Novel secondary feeding pipe of semiconductor furnace

Abstract

The invention discloses a novel secondary feeding pipe of a semiconductor furnace. A novel secondary feeding pipe for a semiconductor furnace comprises a feeding pipe, and a feeding assembly is longitudinally connected into the feeding pipe in a sliding mode. A first boss and a second boss which extend outwards and are arranged up and down are fixed to the outer wall of the feeding pipe, the first boss is located at the top of the feeding pipe, the upper portion of the first boss is detachably connected with a top buffering ring through a top connecting screw, and the portion, located above the locking ring, of the threaded rod is sleeved with a supporting plate and a dustproof plate which are arranged from bottom to top; the supporting plate is detachably connected with the first boss, and the dustproof plate is erected above the top buffering ring. The upper part of the second boss is detachably connected with a middle buffer ring through a middle connecting screw to form a middle supporting piece; the bottom supporting piece is arranged on the periphery of the feeding pipe in a sleeving mode, and the middle supporting piece is connected with the bottom supporting piece through a height adjusting piece. According to the invention, the position of charging to the silicon liquid level is adjusted, so that the secondary charging silicon material uniformly flows into the silicon liquid level.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a secondary feeding tube for a single crystal furnace. Background Technology

[0002] In the semiconductor crystal pulling process, in order to make the crystal rod longer, it is necessary to use a secondary feeding method. With the same quartz crucible, more silicon material can be loaded, which can make the crystal rod longer, thereby saving the cost of manufacturing a single crystal rod. In other words, the longer a single crystal rod is, the more wafers can be produced, and the lower the cost.

[0003] Ensuring the purity of the feed through the secondary feeding pipe, avoiding the introduction of external dust, and preventing collision risks during the feeding and discharging process are all urgent problems that need to be overcome for the secondary feeding pipe. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention provides a novel secondary feeding tube for a semiconductor furnace, which solves at least one of the aforementioned technical problems.

[0005] The technical solution of the present invention is: a novel secondary feeding tube for a semiconductor furnace, characterized in that it includes a feeding tube, and a feeding component is longitudinally slidably connected inside the feeding tube;

[0006] The feeding assembly includes a screw, on which a nut, a retaining ring, a plug, a quartz tube, and a locking ring are connected sequentially from bottom to top. The nut and the locking ring are threadedly connected to the screw.

[0007] The outer wall of the feeding tube is fixed with an outwardly extending first protrusion and a second protrusion arranged vertically. The first protrusion is located at the top of the feeding tube. A top buffer ring is detachably connected above the first protrusion by a top connecting screw. The outer diameter of the top buffer ring decreases from top to bottom.

[0008] The screw is fitted with a support plate and a dustproof plate arranged from bottom to top above the locking ring. The support plate is detachably connected to the first boss, and the dustproof plate is placed above the top buffer ring.

[0009] A central buffer ring is detachably connected above the second boss via a central connecting screw, forming a central support member. The outer diameter of the central buffer ring increases from top to bottom.

[0010] It also includes a bottom support for being fitted around the feed tube. The bottom support includes a support ring arranged vertically and a bottom buffer ring. The outer diameter of the bottom buffer ring increases from bottom to top. The support ring and the bottom buffer ring are detachably connected by a bottom connecting screw.

[0011] The middle support is connected to the bottom support via a height adjustment component.

[0012] This invention optimizes the structure of the feeding pipe and uses a dustproof plate to ensure that the silicon material is not contaminated.

[0013] The height of the bottom support can be adjusted by the height adjustment component, thereby adjusting the position of the feed material on the silicon liquid surface, so that the secondary feed silicon material flows evenly into the silicon liquid surface.

[0014] The tapered design of the buffer ring ensures that the feed tube uses a soft material guide structure for both entry and exit, allowing the quartz tube to smoothly enter the upper furnace cylinder or isolation valve. Even if accidentally bumped, the quartz tube will not crack, reducing the risk of secondary feeding and lowering operating costs.

[0015] More preferably, the feeding tube is a quartz tube.

[0016] More preferably, the plug has a conical structure that is narrower at the top and wider at the bottom;

[0017] The bottom of the plug has a recessed portion, and the nut and the retaining ring are located in the recessed portion.

[0018] More preferably, the bottom of the quartz tube abuts against the top of the plug.

