Bearing support and wafer processing device

Abstract

The invention discloses a bearing support and a wafer processing device. The bearing bracket comprises a bearing disc and a bushing ring; a matching part is arranged on the bearing disc, the bushing ring is detachably assembled on the peripheral edge of the bearing disc, and a plurality of inner convex structures are arranged on the inner ring of the bushing ring at intervals; and the plurality of inner convex structures can enable a gap to be formed between the material in the bearing disc and the inner ring of the bushing ring, and can limit the relative position of the bushing ring and the bearing disc through the matching part. The bearing support provided by the invention is small in installation difficulty, is low in equipment cost, and can improve the process quality of wafers.

Description

Technical Field

[0001] This application belongs to the field of semiconductor manufacturing technology, specifically relating to a support bracket and a wafer processing device. Background Technology

[0002] To deposit thin films of a fixed thickness on a wafer, physical vapor deposition (PVD) or chemical vapor deposition (CVD) methods are typically used.

[0003] In the above process, the wafer needs to be placed on a support, which typically includes a tray and a bushing surrounding the periphery of the tray. The tray is used to support the wafer, while the bushing is used to prevent byproducts generated during the process from splashing onto the tray or the wafer inside the tray.

[0004] In existing technologies, during the deposition process, the wafer can easily transfer heat to the backing ring, resulting in cold spots on the wafer and reducing product quality. Summary of the Invention

[0005] This application aims to provide a support bracket and a wafer processing apparatus, which at least solves one of the problems of the prior art.

[0006] To solve the above-mentioned technical problems, this application is implemented as follows: According to a first aspect of this application, a support bracket is provided, comprising: A support tray, wherein a mating part is provided on the support tray; A bushing, which is detachably mounted on the peripheral edge of the support tray, wherein the inner ring of the bushing is provided with a plurality of protruding structures at intervals; The aforementioned convex structures enable a gap between the material located in the support tray and the inner ring of the liner, and can limit the relative position of the liner and the support tray through the mating part.

[0007] Optionally, the inner ring of the bushing is further provided with a limiting portion, which can limit the relative position of the bushing and the support tray through the mating portion.

[0008] Optionally, the mating part includes a plurality of protruding points protruding from the bearing surface of the bearing tray, and the limiting part includes a plurality of recessed structures spaced apart in the inner ring of the bushing, with each of the protruding points located within one of the recessed structures.

[0009] Optionally, the mating part includes a plurality of protrusion structures protruding from the bearing surface of the support tray, and each of the inner protrusion structures is disposed adjacent to one of the protrusion structures to limit the circumferential position of the bushing and the support tray.

[0010] Optionally, the outer contact surfaces of the convex structure are all arc surfaces.

[0011] Optionally, a plurality of the convex structures and a plurality of the concave structures are alternately and evenly distributed on the inner ring of the bushing.

[0012] Optionally, at least two of the convex structure and at least two of the concave structure are provided.

[0013] Optionally, the end of the convex structure has a slope relative to the bearing surface of the bearing tray.

[0014] Optionally, the end of the convex structure has a slope angle of 60° to 90° relative to the bearing surface of the bearing tray.

[0015] Optionally, in the thickness direction of the pallet, the thickness of the inner convex structure is greater than the thickness of the material inside the pallet (1).

[0016] Optionally, in the thickness direction of the bearing tray, the thickness of the inner convex structure is 0.8 mm to 1 mm.

[0017] Optionally, in the circumferential direction of the tray, the end width of the inner convex structure is 2.5mm to 3mm, and the root width of the inner convex structure is 3mm to 3.5mm.

[0018] Optionally, in the radial direction of the tray, the length of the inner convex structure is 4mm to 4.5mm.

[0019] Optionally, the orthographic projection of the convex structure onto the support tray is trapezoidal, rectangular, triangular, or arc-shaped; and / or, The corners of the convex structure are all designed with rounded chamfers.

[0020] According to a second aspect of this application, a wafer processing apparatus is provided, comprising: The load-bearing support described in the first aspect.

