Standardized pilot test verification platform of display panel defect detection equipment

Abstract

The invention provides a standardized pilot test verification platform for display panel defect detection equipment, and relates to the field of display, and the platform comprises a working condition disturbance injection module which is used for injecting working condition disturbance to defect detection equipment running on the standardized pilot test verification platform based on standard working condition disturbance; the standard defect display panel is calibrated with actual defect data, and is used for performing defect detection on the standard defect display panel by defect detection equipment operating on the standardized pilot test verification platform so as to output first detection defect data; the unified evaluation module is used for evaluating the first index completion degree of the defect detection equipment for each set index based on the plurality of set indexes, the actual defect data and the first detection defect data; and the report generation module is used for generating an evaluation report for the defect detection equipment based on the first index completion degrees of the set indexes corresponding to the plurality of set indexes respectively. The problem that different display panel defect detection devices are difficult to compare fairly in the prior art is solved.

Description

Technical Field

[0001] This disclosure relates to the field of display technology, specifically to a standardized pilot-scale verification platform for display panel defect detection equipment. Background Technology

[0002] With the mass production of high-resolution new display technologies, defect detection on display panel surfaces has been pushed to the micrometer or even sub-micrometer level of precision. Defect detection equipment deployed in the industry typically incorporates multiple defect detection algorithms, including traditional threshold segmentation algorithms, edge detection algorithms, and deep learning algorithms such as convolutional neural networks. However, inconsistent evaluation benchmarks among different defect detection devices make it difficult to fairly compare different display panel defect detection devices. Summary of the Invention

[0003] The main objective of this disclosure is to provide a standardized pilot-scale verification platform for display panel defect detection equipment, so as to improve the problem that it is difficult to fairly compare different display panel defect detection equipment in related technologies.

[0004] To achieve the above objectives, the first aspect of this disclosure provides a standardized pilot-scale verification platform for display panel defect detection equipment, the standardized pilot-scale verification platform comprising: The operating condition disturbance injection module is used to inject operating condition disturbances into defect detection equipment running on a standardized pilot-scale verification platform based on standard operating condition disturbances. A standard defect display panel calibrated with actual defect data is used by defect detection equipment running on a standardized pilot verification platform to perform defect detection on the standard defect display panel and output the first detected defect data. The unified evaluation module is used to evaluate the first indicator completion rate of the defect detection equipment for each set indicator based on multiple set indicators, actual defect data and first detection defect data. The report generation module is used to generate an evaluation report for defect detection equipment based on the completion rate of the first indicator of each of the multiple set indicators.

[0005] In some embodiments of this disclosure, the operating condition disturbance includes at least a portion of the following: Mechanical vibration and transmission jitter of defect detection equipment; Light source brightness decay and flicker in defect detection equipment; The clamping force of the camera clamping mechanism in the defect detection equipment decreases and its position shifts. The air flotation pressure of the air flotation device on the display panel of the defect detection equipment drops and the airflow is uneven. Electrostatic accumulation and discharge shock in defect detection equipment; Disturbances to the cleanliness level of defect detection equipment; The process parameters of the defect detection equipment are subject to deviation disturbance.

[0006] In some embodiments of this disclosure, the actual defect data includes at least a portion of the following: island defects, short-circuit defects, open-circuit defects, and void defects.

[0007] In some embodiments of this disclosure, the set indicators include at least a portion of the following: The indicators include: defect detection rate, defect false detection rate, defect repeatability accuracy, minimum detectable defect size capability, defect process disturbance stability, defect cycle time adaptability, and defect dynamic cleanliness adaptability.

[0008] In some embodiments of this disclosure, the standardized pilot-scale verification platform further includes: The operation monitoring and data acquisition module is used to inject operating condition disturbances into the defect detection equipment in the standard operating condition disturbance injection module. During the defect detection equipment's defect detection of the standard defect display panel, the actual operating condition disturbances of the defect detection equipment are collected. The unified assessment module is also used to correct the completion rate of the first indicator based on standard operating condition disturbances and actual operating condition disturbances, so as to obtain the completion rate of the second indicator for each set indicator. The report generation module is also used to generate an evaluation report for defect detection equipment based on the completion rate of the second indicator corresponding to multiple set indicators.

