Online analysis system and method for special gas

Abstract

The embodiment of the invention relates to an online analysis system and method for special gas. The system comprises an online analysis system; a workpiece processing tool; a gas holder comprising a gas container receiving structure; an analysis fluid path extending from the gas container receiving structure to the on-line analysis system, where the gas container receiving structure is in fluid communication with the on-line analysis system through the analysis fluid path; and a process fluid path extending from the gas container receiving structure to the workpiece processing tool, where the gas container receiving structure is in fluid communication with the workpiece processing tool through the process fluid path.

Description

TECHNICAL FIELD

[0001] Embodiments of the present disclosure relate to an online analysis system and method for specialty gases. BACKGROUND

[0002] Generally, when manufacturing semiconductor devices or packages within a semiconductor fabrication facility (FAB), various specialty gases (e.g., liquids or gases) are stored within storage vessels within the FAB. The various specialty gases can be in fluid communication to various workpiece processing tools so that the workpiece processing tools can utilize the specialty gases to perform processing steps (e.g., etching steps, patterning steps, etc.) on workpieces (e.g., semiconductor wafers, silicon wafers, etc.). There are multiple fluid paths (e.g., pipes) within the FAB so that the specialty gases can be transported throughout the FAB. The fluid paths are configured to transport the specialty gases from specialty fluid containers (e.g., liquid containers, gas containers, etc.) to the workpiece processing tools within the FAB, and the workpiece processing tools utilize the gases in some manner to refine or process respective workpieces at the workpiece processing tools to manufacture semiconductor devices or packages.

[0003] The storage fluid containers can be gas cylinders that contain specialty fluids in a gaseous state. Once all or most of the gaseous fluid within a respective one of the storage fluid containers is utilized so that the respective one of the storage fluid containers is empty, the respective one of the storage fluid containers can be replaced with a new storage fluid container that is full of the specialty fluid in a gaseous state. SUMMARY

[0004] Embodiments of the present disclosure relate to a system for online analysis, comprising: an online analysis system; a workpiece processing tool; a gas cabinet including a gas container receiving structure; an analysis fluid path extending from the gas container receiving structure to the online analysis system, wherein the gas container receiving structure is in fluid communication with the online analysis system through the analysis fluid path; and a processing fluid path extending from the gas container receiving structure to the workpiece processing tool, wherein the gas container receiving structure is in fluid communication with the workpiece processing tool through the processing fluid path.

[0005] Embodiments of the present disclosure relate to a method for online analysis, comprising: moving a fluid from within a gas container within a gas cabinet along a fluid analysis path to an end of the fluid analysis path at a switchbox of an online analysis system; moving the fluid through the switchbox to an online analysis tool of the online analysis system by allowing the fluid to travel through the switchbox to the online analysis tool by opening the switchbox at the end of the fluid analysis path; performing one or more types of testing on the fluid using one or more sensors of the online analysis tool of the online analysis system; generating one or more data signals based on results of the one or more types of testing on the fluid; receiving the one or more data signals at an online data system in electrical communication with the online analysis system; and processing a workpiece when the data signals satisfy a predetermined value.

[0006] Embodiments of the present disclosure relate to an online analysis system for specialty gases, comprising: a purge fluid source containing a purge fluid; a switchbox including: a plurality of fluid paths; a plurality of first valves, each of the plurality of first valves in fluid communication with one of the plurality of fluid paths, each of the plurality of first valves having a closed position and an open position, and during operation, one of the plurality of first valves is opened to allow fluid from one of the plurality of fluid paths to travel through the switchbox; and a plurality of second valves, each of the plurality of second valves in fluid communication with one of the plurality of fluid paths and in fluid communication with the purge fluid source, each of the plurality of second valves having a closed position and an open position, and during operation, one of the plurality of second valves is opened to allow the purge fluid to travel through the switchbox and into one of the plurality of fluid paths; an online analysis tool in fluid communication with the plurality of first valves; an offline sampler tool in fluid communication with the plurality of first valves; a calibration fluid source containing a calibration fluid and in fluid communication with the online analysis tool; and a vent port in fluid communication with the online analysis tool. BRIEF DESCRIPTION OF DRAWINGS

[0007] Aspects of the present disclosure are best understood from the following detailed description when read in conjunction with the accompanying drawings. It is noted that, in accordance with the standard practice in the industry, various components are not drawn to scale. In fact, the dimensions of the various components can be arbitrarily increased or decreased for clarity of discussion.

[0008] Figure 1A An example of a flow diagram of a method for testing a specialty fluid in a specialty fluid container is illustrated.

[0009] Figure 1B An example of a flow diagram of a method for testing a specialty fluid in a specialty fluid container is illustrated. Figure 1A

[0010] ​Figure 2 An example of a system for testing specialty fluids according to some embodiments is illustrated.

[0011] Figure 3 An example of a gas cabinet of a system for testing specialty fluids within specialty fluid containers as illustrated in Figure 2

[0012] Figure 4 An example of a gas cabinet of a system for testing specialty fluids within specialty fluid containers as illustrated in Figure 2

[0013] Figure 5 An example of an analyzer and sampler system or tool in fluid communication with a gas cabinet as illustrated in Figure 3

[0014] Figure 6 An example of a flowchart of a method for testing specialty fluids within specialty fluid containers as illustrated in Figure 2

[0015] Figure 7 An example of a flowchart of a control block diagram for real-time monitoring and testing of specialty fluids within specialty fluid containers as illustrated in Figure 2 DETAILED DESCRIPTION

[0016] The following disclosure provides many different embodiments, or examples, for implementing various characteristics of the provided subject matter. Various specific details are described in the following description in order to provide a thorough understanding of the present disclosure. Of course, different embodiments can be practiced without all of these specific details. For example, the descriptions of the components and arrangements described below can include various embodiments having different features, where appropriate. Moreover, well-known components and arrangements can not be described in detail in order to avoid obscuring the present disclosure. Also, the present disclosure can be repeated in various examples, with similar or different embodiments, and with similar or different arrangements. Furthermore, elements and / or features of a combination can be present as a combination of one or more elements and / or features of one or more embodiments.

[0017] Furthermore, spatially relative terms, such as "beneath", "below", "lower", "above", "upper", and the like, can be used herein for ease of description to describe one element's or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the figures. The devices can be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.​​​​​

[0018] In general, manufacturers of specialty fluids (e.g., liquid, gaseous, semi-liquid, semi-gaseous, etc.) store these specialty fluids in specialty fluid containers (e.g., liquid cylinders, liquid tanks, gas cylinders, gas tanks, etc.) for shipment and utilization within a semiconductor fabrication facility (FAB). The manufacturers provide manufacturer's specifications regarding the specialty gases stored within the specialty fluid containers. For example, the manufacturer's specifications for a specialty fluid can include characteristics of the specialty fluid within the specialty fluid container such as purity, contaminant content, amount of the specialty fluid, type of the specialty fluid, composition of the specialty fluid, or some other similar or identical type of characteristic that can be useful information to a manufacturer of a semiconductor device or package intended to utilize the specialty fluid provided by the manufacturer of the specialty fluid. However, since the manufacture of semiconductor devices or packages is susceptible to contamination, at least some of the specialty fluids in some of the specialty fluid storage containers can be tested using a specialty fluid analysis tool, device, or system to determine the accuracy of the manufacturer's specifications to reduce the probability of utilizing a substandard quality or excessively contaminated specialty fluid in the manufacture of a semiconductor device or package. In other words, these tests can be performed to avoid exposing a workpiece to a specialty fluid of insufficient quality (e.g., too high of a contaminant content).

[0019] For example, a manufacturer can establish that the specialty fluid within a specialty fluid container is within a specified tolerance (e.g., below a specified contaminant content) such that the specialty fluid is of high quality and of sufficient quality for use in the manufacture of a semiconductor device or package without producing a defective one in the semiconductor device or package due to a contaminant present within the specialty fluid. However, if the contaminant present within the specialty fluid is greater than as established by the manufacturer in the manufacturer's specifications, several defective or out-of-tolerance semiconductor devices or packages can be manufactured due to the utilization of a substandard quality (e.g., containing too much contaminant) specialty fluid during a step in a manufacturing process for manufacturing a semiconductor device or package within a FAB. Defective, defective, or out-of-tolerance semiconductor devices or packages in the manufacture of semiconductor devices or packages typically increase costs due to an increased level of scrap because the defective, defective, or out-of-tolerance semiconductor devices or packages are of insufficient quality to be sold to a customer.

[0020] In view of the foregoing, while the manufacturer's specification can establish that the specialty fluid has sufficient quality and within proper tolerances needed to manufacture semiconductor devices or packages within the FAB, in practice, the specialty fluid within the specialty fluid container can be of insufficient quality or not within proper tolerances. Thus, since the manufacturer's specification for the specialty fluid can be inaccurate at least at the time of receipt by the manufacturer of semiconductor devices or packages of the specialty fluid container containing the specialty fluid, if the manufacturer of semiconductor devices or packages utilizes the specialty fluid of insufficient quality during the manufacturing process of the semiconductor devices or packages, the number of defective semiconductor devices or packages manufactured outside of tolerances increases and, thus, results in greater scrap costs borne by the manufacturer of semiconductor devices or packages.

