Lens thermal aberration simulation method and device, electronic equipment and storage medium
By constructing a lens simulation model and fitting the temperature and stress distribution of the lens, the problems of computational efficiency and accuracy in lens thermal aberration analysis were solved, and efficient and accurate lens thermal aberration calculation was achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-12
- Publication Date
- 2026-04-07
AI Technical Summary
Current technologies for lens thermal aberration analysis require experimental testing, which results in low computational efficiency and insufficient accuracy.
By constructing a lens simulation model, determining the thermal load data of the finite element geometric model, performing thermal simulation, fitting the temperature distribution, thermal deformation, and thermal stress distribution of the lens, and combining the refractive index and surface shape changes, calculating the thermal aberration of the lens.
This improves the accuracy and efficiency of calculating lens thermal aberration and reduces testing costs.
Smart Images
Figure CN121809138A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of semiconductor design and manufacturing, in particular to a lens thermal aberration simulation method and device, an electronic device and a storage medium. BACKGROUND
[0002] With the rapid development of semiconductor technology, the quality requirement of photolithography imaging is higher and higher, and the pros and cons of photolithography imaging quality are directly related to the control effect of thermal aberration of the projection lens. The thermal aberration of the projection lens is also called lens thermal effect, which mainly refers to that when transmitting the deep ultraviolet illumination light required by the photolithography process, due to the inevitable absorption of part of the deep ultraviolet light energy and the conversion into heat energy, non-uniform temperature change is generated in the lens, which reduces the optical performance of the lens and further affects the imaging quality. In the prior art, the thermal effect analysis of photolithography imaging usually needs to build a lens test bench, load different forms and different doses of light sources for the lens through experimental test, adjust the external environment temperature, and then analyze the change of the optical performance of the lens caused by the temperature field change by means of an optical imaging sensor.
[0003] However, the method of analyzing the thermal aberration of the lens by experimental test not only needs to build a special lens test bench, but also needs the operator to participate in each link of the experimental test, the test result is easily affected by the external environment and the accuracy of the sensor, and there is a problem of low calculation efficiency and calculation accuracy of the thermal aberration. SUMMARY
[0004] Therefore, the purpose of the present application is to provide a lens thermal aberration simulation method and device, an electronic device and a storage medium to overcome at least one of the above defects.
[0005] In a first aspect, an embodiment of the present application provides a lens thermal aberration simulation method, comprising: constructing a lens simulation model, determining thermal load data of each grid node in a finite element geometric model corresponding to the lens simulation model; performing thermal simulation on the finite element geometric model with thermal load data to determine a first distribution result for characterizing the exposure temperature distribution of the lens; determining a second distribution result for characterizing the exposure thermal deformation distribution of the lens and a third distribution result for characterizing the thermal stress distribution according to the first distribution result; fitting each distribution result respectively to determine a first fitting result for characterizing the change of the refractive index of the lens with temperature, a second fitting result for characterizing the face shape change of the lens, and a third fitting result for characterizing the change of the refractive index of the lens with thermal stress; determining a first aberration of the lens simulation model affected by different factors during exposure according to all fitting results, and determining the thermal aberration of the lens according to the first aberration.
[0006] Optionally, each distribution result can be fitted separately in the following ways: based on the first distribution result and the preset refractive index fitting equation, the refractive index change of each lens in the lens caused by temperature change is fitted to obtain the first fitting result; based on the second distribution result and the preset surface shape fitting equation, the surface shape change of each lens in the lens is fitted to obtain the second fitting result; based on the third distribution result and the preset lens stress refractive index parameter, the refractive index change of each lens in the lens caused by thermal stress change is fitted to obtain the third fitting result.
[0007] Optionally, based on all fitting results, the first aberration of the lens simulation model under the influence of different factors during exposure is determined, including: updating the lens simulation model and performing thermal aberration simulation based on the first fitting result to determine the first aberration under the influence of temperature factors; updating the lens simulation model and performing thermal aberration simulation based on the second fitting result to determine the first aberration under the influence of thermal deformation factors; and updating the lens simulation model and performing thermal aberration simulation based on the third fitting result to determine the first aberration under the influence of thermal stress variation factors.
