Fixing structure and semiconductor process equipment

Abstract

The invention discloses a fixing structure and semiconductor process equipment. The fixing structure comprises a first clamping block and a second clamping block, wherein the first clamping block and the second clamping block are used for clamping a clamped piece from two opposite sides of the clamped piece in a first direction; a first clamping groove is formed in the face, facing the second clamping block, of the first clamping block. A second clamping groove is formed in the face, facing the first clamping block, of the second clamping block. And the elastic assembly is connected to the inner side of the side wall of the first clamping groove so that the elastic assembly can be arranged in the first clamping groove in a suspended mode, and when the first clamping groove and the second clamping groove are encircled, the elastic assembly and the second clamping groove can clamp the clamped piece. According to the clamping device, abrasion to a clamped part can be reduced, and therefore the service life of the clamped part can be prolonged; when the outer side of the clamped piece is wrapped with the heating belt, the elastic assembly can also reduce extrusion on the clamped piece, and therefore the fault rate of the heating belt can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, specifically to a fixed structure and semiconductor process equipment. Background Technology

[0002] The gas delivery system is responsible for receiving plant gases and supplying process gases to the reaction chambers, and is an important component of semiconductor equipment. Gas pipelines are characterized by small diameters and long lengths, which are even more pronounced in tall vertical furnaces. To ensure the stability and consistency of gas pipeline installation, proper securing of the gas pipelines is necessary.

[0003] Gas pipelines are usually fixed in place using a fixed structure. The existing fixed structure is made of metal, which can easily cause wear and tear on the gas pipeline during use, thus reducing its service life. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a fixed structure and semiconductor process equipment that can improve the problem that existing fixed structures are prone to causing wear on gas pipelines, thereby reducing the service life of the gas pipelines.

[0005] To solve the above-mentioned technical problems, in a first aspect, embodiments of this application provide a fixing structure, including a first clamping block and a second clamping block for clamping the clamped member from opposite sides in a first direction;

[0006] The first clamping block has a first clamping groove on the side facing the second clamping block;

[0007] The second clamping block has a second clamping groove on the side facing the first clamping block;

[0008] An elastic component is connected to the inner side wall of the first clamping groove so that the elastic component is suspended in the first clamping groove. The elastic component is used to clamp the clamped part with the second clamping groove when the first clamping groove and the second clamping groove are closed.

[0009] Optionally, the elastic component includes a flexible plate and at least two first elastic elements, wherein the flexible plate is connected to the inner side wall of the first clamping groove through the first elastic elements.

[0010] Optionally, the first clamping block includes a base plate and two side plates respectively connected to both ends of the base plate. The two side plates are arranged along a second direction, wherein the second direction is perpendicular to the first direction and perpendicular to the axial direction of the hole formed by the first clamping groove and the second clamping groove.

[0011] Each of the side plates has a groove on the side facing the first clamping groove, and the two side walls of the groove arranged along the third direction are respectively provided with a first sliding groove. The first sliding groove includes a first extension extending along the first direction, wherein the third direction is perpendicular to the first direction and the second direction.

[0012] The elastic component further includes: a guide rod corresponding to each of the side plates, wherein the guide rod is slidably connected to the first groove on the corresponding side plate;

[0013] The flexible plate is connected between the two guide rods;

[0014] There are two first elastic elements, each corresponding to one of the guide rods. One end of the first elastic element is connected to the corresponding guide rod, and the other end is connected to the side wall of the corresponding groove away from the bottom plate.

[0015] Optionally, the first groove further includes a second extension extending along the second direction to the sidewall edge of the groove, the second extension communicating with the first extension.

[0016] Optionally, the first clamping block and the second clamping block are positioned by a first convex-concave mating structure;

[0017] The first clamping block has at least one positioning structure on the side away from the second clamping block. The second clamping block has a first through hole corresponding to the at least one positioning structure. The first through hole extends along a third direction, which is parallel to the axial direction of the hole formed by the first clamping groove and the second clamping groove.

[0018] The fixing structure also includes elastic straps that correspond one-to-one with the at least one positioning structure. The elastic straps pass through the corresponding first through holes and cooperate with the corresponding positioning structures to bind the first clamping block and the second clamping block tightly.