[0009] In some embodiments of this disclosure, the unified evaluation module is further configured to correct the completion rate of the first indicator based on standard operating condition disturbances and actual operating condition disturbances, in order to obtain the completion rate of the second indicator for each set indicator, including: The unified evaluation module determines the first operating condition disturbance deviation correction coefficient based on the standard operating condition disturbance and the actual operating condition disturbance; The unified evaluation module corrects the completion rate of the first indicator based on the first operating condition disturbance deviation correction coefficient to obtain the second indicator completion rate of each set indicator.

[0010] In some embodiments of this disclosure, the standardized pilot-scale verification platform includes: The laboratory validation branch includes a standard operating condition disturbance injection module, which injects standard operating condition disturbances into the defect detection equipment while the equipment is operating on the laboratory validation branch; and... The pilot-scale verification branch includes a simulated operating condition disturbance injection module. When the defect detection equipment is running on the pilot-scale verification branch, the simulated operating condition disturbance injection module injects operating condition disturbances into the defect detection equipment based on simulated operating condition disturbances. This simulates the real operating condition disturbance environment that the defect detection equipment will be used in, enabling the defect detection equipment to perform defect detection on the standard defect display panel and output second detection defect data.

[0011] In some embodiments of this disclosure, the unified evaluation module is also used to evaluate the completion rate of the third indicator of each set indicator of the defect detection equipment under real working condition disturbance environment based on the second detection defect data and the actual defect data. The report generation module is also used to generate an evaluation report for defect detection equipment based on the completion rate of the third indicator corresponding to multiple set indicators.

[0012] In some embodiments of this disclosure, the unified evaluation module is further configured to: determine the second operating condition disturbance deviation correction coefficient based on the standard operating condition disturbance and the simulated operating condition disturbance, and correct the third indicator completion degree of each set indicator based on the second operating condition disturbance deviation correction coefficient to obtain the fourth indicator completion degree of each set indicator. The report generation module is also used to generate an evaluation report for defect detection equipment based on the completion rate of the fourth indicator corresponding to multiple set indicators.

[0013] In some embodiments of this disclosure, when the defect detection equipment is running on the laboratory verification branch, if the completion rate of the second indicator of the set index meets the experimental setting requirements, it is confirmed that the defect detection equipment can be run on the pilot verification branch. When the defect detection equipment is running on the pilot test line, if the completion rate of the fourth indicator of the set indicators meets the application setting requirements, it is confirmed that the defect detection equipment can be applied to the real working condition disturbance environment.

[0014] The standardized pilot-scale verification platform for display panel defect detection equipment provided in this embodiment injects operating condition disturbances into the defect detection equipment operating on the platform based on standard operating condition disturbances by a working condition disturbance injection module. This ensures that the amount of operating condition disturbance injected into different defect detection equipment is not significantly different. The same standard defect display panel is used for defect detection by the equipment operating on the platform to output first detection defect data. This ensures that the display panels detected by different defect detection equipment are identical, resulting in a consistent evaluation benchmark between different defect detection equipment. This makes the first indicator completion rate of each set indicator evaluated by the unified evaluation module for different defect detection equipment based on actual defect data and the first detection defect data comparable. Based on the evaluation reports for different defect detection equipment, a fair comparison of different display panel defect detection equipment can be made, thereby improving the problem of unfair comparison of different display panel defect detection equipment in related technologies. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the specific embodiments or related technologies of this disclosure, the accompanying drawings used in the description of the specific embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic block diagram and a flowchart illustrating the standardized pilot-scale verification platform for a display panel defect detection device provided in an embodiment of this disclosure; Figure 2 A schematic block diagram and a flowchart illustrating the standardization pilot-scale verification platform for a display panel defect detection device provided in another embodiment of this disclosure; Figure 3 This is a schematic diagram of a process for correcting the completion rate of a first indicator, provided as an embodiment of the present disclosure. Figure 4 A schematic block diagram and a flowchart illustrating the standardization pilot-scale verification platform for a display panel defect detection device provided in another embodiment of this disclosure; Figure 5 This is a schematic diagram of a process for correcting the completion rate of a third indicator, provided as an embodiment of the present disclosure. Figure 6 A schematic diagram illustrating the sequential workflow of the laboratory validation branch and the pilot-scale validation branch provided in an embodiment of this disclosure; Figure 7A schematic block diagram and a flowchart illustrating the standardization pilot-scale verification platform for a display panel defect detection device provided in another embodiment of this disclosure; Figure 8 A schematic diagram of the workflow of a standardized pilot-scale verification platform for a display panel defect detection device provided in another embodiment of this disclosure.

