Asymmetric ploughing tool, inclined microarray structure fin and preparation method of inclined microarray structure fin

By combining the plowing forming surface and linear cutting edge of the asymmetric plowing cutter, the accuracy and efficiency problems of microstructure array fins are solved, and the efficient and precise fabrication of tilted microarray structures is achieved, which is applicable to a variety of metal materials.

CN121820706APending Publication Date: 2026-04-10ANHUI UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-04
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

Existing technologies suffer from low processing precision, low efficiency, and high cost when fabricating microstructure array fins, especially in hard materials where it is difficult to achieve efficient and precise tilt angle control and microstructure consistency.

Method used

By employing an asymmetric plowing tool, a combination of plowing-shaped surface and linear cutting edge processing is used to achieve local shearing and plastic deformation of the workpiece surface, forming inclined micro-array structure fins. Combined with the precise control of the CNC spindle, the fabrication of the micro-structure array can be completed in a single feed.

Benefits of technology

It improves processing accuracy and efficiency, with tilt angle control accuracy reaching ±1.5°, microstructure height uniformity reaching over 95%, significantly improves fin surface quality and material utilization, reduces surface roughness, and is suitable for a variety of metal materials.

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Abstract

The invention relates to the technical field of functional surface micro-machining, and discloses an asymmetric ploughing cutter, an inclined microarray structure fin and a preparation method thereof.The asymmetric ploughing cutter comprises an asymmetric ploughing part, an inclined microarray structure fin and an inclined microarray structure fin, the asymmetric ploughing part is composed of a top face, a ploughing forming face, a main rear cutter face, an auxiliary rear cutter face, a back face and a bottom face; and the main cutting edge and the auxiliary cutting edge cut the surface layer of the workpiece, so that the cut material flows backwards along the ploughing forming surface, and a micro-groove or micro-ridge prototype corresponding to the main rear cutter surface and the auxiliary rear cutter surface is formed on the surface layer of the workpiece. Compared with the prior art, the machining precision and the machining efficiency can be improved.
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Description

TECHNICAL FIELD

[0001] The present application relates to the field of functional surface microfabrication technology, and particularly to an asymmetric plow cutting tool, an inclined microarray structure fin and a preparation method thereof. BACKGROUND

[0002] In the field of functional surface microfabrication, the inclined microstructure design of the microstructure array fin has multi-dimensional functional advantages, such as realizing directional transport and precise control of high-temperature droplets, effectively strengthening the heat transfer process to improve the heat dissipation efficiency, precisely regulating the microfluid flow behavior, enhancing the interface heat transfer capacity, optimizing the fluid mixing process, and even providing thermal protection function in specific scenarios.

[0003] At present, the common methods for preparing microstructure array fins include laser processing, electric spark processing and micro-milling. Among them, although laser processing can realize high-precision processing, the processing speed is extremely slow, usually less than ten millimeters per minute, and the equipment cost is high, which is difficult to meet the batch production demand. Electric spark processing is suitable for hard materials, but the heat affected zone is large, the surface is seriously ablated, the microstructure edge is melted and the roughness is high, resulting in significant decline in functional performance. Although the micro-milling technology is simple to operate, it needs multiple feedings to form a complete microstructure array, the processing efficiency is less than 40%, the control precision of the inclination angle is poor, the deviation often exceeds two degrees, the microstructure consistency is difficult to guarantee, and the performance fluctuation between batches is large.

[0004] Therefore, how to provide a simple-to-operate, high-precision and high-efficiency microstructure array fin processing equipment and method is a problem to be solved by those skilled in the art. SUMMARY

[0005] The purpose of the present application is to provide an asymmetric plow cutting tool, an inclined microarray structure fin and a preparation method thereof to solve the problems existing in the prior art.

[0006] To achieve the above-mentioned purpose, the present application provides an asymmetric plow cutting tool, comprising: An asymmetric plowshare comprises a top surface, a plowing forming surface, a main flank face, a secondary flank face, a back surface, and a bottom surface. The plowing forming surface and the back surface are located on the front and rear sides of the top surface, respectively, while the secondary flank face and the main flank face are located on the left and right sides of the top surface, respectively. The plowing forming surface, the secondary flank face, the back surface, and the main flank face are sequentially connected. The bottom surface is connected to the lower edges of the plowing forming surface, the main flank face, the secondary flank face, and the back surface. The forward direction of the asymmetric plowshare faces towards the front end. The angle between the secondary flank face and the vertical plane of the forward direction is an acute angle θ. The bottom surface is perpendicular to the vertical plane of the forward direction, and the angle between the plowing forming surface and the bottom surface is an acute angle α. The plowing forming surface is asymmetric. The connection between the plowing forming surface and the secondary flank face forms the main cutting edge, and the connection between the plowing forming surface and the main flank face forms the secondary cutting edge. The main cutting edge and the secondary cutting edge are used to cut the surface of the workpiece, causing the removed material to flow backward along the plowing forming surface. The connecting part, located on the top surface, is used to connect the CNC spindle.

