Vertical furnace equipment

Abstract

The vertical furnace equipment comprises a wafer boat assembly, a sealing flange, an air inlet pipe, an air pipe sealing mechanism and a movable process pipe, the wafer boat assembly is arranged on the sealing flange, and the process pipe is detachably connected with the sealing flange in a sealed mode and used for enabling the wafer boat assembly to be arranged in the process pipe in a sleeved mode for process operation. The air inlet pipe is installed in the sealing flange in a sealed mode through the air inlet pipe sealing mechanism, one end of the air inlet pipe is located below the sealing flange, and the other end of the air inlet pipe extends into the process pipe. The sealing device has the advantages of being suitable for the vertical furnace with the process pipe moving, good in convenience and reliable in sealing.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a vertical furnace. Background Technology

[0002] In silicon wafer processing equipment technology, vertical furnaces employ a stacked design of vertical furnace core tubes and quartz fixtures. The wafers are placed horizontally through three-point groove support. Combined with a vertical airflow design, this results in a more uniform temperature gradient within the furnace, a more symmetrical distribution of thermal stress, and a reduction in wafer warpage risk of more than 30% compared to horizontal furnaces. Consequently, the devices produced by this furnace exhibit significant advantages in terms of electrical performance consistency. The gas intake system and sealing structure of the vertical furnace reaction chamber are crucial in determining the quality and uniformity of wafer film formation.

[0003] Currently, the air inlet pipes of vertical furnace reaction chambers are conventionally arranged on the process pipe body or furnace structure. This design has two technical limitations: First, for vertical furnace systems with process pipes that have movement capabilities, this arrangement cannot adapt to the dynamic operating conditions of the process pipes. During the movement of the process pipes, it is difficult for the air inlet pipes to move synchronously, which can easily lead to pipe connection failures or interference problems. Second, the integrated arrangement of the air inlet pipes with the process pipes and furnace body results in insufficient convenience for pipe disassembly, assembly, and maintenance, increasing the difficulty of equipment repair and process adjustment. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a vertical furnace equipment that is suitable for the movement of process tubes, has good convenience and reliable sealing.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A vertical furnace includes a crystal boat assembly, a sealing flange, an inlet pipe, an inlet pipe sealing mechanism, and a movable process pipe. The crystal boat assembly is mounted on the sealing flange, and the process pipe is detachably and sealingly connected to the sealing flange for mounting the crystal boat assembly within the process pipe for processing. The inlet pipe is sealed within the sealing flange by the inlet pipe sealing mechanism, with one end of the inlet pipe located below the sealing flange and the other end extending into the process pipe.

[0006] As a further improvement to the above technical solution: The intake pipe sealing mechanism includes an installation chamber located in a sealing flange. The installation chamber contains an upper sealing ring fixing block and a lower sealing ring fixing block. A first sealing ring is provided between the upper sealing ring fixing block and the installation chamber, and a second sealing ring is provided between the lower sealing ring fixing block and the installation chamber. The intake pipe passes through the top of the installation chamber, the first sealing ring, the upper sealing ring fixing block, the lower sealing ring fixing block, the second sealing ring, and the bottom of the installation chamber from top to bottom, extending out of the installation chamber.

[0007] The intake pipe sealing mechanism further includes a rotating sleeve, an upper clamp, and a lower clamp. The rotating sleeve is mounted outside the mounting chamber. The upper and lower clamps each include an annular outer ring and a clamping portion connected to the inner side of the annular outer ring. The annular outer ring is threadedly connected to the inner side of the rotating sleeve. The outer side of the upper sealing ring fixing block is provided with a first groove. The clamping portion of the upper clamp penetrates the mounting chamber and extends into the first groove, engaging with the first groove. The outer side of the lower sealing ring fixing block is provided with a second groove. The clamping portion of the lower clamp penetrates the mounting chamber and extends into the second groove, engaging with the second groove. The annular outer rings of the upper and lower clamps have opposite thread directions.

[0008] The mounting chamber is provided with a third groove for the gripping part of the lower jaw to pass through, and the gripping part of the lower jaw is in clearance fit with the third groove.

