Diaphragm valve and diaphragm state monitoring method and system

Abstract

The invention relates to the technical field of diaphragm valve state monitoring, and discloses a diaphragm valve, a diaphragm state monitoring method and a diaphragm state monitoring system. The pressure sensor is arranged in the dry side cavity of the diaphragm valve, and pressure changes caused by movement of the diaphragm are directly monitored. Based on the hardware, the method comprises the following steps: acquiring a dry side pressure signal, extracting waveform characteristic parameters, and comparing the waveform characteristic parameters with a health reference to diagnose the condition of the diaphragm. The system integrates the diaphragm valve and the signal processing module to execute the method. The system has the remarkable advantages that the limitation of a traditional indirect monitoring mode is broken through, direct and real-time sensing of the health state of the diaphragm body is achieved, and potential faults such as fatigue and micro leakage can be recognized in the early stage. According to the method, a reliable data basis is provided for predictive maintenance, the problem of monitoring hysteresis is fundamentally solved, and the reliability and maintenance economy of equipment applied to high-requirement fields such as semiconductors and biological pharmacy are remarkably improved.

Description

Technical Field

[0001] This application relates to the field of diaphragm valve diaphragm condition monitoring technology, and claims protection for a diaphragm valve, a diaphragm condition monitoring method, and a diaphragm condition monitoring system. Background Technology

[0002] In industries with stringent requirements for cleanliness and reliability, such as semiconductor manufacturing, biopharmaceuticals, and fine chemicals, diaphragm valves are widely used as critical fluid control components. Under long-term cyclic pressure and mechanical stress, the diaphragm can experience performance degradation or even failure. Therefore, effective monitoring of the diaphragm's health status is crucial for ensuring the stability and safety of production systems. Currently, the industry primarily relies on two methods for monitoring the condition of diaphragm valves. The first method is based on indirect signal analysis of the drive components, such as monitoring changes in the drive current and torque of electric actuators or position feedback signals from pneumatic actuators to infer the valve's operating status. The second method employs an experience-based preventative maintenance strategy, which involves setting fixed time or cycle intervals based on manufacturer recommendations or historical statistics, and replacing the diaphragm upon these intervals, regardless of its actual health condition at the time. However, these existing technical solutions have inherent limitations in practical applications. First, the monitoring method based on drive component signals has a weak correlation between the signal source and the physical state of the diaphragm itself. These signals primarily reflect the workload and endpoint position of the drive system, exhibiting extremely low sensitivity to performance degradation phenomena such as initial elasticity loss and internal micro-cracks in the diaphragm material. Typically, these indirect signals only become detectable when the diaphragm is damaged to a certain extent, significantly affecting valve opening / closing stroke or sealing performance, leading to delayed fault detection and missed opportunities for early warning and intervention. Secondly, the periodic replacement maintenance strategy fails to reflect the individual differences and actual operating load of each diaphragm valve. This results in a disconnect between maintenance decisions and the true health status of the equipment. On the one hand, over-maintenance may prematurely replace still-usable diaphragms, causing unnecessary spare parts costs and production line downtime. On the other hand, it cannot effectively prevent diaphragm damage due to sudden operating conditions or early material failure before the replacement cycle, posing potential risks to production continuity and cleanliness. Summary of the Invention

[0003] In order to solve the technical problems mentioned in the background, this application provides a diaphragm valve, a diaphragm condition monitoring method, and a diaphragm condition monitoring system.

[0004] This application provides a diaphragm valve, comprising: a valve body, a diaphragm, and a drive component; the diaphragm divides the internal space of the valve body into a dry-side cavity and a wet-side cavity for fluid flow; the drive component is configured to drive the diaphragm to move; characterized in that: it further comprises a pressure sensor, the pressure sensor being disposed in the dry-side cavity and used to monitor the pressure change in the dry-side cavity caused by the movement of the diaphragm, so as to generate a pressure signal characterizing the operating state of the diaphragm.