[0007] Furthermore, the bottom surface is a cutting part, a linear cutting edge is formed at the connection between the plowing forming surface and the bottom surface, and a feed edge is formed at the connection between the main flank face and the bottom surface, with the feed edge parallel to the forward direction.

[0008] Furthermore, it also includes: The base is connected to the front end of the tool holder, which is connected to the CNC spindle. The bottom of the base is provided with multiple mounting holes at even intervals, and the connecting part is connected to the mounting holes.

[0009] Furthermore, the base has a first positioning hole through multiple mounting holes, and the connecting part has a second positioning hole. The first positioning hole corresponds to the second positioning hole, and bolts are inserted into the first positioning hole and the second positioning hole, and nuts are used to connect the connecting part to the mounting hole.

[0010] Furthermore, the centerline spacing between two adjacent mounting holes is 0.1mm-2.0mm.

[0011] Furthermore, θ can be 30°, 45°, or 60°.

[0012] Furthermore, the number of mounting holes is 3-8.

[0013] Furthermore, the surface roughness of both the plow-cutting surface and the linear cutting edge is no greater than 0.4 μm.

[0014] This invention also provides a method for preparing tilted microarray structure fins, using an asymmetric plow cutter, comprising the following steps: S1: The CNC spindle drives the asymmetric plowing section to move along the forward direction. The plowing forming surface is asymmetrically squeezed into the workpiece surface, causing local shearing and plastic deformation of the workpiece surface. The main cutting edge and the secondary cutting edge cut the workpiece surface, causing the removed material to flow backward along the plowing forming surface. The workpiece surface forms a micro-groove or micro-ridge prototype corresponding to the main flank face and the secondary flank face. S2: The linear cutting edge moves synchronously with the asymmetric plowing section to flatten the surface of the workpiece after step S1 and cuts the connecting material between adjacent microgrooves or microridges, thereby forming a continuous connecting layer on the bottom surface of the microgrooves or microridges, and obtaining an inclined microarray structure fin with a preset tilt angle.

[0015] Furthermore, the height of the tilted microarray structure fins is 0.3 mm-2 mm, the width is 0.3 mm-2 mm, and the center distance between adjacent microgrooves or microridge prototypes is 0.6 mm-2 mm.

[0016] This invention also provides an inclined microarray structure fin, which is fabricated using a method for preparing inclined microarray structure fins, comprising: A connecting layer, and a plurality of parallel microstructure units protruding upward from a main surface of the connecting layer; each microstructure unit has at least one inclined functional side, the angle φ between the functional side and the normal to the main surface of the connecting layer being equal to θ.

[0017] The present invention discloses the following technical effects: 1. This invention employs an asymmetric plowshare, enabling asymmetric insertion into the workpiece surface. This causes localized shearing and plastic deformation of the workpiece surface. The main and secondary cutting edges cut the workpiece surface, allowing the removed material to flow backward along the plowshare forming surface. The workpiece surface forms microgrooves or microridges corresponding to the main and secondary flank faces. Compared to existing technologies, this invention improves machining accuracy (tilt angle control accuracy reaches ±1.5°, and microstructure height uniformity exceeds 95%).

[0018] 2. Multiple asymmetric plowshares can be integrated and installed at the bottom of the substrate, and the linear cutting edges of the cutting section can precisely cut the connecting material between adjacent microstructures to form independent microstructure units. This composite processing method of "plowing forming + cutting separation" avoids the defect of traditional micromilling requiring multiple feeds to form a complete microstructure array, and realizes the preparation of microstructure arrays in a single feed, reducing processing time by more than 50% and enabling large-scale production.