[0021] In the embodiments of this application, the arrangement of several convex structures allows for a certain gap between the wafer and the non-contact position of the inner ring of the liner when the wafer is located in the tray. This reduces the contact area between the liner and the wafer, thereby reducing heat transfer during the process, avoiding the formation of cold spots, and improving the wafer's process quality.

[0022] In addition, through the interaction of several convex structures and mating parts on the bearing plate, the liner and bearing plate can be quickly positioned during assembly, while the relative position between them can be restricted, reducing the assembly difficulty of the bearing plate and liner and improving the reliability of the assembly.

[0023] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0024] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is one of the structural schematic diagrams of the load-bearing support provided in this application; Figure 2 yes Figure 1 A magnified view of a section at point A in the middle; Figure 3 This is one of the structural schematic diagrams of the bushing provided in this application. Figure 4 yes Figure 3 Top view; Figure 5 yes Figure 4 BB cross-sectional view; Figure 6 yes Figure 5 A magnified view of a section at point D; Figure 7 yes Figure 4 A magnified view of a section at point C; Figure 8 This is the second structural schematic diagram of the support frame provided in this application; Figure 9 yes Figure 8 A magnified view of a section at point E in the middle; Figure 10 This is the second schematic diagram of the structure of the bushing provided in this application; Figure 11 yes Figure 10 Top view; Figure 12 yes Figure 11 FF section view; Figure 13 yes Figure 12 A magnified view of a section at point H in the middle; Figure 14 yes Figure 11 A magnified view of a section at point G.

[0025] Figure label: 1. Supporting tray; 11. Raised dot structure; 2. Liner ring; 21. Convex inner structure; 22. Concave inner structure; a. Thickness of the convex structure; b. End width of the convex structure; c. Root width of the convex structure; d. Slope angle of the end of the convex structure; e. Length of the convex structure. Detailed Implementation

[0026] Embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application are within the scope of protection of this application.

[0027] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0028] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] The following is combined Figures 1-14 This application describes a support bracket and a wafer processing apparatus according to embodiments thereof.

[0031] like Figure 1 and Figure 8 As shown, according to some embodiments of this application, a support bracket is provided, including a support tray 1 and a bushing 2; the support tray 1 is provided with a mating part; the bushing 2 is detachably assembled to the peripheral edge of the support tray 1, and the inner ring of the bushing 2 is provided with a plurality of inner protruding structures 21 at intervals; wherein, the plurality of inner protruding structures 21 enable the material on the bearing surface 12 of the support tray 1 to have a gap with the inner ring of the bushing 2, and can limit the relative position of the bushing 2 and the support tray 1 through the mating part.

[0032] Specifically, in practical applications, the support tray 1 is mainly used to support materials (such as wafers), and the liner ring 2 is set at the periphery of the support tray 1 to restrict the position of the material on the support tray from the periphery, so as to facilitate the deposition coating process of the material in the support tray 1.

[0033] In this embodiment, by providing several protruding structures 21 on the inner ring of the bushing 2, a gap is formed between the wafer on the bearing surface 12 of the support tray 1 and the non-contact area of ​​the inner ring of the bushing (2), reducing the contact area between the inner ring of the bushing 2 and the wafer. This reduces the heat transfer from the wafer to the bushing during the process, thereby reducing the formation of cold spots on the wafer, improving process quality, and ensuring product yield. The size of the gap between the outer periphery of the wafer and the inner ring of the bushing 2 can be achieved by adjusting the radial dimension of the protruding structure 21 along the support tray 1. The specific design can be based on process requirements, and the number of protruding structures 21 can be one, two, three, or more, without limitation.

[0034] Furthermore, multiple mating parts are provided on the support tray 1, allowing for quick and precise positioning of the relative positions of the two components during assembly. This is achieved simply by accurately placing the liner 2 around the perimeter of the support tray 1 and using the inner convex structure of the liner 2's inner ring and the mating parts on the support tray 1. The detachable nature of the liner 2 and the support tray 1 facilitates fine-tuning during assembly. If a positional deviation is detected, the liner 2 can be easily removed and reinstalled, preventing the entire assembly from being scrapped due to assembly errors. Simultaneously, this simplified assembly method requires less specialized skills, significantly improving assembly efficiency and reducing the time and labor costs associated with complex assembly processes.