[0008] Optionally, based on the first distribution result, a second distribution result for characterizing the thermal deformation distribution of the lens under exposure and a third distribution result for characterizing the thermal stress distribution are determined, including: performing thermal deformation simulation on the finite element geometric model based on the first distribution result to determine the second distribution result and the third distribution result respectively.
[0009] Optionally, the thermal aberration of the lens can be determined based on the first aberration by: determining the second aberration of the lens simulation model before exposure; and determining the thermal aberration based on the second aberration and the first aberration affected by different factors during exposure.
[0010] Optionally, the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model is determined, including: performing lens irradiance distribution simulation on the lens simulation model to determine irradiance distribution data; converting the irradiance distribution data into thermal load data, and assigning the thermal load data to the corresponding mesh node in the finite element geometric model to determine the thermal load data of each mesh node.
[0011] Optionally, the method also includes: determining whether the thermal aberration meets the preset optical specifications; if it does not meet the preset optical specifications, then optimizing the lens simulation model.
[0012] Secondly, embodiments of this application also provide a lens thermal aberration simulation device, the device comprising: The thermal load determination module is used to construct the lens simulation model and determine the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model. The thermal simulation module is used to perform thermal simulation on a finite element geometric model with thermal load data to determine the first distribution result used to characterize the lens exposure temperature distribution. The distribution determination module is used to determine, based on the first distribution result, a second distribution result for characterizing the thermal deformation distribution of the lens during exposure and a third distribution result for characterizing the thermal stress distribution. The result fitting module is used to fit each distribution result separately to determine the first fitting result for characterizing the change of the lens's refractive index with temperature, the second fitting result for characterizing the change of the lens's surface shape, and the third fitting result for characterizing the change of the lens's refractive index with thermal stress. The thermal aberration determination module is used to determine the first aberration of the lens simulation model under the influence of different factors during exposure based on all fitting results, so as to determine the thermal aberration of the lens based on the first aberration.
[0013] Thirdly, embodiments of this application also provide an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the lens thermal aberration simulation method described above are performed.
[0014] Fourthly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the lens thermal aberration simulation method described above.
[0015] The embodiments of this application bring the following beneficial effects: The present application provides a lens thermal aberration simulation method, device, electronic device, and storage medium that can determine the changes in different physical properties of a lens under the influence of deep ultraviolet light by fitting each distribution result, and then accurately calculate the thermal aberration of the lens based on the changes. Compared with the lens thermal aberration simulation methods in the prior art, this solves the problems of high testing cost and low testing accuracy of thermal aberration.
[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 A flowchart of the lens thermal aberration simulation method provided in an embodiment of this application is shown; Figure 2 A flowchart illustrating the steps for determining thermal load data provided in an embodiment of this application is shown; Figure 3 A flowchart illustrating the steps for determining the fitting results provided in the embodiments of this application is shown; Figure 4 A schematic diagram of the lens thermal aberration simulation device provided in an embodiment of this application is shown; Figure 5 A schematic diagram of the structure of the electronic device provided in the embodiments of this application is shown. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.
[0020] Based on this, this application provides a lens thermal aberration simulation method to improve the accuracy and efficiency of thermal aberration calculation.
[0021] To facilitate understanding of this embodiment, the following description uses the lens thermal aberration simulation method provided in this application embodiment applied to a terminal device as an example to illustrate each of the exemplary steps provided in this application embodiment. The terminal device is equipped with multiple software programs, and the lens thermal aberration is determined through collaborative simulation among these multiple software programs.
[0022] Please see Figure 1 , Figure 1 This is a flowchart illustrating a lens thermal aberration simulation method provided in an embodiment of this application. Figure 1As shown, the lens thermal aberration simulation method provided in this application includes: Step S101: Construct a lens simulation model and determine the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model.
[0023] In practical implementation, based on the preset optical requirements, the optical model, optomechanical structure and environmental control model of the lens are designed in the simulation software, and the lens simulation model is output based on the designed optical model, optomechanical structure and environmental control model.