[0005] Optionally, the diaphragm valve further includes a signal processing module; the signal processing module is connected to the pressure sensor and configured to perform the following steps: extracting at least one feature parameter from the pressure waveform formed by the pressure signal, comparing the feature parameter with a reference parameter characterizing the health status, and determining the operating status of the diaphragm based on the comparison result.

[0006] Optionally, the characteristic parameters include at least one of the following: pressure peak value, pressure trough value, pressure waveform rise time, pressure waveform fall time, or area enclosed by the pressure waveform.

[0007] Optionally, the diaphragm valve is an ultra-clean diaphragm valve used in the semiconductor, biopharmaceutical, or fine chemical industries; and / or, the drive component is an electric or pneumatic drive component; the operating state of the diaphragm includes at least one of the following: healthy state, fatigue state, or leakage risk state.

[0008] Optionally, the pressure sensor is at least one of piezoresistive, capacitive, piezoelectric, or thin-film pressure sensors; the pressure sensor is connected to the outside of the valve through a sealed electrical interface; the pressure sensor is fixed to the inner wall of the dry side cavity through one of the following: threaded connection, embedded bonding, or snap-fit ​​structure.

[0009] This application also provides a method for monitoring the diaphragm status of a diaphragm valve, wherein the diaphragm valve is as described above;

[0010] The diaphragm condition monitoring method includes the following steps:

[0011] Collect pressure signals within the dry side cavity;

[0012] At least one characteristic parameter is extracted from the pressure waveform formed by the pressure signal;

[0013] The characteristic parameters are compared with benchmark parameters characterizing health status; and

[0014] Based on the comparison results, the operating status of the diaphragm is determined.

[0015] Optionally, the characteristic parameters include at least one of the following: pressure peak value, pressure trough value, pressure waveform rise time, pressure waveform fall time, area enclosed by the pressure waveform, fluctuation frequency, or waveform symmetry.

[0016] Optionally, the diaphragm may be in a healthy, fatigued, or leak-risk state.

[0017] This application also provides a diaphragm condition monitoring system, including a diaphragm valve and a signal processing module; the diaphragm valve is equipped with a pressure sensor; the diaphragm valve is as described above; the signal processing module is electrically connected to the pressure sensor and configured to perform the method described above.

[0018] Optionally, the system further includes: an early warning module and a maintenance decision module; the early warning module is used to issue an alarm when the signal processing module determines that the diaphragm is in an abnormal state; the maintenance decision module is used to generate maintenance suggestions or automatically trigger maintenance work orders based on the operating status of the diaphragm.

[0019] The advantages of this application compared to existing technologies are: it achieves direct, real-time, and visual monitoring of the diaphragm's health status, solving the fundamental problem of monitoring lag. By directly installing a pressure sensor within the dry-side cavity of the diaphragm, it achieves, for the first time, direct sensing of the diaphragm's own motion characteristics and health status. This completely changes the traditional mode of indirect inference based on actuator signals, enabling real-time capture of minute changes in dry-side pressure caused by diaphragm fatigue, elastic decay, or micro-leakage. It provides a unique, reliable, and direct physical signal source for early diaphragm fault diagnosis, fundamentally solving the monitoring lag problem.

[0020] This invention integrates a signal processing module and defines its intelligent diagnostic process based on pressure waveform feature extraction and comparison, transforming raw, continuous pressure signals into quantifiable diaphragm status indicators with clear physical meaning. This transforms diaphragm health status from vague qualitative judgments to precise quantitative or qualitative assessments, establishing a new, objective condition diagnosis standard and achieving an upgrade from "simple monitoring" to "intelligent diagnosis." By incorporating the signal processing module as a component of the diaphragm valve and defining its execution of intelligent processes for feature extraction, comparison, and status judgment, the invention integrates and pre-positions the condition diagnosis function. This transforms the diaphragm valve itself from a mere actuator into an intelligent terminal with preliminary "self-sensing" and "self-diagnostic" capabilities, laying the foundation for building a distributed intelligent monitoring network and improving the system's response speed and integration.

