Hemispherical resonator gyroscope capable of changing height of plane electrode plate and error compensation method thereof

Abstract

The invention relates to a hemispherical resonator gyroscope capable of changing the height of a planar electrode plate and an error compensation method of the hemispherical resonator gyroscope, and belongs to the technical field of hemispherical resonator gyroscopes. The hemispherical resonator gyroscope comprises a hemispherical resonator shell, the planar electrode plate, a bottom plate and a temperature sensor, the planar electrode plate is movably installed on the bottom plate and located between the bottom plate and the hemispherical resonance shell, a plurality of electric lifting mechanisms used for synchronously adjusting the height of the planar electrode plate are evenly installed between the bottom plate and the planar electrode plate, the temperature sensor is fixedly installed on the bottom plate, and the temperature sensor and the electric lifting mechanisms are electrically connected to the controller. The temperature sensor collects the temperature of the hemispherical resonator gyroscope in real time, and the controller controls the electric lifting mechanism to drive the planar electrode plate to lift according to the temperature of the hemispherical resonator gyroscope, so that the height of the planar electrode plate is changed, and the temperature drift error of the hemispherical resonator gyroscope is compensated; and the compensation real-time performance and the compensation precision are high.

Description

Technical Field

[0001] This invention belongs to the technical field of hemispherical resonator gyroscopes, specifically relating to a hemispherical resonator gyroscope with variable planar electrode plate height and its error compensation method. Background Technology

[0002] The hemispherical resonator gyroscope is a new type of navigation-grade solid-state gyroscope developed based on the Coriolis vibration gyroscope technology. It has outstanding technical features such as no high-speed rotating parts, strong environmental adaptability, and long life. It also has excellent characteristics such as small size, light weight, high precision, high reliability, self-calibration capability, and ability to remember working state after short-term power failure. It is a typical representative of the development of vibration inertial sensor technology and has been widely used in the field of inertial navigation.

[0003] Hemispherical resonator gyroscopes are highly sensitive to temperature and prone to temperature-induced output drift. This not only leads to significant errors in mechanical vibration amplitude and detection mode phase but also negatively impacts circuit gain and phase shift, severely affecting the accuracy of the hemispherical resonator gyroscope. To mitigate the impact of temperature variations on hemispherical resonator gyroscope performance, various temperature compensation methods have been proposed in existing technologies. For example, invention patent CN115435768A proposes a temperature modeling compensation method for hemispherical resonator gyroscopes based on real-time sliding window, and invention patent CN117029797A discloses a segmented compensation method for temperature drift of hemispherical resonator gyroscopes based on correlation analysis.

[0004] However, most of the existing temperature compensation methods for hemispherical resonator gyroscopes are based on software modeling and compensation techniques, which suffer from low model repeatability and reliability, and poor compensation effect. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide a hemispherical resonator gyroscope with variable planar electrode plate height and its error compensation method, so as to solve or improve the defects existing in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a hemispherical resonator gyroscope with variable planar electrode plate height, comprising a hemispherical resonator housing, a planar electrode plate, a base plate, and a temperature sensor. The hemispherical resonator housing is fixedly mounted on the base plate, and the planar electrode plate is movably mounted on the base plate and located between the base plate and the hemispherical resonator housing. A plurality of electrically operated lifting mechanisms for synchronously adjusting the height of the planar electrode plate are uniformly installed between the base plate and the planar electrode plate. The temperature sensor is fixedly mounted on the base plate, and both the temperature sensor and the electrically operated lifting mechanisms are electrically connected to a controller.

[0007] Preferably, the electric lifting mechanism is an electric screw and nut mechanism, which includes a motor, a vertical screw, and a nut. The motor is fixedly mounted on the base plate, the lower end of the vertical screw is coaxially and fixedly connected to the output end of the motor, and the nut is fixedly mounted on the planar electrode plate, and the nut cooperates with the vertical screw.