[0021] In view of the foregoing, at least some of the disclosed embodiments are directed to systems and methods for testing and determining the quality level (e.g., contaminant content) of a specialty fluid stored within a specialty fluid container to be used in the manufacture of semiconductor devices or packages by a manufacturer of semiconductor devices or packages. Such testing to confirm that the specialty fluid is of sufficient quality reduces the probability of defects or defective in the manufacture of semiconductor devices or packages and, thus, reduces scrap costs borne by the manufacturer of semiconductor devices or packages. Data collected from running these tests on the specialty fluid within the specialty fluid container can be used to generate specifications for the specialty fluid in the specialty fluid container to monitor the quality of the specialty fluid received by the manufacturers of semiconductor devices and packages for quality control purposes and to monitor the quality of the specialty fluid provided to the manufacturer of semiconductor devices or packages.

[0022] The disclosed embodiments are further directed to testing the specialty fluid within the specialty fluid container in real-time, such that the real-time quality of the specialty fluid is monitored to avoid introducing the specialty fluid to a workpiece processing tool to perform processing steps on workpieces in instances where the specialty fluid becomes of insufficient quality at a later time. Monitoring the real-time quality of the specialty fluid before or as it is utilized by the workpiece processing tool reduces the probability of exposing workpieces to the specialty fluid of insufficient quality, which again reduces scrap costs, material costs, and increases the probability of manufacturing semiconductor devices or packages within tolerances that can be sold and shipped to customers.

[0023] According to some embodiments of the present disclosure, updated specifications can be utilized in systems and methods of real-time monitoring of specialty fluids in specialty fluid containers. For example, these real-time monitoring systems and methods of real-time monitoring of the quality of specialty fluids while in use can utilize updated specifications to provide more accurate determinations than if the manufacturer's specifications were utilized instead. For example, one such determination can be that respective specialty fluid containers containing respective specialty fluids have fallen below a sufficient quality and need to be replaced. These methods and systems utilizing structures configured to monitor the real-time quality (e.g., contaminant content, composition, etc.) of specialty fluids in specialty fluid containers to reduce the probability of exposing workpieces to insufficient quality specialty fluids that can result in manufacturing defects or defective semiconductor devices or packages. Such exposure of workpieces to insufficient quality specialty fluids can again at least increase scrap costs and material costs typically borne by the manufacturer of semiconductor devices or packages.

[0024] Figure 1A An example of a system 100 for testing specialty fluids within specialty fluid containers 102 is illustrated. As shown in Figure 1A The system 100 is an "offline" system from a workpiece processing tool within a semiconductor fabrication facility (FAB). The system 100 is "offline" in that when the specialty fluids within the specialty fluid containers 102 are tested using the testing system 100, the specialty fluids within the specialty fluid containers 102 cannot be utilized by the workpiece processing tool within the FAB while being tested by the system 100.

[0025] As shown in Figure 1A The offline testing system 100 includes a gas cabinet 104 that is not in fluid communication with other work processing tools within the FAB such that the specialty fluids contained within the specialty fluid containers 102 tested using the system 100 cannot be passed to workpiece processing tools within the FAB while the system 100 is offline from the workpiece processing tools within the FAB. The gas cabinet 104 receives one of the specialty fluid containers 102 for testing. The insertion of one of the specialty fluid containers 102 into the gas cabinet 104 is represented by arrow 106, respectively. The one of the specialty fluid containers 102 is removed from the gas cabinet 104 after testing the specialty fluid within it while present in the gas cabinet 104, as represented by arrow 108, respectively. Details of testing the specialty fluids within the specialty fluid containers 102 are further discussed herein below in accordance with embodiments of the present disclosure. Figure 1B

[0026] ​A first fluid path 110 extends from the gas cabinet 104 to a controller and / or selector 112 (which can be referred to as a controller / selector) such that one gas cabinet 104 is in fluid communication with the controller 112 through the first fluid path 110. A second fluid path 114 extends from the controller 112 to a special fluid analysis tool 116. The special fluid analysis tool 116 is in fluid communication with the controller 112 through the second fluid path 114. The special fluid that is present within one of the special fluid containers 102 that is within the tested gas cabinet 104 allows the special fluid to be fluidly transferred from the gas cabinet 104 to the controller 112 through the first fluid path 110 and from the controller 112 to the special fluid analysis tool 116 through the second fluid path 114. The special fluid analysis tool 116 is configured to perform one or more types of testing on the special fluid that is received by the special fluid analysis tool 116 through the second fluid path 114. Data 118 that is collected by the special fluid analysis tool 116 is transmitted to an offline data system 120 that is offline in the sense that the offline data system 120 is not in electrical communication with a workpiece processing tool or a database system that is in electrical communication with a workpiece processing tool in a manner that is similar or identical to the system 100. In other words, when used with workpiece processing tools within a FAB, the system 100 as shown in Figure 1A The system 100 as shown in

[0027] Figure 1B A flowchart 122 relating to a method of utilizing the system 100 to perform one or more types of testing on the special fluid within the special fluid containers 102, respectively. As shown in Figure 1B The flowchart 122 includes a first step 124, a second step 126, a third step 128, a fourth step 130, a fifth step 132, and a sixth step 134 as shown in

[0028] In the first step 124, respective ones of the special fluid containers 102 are inserted into the gas cabinet 104. For example, an employee of the FAB can transport respective ones of the special fluid containers 102 to the gas cabinet 104 and insert respective ones of the special fluid containers 102 into the gas cabinet 104. As previously discussed, the insertion of the respective ones of the special fluid containers 102 is represented by the arrow 106.

[0029] After the first step 124 in which respective ones of the specialty fluid containers 102 are inserted and installed within the gas cabinet 104, in a second step 126, an employee can actuate the valve at the upper end of respective ones of the specialty fluid containers 102 so that the specialty fluid can readily exit respective ones of the specialty fluid containers 102 and into the first fluid path 110. The specialty fluid that exits respective ones of the specialty fluid containers 102 and into the first fluid path 110 travels through the first fluid path to the controller 112 to introduce the specialty fluid into the controller 112. The specialty fluid can be collected by the controller in a controlled manner. For example, the controller can collect a first amount of the specialty fluid, which can be referred to as a sample of the specialty fluid.

[0030] After the second step 126 in which the specialty fluid from respective ones of the specialty fluid containers 102 is provided to the controller 112 and the controller collects a sample, in a third step 128, the controller 112 allows the sample to enter the second fluid path 114 to be passed to the specialty fluid analysis tool 116. For example, the controller 112 can include a sample valve (not shown) in fluid communication with the second fluid path 114, and after the sample has been collected by the controller 112, the controller 112 can open the sample valve so that the sample travels into and through the second fluid path 114 to the specialty fluid analysis tool 116.

[0031] After the third step 128 in which the sample of the specialty fluid from respective ones of the specialty fluid containers 102 is passed through the second fluid path 114 to the specialty fluid analysis tool 116, in a fourth step 130, the specialty fluid analysis tool 116 performs one or more tests on the sample with one or more sensors (not shown) or testing tools (not shown).

[0032] After the fourth step 130 in which one or more tests are performed on the sample by the specialty fluid analysis tool 116, in a fifth step 132, data collected by the specialty fluid analysis tool 116 from performing the one or more tests on the sample is telemetered to the offline data system 120, which can be a memory. As previously discussed, the offline data system 120 is not in electrical communication with one or more workpiece processing tools or other electronic devices or components within the FAB other than the specialty fluid analysis tool 116.

[0033] After the fifth step 132 in which data is collected and stored in the offline data system 120, in a sixth step 134, each of the special fluid containers 102 that have been tested is replaced by a new, consecutive one of the special fluid containers 102. The method as shown in the flowchart 122 can then be continuously performed on the new consecutive one of the special fluid containers 102 to test the special fluid within the new consecutive one of the special fluid containers. In other words, the method of the flowchart 122 can be continuously performed multiple times to test the special fluid within the special fluid containers 102, respectively.

[0034] After the respective ones of the special fluid containers 102 that were previously tested and have been replaced by the new consecutive one of the special fluid containers 102 are removed from the cabinet 104 and replaced, the respective ones of the special fluid containers 102 are discarded instead of being used within the FAB to manufacture semiconductor devices or packages within the FAB. The special fluid containers 102 are discarded because when the special fluid containers 102 are removed from the gas cabinet 104 by the employees of the FAB, contaminants can have entered the respective ones of the special fluid containers 102. For example, if the valves at the upper ends of the respective ones of the special fluid containers 102 are not fully closed, contaminants can enter through the valves at the upper ends of the respective ones of the special fluid containers 102 such that utilizing the special fluid containers can result in utilizing the FAB to manufacture an increased number of defective or defective ones of the semiconductor devices or packages. Discarding the respective ones of the special fluid containers 102 results in the remaining portions of the special fluid that were present within the respective ones of the special fluid containers 102 becoming waste. The result of discarding the special fluid containers 102 increases testing costs and waste costs, which limits the number of special fluid containers 102 that are practically tested using the system 100.