[0021] This invention provides a multi-dimensional and operable quantitative basis for condition diagnosis by clearly defining specific characteristic parameters such as pressure peak value, rise time, and waveform area. Different characteristic parameters can sensitively reflect different states of the diaphragm. For example, a prolonged rise time indicates a decrease in elasticity, and a decrease in pressure peak value suggests micro-leakage. This enables the accurate identification and differentiation of multiple potential fault modes, significantly improving the accuracy and reliability of diagnosis.

[0022] This invention, by limiting its application to ultra-clean fields such as semiconductors and biopharmaceuticals, and by explicitly diagnosing conditions including fatigue and leakage risks, highlights that the technical problem it solves is a pain point in specific high-end industrial fields, and its technical solution has high relevance and practical value. This indicates that this invention is not a simple general improvement, but a dedicated solution capable of meeting the high reliability requirements of extremely harsh environments.

[0023] This invention provides a flexible, reliable, and engineering-friendly solution for implementation by detailing the selectable sensor types, sealed electrical interfaces, and various installation methods. This ensures that the technical solution can be adapted to different cost, space, and reliability requirements. Meanwhile, the crucial sealed interface design guarantees the feasibility of integrating sensing elements in ultra-clean environments, avoiding the risk of contamination. This is the key technical guarantee that allows this invention to move from theory to practice.

[0024] The diaphragm condition monitoring method for diaphragm valves of this invention provides a universal diagnostic logic that is independent of specific hardware models. Even if the specific structure of the diaphragm valve differs, as long as this method is applied, the diaphragm condition can be effectively assessed, thus broadening the application scenarios and lifespan of this invention.

[0025] This invention enhances the detection sensitivity and diagnostic depth for complex failure modes, such as diaphragm oscillation and uneven wear, by further introducing richer characteristic parameters such as fluctuation frequency and waveform symmetry. This makes the condition assessment model more complete and intelligent, capable of dealing with more diverse operating conditions and failure modes, revealing earlier and more subtle signs of performance degradation, and achieving an advancement from "fault diagnosis" to "health prediction".

[0026] This invention concretizes the output of the diagnostic method into state types with clear maintenance guidance significance, such as health, fatigue, and leakage risk. This allows the monitoring results to be directly understood and applied by the operation and maintenance system, realizing the transformation from "data" to "decision information" and providing clear input for subsequent early warning and maintenance actions; completing the last mile of transformation from "quantitative parameters" to "operation and maintenance decisions." This enables field engineers and maintenance management systems to directly apply the monitoring results without professional interpretation, greatly improving the practicality of the technology and the user experience.

[0027] The diaphragm condition monitoring system provided by this invention achieves hardware and software synergy, constructing an automated and integrated solution from signal sensing and intelligent diagnosis to result output, which improves the efficiency and reliability of the entire monitoring process and facilitates deployment and application in industrial sites.

[0028] This invention also achieves closed-loop management from "status monitoring" to "maintenance execution" by adding an early warning module and a maintenance decision module. The system can not only detect problems, but also promptly issue alarms and intelligently recommend or trigger maintenance actions. This marks the evolution of the technical solution from an auxiliary diagnostic tool to a proactive predictive maintenance system, ultimately realizing the ultimate commercial value of improving equipment reliability, avoiding unplanned downtime, and optimizing maintenance resources. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the diaphragm valve structure in this application.

[0030] Figure 2 This is a partial cross-sectional schematic diagram of the dry-side cavity and the installation position of the pressure sensor in the diaphragm valve of this application.

[0031] Figure 3 This is a schematic diagram of the workflow of the diaphragm condition monitoring and diagnosis method in Embodiment 3 of this application.

[0032] Figure 4 This is a schematic diagram of the architecture of the diaphragm condition monitoring system in Embodiment 4 of this application.