[0019] More preferably, the maximum outer diameters of the top buffer ring, the middle buffer ring, and the bottom lower buffer ring 3 are all equal and larger than the outer diameters of the support ring, the first boss, and the second boss.

[0020] More preferably, the top buffer ring, the middle buffer ring, and the bottom buffer ring 3 are all made of Teflon.

[0021] It uses a soft Teflon material to better protect the quartz tube.

[0022] More preferably, the height adjustment component includes at least three circumferentially arranged adjustment screws, the adjustment screws passing through the central support component, and the top of the adjustment screws being threadedly connected to a first nut and a second nut arranged vertically, with a Teflon buffer ring sandwiched between the lower second nut and the central support component;

[0023] The adjusting screw passes through the bottom support member, and the bottom of the adjusting bolt is threaded with a third nut and a fourth nut clamped on both sides of the bottom support member;

[0024] A Teflon buffer ring is sandwiched between the third nut located at the top and the support ring.

[0025] More preferably, the bottom buffer ring has a clearance groove for avoiding the height adjustment member.

[0026] More preferably, the bottom buffer ring consists of four circumferentially arranged Teflon blocks.

[0027] More preferably, the central buffer ring is composed of two semi-circular Teflon blocks joined together.

[0028] More preferably, the top buffer ring is composed of two semi-circular Teflon blocks joined together.

[0029] More preferably, a lifting ring is detachably connected to the top of the screw.

[0030] Beneficial effects:

[0031] 1. High-purity quartz material is used to ensure that the silicon material will not be contaminated.

[0032] 2. The plug adopts a conical sealing structure to ensure reliable sealing of the contact surface and prevent small silicon particles from falling out.

[0033] 3. A replaceable segmented sleeve is used, so even if one segment is damaged, it will not affect the loading process; a new quartz sleeve can be replaced.

[0034] 4. The inlet and outlet are guided by soft materials to ensure that the quartz tube can enter the upper furnace cylinder or isolation valve smoothly. Even if it is accidentally bumped, the quartz tube will not crack, reducing the risk of secondary feeding and lowering the cost of use.

[0035] 4. Add a dustproof plate design to prevent external dust from contaminating the silicon material after it is added to the quartz tube, thus ensuring the purity of the added material. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of a specific embodiment 1 of the present invention;

[0037] Figure 2 This is a cross-sectional view of specific embodiment 1 of the present invention;

[0038] Figure 3 This is a three-dimensional structural diagram of a specific embodiment 1 of the present invention.

[0039] In the diagram: 1. Feeding pipe, 2. Plug, 3. Bottom buffer ring, 4. Teflon buffer ring, 5. Support ring, 6. Middle buffer ring, 7. Top buffer ring, 8. Support plate, 9. Screw, 10. Nut, 11. Retaining ring, 12. Quartz tube, 13. Lifting eye, 14. Locking ring, 15. Dustproof plate, 16. First nut, 17. Second flat washer, 18. Bottom connecting screw, 19. Middle connecting screw, 20. Top connecting screw, 21. First flat washer, 22. Screw, 23. Adjusting screw. Detailed Implementation

[0040] See Figures 1 to 3 Specific embodiment 1: A novel secondary feeding tube for a semiconductor furnace includes a feeding tube 1, with a feeding assembly slidably connected longitudinally within the feeding tube 1. The feeding assembly includes a screw 9, with a nut, a retaining ring 11, a plug 2, a quartz tube 12, and a locking ring 14 connected sequentially from bottom to top on the screw 9. The nut 10 and the locking ring 14 are threadedly connected to the screw 9. The outer wall of the feeding tube 1 is fixed with an outwardly extending and vertically arranged first and second protrusions. The first protrusion is located at the top of the feeding tube 1, and a top buffer ring 7 is detachably connected above the first protrusion via a top connecting screw 20. The outer diameter of the top buffer ring 7 decreases from top to bottom. A support plate 8 and a dustproof plate 15, arranged from bottom to top, are sleeved above the screw 9, located above the locking ring 14. The support plate 8 is detachably connected to the first protrusion. A notch is provided on the top buffer ring for the support plate to extend out. The support plate 8 is detachably connected to the first protrusion via a screw 22. The screw 22 is an M10*45 socket head cap screw. A dustproof plate 15 is mounted above the top buffer ring 7; a central buffer ring 6 is detachably connected above the second protrusion via a central connecting screw 19, forming a central support member, the outer diameter of which increases from top to bottom; a bottom support member is also included for fitting around the feed tube 1, comprising a support ring 5 positioned vertically and a lower bottom buffer ring 3, the outer diameter of which increases from bottom to top, and the support ring 5 and the lower bottom buffer ring 3 are detachably connected via a bottom connecting screw 18; the central support member is connected to the bottom support member via a height adjustment member. This invention optimizes the structure of the feed tube 1 and, through the dustproof plate 15, ensures that the silicon material is not contaminated.