[0035] In view of the above discussion with respect to Figure 1A and Figure 1B , and the deficiencies in discarding the special fluid containers 102 that contain fluid after being tested using the system 100, the present embodiments are directed to providing an online system and online method of testing to avoid discarding the special fluid containers 102 that still contain special fluid to respectively reduce waste costs and monitor real-time properties of the special fluid when actually used by the FAB to manufacture semiconductor devices and packages. In other words, the present embodiments are directed to providing embodiments of an online testing system that avoid the deficiencies of the system 100 as shown in Figure 1A and Figure 1B above, such that the yield of the number of semiconductor devices or packages that are manufactured within the tolerances and are capable of being sold and shipped to customers is increased.

[0036] Figure 2Examples of a system 200 for testing specialty fluids that can be stored in specialty fluid containers are described according to some embodiments. The system includes one or more gas holders 202, a specialty fluid analyzer and sampler 204, and an online data system 206. The fluid analyzer and sampler 204 (which may be referred to as an online analysis system) may be multiple analyzer tools or sampler tools, such that the fluid analyzer and sampler 204 may be a fluid analyzer and sampler system. For the sake of simplicity and brevity of the embodiments disclosed herein, the specialty fluid analyzer and sampler 204 may be referred to herein as analyzer 204.

[0037] Each of one or more gas holders 202 is in fluid communication with analyzer 204 via one or more test fluid paths 208 extending from each of the one or more gas holders 202 to analyzer 204. For example... Figure 2 The embodiments shown depict a one-to-one relationship between several gas holders 202 and several test fluid paths 208. However, in some embodiments, more than one of the test fluid paths 208 may extend from at least one of the gas holders 202. In other words, the number of gas holders 202 may be less than the number of test fluid paths 208. For example, two of the test fluid paths 208 may be associated with... Figure 2 The leftmost gas holder 202 shown is fluidly connected and both of the above in one or more test fluid paths 208 can extend to the analyzer 204, such that the leftmost gas holder 202 is fluidly connected to the analyzer through one or more of the above in one or more test fluid paths 208.

[0038] One or more test fluid paths 208 have a first end at each of one or more gas holders 202 and a second end opposite the first end at a switch box 210 of the analyzer 204. The switch box 210 is in fluid communication with the second end of the one or more test fluid paths 208 and is in fluid communication with a special fluid analyzer, sampler, or testing tool 212. For the sake of simplicity and brevity of this disclosed embodiment, the analyzer, sampler, or testing tool 212 may be referred to as the testing tool 212.

[0039] Although Figure 2 Not shown, but each of the gas holders 202 can hold one or more fluid containers 214a, 214b that can be tested using the test tool 212 of the analyzer 204 (see embodiments disclosed herein). Figure 3 The first fluid container 214a and the second fluid container 214b in the container). For example, an openable valve ( Figure 2(Not shown in the diagram) A special fluid in at least one of one or more fluid containers 214a, 214b is transported along at least one of one or more test fluid paths 208 to a switch box 210. The special fluid transported to the switch box 210 may then travel through the switch box 210 to a test tool 212, whereby the special fluid is received by the test tool 212. Once the special fluid is received by the test tool 212, the test tool 212 can perform one or more types of tests on the special fluid to determine and confirm selected characteristics of the special fluid. For example, the content of contaminants in the special fluid, the composition of the special fluid, or some other similar or identical characteristics of the special fluid.

[0040] The tests performed by test tool 212 on the specialty fluid received from switch box 210 may include cavity ring-down spectroscopy (CRDS), gas chromatography (e.g., pulsed helium ionization detection (PDHID), mass spectrometry (MS), etc.), IC testing, ToFMS testing, or other similar or identical types of tests or combinations of test types that can be performed on the specialty fluid by test tool 212. Although not shown in detail, test tool 212 includes one or more types of sensors and test components for performing one or more types of tests on the specialty fluid to confirm or determine the characteristics of the specialty fluid (e.g., contamination level, composition information, etc.), as discussed above.

[0041] Figure 3 Description of some embodiments, such as Figure 2 Examples of one or more gas holders 202 in the system 200 shown below. Although the following discussion will focus on, for example, Figure 3 The gas holder 202 shown in the image should be easily understood, such as... Figure 3 The details of the gas holder 202 shown in the image can be easily applied to various applications, such as... Figure 2 Each of the one or more gas holders 202 shown in the image.

[0042] like Figure 3 As shown, the gas holder 202 includes a housing 216 and a door 218 mechanically cooperating with the housing 216. For example, the door 218 may be hingedly coupled to the housing 216, such that the door 218 includes an open position and a closed position. When the door 218 is in the open position, the fluid container storage chamber 220 is easily accessible to FAB personnel, allowing personnel to replace the first fluid container 214a and the second fluid container 214b within the storage chamber 220 when the first or second fluid containers 214a and 214b are empty. In some embodiments, the first and second fluid containers 214a and 214b contain the same type of specialty fluid. In some embodiments, the first and second fluid containers 214a and 214b contain different types of specialty fluids.

[0043] A first fluid container receiving structure 222a, which can be referred to as a first gas container receiving structure 222a, and a second fluid container receiving structure 222b, which can be referred to as a second gas container receiving structure 222b, are present within the storage chamber 220. The first fluid container receiving structure 222a receives the first fluid container 214a and the second fluid container receiving structure 222b receives the second fluid container 214b. One or more fluid paths 208 can extend to corresponding ones of the first fluid container receiving structure 222a and the second fluid container receiving structure 222b within the gas cabinet 202 such that fluid within the first and second fluid containers 214a, 214b within the gas cabinet 202 can be transported along the one or more fluid paths 208 to the switch box 210.

[0044] A first fluid container valve 224a is at an upper end of the first fluid container 214a and a second fluid container valve 224b is at an upper end of the second fluid container 214b. The first and second fluid container valves 224a, 224b are configured to be opened to release the specialty fluid stored within the first and second fluid containers 214a, 214b, respectively. A first valve receiving assembly 226 is in fluid communication with the first fluid container 214a through the first fluid container valve 224a and a second valve receiving assembly 228 is in fluid communication with the second fluid container valve 224b.

[0045] The specialty fluid stored within the first fluid container 214a can be installed within the first fluid container 214a within the storage chamber 220 of the gas cabinet 202 as shown in Figure 3 such that, prior to the first fluid container valve 224a being opened, the first valve receiving assembly 226 is in fluid communication with the first fluid container valve 224a to reduce the probability of contaminant exposure to the specialty fluid present or previously present within the first fluid container 214a. The specialty fluid stored within the second fluid container 214b can be installed within the second fluid container 214b within the storage chamber 220 of the gas cabinet 202 as shown in Figure 3 such that, prior to the second fluid container valve 224b being opened, the second valve receiving assembly 228 is in fluid communication with the second fluid container valve 224b to reduce the probability of contaminant exposure to the specialty fluid present or previously present within the second fluid container 214b.

[0046] A first fluid path 230 extends from the first valve receiving assembly 226 to the test fluid path 208 as shown in Figure 3Specialty fluid from the first fluid container 214a can readily travel or move through the first fluid path 230 to the test fluid path 208. For example, when the first fluid container valve 224a is open, specialty fluid exits the first fluid container 214a and travels through the first valve receiving assembly 226. When both the first valve 234 and the second valve 236 are open, the specialty fluid can then travel or move along and through the first fluid path such that the specialty fluid enters the test fluid path 208. The first valve 234 is along the first fluid path 230, and the second valve 236 is along the first fluid path and closer to the test fluid path 208 relative to the first valve 234. In some embodiments, only one of the first valve 234 and the second valve 236 can be present along the first fluid path 230 such that the other of the first valve 234 and the second valve 236 is not present.

[0047] The second fluid path 232 extends from the second valve receiving assembly 228 to the test fluid path 208, as shown in Figure 3 Specialty fluid from the second fluid container 214b can readily travel or move through the second fluid path 232 to the test fluid path. For example, when the second fluid container valve 224b is open, specialty fluid exits the second fluid container 214b and travels through the second valve receiving assembly 228. When both the third valve 238 and the fourth valve 240 are open, the specialty fluid can then travel and move along and through the second fluid path 232 such that the specialty fluid enters the test fluid path 208. The third valve 238 is along the second fluid path 232, and the fourth valve 240 is present along the second fluid path 232 and closer to the test fluid path 208 relative to the third valve 238. In some embodiments, only one of the third valve 238 and the fourth valve 240 can be present along the second fluid path 232 such that the other of the third valve 238 and the fourth valve 240 is not present.

