Equipment, calibration method and processing method

Abstract

The invention provides equipment, a calibration method and a processing method, and the equipment comprises a bearing assembly which is used for bearing a sample and comprises a first reference point, and the first reference point is provided with a preset position; the transmission assembly is used for moving at least in the transmission surface to transmit the sample, and the transmission assembly is provided with a second reference point; and the measuring assembly is used for measuring the transmission assembly to obtain the detection position of the second reference point, and calibrating the target transmission position of the transmission assembly according to the detection position of the second reference point and the preset position. The calibration precision and efficiency of the transmission assembly in the equipment on the target transmission position for taking and placing the sample are improved.

Description

Technical Field

[0001] This invention relates to the field of equipment technology, and specifically to an equipment, a calibration method, and a processing method. Background Technology

[0002] In wafer inspection, to determine the location of defects on the wafer, an alignment device is needed to align the wafer with the center of the wafer chuck in the inspection system. In related technologies, a robotic arm is used to remove the wafer from the wafer cassette and place it on the alignment module for alignment and position adjustment. Then, the robotic arm removes the wafer from the alignment module and places it onto the wafer chuck in the inspection system for inspection. This necessitates calibrating the robotic arm's wafer placement position before inspection. Often, this is done visually, which results in poor accuracy and low efficiency. Summary of the Invention

[0003] The technical solution of this application is to provide an equipment, calibration method, and processing method that improve the accuracy and efficiency of calibrating the position of sample taking and placing.

[0004] The present invention provides an apparatus comprising: a carrier component for carrying a sample, the carrier component including a first reference point having a preset position; a transmission component for moving at least within a transmission surface to transmit the sample, the transmission component having a second reference point; and a measurement component for measuring the transmission component to obtain a detection position of the second reference point, and calibrating a target transmission position of the transmission component based on the detection position of the second reference point and the preset position.

[0005] Optionally, the transmission assembly includes a bump fixture and a transmission arm, the bump fixture being disposed on the pick-and-place end surface of the transmission arm; the second reference point is located at the pick-and-place end; wherein, the measuring assembly obtains the position of the second reference point at the pick-and-place end by detecting the position of the bump fixture.

[0006] Optionally, the pick-and-place end has a mounting area for setting the protrusion fixture, and the surface of the protrusion fixture that contacts the mounting area is the mounting surface; one of the mounting area and the mounting surface is provided with a groove, and the other is provided with a locking part; the locking part is embedded in the groove, and the center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove, and the center of the mounting area serves as the second reference point; the mounting area is the surface of the pick-and-place end opposite to the sample-bearing side; or, the mounting area is the sample-bearing side of the pick-and-place end.

[0007] Optionally, the mounting area is the side of the sample-bearing end; the protrusion fixture is detachably connected to the transfer arm; the mounting area is provided with the groove, and the mounting surface is provided with the locking part.

[0008] Optionally, the cross-sectional shape of the bump fixture is circular or regular polygonal; the measuring component obtains the position of the center of the mounting surface of the bump fixture by detecting the position of the sidewall of the bump fixture; the sidewall of the bump fixture is perpendicular to the transmission surface.

[0009] Optionally, the number of the measuring components is one; the measuring component detects multiple points on the sidewall of the bump fixture by rotating around a preset axis, thereby obtaining the center position of the bump fixture; or, the number of the measuring components is multiple, and the multiple measuring components are arranged in a circumferential direction around the rotation axis of the bearing component.

[0010] Optionally, if the number of measuring components is one, the measuring component is fixed to the bearing component; the bearing component is used to rotate around the rotation axis of the bearing component, and the preset axis is the rotation axis of the bearing component; the first reference point is located on the rotation axis.

[0011] Optionally, the pick-up and place end of the transmission component has a groove on the side surface opposite to the carrier component, and the center of the groove serves as the second reference point; the measurement component includes an imaging module, which takes a picture of the groove to obtain the detection position of the second reference point on the transmission surface.