[0019] Optionally, the second clamping groove is a V-groove.

[0020] Optionally, the fixing structure further includes at least one adapter base for connecting to an external base;

[0021] The side of the second clamping block away from the first clamping block is slidably connected to the adapter base along the second direction, and when the second clamping block slides to the target position, it is locked by a locking structure, wherein the second direction is perpendicular to the first direction and perpendicular to the axial direction of the hole formed by the first clamping groove and the second clamping groove.

[0022] Optionally, the adapter base includes two first surfaces arranged along the first direction and two second surfaces arranged along a third direction, wherein the third direction is perpendicular to the first direction and the second direction;

[0023] One of the first surfaces is provided with a slide rail extending along the second direction;

[0024] At least one of the second surfaces is provided with at least one locking groove arranged along the second direction;

[0025] The second clamping block has a second sliding groove on the side away from the first clamping block that mates with the slide rail, and the second sliding groove also mates with the second surface;

[0026] The locking structure includes a locking rod and the locking groove;

[0027] The second clamping block includes two third surfaces arranged along the third direction, and at least one of the third surfaces is provided with a second through hole;

[0028] The locking rod corresponds one-to-one with the second through hole. The locking rod extends along the second direction, and one end is connected to the third surface by a compression spring. The other end is provided with a bent portion extending towards the third surface. The middle part of the locking rod is hinged to the third surface. When the compression spring is in a free state, the bent portion passes through the second through hole and is inserted into the locking groove. When the compression spring is compressed, the bent portion disengages from the locking groove.

[0029] Optionally, multiple adapter bases are provided;

[0030] The adapter base is provided with a second concave-convex fitting structure at both ends along the second direction, so that after the multiple adapter bases are connected end to end, all the first surfaces are flush and all the second surfaces are flush.

[0031] Optionally, one end of the adapter base is provided with a protrusion extending in the first direction, and the other end is provided with a positioning groove opening in the first direction. The mating surface between the protrusion and the positioning groove is an S-shaped curved surface extending in the second direction.

[0032] Secondly, embodiments of this application also provide a semiconductor process apparatus, including a process chamber and a gas pipeline connected to the process chamber, wherein the gas pipeline is fixed using the fixing structure described in the above embodiments.

[0033] As described above, the fixing structure of this application can clamp and fix the clamped part by means of the elastic component and the second clamping block connected to the inner side wall of the first clamping groove. Since the elastic component has a certain elasticity, the fixing method of the clamped part is elastic constraint, which can reduce the wear of the clamped part and thus improve the service life of the clamped part. When the outside of the clamped part is wrapped with a heating belt, the elastic component can also reduce the squeezing of the clamped part, thereby reducing the failure rate of the heating belt. Attached Figure Description

[0034] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a semiconductor process equipment related to this technology;

[0036] Figure 2 This is an enlarged structural diagram of the area where the fixed structure of the related technology is located;

[0037] Figure 3 This is a schematic diagram of a fixed structure provided in an embodiment of this application;

[0038] Figure 4 This is a schematic diagram of the usage state of a fixed structure provided in an embodiment of this application;

[0039] Figure 5 This is a schematic diagram of the connection structure between a first clamping block and an elastic component provided in an embodiment of this application;

[0040] Figure 6 This is a schematic diagram of an elastic component in different states according to an embodiment of this application;

[0041] Figure 7 This is a schematic diagram of a first clamping block and a second clamping block provided in an embodiment of this application, wherein (a) is a schematic diagram of the first clamping block and (b) is a schematic diagram of the second clamping block;

[0042] Figure 8 This is a schematic diagram of the structure of an adapter base provided in an embodiment of this application, wherein (a) and (b) are schematic diagrams from different perspectives;

[0043] Figure 9This is a side view of a fixing structure provided in an embodiment of this application, wherein (a) is an assembly diagram of the second clamping block and the adapter base, (b) is a diagram of the adapter base after disassembly, and (c) is a diagram along the second direction Y.