[0008] Preferably, the hemispherical resonant housing includes a hemispherical housing and an intermediate shaft. The surface of the hemispherical housing is plated with a metal layer. The top of the intermediate shaft is exposed outside the top center of the hemispherical housing, and the bottom of the intermediate shaft is fixedly connected to the base plate.

[0009] Preferably, the hemispherical shell and the intermediate shaft are integrally formed into a hemispherical resonant shell.

[0010] Preferably, the planar electrode plate has a clearance through hole at its center for the intermediate shaft to pass through.

[0011] Preferably, the lower end face of the hemispherical shell is provided with multiple pairs of excitation electrodes and multiple pairs of detection electrodes symmetrically distributed around the avoidance through hole at the projection of the upper end face of the planar electrode plate, and the excitation electrodes and detection electrodes are arranged alternately.

[0012] Preferably, the base plate has a housing mounting hole at its center, and the intermediate shaft is fixedly inserted into the housing mounting hole.

[0013] Preferably, the temperature sensor is fixedly mounted on the side of the base plate.

[0014] The present invention also provides an error compensation method for a hemispherical resonant gyroscope with variable planar electrode plate height, comprising the following steps: S1. The temperature of the hemispherical resonant gyroscope is collected in real time by a temperature sensor; S2. Based on the temperature of the hemispherical resonant gyroscope, the target height of the planar electrode plate is obtained through the temperature-planar electrode plate height relationship. S3. The current height of the planar electrode plate is adjusted to the target height through the electric lifting mechanism, thereby realizing real-time compensation for the temperature drift error of the hemispherical resonant gyroscope.

[0015] Preferably, the method for obtaining the temperature-planar electrode plate height relationship is as follows: S21. Set the predetermined temperature as the reference temperature for temperature compensation, and set the middle position of the adjustment stroke of the planar electrode plate as the reference height; S22. Set the planar electrode plate of the hemispherical resonator gyroscope to the reference height, place it in a temperature chamber, keep it at the reference temperature for a predetermined time in a static state, and record the output capacitance of the hemispherical resonator gyroscope after the temperature is maintained as the reference capacitance. S23. Divide the predetermined temperature range into multiple temperature points at equal intervals; S24. At each temperature point, set the planar electrode plate of the hemispherical resonator to the reference height, place it in the temperature chamber, keep it at the corresponding temperature point for a predetermined time in a static state, and after keeping it at the temperature, adjust the height of the planar electrode plate so that the output capacitance of the hemispherical resonator is equal to the reference capacitance, and record the adjusted height of the planar electrode plate. S25. Perform least-squares fitting on each temperature point and its corresponding adjusted planar electrode plate height to obtain the temperature-planar electrode plate height relationship.

[0016] Compared with existing technologies, the present invention has the following advantages: the temperature of the hemispherical resonator gyroscope is collected in real time by a temperature sensor, the temperature data collected by the temperature sensor is received by a controller, and the electric lifting mechanism is controlled to drive the planar electrode plate to rise and fall according to the temperature of the hemispherical resonator gyroscope, thereby changing the height of the planar electrode plate and realizing the compensation for the temperature drift error of the hemispherical resonator gyroscope. The compensation has high real-time performance and high accuracy, and solves the problems of low model repeatability and reliability and poor compensation effect of existing hemispherical resonator gyroscope temperature compensation methods, which are mostly based on software modeling and compensation technology. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on the drawings described below without creative effort.

[0018] Figure 1 This is a three-dimensional structural diagram of a hemispherical resonant gyroscope with variable planar electrode plate height according to an embodiment of the present invention.

[0019] Figure 2 This is a schematic diagram of the front view structure of a hemispherical resonant gyroscope with variable planar electrode plate height according to an embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of the hemispherical resonant shell in an embodiment of the present invention.

[0021] Figure 4 This is a schematic diagram of the planar electrode plate in an embodiment of the present invention.

[0022] Figure 5 This is a schematic diagram of the structure of the base plate in an embodiment of the present invention.