[0012] Optionally, it also includes: a position calibration component, used to calibrate the target transmission position of the transmission component based on the offset between the first reference point and the second reference point.

[0013] This application also provides a calibration method, comprising: moving a transmission component to an initial transmission position, a carrier component for carrying a sample, the carrier component including a first reference point having a preset position, the transmission component for transmitting the sample at least within a transmission surface, the transmission component having a second reference point; measuring the transmission component using a measuring component to obtain the detection position of the second reference point; and calibrating a target transmission position of the transmission component based on the detection position of the second reference point and the preset position.

[0014] Optionally, the target transmission position of the transmission component is calibrated based on the detection position of the second reference point and the preset position, including: obtaining the deviation between the detection position and the preset position; and compensating the initial transmission position based on the deviation to obtain the target transmission position.

[0015] Optionally, the transmission component includes a bump fixture and a transmission arm; the second reference point is located at the pick-and-place end; the feature point of the bump fixture coincides with the second reference point; the transmission component is measured by the measuring component to obtain the detection position of the second reference point, including: measuring the position of the feature point of the bump fixture by the measuring component to obtain the detection position of the second reference point at the pick-and-place end.

[0016] Optionally, the feature point is the center of the mounting surface of the bump fixture, and the mounting surface is the surface of the bump fixture for contacting the mounting area of ​​the pick-and-place end; the sidewall of the fixture is perpendicular to the transmission surface; measuring the position of the feature point of the bump fixture using the measuring component to obtain the detection position of the second reference point of the pick-and-place end includes: detecting the position of the sidewall of the bump fixture using the measuring component to obtain the position of the center of the mounting surface of the bump fixture; and obtaining the detection position of the second reference point of the pick-and-place end based on the position of the center of the mounting surface of the bump fixture.

[0017] Optionally, the number of the measuring components is one; detecting the sidewall position of the bump fixture to obtain the center position of the mounting surface of the bump fixture by the measuring components includes: rotating the measuring components around a rotation axis to detect multiple points on the sidewall of the bump fixture to obtain multiple edge positions, wherein the rotation axis is perpendicular to the transmission surface; and obtaining the center position of the mounting surface of the bump fixture based on the multiple edge positions.

[0018] Optionally, detecting the sidewall position of the bump fixture using the measuring component includes: detecting the position information of multiple points on the sidewall using a ranging module; or, acquiring a first projection image of the bump fixture in the transmission surface using an imaging component, and obtaining the position information of the sidewall in the transmission surface based on the first projection image.

[0019] Optionally, the measuring component is an imaging module; a groove is provided on the side surface of the transmission component facing away from the carrier component, and the center of the groove serves as the second reference point; the measurement component measures the transmission component to obtain the detection position of the second reference point, including: taking a picture of the groove with the measuring component to obtain a second projection image of the groove in the transmission surface; obtaining the edge of the groove image based on the second projection image; obtaining the position of the center of the groove based on the edge of the groove image to obtain the detection position of the second reference point.

[0020] This application also provides a processing method, comprising: calibrating a target transmission position of a transmission component according to the calibration method of this application; after calibrating the target transmission position of the transmission component, causing the transmission component to acquire a sample and move to the target transmission position; the transmission component conveying the sample along a transmission surface to a carrier component at the target transmission position; and / or, after calibrating the target transmission position of the transmission component, causing the transmission component to move to the target transmission position; the transmission component removing the sample from the carrier component along a transmission surface at the target transmission position.

[0021] Optionally, it further includes: after the transmission component transmits the sample along the transmission surface to the carrier component at the target transmission position, the transmission component is processed by the processing module.

[0022] Optionally, the processing module and the measurement module are the same module; the processing module is an imaging component.

[0023] The technical solution of the present invention has the following beneficial effects.