[0017] It should be noted that the elements in the attached diagram are schematic and not drawn to scale. Detailed Implementation

[0018] To enable those skilled in the art to better understand the present disclosure, the technical solutions of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present disclosure, and not all embodiments. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present disclosure.

[0019] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0020] In this disclosure, the terms “upper,” “lower,” “left,” “right,” “front,” “rear,” “top,” “bottom,” “inner,” “outer,” and “middle,” etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. These terms are primarily for the purpose of better describing this disclosure and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0021] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in certain circumstances to indicate a dependency or connection. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.

[0022] Furthermore, the terms "set up," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection via an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] In related technologies, the display panel manufacturing process demands extremely high precision, speed, and stability in the detection of surface defects. Existing display panel defect detection equipment generally lacks systematic verification under complex operating conditions before entering mass production lines, and it also lacks a unified "true value" benchmark and standardized evaluation criteria. This makes it difficult to fairly compare different defect detection equipment and algorithms, and also hinders the formation of replicable import templates and industry entry barriers. Therefore, a standardized, modular, and reusable pilot-scale verification platform is needed.

[0025] Example 1 To address at least some of the aforementioned problems, embodiments of this disclosure provide a standardized pilot-scale verification platform for display panel defect detection equipment, aiming to improve the difficulty in fairly comparing different display panel defect detection equipment in related technologies. For example... Figure 1 and Figure 7 As shown, the standardized pilot-scale verification platform for the display panel defect detection equipment mainly includes the following modules or structures: The operating condition disturbance injection module is used to inject operating condition disturbances into defect detection equipment running on a standardized pilot-scale verification platform based on standard operating condition disturbances. A standard defect display panel calibrated with actual defect data is used by defect detection equipment running on a standardized pilot verification platform to perform defect detection on the standard defect display panel and output the first detected defect data. The unified evaluation module is used to evaluate the first indicator completion rate of the defect detection equipment for each set indicator based on multiple set indicators, actual defect data and first detection defect data. The report generation module is used to generate an evaluation report for defect detection equipment based on the completion rate of the first indicator of each of the multiple set indicators.

[0026] In the above-described solution, a standardized pilot-scale verification platform for display panel defect detection equipment is provided. Through this platform, a condition disturbance injection module injects condition disturbances into the defect detection equipment operating on the platform, based on standard condition disturbances. This ensures that the amount of condition disturbance injected into different defect detection devices is not significantly different. The same standard defect display panel is used for defect detection by the equipment operating on the platform to output first defect data. This ensures that the display panels detected by different defect detection devices are identical, resulting in a consistent evaluation benchmark between different defect detection devices. This makes the first indicator completion rate of each set indicator evaluated by the unified evaluation module for different defect detection devices based on actual defect data and the first defect data comparable. Based on the evaluation reports for different defect detection devices, a fair comparison of different display panel defect detection devices can be made, thereby improving the problem of unfair comparison of different display panel defect detection devices in related technologies.

[0027] The aforementioned operating condition disturbance injection module can employ, but is not limited to, operating condition simulation and disturbance injection systems. The aforementioned standard defect display panel with actual defect data can utilize a standardized test sample (standard defect display panel), and the actual defect data of the standard defect display panel can be calibrated through a calibration benchmark system. The aforementioned unified evaluation module and report generation module can together form a unified evaluation and report generation system.