[0035] Furthermore, given that the liner ring 2 is consumed in large quantities during the manufacturing process, the detachable liner ring 2 design allows for separate manufacturing of the liner ring 2 and the support tray 1. This enables the selection of more suitable materials and processes based on the performance requirements of different components, avoiding increased costs due to material or process limitations during overall manufacturing. On the other hand, the positioning design of the inner convex structure and mating part ensures the accuracy of the assembly of the liner ring 2 and the support tray 1, simplifies the assembly process, and reduces the cost of later maintenance and component replacement.

[0036] In addition, the simple structure and assembly method reduce the complex equipment and precision instruments required in the production process, thereby reducing the investment cost of production equipment. Furthermore, the inner convex structure 21 on the bushing 2 helps to reduce the manufacturing difficulty of the bushing 2, thus reducing the overall manufacturing cost of the equipment.

[0037] In the above embodiments, the shapes of the support tray 1 and the liner ring 2 can also be designed to match specific material types. Correspondingly, the specific mating forms and quantities of the inner convex structure and mating parts can be designed according to actual needs, and this application does not impose any restrictions on them. Optionally, the inner ring of the liner ring 2 is also provided with a limiting part, which can limit the relative position of the liner ring 2 and the support tray 1 through the mating part.

[0038] Specifically, in this embodiment, a limiting part can be provided on the inner ring of the bushing, so that the limiting part can be used to position the bushing and the support tray during the assembly process by cooperating with the mating part, and to limit the relative position of the bushing and the support tray after the assembly is completed.

[0039] The specific fit and quantity of the limiting part and the mating part can be designed according to actual needs. For example, the limiting part and the mating part can be designed as a mating form of protrusion and groove, or as an abutting form of stop block and limiting block, which greatly improves the flexibility of the design.

[0040] In addition, there can be multiple mating parts, so that the inner convex structure and the limiting part can cooperate or act with different mating parts, which improves the reliability of the assembly of the bushing and the bearing tray.

[0041] Optionally, such as Figures 8 to 14 As shown, the mating part includes a plurality of protruding structures 11 protruding from the bearing surface of the bearing tray 1, and the limiting part includes a plurality of recessed structures 22 spaced apart in the inner ring of the bushing 2, with each protruding structure 11 located in a recessed structure 22.

[0042] Specifically, in this embodiment, the limiting part is configured to include several concave structures 22 located in the inner ring of the bushing 2, and the mating part is designed as several protruding point structures 11 protruding from the bearing surface of the support tray 1. Each protruding point structure 11 is located in the concave structure 22, so that during assembly, there is no need to use complex tools or high-precision positioning operations. The bushing 2 is simply placed roughly on the periphery of the support tray 1, so that the protruding point structure 11 is close to the concave structure 22. Since the concave structure 22 has a certain accommodating space, the protruding point structure 11 can enter it relatively easily, so as to achieve the initial coarse positioning of the bushing and the support tray.

[0043] This positioning method does not require high assembly precision. Even with a certain positional deviation, the protruding structure 11 can be finely adjusted within the concave structure 22 to achieve accurate positioning. This effectively saves assembly time and labor costs, reduces assembly difficulty, ensures the uniqueness of the bushing 2 installation, and makes the entire assembly process simpler and more efficient. The number of concave structures 22 can be one, two, three, or more, and the number of protruding structures 11 can also be one, two, three, or more, ensuring that each protruding structure 11 corresponds to a specific concave structure 22, at least defining the positional relationship between the bushing 2 and the support tray 1 in the circumferential direction.

[0044] In addition, in this embodiment, the number of protruding structures can be greater than the number of concave structures, so that some protruding structures can cooperate with several concave structures to achieve the limiting effect on the bushing and bearing plate in the circumferential direction.