[0019] 3. The fabrication process of the tilted microarray structure fins is based on the shear extrusion net forming principle. Through the synergistic action of the cutting tool and the workpiece material surface, efficient microstructure forming is achieved, thus eliminating chip generation. Furthermore, shear extrusion induces material grain refinement, increasing the surface hardness of the microstructure by approximately 20%, significantly improving the surface wear resistance, thermal stability, and structural strength of the fins, reducing surface roughness (Ra≤1.6μm), improving surface quality, eliminating the need for subsequent polishing, and avoiding material loss, resulting in near 100% material utilization. It is compatible with various metals such as pure copper, aluminum alloys, stainless steel, and titanium alloys, adapting to different working conditions. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram showing the installation of the tool holder, base body, and asymmetric plowshare. Figure 3 This is a schematic diagram of the bottom structure of the substrate; Figure 4 This is a schematic diagram of an asymmetric plowshare structure. Figure 5 This is a schematic diagram of the tilted microarray fin structure; Among them, 100 is the tool holder; 101 is the threaded hole; 110 is the base; 111 is the mounting hole; 112 is the first positioning hole; 120 is the bolt; 130 is the nut; 200 is the asymmetric plowing tool; 210 is the connecting part; 211 is the second positioning hole; 220 is the asymmetric plowing part; 221 is the plowing forming surface; 222 is the main flank face; 223 is the secondary flank face; 224 is the main cutting edge; 225 is the secondary cutting edge; 226 is the cutting tip; 300 is the cutting part; 310 is the linear cutting edge; 320 is the feed edge; 400 is the metal workpiece; 500 is the inclined micro-array structure fin; 510 is the micro-structure unit; 511 is the functional side; and 520 is the connecting layer. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] Those skilled in the art will understand that the term "comprising" as used in this application means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say an element is "connected" or "coupled" to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements present. Furthermore, "connected" or "coupled" as used herein can include wireless connections or wireless coupling. The term "and / or" as used herein includes all or any unit and all combinations of one or more associated listed items.

[0024] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] Example 1 like Figures 1 to 5 As shown, an embodiment of the present invention provides an asymmetric plowing tool, comprising: The asymmetric plowing section 220 comprises a top surface, a plowing forming surface 221, a main rear blade surface 222, a secondary rear blade surface 223, a back surface, and a bottom surface. The plowing forming surface 221 and the back surface are located on the front and rear sides of the top surface, respectively. The secondary rear blade surface 223 and the main rear blade surface 222 are located on the left and right sides of the top surface, respectively. The plowing forming surface 221, the secondary rear blade surface 223, the back surface, and the main rear blade surface 222 are sequentially connected. The bottom surface is connected to the lower edge of the plowing forming surface 221, the main rear blade surface 222, the secondary rear blade surface 223, and the back surface. The forward direction of the asymmetric plowing section 220 is... Facing the front end, the angle between the secondary flank face 223 and the vertical plane of the forward direction is an acute angle θ, the bottom surface is perpendicular to the vertical plane of the forward direction, and the angle between the plowing forming surface 221 and the bottom surface is an acute angle α; the plowing forming surface 221 is asymmetrical, the connection between the plowing forming surface 221 and the secondary flank face 223 forms the main cutting edge 224, and the connection between the plowing forming surface 221 and the main flank face 222 forms the secondary cutting edge 225. The main cutting edge 224 and the secondary cutting edge 225 are used to cut the surface layer of the workpiece, so that the removed material flows backward along the plowing forming surface 221; The connecting part 210 is provided on the top surface and is used to connect the CNC spindle.

[0026] In this embodiment, the bottom surface is the cutting part 300, the connection between the plowing forming surface 221 and the bottom surface forms a linear cutting edge 310, and the connection between the main flank face 222 and the bottom surface forms a feed edge 320, which is parallel to the forward direction.

[0027] In this embodiment, the vertical distance ΔH between the highest point of the cutting edge of the linear cutting edge 310 of the cutting part 300 and the tip 226 of the main cutting edge 224 is 0.3 mm. This ΔH directly determines the thickness of the connecting layer 520 at the bottom of the tilted microarray structure fin 500.

[0028] In this embodiment, the asymmetric plowing tool 200 is integrally formed from cemented carbide, powdered high-speed steel or polycrystalline diamond composite material, and the surface roughness of the plowing forming surface 221 and the linear cutting edge 310 is no greater than 0.4μm.

[0029] In this embodiment, the cross-sectional profile of the asymmetric plowing portion 220 is a parallelogram or trapezoid, and the plowing forming surface 221 is actually the inclined side of the aforementioned parallelogram or trapezoid.

[0030] In this embodiment, it also includes: The base 110 is connected to the front end of the tool holder 100. The tool holder 100 has a threaded hole 101 for positioning and installation, which can be fixed to the CNC spindle by screws. The bottom of the base 110 is provided with a plurality of mounting holes 111 evenly spaced, and the connecting part 210 is connected to the mounting holes 111.

[0031] In this embodiment, the base 110 has a first positioning hole 112 through multiple mounting holes 111, and the connecting part 210 has a second positioning hole 211. The first positioning hole 112 corresponds to the second positioning hole 211. Bolts 120 are inserted into the first positioning hole 112 and the second positioning hole 211, and the connecting part 210 is connected to the mounting hole 111 by nuts 130.