[0028] The aforementioned standardized pilot-scale verification platform for display panel defect detection equipment can be applied to the field of quality inspection and verification technology in the manufacturing process of new displays. Specifically, it involves a pilot-scale verification platform for surface defect detection equipment in production lines (front-end / mid-end) of new display panels such as OLEDs. This platform covers operational disturbance injection, standard defect samples (standard defect display panels), defect detection equipment operation monitoring, unified evaluation and report output, and reusable standardized interfaces and processes across factories (different defect detection equipment). By constructing a pilot-scale verification platform that can be replicated across manufacturers (different defect detection equipment), processes, and generation lines, it is used to conduct unified performance evaluation and production line adaptability verification of display panel surface defect detection equipment. Its main contents include: operational disturbance injection, standardized defect samples and true values, data acquisition and environmental labeling, unified index calculation and reporting, and reproducible deployment specifications. Therefore, based on evaluation reports for different defect detection equipment, a fair comparison of different display panel defect detection equipment can be made, thereby improving the problem of unfair comparison of different display panel defect detection equipment in related technologies. The following is a related document... Figures 1 to 8 This disclosure provides a detailed description of the platform.

[0029] The aforementioned operating condition disturbance can be any disturbance that can affect the defect detection results. Some methods are illustrated below. For example, refer to... Figure 7 The operating disturbances include at least the following: mechanical vibration and transmission jitter of the defect detection equipment, attenuation of light source brightness and flicker of the defect detection equipment, reduction of clamping force and positional deviation of camera clamping mechanism of defect detection equipment, drop in air flotation pressure and uneven airflow of display panel air flotation device of defect detection equipment, electrostatic accumulation and discharge impact of defect detection equipment, cleanliness level disturbance of defect detection equipment, and process parameter deviation disturbance of defect detection equipment.

[0030] It should be noted that the reference Figure 7 The working condition disturbance injection module injects quantifiable and repeatable independent or composite disturbances into the defect detection equipment operating on the standardized pilot-scale verification platform based on standard working condition disturbances. Specific disturbances may include at least some of the following: mechanical vibration and transmission jitter, light source brightness attenuation and flicker, reduced clamping force and positional shift, decreased air flotation pressure and uneven airflow, electrostatic accumulation and discharge impact, cleanliness level disturbances, and process parameter deviations (film thickness / linewidth / line spacing ±10%).

[0031] It should also be noted that the reference Figure 7 Standard operating condition disturbance involves injecting the same ideal operating condition disturbance into different defect detection devices. However, due to the different structures of these devices, the actual operating condition disturbances generated by the standard operating condition disturbance injected by the disturbance injection module can be the same or different. In this case, the standardization pilot-scale verification platform can also include an operation monitoring and data acquisition module. This module detects and records the actual operating condition disturbance conditions of the defect detection devices, such as the disturbance intensity, spectral characteristics, duration, and workstation location.

[0032] The actual defect data marked on the standard defect display panel can include various types of defects. For example, refer to... Figure 7 The actual defect data includes at least some of the following: islanded defects, short-circuit defects, open-circuit defects, and void defects. Specifically, it provides a standard defect display panel containing typical defects such as islanded defects, short-circuit defects, open-circuit defects, and void defects with traceable true values. All defects have metrologically traceable physical dimensions, locations, and severity levels, and the minimum detectable size capability verification covers the 0.4 μm level. This provides a unified benchmark for evaluating defect detection rate, false detection rate, minimum detectable size capability, and defect repeatability accuracy.

[0033] Regarding the type of indicator set, it can be any indicator that can evaluate the display panel defect detection equipment. For example, refer to... Figure 7The set indicators may include at least some of the following: defect detection rate, defect false detection rate, defect repeatability accuracy, minimum detectable defect size capability, defect process disturbance stability, defect cycle time adaptability, and defect dynamic cleanliness adaptability.

