Primary and secondary mirror combination detection system and method for beam-shrinking systems

Abstract

This invention discloses a primary and secondary mirror combination detection system and method for beam-shrinking systems, belonging to the field of optical detection technology. The system includes: setting a first microspherical mirror and a second microspherical mirror; capturing reflected light spots and calculating positional offsets using an interferometer to generate a first control command to adjust the pose of the secondary mirror; integrating a dual-band light source in the detection optical path to collect wavefront data and alignment monitoring data, correcting temperature drift to obtain an effective combined wavefront; constructing an error separation model based on the primary mirror compensator parameters and Zernike aberration coefficients, and decoupling and separating the primary mirror surface shape error component and the secondary mirror misalignment error component using a preset aberration coupling coefficient; feeding the error components back to the polishing process and the displacement stage for closed-loop iterative correction until the RMS and PV values ​​of the effective combined wavefront meet preset imaging quality indicators. This application improves the accuracy and efficiency of primary and secondary mirror combination detection through precise positioning, error correction, and decoupling separation, achieving targeted correction.

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