[0024] Among them, optical requirements include, but are not limited to: optical specifications, size constraints, and environmental constraints. Optical specifications include, but are not limited to: wavelength, NA, wave aberration, astigmatism, distortion, magnification, and telecentricity. Size constraints include, but are not limited to: object-image working distance and total length. Environmental constraints include, but are not limited to: whether nitrogen is used.
[0025] Lens simulation models can be built collaboratively using multiple software programs. Lens simulation models include optical models, optomechanical structures, and environmental control models.
[0026] The optical model can be constructed using the optical analysis software CodeV. The optical model includes the lens geometry, lens material, lens number, and aperture. The lens geometry includes multiple lenses, each with a corresponding first lens name and ID. Each lens also includes multiple mirrors, each with a first mirror name and ID. The optomechanical structure design and environmental control design can be performed using CAD software. The core of the optomechanical structure design is "using optical performance as the goal and mechanical structure as the means," requiring a balance between multiple constraints such as accuracy, stability, lightweighting, and cost. Environmental control design involves the precise adjustment, stable control, and effective monitoring of key environmental parameters (such as temperature, humidity, cleanliness, air pressure, airflow, and harmful gas concentration) in a specific space to meet the functional requirements of the target scenario.
[0027] After constructing the lens simulation model, the thermal load data of each mesh node in the corresponding finite element geometric model can be determined.
[0028] The following reference Figure 2 This section will introduce the process of determining thermal load data.
[0029] Figure 2 A flowchart illustrating the steps for determining thermal load data provided in an embodiment of this application is shown, as follows: Figure 2 As shown, the steps for determining thermal load data include: Step S201: Perform lens irradiance distribution simulation on the lens simulation model to determine the irradiance distribution data.
[0030] In the simulation analysis software (Lighttools), load the lens simulation model and set the light source parameters. After setting the light source parameters, use the loaded lens simulation model and the set light source parameters to simulate the lens irradiance distribution to obtain the irradiance distribution data on each lens during exposure. The irradiance distribution data on each lens is represented by the irradiance received by all microparticles on each detection cross section.
[0031] The light source parameters include, but are not limited to: light source type, optical origin, light source energy, light source divergence angle, number of detection sections, size of detection sections, number of micro-elements on a single detection section, and size of the micro-elements. Furthermore, the spacing between detection sections is set to be less than or equal to the global mesh size of the finite element geometric model in the ANSYS-Mesh software, and the size of the micro-elements is set to be less than or equal to the global mesh size of the finite element geometric model in the ANSYS-Mesh software.
[0032] After completing the calculation of irradiance distribution data, a data conversion macro program for the Lighttools software was written. This macro program was used to export the irradiance data received by all microparticles obtained by the Lighttools software in ASCII code format.
[0033] Step S202: Convert the irradiance distribution data into thermal load data, and assign the thermal load data to the corresponding mesh nodes in the finite element geometric model to determine the thermal load data of each mesh node.
[0034] In ANSYS-SpaceClaim software, the lens simulation model is loaded, simplified, and a finite element geometric model is obtained. The origin of the finite element geometric model is then set. Each lens includes multiple mirror surfaces. A second lens name and second lens ID can be set for each lens in the finite element geometric model, and a second mirror surface name and second mirror surface ID can be set for each mirror surface of each lens to obtain the processed finite element geometric model.
[0035] In ANSYS-Mesh software, the processed finite element geometric model is loaded, the global mesh size is set, and the finite element geometric model is meshed to obtain the finite element mesh. The position information of each mesh node in the finite element geometric model is determined, and the position information of each mesh node is exported in ASCII code format.
[0036] In the mathematical calculation software (Matlab), the coordinates and irradiance distribution data of the micro-particles on each detection section set in the Lighttools software are loaded, while the position information of each mesh node in the ANSYS-Mesh software is obtained. The irradiance distribution data is converted into thermal load data using a linear interpolation method, and the converted thermal load data is assigned to the corresponding mesh nodes in the finite element geometric model to determine the thermal load data of each mesh node. The thermal load data, including the position information of each mesh node, is output in ASCII code format.
[0037] Step S102: Perform thermal simulation on the finite element geometric model with thermal load data to determine the first distribution result used to characterize the lens exposure temperature distribution.
