Dynamic nanometer scraping printing device and method based on voice coil electrode

Abstract

The invention discloses a dynamic nanometer scraping printing device based on a voice coil electrode and a dynamic nanometer scraping printing method based on the voice coil electrode. The dynamic nanometer scraping and printing device comprises an electric translation table, an electric translation table sliding block, a sample table, a silicon rubber pad, a voice coil motor guide rail, a voice coil motor sliding block, a voice coil motor fixed coil, a voice coil motor movable coil, a voice coil motor movable coil adapter, a voice coil motor controller, a grating reading head, a grating ruler, a leveling device, a heat insulation block, an angle adjusting piece, a heating block and a mold clamp. And a scraping printing mold and a force sensor. The voice coil motor and the force sensor are introduced on the basis of traditional dynamic nanometer scraping printing equipment, the actual contact force serves as a feedback variable, the output force of the voice coil motor is adjusted in real time through a control system based on an FPGA, the contact force between a scraping printing mold and a sample can be kept constant in the machining process, and the machining precision is improved. The defect that a traditional preset load or displacement control mode cannot compensate material and temperature changes is overcome.

Description

Technical Field

[0001] This invention belongs to the field of micro-nano fabrication technology and relates to a dynamic scraping device, specifically a dynamic nano-scraping device and method based on voice coil electrodes. Background Technology

[0002] Flexible polymer films have wide applications in flexible electronics, flexible sensing, and other technological fields. Unique properties can be obtained by fabricating micro- and nano-structures on their surfaces. Dynamic nanoinscribing (DNI) technology uses a silicon template with a grating pattern, heated to the glass transition temperature of the polymer film to be processed, and utilizes the edges of the grating pattern to continuously and efficiently fabricate large-area micro- and nano-grating structures. Applying different processing forces significantly affects the morphology of the grating structure; therefore, maintaining a constant processing pressure during the process is crucial for the resulting structural morphology.

[0003] Current dynamic nanoprinting devices use preset pressure, which cannot control the processing force during processing. Minor changes in the material surface and friction during processing will cause changes in the contact force, thus failing to ensure a constant processing force, which in turn affects the morphology of the processed structure and the uniformity of the pattern. Summary of the Invention

[0004] The purpose of this invention is to provide a dynamic nano-scraping device and method based on voice coil electrodes, which can maintain a constant processing force during the dynamic nano-scraping process.

[0005] The objective of this invention is achieved through the following technical solution:

[0006] A dynamic nano-scraping device based on voice coil electrodes includes an electric translation stage, an electric translation stage slider, a sample stage, a silicone rubber pad, a voice coil motor, a grating reading head, a grating ruler, a leveling device, a heat insulation block, an angle adjustment component, a heating block, a mold fixture, a scraping mold, and a force sensor, wherein:

[0007] The voice coil motor includes a voice coil motor guide rail, a voice coil motor slider, a voice coil motor fixed coil, a voice coil motor moving coil, a voice coil motor moving coil adapter, and a voice coil motor controller.

[0008] The sample stage is horizontally mounted on the slider of the electric translation stage, and a force sensor is provided between the sample stage and the slider of the electric translation stage.

[0009] The slider of the electric translation stage is horizontally mounted on the electric translation stage;

[0010] The silicone rubber pad is mounted on the sample stage;

[0011] One side of the angle adjustment component is connected to the moving coil of the voice coil motor via a heat insulation plate, and the other side of the angle adjustment component is connected to the scraping mold via a heating block.

[0012] The scraping mold is mounted on the mold fixture, and the mold fixture is mounted on the heating block;

[0013] The grating ruler is mounted on the slider of the voice coil motor, and the slider of the voice coil motor moves together with the moving coil motor via the rotating coil of the voice coil motor.

[0014] The voice coil motor's coil fixing and leveling devices are connected;

[0015] The moving coil of the voice coil motor is driven to move linearly by the magnetic force of the stationary coil of the voice coil motor.

[0016] The output terminal of the voice coil motor controller is connected to the winding lead of the moving coil of the voice coil motor;

[0017] The grating reading head and the voice coil motor guide rail are fixedly installed. A voice coil motor slider is installed on the voice coil motor guide rail and slides up and down along the voice coil motor guide rail.

[0018] A method for achieving controllable processing force using the above-mentioned dynamic nano-scraping device includes the following steps:

[0019] Step 1: Heating the squeegee mold:

[0020] The squeegee is installed on the mold fixture, and the temperature of the heating block is adjusted by the temperature control box to the glass phase transition temperature of the film to be processed. The heating block is used to heat the squeegee.

[0021] Step 2, Set the target force:

[0022] Step 2-1: Set the target force in the host computer and send the force value signal to the FPGA-based control system;

[0023] Step 2-2: The FPGA performs PID calculations based on the force value measured by the force sensor and outputs an analog signal value to the voice coil motor controller.