[0024] The device provided by this invention includes a carrying component with a first reference point having a preset position, a transmission component for moving and transmitting samples at least within a transmission surface and having a second reference point, and a measuring component for measuring the transmission component to obtain the position of the second reference point, and calibrating the target transmission position of the transmission component based on the detected position of the second reference point and the preset position. By relying on the measuring component rather than manual calibration of the target transmission position for sample handling by the transmission component, the accuracy and efficiency of calibrating the target transmission position for sample handling by the transmission component in this device are improved. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a structural diagram of a transmission component and a bump fixture provided in an embodiment of the present invention;

[0027] Figure 2 Another structural diagram of the transmission component and bump fixture provided in one embodiment of the present invention;

[0028] Figure 3 A top view of a transmission component provided in an embodiment of the present invention;

[0029] Figure 4 For along Figure 3 Cross-sectional view of the central cutting line AA;

[0030] Figure 5 This is a schematic diagram of the equipment during the calibration of sample placement and removal positions.

[0031] Figure 6 This is a schematic diagram of the equipment during sample transfer.

[0032] Figure 7 This is a schematic diagram of a fastener and measuring assembly provided in an embodiment of the present invention;

[0033] Figure 8 A flowchart of a calibration method provided in an embodiment of the present invention. Detailed Implementation

[0034] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0035] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0038] One embodiment of the present invention provides a device, in conjunction with reference to the reference. Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The system includes: a carrier component 200 for carrying a sample 400, the carrier component 200 including a first reference point having a preset position; a transmission component C for moving at least within a transmission surface to transmit the sample 400, the transmission component C having a second reference point; and a measurement component 300 for measuring the transmission component C to obtain the detection position of the second reference point, and calibrating the target transmission position of the transmission component C based on the detection position of the second reference point and the preset position.

[0039] In this embodiment, the measuring component 300 is used to measure the transmission component C to obtain the position of the second reference point, and calibrate the target transmission position of the transmission component C based on the detection position and preset position of the second reference point. By relying on the measuring component 300 instead of manual calibration of the target transmission position of the transmission component C for picking up and placing samples 400, the accuracy and efficiency of calibrating the target transmission position of the transmission component C for picking up and placing samples are improved.

[0040] In this embodiment, the support component 200 can be a suction cup used to support the sample. In other embodiments, the support component 200 can be a clamping member used to clamp the sample.

[0041] In this embodiment, sample 400 is, for example, a wafer. In other embodiments, the sample can be a chip or glass.

[0042] In this embodiment, the transfer assembly C includes a bump fixture 103 and a transfer arm 100. The transfer arm 100 includes a pick-and-place end 102 and an extension 101. One end of the extension 101 along its length direction is connected to the pick-and-place end 102. The thickness of the extension 101 is less than the thickness of the pick-and-place end 102. The surface of the pick-and-place end 102 facing away from the support assembly 200 is higher than the surface of the extension 101 facing away from the support assembly 200. In other embodiments, the thickness of the extension 101 is equal to the thickness of the pick-and-place end 102.

[0043] In this embodiment, the pick-and-place end 102 has a mounting area for setting the protrusion fixture 103, and the surface of the protrusion fixture 103 that contacts the mounting area is the mounting surface. One of the mounting area and the mounting surface is provided with a groove, and the other with a retaining portion; the retaining portion is embedded in the groove, and the center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove, with the center of the mounting area serving as the second reference point. The mounting area is the surface of the pick-and-place end 102 opposite to the sample-bearing side; or, the mounting area is the sample-bearing side of the pick-and-place end 102. When the mounting area has a groove, the center of the groove serves as the second reference point.

[0044] The mounting area and the mounting surface are provided with a groove and a locking part, respectively. Specifically, the mounting area is provided with a groove and the mounting surface is provided with a locking part, or the mounting area is provided with a locking part and the mounting surface is provided with a groove.

[0045] refer to Figure 1 A bump fixture 103 is provided on the surface of the pick-and-place end 102 of the transfer arm 100. The second reference point is located at the pick-and-place end. The measuring component 300 obtains the position of the second reference point of the pick-and-place end 102 by detecting the position of the bump fixture 103.