[0045] Optionally, such as Figure 1 and Figure 8 As shown, the mating part includes several protrusion structures 11 protruding from the bearing surface of the bearing tray 1. Each inner protrusion structure is arranged adjacent to a protrusion structure to limit the circumferential position of the bushing 2 and the bearing tray 1.

[0046] Specifically, in this embodiment, the multiple inner convex structures 21 arranged on the inner ring of the liner 2 are arranged adjacent to the protruding part of the convex structure 11 on the bearing surface of the support tray 1, which limits the high stability of the liner 2 and the support tray 1 in the circumferential position. This effectively avoids shaking or misalignment caused by relative movement of components during the process, allowing the deposited material to adhere evenly and accurately to the target position, greatly reducing quality problems such as uneven deposition and blurred edges, and improving the thickness consistency and surface flatness of the deposited layer. In addition, the cooperation between the convex structure 11 and the inner convex structure 21 enables rapid positioning between the liner 2 and the support tray 1 during the assembly process, further reducing the assembly difficulty and improving assembly efficiency.

[0047] In one embodiment, the number of protrusion structures 11 is set to be equal to the sum of the number of inner convex structures 21 and inner concave structures 22. This allows the protrusion structures 11 to not only accommodate the number of inner convex structures 21, achieving a limiting fit between multiple inner convex structures 21 and multiple protrusion structures 11, but also to accommodate the number of inner concave structures 22, achieving a limiting fit between multiple inner concave structures 22 and multiple protrusion structures 11. This ensures both the assembly efficiency and accuracy between the bushing 2 and the support tray 1, and also reduces the production difficulty of the support tray 1. In other words, only one type of protrusion structure 11 is needed to accommodate both inner convex structures 21 and inner concave structures 22, thus reducing production costs.

[0048] Meanwhile, when the material is located in the support tray 1, the end of the inner convex structure 21 contacts the material. On the one hand, this restricts the position of the material in the support tray 1, preventing the material from moving randomly due to slight external disturbances. This ensures the precise correspondence between the deposition area and the material position, allowing the deposition process to proceed smoothly according to the preset parameters and trajectory, thus improving the accuracy and quality of the deposition process. On the other hand, the design of the inner convex structure 21 increases the gap between the material edge and the liner ring 2, which not only avoids the problem of abnormal coating thickness at the material edge, further improving the process effect, but also reduces the heat transferred from the material to the liner ring 2, reducing the formation of cold spots.

[0049] In the actual process, the inner convex structure 21 and the protruding point structure 11 are adjacent, forming a strong constraint on the circumferential position of the liner ring 2, effectively preventing the liner ring 2 from rotating relative to the support tray 1 and ensuring the fixed position of both. The end of the inner convex structure 21 contacts the material, directly acting as a radial barrier and positioning element, stably confining the material within the support tray 1. Combined with the cooperation of the inner concave structure 22 and the protruding point structure 11, this eliminates the need for complex mechanical devices or additional limiting components, reducing structural complexity and cost. Simultaneously, it can adapt to materials of different shapes and sizes, exhibiting good versatility and ensuring reliable limiting under various material load conditions, avoiding damage or process errors caused by material displacement.

[0050] Optionally, such as Figure 2 and Figure 9 As shown, the outer contact surfaces of the convex structure are all arc surfaces, that is, the contact surfaces of the convex structure 11 with the inner convex structure 21 or the inner concave structure 22 are all set as arc-shaped contact surfaces.

[0051] Specifically, in this embodiment, the arc-shaped contact surface design of the convex structure 11 with the inner convex structure 21 or the inner concave structure 22 allows the curved surface guiding effect to reduce the assembly alignment accuracy requirements during the assembly of the bushing 2 and the support tray 1, reducing jamming problems caused by edge interference, making the component fitting process smoother, improving assembly efficiency and reducing the difficulty of manual operation. At the same time, the arc-shaped surface contact can disperse the instantaneous impact force during the assembly process, avoid structural damage caused by local stress concentration, protect the surface accuracy of the components, and extend their service life.