[0009] The outer side of the lower sealing ring fixing block is also provided with a fourth groove, and the lower end of the clamping part of the upper claw extends into the fourth groove. The length of the fourth groove is greater than the length of the first groove.

[0010] The installation chamber includes an intake pipe assembly fixing block, a fixed intake seat, and a sealing ring fixing seat. The intake pipe assembly fixing block is located in a sealing flange. The sealing ring fixing seat is connected to the upper end of the intake pipe assembly fixing block, and the fixed intake seat is connected to the lower end of the intake pipe assembly fixing block. The intake pipe assembly fixing block, the fixed intake seat, and the sealing ring fixing seat together form the installation chamber.

[0011] The intake manifold fixing block is positioned with the fixed intake seat by a positioning pin and connected to the fixed intake seat by screws.

[0012] A third sealing ring is provided between the rotating sleeve and the fixed air intake seat.

[0013] The crystal boat assembly includes a crystal boat support seat disposed on a sealing flange and a crystal boat (22) disposed on the crystal boat support seat, wherein the crystal boat support seat is provided with a fixing slot; The intake pipe includes at least one set of long intake pipes and short intake pipes, both of which are S-shaped, and the waist of the long intake pipes and short intake pipes is secured in a fixed slot.

[0014] The long air intake pipe has a bend at its outlet, and the bend abuts against the upper end of the crystal boat.

[0015] Compared with the prior art, the advantages of the present invention are as follows: 1. The vertical furnace equipment of the present invention, by through-installing the air inlet pipe in the sealing flange, is suitable for vertical furnaces with moving process pipes, which facilitates disassembly and maintenance when the process pipe is separated from the sealing flange. It has a simple structure and good convenience. The air inlet pipe sealing mechanism seals the through-fitting joint between the air inlet pipe and the sealing flange, ensuring reliable sealing.

[0016] 2. In the vertical furnace equipment of the present invention, the first sealing ring can seal the installation chamber and the reaction chamber to prevent the leakage of process gas in the reaction chamber, and the second sealing ring can seal the installation chamber from the outside to isolate the external atmosphere or dust; the upper sealing ring fixing block and the lower sealing ring fixing block can effectively fix the first sealing ring and the second sealing ring to prevent them from shifting during use, thereby ensuring the sealing effect.

[0017] 3. In the vertical furnace equipment of the present invention, when the rotating sleeve is turned, since the threads of the annular outer ring of the upper jaw and the annular outer ring of the lower jaw rotate in opposite directions, the rotating sleeve drives the upper sealing ring fixing block and the lower sealing ring fixing block to move closer or further apart through the upper jaw and the lower jaw respectively, thereby realizing the simultaneous loosening or tightening of the first sealing ring and the second sealing ring on the air inlet pipe; when it is necessary to install or remove the air inlet pipe, turning the rotating sleeve in the forward direction can simultaneously loosen the first sealing ring and the second sealing ring for installation or removal of the air inlet pipe; after the air inlet pipe is installed, turning the rotating sleeve in the reverse direction can simultaneously tighten the first sealing ring and the second sealing ring to achieve sealing of the air inlet pipe. The operation is simple and further improves the convenience of air inlet pipe disassembly and maintenance.

[0018] 4. In the vertical furnace equipment of the present invention, the clamping part of the lower jaw is fitted with the third groove with a gap, that is, the two sides of the clamping part of the lower jaw are limited by the third groove, leaving only a partial gap, so that the rotation angle of the lower jaw is extremely small (or basically does not rotate), thereby making the vertical displacement of the lower sealing ring fixing block extremely small (or only having the force to press or loosen the second sealing ring), avoiding the lower sealing ring fixing block from moving downward too much, which would cause damage to the second sealing ring.