[0023] The markings in the diagram are: 1. Hemispherical resonator housing; 101. Hemispherical housing; 102. Large diameter shaft; 103. Small diameter shaft; 2. Planar electrode plate; 201. Clearance through hole; 202. Excitation electrode; 203. Detection electrode; 204. Nut; 3. Base plate; 301. Housing mounting hole; 302. Motor; 303. Vertical screw; 4. Temperature sensor. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention. To make the above features and advantages of this invention more apparent and understandable, specific embodiments are provided below with reference to the accompanying drawings for detailed description.

[0025] like Figures 1 to 5 As shown, an embodiment of the present invention provides a hemispherical resonator gyroscope with variable planar electrode plate height, including a hemispherical resonator housing 1, a planar electrode plate 2, a base plate 3, and a temperature sensor 4. The hemispherical resonator housing 1 is fixedly mounted on the base plate 3, and the planar electrode plate 2 is movably mounted on the base plate 3 and located between the base plate 3 and the hemispherical resonator housing 1. Multiple (e.g., four) electrically operated lifting mechanisms for synchronously adjusting the height of the planar electrode plate 2 are evenly installed between the base plate 3 and the planar electrode plate 2. The temperature sensor 4 is fixedly mounted on the base plate 3. Both the temperature sensor 4 and the electrically operated lifting mechanisms are electrically connected to a controller (omitted in the figure). The controller is preferably, but not limited to, a PLC, a microcontroller, such as an STM32 series microcontroller. In use, the temperature of the hemispherical resonator gyroscope is measured in real time by the temperature sensor 4. The controller receives the temperature data measured by the temperature sensor 4 and controls the electrically operated lifting mechanisms to drive the planar electrode plate 2 to rise and fall according to the temperature of the hemispherical resonator gyroscope, thereby changing the height of the planar electrode plate 2 and compensating for the temperature drift error of the hemispherical resonator gyroscope.

[0026] In this embodiment, the electric lifting mechanism is preferably, but not limited to, an electric screw and nut mechanism. The electric screw and nut mechanism includes a motor 302, a vertical screw 303, and a nut 204. The motor 302 is fixedly mounted on the base plate 3. The lower end of the vertical screw 303 is coaxially and fixedly connected to the output end of the motor 302. The nut 204 is fixedly mounted on the planar electrode plate 2 and cooperates with the vertical screw 303. The motor 302 is preferably, but not limited to, a servo motor. The planar electrode plate 2 and the base plate 3 are preferably, but not limited to, square plates; circular plates, etc., can also be used. The four nuts 204 are respectively fixedly disposed at the four corners of the planar electrode plate 2, and the four motors 302 are respectively fixedly disposed at the four corners of the base plate 3. The working principle of the electric lifting mechanism is as follows: the four motors 302 on the base plate 3 drive the corresponding vertical screws 303 to rotate. The rotating vertical screws 303 convert the rotational motion into linear motion of the planar electrode plate 2 in the height direction through the nut 204, thereby changing the height of the planar electrode plate 2.

[0027] In this embodiment, the hemispherical resonator housing 1 includes a hemispherical housing 101 and an intermediate shaft. The surface of the hemispherical housing 101 is plated with a metal layer, such as a copper layer. The top of the intermediate shaft is exposed outside the top center of the hemispherical housing 101, and the bottom of the intermediate shaft is fixedly connected to the base plate 3. The hemispherical housing 101 and the intermediate shaft can be integrally formed into the hemispherical resonator housing 1, and the material of the hemispherical resonator housing 1 is fused silica. The intermediate shaft is preferably, but not limited to, a stepped shaft, composed of two shaft segments with different radii: the upper segment is a larger diameter shaft 102, and the lower segment is a smaller diameter shaft 103. The outer radius of the hemispherical housing 101 is preferably, but not limited to, 32 mm, and the thickness of the hemispherical housing 101 is preferably, but not limited to, 3.2 mm. The distance between the lower end face of the hemispherical housing 101 and the lower end face of the larger diameter shaft 102 is preferably, but not limited to, 16 mm to 19 mm.