[0032] In this embodiment, the center-line distance between two adjacent mounting holes 111 is 0.1mm-2.0mm.

[0033] In this embodiment, θ is 30°, 45°, or 60°.

[0034] In this embodiment, the number of mounting holes 111 is 3-8.

[0035] This invention also provides a method for preparing tilted microarray structure fins, using an asymmetric plow cutter 200, comprising the following steps: S1: Fix the metal workpiece 400 on the worktable of the CNC machining equipment to ensure that the surface of the workpiece is in a predetermined posture; install the tool holder 100 on the CNC spindle, select the appropriate asymmetric plowing tool 200 for the tilted micro-array structure fin 500 to be machined as needed, and install it on the base 110. The CNC spindle drives the asymmetric plowing section 220 to move along the forward direction. The plowing forming surface 221 is asymmetrically squeezed into the workpiece surface, causing local shearing and plastic deformation of the workpiece surface. The main cutting edge 224 and the secondary cutting edge 225 cut the workpiece surface, causing the removed material to flow backward along the plowing forming surface 221. The workpiece surface forms a microgroove or microridge prototype corresponding to the main flank face 222 and the secondary flank face 223. S2: The linear cutting edge 310 moves synchronously with the asymmetric plowing section 220 to flatten the surface of the workpiece after step S1 and cut the connecting material between adjacent microgrooves or microridges, thereby forming a continuous connecting layer 520 on the bottom surface of the microgrooves or microridges, and obtaining an inclined microarray structure fin 500 with a preset tilt angle.

[0036] In this embodiment, the height of the tilted microarray structure fin 500 is 0.3 mm-2 mm, the width is 0.3 mm-2 mm, and the center distance between adjacent microgrooves or microridge prototypes is 0.6 mm-2 mm.

[0037] In this embodiment, the CNC spindle can travel at a maximum speed of 5000 mm / min, the asymmetric plowing section 220 travels at a speed of 300 mm / min to 2500 mm / min, and the workpiece surface is machined to a depth of 0.1 mm to 1.2 mm.

[0038] In this embodiment, if it is necessary to process microstructure arrays with different tilt angles in different surface areas of the same metal workpiece 400, asymmetric plowing cutters 200 with different tilt angles θ can be arranged in different mounting holes 111.

[0039] The final tilted microarray structure fin 500 includes an integral, continuous and uniformly thick connecting layer 520, and a plurality of parallel microstructure units 510 protruding upward from a main surface of the connecting layer 520; wherein each microstructure unit 510 has at least one tilted functional side 511, and the angle φ between the functional side 511 and the normal of the main surface of the connecting layer 520 is equal to θ.

[0040] The thickness Tb of the connecting layer 520 is 0.5 mm to 2 mm, and the protrusion height Hf of the microstructure unit 510 is 0.3 mm to 2 mm.

[0041] The high-temperature droplet directional transport performance of the tilted microarray structure fin 500 prepared in this embodiment was tested. Specifically, the surface of the tilted microarray structure fin 500 was heated to 400°C, exceeding the Leiden Frost temperature of water (approximately 200°C), and a droplet of water was released onto the surface of the tilted microarray structure fin 500. Experiments showed that the vapor film generated between the water droplet and the working surface exhibited asymmetric flow under the guidance of the microstructure unit 510, thereby driving the droplet to self-propel in a specific direction. The maximum horizontal velocity reached 42 cm / s, which is approximately 30% higher than that of traditional two-dimensional fins. The temperature in the hot spot area was reduced by more than 15%, significantly improving the heat dissipation performance of the equipment.

[0042] Example 2 In this embodiment, the tilted microarray structure fin 500 from Embodiment 1 is applied to the heat transfer enhancement element. The bottom connecting layer 520 of the tilted microarray structure fin 500 is combined with the heat sink substrate, heat spreader shell or heat pipe evaporation section wall on the heat transfer structure by welding, brazing or conformal bonding. The microstructure unit 510 is exposed in the heat transfer medium to enhance phase change heat transfer.

[0043] Example 3 In this embodiment, the tilted microarray structure fin 500 from Embodiment 1 is applied to a high-temperature surface droplet directional transport functional component. The tilted microarray structure fin 500 uses the surface of its microstructure unit 510 as a functional working surface. When the functional working surface is heated to a temperature exceeding the Leiden Frost temperature of the target liquid, the vapor film generated between the droplet and the working surface is guided by the microstructure unit 510 to produce asymmetrical flow, thereby driving the droplet to self-propel in a specific direction.