[0044] Figure 10 This is a schematic diagram of the structure of a semiconductor process equipment provided in an embodiment of this application.

[0045] The realization of the objectives, functional features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. The accompanying drawings have illustrated specific embodiments of this application, which will be described in more detail below. These drawings and textual descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concepts of this application to those skilled in the art through reference to specific embodiments. Detailed Implementation

[0046] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0047] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, components, features, and elements with the same names in different embodiments of this application may have the same meaning or different meanings, the specific meaning of which must be determined by its interpretation in that specific embodiment or further in conjunction with the context of that specific embodiment.

[0048] It should be further understood that the terms "comprising" or "including" indicate the presence of the stated features, steps, operations, elements, components, items, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, types, and / or groups. The terms "or," "and / or," and "comprising at least one of the following," as used in this application, can be interpreted as inclusive, or mean any one or any combination thereof. For example, "comprising at least one of the following: A, B, C" means "any one of the following: A; B; C; A and B; A and C; B and C; A and B and C," and similarly, "A, B, or C" or "A, B, and / or C" means "any one of the following: A; B; C; A and B; A and C; B and C; A and B and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0049] It should be understood that although the terms first, second, third, etc., may be used in this document to describe various types of information, this information should not be limited to these terms. These terms are only used to distinguish information of the same type from one another. For example, without departing from the scope of this document, first information may also be referred to as second information, and similarly, second information may also be referred to as first information. Depending on the context, the singular forms “a,” “an,” and “the” used in this document are intended to also include the plural forms, unless the context indicates otherwise.

[0050] It should be understood that the terms "top", "bottom", "upper", "lower", "vertical", "horizontal", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0051] For ease of description, the following embodiments are all illustrated using an orthogonal space defined by a horizontal plane and a vertical direction. This premise should not be construed as a limitation of this application.

[0052] Please see Figure 1 , Figure 1 This is a schematic diagram of a semiconductor process equipment based on related technologies. The semiconductor process equipment includes a first gas supply box 11a, a first gas pipeline 21a, a second gas supply box 12a, a second gas pipeline 22a, and a process chamber 30a connected in sequence. The first gas supply box 11a is used to receive and monitor plant gases, and the second gas supply box 12a is used to regulate the gas entering the process chamber 30a.

[0053] Please see Figure 2 , Figure 2This is an enlarged structural diagram of the area where the fixed structure of the related technology is located. The first gas pipeline 21a and the second gas pipeline 22a are fixed to the fixed frame 50a by the fixed structure 40a. The fixed frame 50a includes a fixed base plate 51a and a fixed support plate 52a. The fixed structure 40a can limit the vibration of the gas pipeline caused by pressure fluctuations, improve the stability of the gas pipeline, and extend its service life.

[0054] The structure has the following problems: (1) The fixed structure 40a is made of metal, which is prone to wear on the gas pipeline during use, reducing the service life of the gas pipeline; (2) For gas pipelines wrapped with heating bands, the fixed structure 40a will also squeeze the heating bands, thereby affecting the heating effect and causing abnormal process results. Based on this, this application provides a fixed structure and semiconductor process equipment.

[0055] Please see Figure 3 and Figure 4 , Figure 3 This is a schematic diagram of a fixed structure provided in an embodiment of this application. Figure 4 This is a schematic diagram illustrating the usage state of a fixing structure provided in an embodiment of this application. The fixing structure includes a first clamping block 10 and a second clamping block 20. The first clamping block 10 and the second clamping block 20 are used to clamp the clamped member 100 from opposite sides in a first direction X. The clamped member 100 includes, but is not limited to, a pipe, and may also be a component with an irregular clamping surface. In some semiconductor devices, the clamped member 100 may be a metal pipe.

[0056] The first clamping block 10 has a first clamping groove 101 on the side facing the second clamping block 20, and the second clamping block 20 has a second clamping groove 201 on the side facing the first clamping block 10. An elastic component 30 is connected to the inner side wall of the first clamping groove 101 so that the elastic component 30 is suspended in the first clamping groove 101. The elastic component 30 is used to clamp the clamped member 100 with the second clamping groove 201 when the first clamping groove 101 and the second clamping groove 201 are closed.

