Nozzle cleaning device, coating device, nozzle cleaning method, and scraper

Abstract

The invention provides a nozzle cleaning device, a coating device, a nozzle cleaning method and a scraper. In a cleaning member of a nozzle, wear caused by sliding is suppressed, and a reduction in followability with respect to a discharge port of the nozzle is suppressed. The nozzle cleaning device includes: a nozzle cleaning member capable of contacting an end portion of the slit nozzle; and a moving mechanism that moves the nozzle cleaning member in the first direction, the nozzle cleaning member including: a first scraper including a body portion and a thin plate member; a second scraper provided with a body part and a thin plate member; a third scraper provided with a body part and a thin plate member; and a support portion that supports the first scraper, the second scraper, and the third scraper.

Description

[0001] This application is a divisional application of the application filed on January 19, 2021, with application number 202110068004.3 and invention title "Nozzle cleaning device, coating device, nozzle cleaning method and scraper". Technical Field

[0002] The technology disclosed in this application relates to nozzle cleaning devices, coating devices, nozzle cleaning methods, and scrapers. Background Technology

[0003] Conventionally, in order to coat a substrate with a coating liquid, a slit nozzle is typically used, in which the coating liquid is ejected from a slit-shaped outlet. In such a slit nozzle, in order to remove any residue such as coating liquid remaining at the outlet, a cleaning member capable of moving along the outlet of the slit nozzle is used to remove the residue (for example, see Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2013-165137

[0005] As cleaning components for nozzles, rubber components that can follow the shape of the nozzle are often used. However, rubber components experience significant wear due to sliding, leading to a high frequency of replacement. On the other hand, while using hard materials such as PEEK (polyetheretherketone) can suppress wear caused by sliding, it reduces the ability to follow the shape of the nozzle, sometimes resulting in insufficient removal of deposits. Summary of the Invention

[0006] The technology disclosed in this application is proposed in view of the above-mentioned problems, and is a technology for suppressing wear caused by sliding in the cleaning member of the nozzle and suppressing the reduction of the followability relative to the nozzle outlet.

[0007] A first aspect of the technology disclosed in the present application specification is a nozzle cleaning device that cleans an end portion of a slit nozzle provided with a slit-shaped nozzle outlet, wherein the nozzle cleaning device includes: a nozzle cleaning member that is capable of coming into contact with the end portion of the slit nozzle; and a moving mechanism that moves the nozzle cleaning member in a first direction in which the nozzle cleaning member extends along the nozzle outlet of the slit nozzle while the nozzle cleaning member is in contact with the end portion of the slit nozzle, the nozzle cleaning member including: at least one first scraper including a first body portion and a first thin plate member that extends from the first body portion and is capable of coming into contact with a first side surface of the end portion of the slit nozzle from a second direction that intersects the first direction; at least one second scraper including a second body portion and a second thin plate member that extends from the second body portion and is capable of coming into contact with a second side surface of the end portion of the slit nozzle that is opposite the first side surface from the second direction; at least one third scraper including a third body portion and a third thin plate member that extends from the third body portion and is capable of coming into contact with a lower surface of the end portion of the slit nozzle from the second direction; and a support portion that supports the first, second, and third scrapers.

[0008] A second aspect of the technology disclosed in the present application specification is associated with the first aspect, at least one of a thickness of the first thin plate member, a thickness of the second thin plate member, and a thickness of the third thin plate member is thickened as it approaches the corresponding first body portion, second body portion, or third body portion.

[0009] A third aspect of the technology disclosed in the present application specification is associated with the first or second aspect, a portion of at least one of the first thin plate member, the second thin plate member, and the third thin plate member that is continuous with the corresponding first body portion, second body portion, or third body portion and that faces a direction in which the nozzle cleaning member moves is a curved surface.

[0010] A fourth aspect of the technology disclosed in the present application specification is associated with the second aspect, at least one of a thickness of the first thin plate member, a thickness of the second thin plate member, and a thickness of the third thin plate member is thickened as it approaches the corresponding first body portion, second body portion, or third body portion at a radius of curvature of 1 mm or more and 5 mm or less.

[0011] A fifth aspect of the technology disclosed in the present application specification is associated with any one of the first to fourth aspects, at least one of the first thin plate member, the second thin plate member, and the third thin plate member has a Rockwell hardness of R110 or more and R130 or less and has a bending strength of 30 or more and 50 or less.

[0012] The sixth aspect of the technology disclosed in this application is associated with any one of the first to fifth aspects, wherein in the first direction, at least one of the first scraper, the second scraper, and the third scraper is provided in multiple ways.

[0013] The seventh aspect of the technology disclosed in this application is associated with any of the first to sixth aspects, wherein the angle between the face of at least one of the first, second, and third thin plate members in the direction of movement of the nozzle cleaning member and the end of the slit nozzle is an obtuse angle.

[0014] The eighth aspect of the technology disclosed in this application is associated with any of the first to seventh aspects, wherein, in the direction of movement of the nozzle cleaning member, the third thin plate member is located further upstream than the first thin plate member and the second thin plate member.

[0015] The ninth aspect of the technology disclosed in this application includes: a slit nozzle that sprays a coating liquid from a slit-shaped outlet; and the aforementioned nozzle cleaning device.

[0016] The tenth aspect of the technology disclosed in this application is a nozzle cleaning method for cleaning the end of a slit nozzle having a slit-shaped outlet. The nozzle cleaning method includes a step of bringing a nozzle cleaning member capable of contacting the end of the slit nozzle into contact with the end of the slit nozzle, while moving the nozzle cleaning member along a first direction extending from the outlet of the slit nozzle. The nozzle cleaning member includes at least one first scraper, comprising a first body portion and a first thin plate member extending from the first body portion and capable of moving from a direction intersecting the first direction. The fork, i.e., the second direction, contacts the first side of the end of the slit nozzle; at least one second scraper includes: a second body portion; and a second thin plate member extending from the second body portion, and capable of contacting the second side opposite to the first side of the end of the slit nozzle from the second direction; at least one third scraper includes: a third body portion; and a third thin plate member extending from the third body portion, and capable of contacting the lower surface of the end of the slit nozzle from the second direction; and a support portion supporting the first scraper, the second scraper, and the third scraper.

[0017] The eleventh aspect of the technology disclosed in this application is a scraper for cleaning the end of a slit nozzle having a slit-shaped outlet, wherein the scraper comprises: a body portion; and a thin plate member extending from the body portion and capable of contacting the end of the slit nozzle in a direction intersecting the direction of extension of the outlet.

[0018] A twelfth aspect of the technology disclosed in the present specification is associated with the eleventh aspect, in which the width of the thin plate member in a direction intersecting the direction in which the nozzle opening extends narrows as it moves away from the body portion.

[0019] According to the first to tenth aspects of the technology disclosed in the present specification, even if a hard material is used as the cleaning member of the slit nozzle to suppress wear caused by sliding, the thin plate member extending from each body portion can suppress a decrease in followability to the end portion of the slit nozzle.

[0020] According to the eleventh and twelfth aspects of the technology disclosed in the present specification, even if a hard material is used as the cleaning member of the slit nozzle to suppress wear caused by sliding, the thin plate member extending from the body portion can suppress a decrease in followability to the end portion of the slit nozzle.

[0021] Furthermore, the objects, features, aspects and advantages of the technology disclosed in the present specification will become clearer with the following detailed description and accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a perspective view schematically showing a coating apparatus including a nozzle cleaning device according to an embodiment.

[0023] Figure 2 is a perspective view schematically showing Figure 1 a side view of the coating apparatus according to the example shown.

[0024] Figure 3 is a perspective view schematically showing Figure 1 a plan view of the coating apparatus according to the example shown.

[0025] Figure 4 is a side view when the slit nozzle is viewed in the X-axis direction.

[0026] Figure 5 is a side view showing an example of the structure of a nozzle cleaning device according to an embodiment.