[0019] 5. In the vertical furnace equipment of the present invention, the upper end of the clamping part of the upper jaw extends into the first groove of the upper sealing ring fixing block, and the lower end of the clamping part of the upper jaw extends into the fourth groove of the lower sealing ring fixing block. Since the lower sealing ring fixing block is basically fixed, the arc that the upper jaw and the upper sealing ring fixing block can rotate is the length of the fourth groove. This ensures the smooth up and down movement of the upper sealing ring fixing block, while limiting the displacement of the upper sealing ring fixing block to prevent the upper sealing ring fixing block from moving too much upward, which would damage the first sealing ring. Attached Figure Description

[0020] Figure 1 This is a simplified structural diagram of the vertical furnace equipment of the present invention.

[0021] Figure 2This is a main sectional view of the vertical furnace equipment of the present invention.

[0022] Figure 3 This is an exploded view of the gas pipe sealing mechanism in the vertical furnace equipment of this invention.

[0023] Figure 4 This is a schematic diagram of the upper sealing ring fixing block in the vertical furnace equipment of the present invention.

[0024] Figure 5 This is a schematic diagram of the structure of the vertical furnace equipment of the present invention when the upper clamping claw and the upper sealing ring fixing block are engaged.

[0025] Figure 6 This is a schematic diagram of the structure of the lower sealing ring fixing block in the vertical furnace equipment of the present invention.

[0026] Figure 7 This is a schematic diagram of the structure of the air inlet pipe assembly fixing block in the vertical furnace equipment of the present invention.

[0027] Figure 8 This is a schematic diagram of the fixed air inlet seat in the vertical furnace equipment of the present invention.

[0028] Figure 9 This is a schematic diagram of the upper and lower grippers in the vertical furnace equipment of the present invention.

[0029] Figure 10 This is a schematic diagram of the crystal boat assembly in the vertical furnace equipment of the present invention.

[0030] The labels in the diagram represent: 1. Process pipe; 2. Crystal boat assembly; 21. Crystal boat support; 211. Fixing slot; 22. Crystal boat; 3. Sealing flange; 4. Inlet pipe; 41. Long inlet pipe; 42. Short inlet pipe; 43. Bend; 5. Air pipe sealing mechanism; 51. Installation chamber; 511. Inlet pipe assembly fixing block; 5111. Fifth groove; 512. Fixed inlet seat; 5121. VCR connector; 513. Sealing ring fixing seat; 514. Third groove; 52. Upper sealing ring fixing block; 521. First groove; 53. Lower sealing ring fixing block; 531. Second groove; 532. Fourth groove; 54. Rotating sleeve; 55. Upper jaw; 551. Annular outer ring; 552. Clamping part; 56. Lower jaw; 61. First sealing ring; 62. Second sealing ring; 63. Third sealing ring; 7. Thermocouple assembly. Detailed Implementation

[0031] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] In the description of this invention, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] In this invention, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0035] like Figures 1 to 10 As shown, the vertical furnace equipment of this embodiment includes a crystal boat assembly 2, a sealing flange 3, an air inlet pipe 4, an air pipe sealing mechanism 5, and a movable process pipe 1. The crystal boat assembly 2 is mounted on the sealing flange 3, and the process pipe 1 is detachably and sealed to the sealing flange 3 for performing process operations by fitting the crystal boat assembly 2 into the process pipe 1. The air inlet pipe 4 is sealed and installed in the sealing flange 3 by the air inlet pipe sealing mechanism 5. One end of the air inlet pipe 4 is located below the sealing flange 3, and the other end extends into the process pipe 1.

[0036] In this embodiment of the vertical furnace equipment, before the process operation, the process pipe 1 is installed through the sealing flange 3, and the inlet pipe sealing mechanism 5 seals the through-fit between the inlet pipe 4 and the sealing flange 3. During the process operation, the process pipe 1 and the sealing flange 3 are connected to form a reaction chamber, and the crystal boat assembly 2 and the inlet pipe 4 are fitted into the reaction chamber. The inlet pipe 4 supplies process gas to the reaction chamber to realize the process operation. In this embodiment of the vertical furnace equipment, by installing the inlet pipe 4 through the sealing flange 3, the inlet pipe 4 does not need to move with the process pipe 1, making this equipment suitable for vertical furnaces where the process pipe 1 moves. It is convenient to disassemble and maintain when the process pipe 1 is separated from the sealing flange 3, and the structure is simple and convenient. The sealing mechanism 5 ensures a reliable seal at the through-fit between the inlet pipe 4 and the sealing flange 3.