[0038] In the specific implementation, a first macro program is written in the ANSYS-APDL software. The first macro program reads the thermal load data, which includes the position information of each grid node, output by the mathematical calculation software (Matlab) into the finite element software (ANSYS), and loads the thermal load data onto the grid nodes of the corresponding finite element geometric model in the ANSYS software according to the position information of each grid node.
[0039] In ANSYS software, set the lens material properties, such as thermal conductivity, material density, coefficient of thermal expansion, and specific heat capacity. Load the finite element mesh (the ANSYS-Mesh mesh obtained by meshing the finite element geometric model in ANSYS-Mesh software), and then call the ANSYS-Thermal module and the ANSYS-Structural module in sequence, and connect the ANSYS-Thermal module and the ANSYS-Structural module through thermo-solid coupling.
[0040] When calling the ANSYS-Thermal module, the initial temperature of all mesh nodes on each lens and the thermal simulation boundary conditions are set in the ANSYS-Thermal module. The thermal simulation boundary conditions are used to characterize the lens position that is not affected by temperature. The thermal simulation boundary conditions include the convective heat transfer coefficient of the lens surface, the ambient temperature around the lens, the temperature at the connection between the lens and the frame, and the support form between the lens and the frame.
[0041] Then, based on the initial temperature and thermal simulation boundary conditions of each grid node, thermal simulation is performed on the finite element geometric model with assigned thermal load data, and the first distribution result is output. The first distribution result is used to characterize the temperature distribution of each lens during exposure.
[0042] Step S103: Based on the first distribution result, determine the second distribution result used to characterize the thermal deformation distribution of the lens during exposure and the third distribution result used to characterize the thermal stress distribution.
[0043] When calling the ANSYS-Structural module, the first distribution result is loaded in the ANSYS-Structural module, and the static simulation boundary conditions are set. The static simulation boundary conditions are used to characterize the position of the lens that does not deform.
[0044] Then, based on the static simulation boundary conditions and the first distribution results, thermal deformation simulation is performed on the finite element geometric model to determine the second and third distribution results respectively.
[0045] The second distribution result is used to characterize the thermal deformation distribution of each lens in the lens during exposure. Thermal deformation refers to the deformation of the lens surface caused by temperature changes, such as twisting, warping, stretching deformation, local irregular deformation, and tilting (the entire lens surface deflects around a certain axis, rather than changing its shape, such as a plane mirror tilting from a vertical state to a certain angle with the normal).
[0046] Among these, distortion refers to the torsional deformation of a mirror surface around its central axis or in a certain direction, turning a normally curved surface (such as a plane or sphere) into an irregular shape resembling a "spiral surface," resulting in asymmetrical deflection of the normal direction in different areas. Warping refers to the opposite deformation trend between the mirror's edge and center (e.g., a convex center and concave edges, or an overall wavy shape), severely reducing flatness (for plane mirrors) or causing the surface accuracy to deviate from the design value (for spherical / aspherical mirrors). Expansion / shrinkage refers to the uniform expansion and contraction of the mirror's overall dimensions (length, diameter, thickness) with temperature changes; the shape (e.g., curvature, flatness) may remain unchanged, but the absolute dimensions change (e.g., diameter increases / decreases). Localized irregular deformation refers to random, localized unevenness on the mirror surface, with small deformation amplitudes but irregular distribution. Tilt refers to the mirror surface deflecting around a certain axis, rather than changing its shape, such as a plane mirror tilting from a vertical state to an angle with the normal.
[0047] The third distribution result is used to characterize the thermal stress distribution of each lens in the lens during exposure. Thermal stress refers to the internal force generated inside the material when the thermal expansion and contraction trend of the lens surface due to temperature changes is constrained (such as its own structure, external support, and material properties limitations) and cannot freely expand or contract.
[0048] After determining the second and third distribution results, a second macro program of ANSYS-APDL is written in the ANSYS software. The second macro program is used to convert the first, second, and third distribution results calculated in the ANSYS software into ASIG format output. The first, second, and third distribution results are all simulation results.