[0033] 1. Signal line, 2. Pressure sensor, 3. Valve seat, 4. Diaphragm, 5. Sensor mounting threaded interface, 6. Dry side cavity, 7. Diaphragm dry side, 8. Diaphragm wet side. Detailed Implementation

[0034] The following are examples of specific implementation processes provided to illustrate the technical solutions to be protected in this application. However, this application may also be implemented in other ways different from those described herein. Those skilled in the art can implement this application by different technical means under the guidance of the concept of this application. Therefore, this application is not limited to the specific embodiments below.

[0035] Example 1:

[0036] like Figure 1 As shown in the diagram, this invention provides a structural schematic of a diaphragm valve. Figure 2 This is a partial cross-sectional schematic diagram of the dry-side cavity and the pressure sensor mounting position in the diaphragm valve. This embodiment provides a diaphragm valve, which may include a valve body, a diaphragm 4, and a drive component. In a specific implementation scenario, the valve body is the component that constitutes the main body of the diaphragm valve and forms the internal channel, for example... Figure 1 and Figure 2The valve includes the valve seat 3. The diaphragm 4 is a flexible component that physically isolates the internal space of the valve body, dividing it into two independent spaces. One space is a wet-side cavity for the flow of the target fluid, for example... Figure 2 The space facing the wet side 8 of the diaphragm 4 is connected to an external fluid pipeline. Another space is the dry-side cavity 6, which is a sealed or semi-sealed space located between the dry side 7 of the diaphragm 4 and the valve body or drive component housing. This space does not directly contact the target fluid. The drive component is a mechanism that provides power to displace the diaphragm 4. This drive component can be an electric actuator, a pneumatic actuator, or a manual mechanism, etc. In this embodiment, it is configured to drive the diaphragm 4 towards the valve seat 3 to close the valve, or to drive the diaphragm 4 away from the valve seat 3 to open the valve. It should be noted that this invention does not specifically limit this drive structure scheme; any mechanism capable of achieving reciprocating motion of the diaphragm falls within the protection scope of this invention. The core improvement of this embodiment is that the diaphragm valve also includes a pressure sensor 2. The pressure sensor 2 is disposed within the aforementioned dry-side cavity 6. This arrangement can cover various specific installation methods. In a preferred embodiment, such as... Figure 2 As shown, a sensor mounting threaded interface 5 can be pre-machined on the inner wall of the dry-side cavity 6. The pressure sensor 2 is screwed into this interface through its own threaded structure, thereby achieving a secure fixation and seal. In other embodiments, depending on the valve body material and space constraints, the pressure sensor 2 can also be fixed to the inner wall of the dry-side cavity 6 by embedded bonding (e.g., using epoxy resin adhesive resistant to environmental changes) or by a specially designed snap-fit ​​structure. The purpose of this arrangement is to ensure that the pressure-sensing surface of the sensor can be effectively exposed to the gas environment of the dry-side cavity 6.

[0037] The purpose of pressure sensor 2 is to monitor pressure changes within the dry-side cavity 6 caused by the movement of the diaphragm 4. The technical principle behind this function is as follows: when the driving component moves the diaphragm 4, for example during valve closing, the diaphragm 4 moves towards the wet-side cavity, causing a slight stretching and increase in the effective volume of the dry-side cavity 6 on its opposite side. According to the ideal gas law, within a relatively sealed volume, an increase in volume leads to a decrease in internal gas pressure. Conversely, during valve opening, the diaphragm 4 springs back to its original position, the volume of the dry-side cavity 6 recovers, and its internal pressure rises accordingly. Therefore, each reciprocating movement of the diaphragm 4 induces a predictable pressure fluctuation within the dry-side cavity 6, synchronized with the diaphragm's movement. The role of pressure sensor 2 is to capture and quantify this pressure fluctuation process in real time. After detecting a pressure change, pressure sensor 2 converts it into an electrical signal, thereby generating a pressure signal characterizing the diaphragm's operating state. The pressure signal generated here can be a time-varying analog voltage or current signal, whose waveform, amplitude, and phase characteristics directly reflect the pressure change process within the dry-side cavity. Since the pressure change process is directly caused by the diaphragm's movement, the characteristics of this pressure signal are directly related to the diaphragm's physical state, such as its elasticity, response speed, and displacement amplitude. A healthy diaphragm operating under standard conditions will generate a stable and repeatable pressure signal waveform; however, when the diaphragm's operating state changes (e.g., due to material aging leading to decreased elasticity), its motion behavior will change slightly, resulting in a corresponding change in the waveform of the generated pressure signal. Therefore, this generated pressure signal becomes a data source that can directly characterize and carry information about the diaphragm's operating state. This pressure signal can be extracted through signal line 1 for subsequent analysis and processing.