[0027] Figure 6 is a perspective view showing an example of the structure of a nozzle cleaning member used in a nozzle cleaning device.

[0028] Figure 7 is a flowchart showing an example of a cleaning process performed by a nozzle cleaning device.

[0029] Figure 8 is a view showing in detail a case where the adherent is removed with the inclined surface and the thin plate member in contact.

[0030] Figure 9is a diagram showing a lip portion and three thin plate members in contact.

[0031] Figure 10 is a perspective view showing a modification of the structure of the nozzle cleaning member used in the nozzle cleaning device.

[0032] Figure 11 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device.

[0033] In the drawings, the reference numerals are explained as follows: 1: coating device 2: slit nozzle 3: substrate 4: stage 5: coating processing section 6: nozzle cleaning device 6A: removal unit 6B: drive unit 6C: cleaning unit 8: control section 20A: upstream end portion 20B: downstream end portion 21: ejection port 22: bottom portion 23: internal flow path 24: lip portion 25: top end surface 26, 26a, 26b: inclined surface 31: upper surface 41: holding surface 51: nozzle support body 51a: fixing member 51b: lifting mechanism 52, 62B: guide rail 53: slit nozzle moving section 54: linear motor 54a: fixed piece 54b: moving piece 55: linear encoder 55a: scale section 55b: detection section 61: nozzle cleaning member 62: support table 62A: base portion 62C: urging member 100: nozzle adjustment region 101: cleaning direction 101A: direction 201: base portion 202: support portion 203A, 203B, 203C: body portion 204A, 204B, 204C: thin plate member 205, 205A, 205B, 205C: scraper 214A: end surface 224A, 234A: surface 300: adherent 651A, 651B: roller 652: endless drive belt 700: flush nozzle DETAILED DESCRIPTION

[0034] Hereinafter, embodiments will be described with reference to the drawings. In the following embodiments, detailed features and the like for technical explanation are shown, but these are merely examples, and not all examples are necessary features to make the embodiments possible.

[0035] Further, the drawings are used to schematically show, and for ease of explanation, omission or simplification of structures is appropriately made for the drawings. Further, the mutual relationship of the size and position of structures and the like shown in different drawings is not necessarily accurately shown, and can be appropriately changed.

[0036] Further, in the explanation given below, the same reference numerals are assigned to the same structural elements, and the name and function thereof are considered to be the same. Therefore, in order to avoid repetition, detailed explanation of these is sometimes omitted.

[0037] Further, in the explanation given below, in the case of "provided with", "including", "having" a certain structural element and the like, unless otherwise stated, it is a non-exclusive expression which does not exclude the presence of other structural elements.

[0038] Further, in the explanation given below, even in the case of using ordinal numbers such as "first" or "second", these terms are used only for ease of understanding the contents of the embodiments, and are not limited to the order generated by these ordinal numbers.

[0039] Further, in the explanation given below, the expression "moving an object in a certain direction" and the like, unless otherwise stated, includes the case of moving the object in parallel in the certain direction, and the case of moving the object in a direction having a component of the certain direction.

[0040] Further, in the explanation given below, even in the case of using terms indicating a certain position or direction such as "upper", "lower", "left", "right", "side", "bottom", "top" or "inner", these terms are used for ease of understanding the contents of the embodiments, and have no relation to the position or direction at the time of actual implementation.

[0041] <First Embodiment>

[0042] Hereinafter, a coating apparatus, a nozzle cleaning apparatus, a scraper, and a nozzle cleaning method related to the present embodiment will be described.

[0043] <Structure of Coating Apparatus>

[0044] Figure 1 is a perspective view schematically showing a coating apparatus related to the present embodiment including a nozzle cleaning apparatus. Further, Figure 2 is a side view schematically showing the coating apparatus of the example shown in Figure 1 . Further, Figure 3 is a plan view schematically showing the coating apparatus of the example shown in Figure 1 . In addition, in Figure 2 and Figure 3 , a part of the structure of the nozzle support body and the like is omitted.

[0045] The coating apparatus 1 is a coating apparatus called a slit coater that coats a coating liquid to an upper surface 31 of a substrate 3 using a slit nozzle 2.

[0046] The coating apparatus 1 can use various coating liquids such as a photoresist liquid for an etching-resistant film, a photoresist liquid for a color filter, a liquid containing a polyimide precursor (polyamic acid), a slurry containing silicon, a nano metal ink, or a conductive material as the coating liquid.

[0047] Further, as the substrate 3 to be coated, various substrates such as a precision electronic device substrate such as a glass substrate for a liquid crystal display device, a semiconductor substrate, a glass substrate for a plasma display panel (PDP), a glass substrate for a photomask, a substrate for a color filter, a substrate for a memory disk, a substrate for a solar cell, a substrate for electronic paper, a rectangular glass substrate, a flexible substrate for a thin film liquid crystal, or a substrate for an organic electroluminescence (EL) can be used.

[0048] In addition, the "upper surface 31 of the substrate 3" refers to a main surface of the two main surfaces of the substrate 3 on which side the coating liquid is coated.

[0049] The coating apparatus 1 has: a stage 4 that can adsorb and hold the substrate 3 in a horizontal posture; a coating treatment section 5 that performs a coating treatment on the substrate 3 held on the stage 4 using the slit nozzle 2; a nozzle cleaning apparatus 6 (refer to Figure 2 and Figure 3 ) that performs a cleaning treatment on the slit nozzle 2 prior to the coating treatment; and a control section 8 that controls the operation of these structures.

[0050] The control section 8 is a structure that controls a control object by executing a program stored in an internal or external storage medium (a volatile or non-volatile memory such as an HDD, a RAM, a ROM, or a flash memory, etc.), and is constituted by, for example, a central processing unit (CPU), a microprocessor, a microcomputer, or the like.

[0051] Figure 4 is a side view of the slit nozzle 2 viewed from the X-axis direction. The slit nozzle 2 has an elongated slit-shaped opening portion, i.e., a discharge port 21, which extends along the X-axis direction. The length of the discharge port 21 is shorter than the overall length of the slit nozzle 2 in the X-axis direction, and the discharge port 21 does not open at both ends of the slit nozzle 2 in the X-axis direction.

[0052] The slit nozzle 2 is capable of discharging a coating liquid from the discharge port 21 toward the upper surface 31 of the substrate 3 held on the stage 4. Specifically, the slit nozzle 2 has a base portion 22 fixedly supported by a nozzle support body 51 (see FIG. 2), an internal flow path 23 that transports a coating liquid supplied from a supply mechanism (not shown) to the discharge port 21, and a lip portion 24 that protrudes downward of the base portion 22. Figure 1

[0053] The lip portion 24 has a flat top end surface 25 provided at a top end (lower end) that protrudes downward of the base portion 22, an inclined surface 26a that connects the top end surface 25 and the base portion 22 formed on the +Y side, and an inclined surface 26b that connects the top end surface 25 and the base portion 22 formed on the -Y side. Hereinafter, the inclined surfaces 26a and 26b are sometimes simply referred to as inclined surfaces 26 without distinguishing between them.

[0054] Thus, when viewed from the length direction, i.e., the X-axis direction, the lip portion 24 has a convex shape with a thin top end, and the discharge port 21 is provided at the top end (lower end) of the convex shape, and each side surface of the convex shape becomes the inclined surface 26.

[0055] If a coating liquid is supplied to the slit nozzle 2 thus configured from the supply mechanism (not shown), the coating liquid is diffused and transported through the internal flow path 23 equally in the length direction (X-axis direction) of the slit nozzle 2, and is discharged downward from the discharge port 21 provided at the top end surface 25 of the lip portion 24.

