carbon monitoring field, first by default frequency acquisition reference conductivity, then using bidirectional feedback adjustment mechanism to adaptively match excitation mode, to eliminate polarization effect in ultra-pure water measurement and optimize signal acquisition quality.Aiming at the influence of environmental temperature fluctuation, by temperature sensing verification and data cleaning, the measured conductivity and temperature parameters are nonlinearly corrected, overcoming the limitations of traditional linear compensation.In addition, the method includes the ignition parameters of the ultraviolet lamp into the calculation model, and dynamically adjusts the oxidation efficiency correction coefficient according to the cumulative working time, effectively offsetting the measurement error caused by light source aging.Finally, combined with standard curve inversion and multi-channel differential operation, high stability, high-precision total organic carbon real-time monitoring is realized.
Need to check novelty before this filing date? Find Prior Art

Citation Information

Patent Citations

  • CN115561284A

  • CN119265636A

  • US20160066385A1