[0041] The height of the bottom support can be adjusted by the height adjustment component, thereby adjusting the position of the feed material on the silicon liquid surface, so that the secondary feed silicon material flows evenly into the silicon liquid surface.

[0042] The tapered design of the buffer ring ensures that the feeding tube 1 uses a soft material guide structure for both entry and exit, ensuring that the quartz tube 12 can smoothly enter the upper furnace cylinder or isolation valve. Even if it is accidentally bumped, the quartz tube 12 will not crack, reducing the risk of secondary feeding and lowering the cost of use.

[0043] The silicon material is loaded through this secondary feeding pipe to ensure that it is not contaminated.

[0044] When this secondary feeding tube enters the upper furnace cylinder, it is guided by the top buffer ring 7. Because it is tapered, it enters smoothly. It is made of soft Teflon material, which better protects the quartz tube.

[0045] When this secondary feed tube enters the isolation valve, it is guided by the bottom buffer ring 3. Because it is tapered, the entry is relatively smooth. It is made of soft Teflon material, which better protects the quartz tube.

[0046] A Teflon buffer ring is sandwiched between the first boss and the screw.

[0047] Feed tube 1 is a quartz tube.

[0048] The plug 2 has a conical structure that is narrower at the top and wider at the bottom; the bottom of the plug 2 has a concave portion, where the nut and retaining ring 11 are located. The plug is used to seal the bottom opening of the feeding pipe. When the plug abuts against the bottom of the feeding pipe, the bottom of the feeding pipe is sealed. When the plug moves downward, an annular discharge gap is formed between the plug and the bottom of the feeding pipe.

[0049] The bottom of the quartz tube 12 abuts against the top of the plug 2.

[0050] The top buffer ring 7, the middle buffer ring 6, and the bottom buffer ring 3 all have the same maximum outer diameter, which is larger than the outer diameter of the support ring, the first boss, and the second boss. The top buffer ring 7, the middle buffer ring 6, and the bottom buffer ring 3 are all made of Teflon. The use of soft Teflon material better protects the quartz tube.

[0051] The height adjustment mechanism includes at least three circumferentially arranged adjusting screws 23. The adjusting screws 23 pass through a central support member, and their tops are threadedly connected to a first nut 16 and a second nut, positioned vertically. The first nut 16 and the second nut are clamped on the upper and lower sides of the central support member. A Teflon buffer ring 4 is clamped between the lower second nut and the central support member. The adjusting screw 23 passes through a bottom support member, and its bottom is threadedly connected to a third nut and a fourth nut, clamped on both sides of the bottom support member. A Teflon buffer ring 4 is clamped between the upper third nut and the support ring 5. A first flat washer 21 is clamped between the first nut 16 and the central support member. A second flat washer 17 is clamped between the second nut and the Teflon buffer ring 4.

[0052] The bottom buffer ring 3 has a clearance groove for avoiding the height adjustment component.

[0053] The bottom buffer ring 3 consists of four Teflon blocks arranged circumferentially.

[0054] The central buffer ring 6 is composed of two semi-circular Teflon blocks joined together.

[0055] The top buffer ring 7 is composed of two semi-circular Teflon blocks joined together.

[0056] The top of the screw 9 is detachably connected to a lifting ring 13.

[0057] The assembly method includes the following steps:

[0058] Step 1: Install nut 10 and retaining ring 11 onto screw 9, adjust nut 10 to the position of screw 9, and adjust nut 10 to the end face of screw 9 by 5-8mm.

[0059] Step 2: Insert the nut 10, retaining ring 11, and screw 9 assembly into the plug 2.

[0060] The third step is to put the quartz tube 12 onto the screw 9 and use the locking ring 14 to lock it onto the screw 9. Adjust the looseness to ensure that the quartz tube 12 will not be crushed.