[0056] Thus, if a coating liquid is discharged from the discharge port 21 of the slit nozzle 2 and a coating operation is performed on the substrate 3, the coating liquid sometimes adheres to the peripheral portion (lip portion 24) of the discharge port 21 of the slit nozzle 2. The adhered coating liquid becomes a residue after drying, and if the residue is left as is, it hinders the coating liquid from being discharged well, or becomes a cause of contamination of a film formed on the substrate 3.

[0057] ​Therefore, in the coating apparatus 1, the removal of the adhering matter (adhering liquid) on the peripheral portion (lip portion 24) of the nozzle outlet 21 as described above is performed by the nozzle cleaning apparatus 6.

[0058] Figure 1 , Figure 2 and Figure 3 The stage 4 of the example shown in the drawing is made of a stone material such as granite having a substantially rectangular parallelepiped shape. In the region on the -Y side in the upper surface (+Z side face) of the stage 4, a holding surface 41 that is processed into a substantially horizontal flat surface to hold the substrate 3 is provided. A plurality of vacuum suction ports (not shown) are dispersedly formed in the holding surface 41. By suctioning the substrate 3 by these vacuum suction ports, the substrate 3 is held in a substantially horizontal state at a predetermined position at the time of coating processing. Note that the holding form of the substrate 3 is not limited to this, and for example, the stage 4 can be configured to hold the substrate 3 in a mechanical manner.

[0059] Further, the nozzle adjustment region 100 is provided in the region on the +Y side from the region occupied by the holding surface 41 of the stage 4. The nozzle cleaning apparatus 6 (refer to FIG. 2) is disposed in the nozzle adjustment region 100. Figure 2 and Figure 3 ).

[0060] In the coating apparatus 1, the moving mechanism described later that moves the slit nozzle 2 in the Y-axis direction is provided in the coating processing section 5, and by this moving mechanism, the slit nozzle 2 can be reciprocally moved between above the holding surface 41 and above the nozzle adjustment region 100.

[0061] Further, during the period in which the slit nozzle 2 is moved above the nozzle adjustment region 100, that is, during the period in which the slit nozzle 2 is not present above the region occupied by the holding surface 41 in the stage 4, the substrate 3 on which the coating processing has been performed is first carried out on the stage 4 and then the substrate 3 on which the coating processing is to be performed is carried in. On the other hand, during the period in which the slit nozzle 2 is moved above the holding surface 41, the coating liquid is coated from the slit nozzle 2 to the upper surface 31 of the substrate 3 on the holding surface 41.

[0062] The moving mechanism of the coating processing section 5 mainly includes a nozzle support 51 of a bridge structure that spans above the stage 4 in the X-axis direction and supports the slit nozzle 2, and a slit nozzle moving section 53 that horizontally moves the nozzle support 51 and the slit nozzle 2 supported thereby along the pair of rails 52 extending in the Y-axis direction.

[0063] The nozzle support 51 has a fixing member 51a that fixes the slit nozzle 2, and two lifting mechanisms 51b that support and lift the fixing member 51a. Note that the fixing member 51a is made of a bar-shaped member of a carbon fiber reinforced resin or the like having a rectangular cross section with the X-axis direction as the length direction.

[0064] Two lifting mechanisms 51b are connected to the two ends of the fixed member 51a along its length, and each has an AC servo motor and a ball screw, etc. Using these lifting mechanisms 51b, the fixed member 51a and the slit nozzle 2 fixed to the fixed member 51a are raised and lowered in the vertical direction (Z-axis direction) to adjust the gap between the nozzle outlet 21 and the substrate 3, that is, the relative height of the nozzle outlet 21 relative to the substrate 3.

[0065] In addition, the vertical position of the fixing member 51a can be detected, for example, by using a linear encoder (not shown here) consisting of a scale part and a detection sensor, wherein the scale part is provided on the side of the lifting mechanism 51b and the detection sensor is provided on the side of the slit nozzle 2 opposite to the scale part.

[0066] like Figure 1 As shown in the example, the nozzle support 51 configured in this way is a bridge structure that is suspended along the X-axis direction at the left and right ends of the stage 4 and spans the holding surface 41. The slit nozzle moving part 53 causes the nozzle support 51 of the bridge structure and the slit nozzle 2 held by the nozzle support 51 to move relative to the substrate 3 held on the stage 4 along the Y-axis direction.

[0067] Specifically, the slit nozzle moving part 53 has a guide rail 52 that guides the movement of the slit nozzle 2 in the Y direction on the ±X side; a linear motor 54 as a drive source; and a linear encoder 55 for detecting the position of the nozzle outlet of the slit nozzle 2.

[0068] like Figure 1 and Figure 2 As shown in the example, the two guide rails 52 extend along the Y-axis at both ends of the stage 4 in the X-axis direction, thus covering the range from the nozzle cleaning position Y1 (i.e., the position where the nozzle cleaning device 6 is installed) to the coating end position Y3 (i.e., the end position on the -Y side of the holding surface 41). Therefore, by guiding the lower ends of the two lifting mechanisms 51b along the two guide rails 52 using the slit nozzle moving part 53, the slit nozzle 2 can be moved between the nozzle cleaning position Y1 and the position opposite to the substrate 3 held on the stage 4.

[0069] In addition, Figure 2 In the diagram, besides the nozzle cleaning position Y1 and the coating end position Y3, the coating start position Y2 is also shown. The coating start position Y2 corresponds to... Figure 3 The example shown is a coating start position Y2 of the coating area RT of substrate 3, corresponding to the end on the +Y side.

[0070] Further, each linear motor 54 is an AC coreless linear motor having a fixed member 54a and a movable member 54b. The fixed member 54a is provided along the Y-axis direction on both sides of the X-axis direction of the stage 4. On the other hand, the movable member 54b is provided outside the lift mechanism 51b. The linear motor 54 functions as a drive source of the slit nozzle moving section 53, and is driven by a magnetic force generated between the fixed member 54a and the movable member 54b.

[0071] Further, the linear encoder 55 has a scale section 55a and a detection section 55b, respectively. The scale section 55a is provided along the Y-axis direction on the lower portion of the fixed member 54a of the linear motor 54 provided to the stage 4. On the other hand, the detection section 55b is provided at a position further outside than the movable member 54b of the linear motor 54 provided to the lift mechanism 51b, and is arranged opposite to the scale section 55a.

[0072] The linear encoder 55 detects the position of the ejection port 21 of the slit nozzle 2 in the Y-axis direction, based on the relative positional relationship between the scale section 55a and the detection section 55b.

[0073] According to the above-described structure, the slit nozzle 2 is able to relatively move along the Y-axis direction in the upper space of the holding surface 41 of the holding base 3 with respect to the holding surface 41. Also, the coating apparatus 1 is able to form a coating layer on the upper surface 31 of the substrate 3 held by the holding surface 41, by relatively moving the slit nozzle 2 while ejecting the coating liquid from the ejection port 21 of the slit nozzle 2.

[0074] Further, a region of a prescribed width from the end portion of each side of the substrate 3 (a region in the shape of a frame) becomes a non-coating region which is not a target of coating by the coating liquid. Also, a rectangular region in the substrate 3 other than the non-coating region becomes a region to be coated by the coating liquid, that is, a coating region RT (refer to FIG. 2). Figure 3 ).

[0075] Therefore, in the interval of the range of the Y-axis direction of the coating region RT of the substrate 3, from the coating start position Y2 (the end portion of the +Y side of the coating region RT) to the coating end position Y3 (the end portion of the -Y side of the coating region RT) in the interval in which the slit nozzle 2 is able to move, the coating liquid is ejected from the ejection port 21.