[0048] While not shown, in some embodiments, the first fluid path 230 can extend to a first one of the test fluid paths 208, the second fluid path 232 can extend to a second one of the test fluid paths 208, and the first and second ones of the test fluid paths 208 can be separate and distinct from one another such that the specialty fluid from the first fluid container 214a travels along and through the first one of the test fluid paths 208 and the specialty fluid from the second fluid container 214b travels along and through the second one of the test fluid paths 208. For example, the specialty fluid from the first fluid container 214a travels through and along the first one of the test fluid paths 208 to the analyzer 204 and the specialty fluid from the second fluid container 214b travels through and along the second one of the test fluid paths 208 to the analyzer 204. In other words, the specialty fluid from the first fluid container 214a does not travel along the fluid path along which the specialty fluid from the second fluid container 214b travels and vice versa.

[0049] While not shown, in some embodiments, the first, second, third, and fourth valves 234, 236, 238, 240 can be replaced by a first three-way valve 242 at a location 244 (see FIG. 2) at which the first fluid path 230 and the second fluid path 232 interface with the test fluid paths 208. While not shown, in some embodiments, the second and fourth valves 236, 240 can be replaced by a three-way valve at the location 244 such that the three-way valve is present at the location 244 and the first and third valves 234, 238, respectively, are also present along the first and second fluid paths 230, 232, respectively. In other words, the positioning and number of valves along the first and second fluid paths 230, 232, respectively, can vary in some embodiments of the gas cabinet 202 as shown in FIG. 1. Figure 4 Figure 3

[0050] In view of the above discussion, it should be readily apparent that the fluid paths discussed herein can be formed using one or more tubes to define the fluid paths as discussed herein. In other words, the tubes can be fluidly coupled or mechanically joined to one another such that the tubes define the respective fluid paths as discussed herein.

[0051] ​​A third fluid path 246 extends from the first valve receiving assembly 226 (which extends from the first valve receiving assembly 224a) and a fourth fluid path 248 extends from the second valve receiving assembly 228. The third and fourth fluid paths 246, 248 extend to one or more workpiece processing tools 250. In some embodiments, the third and fourth fluid paths 246, 248 extend to respective ones of the one or more workpiece processing tools 250, such that respective ones of the one or more workpiece processing tools 250 can receive a specialty fluid that is present within either of the first fluid container 214a and the second fluid container 214b that is within the gas cabinet 202. In some embodiments, the third fluid path 246 can extend to a first one of the one or more workpiece processing tools 250, such that the first one of the one or more workpiece processing tools 250 can receive a specialty fluid that is present within the first fluid container 214a, and the fourth fluid path 248 can extend to a second one of the one or more workpiece processing tools 250 that is separate and distinct from the first one of the one or more workpiece processing tools 250, such that the second one of the one or more workpiece processing tools 250 can receive a specialty fluid that is present within the second fluid container 214a.

[0052] A fifth valve 252 is present along the third fluid path 246. When the fifth valve 252 is open, a specialty fluid from the first fluid container 214a can travel or move along and through the third fluid path 246 and through the fifth valve 252 to the one or more workpiece processing tools 250.

[0053] A sixth valve 254 is present along the fourth fluid path 248. When the sixth valve 254 is open, a specialty fluid from the second fluid container 214b can travel or move along and through the fourth fluid path 248 and through the sixth valve 254 to the one or more workpiece processing tools 250.

[0054] Although not shown in Figure 3 , in some embodiments, the fifth valve 252 and the sixth valve 254 can be replaced by a second three-way valve 256 (see Figure 4 of the present disclosure). In other words, both the third and fourth fluid paths 246, 248 can have an end that is in fluid communication with the second three-way valve 256 (see Figure 4 of the present disclosure).

[0055] The one or more workpiece processing tools 250 can utilize the specialty fluid from the first and second fluid containers 214a, 214b to perform one or more types of processing or fabrication techniques on one or more workpieces. For example, these processing or fabrication techniques can include etching techniques, mask formation techniques, patterning techniques, or some similar or same type of workpiece processing or fabrication technique or combination of workpiece processing or fabrication techniques that can be performed within a FAB.

[0056] Figure 4 Examples involving alternative embodiments of one or more of the gas cabinets 202. As Figure 4 the gas cabinet 202 shown in FIG. 2A is the same as or similar to the gas cabinet 202 shown in FIG. 2B; however, unlike the gas cabinet 202 shown in FIG. 2B, the gas cabinet 202 shown in FIG. 2A includes a first three-way valve 242 and a second three-way valve 256. There are first and second three-way valves 242, 256 in the gas cabinet 202 shown in FIG. 2A instead of the second valve 236, the fourth valve 240, the fifth valve 252, and the sixth valve 254. Figure 3 Figure 3 Figure 4 Figure 4

[0057] In alternative embodiments of one or more of the gas cabinets 202, one or more of the gas cabinets can have a different combination of the first, second, third, fourth, fifth, and sixth valves 234, 236, 238, 240, 252, 254, the first three-way valve 242, and the second three-way valve 256. For example, in some alternative embodiments of one or more of the gas cabinets 202, the gas cabinet 202 can include only the second three-way valve 256 and the first, second, third, and fourth valves 234, 236, 238, 240. In other words, each of the valves 234, 236, 238, 240, 242, 256 can be present in various combinations within each of the embodiments of one or more of the gas cabinets.

[0058] Figure 5 Examples of detailed schematic diagrams of the fluid analyzer and sampler 204, which can be a tool or system in fluid communication with an embodiment of the examples of the gas cabinet 202 as disclosed in embodiments of the present disclosure. As Figure 3 shown in FIG. 2A, the gas cabinet 202 (which is the same as the gas cabinet 202 shown in FIG. 2B) is in fluid communication with the leftmost switch box inlet 258 (e.g., labeled “Cabinet 1,” as shown in FIG. 2B) of the switch box 210 through a respective one of the one or more fluid paths 208 as shown in FIG. 2A. As Figure 5 shown in FIG. 2A, the fluid paths 208 are structured to respectively allow a particular fluid from either or both of the first and second fluid containers 214a, 214b to the switch box inlet 258 of the switch box 210. The switch box inlet 258 of the switch box is one of a plurality of switch box inlets 258 (e.g., labeled “Cabinet 1,” “Cabinet 2,” “Cabinet 3,” “Cabinet 4,” “Cabinet 5,” and “Cabinet 6”). As Figure 3 shown in FIG. 2A, each of the plurality of switch box inlets 258 is in fluid communication with one of the one or more gas cabinets 202 through one of the one or more fluid paths 208 as shown in FIG. 2A. Figure 3 Figure 5 Figure 3 Figure 3 Figure 2

[0059] As​​​​​​​​​Figure 3 Each of the plurality of switchbox inlets 258 shown is in fluid communication with one of a plurality of switchbox inlet valves 260 configured to control the amount of a particular fluid present within a corresponding one of the fluid paths 208 and to be introduced into the test tool 212 through the switchbox by opening or closing the corresponding one of the plurality of switchbox inlet valves 260. For example, when the first and second valves 234, 236 are open, a particular fluid is moved from the first fluid container 214a through the first and second valves 234, 236 and into the fluid path 208, such that the particular fluid is then moved to the leftmost switchbox inlet 258, and the leftmost switchbox inlet valve 260 can then be opened such that the particular fluid travels through the leftmost switchbox inlet valve 260 and is introduced into the test tool 212.

[0060] A third three-way valve 262 and a fourth three-way valve 264 are in fluid communication with each of the plurality of switchbox inlet valves 260. The third and fourth three-way valves 262, 264 are downstream of the plurality of switchbox inlet valves 260. A fifth three-way valve 266 is in fluid communication with the fourth three-way valve.

[0061] An analyzer 268 is downstream of the fifth three-way valve 266. For example, when one of the plurality of switchbox inlet valves 260 is open, the fourth and fifth three-way valves 264, 266 are open, and the third three-way valve 262 is closed, a particular fluid can readily travel through the fourth and fifth three-way valves 264, 266 and be introduced to the analyzer 268, such that the analyzer 268 can perform one or more types of tests on the particular fluid introduced into the analyzer 268 to determine a characteristic (e.g., a contaminant content, a temperature, a composition, etc.) of the particular fluid introduced to the analyzer 268. The analyzer 268 can include one or more types of analysis tools, one or more types of sensors, or one or more other similar or identical components for performing one or more types of tests to determine a characteristic of a particular fluid introduced to the analyzer 268. These types of tests can include spectroscopy tests, chromatography tests, spectrometry tests, or can be some other similar or identical tests that can be performed by the analyzer 268 on a particular fluid received by the analyzer 268 from at least one of the one or more gas cabinets 202. For example, these types of tests can include a cavity ring-down spectroscopy (CRDS), a gas chromatography test using a pulsed discharge ionization detector (GC-PDHID), a gas chromatography-mass spectrometry (GC-MS) test, an ion chromatography-mass spectrometry (IC-MS) test, a Fourier transform infrared (FTIR) test, a time-of-flight mass spectrometry (ToFMS) test, or some other similar or identical test that can be performed on a fluid (e.g., a liquid or a gas) received by the analyzer 268.