[0057] The fixing structure of this embodiment can clamp and fix the clamped part 100 by means of the elastic component 30 and the second clamping block 20 connected to the inner side wall of the first clamping groove 101. Since the elastic component 30 has a certain elasticity, the fixing method of the clamped part 100 is elastic constraint, which can reduce the wear of the clamped part 100 and thus improve the service life of the clamped part 100. When the outside of the clamped part 100 is wrapped with a heating band, the elastic component 30 can also reduce the compression of the clamped part 100, thereby reducing the failure rate of the heating band. It should be noted that the fixing method after the first clamping block 10 and the second clamping block 20 are closed is not particularly limited in this embodiment. For example, screws can be used to lock and fix them together. The second clamping groove 201 is preferably a V-shaped groove, which can form a better clamping and fixing effect on the clamped part 100.

[0058] The elastic component 30 includes, but is not limited to, an elastic band. In one embodiment, please refer to... Figure 5 , Figure 5 This is a schematic diagram of the connection structure between a first clamping block and an elastic component according to an embodiment of this application. The elastic component 30 may include a flexible plate 31 and at least two first elastic elements 32. The flexible plate 31 may be a flexible fabric, such as PTFE fiber fabric, and the first elastic elements 32 may be springs. The flexible plate 31 is connected to the inner side wall of the first clamping groove 101 through the first elastic elements 32. For example, if only two first elastic elements 32 are provided, the opposite ends of the flexible plate 31 can be directly connected to the inner side wall of the first clamping groove 101 to fix the flexible plate 31.

[0059] Preferably, this application provides a solution for a position-adjustable flexible plate 31. Please refer to [link / reference]. Figure 3 , Figure 5 and Figure 6 , Figure 6 This is a schematic diagram of an elastic component in different states according to an embodiment of this application, where (a) is an incompletely assembled state, (b) is an assembled but non-working state, and (c) is a working state. In this embodiment, the first clamping block 10 includes a base plate 11 and two side plates 12 respectively connected to both ends of the base plate 11. The two side plates 12 are arranged along a second direction Y, wherein the second direction Y is perpendicular to the first direction X and perpendicular to the axial direction of the hole formed by the first clamping groove 101 and the second clamping groove 201. Figure 4 The extending direction of the clamped member 100.

[0060] Each side plate 12 has a groove 102 on the side facing the first clamping groove 101 (see...) Figure 5The groove 102 has two sidewalls arranged along the third direction Z, each with a first sliding groove 103. Each first sliding groove 103 includes a first extension 1031 extending along the first direction X, wherein the third direction Z is perpendicular to the first direction X and the second direction Y. The elastic component 30 also includes guide rods 33 corresponding to the side plates 12, which are slidably connected to the first sliding grooves 103 on their respective side plates 12. A flexible plate 31 is connected between the two guide rods 33. Two first elastic elements 32 are provided, corresponding to the guide rods 33. One end of each first elastic element 32 is connected to the corresponding guide rod 33, and the other end is connected to the sidewall 13 of the corresponding groove 102 away from the bottom plate 11. Figure 5 It can be seen that the side wall 13 of the groove 102 is opposite to the bottom plate 11, and the bottom plate 11 constitutes another side wall of the groove 102.

[0061] The structural principle of the elastic component 30 in this embodiment can be found in [reference needed]. Figure 6 In the diagram, (a) shows the incompletely assembled state, with both ends of the flexible plate 31 connected to two guide rods 33, one of which is assembled into the first extension 1031 of the first slide groove 103, while the other is not assembled. (b) shows the fully assembled state, with the flexible plate 31 in a free, non-working state. (c) shows the working state. Since the flexible plate 31 can slide along the first extension 1031 of the first slide groove 103 via the guide rods 33, the distance between the flexible plate 31 and the second clamping block 20 can be adjusted to accommodate clamped parts 100 of different diameters. The clamped part 100 is then fixed by the pulling force exerted on the guide rods 33 by the first elastic member 32. The fixing component in this embodiment has good versatility.