[0076] Further, during a period in which the stage 4 is not subjected to the coating process during the handover of the substrate 3 between the coating apparatus 1 and the external carrying mechanism, and the like (that is, during a period in which the substrate 3 is carried in and carried out), the slit nozzle 2 retreats to a region which is separated from the holding surface 41 of the holding base 3 to the +Y side, that is, a nozzle adjustment region 100 (corresponding to the state of the example shown in FIG. 1). Figure 1

[0077] ​<Regarding the structure of the nozzle cleaning device>

[0078] Figure 5 This is a side view illustrating an example of the structure of the nozzle cleaning device related to this embodiment. Furthermore, Figure 6 This is a perspective view showing an example of the structure of the nozzle cleaning component used in a nozzle cleaning device.

[0079] The nozzle cleaning device 6 includes: a removal unit 6A for removing deposits attached to the lip 24; and a drive unit 6B for moving the removal unit 6A in the cleaning direction 101 (i.e., the direction in which the nozzle outlet 21 of the slit nozzle 2 extends). The removal unit 6A removes deposits attached to the lip 24 by moving the nozzle cleaning member 61 along the lip 24 of the slit nozzle 2 in the cleaning direction 101.

[0080] Here, the drive unit 6B enables the removal unit 6A to reciprocate along the X-axis direction (i.e., move in the direction of cleaning direction 101 and in the opposite direction). Furthermore, the deposits that become the objects of removal by the removal unit 6A can include various substances that may adhere to the lip 24 of the slit nozzle 2, such as dried and cured solutes of the coating liquid, the coating liquid itself pre-sprayed, or rinsing liquid sprayed into the slit nozzle 2 before the cleaning action is performed by the nozzle cleaning device 6. For example, if the coating liquid is a photoresist for color filters, the pigment contained in the coating liquid becomes a deposit and adheres to the lip 24 of the slit nozzle 2.

[0081] In addition, the nozzle cleaning device 6 includes a cleaning unit 6C for cleaning the nozzle cleaning component 61 (see reference). Figure 3 The cleaning unit 6C supplies cleaning fluid to the nozzle cleaning member 61 after wiping away the deposits attached to the lip 24 of the slit nozzle 2, thereby rinsing away the deposits attached to the nozzle cleaning member 61.

[0082] The removal unit 6A mainly includes: a nozzle cleaning member 61 having a shape corresponding to the lip 24 of the slit nozzle 2; and a support platform 62 supporting the nozzle cleaning member 61.

[0083] When flushing fluid is supplied, the nozzle cleaning member 61 contacts and slides against the end of the slit nozzle 2, thereby removing the flushing fluid from the lip 24 of the slit nozzle 2. This allows the residue adhering to the lip 24 of the slit nozzle 2 to be removed along with the flushing fluid. Specifically, when residue such as dried and cured coating liquid adheres to the inclined surface 26 of the lip 24, the flushing fluid dissolves the residue to a certain extent, and the nozzle cleaning member 61 removes the flushing fluid containing the dissolved residue.

[0084] like Figure 6As shown in the example, the nozzle cleaning member 61 has: a base portion 201 that is capable of being supported by the support table 62; a support portion 202 that is disposed on an upper surface of the base portion 201; a scraper 205A, a scraper 205B, and a scraper 205C that are integrally supported by the support portion 202. Hereinafter, the scraper 205A, the scraper 205B, and the scraper 205C are sometimes not distinguished and simply referred to as "scrapers 205".

[0085] The scraper 205A has: a body portion 203A that is supported by the support portion 202; and two thin plate members 204A that continuously extend from the body portion 203A, respectively. In addition, in the example, the two thin plate members 204A are disposed in the cleaning direction 101, but one thin plate member 204A can be disposed. Figure 6

[0086] An end surface of the thin plate member 204A on the side opposite to the side continuous with the body portion 203A is in contact with the inclined surface 26 (for example, the inclined surface 26a) of the lip portion 24 in substantially parallel with respect to the direction intersecting the cleaning direction 101. Further, both main surfaces of the thin plate member 204A are surfaces that are substantially directed toward the cleaning direction 101 or the opposite direction thereto.

[0087] Further, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thicker as it approaches the body portion 203A. In addition, the thickness of the thin plate member 204A in the cleaning direction 101 is, for example, 1 mm or more and 2 mm or less.

[0088] An angle between the surface of the thin plate member 204A that is substantially directed toward the cleaning direction 101 (that is, the moving direction of the nozzle cleaning member 61) and the inclined surface 26 (for example, the inclined surface 26a) of the lip portion 24 is an obtuse angle (for example, 120°). Further, the portion of the surface of the thin plate member 204A that is directed toward the cleaning direction 101 and that is continuous with the body portion 203A is a curved surface that is curved at a predetermined radius of curvature R (for example, the radius of curvature R is 1 mm or more and 5 mm or less). Since the thin plate member 204A has the curved curved surface, the flow (liquid discharge) of the scraped liquid becomes smooth. Further, it is possible to maintain the strength of the thin plate member 204A when the tip thereof is curved. In other words, it is possible to maintain the strength of the thin plate member 204A and to bend the tip thereof.

[0089] The scraper 205B has: a body portion 203B that is supported by the support portion 202; and two thin plate members 204B that continuously extend from the body portion 203B, respectively. In addition, in the example, the two thin plate members 204B are disposed in the cleaning direction 101, but one thin plate member 204B can be disposed. Figure 6

[0090] ​​The end surface of the thin plate member 204B on the side opposite to the side continuous with the body portion 203B contacts the inclined surface 26 (e.g., inclined surface 26b) on the side opposite to the lip portion 24 substantially in parallel with the direction intersecting the cleaning direction 101. Further, both main surfaces of the thin plate member 204B are surfaces substantially toward the cleaning direction 101 or the opposite direction thereto.

[0091] Further, the thickness of the thin plate member 204B in the cleaning direction 101 becomes thicker as it approaches the body portion 203B. In addition, the thickness of the thin plate member 204B in the cleaning direction 101 is, for example, 1 mm or more and 2 mm or less.

[0092] The angle between the surface of the thin plate member 204B substantially toward the cleaning direction 101 and the inclined surface 26 (e.g., inclined surface 26b) on the side opposite to the lip portion 24 is an obtuse angle (e.g., 120°). Further, the portion of the surface of the thin plate member 204B toward the cleaning direction 101 continuous with the body portion 203B is a curved surface curved at a predetermined radius of curvature R (e.g., the radius of curvature R is 1 mm or more and 5 mm or less). Since the thin plate member 204B has the curved curved surface, the flow (liquid discharge) of the scraped liquid becomes smooth. Further, it is possible to maintain the strength of the thin plate member 204B when the tip thereof is curved. In other words, it is possible to maintain the strength of the thin plate member 204B and to bend the tip thereof.

[0093] The scraper 205C has: a body portion 203C supported by the support portion 202; and three thin plate members 204C continuously extending from the body portion 203C, respectively. In addition, in the Figure 6 In the above, the thin plate members 204C are provided in plurality in the cleaning direction 101, but the thin plate members 204C can be provided in one.

[0094] The end surface of the thin plate member 204B on the side opposite to the side continuous with the body portion 203B contacts the inclined surface 26 (e.g., inclined surface 26b) on the side opposite to the lip portion 24 substantially in parallel with the direction intersecting the cleaning direction 101. Further, both main surfaces of the thin plate member 204B are surfaces substantially toward the cleaning direction 101 or the opposite direction thereto.

[0095] Further, the thickness of the thin plate member 204B in the cleaning direction 101 becomes thicker as it approaches the body portion 203B. In addition, the thickness of the thin plate member 204B in the cleaning direction 101 is, for example, 1 mm or more and 2 mm or less.

[0096] An angle between the face of the thin plate member 204C facing the substantially cleaning direction 101 and the inclined face 26 (e.g., the inclined face 26b) on the opposite side of the lip 24 is an obtuse angle (e.g., 120°). Further, the portion of the face of the thin plate member 204C facing the cleaning direction 101 that is continuous with the body portion 203C is a curved face that is curved with a predetermined radius of curvature R (e.g., the radius of curvature R is 1 mm or more and 5 mm or less). Since the thin plate member 204C has the curved curved face, the flow (liquid discharge) of the scraped liquid becomes smooth. Further, it is possible to maintain the strength of the thin plate member 204C when the tip thereof is bent. In other words, it is possible to maintain the strength of the thin plate member 204C and bend the tip thereof.