[0049] Step S104: Fit each distribution result separately to determine the first fitting result for characterizing the change of the lens's refractive index with temperature, the second fitting result for characterizing the change of the lens's surface shape, and the third fitting result for characterizing the change of the lens's refractive index with thermal stress.
[0050] In the specific implementation, the lens simulation model is obtained from the CodeV software and loaded into the Sigfit software. Then, the first, second, and third distribution results are obtained from the ANSYS software and imported into the Sigfit software. In the Sigfit software, relevant settings for polynomial fitting are performed, such as setting the illumination wavelength. Finally, the Sigfit solver is selected to fit the first, second, and third distribution results, determining the first, second, and third fitting results.
[0051] The following reference Figure 3 This section will introduce the process of determining the fitting results.
[0052] Figure 3 A flowchart illustrating the steps for determining the fitting result provided in the embodiments of this application is shown, as follows: Figure 3 As shown, the steps for determining the fitting result include: Step S301: Based on the first distribution result and the preset refractive index fitting equation, fit the refractive index change of each lens in the lens caused by temperature change to obtain the first fitting result.
[0053] In the Sigfit solver, select the Thermo-optic polynomial fitting module for the photothermal model. Load the first distribution result in ASIG format into this module, and set the wavelength refractive index fitting equation, the photothermal refractive index fitting equation, and the first finite element perturbation parameters for the optical materials. Then, couple the first lens ID with the second lens name, and use both the wavelength refractive index fitting equation and the photothermal refractive index fitting equation as the preset refractive index fitting equation. Using the preset refractive index fitting equation and the first finite element perturbation parameters, perform polynomial fitting on the temperature variation of the refractive index of each lens in the lens under the first distribution result. Finally, output the first fitting result in SEQ format.
[0054] The first fitting result may refer to the first fitting polynomial obtained by fitting, and the first finite element perturbation parameter is used to evaluate the response characteristics of the first fitting polynomial to temperature changes by applying a small parameter change to the input parameters of the first fitting polynomial.
[0055] Step S302: Based on the second distribution result and the preset surface shape fitting equation, fit the surface shape change of each lens in the lens to obtain the second fitting result.
[0056] In the Sigfit solver, select the Polynomial Fitting module. Load the second distribution results in ASIG format into the Polynomial Fitting module, couple the second mirror name in the finite element geometric model with the first mirror ID in the optical model, select the Zernike polynomial fitting algorithm as the preset surface fitting equation, set the second finite element perturbation parameters, and use the preset surface fitting equation and the second finite element perturbation parameters to perform polynomial fitting on the surface shape changes of each lens in the lens under the second distribution results. Finally, output the second fitting results in SEQ format.
[0057] The second fitting result can refer to the second fitting polynomial obtained by fitting. The second finite element perturbation parameter is used to evaluate the response characteristics of the second fitting polynomial to thermal deformation by applying a small parameter change to the input parameter of the second fitting polynomial.
[0058] Step S303: Based on the third distribution result and the preset lens stress refractive index parameters, fit the refractive index change of each lens in the lens caused by thermal stress changes to obtain the third fitting result.
[0059] In the Sigfit solver, select the Thermo-stres module. Load the third distribution results in ASIG format into the Thermo-stres module, and set the preset lens stress refractive index parameters and the third finite element perturbation parameters. Using the preset lens stress refractive index parameters and the third finite element perturbation parameters, perform polynomial fitting on the change of refractive index of each lens in the lens with thermal stress under the third distribution results. Finally, output the third fitting results in SEQ format.
[0060] The third fitting result can refer to the third fitting polynomial obtained by fitting. The third finite element perturbation parameter is used to evaluate the response characteristics of the third fitting polynomial to changes in thermal stress by applying a small parameter change to the input parameter of the third fitting polynomial.
[0061] Step S105: Based on all fitting results, determine the first aberration of the lens simulation model under the influence of different factors during exposure, so as to determine the thermal aberration of the lens based on the first aberration.
[0062] All fitting results include the first fitting result, the second fitting result, and the third fitting result; different factors include temperature factors, thermal deformation factors, and thermal stress factors; the first aberration can refer to the wavefront aberration of the lens during exposure.
[0063] In practice, the lens simulation model is loaded into the CodeV software, the light source parameters are set, and then all fitting results in SEQ format output by the Sigfit software are loaded.