[0062] In one embodiment, please continue reading Figure 5 and Figure 6 The first groove 103 may further include a second extension 1032 extending along the second direction Y to the sidewall edge of the groove 102, and the second extension 1032 communicates with the first extension 1031. By providing the second extension 1032, the ease of assembly and disassembly of components such as the guide rod 33, the first elastic element 32, and the flexible plate 31 can be improved.

[0063] In one embodiment, see Figures 5-7 , Figure 7This is a schematic diagram of a first clamping block and a second clamping block provided in an embodiment of this application. (a) is a schematic diagram of the first clamping block, and (b) is a schematic diagram of the second clamping block. The first clamping block 10 and the second clamping block 20 are positioned by a first convex-concave fitting structure. For example, a positioning post 14 can be provided on the side of the first clamping block 10 facing the second clamping block 20, and a positioning hole 205 can be provided on the side of the second clamping block 20 facing the first clamping block 10. When the first clamping block 10 and the second clamping block 20 are closed, the positioning post 14 and the positioning hole 205 are engaged and connected. Alternatively, the positioning post 14 can be provided on the second clamping block 20, and the positioning hole 205 can be provided on the first clamping block 10.

[0064] The first clamping block 10 has at least one positioning structure 111 on its side away from the second clamping block 20. The second clamping block 20 has a first through hole 202 corresponding to the positioning structure 111. The first through hole 202 extends along a third direction Z, which is parallel to the axial direction of the hole formed by the first clamping groove 101 and the second clamping groove 201. The fixing structure also includes an elastic strap 40 corresponding to the positioning structure 111 (see [link]). Figure 4 The elastic strap 40 passes through the corresponding first through hole 202 and cooperates with the corresponding positioning structure 111 to bind the first clamping block 10 and the second clamping block 20 tightly. As some examples, the positioning structure 111 can be a groove provided on the base plate 11 and extending in the third direction Z, or it can be a protrusion structure, which can limit the position of the elastic strap 40.

[0065] In one embodiment, please continue reading Figure 4 The fixing structure may also include at least one adapter base 50 for connecting to the external base 200. The side of the second clamping block 20 away from the first clamping block 10 is slidably connected to the adapter base 50 along the second direction Y, and is locked by a locking structure when the second clamping block 20 slides to the target position. In application, the adapter base 50 can be fixed to the external base 200 first, then the second clamping block 20 can be slid along the adapter base 50 to adjust to a position where the clamped part 100 can be clamped and fixed, i.e., the target position, and then the adapter base 50 can be locked by the locking structure. The locking structure can be a screw-screw hole structure, for example, multiple screw holes arranged along the second direction Y are provided on the adapter base 50, and the second clamping block 20 is fixed at different screw holes by screws after sliding to those screw holes. The locking structure can also be a pin-pin hole structure, etc. However, the operation of the above locking structures is relatively cumbersome.

[0066] In one embodiment, this application provides a preferred structural scheme for the locking structure. Please refer to... Figures 7-9 , Figure 8 This is a schematic diagram of the structure of an adapter base provided in an embodiment of this application, wherein (a) and (b) are schematic diagrams from different perspectives. Figure 9This is a side view of a fixing structure provided in an embodiment of this application, wherein (a) is an assembly diagram of the second clamping block and the adapter base, (b) is a diagram of the adapter base after disassembly, and (c) is a diagram along the second direction Y. The adapter base 50 may include two first surfaces 51 arranged along the first direction X, and two second surfaces 52 arranged along the third direction Z, wherein the third direction Z is perpendicular to the first direction X and the second direction Y. One of the first surfaces 51 is provided with a slide rail 511, which extends along the second direction Y, and at least one second surface 52 is provided with at least one locking groove 521 arranged along the second direction Y.