[0037] Furthermore, in this embodiment, the intake pipe sealing mechanism 5 includes an installation chamber 51 disposed in the sealing flange 3. An upper sealing ring fixing block 52 and a lower sealing ring fixing block 53 are disposed within the installation chamber 51. A first sealing ring 61 is disposed between the upper sealing ring fixing block 52 and the installation chamber 51, and a second sealing ring 62 is disposed between the lower sealing ring fixing block 53 and the installation chamber 51. The intake pipe 4 passes through the top of the installation chamber 51, the first sealing ring 61, the upper sealing ring fixing block 52, the lower sealing ring fixing block 53, the second sealing ring 62, and the bottom of the installation chamber 51 from top to bottom, extending outside the installation chamber 51. The first sealing ring 61 seals the installation chamber 51 and the reaction chamber, preventing leakage of process gas from the reaction chamber. The second sealing ring 62 seals the installation chamber 51 and the outside to isolate external atmosphere or dust. The upper sealing ring fixing block 52 and the lower sealing ring fixing block 53 effectively fix the first sealing ring 61 and the second sealing ring 62, preventing them from shifting during use, thereby ensuring the sealing effect.

[0038] Preferably, in this embodiment, the contact surfaces of the upper sealing ring fixing block 52 and the first sealing ring 61, and the contact surfaces of the lower sealing ring fixing block 53 and the second sealing ring 62 are all inclined surfaces. The inclined surfaces can make the first sealing ring 61 and the second sealing ring 62 fit better against the upper sealing ring fixing block 52 and the lower sealing ring fixing block 53 during the installation and use of the air intake pipe 4, thereby further enhancing the sealing performance.

[0039] Furthermore, in this embodiment, the intake pipe sealing mechanism 5 further includes a rotating sleeve 54, an upper clamping jaw 55, and a lower clamping jaw 56. The rotating sleeve 54 is rotatably fitted outside the mounting chamber 51. The upper clamping jaw 55 and the lower clamping jaw 56 each include an annular outer ring 551 and a clamping portion 552 connected to the inner side of the annular outer ring 551. The annular outer ring 551 is threadedly connected to the inner side of the rotating sleeve 54. The outer side of the upper sealing ring fixing block 52 is provided with a first groove 521. The clamping portion 552 of the upper clamping jaw 55 extends through the mounting chamber 51 into the first groove 521 and engages with the first groove 521. The outer side of the lower sealing ring fixing block 53 is provided with a second groove 531. The clamping portion 552 of the lower clamping jaw 56 extends through the mounting chamber 51 into the second groove 531 and engages with the second groove 531. The threads of the annular outer ring 551 of the upper clamping jaw 55 and the annular outer ring 551 of the lower clamping jaw 56 are opposite in direction. Because the rotating sleeve 54 rotates in conjunction with the mounting chamber 51, the rotating sleeve 54 only rotates and does not move up or down. When the rotating sleeve 54 is turned, since the threads of the outer ring 551 of the upper jaw 55 and the outer ring 551 of the lower jaw 56 are opposite, the rotating sleeve 54 drives the upper sealing ring fixing block 52 and the lower sealing ring fixing block 53 to move closer or further apart through the upper jaw 55 and the lower jaw 56, thereby simultaneously loosening or tightening the first sealing ring 61 and the second sealing ring 62 of the intake pipe 4. When it is necessary to install or remove the intake pipe 4, turning the rotating sleeve 54 in the forward direction will simultaneously loosen the first sealing ring 61 and the second sealing ring 62, allowing for the installation or removal of the intake pipe 4. After the intake pipe 4 is installed, turning the rotating sleeve 54 in the reverse direction will simultaneously tighten the first sealing ring 61 and the second sealing ring 62, achieving a seal on the intake pipe 4. The operation is simple, further improving the convenience of disassembling and maintaining the intake pipe 4.