[0028] In this embodiment, the planar electrode plate 2 has a clearance through-hole 201 at its center for the intermediate shaft to pass through, meaning the radius of the clearance through-hole 201 is larger than the radius of the major diameter shaft 102 of the intermediate shaft. Multiple pairs (e.g., two pairs, two electrodes per pair) of excitation electrodes 202 and multiple pairs (e.g., two pairs, two electrodes per pair) of detection electrodes 203 are symmetrically distributed around the clearance through-hole 201 at the projection of the lower end face of the hemispherical shell 101 onto the upper end face of the planar electrode plate 2. The planar electrode plate 2 is made of fused silica, and its surface is plated with a metal layer, such as a copper layer. The metal layer can be etched to form the excitation electrodes 202 and detection electrodes 203, which are arranged alternately. The working principle of the hemispherical resonant gyroscope is as follows: two pairs of excitation electrodes 202 on the planar electrode plate 2 release high voltage relative to the bottom of the hemispherical shell 101, causing the hemispherical shell 101 to vibrate at a fixed frequency; when the hemispherical resonant gyroscope rotates relative to the inertial frame, the mode shape of the hemispherical shell 101 changes, resulting in a change in the distance between the bottom of the hemispherical shell 101 and the top of the planar electrode plate 2; two pairs of detection electrodes 203 measure the capacitance between the bottom of the hemispherical shell 101 and the top of the planar electrode plate 2, and obtain the change in the distance between the bottom of the hemispherical shell 101 and the top of the planar electrode plate 2, thereby obtaining the rotational angular rate of the gyroscope relative to the inertial frame.

[0029] In this embodiment, a housing mounting hole 301 is formed at the center of the base plate 3, and the intermediate shaft is fixedly inserted into the housing mounting hole 301. The radius of the housing mounting hole 301 is preferably, but not limited to, equal to the radius of the minor diameter shaft 103 of the intermediate shaft; the depth of the housing mounting hole 301 is preferably, but not limited to, equal to the radius of the minor diameter shaft 103 of the intermediate shaft; and the thickness of the base plate 3 is preferably, but not limited to, greater than the length of the minor diameter shaft 103 of the intermediate shaft. During installation, the minor diameter shaft 103 of the intermediate shaft mates with the housing mounting hole 301 of the base plate 3 and is fixed by brazing.

[0030] In this embodiment, the temperature sensor 4 is fixedly mounted on the side of the base plate 3 for real-time measurement of the temperature of the hemispherical resonator gyroscope. The temperature sensor 4 is preferably, but not limited to, a DS18B20 digital temperature sensor.

[0031] like Figures 1 to 5 As shown, this embodiment also provides an error compensation method for a hemispherical resonator gyroscope with variable planar electrode plate height, including the following steps: S1. The temperature of the hemispherical resonant gyroscope is collected in real time by temperature sensor 4; S2. Based on the temperature of the hemispherical resonant gyroscope, the target height of the planar electrode plate 2 is obtained through the temperature-planar electrode plate height relationship. S3. The current height of the planar electrode plate 2 is adjusted to the target height through the electric lifting mechanism, thereby realizing real-time compensation for the temperature drift error of the hemispherical resonant gyroscope.