[0024] Steps 2-3: The voice coil motor controller operates in three modes: current mode, displacement mode, and speed mode. When the voice coil motor controller is set to current mode, the FPGA sends analog values ​​to the controller. The internal current loop of the controller then outputs a stable current based on the analog values, controlling the output force of the voice coil motor. When the controller is set to speed mode or position mode, it receives the values ​​from the grating reading head and controls the position or speed of the moving coil of the voice coil motor. During the machining process, current mode is used.

[0025] Step 3, Processing procedure:

[0026] Step 3-1: Place the film to be processed on a silicone rubber pad, and send a serial port command through the host computer to control the linear motion of the electric translation stage, so that the film to be processed can be moved at a speed of 0.1~40mm / s.

[0027] Step 3-2: The squeegee contacts the surface of the film to be processed with a set target force at a cutting angle with a negative front angle, and moves across the surface of the film to be processed. The film to be processed undergoes plastic flow at the glass phase transition temperature to form a grating structure.

[0028] Compared with the prior art, the present invention has the following advantages:

[0029] 1. This invention introduces a voice coil motor and a force sensor into the traditional dynamic nano-scraping equipment. Using the actual contact force as a feedback variable, the output force of the voice coil motor is adjusted in real time through an FPGA-based control system. This can maintain a constant contact force between the scratching mold and the sample during the processing, overcoming the shortcomings of traditional preset load or displacement control methods that cannot compensate for changes in materials and temperature.

[0030] 2. This invention performs dynamic nano-scraping under constant force conditions. The scratching depth is mainly determined by the processing force, the degree of material softening, and the geometry of the mold. This avoids local overcutting or under-processing caused by fluctuations in contact force, making the depth and morphology of the micro-nano structure on the film surface more uniform.

[0031] 3. This invention uses a silicone rubber pad of appropriate hardness on the sample platform to ensure that the film fits tightly against the mold, thus avoiding uneven processing depth caused by the mold and material not being on the same plane. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of a dynamic nano-scraping device based on voice coil electrodes.

[0033] Figure 2 This is a system information flow diagram;

[0034] Figure 3 This is a schematic diagram of the processing structure;

[0035] Figure 4 This is a schematic diagram illustrating the processing principle;

[0036] Figure 5 Electron micrograph of PET surface;

[0037] Figure 6 This is a light microscope image of the PET surface. Detailed Implementation

[0038] The technical solution of the present invention will be further described below with reference to the accompanying drawings, but it is not limited thereto. Any modifications or equivalent substitutions to the technical solution of the present invention that do not depart from the spirit and scope of the technical solution of the present invention should be covered within the protection scope of the present invention.

[0039] This invention provides a dynamic nano-scraping device based on voice coil electrodes, such as... Figure 1 As shown, the dynamic nano-scraping device includes an electric translation stage 1, an electric translation stage slider 2, a sample stage 3, a silicone rubber pad 4, a voice coil motor guide rail 5, a voice coil motor slider 6, a grating reading head 7, a grating ruler 8, a leveling device 9, a voice coil motor fixed coil 10, a voice coil motor moving coil 11, a voice coil motor moving coil adapter 12, a heat insulation block 13, an angle adjustment component 14, a heating block 15, a mold clamp 16, a scraping mold 17, a force sensor 18, and a voice coil motor controller, wherein:

[0040] The sample stage 3 is connected to the electric translation stage slider 2 via a force sensor 18. The electric translation stage slider 2 is horizontally mounted on the electric translation stage 1.

[0041] The silicone rubber pad 4 is installed on the sample stage 3, and the sample to be processed is placed flat on the silicone rubber pad 4.

[0042] One side of the angle adjustment component 14 is connected to the voice coil motor moving coil adapter 12 via the heat insulation plate 13, and the other side of the angle adjustment component 14 is connected to the scraping mold 17 via the heating block 15.

[0043] The squeegee 17 is mounted on the squeegee 16, and the squeegee 16 is mounted on the heating block 15;

[0044] The grating ruler 8 is mounted on the voice coil motor slider 6, and the voice coil motor slider 6 moves together with the voice coil motor moving coil 11 through the voice coil motor moving coil adapter 12.

[0045] The voice coil motor stator 10 is connected to the leveling device 9;

[0046] The moving coil 11 of the voice coil motor is driven by the magnetic force of the fixed coil 10 of the voice coil motor to perform linear motion.

[0047] The output terminal of the voice coil motor controller is connected to the winding lead of the moving coil 10 of the voice coil motor;

[0048] The grating reading head 7 and the voice coil motor guide rail 5 are fixedly installed. A voice coil motor slider 6 is installed on the voice coil motor guide rail 5, and the voice coil motor slider 6 slides up and down along the voice coil motor guide rail 5.

[0049] The working principle is as follows:

[0050] By using a silicon template with a grating pattern, heating it to the glass phase transition temperature of the polymer film to be processed, and then using the edges of the grating pattern to scratch the surface of the polymer film with a certain processing force, the material undergoes plastic deformation without material removal, thereby processing a grating structure.