[0046] In this embodiment, reference Figure 1 The mounting area is the side of the sample-bearing end 102, and the protrusion fixture 103 is detachably connected to the transfer arm 100. The mounting area has a groove 104, and the mounting surface has a locking part. The locking part is used to embed into the groove 104. The center of the mounting surface of the protrusion fixture 103 and the center of the mounting area coincide along the central axis of the groove 104, with the center of the mounting area being the center of the groove 104. The center of the mounting area serves as the second reference point.

[0047] Specifically, in other embodiments of this application, the mounting area is the side of the sample-bearing end. The protrusion fixture is detachably connected to the transfer arm. The mounting area is provided with a locking part, and the mounting surface is provided with a groove. The locking part is used to embed into the groove. The center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove. The center of the mounting area serves as a second reference point.

[0048] In other embodiments of this application, the mounting area is the surface of the pick-and-place end opposite to the sample-bearing side, and the protrusion fixture is disposed on the surface of the pick-and-place end opposite to the sample-bearing side. The mounting area has a groove, and the mounting surface has a locking portion for embedding into the groove. The center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove, with the center of the mounting area being the center of the groove. The center of the mounting area serves as a second reference point. The protrusion fixture is detachably or fixedly connected to the transfer arm.

[0049] In other embodiments of this application, the mounting area is the surface of the pick-and-place end opposite to the sample-bearing side, and a protrusion fixture is disposed on the surface of the pick-and-place end opposite to the sample-bearing side. The mounting area has a locking part, and the mounting surface has a groove, the locking part being used to embed into the groove. The center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove. The center of the mounting area serves as a second reference point. The protrusion fixture is detachably or fixedly connected to the transfer arm.

[0050] The protrusion fixture 103 has a circular or regular polygonal cross-sectional shape. The measuring component 300 obtains the center position of the mounting surface of the protrusion fixture 103 by detecting the position of the sidewall of the protrusion fixture 103, and the sidewall of the protrusion fixture 103 is perpendicular to the transmission surface. Specifically, in this embodiment, the protrusion fixture 103 has a circular cross-sectional shape.

[0051] In this embodiment, the mounting surface is parallel to the transmission surface, and the center of the transmission surface is the first reference point. In other embodiments, the mounting surface may not be parallel to the transmission surface. The center of the projection of the mounting surface onto the transmission surface is the first reference point.

[0052] In this embodiment, the number of the measuring components 300 is one. The measuring component 300 detects multiple points on the sidewall of the bump fixture 103 by rotating around a preset axis, thereby obtaining the center position of the bump fixture 103.

[0053] In this embodiment, if there is only one measuring component 300, the measuring component 300 is fixed to the supporting component 200; the supporting component 200 is used to rotate around the rotation axis of the supporting component 200, and the preset axis is the rotation axis of the supporting component 200; the first reference point is located at the rotation axis of the supporting component 200. The rotation of the supporting component 200 around the rotation axis drives the measuring component 300 to rotate around the rotation axis of the supporting component 200.

[0054] In this embodiment, the device further includes a first driving member, which drives the support assembly 200 to rotate around the rotation axis of the support assembly 200. The first driving member may be, for example, a motor.

[0055] In other embodiments of this application, the number of measuring components 300 is multiple, and the multiple measuring components 300 are arranged circumferentially around the rotation axis of the bearing component 200. The measuring components 300 may not rotate around a preset axis, and the multiple measuring components 300 together measure the positions of multiple points on the sidewall of the protrusion fixture 103, thereby obtaining the center position of the protrusion fixture 103.

[0056] In this embodiment, the measuring component 300 is a dial indicator, an imaging component, or a distance sensor. The distance sensor may be, for example, a triangulation module or a laser ranging module.

[0057] In this embodiment, the device further includes a fixing member 301, one end of which is connected to the supporting component 200, and the other end of which is connected to the measuring component 300. The first driving member is also used to drive the measuring component 300 to rotate around the rotation axis of the supporting component 200. The supporting device 200 and the measuring component 300 share the same first driving member. In other embodiments, the measuring component has a separate driving member to drive the measuring component to rotate, and a preset position is established between the preset axis of the measuring component and the rotation axis of the measuring component.