[0032] In this embodiment, the method for obtaining the temperature-planar electrode plate height relationship is as follows: S21. Set the predetermined temperature (e.g., 20℃, 25℃) as the reference temperature for temperature compensation, and set the middle position of the adjustment stroke of the planar electrode plate 2 as the reference height. S22. Set the planar electrode plate 2 of the hemispherical resonator gyroscope to the reference height, place it in a temperature chamber, and keep it at the reference temperature for a predetermined time (e.g., 2 hours) in a static state. Record the output capacitance of the hemispherical resonator gyroscope after the temperature is maintained as the reference capacitance. S23. Divide the predetermined temperature range (e.g., -40℃ to +70℃) into multiple (e.g., 23) temperature points at equal intervals (i.e., -40℃, -35℃, -30℃, -25℃, -20℃, -15℃, -10℃, -5℃, 0℃, +5℃, +10℃, +15℃, +20℃, +25℃, +30℃, +35℃, +40℃, +45℃, +50℃, +55℃, +60℃, +65℃, +70℃). S24. At each temperature point, set the planar electrode plate 2 of the hemispherical resonant gyroscope to the reference height, place it in the temperature chamber, and keep it at the corresponding temperature point for a predetermined time (e.g., 2 hours) in a static state. After keeping it at the temperature, adjust the height of the planar electrode plate 2 so that the output capacitance of the hemispherical resonant gyroscope is equal to the reference capacitance, and record the adjusted height of the planar electrode plate 2. S25. Perform least-squares fitting on each temperature point and its corresponding adjusted height of the planar electrode plate 2 to obtain the temperature-planar electrode plate height relationship.

[0033] The principle of using a variable-height planar electrode plate 2 to compensate for the temperature drift error of a hemispherical resonant gyroscope in this embodiment is as follows: The hemispherical resonant gyroscope measures the capacitance of the bottom of the hemispherical shell 101 relative to the top of the planar electrode plate 2 through the detection electrode 203, thereby obtaining the change in the distance between the bottom of the hemispherical shell 101 and the top of the planar electrode plate 2, and thus obtaining the rotational angular rate of the hemispherical resonant gyroscope relative to the inertial frame; and the capacitance of the bottom of the hemispherical shell 101 relative to the top of the planar electrode plate 2 is: C = C0 + ΔC T + ΔC ω ; Where C is the capacitance of the bottom of the hemispherical shell relative to the top of the planar electrode plate, C0 is the capacitance of the bottom of the hemispherical shell relative to the top of the planar electrode plate at the initial moment, and ΔC T ΔC represents the capacitance shift of the bottom of the hemispherical shell relative to the top of the planar electrode plate due to temperature.ω This is the capacitance offset caused by the rotational angular rate of the hemispherical resonant gyroscope relative to the inertial frame.

[0034] Therefore, ΔC T This introduces measurement errors. To compensate for ΔC T The resulting measurement error can be compensated by changing C0; C0 can be written as: ; Where ε is the dielectric constant of the dielectric between the bottom of the hemispherical shell and the top of the planar electrode plate, r is the outer radius of the hemispherical shell, and h is the thickness of the hemispherical shell. To detect the span angle of the electrode, d is the distance from the bottom of the hemispherical shell to the top of the planar electrode plate; due to ε, r, h, Since both are constant values, the height of the planar electrode plate can be changed, thereby changing d, and ultimately changing C0 to compensate for ΔC. T .

[0035] To verify the effectiveness of this invention, a hemispherical resonator gyroscope was constructed using the method of this invention. A hemispherical resonator gyroscope with the same specifications and an invariant planar electrode plate height was used as a reference. Both the hemispherical resonator gyroscope with the same specifications and an invariant planar electrode plate height were placed together in a temperature chamber. A temperature change curve of -40℃ to +70℃ was set, with a temperature change rate of 5℃ / hour. The output data of both gyroscopes throughout the entire process were collected, and their zero-bias stability was obtained. The zero-bias stability of the hemispherical resonator gyroscope with the same specifications and an invariant planar electrode plate height was 0.012° / h, while the zero-bias stability of the hemispherical resonator gyroscope using the method of this invention was 0.004° / h, representing a 66.7% improvement in accuracy, thus proving the effectiveness of this invention.

[0036] In the description of this invention, it should be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "multiple" means two or more, unless otherwise explicitly specified.