[0038] This invention cleverly solves the problem of directly monitoring the diaphragm itself without contaminating the process fluid by placing a pressure sensor in the dry-side cavity of the diaphragm valve, a region that is not in contact with the fluid. It can acquire physical signals strongly correlated with each movement of the diaphragm in real time, providing the most direct and original data foundation for accurately assessing the diaphragm's health status. This overcomes the shortcomings of existing technologies, such as reliance on indirect signals leading to monitoring delays and fixed-cycle replacement resulting in uneconomical maintenance.

[0039] Example 2:

[0040] In one preferred embodiment of this technical solution, the diaphragm valve further includes: a signal processing module; the signal processing module is connected to the pressure sensor and configured to perform the following steps: extracting at least one feature parameter from the pressure waveform formed by the pressure signal, comparing the feature parameter with a reference parameter characterizing the health status, and determining the operating status of the diaphragm based on the comparison result.

[0041] In the step of extracting feature parameters in the signal processing module, this embodiment further elaborates on the specific types of feature parameters. These feature parameters are numerical values ​​extracted from the pressure waveform that can effectively quantify its key characteristics, and each reflects the physical performance of the diaphragm from different dimensions. In a specific embodiment, the feature parameters may include at least one of the following: peak pressure or valley pressure: peak pressure refers to the maximum pressure value that the dry-side cavity pressure waveform can reach in one complete valve operation cycle; valley pressure refers to the minimum pressure value that can be reached. When the valve is closed and the diaphragm is stretched, the pressure in the dry-side cavity decreases, forming a valley pressure; when the valve is opened and the diaphragm rebounds, the pressure rises, forming a peak pressure (or returns to the initial pressure). These two parameters directly reflect the maximum pressure change that the diaphragm can produce in the dry-side cavity when it is at its extreme position. For example, when the diaphragm has a small leak, the dry-side cavity will not be able to effectively maintain the pressure difference, resulting in a low valley pressure and a low peak pressure, that is, a reduction in the overall amplitude of pressure fluctuation. Rise Time and Fall Time of Pressure Waveform: Rise time typically refers to the time required for pressure to rise from a lower value (such as a trough or 10% peak) to a higher value (such as a peak or 90% peak). Fall time is the opposite. These two time parameters primarily characterize the response speed of the diaphragm's movement. When the diaphragm experiences material fatigue and decreased elasticity due to long-term use, its transition from one state to another becomes slower. This is directly reflected in a smoother rise or fall of the pressure waveform, meaning the rise or fall time will be significantly prolonged. Area Under the Curve: This refers to the area enclosed by the pressure waveform curve and the time axis (or a reference pressure line) within a complete operating cycle. This parameter can be considered as the impulse of the pressure change, comprehensively reflecting the amplitude and duration of the pressure change. It is a comprehensive measure of the overall energy consumption or work done by the diaphragm's movement. When the diaphragm's health condition changes, whether it's a slower response speed or a reduced displacement amplitude, it usually leads to a change in the area enclosed by the waveform. For example, diaphragm leakage can reduce the magnitude of pressure changes, which in turn significantly reduces the waveform area.