[0062] The online data system 206 is in communication with the one or more gas cabinets 202, the one or more fluid containers 214, the one or more test tools 212, and the one or more analyzers 268, as well as the one or more gas cabinets 202, the one or more fluid containers 214, the one or more test tools 212, and the one or more analyzers 268, respectively, as shown in FIG. 1. Figure 5The analyzer 268 is in electrical communication with the online data system 206. The online data system 206 can receive data signals 269 from the analyzer 268 representative of characteristics (e.g., contaminant content, composition make-up, temperature, moisture content, etc.) of the specialty fluid tested by the analyzer 268. In some embodiments, the online data system 206 can include a memory, a processor, a display, a user interface, and similar or identical electrical components that allow the online data system 206 to store data based on the data signals 269 received from the analyzer 268, process the data signals 269 received from the analyzer 268, or display data stored in the online data system 206 based on the data signals 269 received from the analyzer 268. For example, data stored on the memory (not shown) of the online data system 206 can be easily accessed and viewed by employees of the FAB by utilizing the display (not shown) of the user interface in electrical communication with the memory of the online data system 206. The data stored in the memory of the online data system 206 can include data representative of the contaminant content of the specialty fluid, the temperature of the specialty fluid, the composition of the specialty fluid, the moisture content within the specialty fluid, or some other similar or identical type of data relative to the physical characteristics of the specialty fluid tested by the analyzer 268.

[0063] This data stored in the memory of the online data system 206 can be utilized so that employees can monitor the physical characteristics of the specialty fluid in real-time. For example, the processor (not shown) of the online data system 206 can be utilized to process the data signals 269 to convert the data signals 269 into data or processed data to be stored on the memory of the online data system. The processor of the online data system 206 can utilize the data signals 269 or the data to determine whether a notification should be output on the display. The notification can be a warning notification indicating that the characteristics of the specialty fluid are outside of one or several selected tolerances to avoid introducing the specialty fluid having the characteristics outside of the selected tolerances to the workpiece processing tool 250. For example, an employee can seize the introduction of the specialty fluid having the characteristics outside of the selected tolerances to the workpiece processing tool 250 through the user interface of the online data system 206 to avoid introducing a deficient quality specialty fluid to a workpiece within the workpiece processing tool 250. Alternatively, the processor of the online data system 206 can automatically prevent the introduction of the deficient quality specialty fluid to the workpiece within the workpiece processing tool 250. Reducing the probability of introducing a deficient quality specialty fluid when the characteristics of the specialty fluid are outside of the selected tolerances reduces the number of workpieces that become scrap or waste and increases the yield of manufactured components (e.g., semiconductor dies, semiconductor packages, semiconductor assemblies, etc.) utilizing the FAB.

[0064] In some embodiments, a warning notification can be output when the contaminant content of the specialty fluid tested by the analyzer 268 is greater than or equal to a contaminant content threshold. In some embodiments, a warning notification can be output only when the contaminant content of the specialty fluid tested by the analyzer 268 is greater than the contaminant content threshold. While the foregoing discussion relates to outputting a warning notification with respect to the contaminant content of the specialty fluid to avoid introducing a deficient quality specialty fluid into a workpiece within the workpiece processing tool 250, it should be readily appreciated that the characteristics monitored by the online data system can include other characteristics of the specialty fluid or a combination of characteristics of the specialty fluid. For example, as previously discussed herein, these characteristics can include contaminant content, composition make-up, temperature, moisture content.

[0065] The data collected by the online data system 206 by testing the specialty fluid received by the analyzer 268 can be used to compile real world data in real world data tables. The real world data compiled in these real world data tables can be compared to the data in the manufacturer's technical specification to determine whether the specialty fluid tested by the analyzer 268 has characteristics similar to the characteristics as indicated and established by the data within the manufacturer's technical specification with respect to the quality of the specialty fluid. This real world data can be used to determine the quality of the specialty fluid from various manufacturers to determine which manufacturers provide a consistently quality specialty fluid to reduce the probability of introducing a deficient quality specialty fluid into a workpiece within the workpiece processing tool 250. In other words, the collection of this real world data can be used to verify whether the data provided in the manufacturer's technical specification with respect to the quality of the specialty fluid is accurate and, as a result, this allows a customer to limit the purchase of specialty fluid only from manufacturers that provide a sufficiently quality and consistently specialty fluid to reduce the probability of introducing a deficient quality specialty fluid into a workpiece within the workpiece processing tool 250.

[0066] While not shown, the inline data system 206 can be in electrical communication with one or more processors within the FAB. For example, the inline data system 206 can be in wired or wireless electrical communication such that employees in a control room of the FAB can access data stored within the inline data system 206. Similar to when a property of a specialty fluid tested by the analyzer 268 is outside of one or several selected tolerances, the processor of the inline data system 206 can output a notification or warning to a display (not shown) within the control room such that employees within the control room can take action and steps to prevent the introduction of a specialty fluid of insufficient quality into the workpiece processing tool 250. Alternatively, the processor of the inline data system 206 can output a notification or warning to a display (not shown) within the control room and the processor of the inline data system 206 can automatically control the utilization of a specialty fluid of insufficient quality to avoid the introduction of a specialty fluid of insufficient quality into the workpiece processing tool 250. Again, reducing the probability of the introduction of a specialty fluid of insufficient quality when a property of a specialty fluid is outside of the selected tolerances reduces the number of workpieces that become scrap or waste and increases the yield of manufactured components (e.g., semiconductor dies, semiconductor packages, semiconductor assemblies, etc.) utilizing the FAB.

[0067] The test tool 212 further includes a standard calibration device 270, as shown in Figure 5 The standard calibration device 270 houses a standardized fluid that can be used to calibrate one or more test tools (not shown), one or more types of sensors, and one or more test components within the analyzer 268. For example, the standard calibration device 270 can house a standardized fluid whose composition and physical properties are known such that the standardized fluid can be used to perform a calibration process on the analyzer 268 to calibrate the analyzer 268. The standardized fluid can be introduced into the analyzer 268 to perform the calibration process by opening a standardized fluid valve 272 and opening the fifth three-way valve 266 such that the standardized fluid travels along a standardized fluid path that extends from the standard calibration device 270 through the standardized fluid valve 272 and the fifth three-way valve 266 to the analyzer 268.

[0068] The test tool 212 further includes an offline sampler 274, as shown in Figure 5The offline sampler 274 can be used to collect a sample of a specialty fluid that can need to be shipped away from the test tool 212 to perform another type of test that the analyzer 268 can not be configured to perform. For example, the offline sampler 274 can collect a sample of a specialty fluid by opening the third three-way valve 262 and closing the fourth three-way valve 264 so that the specialty fluid can travel along a fluid path that extends from one of the one or more switchbox inlets 258 through the third three-way valve 262 to the offline sampler 274. The sample can be collected in a removable storage container (not shown) within the offline sampler 274 so that the sample of the specialty fluid is stored within the removable storage container. A robot or employee can then remove the removable storage container from the offline sampler 274 and ship the removable storage container containing the sample of the specialty fluid to an external test tool or testing area outside of the test tool 212. One or more tests can then be performed on the sample stored within the removable storage container. The one or more tests can not be able to be performed by one or more types of test tools, one or more types of sensors, and one or more test components within the analyzer 268.

[0069] The fluid analyzer and sampler 204 further includes a flushing fluid inlet 276 and a drain fluid outlet 278. The flushing fluid inlet 276 is in fluid communication with a flushing fluid source (not shown) such that when the flushing fluid inlet 276 is open, flushing fluid can travel through the flushing fluid inlet 276 and migrate along a flushing fluid path 280. The flushing fluid inlet 276 is in fluid communication with the third three-way valve 262, the fourth three-way valve 264, and the sixth three-way valve 282 through the flushing fluid path 280 such that flushing fluid can be provided to the analyzer 268, the offline sampler 274, and a plurality of switchbox outlet valves 284. Each of the plurality of switchbox outlet valves 284 is in fluid communication with a corresponding one of a plurality of switchbox outlets 286. Each of the plurality of switchbox outlets 286 is in fluid communication with a corresponding one of the test fluid paths 208 that are each in fluid communication with a corresponding one of the one or more gas cabinets 202. Flushing fluid can be introduced into the analyzer by opening the flushing fluid inlet 276, opening the fourth three-way valve 264, and opening the fifth three-way valve 266. Flushing fluid can be introduced into the offline sampler by opening the flushing fluid inlet 276 and opening the third three-way valve 262. Flushing fluid can be introduced to the plurality of switchbox outlet valves 284 by opening the flushing fluid inlet 276 and opening the sixth three-way valve, and can then be introduced into at least one of the fluid paths 208 by opening at least one of the plurality of switchbox outlet valves 284. Flushing fluid can be introduced into the fluid paths 208 before or after special fluids are transported through one or more of the fluid paths to the analyzer 268 or the offline sampler 274 to sterilize the one or more fluid paths 208 such that these special fluids are not contaminated along the fluid paths 208 before reaching the analyzer 268 or the offline sampler 274, respectively. The flushing fluid can be ultrapure water (UPC), can be a nitrogen-based fluid, or can be some other suitable type of flushing fluid.