[0038] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A hemispherical resonant gyroscope with variable planar electrode plate height, characterized in that, The device includes a hemispherical resonant housing, a planar electrode plate, a base plate, and a temperature sensor. The hemispherical resonant housing is fixedly mounted on the base plate, and the planar electrode plate is movably mounted on the base plate and located between the base plate and the hemispherical resonant housing. Multiple electrically operated lifting mechanisms for synchronously adjusting the height of the planar electrode plate are evenly installed between the base plate and the planar electrode plate. The temperature sensor is fixedly mounted on the base plate, and both the temperature sensor and the electrically operated lifting mechanisms are electrically connected to a controller.

2. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 1, characterized in that, The electric lifting mechanism is an electric screw and nut mechanism, which includes a motor, a vertical screw, and a nut. The motor is fixedly mounted on the base plate, the lower end of the vertical screw is coaxially and fixedly connected to the output end of the motor, and the nut is fixedly mounted on the planar electrode plate, and the nut cooperates with the vertical screw.

3. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 1, characterized in that, The hemispherical resonant housing includes a hemispherical housing and an intermediate shaft. The surface of the hemispherical housing is plated with a metal layer. The top of the intermediate shaft is exposed outside the top center of the hemispherical housing, and the bottom of the intermediate shaft is fixedly connected to the base plate.

4. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 3, characterized in that, The hemispherical shell and the intermediate shaft are integrally formed into a hemispherical resonant shell.

5. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 3, characterized in that, The planar electrode plate has a clearance hole at its center for the intermediate shaft to pass through.

6. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 5, characterized in that, The lower end face of the hemispherical shell is provided with multiple pairs of excitation electrodes and multiple pairs of detection electrodes symmetrically distributed around the avoidance through hole at the projection of the upper end face of the planar electrode plate. The excitation electrodes and detection electrodes are arranged alternately.

7. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 3, characterized in that, The base plate has a housing mounting hole at its center, and the intermediate shaft is fixedly inserted into the housing mounting hole.

8. The hemispherical resonator gyroscope with variable planar electrode plate height according to claim 1, characterized in that, The temperature sensor is fixedly mounted on the side of the base plate.

9. An error compensation method for a hemispherical resonator with variable planar electrode plate height, used to control the hemispherical resonator with variable planar electrode plate height as described in any one of claims 1 to 8, characterized in that, Includes the following steps: S1. The temperature of the hemispherical resonant gyroscope is collected in real time by a temperature sensor; S2. Based on the temperature of the hemispherical resonant gyroscope, the target height of the planar electrode plate is obtained through the temperature-planar electrode plate height relationship. S3. The current height of the planar electrode plate is adjusted to the target height through the electric lifting mechanism, thereby realizing real-time compensation for the temperature drift error of the hemispherical resonant gyroscope.

10. The error compensation method for a hemispherical resonator gyroscope with variable planar electrode plate height according to claim 9, characterized in that, The method for obtaining the temperature-planar electrode plate height relationship is as follows: S21. Set the predetermined temperature as the reference temperature for temperature compensation, and set the middle position of the adjustment stroke of the planar electrode plate as the reference height; S22. Set the planar electrode plate of the hemispherical resonator gyroscope to the reference height, place it in a temperature chamber, keep it at the reference temperature for a predetermined time in a static state, and record the output capacitance of the hemispherical resonator gyroscope after the temperature is maintained as the reference capacitance. S23. Divide the predetermined temperature range into multiple temperature points at equal intervals; S24. At each temperature point, set the planar electrode plate of the hemispherical resonator to the reference height, place it in the temperature chamber, keep it at the corresponding temperature point for a predetermined time in a static state, and after keeping it at the temperature, adjust the height of the planar electrode plate so that the output capacitance of the hemispherical resonator is equal to the reference capacitance, and record the adjusted height of the planar electrode plate. S25. Perform least-squares fitting on each temperature point and its corresponding adjusted planar electrode plate height to obtain the temperature-planar electrode plate height relationship.

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