[0058] In other embodiments of this application, the measuring component 300 is an imaging module; a groove 104 is provided on the surface of the pick-up and put-down end 102 of the transmission component C facing away from the support component 200, and the center of the groove serves as the second reference point. The measuring component 300 obtains the detection position of the second reference point on the transmission surface by taking a picture of the groove 104.

[0059] In this embodiment, the groove 104 is an annular groove. In other embodiments, the groove 104 is a circular groove or a regular polygonal groove.

[0060] In this embodiment, the device further includes a position calibration component, which is used to calibrate the target transmission position of the transmission component C based on the offset between the first reference point and the second reference point. When the offset between the first reference point and the second reference point is less than or equal to the offset threshold, it is determined that the first reference point and the second reference point are aligned. When the offset between the first reference point and the second reference point is greater than the offset threshold, it is determined that the first reference point and the second reference point are not aligned. The position of the transmission component C corresponding to the offset between the first reference point and the second reference point being less than or equal to the offset threshold is taken as the target transmission position for picking up and placing the sample 400.

[0061] The offset threshold is greater than or equal to zero. Specifically, in this embodiment, the offset threshold is 0.

[0062] In this embodiment, the device further includes a chamber, in which the carrier component 200 and the measuring component 300 are located, and the transmission component C extends into the chamber when picking up or placing the sample 400 above the carrier component 200. The chamber can be a process chamber or a detection chamber.

[0063] In this embodiment, the device further includes a second driving component, which is used to drive the ejector pin 201 to reciprocate up and down.

[0064] In this embodiment, reference Figure 6 The device further includes a push pin 201, which penetrates the support assembly 200 and can move up and down reciprocally.

[0065] In this embodiment, reference Figure 7 The fixing member 301 includes: a base 3001; a first connecting rod 3002 fixed to the base; a clamping connector 3006, the first end of which is connected to the first connecting rod 3002 and is movable along the extension direction of the first connecting rod 3002, and the clamping connector 3006 has a second end opposite to the first end; a first fastener 3004 for fastening the first end of the clamping connector 3006 and the first connecting rod 3002; and a second fastener 3007.

[0066] In this embodiment, reference Figure 7 The measuring assembly 300 includes a test instrument 3005 and a test probe 3006. The measuring assembly 300 is connected to the second end of the clamping connector 3006; a second fastener 3004 is used to fasten the measuring assembly 300 and the second end of the clamping connector 3006.

[0067] Another embodiment of this application provides a calibration method, referencing... Figure 8 ,include:

[0068] Step S1: Move the transmission component to the initial transmission position. The carrier component is used to carry the sample. The carrier component includes a first reference point with a preset position. The transmission component is used to transmit the sample at least within the transmission surface. The transmission component has a second reference point.

[0069] Step S2: Measure the transmission component using the measurement component to obtain the detection position of the second reference point;

[0070] Step S3: Based on the detection position of the second reference point and the preset position, determine the target transmission position of the transmission component.

[0071] The calibration method in this embodiment is based on this application. Figure 1 value Figure 7 The device shown is used for this purpose.

[0072] In this embodiment, the target transmission position of the transmission component is determined based on the detection position of the second reference point and the preset position, including: obtaining the deviation between the detection position and the preset position; and compensating the initial transmission position according to the deviation to obtain the target transmission position.

[0073] In this embodiment, if the offset between the first reference point and the second reference point is greater than the offset threshold, the position of the transmission component is adjusted according to the offset between the first reference point and the second reference point until the offset between the first reference point and the second reference point is less than or equal to the offset threshold; the position of the transmission component corresponding to the offset between the first reference point and the second reference point being less than or equal to the offset threshold is taken as the target transmission position for picking up and placing samples.

[0074] Adjusting the position of the transmission component based on the offset between the first reference point and the second reference point includes: compensating the initial transmission position with the offset to obtain the target transmission position.