[0070] The drain fluid outlet 278 is in fluid communication with the analyzer 268 and the offline sampler 274 along the drain fluid path 288, respectively. For example, after a special fluid is introduced into the analyzer 268 and the analyzer 268 has performed one or more types of testing on the special fluid, the special fluid can then exit the analyzer and travel from the analyzer 268 to the drain fluid outlet 278 through the drain fluid path 288. The special fluid that was previously tested by the analyzer 268 can exit the analyzer and the sampler 204 through the drain fluid outlet 278 so that the special fluid that was previously tested can be disposed of. Alternatively, a flush fluid that was introduced to flush the offline sampler 274 and the analyzer 268 can exit the offline sampler 274 and the analyzer 268 through the drain fluid path 288 and exit the analyzer and the sampler 204 through the drain fluid outlet 278. Although not shown, in some embodiments, the drain fluid outlet 278 can be in fluid communication with the plurality of switchbox inlet valves 260 and the plurality of switchbox outlet valves 284, respectively, so that excess fluid or remaining fluid can easily exit through the drain fluid outlet 278. In other words, the drain fluid outlet 278 can be in fluid communication with various fluid paths and components of the system 200 so that fluid can easily exit the system 200 through the drain fluid outlet 278.

[0071] Figure 6 A flowchart 600 of a method involving testing of special fluids stored within one or more special fluid containers 214a, 214b (see Figure 5 ) within one or more gasholders 202 (see Figure 2 ) utilizing the analyzer and sampler 204 (see Figure 5 ) of the system 200 (see Figure 2 ) will now be discussed in further detail. The method illustrated in the flowchart 600 shown in Figure 6 is advantageous over the method illustrated in the flowchart 122 shown in Figure 1B , which will be discussed in further detail herein.

[0072] In a first step 602 of the method illustrated in the flowchart 600, one or more respective ones of the special fluid containers 214a, 214b are inserted into a respective one of the one or more gasholders 202. For example, two of the special fluid containers 214a, 214b can be inserted into each of the one or more gasholders 202 so that each of the six gasholders 202 in an embodiment of the system 200 shown in Figure 2 each houses two of the special fluid containers 214a, 214b, respectively. In other words, similar to the embodiment shown in Figure 5 wherein Figure 5The leftmost one of the gas cabinets 202 shown in FIG. 1 houses a pair of specialty fluid containers 214a, 214b. Each of the other ones of the one or more gas cabinets 202 also houses a pair of specialty fluid containers 214a, 214b. These specialty fluid containers 214a, 214b can be installed into the gas cabinets 202 by employees of the FAB.

[0073] After the first step 602 in which one or more specialty fluid containers 214a, 214b are inserted and installed into one or more gas cabinets 202, in a second step 604 of the flowchart 600, a specialty fluid from one of the specialty fluid containers 214a, 214b is introduced through the switchbox 210 to the analyzer and sampler 204. For example, by opening the leftmost one of the plurality of switchbox inlet valves 260, opening the fourth three-way valve 264, and opening the fifth three-way valve 266, the specialty fluid travels along the respective fluid path extending to the analyzer 268 through the switchbox 210, the fourth three-way valve 264, and the fifth three-way valve 266 to introduce the specialty fluid from, for example, the leftmost one of the specialty fluid containers 214a, 214b in the leftmost one of the gas cabinets 202 shown in FIG. 1 into the analyzer 268. Figure 2 The specialty fluid from one of the specialty fluid containers 214a, 214b in the leftmost one of the gas cabinets 202 shown in FIG. 1 is introduced into the analyzer 268. Alternatively, by opening the third three-way valve 262 and the leftmost one of the plurality of switchbox inlet valves 260, the specialty fluid travels along the respective fluid path and through the third three-way valve 262 to the off-line sampler 274 to introduce the specialty fluid from, for example, the leftmost one of the specialty fluid containers 214a, 214b in the leftmost one of the gas cabinets 202 shown in FIG. 1 into the off-line sampler 274. Figure 2 The specialty fluid from one of the specialty fluid containers 214a, 214b in the leftmost one of the gas cabinets 202 shown in FIG. 1 is introduced into the analyzer 268. Alternatively, by opening the third three-way valve 262 and the leftmost one of the plurality of switchbox inlet valves 260, the specialty fluid travels along the respective fluid path and through the third three-way valve 262 to the off-line sampler 274 to introduce the specialty fluid from, for example, the leftmost one of the specialty fluid containers 214a, 214b in the leftmost one of the gas cabinets 202 shown in FIG. 1 into the off-line sampler 274.

[0074] After the second step 604 in which the specialty fluid is introduced to the analyzer and sampler 204 and to either or both of the analyzer 268 and the off-line sampler 274, in a third step 606, the specialty fluid is tested by the analyzer 268, a sample of the specialty fluid is collected by the off-line sampler 274, or both the specialty fluid is tested by the analyzer 268 and a sample of the specialty fluid is collected by the off-line sampler 274. For example, when the specialty fluid is delivered and provided to both the analyzer 268 and the off-line sampler 274, the analyzer 268 performs one or more tests on the specialty fluid and the off-line sampler 274 collects a sample of the specialty fluid. Alternatively, if the specialty fluid is only introduced to the analyzer 268, the analyzer 268 performs one or more tests on the specialty fluid and the off-line sampler 274 does not collect a sample of the specialty fluid. Alternatively, if the specialty fluid is only introduced to the off-line sampler 274, the off-line sampler 274 collects a sample of the specialty fluid and the analyzer 268 does not perform one or more tests on the specialty fluid. For the purposes of the following steps in the flowchart, the analyzer 268 receives the specialty fluid.

[0075] After the third step 606 in which one or both of the analyzer 268 and the offline sampler 274 receives the specialty fluid, in a fourth step 608, the analyzer 268 performs one or more tests on the specialty fluid as the analyzer 268 receives the specialty fluid. The one or more tests can include a cavity ring-down spectroscopy (CRDS), a gas chromatography test using a pulsed discharge ionization detector (PDHID) detector (GC-PDHID), a gas chromatography-mass spectrometry (GC-MS) test, an ion chromatography-mass spectrometry (IC-MS) test, a Fourier transform infrared (FTIR) test, a time-of-flight mass spectrometry (ToFMS) test, or some other similar or identical test that can be performed on the specialty fluid received by the analyzer 268, which can be in a liquid, semi-liquid, semi-gaseous, or gaseous state. After the one or more tests are completed, the analyzer 268 outputs one or more data signals 269 to the online data system 206 based on the results of the one or more tests performed on the specialty fluid.

[0076] After the fourth step 608 in which the analyzer 268 performs one or more tests on the specialty fluid and outputs the data signals 269 to the online data system 206, in a sixth step, the online data system 206 processes the one or more data signals 269 output from and received by the analyzer 268. For example, as previously discussed, the online data system 206 can include a processor (e.g., a CPU, microprocessor, or some other similar or suitable type of processor) that processes the one or more data signals 269 and stores data collected based on the processing of the data signals 269 on a memory of the online data system 206. The processor of the online data system 206 can perform real-time analysis with the one or more data signals 269 to determine whether the specialty fluid is within a selected tolerance. This real-time analysis performed by the online data system 206 is discussed in further detail with respect to the flowchart 700 shown in FIG. 7. Figure 7 The flowchart 700 shown in FIG. 7 further discusses this real-time analysis performed by the online data system 206 in further detail with respect to the control block diagram shown in FIG. 6. Data stored on the memory of the online data system 206 can be utilized to generate one or more real-time specialty fluid specifications that can be compared to manufacturer technical specifications to verify or determine whether the manufacturer technical specifications are accurate and consistent with respect to the specialty fluid being tested. By continuously collecting, monitoring, and comparing real-time data collected by the online data system 206 by testing the specialty fluid using the analyzer 268, the quality and consistency of the specialty fluid provided by various manufacturers of the specialty fluid can be monitored in real-time to determine which manufacturers of the specialty fluid consistently provide a quality sufficient specialty fluid for utilization within the FAB. Monitoring which manufacturers of the specialty fluid most consistently provide a sufficient quality of the specialty fluid allows the FAB to purchase from only those manufacturers that consistently (e.g., almost always) provide a sufficient quality of the specialty fluid to reduce scrap and rejections resulting from exposing the workpiece to an insufficient quality of the specialty fluid.

[0077] As should be readily appreciated, the online data system 206 is "on-line" in that the online data system 206 collects and processes real-time data signals 269 from the analyzers 268 to determine real-time data with respect to the specialty fluid being tested by the analyzers 268. In other words, unlike the offline data system 120, the online data system 206 is in electrical communication with the analyzers 268 of the system 200, which are fluidically on-line and hooked up to one or more workpiece processing tools 250 of a FAB, such that the system 200 is "on-line" and the online data system 206 is "on-line."

[0078] Figure 7 A flowchart 700 illustrating a control block diagram for real-time monitoring and testing of a specialty fluid within the specialty fluid containers 214a, 214b within one or more gas cabinets 202 and determining whether the specialty fluid is of sufficient quality to be introduced to one or more workpiece processing tools 250 to reduce the probability of creating scrap or rejects from exposing workpieces within the workpiece processing tools to a specialty fluid of insufficient quality is described. For example, this process can be performed by the processor of the online data system 206 in the fifth step 610 of the method illustrated in the flowchart 600 as shown in the flowchart 700.