[0042] By extracting and analyzing one or more of the aforementioned characteristic parameters, the signal processing module can capture subtle changes in the diaphragm's operating state more comprehensively from different dimensions. For example, a drop in pressure peak value alone may not distinguish between leakage and fatigue, but if a significant increase in rise time is also observed, the fault mode can be more accurately determined to be a decrease in elasticity caused by diaphragm fatigue. Therefore, combining these specific characteristic parameters for analysis can greatly improve the accuracy and reliability of condition diagnosis.

[0043] Preferably, in one of the preferred technical solutions of this embodiment, the characteristic parameters include at least one of the following: pressure peak value, pressure valley value, pressure waveform rise time, pressure waveform fall time, or area enclosed by the pressure waveform.

[0044] Preferably, in one of the preferred technical solutions of this embodiment, the diaphragm valve is an ultra-clean diaphragm valve used in the fields of semiconductors, biopharmaceuticals or fine chemicals; and / or, the driving component is an electric or pneumatic driving component; the operating state of the diaphragm includes at least one of the following: healthy state, fatigue state, or leakage risk state.

[0045] Preferably, in one of the preferred technical solutions of this embodiment, the pressure sensor is at least one of piezoresistive, capacitive, piezoelectric or thin-film pressure sensors; the pressure sensor is connected to the outside of the valve through a sealed electrical interface; the pressure sensor is fixed to the inner wall of the dry side cavity through one of the following: threaded connection, embedded bonding or snap-fit ​​structure.

[0046] Example 3:

[0047] In this embodiment, the present invention also provides a method for monitoring the diaphragm status of a diaphragm valve.

[0048] See Figure 3 This embodiment illustrates the workflow of the diaphragm condition monitoring and diagnostic method. This method can be executed by the signal processing module in the preceding embodiments, or by a separate controller or remote server. This method is applied to a specific diaphragm valve, namely the diaphragm valve described in the preceding embodiments, which has a pressure sensor installed in the dry-side cavity.

[0049] In this embodiment, the diaphragm status monitoring method includes the following steps:

[0050] The first step is to acquire the pressure signal within the dry-side cavity. This step is performed by a signal acquisition unit (e.g., an analog-to-digital converter, ADC) electrically connected to the pressure sensor of the diaphragm valve. The signal acquisition unit continuously acquires the analog electrical signal (such as voltage or current) output by the pressure sensor at a preset sampling frequency and converts it into a digital signal sequence. This digital signal sequence constitutes a pressure waveform in the time dimension, completely recording the dynamic response process of the diaphragm within one or more operating cycles.

[0051] The second step is to extract at least one feature parameter from the pressure waveform formed by the pressure signal. After acquiring the pressure waveform data, the execution unit of this method runs a specific algorithm to perform mathematical analysis on the pressure waveform to calculate values ​​that can quantify its key characteristics; these values ​​are the feature parameters. For example, the algorithm can identify extreme points in the pressure waveform, calculate the time length or slope of specific segments of the waveform, or perform integration operations on the region under the waveform curve. The purpose of this step is to reduce the complexity of the continuous waveform data into a few easily comparable quantitative indicators that can highly summarize its core information.

[0052] The third step is to compare the characteristic parameters with benchmark parameters characterizing the health status. Before performing this step, a set of benchmark parameters is pre-stored in the system. These benchmark parameters represent the characteristic parameter values ​​or their reasonable fluctuation range corresponding to the diaphragm being in an ideal health state. These benchmark parameters can be automatically established by driving the valve several times under standard operating conditions after the new diaphragm is installed and collecting data, then using statistical methods (such as calculating the average and standard deviation). The comparison process can involve calculating the percentage deviation between the currently extracted characteristic parameters and the benchmark parameters, or determining whether the current parameter value falls within the health threshold range defined by the benchmark parameters.