[0051] The implementation method of controllable processing force is as follows:

[0052] (1) Heating of the printing mold: The heating block 15 is heated by a thermocouple and contains a thermistor for temperature measurement. The temperature of the heating block 15 is controlled by a temperature control box and adjusted to the glass phase transition temperature of the film to be processed to heat the printing mold 17.

[0053] (2) Setting the target force: The host computer sets the target force and sends the force value signal to the FPGA development system. The FPGA performs PID calculation based on the force value measured by the force sensor and outputs an analog signal value to the voice coil motor controller. The voice coil motor controller can operate in current mode, displacement mode, or speed mode. When the voice coil motor controller is set to current mode, the FPGA sends an analog value to the voice coil motor controller. The internal current loop of the voice coil motor controller stabilizes the current output based on the analog current output to control the output force of the voice coil motor. When the mode is changed to speed mode or position mode, the voice coil motor controller controls the position or speed of the moving coil of the voice coil motor by receiving the value of the grating reading head. During the processing, the current mode is used for processing.

[0054] (3) Processing procedure: such as Figure 3 As shown, the thin film sample is placed on the silicone rubber pad 4. A serial port command is sent from the host computer to control the linear motion of the electric translation stage 1, moving the sample at a certain speed. The squeegee 17, at a negative rake angle, contacts the sample surface with a set force and scratches the sample surface. At the glass phase transition temperature, the sample undergoes plastic flow, forming a grating structure, as shown... Figure 5 and Figure 6 As shown.

Claims

1. A dynamic nano-scratching device based on voice coil electrodes, characterized in that... The dynamic nano-scraping device includes an electric translation stage, an electric translation stage slider, a sample stage, a silicone rubber pad, a voice coil motor, a grating reading head, a grating ruler, a leveling device, a heat insulation block, an angle adjustment component, a heating block, a mold fixture, a scraping mold, and a force sensor, wherein: The voice coil motor includes a voice coil motor guide rail, a voice coil motor slider, a voice coil motor fixed coil, a voice coil motor moving coil, a voice coil motor moving coil adapter, and a voice coil motor controller. The sample stage is horizontally mounted on the slider of the electric translation stage, and a force sensor is provided between the sample stage and the slider of the electric translation stage. The slider of the electric translation stage is horizontally mounted on the electric translation stage; The silicone rubber pad is mounted on the sample stage; One side of the angle adjustment component is connected to the moving coil of the voice coil motor via a heat insulation plate, and the other side of the angle adjustment component is connected to the scraping mold via a heating block. The scraping mold is mounted on the mold fixture, and the mold fixture is mounted on the heating block; The grating ruler is mounted on the slider of the voice coil motor, and the slider of the voice coil motor moves together with the moving coil motor via the rotating coil of the voice coil motor. The voice coil motor's coil fixing and leveling devices are connected; The moving coil of the voice coil motor is driven to move linearly by the magnetic force of the stationary coil of the voice coil motor. The output terminal of the voice coil motor controller is connected to the winding lead of the moving coil of the voice coil motor; The grating reading head and the voice coil motor guide rail are fixedly installed. A voice coil motor slider is installed on the voice coil motor guide rail and slides up and down along the voice coil motor guide rail.

2. The dynamic nano-scratching device based on voice coil electrodes according to claim 1, characterized in that... The heating block is heated by a thermocouple and contains a thermistor for temperature measurement.

3. A method for achieving controllable processing force using the dynamic nano-scraping device based on voice coil electrodes as described in any one of claims 1-2, characterized in that... The method includes the following steps: Step 1: Heating the squeegee mold: The squeegee is installed on the mold fixture, and the temperature of the heating block is adjusted by the temperature control box to the glass phase transition temperature of the film to be processed. The heating block is used to heat the squeegee. Step 2, Set the target force: Step 2-1: Set the target force in the host computer and send the force value signal to the FPGA-based control system; Step 2-2: The FPGA performs PID calculations based on the force value measured by the force sensor and outputs an analog signal value to the voice coil motor controller. Steps 2-3: The voice coil motor controller operates in three modes: current mode, displacement mode, and speed mode. When the voice coil motor controller is set to current mode, the FPGA sends analog values ​​to the controller. The internal current loop of the controller then outputs a stable current based on the analog values, controlling the output force of the voice coil motor. When the controller is set to speed mode or position mode, it receives the values ​​from the grating reading head and controls the position or speed of the moving coil of the voice coil motor. During the machining process, current mode is used. Step 3, Processing procedure: Step 3-1: Place the film to be processed on a silicone rubber pad, and send a serial port command through the host computer to control the linear motion of the electric translation stage, thereby moving the film to be processed. Step 3-2: The squeegee contacts the surface of the film to be processed with a set target force at a cutting angle with a negative front angle, and moves across the surface of the film to be processed. The film to be processed undergoes plastic flow at the glass phase transition temperature to form a grating structure.

4. The method for achieving controllable processing force using a dynamic nano-scraping device based on voice coil electrodes according to claim 3, characterized in that... In step 3-1, the moving speed is 0.1~40mm / s.

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