[0064] Then, using the loaded first fitting results, the lens simulation model is updated and aberration simulations are performed in CodeV software to analyze the first aberration caused by temperature changes during exposure. Using the loaded second fitting results, the lens simulation model is updated and aberration simulations are performed in CodeV software to analyze the first aberration caused by thermal deformation during exposure. Using the loaded third fitting results, the lens simulation model is updated and aberration simulations are performed in CodeV software to analyze the first aberration caused by thermal stress changes during exposure.
[0065] After determining the first aberration, the second aberration of the lens simulation model before exposure can be determined. Then, based on the second aberration and the first aberration affected by different factors during exposure, the thermal aberration can be determined. For example, for the first aberration under the influence of each factor, the difference between the first aberration and the second aberration under that factor is determined as the thermal aberration under that factor.
[0066] The second aberration refers to the wavefront aberration of the lens before exposure. The second aberration is obtained by simulation using CodeV software when designing the optical model. It is used to characterize the wavefront aberration of the lens under ideal conditions, that is, the theoretical wavefront aberration that is not affected by thermal factors such as temperature changes.
[0067] After determining the wavelet aberration of the lens, the thermal aberration is compared with a preset threshold to determine whether the thermal aberration meets the preset optical specifications. If the thermal aberration does not meet the preset optical specifications, the lens's optical model, optomechanical structure, and environmental control model are redesigned to optimize the lens simulation model; if the thermal aberration meets the preset optical specifications, the lens simulation model can be used for lens manufacturing.
[0068] The lens thermal aberration simulation method provided in this application can determine the changes in different physical properties of the lens under the influence of deep ultraviolet light by fitting each distribution result, and then accurately calculate the thermal aberration of the lens based on the changes, thus solving the problems of high testing cost and low testing accuracy of thermal aberration.
[0069] Based on the same inventive concept, this application also provides a lens thermal aberration simulation device corresponding to the lens thermal aberration simulation method. Since the principle of the device in this application is similar to the lens thermal aberration simulation method described above in this application, the implementation of the device can refer to the implementation of the method, and the repeated parts will not be described again.
[0070] Please see Figure 4 , Figure 4 This is a schematic diagram of the structure of a lens thermal aberration simulation device provided in an embodiment of this application. Figure 4As shown, the lens thermal aberration simulation device 400 includes: The thermal load determination module 401 is used to construct the lens simulation model and determine the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model. The thermal simulation module 402 is used to perform thermal simulation on a finite element geometric model with thermal load data to determine the first distribution result used to characterize the lens exposure temperature distribution. The distribution determination module 403 is used to determine, based on the first distribution result, a second distribution result for characterizing the thermal deformation distribution of the lens during exposure and a third distribution result for characterizing the thermal stress distribution. The result fitting module 404 is used to fit each distribution result separately to determine a first fitting result for characterizing the change of the refractive index of the lens with temperature, a second fitting result for characterizing the change of the surface shape of the lens, and a third fitting result for characterizing the change of the refractive index of the lens with thermal stress. The thermal aberration determination module 405 is used to determine the first aberration of the lens simulation model under the influence of different factors during exposure based on all fitting results, so as to determine the thermal aberration of the lens based on the first aberration.
[0071] Please see Figure 5 , Figure 5 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 5 As shown, the electronic device 500 includes a processor 510, a memory 520, and a bus 530.
[0072] The memory 520 stores machine-readable instructions executable by the processor 510. When the electronic device 500 is running, the processor 510 and the memory 520 communicate via the bus 530. When the machine-readable instructions are executed by the processor 510, they can perform the operations described above. Figure 1 The steps of the lens thermal aberration simulation method in the method embodiment shown are described in detail in the method embodiment, and will not be repeated here.
[0073] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figure 1 The steps of the lens thermal aberration simulation method in the method embodiment shown are described in detail in the method embodiment, and will not be repeated here.
[0074] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.
[0075] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.
[0076] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0077] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.
[0078] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.