[0040] Furthermore, in this embodiment, the mounting chamber 51 is provided with a third groove 514 for the clamping portion 552 of the lower clamp 56 to pass through, and the clamping portion 552 of the lower clamp 56 is in clearance fit with the third groove 514. The clearance fit between the clamping portion 552 of the lower clamp 56 and the third groove 514 means that both sides of the clamping portion 552 of the lower clamp 56 are limited by the third groove 514, leaving only a partial gap, so that the rotation angle of the lower clamp 56 is extremely small (or basically does not rotate), thereby making the vertical displacement of the lower sealing ring fixing block 53 extremely small (or only having the force to press or loosen the second sealing ring 62), avoiding the lower sealing ring fixing block 53 from moving downward too much, which would cause damage to the second sealing ring 62.

[0041] Furthermore, in this embodiment, a fourth groove 532 is provided on the outer side of the lower sealing ring fixing block 53. The lower end of the clamping part 552 of the upper jaw 55 extends into the fourth groove 532, and the length of the fourth groove 532 is greater than the length of the first groove 521. The upper end of the clamping part 552 of the upper jaw 55 extends into the first groove 521 of the upper sealing ring fixing block 52, and the lower end of the clamping part 552 of the upper jaw 55 extends into the fourth groove 532 of the lower sealing ring fixing block 53. Since the lower sealing ring fixing block 53 is basically fixed, the arc that the upper jaw 55 and the upper sealing ring fixing block 52 can rotate is the length of the fourth groove 532. This ensures the smooth up and down movement of the upper sealing ring fixing block 52, while limiting the displacement of the upper sealing ring fixing block 52 to prevent the upper sealing ring fixing block 52 from moving too much upward, which could damage the first sealing ring 61.

[0042] Preferably, in this embodiment, the second groove 531 and the fourth groove 532 are connected to form a "7"-shaped groove, which is convenient for processing.

[0043] Preferably, in this embodiment, the upper sealing ring fixing block 52 and the lower sealing ring fixing block 53 are positioned by a positioning pin, which facilitates assembly.

[0044] Furthermore, in this embodiment, the installation chamber 51 includes an intake pipe assembly fixing block 511, a fixed intake seat 512, and a sealing ring fixing seat 513. The intake pipe assembly fixing block 511 is disposed in the sealing flange 3. The sealing ring fixing seat 513 is connected to the upper end of the intake pipe assembly fixing block 511, and the fixed intake seat 512 is connected to the lower end of the intake pipe assembly fixing block 511. The intake pipe assembly fixing block 511, the fixed intake seat 512, and the sealing ring fixing seat 513 enclose and form the installation chamber 51. The installation chamber 51 adopts a split structure, which is convenient for assembly and has better convenience. Among them, the first sealing ring 61 is disposed between the upper sealing ring fixing block 52 and the sealing ring fixing seat 513, and the second sealing ring 62 is disposed between the lower sealing ring fixing block 53 and the fixed intake seat 512.

[0045] Furthermore, in this embodiment, the third groove 514 is formed on the fixed air intake seat 512, and the fifth groove 5111 is provided on the air intake pipe assembly fixing block 511. The clamping part 552 of the upper jaw 55 is inserted into and passes through the fifth groove 5111, and the clamping part 552 of the lower jaw 55 is inserted into and passes through the third groove 514 to form a mortise and tenon structure.

[0046] Furthermore, in this embodiment, the third groove 514 is formed on the fixed air intake seat 512, and the air intake pipe assembly fixing block 511 is provided with a fifth groove 5111. An interval space is formed between the air intake pipe assembly fixing block 511 and the fixed air intake seat 512 for the clamping part 552 of the upper jaw 55 to pass through, so that the clamping part 552 of the upper jaw 55 can rotate freely. When the annular outer ring 551 of the upper jaw 55 rotates upward too much, the clamping part 552 of the upper jaw 55 will be stuck in the fifth groove 5111 and limited by the fifth groove 5111, preventing the annular outer ring 551 of the upper jaw 55 from being twisted out of the rotating sleeve 54. The structure is simple and reliable.