[0097] Further, at least one of the plurality of thin plate members 204C provided is more upstream of the cleaning direction 101 (i.e., the rear side of the removal unit 6A advancing along the cleaning direction 101) than the thin plate member 204A and the thin plate member 204B. Further, the width of the thin plate member 204C in the direction intersecting the cleaning direction 101 narrows as it departs from the body portion 203C.

[0098] Each of the scrapers 205 is made of a resin such as PEEK (polyether ether ketone), PPS (polyphenylene sulfide), or PET (polyethylene terephthalate), or the like. Alternatively, each of the scrapers 205 has, for example, a Rockwell hardness of R110 or more and R130 or less, and preferably a Rockwell hardness of R120. Alternatively, each of the scrapers 205 has a bending strength of 30 or more and 50 or less, and preferably a bending strength of 41.

[0099] The support portion 202 supports the body portions 203A, 203B, and 203C in a manner that fixes the relative positional relationship therebetween, but each of the body portions 203A, 203B, and 203C is capable of adjusting the position with respect to the support portion 202. In the case where the support portion 202 integrally supports the body portions 203A, 203B, and 203C, the position adjustment of the plurality of scrapers 205 can be performed at the same time, and thus the position adjustment is simplified.

[0100] In particular, the body portions 203A and 203B are connected to the support portion 202 via a screw, a bolt, or the like, and are supported so as to be swingable with respect to the support portion 202 in the Y-axis direction.

[0101] The nozzle cleaning member 61 of the above-described structure is detachably fixed to the support table 62 by a bolt or the like.

[0102] Figure 5The support table 62 illustrated has a base 62A below the base portion 201 of the nozzle cleaning member 61. Also, the base portion 201 of the nozzle cleaning member 61 is supported by the base 62A so as to be able to be raised and lowered. That is, the support table 62 is provided with a guide rail 62B that is provided so as to extend in the Z-axis direction from the upper surface of the base 62A, and a biasing member 62C (for example, a compression spring) that is provided between the base 62A and the base portion 201.

[0103] Also, the guide rail 62B guides movement of the base portion 201 in the Z-axis direction, and the biasing member 62C biases the base portion 201 upward relative to the base 62A. Therefore, the nozzle cleaning member 61 including the base portion 201 is pushed upward by the biasing of the biasing member 62C.

[0104] Furthermore, the base 62A of the support table 62 is attached to the drive unit 6B. The drive unit 6B has a pair of rollers 651A and 651B that are disposed on both outer sides of the slot nozzle 2 in the X-axis direction, and an endless drive belt 652 that is suspended from the rollers 651A and 651B. Also, the base 62A of the support table 62 is attached to the upper surface of the endless drive belt 652.

[0105] The drive unit 6B thus configured rotates the rollers 651A and 651B to drive the upper surface of the endless drive belt 652 in the X-axis direction, and moves the nozzle cleaning member 61 along with the support table 62 in the X-axis direction (specifically, the cleaning direction 101).

[0106] Also, the nozzle cleaning device 6 thus configured causes the nozzle cleaning member 61 to approach the lip portion 24 of the slot nozzle 2 in the nozzle cleaning position Y1 from below, and moves the nozzle cleaning member 61 in the cleaning direction 101, thereby cleaning the lip portion 24 of the slot nozzle 2.

[0107] <About the Action of the Nozzle Cleaning Device>

[0108] Figure 7 is a flowchart that shows an example of the cleaning processing performed by the nozzle cleaning device. Figure 7 The flowchart of is executed by the control section 8 controlling each of the action sections of the coating device 1.

[0109] First, the drive unit 6B is driven, and the removal unit 6A is moved to the cleaning start position P1 (corresponding to the upstream end portion 20A of the lip portion 24 of the slot nozzle 2 in the cleaning direction 101) (step ST101 of Figure 7 The cleaning start position P1 is set corresponding to the upstream end portion 20A of the lip portion 24 of the slot nozzle 2 in the cleaning direction 101, and in a state in which the removal unit 6A is positioned at the cleaning start position P1, the nozzle cleaning member 61 is opposed to the upstream end portion 20A of the lip portion 24 from below (at the same position as Figure 5

[0110] ​Furthermore, since the nozzle outlet 21 is shorter than the full length of the lip 24 of the slit nozzle 2 in the X-axis direction, nozzle outlet 21 is not provided at either end of the slit nozzle 2 in the X-axis direction, i.e., at the upstream end 20A and downstream end 20B in the cleaning direction 101. That is, in step ST101, the nozzle cleaning member 61 is opposite to the upstream end 20A of the lip 24 of the slit nozzle 2, which is further upstream in the cleaning direction 101 than the nozzle outlet 21.

[0111] Furthermore, in step ST101, the slit nozzle 2 is in the upper position, and the upstream end 20A of the lip 24 and the nozzle cleaning member 61 opposite thereto are separated in the Z-axis direction.

[0112] If the removal unit 6A completes its movement to the cleaning start position P1, then the slit nozzle 2 sprays a predetermined amount of coating liquid from the spray outlet 21. Figure 7 (Step ST102). The purpose of spraying the coating liquid here is to fill the entire area of ​​the nozzle 21 with the coating liquid after the cleaning process and before performing the coating process, but this spraying is not necessary.

[0113] Next, the slit nozzle 2 is lowered to a lower position than the upper position. Figure 7 (Step ST103). As the slit nozzle 2 begins to descend, the gap between the lip 24 of the slit nozzle 2 and the nozzle cleaning member 61 narrows, and the end face of the thin plate member 204A opposite to the side continuous with the body portion 203A and the end face of the thin plate member 204B opposite to the side continuous with the body portion 203B contact the two inclined surfaces 26 of the lip 24. Furthermore, the end face of the thin plate member 204C opposite to the side continuous with the body portion 203C contacts the top surface 25 of the lip 24.

[0114] Then, the slit nozzle 2 descends further, pressing the nozzle cleaning member 61 downward against the force applied by the force-applying member 62C. Therefore, with the force applied by the force-applying member 62C, the end faces of the sheet members 204A and 204B press against the two inclined surfaces 26 of the lip 24. Furthermore, with the force applied by the force-applying member 62C, the end face of the sheet member 204C presses against the top surface 25 of the lip 24.

[0115] Next, the drive unit 6B drives the removal unit 6A in the cleaning direction 101, thereby moving the nozzle cleaning member 61 in the cleaning direction 101 (step ST104).

[0116] While the end faces of the thin plate components 204A, 204B and 204C are in contact with the lip 24, the nozzle cleaning member 61 moves in the cleaning direction 101 to scrape the coating liquid sprayed downward from the spray outlet 21 of the slit nozzle 2 and level the lower part of the coating liquid filling the spray outlet 21 along the cleaning direction 101.

[0117] Then, if the removal unit 6A reaches the cleaning end position P2, the nozzle cleaning member 61 moves to a position further downstream of the slit nozzle 2 in the cleaning direction 101, and the drive unit 6B stops the removal unit 6A (step ST105).

[0118] Figure 8 is a view that shows in detail the case in step ST104 in which the inclined surface 26a and the thin plate member 204A are brought into contact to remove the adherent (e.g., the liquid in which the coating liquid adhering to the slit nozzle 2 and dried and solidified is dissolved in the coating liquid for lubrication). In addition, the thin plate member 204B and the thin plate member 204C are in almost the same state of contact with the lip 24.

[0119] As shown in the example of Figure 8 The end surface 214A of the thin plate member 204A on the side opposite to the side continuous with the body portion 203A is in contact with the inclined surface 26a of the lip 24 substantially in parallel with the direction 101A intersecting the cleaning direction 101.