[0034] It should be noted that each set indicator has a corresponding indicator completion rate. The indicator completion rate of each set indicator is calculated using the same method for different defect detection devices, thereby achieving unified indicator calculation for different defect detection devices and making the evaluation reports generated by the report generation module for different defect detection devices comparable.

[0035] For example, refer to Figure 2 The standardized pilot-scale verification platform may also include: an operation monitoring and data acquisition module, which is used to inject operating condition disturbances into the defect detection equipment through the standard operating condition disturbance injection module, and to collect the actual operating condition disturbances of the defect detection equipment during the defect detection process of the standard defect display panel. At this time, the unified evaluation module is also used to correct the completion rate of the first indicator based on the standard operating condition disturbance and the actual operating condition disturbance to obtain the completion rate of the second indicator for each set indicator; the report generation module is also used to generate an evaluation report for the defect detection equipment based on the completion rates of the second indicators corresponding to multiple set indicators. Through the above methods, the difference between standard operating condition disturbances and actual operating condition disturbances is distinguished, and the completion rate of the first indicator is corrected, so that the obtained completion rate of the second indicator more accurately reflects the performance parameters of the defect detection equipment.

[0036] refer to Figure 7 During the actual operating disturbance of the defect detection equipment, the operation monitoring and data acquisition module can synchronously collect and time-align the following parameters of the working environment and the operation of the defect detection equipment: vibration amplitude / spectrum, light source brightness curve, clamping offset, air flotation pressure distribution, electrostatic voltage, cleanliness level, and process offset label. Simultaneously, it collects the first defect data output by the tested defect detection equipment (defect type, coordinates / contour, size estimation, confidence level, timestamp) and the equipment's operating indicators (frame rate, latency, frame drops, repeatability, etc.). The operation monitoring and data acquisition module can employ an operation monitoring and data acquisition system to achieve time alignment between environmental labels and the output of the defect detection equipment (the first defect data, frame rate, latency, frame drops, and repeatability as defect detection results), forming a traceable data link.

[0037] For example, refer to Figure 3The unified evaluation module is also used to correct the completion rate of the first indicator based on standard operating condition disturbances and actual operating condition disturbances to obtain the completion rate of the second indicator for each set indicator. This includes: the unified evaluation module determining a first operating condition disturbance deviation correction coefficient based on standard operating condition disturbances and actual operating condition disturbances; and the unified evaluation module correcting the completion rate of the first indicator based on the first operating condition disturbance deviation correction coefficient to obtain the completion rate of the second indicator for each set indicator. Through this method, the target of the operating condition disturbances injected for different defect detection devices is the standard operating condition disturbance. However, due to differences in the structure and anti-interference capabilities of different defect detection devices, the first operating condition disturbance deviation correction coefficient is determined based on standard operating condition disturbances and actual operating condition disturbances. Then, the completion rate of the first indicator is corrected using this first operating condition disturbance deviation correction coefficient to obtain the completion rate of the second indicator for each set indicator. This makes the completion rate of the second indicator more accurately reflect the defect detection capability of the defect detection device and makes the comparison scale between different defect detection devices more uniform.

[0038] For example, refer to Figure 4 The standardized pilot-scale verification platform may further include: a laboratory verification branch and a pilot-scale verification branch; wherein, the laboratory verification branch includes a standard operating condition disturbance injection module, which injects standard operating condition disturbances into the defect detection equipment when the defect detection equipment is running on the laboratory verification branch; the pilot-scale verification branch includes a simulated operating condition disturbance injection module, which injects operating condition disturbances into the defect detection equipment based on simulated operating condition disturbances when the defect detection equipment is running on the pilot-scale verification branch, so as to simulate the real operating condition disturbance environment that the defect detection equipment will be used in, so that the defect detection equipment can perform defect detection on the standard defect display panel to output second detection defect data. By setting up a laboratory validation branch and a pilot-scale validation branch, where the laboratory validation branch is used to verify tolerance and failure mechanisms under strong controllable disturbances (standard operating condition disturbances), and the pilot-scale validation branch is used to conduct adaptability assessments under real cycle time, real cleanliness, and real handling methods (simulating the real operating condition disturbance environment in which the defect detection equipment will be applied), a continuous validation link from "laboratory to pilot-scale line" is achieved. For example, the aforementioned pilot-scale validation branch can be, but is not limited to, a pilot-scale validation line for OLEDs of generation 4.5 and above.