[0067] The side of the second clamping block 20 away from the first clamping block 10 is provided with a second sliding groove 203 that mates with the slide rail 511 (see [link]). Figure 7 The second groove 203 also mates with the second surface 52. The locking structure includes a locking rod 61 and a locking groove 521 (see [link]). Figure 9 The second clamping block 20 includes two third surfaces 21 arranged along the third direction Z, at least one of the third surfaces 21 having a second through hole 204 (see [reference]). Figure 7 The locking rod 61 corresponds one-to-one with the second through hole 204; the locking rod 61 extends along the second direction Y, and one end is connected to the third surface 21 by a compression spring 62 (see [reference]). Figure 9 The other end is provided with a bent portion 611 extending toward the third surface 21. The middle part of the locking rod 61 is hinged to the third surface 21. When the compression spring 62 is in a free state, the bent portion 611 passes through the second through hole 204 and is inserted into the locking groove 521. When the compression spring 62 is compressed, the bent portion 611 is dislodged from the locking groove 521.

[0068] In this embodiment, when the position of the second clamping block 20 needs to be adjusted, simply press the end of the locking rod 61 connected to the compression spring 62 to disengage the bent part 611 from the locking groove 521. Then, slide the second clamping block 20 to the target position and release the pressure spring 62. The compression spring 62 will then lift the locking rod 61, and the bent part 611 of the locking rod 61 will pass through the second through hole 204 and be inserted into the locking groove 521 to lock the second clamping block 20. This operation is convenient.

[0069] In one embodiment, see Figure 4 and Figure 8 Multiple adapter bases 50 can be provided. Each adapter base 50 has a second concave-convex mating structure at both ends along the second direction Y, so that after multiple adapter bases 50 are connected end-to-end, all first surfaces 51 and all second surfaces 52 are flush. It is understood that one, two, or more adapter bases 50 can be provided, depending on the needs, thus adapting to scenarios with different requirements for the length of the slide rail 511 and improving the applicability of the fixing structure.

[0070] For an example of a second concave-convex mating structure, please refer to [link / reference]. Figure 8 One end of the adapter base 50 is provided with a protrusion 53 extending in the first direction X, and the other end is provided with a positioning groove 54 opening in the first direction X. The mating surface between the protrusion 53 and the positioning groove 54 is an S-shaped curved surface 55 extending in the second direction Y. When assembling the two adapter bases 50, the protrusion 53 of one adapter base 50 can be fitted into the positioning groove 54 of the other adapter base 50 along the first direction X. The S-shaped curved surface 55 can constrain the relative movement of the two adapter bases 50 in the second direction Y.

[0071] This application also provides a semiconductor process apparatus; please refer to [link / reference]. Figure 10 The semiconductor process equipment 300 may include a process chamber 310 and a gas pipeline connected to the process chamber 310. The gas pipeline may be fixed using the fixing structure described in the above embodiments.

[0072] As an example, the gas pipeline may include a first gas chamber 321, a first gas pipeline 322, a second gas chamber 323, and a second gas pipeline 324 connected in sequence. The first gas chamber 321 is used to receive and monitor plant gases, and the second gas chamber 323 is connected to the process chamber 310 via the second gas pipeline 324 to regulate the gas entering the process chamber 310. The first gas pipeline 322 includes multiple pipes, each pipe being fixed to an external base 200 by a fixing structure.

[0073] For other working principles and processes of the semiconductor process equipment in this embodiment, please refer to the description of the fixed structure in the foregoing embodiments of the present invention, which will not be repeated here.

[0074] The foregoing has provided a detailed description of a fixed structure and semiconductor process equipment provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. It should be noted that the descriptions of each embodiment in this application have different emphases; parts not described in detail in a particular embodiment can be referred to in the relevant descriptions of other embodiments.

[0075] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. The technical features of the technical solution of this application can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are also included within the patent protection scope of this application, as long as the combination of these technical features does not contradict each other.

Claims

1. A fixing structure characterized by comprising: It includes a first clamping block and a second clamping block for clamping the clamped member from opposite sides in a first direction; The first clamping block has a first clamping groove on the side facing the second clamping block; The second clamping block has a second clamping groove on the side facing the first clamping block; An elastic component is connected to the inner side wall of the first clamping groove so that the elastic component is suspended in the first clamping groove. The elastic component is used to clamp the clamped part with the second clamping groove when the first clamping groove and the second clamping groove are closed.