[0052] Furthermore, the curved contact surface can achieve balanced force transmission in multiple directions through curved surface fitting. Compared with planar contact, its contact stress distribution is more uniform, which can effectively resist external loads such as vibration and impact, and improve the stability and reliability of the limiting position between the convex structure 11 and the inner convex structure 21 and the inner concave structure 22 respectively. In addition, the self-centering characteristic of the curved structure can automatically correct assembly deviations, ensure the positioning accuracy of the convex structure 11 and the mating parts, and avoid limiting failure caused by assembly errors; at the same time, the curved surface contact reduces relative friction loss, reduces the wear rate of parts, and further ensures the consistency of limiting accuracy during long-term use.

[0053] Optionally, refer to Figure 1 and Figure 8 Multiple convex structures 21 and multiple concave structures 22 are alternately and evenly distributed in the inner ring of the bushing 2. That is, one convex structure, one concave structure, and then another convex structure are alternately distributed in the inner ring of the bushing.

[0054] Specifically, in this embodiment, the alternating distribution design allows for more balanced stress distribution on the inner ring of the bushing 2, avoiding deformation or wear caused by localized stress concentration, and improving the overall structural strength and durability of the bushing 2. During assembly, the continuous guide structure formed by alternating convex and concave parts guides the convex structure to smoothly engage, reducing alignment difficulty and improving assembly efficiency and consistency. At the same time, the alternating structure forms multi-point alternating limits, which can effectively resist external loads such as vibration and impact, and can also automatically correct slight assembly deviations, ensuring stable limit accuracy during long-term use, and reducing relative frictional wear between components.

[0055] Furthermore, the multiple convex structures 21 and concave structures 22 are evenly distributed within the inner ring of the bushing 2, allowing the contact forces between the convex structure 11 and the concave and convex structures 21 to be evenly transmitted along the circumferential direction. This avoids structural deformation or wear caused by localized stress concentration, thereby improving the overall structural stability and service life. Simultaneously, the evenly distributed design ensures that all contact points fit synchronously during assembly, reducing alignment difficulty and improving assembly efficiency and consistency. It also forms multi-point collaborative limiting, enhancing radial and circumferential positioning accuracy, effectively resisting external vibrations, impacts, and other loads, and ensuring the reliability of the limiting mechanism during long-term use.

[0056] Optionally, refer to Figure 1 and Figure 8 At least two convex structures 21 and two concave structures 22 are provided respectively.

[0057] Specifically, in this embodiment, at least two convex structures 21 are provided, and at least two concave structures 22 can also be provided accordingly. The number of convex structures 21 and concave structures 22 can be the same or different, and there is no limitation here. When more than two convex structures 21 and two concave structures 22 are provided respectively, multi-point cooperative contact and limiting can be formed, avoiding structural damage caused by single-point overload, and improving the overall load-bearing capacity and stability. Multi-point distribution can evenly disperse stress, enhance vibration and impact resistance, ensure positioning accuracy, reduce the impact of assembly deviation, extend the service life of components, and ensure functional reliability during long-term use.

[0058] Furthermore, when the number of convex structures 21 and concave structures 22 is the same, multiple convex structures 21 and multiple concave structures 22 can be evenly and alternately distributed within the inner ring of the bushing 2, and the number of protrusion structures 11 corresponds accordingly, enhancing the stability of the connection between the bushing 2 and the support tray 1. During the process, it can effectively avoid changes in the relative positions of the two due to uneven local stress or slight external forces, ensuring uniform adhesion of the deposited material, reducing differences in deposited layer thickness and surface defects, and improving the consistency and quality of the deposited product.

[0059] In one embodiment, two, three, six, or more convex structures 21 and concave structures 22 may be provided respectively, and four, six, or twelve convex point structures 11 may be provided accordingly. In addition, when multiple convex structures 21 are provided, the multiple convex point structures 11 may be located on the same side of each convex structure 21, or they may be located on different sides of each convex structure 21. This application does not limit this.