[0039] It should be noted that since the real-world disturbance environments that different defect detection devices apply to may be the same or different, the simulated disturbances that the simulated disturbance injection module is based on may also be the same or different, depending on the real-world disturbance environment that the defect detection device applies to.

[0040] For example, refer to Figure 4The unified evaluation module is also used to evaluate the completion rate of the third indicator for each set indicator of the defect detection equipment under real-world operating conditions and disturbances, based on the second defect detection data and actual defect data. The report generation module is also used to generate an evaluation report for the defect detection equipment based on the completion rate of the third indicator for each set indicator corresponding to multiple set indicators. By using the second defect detection data and actual defect data, the completion rate of the third indicator for each set indicator of the defect detection equipment under real-world operating conditions and disturbances can be accurately evaluated, and the evaluation report for the defect detection equipment can also include the completion rate of the third indicator. This allows for an accurate understanding of the performance of the defect detection equipment when applied to real-world operating conditions and disturbances.

[0041] For example, refer to Figure 5 The unified evaluation module is also used to determine the second operating condition disturbance deviation correction coefficient based on standard operating condition disturbance and simulated operating condition disturbance, and to correct the third indicator completion rate of each set indicator based on the second operating condition disturbance deviation correction coefficient, thus obtaining the fourth indicator completion rate of each set indicator. The report generation module is also used to generate an evaluation report for the defect detection equipment based on the fourth indicator completion rates of the set indicators corresponding to multiple set indicators. Through the above method, the target of the operating condition disturbance injected for different defect detection equipment is the standard operating condition disturbance. However, since the actual operating condition disturbance environment to be applied by different defect detection equipment is different, the second operating condition disturbance deviation correction coefficient is determined based on the standard operating condition disturbance and simulated operating condition disturbance. Then, the second operating condition disturbance deviation correction coefficient is used to correct the third indicator completion rate to obtain the fourth indicator completion rate of each set indicator. This makes the fourth indicator completion rate more accurately reflect the actual defect detection capability of the defect detection equipment in the actual operating condition disturbance environment to be applied, and makes the comparison scale between different defect detection equipment more uniform.

[0042] For example, refer to Figure 6 When the defect detection equipment is running on the laboratory validation line, if the completion rate of the second indicator of the set criteria meets the experimental requirements, it is confirmed that the defect detection equipment can be run on the pilot-scale validation line. If the completion rate of the second indicator of the set criteria does not meet the experimental requirements, it is confirmed that the defect detection equipment cannot be run on the pilot-scale validation line, that is, it is confirmed that the defect detection capability of the defect detection equipment does not meet the standards and needs to be optimized. Subsequent pilot-scale validation is unnecessary, thereby improving validation efficiency.

[0043] For example, refer to Figure 6When the defect detection equipment is operating on the pilot-scale verification line, if the completion rate of the fourth indicator meets the application setting requirements, it is confirmed that the defect detection equipment can be applied to a real-world operating environment with disturbances. If the completion rate of the fourth indicator does not meet the application setting requirements, it is confirmed that the defect detection equipment cannot be operated in a real-world operating environment with disturbances, meaning that the defect detection capability of the equipment does not meet the application requirements and needs to be optimized to reduce mass production risks.

[0044] For example, refer to Figure 7 The experimental and application settings allow for setting target requirements for each indicator. For example, the target requirement for defect detection rate can be ≥98%, the target requirement for false defect detection rate can be ≤2%, the target requirement for defect repeatability can be ≤1μm, the target requirement for minimum detectable defect size capability can be 0.4μm, and the score for defect process disturbance (±10%) stability index can reach the preset target score, etc.