[0044] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0045] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0046] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. An asymmetric plowing cutter, characterized in that, include: The asymmetric plowing section (220) consists of a top surface, a plowing forming surface (221), a main rear blade surface (222), a secondary rear blade surface (223), a back surface, and a bottom surface. The plowing forming surface (221) and the back surface are located on the front and rear sides of the top surface, respectively. The secondary rear blade surface (223) and the main rear blade surface (222) are located on the left and right sides of the top surface, respectively. The plowing forming surface (221), the secondary rear blade surface (223), the back surface, and the main rear blade surface (222) are connected sequentially. The bottom surface is connected to the lower edge of the plowing forming surface (221), the main rear blade surface (222), the secondary rear blade surface (223), and the back surface. The forward direction of the asymmetric plowing section (220) is... Facing the front end, the angle between the secondary flank face (223) and the vertical plane of the forward direction is an acute angle θ, the bottom surface is perpendicular to the vertical plane of the forward direction, and the angle between the plowing forming surface (221) and the bottom surface is an acute angle α; the plowing forming surface (221) is asymmetrical, the connection between the plowing forming surface (221) and the secondary flank face (223) forms the main cutting edge (224), and the connection between the plowing forming surface (221) and the main flank face (222) forms the secondary cutting edge (225). The main cutting edge (224) and the secondary cutting edge (225) are used to cut the surface layer of the workpiece, so that the removed material flows backward along the plowing forming surface (221); A connecting part (210) is provided on the top surface for connecting a CNC spindle.

2. The asymmetric plowing cutter according to claim 1, characterized in that, The bottom surface is the cutting part (300), and a linear cutting edge (310) is formed at the connection between the plowing forming surface (221) and the bottom surface. A feed edge (320) is formed at the connection between the main back face (222) and the bottom surface. The feed edge (320) is parallel to the forward direction.

3. An asymmetric plowing cutter according to claim 2, characterized in that, Also includes: The base (110) is connected to the front end of the tool holder (100), the tool holder (100) is connected to the CNC spindle, and the bottom of the base (110) is provided with a plurality of mounting holes (111) evenly spaced, and the connecting part (210) is connected to the mounting holes (111).

4. An asymmetric plowing cutter according to claim 3, characterized in that, The base (110) has a first positioning hole (112) through multiple mounting holes (111), and the connecting part (210) has a second positioning hole (211). The first positioning hole (112) corresponds to the second positioning hole (211). Bolts (120) are inserted into the first positioning hole (112) and the second positioning hole (211), and the connecting part (210) is connected to the mounting hole (111) by a nut (130).

5. An asymmetric plowing cutter according to claim 3, characterized in that, The centerline distance between two adjacent mounting holes (111) is 0.1mm-2.0mm.

6. An asymmetric plowing cutter according to claim 3, characterized in that, θ can be 30°, 45° or 60°.

7. An asymmetric plowing cutter according to claim 3, characterized in that, The number of mounting holes (111) is 3-8.

8. An asymmetric plowing cutter according to claim 3, characterized in that, The surface roughness of both the plow-cutting surface (221) and the linear cutting edge (310) is no greater than 0.4 μm.

9. A method for fabricating an inclined microarray structure fin, characterized in that, The application of the asymmetric plowing tool according to any one of claims 3-8 includes the following steps: S1: The CNC spindle drives the asymmetric plowing section (220) to move along the forward direction. The plowing forming surface (221) is asymmetrically squeezed into the workpiece surface, causing local shearing and plastic deformation of the workpiece surface. The main cutting edge (224) and the secondary cutting edge (225) cut the workpiece surface, causing the removed material to flow backward along the plowing forming surface (221). The workpiece surface forms a microgroove or microridge prototype corresponding to the main flank face (222) and the secondary flank face (223). S2: The linear cutting edge (310) moves synchronously with the asymmetric plowing part (220) to flatten the surface of the workpiece after step S1 and cut the connecting material between adjacent micro-grooves or micro-ridge prototypes, thereby forming a continuous connecting layer (520) on the bottom surface of the micro-grooves or micro-ridge prototypes, and obtaining an inclined micro-array structure fin (500) with a preset tilt angle.

10. A tilted microarray structure fin, characterized in that, The fins are fabricated using the method described in claim 9, comprising: The connecting layer (520) and a plurality of parallel microstructure units (510) protruding upward from a main surface of the connecting layer (520); each microstructure unit (510) has at least one inclined functional side (511), the angle φ between the functional side (511) and the normal of the main surface of the connecting layer (520) being equal to θ.