[0060] Optionally, such as Figure 6 As shown, the end of the inner convex structure 21 has a slope relative to the bearing surface of the bearing tray 1, so that the material can adhere to the bearing surface of the bearing tray 1.

[0061] Specifically, in this embodiment, the slope design of the end of the inner convex structure 21 relative to the bearing surface of the tray 1 can create a guiding effect along the bearing surface direction, guiding the material to naturally conform to the bearing surface during placement or assembly, avoiding the phenomenon of "overlapping and hanging" at the edge of the material due to the abruptness of the end of the inner convex structure 21. The slope structure can also eliminate the hard interference between the material and the end of the inner convex structure, ensuring that the material conforms smoothly to the bearing surface as a whole, preventing material displacement and tilting caused by uneven local force, while avoiding material damage or assembly deviation caused by overlapping, and ensuring the flatness and consistency of the material placement.

[0062] In addition, the slope design allows the material to form line or point contact with the inner convex structure 21. Compared with the surface contact at the right angle end, the contact area between the material and the bushing is smaller, which further reduces the temperature transfer from the material to the bushing, avoids the formation of cold spots, and improves the process quality.

[0063] Optionally, such as Figure 6 As shown, the end of the inner convex structure 21 has a slope angle d of 60° to 90° relative to the bearing surface of the bearing tray 1.

[0064] Specifically, in this embodiment, when material is placed on the tray 1, the slope angle at the end of the inner convex structure 21 forms a natural guiding and blocking surface. On the one hand, this facilitates the material's guidance from the slope into the tray 1; on the other hand, it makes it difficult for the material in the tray 1 to be blown out along its surface when it contacts the end of the inner convex structure 21, thus avoiding material overlap and making the material heat more evenly. The slope angle is set to 60°–90°, such as 70°, 75°, 80°, or 85°, which effectively improves the material restraint effect.

[0065] Optionally, such as Figure 6 As shown, in the thickness direction of the pallet 1, the thickness a of the inner convex structure 21 is greater than the thickness of the material inside the pallet 1.

[0066] Specifically, by setting the thickness of the inner convex structure 21 in the thickness direction of the bearing tray 1 to be greater than the thickness of the material inside the bearing tray 1, the material can be further prevented from being blown out of the bearing tray 1, making the reliability of the entire bearing support higher and ensuring the process effect.

[0067] Optionally, such as Figure 6 As shown, in the thickness direction of the bearing tray 1, the thickness a of the inner convex structure 21 is 0.8mm to 1mm.

[0068] Specifically, in practical applications, excessive thickness of the inner convex structure 21 can increase processing difficulty and costs, while insufficient thickness can lead to poor material limiting effect. In this embodiment, the thickness of the inner convex structure 21 is set to 0.8mm to 1mm, such as 0.85mm, 0.9mm, or 0.95mm, balancing processing cost and limiting effect.

[0069] Optionally, such as Figure 7 As shown, in the circumferential direction of the bearing tray 1, the end width b of the inner convex structure 21 is 2.5mm to 3mm, and the root width c of the inner convex structure 21 is 3mm to 3.5mm. The end of the inner convex structure 21 generally refers to the end furthest from the inner ring of the bushing 2, and the root of the inner convex structure 21 generally refers to the end connected to the inner ring of the bushing 2.

[0070] Specifically, in this embodiment, the root width of the inner convex structure 21 is set to 3mm to 3.5mm, such as 3.1mm or 3.3mm, which makes the connection between the inner convex structure 21 and the inner ring of the bushing 2 more reliable. When subjected to pressure or impact, the wider root can effectively disperse stress, reduce the risk of breakage or deformation of the inner convex structure 21, thereby extending the service life of the support bracket and reducing production interruption and equipment maintenance costs caused by structural damage.