[0053] The fourth step is to determine the diaphragm's operating status based on the comparison results. This is the decision-making step of this method, mapping the numerical comparison results obtained in the previous step into a state conclusion with clear physical meaning. For example, one or more decision rules can be set: if the comparison results show that all monitored characteristic parameters are within the healthy threshold range, the diaphragm's operating status can be determined to be normal. If the comparison results show that one or more characteristic parameters exhibit a persistent deviation exceeding the threshold, the diaphragm's operating status can be determined to be abnormal.

[0054] Based on the aforementioned method, this invention discloses a systematic, data-driven diaphragm condition assessment process. It transforms the invisible degradation process of the diaphragm's internal physical properties into a quantifiable data analysis problem, enabling objective, dynamic, and early assessment of diaphragm health. This invention overcomes the reliance on operator experience and the limitations of indirect signals inherent in traditional methods, providing a reliable methodological foundation for accurate predictive maintenance.

[0055] Preferably, in one of the preferred technical solutions of this embodiment, the characteristic parameters include at least one of the following: pressure peak value, pressure valley value, pressure waveform rise time, pressure waveform fall time, area enclosed by the pressure waveform, fluctuation frequency, or waveform symmetry.

[0056] Preferably, in one of the preferred technical solutions of this embodiment, the diaphragm is in a healthy, fatigued, or leak-risk state.

[0057] Example 4:

[0058] See Figure 4 The diagram shows the architecture of a diaphragm condition monitoring system provided in this embodiment. This system is a complete solution integrating hardware sensing, data processing, and condition diagnosis functions. It can be deployed as an independent local monitoring unit or as a subsystem of a factory equipment management system. The diaphragm condition monitoring system includes a diaphragm valve and a signal processing module. The diaphragm valve is the sensing front end of the system, used to generate raw data reflecting the diaphragm condition. Specifically, the diaphragm valve used in this system is the diaphragm valve described in any one of claims 1 to 5. This means that the diaphragm valve must have a pressure sensor installed in its dry-side cavity and may possess the specific structural, component, or application characteristics described in the preceding embodiments. For example, it may have integrated preliminary signal processing capabilities, or the type and installation method of its pressure sensor may be specific. The signal processing module is the analysis core of the system, responsible for performing data analysis and condition diagnosis tasks. The signal processing module is electrically connected to the pressure sensor on the diaphragm valve. This connection can be a direct hardwired connection or implemented through a fieldbus (such as Profibus, Modbus) or a wireless communication network (such as Wi-Fi, LoRa). The signal processing module is configured to perform the diaphragm status monitoring method described in the foregoing embodiments.

[0059] Specifically, the system operates as follows: When the diaphragm valve in the system switches on and off, its internal pressure sensor monitors the pressure changes in the dry-side cavity in real time and generates a pressure signal. This pressure signal is transmitted to the signal processing module via an electrical connection. Upon receiving the signal, the signal processing module begins executing a preset algorithm program, which implements the steps described in the aforementioned embodiments. For example, the signal processing module (whose function can correspond to...) Figure 4 The signal acquisition module and the condition assessment and diagnosis module first process the acquired pressure signal to extract one or more key feature parameters, such as the listed pressure peak value, rise time, and waveform area. Then, it compares these real-time extracted feature parameters with the health status benchmark parameters stored therein, and based on the degree of difference in the comparison results, it finally determines the current operating status of the diaphragm, such as the defined health status, fatigue status, or status with leakage risk.

[0060] By integrating a diaphragm valve with specific sensing capabilities into a signal processing module with intelligent analysis capabilities, the technical solution of this invention constructs a closed loop from data generation to information interpretation. It is no longer a collection of fragmented components or isolated methods, but a fully functional, directly deployable automated monitoring system. This system can autonomously perform continuous monitoring and evaluation of the diaphragm valve's health status, providing an efficient and reliable equipment condition management tool for industrial sites.