[0061] Step 4: Install the bottom buffer ring 3 onto the support ring 5 using the bottom connecting screw 18 (M10*25 hex socket screw).

[0062] Step 5: Install the Teflon buffer ring 4 and the middle buffer ring 6 onto the feed pipe 1 using the middle connecting screw 19 (M10*80 hex socket screw), the second flat washer 17 (M10 flat washer), and the first flat washer 21 (M10 flat washer), and ensure that the screws are tightened.

[0063] Step 6: The Teflon buffer ring 4, the middle buffer ring 6, and the feeding pipe 1 are assembled together. Then, the bottom buffer ring 3, the support ring 5, and the Teflon buffer ring 4 are fixed to the assembly using the adjusting screw, M10 hexagonal head nut, and M10 flat washer. The height of the bottom support is adjusted by using the M10 hexagonal head nut.

[0064] Step 7: Install the top buffer ring and Teflon buffer ring 4 onto the feed pipe 1, and secure them firmly with the top connecting screw 20 (M10*45 socket head cap screw) and M10 flat washer.

[0065] Step 8: Insert the feeding assembly into the feeding tube 1 and fix the upper end with the support plate 8. The support plate 8 is fixed with screw 22 (M10*50 internal hex screw).

[0066] Step 9: Fit the dustproof plate 15 onto the screw 9.

[0067] Step 10: Install the lifting ring 13 onto the top of the screw 9 and tighten it.

[0068] Step 11: Finally, check that all screws are installed and tightened, and mark them accordingly.

[0069] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A novel secondary feeding tube for a semiconductor furnace, characterized in that, Includes a feeding pipe, and a feeding assembly is slidably connected longitudinally inside the feeding pipe; The feeding assembly includes a screw, on which a nut, a retaining ring, a plug, a quartz tube, and a locking ring are connected sequentially from bottom to top. The nut and the locking ring are threadedly connected to the screw. The outer wall of the feeding tube is fixed with an outwardly extending first protrusion and a second protrusion arranged vertically. The first protrusion is located at the top of the feeding tube. A top buffer ring is detachably connected above the first protrusion by a top connecting screw. The outer diameter of the top buffer ring decreases from top to bottom. The screw is fitted with a support plate and a dustproof plate arranged from bottom to top above the locking ring. The support plate is detachably connected to the first boss, and the dustproof plate is placed above the top buffer ring. A central buffer ring is detachably connected above the second boss via a central connecting screw, forming a central support member. The outer diameter of the central buffer ring increases from top to bottom. It also includes a bottom support for being fitted around the feed tube. The bottom support includes a support ring arranged vertically and a bottom buffer ring. The outer diameter of the bottom buffer ring increases from bottom to top. The support ring and the bottom buffer ring are detachably connected by a bottom connecting screw. The middle support is connected to the bottom support via a height adjustment component.

2. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The feeding tube is a quartz tube.

3. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The plug has a conical structure that is narrow at the top and wide at the bottom; The bottom of the plug has a recessed portion, and the nut and the retaining ring are located in the recessed portion.

4. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The bottom of the quartz tube abuts against the top of the plug.

5. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The maximum outer diameters of the top buffer ring, the middle buffer ring, and the bottom buffer ring are all equal and larger than the outer diameters of the support ring, the first boss, and the second boss.

6. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The top buffer ring, the middle buffer ring, and the bottom buffer ring are all made of Teflon.

7. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The height adjustment component includes at least three circumferentially arranged adjustment screws, which pass through the central support component. The top of each adjustment screw is threaded with a first nut and a second nut arranged vertically. A Teflon buffer ring is sandwiched between the lower second nut and the central support component. The adjusting screw passes through the bottom support member, and the bottom of the adjusting bolt is threaded with a third nut and a fourth nut clamped on both sides of the bottom support member; A Teflon buffer ring is sandwiched between the third nut located at the top and the support ring.

8. The novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The bottom buffer ring has a clearance groove for avoiding the height adjustment component.

9. A novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The bottom buffer ring consists of four circumferentially arranged Teflon blocks; The central buffer ring is composed of two semi-circular Teflon blocks joined together. The top buffer ring is composed of two semi-circular Teflon blocks joined together.

10. A novel secondary feeding tube for a semiconductor furnace according to claim 1, characterized in that: The top of the screw is detachably connected to a lifting ring.

Images