[0071] Furthermore, the end width of the convex structure 21 is 2.5mm to 3mm, such as 2.6mm, 2.7mm, or 2.8mm, which allows it to form a precise and effective barrier when in contact with materials. Too narrow a width may result in insufficient constraint on the materials, making them prone to slippage; while too wide a width would occupy too much space, affecting the amount of material that can be placed. This width ensures that the materials are stably confined within the support tray 1, preventing displacement or spillage during transportation or processing, avoiding material overlap, and ensuring the smoothness of the process flow. Additionally, the end width is typically smaller than the root width, allowing the convex structure 21 to match the overall structure of the support tray 1, improving the overall stability and reliability of the equipment.

[0072] Optionally, refer to Figure 6 In the radial direction of the bearing tray 1, the length of the inner convex structure 21 is 4mm to 4.5mm.

[0073] Specifically, in this embodiment, the radial length of the inner convex structure 21 affects the gap between the material in the tray 1 and the inner ring of the liner 2. That is, the longer the length, the larger the gap, and the shorter the length, the smaller the gap. Therefore, by limiting the radial length of the inner convex structure 21, the gap size can be adjusted.

[0074] In practical applications, an excessively large gap will weaken the protective effect of the bushing 2, causing byproducts from the process to splash onto the side of the material or the bottom of the tray 1, affecting the process quality; while an excessively small gap will result in poor heat insulation between the bushing 2 and the material, which can easily lead to the formation of cold spots on the material.

[0075] In this embodiment, the radial length e of the inner convex structure 21 is 4mm to 4.5mm, such as 4.1mm or 4.2mm. This can prevent by-products from splashing into the material or tray, and also ensure the heat insulation effect between the liner ring 2 and the material, thus ensuring process quality and product yield.

[0076] Optionally, refer to Figure 7 The orthographic projection of the inner convex structure 21 on the support tray 1 is trapezoidal, rectangular, triangular or arc-shaped and / or the corners of the inner convex structure 21 are all set as arc-shaped chamfers.

[0077] Specifically, in this embodiment, when the orthographic projection of the convex structure 21 is trapezoidal, its narrow end and wide root shape provides stable support when in contact with the material and facilitates the material sliding to the center of the support tray 1. At the same time, the trapezoidal hypotenuse can disperse stress, enhance structural strength, reduce damage caused by excessive local stress, and extend the service life of the support bracket.

[0078] When the orthographic projection of the inner convex structure 21 is rectangular, its structure is regular, the manufacturing process is simple, and the production cost can be reduced. Furthermore, its sides can precisely match the liner ring 2 and the support tray 1, ensuring the stability and accuracy of the assembly, effectively limiting the movement of materials in the circumferential direction, and preventing materials from overlapping.

[0079] When the orthographic projection of the convex structure 21 is triangular, the structure exhibits strong stability, with its three sides evenly distributing material pressure. Furthermore, its apex can precisely position the material, preventing horizontal displacement. The triangular structure occupies little space, allowing for the installation of more convex structures 21 within a limited space, enhancing the limiting effect. When the orthographic projection of the convex structure 21 is arc-shaped, its smooth surface evenly distributes stress, preventing stress concentration, reducing the risk of damage to the convex structure 21, and improving the reliability of the load-bearing support.

[0080] In practical applications, the specific shape of the inner convex structure 21 can be designed according to actual needs, and this application does not impose any restrictions on it.

[0081] Furthermore, the corners of the convex inner structure 21 are all designed with rounded chamfers. This allows the convex inner structure 21 to disperse stress concentration through the curved surface transition, avoiding structural damage such as cracks and deformation caused by excessive local stress at the corners. Especially when subjected to vibration and impact loads, it can significantly improve the structural strength and service life of the convex inner structure 21. At the same time, the rounded chamfers eliminate sharp edges, which can reduce hard friction and collision between materials and corners during placement or assembly, reduce the risk of scratches on the material surface, and ensure the integrity of the material's appearance and performance. In addition, the curved surface transition can also optimize assembly guidance, making the fit between the convex structure and the convex inner structure 21 smoother, improving assembly efficiency and ease of operation.

[0082] According to a second aspect of this application, a wafer processing apparatus is provided, comprising: the support bracket described in the first aspect.