[0061] Preferably, in one of the preferred technical solutions of this embodiment, the system further includes: an early warning module and a maintenance decision module; the early warning module is used to issue an alarm when the signal processing module determines that the diaphragm is in an abnormal state; the maintenance decision module is used to generate maintenance suggestions or automatically trigger maintenance work orders based on the operating state of the diaphragm.

[0062] This specific embodiment is merely an explanation of the present invention and is not intended to limit the invention. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A diaphragm valve, comprising: A valve body, a diaphragm, and a drive component; the diaphragm divides the internal space of the valve body into a dry-side cavity and a wet-side cavity for fluid flow; the drive component is configured to drive the diaphragm to move; characterized in that: it further includes a pressure sensor disposed in the dry-side cavity and used to monitor pressure changes in the dry-side cavity caused by the movement of the diaphragm, so as to generate a pressure signal characterizing the operating state of the diaphragm.

2. The diaphragm valve according to claim 1, characterized in that, The diaphragm valve further includes a signal processing module; the signal processing module is connected to the pressure sensor and configured to perform the following steps: extracting at least one feature parameter from the pressure waveform formed by the pressure signal, comparing the feature parameter with a benchmark parameter characterizing the health status, and determining the operating status of the diaphragm based on the comparison result.

3. The diaphragm valve according to claim 2, characterized in that, The characteristic parameters include at least one of the following: pressure peak value, pressure trough value, pressure waveform rise time, pressure waveform fall time, or area enclosed by the pressure waveform.

4. The diaphragm valve according to claim 3, characterized in that, The diaphragm valve is an ultra-clean diaphragm valve used in the semiconductor, biopharmaceutical or fine chemical industries; and / or, the drive component is an electric or pneumatic drive component; The operating state of the diaphragm includes at least one of the following: healthy state, fatigued state, or leakage risk state.

5. The diaphragm valve according to any one of claims 1 to 4, characterized in that, The pressure sensor is at least one of piezoresistive, capacitive, piezoelectric, or thin-film pressure sensors; the pressure sensor is connected to the outside of the valve through a sealed electrical interface; the pressure sensor is fixed to the inner wall of the dry side cavity through one of the following: threaded connection, embedded bonding, or snap-fit ​​structure.

6. A method for monitoring the diaphragm condition of a diaphragm valve, characterized in that, The diaphragm valve is the diaphragm valve according to any one of claims 1 to 5; The diaphragm condition monitoring method includes the following steps: Collect pressure signals within the dry side cavity; At least one characteristic parameter is extracted from the pressure waveform formed by the pressure signal; The characteristic parameters are compared with the benchmark parameters characterizing health status; as well as Based on the comparison results, the operating status of the diaphragm is determined.

7. The method for monitoring the diaphragm status of the diaphragm valve according to claim 6, characterized in that, The characteristic parameters include at least one of the following: pressure peak value, pressure trough value, pressure waveform rise time, pressure waveform fall time, area enclosed by the pressure waveform, fluctuation frequency, or waveform symmetry.

8. The method for monitoring the diaphragm status of the diaphragm valve according to claim 7, characterized in that, The diaphragm is in a healthy, fatigued, or leak-risk state.

9. A diaphragm condition monitoring system, characterized in that, The device includes a diaphragm valve and a signal processing module; the diaphragm valve is equipped with a pressure sensor; the diaphragm valve is the diaphragm valve according to any one of claims 1 to 5; the signal processing module is electrically connected to the pressure sensor and configured to perform the diaphragm status monitoring method of the diaphragm valve according to any one of claims 6 to 8.

10. The diaphragm condition monitoring system according to claim 9, characterized in that, The system also includes an early warning module and a maintenance decision module; the early warning module is used to issue an alarm when the signal processing module determines that the diaphragm is in an abnormal state; the maintenance decision module is used to generate maintenance suggestions or automatically trigger maintenance work orders based on the operating status of the diaphragm.

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