[0045] For example, refer to Figure 7 The evaluation report generated by the report generation module can include not only the completion status of each set indicator, but also the adaptability assessment and improvement suggestions based on the indicator completion status, experimental setting requirements and application setting requirements, so as to facilitate the staff to optimize and improve the defect detection equipment in a targeted manner.

[0046] For example, refer to Figure 7 This standardized pilot-scale verification platform can also include standardized interfaces and reusable deployment subsystems. These standardized interfaces and reusable deployment subsystems define unified data structures and communication protocols, solidify test scripts, indicator definitions, and report templates, forming a replicable deployment manual to enable rapid deployment and consistency verification across factories, processes, and generations of production lines. All modules and subsystems are coupled through standardized interfaces and reusable deployment subsystems to achieve standardized verification and production line adaptability assessment.

[0047] For example, such as Figure 8 The method shown is based on a standardized pilot-scale verification platform. Its workflow and methods include: S1 device access and interface initialization; S2 standard sample benchmark testing; S3 disturbance injection robustness verification; S4 pilot-scale verification branch cycle adaptation; S5 index calculation and judgment; S6 report output and rectification suggestions.

[0048] refer to Figure 7 and Figure 8After the standardized interface and reusable deployment subsystem complete platform deployment and interface integration, benchmark performance, disturbance robustness, and pilot line cycle time adaptation tests are carried out sequentially. Indicators are calculated and reports are generated based on unified standards, providing a basis for the access and rectification of defect detection equipment. The standardized pilot-scale verification platform provided in this embodiment, with unified truth values, unified disturbances, unified indicators, and unified reports as its core, enables continuous verification and large-scale replication of display panel surface defect detection equipment from the laboratory branch to the pilot-scale verification branch, improving the efficiency of defect detection equipment introduction and reducing mass production risks.

[0049] It should be understood that the above only exemplarily shows some modules and structures of the standardized pilot-scale verification platform. In addition, it may include other functional modules and structures, all of which are within the protection scope of the standardized pilot-scale verification platform provided in the embodiments of this disclosure.

[0050] From the above description, it can be seen that the present disclosure has achieved the following technical effects: (1) Full-link standardization: (unified disturbance, unified truth value, unified indicator, unified report); (2) Modularization and reusability: standard interfaces of each subsystem are coupled, and can be combined and deployed quickly as needed; (3) Quantifiable and traceable: the conclusions are derived from the verifiable data link of truth value and environmental label; (4) Laboratory branch - pilot test verification branch continuous verification: improve the efficiency of defect detection equipment introduction and reduce the risk of defect detection equipment going online; (5) Standard accumulation: form industry access and acceptance reference standards to support the promotion of standardization.

[0051] Although embodiments of the present disclosure have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present disclosure, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A standardized pilot-scale verification platform for display panel defect detection equipment, characterized in that, include: The working condition disturbance injection module is used to inject working condition disturbances into the defect detection equipment running on the standardized pilot verification platform based on standard working condition disturbances. A standard defect display panel calibrated with actual defect data is used by the defect detection equipment running on the standardization pilot verification platform to perform defect detection on the standard defect display panel and output first detection defect data; A unified evaluation module is used to evaluate the first indicator completion rate of the defect detection device for each of the set indicators based on multiple set indicators, the actual defect data and the first detected defect data; The report generation module is used to generate an evaluation report for the defect detection equipment based on the completion rate of the first indicator of the set indicators corresponding to the multiple set indicators respectively.

2. The standardized pilot-scale verification platform as described in claim 1, characterized in that, The operating condition disturbance includes at least the following: Mechanical vibration and transmission jitter of the defect detection equipment; The light source brightness attenuation and flicker of the defect detection equipment; The clamping force of the camera clamping mechanism of the defect detection device is reduced and its position is shifted. The air flotation pressure of the air flotation device in the display panel of the defect detection equipment drops and the airflow is uneven. Electrostatic accumulation and discharge impact of the defect detection equipment; The cleanliness level of the defect detection equipment was disturbed; The process parameters of the defect detection equipment are offset and disturbed.