2. The fixing structure according to claim 1, characterized in that, The elastic component includes a flexible plate and at least two first elastic elements, wherein the flexible plate is connected to the inner side wall of the first clamping groove through the first elastic elements.

3. The fixing structure according to claim 2, characterized in that The first clamping block includes a base plate and two side plates respectively connected to both ends of the base plate. The two side plates are arranged along a second direction, wherein the second direction is perpendicular to the first direction and perpendicular to the axial direction of the hole formed by the first clamping groove and the second clamping groove. Each of the side plates has a groove on the side facing the first clamping groove, and the two side walls of the groove arranged along the third direction are respectively provided with a first sliding groove. The first sliding groove includes a first extension extending along the first direction, wherein the third direction is perpendicular to the first direction and the second direction. The elastic component further includes: a guide rod corresponding to each of the side plates, wherein the guide rod is slidably connected to the first groove on the corresponding side plate; The flexible plate is connected between the two guide rods; There are two first elastic elements, each corresponding to one of the guide rods. One end of the first elastic element is connected to the corresponding guide rod, and the other end is connected to the side wall of the corresponding groove away from the bottom plate.

4. The fixing structure according to claim 3, characterized in that The first groove further includes a second extension extending along the second direction to the sidewall edge of the groove, the second extension communicating with the first extension.

5. The fixture of claim 1, wherein The first clamping block and the second clamping block are positioned by a first concave-convex fitting structure; The first clamping block has at least one positioning structure on the side away from the second clamping block. The second clamping block has a first through hole corresponding to the at least one positioning structure. The first through hole extends along a third direction, which is parallel to the axial direction of the hole formed by the first clamping groove and the second clamping groove. The fixing structure also includes elastic straps that correspond one-to-one with the at least one positioning structure. The elastic straps pass through the corresponding first through holes and cooperate with the corresponding positioning structures to bind the first clamping block and the second clamping block tightly.

6. The fixing structure according to claim 1, characterized in that, The second clamping groove is a V-shaped groove.

7. The fixation structure according to any one of claims 1 to 6, wherein It also includes at least one adapter base for connecting to an external base; The side of the second clamping block away from the first clamping block is slidably connected to the adapter base along the second direction, and when the second clamping block slides to the target position, it is locked by a locking structure, wherein the second direction is perpendicular to the first direction and perpendicular to the axial direction of the hole formed by the first clamping groove and the second clamping groove.

8. The fixture of claim 7, wherein The adapter base includes two first surfaces arranged along the first direction and two second surfaces arranged along a third direction, wherein the third direction is perpendicular to the first direction and the second direction; One of the first surfaces is provided with a slide rail extending along the second direction; At least one of the second surfaces is provided with at least one locking groove arranged along the second direction; The second clamping block has a second sliding groove on the side away from the first clamping block that mates with the slide rail, and the second sliding groove also mates with the second surface; The locking structure includes a locking rod and the locking groove; The second clamping block includes two third surfaces arranged along the third direction, and at least one of the third surfaces is provided with a second through hole; The locking rod corresponds one-to-one with the second through hole. The locking rod extends along the second direction, and one end is connected to the third surface by a compression spring. The other end is provided with a bent portion extending towards the third surface. The middle part of the locking rod is hinged to the third surface. When the compression spring is in a free state, the bent portion passes through the second through hole and is inserted into the locking groove. When the compression spring is compressed, the bent portion disengages from the locking groove.

9. The fixture of claim 8, wherein Multiple adapter bases are provided; The adapter base is provided with a second concave-convex fitting structure at both ends along the second direction, so that after the multiple adapter bases are connected end to end, all the first surfaces are flush and all the second surfaces are flush.

10. The fixture of claim 9, wherein One end of the adapter base is provided with a protrusion extending in the first direction, and the other end is provided with a positioning groove opening in the first direction. The mating surface between the protrusion and the positioning groove is an S-shaped curved surface extending in the second direction.

11. A semiconductor process apparatus comprising a process chamber, and a gas line connected to the process chamber, characterized in that, The gas pipeline is fixed using the fixing structure described in any one of claims 1-10.

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