[0120] In addition, the thickness of the thin plate member 204A in the cleaning direction 101 becomes thicker as it approaches the body portion 203A. In particular, the surface 234A of the portion of the surface 224A of the thin plate member 204A continuous with the body portion 203A toward the cleaning direction 101 is a curved surface curved with a predetermined radius of curvature R. In addition, the angle Θ between the surface 224A and the inclined surface 26a is obtuse.

[0121] As described above, if the nozzle cleaning member 61 moves in the cleaning direction 101 in the state in which the inclined surface 26a and the thin plate member 204A are in contact, the adherent 300 adhering to the lip 24 of the slit nozzle 2 is scraped by the thin plate member 204A and removed.

[0122] At this time, the thickness of the thin plate member 204A in the cleaning direction 101 is thinner on the side of the end surface 214A, and thus the thin plate member 204A is slightly curved although it is formed of a hard material. On the other hand, the thickness of the thin plate member 204A in the cleaning direction 101 is thicker on the side continuous with the body portion 203A, and thus the decrease in the strength of the thin plate member 204A is suppressed. Thus, the thin plate member 204A can suppress the abrasion caused by sliding and can deform according to the shape of the lip 24 of the slit nozzle 2, thereby effectively scraping the adherent 300. In addition, according to the thin plate member 204A, the damage to the lip 24 of the slit nozzle 2 can also be suppressed.

[0123] In addition, the angle Θ between the surface 224A and the inclined surface 26a is obtuse, and thus the adherent 300 flows smoothly from the side of the thin plate member 204A of the scraper 205A to the side of the body portion 203A. Thus, the liquid discharge property is improved.

[0124] Further, since the face 234A is curved in accordance with the predetermined radius of curvature R, it is possible to inhibit the adhering matter 300 scraped from remaining at the root of the thin plate member 204A (i.e., the portion where the thin plate member 204A and the body portion 203A are continuous), and to allow the adhering matter 300 scraped to flow smoothly. Thus, the squeegee 205A itself is inhibited from being contaminated and is also easy to clean.

[0125] Figure 9 is a view showing the state in which the lip portion 24 and the three thin plate members are in contact in the step ST104 of the above procedure.

[0126] As shown in the example of Figure 9 The two inclined faces 26 of the lip portion 24 are in contact with the squeegee 205A and the squeegee 205B, respectively, and the top face 25 of the lip portion 24 is in contact with the squeegee 205C.

[0127] Further, the width of the squeegee 205C (specifically, the thin plate member) in the direction intersecting the cleaning direction 101 narrows as it departs from the body portion side. In addition, the width of the top end portion of the squeegee 205C (specifically, the thin plate member) is set to be wider than the width of the discharge port provided to the top face 25.

[0128] In this case, if viewed from the direction along the cleaning direction 101, the squeegee 205C is arranged partly overlapping the squeegee 205A and the squeegee 205B, and since these squeegees 205 are arranged staggered in the cleaning direction 101, they do not come into contact with each other.

[0129] Here, in order to inhibit the scraping failure of the coating liquid, at least one of the width D1, the width D2, and the width D3 of the end face of the squeegee 205 that is in contact with the lip portion 24 can be set to be wider than the width of the corresponding lip portion 24. Specifically, the width D1 of the end face of the squeegee 205A can be set to be wider than the width of the inclined face 26 of the lip portion 24 with which the squeegee 205A is in contact, the width D2 of the end face of the squeegee 205B can be set to be wider than the width of the inclined face 26 of the lip portion 24 with which the squeegee 205B is in contact, or the width D3 of the end face of the squeegee 205C can be set to be wider than the width of the top face 25 of the lip portion 24 with which the squeegee 205C is in contact.

[0130] <SECOND EMBODIMENT>

[0131] Hereinafter, a coating apparatus, a nozzle cleaning apparatus, a squeegee, and a nozzle cleaning method related to the present embodiment will be described. In the following description, the same reference numerals are assigned to the same structural elements as those described in the above embodiment, and detailed description thereof will be appropriately omitted.

[0132] <STRUCTURE OF NOZZLE CLEANING APPARATUS>

[0133] Figure 10 is a perspective view showing a modification example of the structure of the nozzle cleaning member used in the nozzle cleaning device. As shown in the example of Figure 10 , the nozzle cleaning member 61A is provided with a base portion 201, a support portion 202, a scraper 205A, a scraper 205B, a scraper 205C, and a flushing nozzle 700.

[0134] The flushing nozzle 700 supplies flushing liquid supplied from a not-shown flushing liquid supply source below the base portion 201 to the slit nozzle 2.

[0135] <About the operation of the nozzle cleaning device>

[0136] Figure 11 is a flowchart showing an example of the cleaning process performed by the nozzle cleaning device. Figure 11 The flowchart of is executed by the control section 8 controlling the respective operation sections of the coating device.

[0137] First, the removal unit 6A is moved to the cleaning start position Pl by the driving unit 6B (step ST101). The cleaning start position Pl is set in correspondence with the upstream end portion 2 OA of the cleaning direction 101 of the lip portion 24 of the slit nozzle 2, and in a state where the removal unit 6A is located at the cleaning start position Pl, the nozzle cleaning member 61 opposes the upstream end portion 2 OA of the lip portion 24 from below (at the same position as Figure 11 ). Figure 5

[0138] In addition, since the ejection port 21 is shorter than the full length of the lip portion 24 of the slit nozzle 2 in the X-axis direction, the ejection port 21 is not provided at each of the both ends of the slit nozzle 2 in the X-axis direction, that is, the upstream end portion 2 OA and the downstream end portion 2 OB of the cleaning direction 101. That is, in the step ST101, the nozzle cleaning member 61 opposes the upstream end portion 2 OA of the lip portion 24 of the slit nozzle 2 on the upstream side of the cleaning direction 101 than the ejection port 21.

[0139] Further, in the step ST101, the slit nozzle 2 is located at the upper position, and the upstream end portion 2 OA of the lip portion 24 and the nozzle cleaning member 61 opposing thereto are separated in the Z-axis direction.

[0140] If the movement of the removal unit 6A to the cleaning start position Pl is completed, then the slit nozzle 2 is caused to descend to a lower position lower than the upper position (step ST102). Figure 11 ​the gap between the lip 24 of the slit nozzle 2 and the nozzle cleaning member 61 narrows, and the end surface of the thin plate member 204A on the side opposite the side continuous with the body portion 203A and the end surface of the thin plate member 204B on the side opposite the side continuous with the body portion 203B contact the two inclined surfaces 26 of the lip 24. Further, the end surface of the thin plate member 204C on the side opposite the side continuous with the body portion 203C contacts the top surface 25 of the lip 24.

[0141] Then, the slit nozzle 2 is further lowered, and the nozzle cleaning member 61 is pressed downward by the force of the force applying member 62C. Thus, by the force of the force applying member 62C, the end surfaces of the thin plate member 204A and the thin plate member 204B are pressed against the two inclined surfaces 26 of the lip 24. Further, by the force of the force applying member 62C, the end surface of the thin plate member 204C is pressed against the top surface 25 of the lip 24.

[0142] When the lowering of the slit nozzle 2 is completed, the rinse liquid is supplied from a not-illustrated rinse liquid supply source to the gap between the lip 24 of the slit nozzle 2 and the nozzle cleaning member 61 (step ST106). The amount of the rinse liquid supplied per unit time is preferably an amount such that the liquid surface of the rinse liquid is maintained at a position higher than the top surface 25 of the lip 24 and the rinse liquid adheres to the inclined surfaces 26 of the lip 24. In addition, various liquids can be used as the rinse liquid, and, for example, a solvent that constitutes the coating liquid can be used. In this case, a solution in which a solute is dissolved in the solvent, i.e., the rinse liquid, becomes the coating liquid.