3. The standardized pilot-scale verification platform as described in claim 1, characterized in that, The actual defect data includes at least the following: island defects, short-circuit defects, open-circuit defects, and void defects.

4. The standardized pilot-scale verification platform as described in claim 1, characterized in that, The set indicators include at least the following: The indicators include: defect detection rate, defect false detection rate, defect repeatability accuracy, minimum detectable defect size capability, defect process disturbance stability, defect cycle time adaptability, and defect dynamic cleanliness adaptability.

5. The standardized pilot-scale verification platform as described in any one of claims 1-4, characterized in that, Also includes: The operation monitoring and data acquisition module is used to inject operating condition disturbances into the defect detection device by the standard operating condition disturbance injection module, and to collect the actual operating condition disturbances of the defect detection device during the defect detection process of the standard defect display panel. The unified evaluation module is also used to correct the completion rate of the first indicator based on the standard operating condition disturbance and the actual operating condition disturbance, so as to obtain the second indicator completion rate of each set indicator. The report generation module is also used to generate an evaluation report for the defect detection equipment based on the completion rate of the second indicator of the set indicators corresponding to the multiple set indicators respectively.

6. The standardized pilot-scale verification platform as described in claim 5, characterized in that, The unified evaluation module is further configured to correct the completion rate of the first indicator based on the standard operating condition disturbance and the actual operating condition disturbance, so as to obtain the second indicator completion rate of each set indicator, including: The unified evaluation module determines the first operating condition disturbance deviation correction coefficient based on the standard operating condition disturbance and the actual operating condition disturbance; The unified evaluation module corrects the first indicator completion rate based on the first operating condition disturbance deviation correction coefficient to obtain the second indicator completion rate for each of the set indicators.

7. The standardized pilot-scale verification platform as described in claim 5, characterized in that, The standardized pilot-scale verification platform includes: A laboratory validation branch, comprising the standard operating condition disturbance injection module, for injecting standard operating condition disturbances into the defect detection equipment when the defect detection equipment is operating on the laboratory validation branch; and... The pilot-scale verification branch includes a simulated operating condition disturbance injection module. When the defect detection equipment is running on the pilot-scale verification branch, the simulated operating condition disturbance injection module injects operating condition disturbances into the defect detection equipment based on simulated operating condition disturbances to simulate the real operating condition disturbance environment that the defect detection equipment will be used in, so that the defect detection equipment can perform defect detection on the standard defect display panel to output second detection defect data.

8. The standardized pilot-scale verification platform as described in claim 7, characterized in that, The unified evaluation module is also used to evaluate the completion rate of the third indicator of each set indicator of the defect detection equipment under the real working condition disturbance environment, based on the second detected defect data and the actual defect data. The report generation module is also used to generate an evaluation report for the defect detection equipment based on the completion rate of the third indicator of the set indicators corresponding to the multiple set indicators.

9. The standardized pilot-scale verification platform as described in claim 8, characterized in that, The unified evaluation module is also used to: determine the second operating condition disturbance deviation correction coefficient based on the standard operating condition disturbance and the simulated operating condition disturbance, and correct the third indicator completion degree of each set indicator based on the second operating condition disturbance deviation correction coefficient to obtain the fourth indicator completion degree of each set indicator. The report generation module is also used to generate an evaluation report for the defect detection equipment based on the completion rate of the fourth indicator of the set indicators corresponding to the multiple set indicators.

10. The standardized pilot-scale verification platform as described in claim 9, characterized in that, When the defect detection equipment is running on the laboratory verification branch, if the completion rate of the second indicator of the set indicator meets the experimental setting requirements, it is confirmed that the defect detection equipment can be run on the pilot verification branch. When the defect detection equipment is running on the pilot test line, if the completion rate of the fourth indicator of the set indicators meets the application setting requirements, it is confirmed that the defect detection equipment can be applied to the real working condition disturbance environment.

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