[0079] In at least one embodiment of the control block diagram of the flowchart 700, after the data signals 269 output by the analyzers 268 are received by the processor of the online data system 206, in the first block 702 of the flowchart 700, the processor of the online data system 206 can process the data signals 269 such that the data is collected and analyzed by the processor of the online data system 206. One such type of analysis can be determining whether the specialty fluid being tested by the analyzers 268 is within one or more tolerances or meets one or more predetermined values. For example, this one or more tolerances or one or more predetermined values can include at least one of a contaminant content threshold, a temperature threshold, a composition makeup, or some other type of tolerance, predetermined value, or characteristic that is analyzed by the analyzers 268 to determine whether the specialty fluid is of sufficient quality and within one or more tolerances. For the sake of brevity and simplicity of the present disclosed embodiments, the following discussion will focus on when the one or more tolerances or one or more predetermined values include a contaminant content threshold.

[0080] When the one or more tolerances or the one or more predetermined values include or are a contaminant content threshold, in a fifth step 610 of flowchart 600, the analyzer 268 performs one or more tests on the special fluid received from at least one of the one or more gas cabinets 202, the processor of the online data system 206 processes the data signal 269 output by the analyzer 268, and the processor of the online data system 206 compares the contaminant content measured by the analyzer 268 to the contaminant threshold. In some embodiments, if the contaminant content measured by the analyzer 268 is greater than the contaminant content threshold, then the flowchart 700 proceeds to a second block 704 and alternatively, if the contaminant content measured by the analyzer 268 is less than or equal to the contaminant content threshold, then the flowchart 700 alternatively proceeds to a third block 706. In some alternative embodiments, if the contaminant content measured by the analyzer 268 is greater than or equal to the contaminant content threshold, then the flowchart 700 proceeds to the second block 704 and alternatively, if the contaminant content measured by the analyzer 268 is less than the contaminant content threshold, then the flowchart 700 alternatively proceeds to the third block 706. While not discussed in detail, it should be readily appreciated that this comparison between the contaminant content measured by the analyzer and the contaminant content threshold can be readily adapted for any other number of types of tolerances (e.g., temperature, composition composition, etc.).

[0081] When the contaminant content measured by the analyzer 268 is outside of the selected contaminant content threshold, the flowchart 700 proceeds to the second block 704. In the second block 704, the processor of the online data system 206 can be configured to prevent or control utilization of the insufficient quality special fluid to avoid introducing the insufficient quality special fluid into one or more workpieces within the one or more workpiece processing tools 250. For example, the online data system 206 can be in electrical communication with a controller or one or more actuators that control the fifth valve 252 and the sixth valve 254. For example, the online data system 206 provides an instruction signal to the controller or one or more actuators such that either or both of the fifth valve 252 and the sixth valve 254 are closed or remain closed, respectively, to avoid and prevent introduction of the insufficient quality special fluid into the one or more workpiece processing tools 250. Alternatively, when there is a second three-way valve 256 instead of the fifth and sixth valves 252, 254, the online data system 206 can be in electrical communication with a controller or an actuator that controls the second three-way valve 256 such that the online data system 206 provides an instruction signal to the controller or actuator. For example, the online data system 206 provides an instruction signal to the controller or actuator such that the second three-way valve 256 is closed or remains closed, respectively, to avoid and prevent introduction of the insufficient quality special fluid into the one or more workpiece processing tools 250.

[0082] When the contaminant content measured by the analyzer 268 is outside of the selected contaminant content threshold, in a second block 704, the processor of the online data system 206 can output a warning notification to a display of the online data system 206 or a display within a control room of the FAB that is easily visible to employees of the FAB such that the employees are notified that the specialty fluid mass within a respective one of the one or more specialty fluid containers 214a, 214b within one of the one or more gas cabinets 202 is insufficient. This warning notification that is visible to employees of the FAB can include an indication of which particular one of the one or more specialty fluid containers 214a, 214b can contain the insufficient specialty fluid mass such that an employee of the FAB can replace the specialty fluid container 214a, 214b with a new specialty fluid container of the specialty fluid container 214a, 214b that should contain a sufficient specialty fluid mass. In some embodiments, once the specialty fluid container 214a, 214b containing the insufficient specialty fluid mass is replaced by the new specialty fluid container 214a, 214b that should contain a sufficient specialty fluid mass, the processor of the online data system 206 can automatically detect that the replacement has occurred and continue to return to the first block 702 of the flowchart 700. In some alternative embodiments, an employee of the FAB can need to provide input through a user interface of the online data system 206 or in the control room of the FAB such that the flowchart continues from the second block 704 back to the first block 702.

[0083] When the contaminant content of the specialty fluid measured by the analyzer 268 is less than or in some embodiments, equal to the contaminant content threshold, the processor of the online data system 206 determines that the specialty fluid mass is sufficient such that the specialty fluid is introduced to the one or more workpiece processing tools 250 for processing or refining one or more workpieces. For example, the online data system 206 can be in electrical communication with a controller or one or more actuators that control the fifth valve 252 and the sixth valve 254. For example, the online data system 206 provides an instruction signal to the controller or one or more actuators such that either or both of the fifth valve 252 and the sixth valve 254 are respectively opened or remain open to introduce the sufficient specialty fluid mass to the one or more workpiece processing tools 250 for processing or refining one or more workpieces using the one or more workpiece processing tools 250. Alternatively, when there is a second three-way valve 256 instead of the fifth and sixth valves 252, 254, the online data system 206 can be in electrical communication with a controller or an actuator that controls the second three-way valve 256 such that the online data system 206 provides an instruction signal to the controller or actuator. For example, the online data system 206 provides an instruction signal to the controller or actuator such that the second three-way valve 256 is respectively opened or remains open to introduce the sufficient specialty fluid mass to the one or more workpiece processing tools 250 for processing one or more workpieces using the one or more workpiece processing tools 250.

[0084] After introducing a sufficient quantity of special fluid into one or more workpiece handling tools 250, flowchart 700 correspondingly returns from the third box 706 to the first box 702. This process is repeated continuously. Figure 7 The control block diagram shown in flowchart 700 above describes a process for monitoring the quality of a special fluid to be introduced into one or more workpiece processing tools 250, enabling real-time determination of the special fluid quality. This real-time monitoring of the special fluid quality reduces the probability that one or more workpieces processed by one or more workpiece processing tools 250 will be exposed to a special fluid of insufficient quality that could degrade the quality of one or more workpieces.

[0085] In view of the above discussion, such as Figure 7 The control block diagram shown in flowchart 700 allows an external processor, either the online data system 206 or the analyzer and sampler 204, to determine whether the specialty fluid is within selected tolerances, ensuring sufficient quality of the specialty fluid before it is supplied to one or more workpiece handling tools 250. When the specialty fluid quality is insufficient, this reduces the probability of exposing one or more workpieces within one or more workpiece handling tools 250 to the specialty fluid, or completely avoids such exposure, thereby reducing scrap and end-of-life costs borne by the FAB. In some alternative embodiments, the analyzer and sampler 204 may include a processor electrically connected to and configured to process the data signal 269 output by the analyzer 268.

[0086] In view of the discussion within this disclosure, it should be readily apparent that monitoring real-time quality degradation waste and scrap costs of specialty fluids introduced to one or more workpiece processing tools 250 and allowing monitoring of consistency of quality of specialty fluids provided by manufacturers of specialty fluids. Waste and scrap costs borne by the FAB are reduced because specialty fluids of insufficient quality are not introduced to one or more workpiece processing tools 250 so that workpieces are not degraded by exposure to specialty fluids of insufficient quality. This reduces the number of insufficient quality semiconductor products provided to customers and in turn increases the yield of many semiconductor products of sufficient quality provided by customers. In other words, the hourly throughput (UPH) of the FAB is increased by avoiding or preventing introduction of specialty fluids of insufficient quality to workpieces processed by one or more workpiece processing tools 250. Consistency of specialty fluids provided by manufacturers can be monitored because data collected by online data system 206 by performing one or more tests on specialty fluids in real-time using analyzer 268 can be compared to manufacturer specifications for specialty fluids to determine whether manufacturers are providing sufficient quality specialty fluids for utilization within the FAB and to be introduced to one or more workpiece processing tools. Monitoring this consistency of quality of specialty fluids provided by various manufacturers of specialty fluids allows the FAB to reduce costs because specialty fluids can only be purchased from manufacturers providing sufficient quality specialty fluids almost all of the time, thereby reducing the probability of introducing insufficient quality specialty fluids into one or more workpiece processing tools 250.

[0087] A system can be summarized as including: an online analysis system; a workpiece processing tool; a gas cabinet including a gas container receiving structure; an analysis fluid path extending from the gas container receiving structure to the online analysis system, wherein the gas container receiving structure is in fluid communication with the online analysis system through the analysis fluid path; and a processing fluid path extending from the gas container receiving structure to the workpiece processing tool, wherein the gas container receiving structure is in fluid communication with the workpiece processing tool through the processing fluid path.