[0143] Next, the removal unit 6A is driven by the drive unit 6B in the cleaning direction 101, and the nozzle cleaning member 61 is moved in the cleaning direction 101 (step ST104). During the movement of the nozzle cleaning member 61, the supply of the rinse liquid to the gap between the lip 24 and the nozzle cleaning member 61 is continued.

[0144] The nozzle cleaning member 61 that moves in the cleaning direction 101 while the end surfaces of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C contact the lip 24 removes the adhering matter (e.g., a liquid in which the coating liquid adhering to the slit nozzle 2 after drying and solidification is dissolved in the coating liquid for lubrication) from the inclined surfaces 26 and the top surface 25 of the lip 24.

[0145] Then, when the removal unit 6A reaches the cleaning end position P2 and the nozzle cleaning member 61 is moved to a position on the downstream side of the slit nozzle 2 in the cleaning direction 101, the drive unit 6B stops the removal unit 6A (step ST105). Further, the supply of the rinse liquid is also stopped (step ST107).

[0146] <Effects of the Embodiment>

[0147] Next, examples of effects according to the above-described embodiments are shown. Furthermore, in the following description, the effects are described based on the specific structures of the examples shown in the above-described embodiments, but other specific structures of the examples shown in the present specification can be used instead insofar as the same effects are produced.

[0148] According to the above-described embodiments, the nozzle cleaning device 6 is provided with the removal unit 6A having the nozzle cleaning member 61 and the moving mechanism. Here, the moving mechanism is, for example, a mechanism corresponding to the driving unit 6B. The nozzle cleaning member 61 is capable of contacting the end portion of the slit nozzle 2. The driving unit 6B moves the nozzle cleaning member 61 in a direction in which the nozzle cleaning member 61 extends along the ejection port 21 of the slit nozzle 2, i.e., a first direction, while contacting the end portion of the slit nozzle 2. Here, the first direction is, for example, a direction corresponding to the cleaning direction 101 and a direction opposite thereto. The nozzle cleaning member 61 is provided with at least one first scraper, at least one second scraper, at least one third scraper, and a support portion 202. Here, the first scraper is, for example, a member corresponding to the scraper 205A. Furthermore, the second scraper is, for example, a member corresponding to the scraper 205B. Furthermore, the third scraper is, for example, a member corresponding to the scraper 205C. The scraper 205A is provided with a first body portion and a first thin plate member. Here, the first body portion is, for example, a member corresponding to the body portion 203A. Furthermore, the first thin plate member is, for example, a member corresponding to the thin plate member 204A. The thin plate member 204A extends from the body portion 203A. Furthermore, the thin plate member 204A can contact a first side surface of the end portion of the slit nozzle 2 from a direction intersecting the first direction, i.e., a second direction. Here, the second direction is, for example, a direction corresponding to the direction 101A. Furthermore, the first side surface is, for example, a surface corresponding to the inclined surface 26a or the like. The scraper 205B is provided with a second body portion and a second thin plate member. Here, the second body portion is, for example, a member corresponding to the body portion 203B. Furthermore, the second thin plate member is, for example, a member corresponding to the thin plate member 204B. The thin plate member 204B extends from the body portion 203B. Furthermore, the thin plate member 204B can contact a second side surface of the end portion of the slit nozzle 2 from the second direction opposite the first side surface. Here, the second side surface is, for example, a surface corresponding to the inclined surface 26b or the like. The scraper 205C is provided with a third body portion and a third thin plate member. Here, the third body portion is, for example, a member corresponding to the body portion 203C. Furthermore, the third thin plate member is, for example, a member corresponding to the thin plate member 204C. The thin plate member 204C extends from the body portion 203C. Furthermore, the thin plate member 204C can contact a lower surface (top end surface 25) of the end portion of the slit nozzle 2 from the second direction. The support portion 202 supports the scraper 205A, the scraper 205B, and the scraper 205C.

[0149] According to this structure, even in the case where the hard material is used as the cleaning member of the slit nozzle 2 to suppress the abrasion caused by the sliding, the followability to the ejection port 21 of the slit nozzle 2 can be suppressed by the thin plate member extending from each body portion. Further, specifically, the adherent of the surrounding portion of the ejection port 21 is removed by each of the scrapers 205A, 205B, and 205C being in contact with and sliding on the ejection port 21 of the slit nozzle 2, and thus even in the case where the shape of the lip portion 24 of the slit nozzle 2 is changed, the adherent can be removed by adjusting the position of each scraper with respect to the support portion 202, flexibly adapting to the shape of the lip portion 24.

[0150] Further, even in the case where the other structures of the examples shown in the present specification are appropriately added to the above-described structure, that is, in the case where the other structures in the present specification not mentioned as the above-described structure are appropriately added, the same effects can be obtained.

[0151] Further, according to the above-described embodiment, at least one of the thickness of the thin plate member 204A, the thickness of the thin plate member 204B, and the thickness of the thin plate member 204C is thickened as approaching the corresponding body portion 203A, 203B, or 203C. According to this structure, the thickness of the thin plate member in the cleaning direction 101 is relatively thin on the side of the end surface, and thus the thin plate member is slightly curved. On the other hand, the thickness of the thin plate member in the cleaning direction 101 is relatively thick on the side continuous with the body portion, and thus the decrease in the strength of the thin plate member is suppressed. Therefore, the thin plate member can suppress the abrasion caused by the sliding and deform according to the shape of the lip portion 24 of the slit nozzle 2, thereby effectively scraping the adherent.

[0152] Further, according to the above-described embodiment, at least one of the thickness of the thin plate member 204A, the thickness of the thin plate member 204B, and the thickness of the thin plate member 204C is thickened as approaching the corresponding body portion 203A, 203B, or 203C, with a curvature radius of 1 mm or more and 5 mm or less. According to this structure, the adherent scraped can be prevented from being stagnated at the root of the thin plate member, and the adherent scraped can be smoothly flowed. Therefore, the scraper itself is suppressed from being contaminated and is also easy to clean. Further, by adjusting the curvature radius R, the strength of the thin plate member and the degree of curvature of the thin plate member can be adjusted. Specifically, if the curvature radius R is large, the strength of the thin plate member is increased, and if the curvature radius R is small, the degree of curvature of the thin plate member is increased.

[0153] Further, according to the above-described embodiment, at least one of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C has a Rockwell hardness of R110 or more and R130 or less, and has a bending strength of 30 or more and 50 or less. According to this structure, the thin plate member suppresses wear caused by sliding, and deforms according to the shape of the lip portion 24 of the slit nozzle 2, thereby being able to effectively scrape off the adherent.

[0154] Further, according to the above-described embodiment, at least one of the scraper 205A, the scraper 205B, and the scraper 205C is provided in the first direction. According to this structure, it is possible to increase the amount of adherent that can be removed by one sliding of the removal unit 6A.

[0155] Further, according to the above-described embodiment, an angle that is formed between a face of at least one of the thin plate member 204A, the thin plate member 204B, and the thin plate member 204C that faces a direction in which the nozzle cleaning member 61 moves, and an end portion of the slit nozzle 2 is an obtuse angle. According to this structure, the adherent flows smoothly from one side of the thin plate member to one side of the body portion, thereby improving the drainage property.

[0156] Further, according to the above-described embodiment, the thin plate member 204C is located more upstream in the direction in which the nozzle cleaning member 61 moves than the thin plate member 204A and the thin plate member 204B. According to this structure, for the adherent that is scraped off by the thin plate member 204A and the thin plate member 204B to the top end face 25 of the lip portion 24, it is also possible to effectively remove the adherent by the thin plate member 204C that is located behind the removal unit 6A that advances in the cleaning direction 101.