[0083] The support bracket provided in the first aspect of this application reduces the contact area between the bushing 2 and the wafer through the arrangement of several internally protruding structures 21, thereby reducing heat transfer during the process, avoiding the formation of cold spots, and improving the wafer's process quality. Furthermore, the limiting portion of the inner ring of the bushing 2 and the mating portion on the support tray 1 reduce the assembly difficulty of the support tray 1 and the bushing 2, improving assembly reliability. Moreover, by making the bushing 2 detachably connected to the support tray 1, the replaceability of the bushing 2 is improved, and equipment costs are reduced.

[0084] When the aforementioned support bracket is applied to a wafer processing apparatus, on the one hand, the bushing 21 can cover the edge area of ​​the support tray like a "shield" to prevent these byproducts from directly adhering to the side wall and bottom area of ​​the support tray 1. On the other hand, it can improve the positional reliability and process quality of the wafer within the support bracket, thereby increasing the yield of the entire wafer processing apparatus and reducing equipment and production costs.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0086] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A support bracket, characterized in that, include: A support tray (1) is provided with a mating part; Liner ring (2), the liner ring (2) is detachably assembled to the peripheral edge of the support tray (1), and the inner ring of the liner ring (2) is provided with a number of protruding structures (21) at intervals. Among them, several of the inner convex structures (21) enable the material located in the support tray (1) to have a gap between the material and the inner ring of the liner (2), and enable the relative position of the liner (2) and the support tray (1) to be restricted by the mating part.

2. The support bracket according to claim 1, characterized in that, The inner ring of the liner (2) is also provided with a limiting part, which can limit the relative position of the liner (2) and the support tray (1) through the mating part.

3. The support bracket according to claim 2, characterized in that, The mating part includes a plurality of protruding point structures (11) protruding from the bearing surface of the bearing tray (1), and the limiting part includes a plurality of concave structures (22) spaced apart in the inner ring of the bushing (2), with each of the protruding point structures (11) located in one of the concave structures (22).

4. The support bracket according to claim 1, characterized in that, The mating part includes a plurality of protrusion structures (11) protruding from the bearing surface of the bearing tray (1), and each of the inner protrusion structures is arranged adjacent to one of the protrusion structures (11) to limit the circumferential position of the bushing (2) and the bearing tray (1).

5. The bearing support according to claim 3 or 4, characterized in that, The outer contact surfaces of the convex structure (11) are all arc surfaces.

6. The bearing support according to claim 3, characterized in that, Multiple convex structures (21) and multiple concave structures (22) are alternately and evenly distributed in the inner ring of the bushing (2).

7. The bearing support according to claim 3, characterized in that, At least two of the convex structure (21) and the concave structure (22) are provided.

8. The bearing support according to claim 1, characterized in that, The end of the convex structure (21) has a slope relative to the bearing surface of the bearing tray (1).

9. The support bracket according to claim 8, characterized in that, The end of the inner convex structure (21) has a slope angle of 60° to 90° relative to the bearing surface of the bearing tray (1).

10. The support bracket according to claim 1, characterized in that, In the thickness direction of the pallet (1), the thickness of the inner convex structure (21) is greater than the thickness of the material inside the pallet (1).

11. The support bracket according to claim 1, characterized in that, In the thickness direction of the bearing tray (1), the thickness of the inner convex structure (21) is 0.8 mm to 1 mm.

12. The support bracket according to claim 1, characterized in that, In the circumferential direction of the tray (1), the end width of the inner convex structure (21) is 2.5mm to 3mm, and the root width of the inner convex structure (21) is 3mm to 3.5mm.

13. The support bracket according to claim 1, characterized in that, In the radial direction of the bearing tray (1), the length of the inner convex structure (21) is 4mm to 4.5mm.

14. The support bracket according to claim 1, characterized in that, The orthographic projection of the inner convex structure (21) onto the support tray (1) is trapezoidal, rectangular, triangular, or arc-shaped; and / or, The corners of the convex structure (21) are all set with arc-shaped chamfers.

15. A wafer processing apparatus, characterized in that, include: The load-bearing bracket according to any one of claims 1-14.

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