[0047] Preferably, in this embodiment, the intake manifold fixing block 511 is provided with a protrusion extending to the upper end of the rotating sleeve 54. The protrusion can limit the upper clamping claw 55, further preventing the annular outer ring 551 of the upper clamping claw 55 from being screwed out of the rotating sleeve 54, thus improving reliability.

[0048] Furthermore, in this embodiment, the intake manifold fixing block 511 is positioned with the fixed intake seat 512 by a positioning pin and connected to the fixed intake seat 512 by screws. The connection is firm and easy to disassemble and assemble, which facilitates quick separation of the intake manifold fixing block 511 and the fixed intake seat 512 when maintenance or replacement of parts is required.

[0049] Furthermore, in this embodiment, the intake manifold fixing block 511 is connected to the sealing flange 3 via a sealing thread, which is simple in structure and easy to assemble. Of course, in other embodiments, the intake manifold fixing block 511 can also be welded to the sealing flange 3 or connected by other methods.

[0050] Furthermore, in this embodiment, a third sealing ring 63 is provided between the rotating sleeve 54 and the fixed air inlet seat 512. The third sealing ring 63 can isolate external atmosphere or dust from entering the air inlet pipe sealing mechanism 5, has good reliability, and can also further prevent process gas from leaking into the external atmosphere.

[0051] Furthermore, in this embodiment, the crystal boat assembly 2 includes a crystal boat support 21 disposed on the sealing flange 3 and a crystal boat 22 disposed on the crystal boat support 21, and the crystal boat support 21 is provided with a fixing slot 211; The intake pipe 4 includes at least one set of long intake pipe 41 and short intake pipe 42. Both the long intake pipe 41 and the short intake pipe 42 are S-shaped, and the waist of the long intake pipe 41 and the short intake pipe 42 are locked in the fixing slot 211.

[0052] By setting up long inlet pipe 41 and short inlet pipe 42, process gas can be uniformly introduced into the reaction chamber from multiple heights, thereby improving the quality and uniformity of wafer film formation. By setting up fixing slot 211, long inlet pipe 41 and short inlet pipe 42 can be firmly fixed on the crystal boat support 21, avoiding pipe displacement or shaking due to airflow impact and other factors during furnace operation, thereby ensuring a stable and accurate supply of process gas to the reaction chamber.

[0053] Furthermore, in this embodiment, the outlet of the long inlet pipe 41 is provided with a bend 43, which abuts against the upper end of the crystal boat 22. The design of the bend 43 can change the airflow direction, allowing the process gas to diffuse more effectively to all areas of the reaction chamber, reducing uneven gas distribution; and the upper end of the long inlet pipe 41 is supported on the crystal boat 22 by the bend 43, which can prevent shaking caused by the excessive length of the long inlet pipe 41, making the structure more stable. In actual operation, the number and layout of the long inlet pipe 41 and the short inlet pipe 42 can be adjusted according to different process requirements to achieve the best process effect.

[0054] Furthermore, in this embodiment, the bottom of the fixed air intake seat 512 is provided with a VCR connector 5121 for connecting to the air intake pipeline to transport process gas, which facilitates connection with the air intake pipeline for air intake.

[0055] Furthermore, in this embodiment, a thermocouple assembly 7 is also included, which extends through the sealing flange 3 into the reaction chamber for temperature measurement.

[0056] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention using the methods and techniques disclosed above, or modify them into equivalent embodiments with equivalent changes, without departing from the spirit and technical essence of the present invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall still fall within the protection scope of the technical solutions of the present invention.

Claims

1. A vertical furnace device, characterized in that: The device includes a crystal boat assembly (2), a sealing flange (3), an air inlet pipe (4), an air pipe sealing mechanism (5), and a movable process pipe (1). The crystal boat assembly (2) is mounted on the sealing flange (3). The process pipe (1) is detachably and sealed to the sealing flange (3) for mounting the crystal boat assembly (2) in the process pipe (1) for process operation. The air inlet pipe (4) is sealed in the sealing flange (3) by the air inlet pipe sealing mechanism (5). One end of the air inlet pipe (4) is located below the sealing flange (3), and the other end is used to extend into the process pipe (1).