[0157] Further, according to the above-described embodiment, the coating device 1 is provided with: the slit nozzle 2 that ejects the coating liquid from a slit-shaped ejection port 21; and the above-described nozzle cleaning device. According to this structure, even in a case where a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear caused by sliding, it is possible to suppress a decrease in followability with respect to the ejection port 21 of the slit nozzle 2 by the thin plate member that extends from each body portion.

[0158] According to the above-described embodiment, in the nozzle cleaning method, there is provided a process of moving the nozzle cleaning member 61 that is capable of contacting the end portion of the slit nozzle 2 in contact with the end portion of the slit nozzle 2, while extending in a direction in which the nozzle cleaning member 61 extends along the ejection port 21 of the slit nozzle 2, that is, a first direction. Here, the nozzle cleaning member 61 is provided with at least one scraper 205A, at least one scraper 205B, at least one scraper 205C, and a support portion 202.

[0159] According to this structure, even in the case where a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear caused by sliding, it is possible to suppress a decrease in followability with respect to the discharge port 21 of the slit nozzle 2 by the thin plate member extending from each body portion.

[0160] In addition, the order of performing each process can be changed without particular limitation.

[0161] Further, according to the above-described embodiment, the wiper 205C is provided with: a body portion 203C; a thin plate member 204C extending from the body portion 203C and capable of contacting an end portion of the slit nozzle 2 from a direction intersecting a direction in which the discharge port 21 extends. According to this structure, even in the case where a hard material is used as the cleaning member of the slit nozzle 2 to suppress wear caused by sliding, it is possible to suppress a decrease in followability with respect to the discharge port 21 of the slit nozzle 2 by the thin plate member 204C extending from the body portion 203C.

[0162] Further, according to the above-described embodiment, the width of the thin plate member 204C in the direction intersecting the direction in which the discharge port 21 extends narrows as it moves away from the body portion 203C. According to this structure, interference between the thin plate member 204C and the thin plate members 204A and 204B is avoided, and if the width of the side of the thin plate member 204C continuous with the body portion 203C is enlarged, it is possible to suppress a decrease in strength of the thin plate member 204C.

[0163] <Variations on the above-described embodiment>

[0164] In the above-described embodiment, it is described that the thin plate members 204A, 204B, and 204C thicken in thickness as they approach the corresponding body portions, but a thin plate member that does not thicken in thickness as it approaches the corresponding body portion can also be included.

[0165] Further, in the above-described embodiment, it is described that the thin plate members 204A, 204B, and 204C thicken in thickness as they approach the corresponding body portions according to a predetermined radius of curvature R, but a thin plate member that does not thicken in thickness as it approaches the corresponding body portion can also be included.

[0166] Further, in the above-described embodiment, it is described that the angle between the face of the thin plate members 204A, 204B, and 204C facing the cleaning direction 101 and the lip portion 24 is obtuse, but a thin plate member in which this angle is not obtuse can also be included.

[0167] Further, in the above-described embodiment, the thin plate members 204A, 204B, and 204C are integrally supported and used, but it can be a case where only any one of the thin plate members 204A, 204B, and 204C is provided.

[0168] Further, in the above-described embodiment, the material, the material, the size, the shape, the relative arrangement relationship, or the condition of implementation of each structural element, and the like are sometimes described, but these are one example in all aspects and are not limited to the content described in the present application.

[0169] Therefore, within the technical scope disclosed in the present application, an infinite number of modifications and equivalents that are not examples can be foreseen. For example, a case where at least one structural element is changed includes a case where it is added or omitted.

[0170] Further, in the above-described embodiment, in a case where a material name or the like is described without being particularly specified, it is assumed that other additives, for example, an alloy or the like, are contained in the material as long as there is no contradiction.

Claims

1. A nozzle cleaning device which cleans the end portion of a slit nozzle provided with a slit-like discharge port, wherein The nozzle cleaning device includes: a nozzle cleaning member capable of contacting the end portion of the slit nozzle; and a moving mechanism configured to move the nozzle cleaning member in a first direction along which the nozzle cleaning member extends along the nozzle outlet of the slit nozzle while the nozzle cleaning member contacts the end portion of the slit nozzle, the nozzle cleaning member includes: at least one first scraper including a first body portion and a first thin plate member extending from the first body portion and capable of contacting a first side surface of the end portion of the slit nozzle from a second direction intersecting the first direction; at least one second scraper including a second body portion and a second thin plate member extending from the second body portion and capable of contacting a second side surface of the end portion of the slit nozzle from the second direction opposite the first side surface; at least one third scraper including a third body portion and a third thin plate member extending from the third body portion and capable of contacting a lower surface of the end portion of the slit nozzle from the second direction; and a support portion supporting the first, second, and third scrapers.

2. The nozzle cleaning device according to claim 1, wherein at least one of a thickness of the first thin plate member, a thickness of the second thin plate member, and a thickness of the third thin plate member is thicker as closer to the corresponding first body portion, second body portion, or third body portion.

3. The nozzle cleaning device according to claim 1 or 2, wherein a portion of a surface of at least one of the first thin plate member, the second thin plate member, and the third thin plate member facing a direction in which the nozzle cleaning member moves, which is continuous with the corresponding first body portion, second body portion, or third body portion, is a curved surface.

4. The nozzle cleaning device according to claim 2, wherein at least one of a thickness of the first thin plate member, a thickness of the second thin plate member, and a thickness of the third thin plate member is thicker as closer to the corresponding first body portion, second body portion, or third body portion, at a curvature radius of 1 mm or more and 5 mm or less.

5. The nozzle cleaning device according to claim 1 or 2, wherein at least one of the first thin plate member, the second thin plate member, and the third thin plate member has a Rockwell hardness of R110 or more and R130 or less, and has a bending strength of 30 or more and 50 or less.

6. The nozzle cleaning device according to claim 1 or 2, wherein in the first direction, at least one of the first scraper, the second scraper, and the third scraper is provided in a plurality.

7. The nozzle cleaning device according to claim 1 or 2, wherein an angle between a surface of at least one of the first thin plate member, the second thin plate member, and the third thin plate member facing a direction in which the nozzle cleaning member moves, and the end portion of the slit nozzle is obtuse.

8. The nozzle cleaning device according to claim 1 or 2, wherein ​ ​ The third thin plate member is more upstream than the first thin plate member and the second thin plate member in a direction in which the nozzle cleaning member moves.

9. A coating apparatus wherein, Possessing: a slit nozzle that ejects a coating liquid from a slit-shaped ejection port; and The nozzle cleaning apparatus according to claim 1 or 2.

10. A nozzle cleaning method which cleans the end portion of a slit nozzle provided with a slit-like discharge port, wherein The nozzle cleaning method possesses: a process of moving a nozzle cleaning member that is capable of contacting an end portion of the slit nozzle, in contact with the end portion of the slit nozzle, in a first direction in which the nozzle cleaning member extends along the ejection port of the slit nozzle, The nozzle cleaning member possesses: at least one first scraper that possesses: a first body portion; and a first thin plate member that extends from the first body portion and is capable of contacting a first side surface of the end portion of the slit nozzle from a second direction that intersects the first direction; at least one second scraper that possesses: a second body portion; and a second thin plate member that extends from the second body portion and is capable of contacting a second side surface of the end portion of the slit nozzle that is opposite the first side surface from the second direction; at least one third scraper that possesses: a third body portion; and a third thin plate member that extends from the third body portion and is capable of contacting a lower surface of the end portion of the slit nozzle from the second direction; and a support portion that supports the first scraper, the second scraper, and the third scraper.

11. A wiper for cleaning the end portion of a slot nozzle provided with a slot-like discharge port, wherein The scraper possesses: a body portion; and a thin plate member that extends from the body portion and is capable of contacting the end portion of the slit nozzle from a direction that intersects a direction in which the ejection port extends.

12. The scraper according to claim 11, wherein a width of the thin plate member in the direction that intersects the direction in which the ejection port extends narrows as it moves away from the body portion.

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