[0088] A method can be summarized as including moving a fluid from within a gas container within a gas cabinet along a fluid analysis path to an end of the fluid analysis path at a switchbox of an online analysis system; moving the fluid through the switchbox to an online analysis tool of the online analysis system by allowing the fluid to travel through the switchbox to the online analysis tool by opening the switchbox at the end of the fluid analysis path; performing one or more types of tests on the fluid using one or more sensors of the online analysis tool of the online analysis system; generating one or more data signals based on results of the one or more types of tests on the fluid; receiving the one or more data signals at an online data system in electrical communication with the online analysis system; and processing a workpiece when the data signals satisfy a predetermined value.

[0089] A specialty gas online analysis system can be summarized as including a purge fluid source containing a purge fluid; a switchbox including a plurality of fluid paths; a plurality of first valves, each of the plurality of first valves being in fluid communication with one of the plurality of fluid paths, each of the plurality of first valves having a closed position and an open position, and during operation, one of the plurality of first valves is opened to allow fluid from one of the plurality of fluid paths to travel through the switchbox; and a plurality of second valves, each of the plurality of second valves being in fluid communication with one of the plurality of fluid paths and in fluid communication with the purge fluid source, each of the plurality of second valves having a closed position and an open position, and during operation, one of the plurality of second valves is opened to allow the purge fluid to travel through the switchbox and into one of the plurality of fluid paths; an online analysis tool in fluid communication with the plurality of first valves; an offline sampler tool in fluid communication with the plurality of first valves; a calibration fluid source containing a calibration fluid and in fluid communication with the online analysis tool; and a vent port in fluid communication with the online analysis tool.

[0090] The foregoing summary of features of several embodiments recited herein enables one of ordinary skill in the art to better understand the aspects of the present disclosure embodiments. One of ordinary skill in the art will readily recognize a variety of ways both of the present disclosure embodiments and equivalent structures thereof which, while not expressly described or shown herein, embody the principles of the present disclosure and are included within its spirit and scope. From the above disclosure of features of the present disclosure embodiments, those of ordinary skill in the art will readily perceive improvements, equivalents and modifications within the spirit and scope of the present disclosure embodiments. It is, therefore, intended that the present disclosure embodiments be considered as exemplary only, with a full scope being indicated by the following claims.

[0091] Legend

[0092] 100: system

[0093] 102: Special fluid container

[0094] 104: Gas cabinet

[0095] 106: Arrow

[0096] 108: Arrow

[0097] 110: First fluid path

[0098] 112: Controller / selector

[0099] 114: Second fluid path

[0100] 116: Special fluid analysis tool

[0101] 118: Data

[0102] 120: Off-line data system

[0103] 122: Flowchart

[0104] 124: First step

[0105] 126: Second step

[0106] 128: Third step

[0107] 130: Fourth step

[0108] 132: Fifth step

[0109] 134: Sixth step

[0110] 200: System

[0111] 202: Gas cabinet

[0112] 204: Special fluid analyzer and sampler

[0113] 206: On-line data system

[0114] 208: Test fluid path

[0115] 210: Switch box

[0116] 212: Special fluid analyzer, sampler or test tool / test tool

[0117] 214a: First fluid container

[0118] 214b: Second fluid container

[0119] 216: Housing

[0120] 218: Door

[0121] 220: Fluid container storage chamber

[0122] 222a: first fluid container receiving structure / first gas container receiving structure

[0123] 222b: second fluid container receiving structure / second gas container receiving structure

[0124] 224a: first fluid container valve

[0125] 224b: second fluid container valve

[0126] 226: first valve receiving assembly

[0127] 228: second valve receiving assembly

[0128] 230: first fluid path

[0129] 232: second fluid path

[0130] 234: first valve

[0131] 236: second valve

[0132] 238: third valve

[0133] 240: fourth valve

[0134] 242: first three-way valve

[0135] 244: position

[0136] 246: third fluid path

[0137] 248: fourth fluid path

[0138] 250: workpiece processing tool

[0139] 252: fifth valve

[0140] 254: sixth valve

[0141] 256: second three-way valve

[0142] 258: switchbox inlet

[0143] 260: switchbox inlet valve

[0144] 262: third three-way valve

[0145] 264: fourth three-way valve

[0146] 266: fifth three-way valve

[0147] 268: analyzer

[0148] 269: data signal

[0149] 270: standard calibration device

[0150] 272: standardized fluid valve

[0151] 274: offline sampler

[0152] 276: flush fluid inlet

[0153] 278: drain fluid outlet

[0154] 280: flush fluid path

[0155] 282: sixth three-way valve

[0156] 284: switchbox outlet valve

[0157] 286: switchbox outlet

[0158] 288: drain fluid path

[0159] 600: flowchart

[0160] 602: first step

[0161] 604: second step

[0162] 606: third step

[0163] 608: fourth step

[0164] 610: fifth step

[0165] 700: flowchart

[0166] 702: first block

[0167] 704: second block

[0168] 706: third block

Claims

1. A system for online analysis of specialty gases, characterized in that... It includes: Online analysis system; Workpiece handling tools; A gas holder, which includes a gas container receiving structure; An analytical fluid path extends from the gas container receiving structure to the online analysis system, wherein the gas container receiving structure is in fluid communication with the online analysis system via the analytical fluid path; and A processing fluid path extends from the gas container receiving structure to the workpiece handling tool, wherein the gas container receiving structure is in fluid communication with the workpiece handling tool via the processing fluid path.

2. The system according to claim 1, characterized in that: The online analysis system includes: Switch box; and An online analysis tool is in fluid communication with the switch box; and The analytical fluid path extends from the gas container receiving structure to the switch box, wherein the gas container receiving structure is in fluid communication with the switch box through the analytical fluid path.

3. The system according to claim 2, characterized in that: The gas holder is one of a plurality of gas holders; and The analytical fluid path is one of a plurality of analytical fluid paths, each of which extends from one of the plurality of gas container receiving structures to the switch box, wherein each of the plurality of gas container receiving structures is in fluid communication with the switch box through one of the plurality of analytical fluid paths.

4. The system according to claim 1, characterized in that: The gas container receiving structure is one of a plurality of gas receiving structures of the gas holder. The analytical fluid path is one of a plurality of analytical fluid paths, each of which is in fluid communication with one of the plurality of gas receiving structures; and The processing fluid path is one of a plurality of processing fluid paths, each of which is in fluid communication with one of the plurality of gas receiving structures.

5. The system according to claim 1, characterized in that... It further includes: A first valve, which runs along the analytical fluid path, has an open position and a closed position. A first valve is configured to control the flow of fluid through the analytical fluid path from the gas container receiving structure to the online analysis system; and A second valve, which runs along the processing fluid path, has an open position and a closed position, and is configured to control the flow of fluid through the processing fluid path from the gas container receiving structure to the workpiece handling tool.

6. A method for online analysis of specialty gases, characterized in that... It includes: The fluid from the gas container inside the gas holder is moved along the fluid analysis path to one end of the fluid analysis path at the switch box of the online analysis system; By opening the switch box at the end of the fluid analysis path, the fluid is allowed to travel through the switch box to the online analysis tool of the online analysis system, and the fluid is moved to the online analysis tool through the switch box; One or more sensors of the online analysis tool of the online analysis system are used to perform one or more types of tests on the fluid; One or more data signals are generated based on the results of one or more types of tests on the fluid; Receive one or more data signals at an online data system electrically connected to the online analysis system; and The workpiece is processed when the data signals meet the predetermined values.

7. The method according to claim 6, characterized in that... It further includes outputting a notification when the fluid has a contamination level greater than a selected contamination level threshold.

8. An online analysis system for specialty gases, characterized in that... It includes: A flushing fluid source that holds the flushing fluid; A switch box comprising: Multiple fluid paths; A plurality of first valves, each of the plurality of first valves being in fluid communication with one of the plurality of fluid paths, each of the plurality of first valves having a closed position and an open position, and during operation, opening one of the plurality of first valves to allow fluid from one of the plurality of fluid paths to travel through the switch box; and A plurality of second valves, each of which is in fluid communication with one of the plurality of fluid paths and with the flushing fluid source, each of the plurality of second valves having a closed position and an open position, and during operation, opening one of the plurality of second valves to allow the flushing fluid to travel through the switch box and into one of the plurality of fluid paths; An online analysis tool, which is in fluid communication with the plurality of first valves; An offline sampler tool that is in fluid communication with the plurality of first valves; A calibration fluid source, which contains calibration fluid and is in fluid communication with the online analysis tool; and The emission port is in fluid communication with the online analysis tool.

9. The online analysis system according to claim 8, characterized in that... During operation, the calibration fluid is transferred from the calibration fluid source to the online analysis tool.

10. The online analysis system according to claim 8, characterized in that... The online analysis tool includes one or more sensors configured to perform multiple online tests.

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