2. The vertical furnace equipment according to claim 1, characterized in that: The intake pipe sealing mechanism (5) includes an installation chamber (51) located in the sealing flange (3). The installation chamber (51) is provided with an upper sealing ring fixing block (52) and a lower sealing ring fixing block (53). A first sealing ring (61) is provided between the upper sealing ring fixing block (52) and the installation chamber (51). A second sealing ring (62) is provided between the lower sealing ring fixing block (53) and the installation chamber (51). The intake pipe (4) passes through the top of the installation chamber (51), the first sealing ring (61), the upper sealing ring fixing block (52), the lower sealing ring fixing block (53), the second sealing ring (62), and the bottom of the installation chamber (51) from top to bottom and extends out of the installation chamber (51).

3. The vertical furnace equipment according to claim 2, characterized in that: The intake pipe sealing mechanism (5) further includes a rotating sleeve (54), an upper clamping jaw (55), and a lower clamping jaw (56). The rotating sleeve (54) is rotated and fitted outside the mounting chamber (51). The upper clamping jaw (55) and the lower clamping jaw (56) each include an annular outer ring (551) and a clamping part (552) connected to the inner side of the annular outer ring (551). The annular outer ring (551) is threaded to the inner side of the rotating sleeve (54). The outer side of the upper sealing ring fixing block (52) is provided with a first groove (521). The upper clamping jaw (551) is threaded to the inner side of the rotating sleeve (54). The clamping part (552) of the upper jaw (55) extends through the mounting chamber (51) into the first groove (521) and engages with the first groove (521). The outer side of the lower sealing ring fixing block (53) is provided with a second groove (531). The clamping part (552) of the lower jaw (56) extends through the mounting chamber (51) into the second groove (531) and engages with the second groove (531). The annular outer ring (551) of the upper jaw (55) and the annular outer ring (551) of the lower jaw (56) have opposite thread directions.

4. The vertical furnace equipment according to claim 3, characterized in that: The mounting chamber (51) is provided with a third groove (514) for the clamping part (552) of the lower jaw (56) to pass through, and the clamping part (552) of the lower jaw (56) is in clearance fit with the third groove (514).

5. The vertical furnace equipment according to claim 4, characterized in that: The lower sealing ring fixing block (53) is also provided with a fourth groove (532) on the outside. The lower end of the clamping part (552) of the upper claw (55) extends into the fourth groove (532). The length of the fourth groove (532) is greater than the length of the first groove (521).

6. The vertical furnace equipment according to claim 3, characterized in that: The installation chamber (51) includes an intake pipe assembly fixing block (511), a fixed intake seat (512), and a sealing ring fixing seat (513). The intake pipe assembly fixing block (511) is located in the sealing flange (3). The sealing ring fixing seat (513) is connected to the upper end of the intake pipe assembly fixing block (511). The fixed intake seat (512) is connected to the lower end of the intake pipe assembly fixing block (511). The intake pipe assembly fixing block (511), the fixed intake seat (512), and the sealing ring fixing seat (513) enclose the installation chamber (51).

7. The vertical furnace equipment according to claim 6, characterized in that: The intake manifold fixing block (511) is positioned with the fixed intake seat (512) by a positioning pin and is connected to the fixed intake seat (512) by screws.

8. The vertical furnace equipment according to claim 6, characterized in that: A third sealing ring (63) is provided between the rotating sleeve (54) and the fixed air inlet seat (512).

9. The vertical furnace equipment according to any one of claims 1 to 8, characterized in that: The crystal boat assembly (2) includes a crystal boat support seat (21) disposed on a sealing flange (3) and a crystal boat (22) disposed on the crystal boat support seat (21). The crystal boat support seat (21) is provided with a fixing slot (211). The intake pipe (4) includes at least one set of long intake pipe (41) and short intake pipe (42), both of which are S-shaped, and the waist of the long intake pipe (41) and the short intake pipe (42) are locked in the fixed slot (211).

10. The vertical furnace equipment according to claim 9, characterized in that: The outlet of the long air intake pipe (41) is provided with a bend (43), which abuts against the upper end of the crystal boat (22).

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