[0079] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A method for simulating lens thermal aberration, characterized in that, include: Construct a lens simulation model and determine the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model; Thermal simulation was performed on the finite element geometric model with thermal load data to determine the first distribution result used to characterize the lens exposure temperature distribution. Based on the first distribution result, a second distribution result for characterizing the thermal deformation distribution of the lens under exposure and a third distribution result for characterizing the thermal stress distribution are determined respectively. For each distribution result, a fitting is performed to determine the first fitting result for characterizing the change of the lens's refractive index with temperature, the second fitting result for characterizing the change of the lens's surface shape, and the third fitting result for characterizing the change of the lens's refractive index with thermal stress. Based on all fitting results, the first aberration of the lens simulation model under the influence of different factors during exposure is determined, and the thermal aberration of the lens is determined based on the first aberration.
2. The method according to claim 1, characterized in that, Each distribution result is fitted separately using the following method: Based on the first distribution result and the preset refractive index fitting equation, the refractive index change of each lens in the lens caused by temperature change is fitted to obtain the first fitting result; Based on the second distribution result and the preset surface shape fitting equation, the surface shape change of each lens in the lens is fitted to obtain the second fitting result; Based on the third distribution result and the preset lens stress refractive index parameters, the refractive index change of each lens in the lens caused by thermal stress is fitted to obtain the third fitting result.
3. The method according to claim 1, characterized in that, The step of determining the first aberration of the lens simulation model under the influence of different factors during exposure based on all fitting results includes: Based on the first fitting result, the lens simulation model is updated and thermal aberration simulation is performed to determine the first aberration under the influence of temperature factors. Based on the second fitting result, the lens simulation model is updated and thermal aberration simulation is performed to determine the first aberration under the influence of thermal deformation factors; Based on the third fitting result, the lens simulation model is updated and thermal aberration simulation is performed to determine the first aberration under the influence of thermal stress variation factors.
4. The method according to claim 1, characterized in that, The step of determining a second distribution result for characterizing the thermal deformation distribution of the lens during exposure and a third distribution result for characterizing the thermal stress distribution based on the first distribution result includes: Based on the first distribution result, thermal deformation simulation is performed on the finite element geometric model to determine the second and third distribution results respectively.
5. The method according to claim 1, characterized in that, The thermal aberration of the lens is determined based on the first aberration in the following manner: Determine the second aberration of the lens simulation model before exposure; The thermal aberration is determined based on the second aberration and the first aberration, which is affected by different factors during exposure.
6. The method according to claim 1, characterized in that, The determination of the thermal load data for each mesh node in the finite element geometric model corresponding to the lens simulation model includes: The lens simulation model is used to simulate the lens irradiance distribution to determine the irradiance distribution data; The irradiance distribution data is converted into thermal load data, and the thermal load data is assigned to the corresponding mesh nodes in the finite element geometric model to determine the thermal load data of each mesh node.
7. The method according to claim 5, characterized in that, The method further includes: Determine whether the thermal aberration meets the preset optical index requirements; If the preset optical performance requirements are not met, the lens simulation model will be optimized.
8. A lens thermal aberration simulation device, characterized in that, include: The thermal load determination module is used to construct a lens simulation model and determine the thermal load data of each mesh node in the finite element geometric model corresponding to the lens simulation model. The thermal simulation module is used to perform thermal simulation on a finite element geometric model with thermal load data to determine the first distribution result used to characterize the lens exposure temperature distribution. The distribution determination module is used to determine, based on the first distribution result, a second distribution result for characterizing the thermal deformation distribution of the lens under exposure and a third distribution result for characterizing the thermal stress distribution. The result fitting module is used to fit each distribution result separately to determine the first fitting result for characterizing the change of the lens's refractive index with temperature, the second fitting result for characterizing the change of the lens's surface shape, and the third fitting result for characterizing the change of the lens's refractive index with thermal stress. The thermal aberration determination module is used to determine the first aberration of the lens simulation model under the influence of different factors during exposure based on all fitting results, so as to determine the thermal aberration of the lens based on the first aberration.
9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus, and the processor executes the machine-readable instructions to perform the steps of the lens thermal aberration simulation method as described in any one of claims 1 to 7.
10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the lens thermal aberration simulation method as described in any one of claims 1 to 7.