Pumping speed testing device based on mass flow meter

Abstract

The invention relates to the technical field of vacuum pump testing, and particularly discloses a pumping speed testing device based on a mass flowmeter. The mass flow meters are arranged on the flow meter base in parallel, and the air outlet ends of the mass flow meters are connected to the connecting pipe in parallel; the testing tank is communicated with the connecting pipe and is communicated to an air inlet hole of the vacuum pump; the vacuum gauge is arranged on the vacuum pump and is used for measuring the air inlet pressure of the vacuum pump; wherein during testing, any mass flow meter can be selected to be started for use. The mass flow meters with different measuring ranges are connected in parallel, so that the mass flow meters can be quickly switched to different measuring ranges for use, accessories do not need to be replaced or adjusted, and the testing efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum pump testing, in particular to a pumping speed testing device based on mass flow meters. BACKGROUND

[0002] Pumping speed is one of the core technical parameters of a vacuum pump, directly reflecting its pumping capacity, and needs to be measured by a special method and equipment under specific working conditions, such as the integrated vacuum pump testing method and testing device disclosed in CN120212037B, which realizes switching through a hole plate, and currently realizes adjustment through an adjustable rotor flow meter. Although this type of mode can be controlled, it has the disadvantage of a complicated operation process, and needs to frequently replace the hole plate or frequently adjust the rotor flow meter scale, which has disadvantages. SUMMARY

[0003] The purpose of the present application is to provide a pumping speed testing device based on mass flow meters to solve the problems raised in the background.

[0004] To solve the above technical problems, the present application is realized by the following technical scheme: a pumping speed testing device based on mass flow meters, comprising: a flow meter base; a plurality of mass flow meters with different ranges connected in parallel on the flow meter base, the gas outlet ends of the plurality of mass flow meters being connected in parallel to a connecting pipe; a test tank in communication with the connecting pipe, the test tank being connected to the gas inlet hole of a vacuum pump; a vacuum gauge arranged on the vacuum pump, the vacuum gauge being used to measure the gas inlet pressure of the vacuum pump; wherein any mass flow meter can be selected to be turned on for use during testing.

[0005] Further, it further comprises a buffer tank, and the gas inlet ends of the plurality of mass flow meters are connected to the plurality of gas outlet ends of the buffer tank.

[0006] Further, it further comprises a pressure reducing valve, which is arranged in communication with the gas inlet end of the buffer tank.

[0007] Further, the pressure reducing valve controls the gas pressure entering the buffer tank to be not greater than 0.3 MPa.

[0008] Further, the ranges of the plurality of mass flow meters are 0.1 SLM, 1 SLM, 10 SLM and 100 SLM, respectively.

[0009] The present application has the following beneficial effects: The present application can quickly switch to different ranges for use through the parallel connection of mass flow meters with different ranges, without the need to replace or adjust accessories, thereby improving testing efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0010] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0011] Figure 1 This is a schematic diagram of the pumping speed test device in Example 1. Detailed Implementation

[0012] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0013] Example 1 like Figure 1 As shown, the pumping speed testing device based on the mass flow meter in this embodiment mainly consists of a pressure reducing valve, a buffer tank 60, a flow meter base 10, a mass flow meter 20, a connecting pipe 30, a test tank 40, and a vacuum gauge.

[0014] Specifically, multiple mass flow meters 20 with different ranges are connected in parallel on the flow meter base 10. The inlet ends of the multiple mass flow meters 20 are respectively connected to multiple outlet ends of the buffer tank 60. The outlet ends of the multiple mass flow meters 20 are connected in parallel to the connecting pipe 30. The ranges of the multiple mass flow meters 20 are 0.1SLM, 1SLM, 10SLM, and 100SLM, respectively.

[0015] Additionally, a pressure reducing valve is connected to the air inlet of the buffer tank 60. The pressure reducing valve controls the gas pressure entering the buffer tank 60 to be no greater than 0.3 MPa. The function of the buffer tank 60 is to buffer the incoming airflow and prevent the gas from directly impacting the mass flow meter 20, thus affecting its accuracy.

[0016] The test container 40 is connected to the air inlet of the vacuum pump 50, and a vacuum gauge is installed on the vacuum pump 50 to measure the air inlet pressure of the vacuum pump 50.

[0017] Correspondingly, the mass flow meter 20 is equipped with an opening and closing valve. When in use, any mass flow meter 20 can be selected to be turned on and used. The inlet pressure of the test tank can be observed with the vacuum gauge. Then, different mass flow meters are switched to control the air inlet flow and recorded. The pumping speed of the pump under the corresponding pressure can be calculated. The maximum pumping speed of the pump can be obtained by plotting the pumping speed curve.

[0018] The preferred embodiments of the application disclosed above are only to help explain the present application. The preferred embodiments are not intended to be exhaustive or to limit the application to the precise form disclosed. Many modifications and variations are possible in light of the above teaching. It is intended that the scope of the application be limited not with this detailed description, but rather by the claims and the full range of equivalents that are claimed.

Claims

1. A pumping speed testing device based on a mass flow meter, characterized in that, include: Flow meter base; Multiple mass flow meters with different ranges are arranged in parallel on the flow meter base, and the outlet ends of the multiple mass flow meters are connected in parallel to the connecting pipe; A test container connected to a connecting pipe, the test container being connected to the air inlet of a vacuum pump; A vacuum gauge is mounted on the vacuum pump, and the vacuum gauge is used to measure the inlet pressure of the vacuum pump; During testing, any mass flow meter can be selected for use.

2. The pumping speed testing device based on a mass flow meter according to claim 1, characterized in that: It also includes a buffer tank, and the inlet ends of the multiple mass flow meters are connected to the multiple outlet ends of the buffer tank.

3. The pumping speed testing device based on a mass flow meter according to claim 2, characterized in that: It also includes a pressure reducing valve, which is connected to the air inlet of the buffer tank.

4. The pumping speed testing device based on a mass flow meter according to claim 3, characterized in that: The pressure reducing valve controls the gas pressure entering the buffer tank to be no greater than 0.3 MPa.

5. The pumping speed testing device based on a mass flow meter according to claim 1, characterized in that: The mass flow meters have ranges of 0.1 SLM, 1 SLM, 10 SLM, and 100 SLM, respectively.

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