[0075] Specifically, the compensation includes summing the offset with the initial transmission position.

[0076] When the offset between the first reference point and the second reference point is less than or equal to the offset threshold, it is determined that the first reference point and the second reference point are aligned. When the offset between the first reference point and the second reference point is greater than the offset threshold, it is determined that the first reference point and the second reference point are not aligned. If the first reference point and the second reference point are aligned, the initial transmission position is the target transmission position and no correction is required. If the first reference point and the second reference point are not aligned, the initial transmission position needs to be compensated.

[0077] The offset threshold is greater than or equal to zero.

[0078] In this embodiment, the calibration method further includes: the transmission component includes a bump fixture and a transmission arm; the second reference point is located at the pick-and-place end; the feature point of the bump fixture coincides with the second reference point. Specifically, measuring the transmission component using the measuring component to obtain the detection position of the second reference point includes: measuring the position of the feature point of the bump fixture using the measuring component to obtain the detection position of the second reference point at the pick-and-place end.

[0079] In this embodiment, the feature point is the center of the mounting surface of the bump fixture, and the mounting surface is the surface of the bump fixture that contacts the mounting area of ​​the pick-and-place end. The sidewall of the fixture is perpendicular to the transmission surface. Measuring the position of the feature point of the bump fixture using the measuring component to obtain the detection position of the second reference point of the pick-and-place end includes: detecting the position of the sidewall of the bump fixture using the measuring component to obtain the position of the center of the mounting surface of the bump fixture; and obtaining the detection position of the second reference point of the pick-and-place end based on the position of the center of the mounting surface of the bump fixture.

[0080] In this embodiment, the number of measuring components is one; the measurement component detects the sidewall position of the bump fixture to obtain the center position of the mounting surface of the bump fixture, including: rotating the measuring component around a rotation axis to detect multiple points on the sidewall of the bump fixture to obtain multiple edge positions, wherein the rotation axis is perpendicular to the transmission surface; and obtaining the center position of the mounting surface of the bump fixture based on the multiple edge positions.

[0081] In this embodiment, detecting the sidewall position of the bump fixture using the measuring component includes: detecting the position information of multiple points on the sidewall using a ranging module; or, acquiring a first projection image of the bump fixture in the transmission surface using an imaging component, and obtaining the position information of the sidewall in the transmission surface based on the first projection image.

[0082] In this embodiment, the pick-and-place end 102 has a mounting area for setting the protrusion fixture 103, and the surface of the protrusion fixture 103 that contacts the mounting area is the mounting surface. One of the mounting area and the mounting surface has a groove, and the other has a locking part. The center of the mounting area serves as the second reference point. The mounting area is the surface of the pick-and-place end 102 opposite to the sample-bearing side; or, the mounting area is the sample-bearing side of the pick-and-place end 102. When the mounting area has a groove, the center of the groove serves as the second reference point, positioning the protrusion fixture on the side of the pick-and-place end away from the bearing assembly. Specifically, the locking part is embedded in the groove, and the center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove. This improves the stability of the protrusion fixture and the pick-and-place end.

[0083] In other embodiments of this application, the number of measuring components is multiple, and the multiple measuring components are arranged circumferentially around the rotation axis of the bearing component. The multiple measuring components jointly measure the positions of multiple points on the sidewall of the bump fixture, thereby obtaining the center position of the surface of the bump fixture facing the pick-and-place end.

[0084] In other embodiments of this application, the measuring component is an imaging module; a groove is provided on the side surface of the transmission component facing away from the carrier component, and the center of the groove serves as the second reference point; the measurement component measures the transmission component to obtain the detection position of the second reference point, including: taking a picture of the groove with the measuring component to obtain a second projection image of the groove in the transmission surface; obtaining the edge of the groove image based on the second projection image; obtaining the position of the center of the groove based on the edge of the groove image to obtain the detection position of the second reference point. The imaging module can be an image sensor.

[0085] Another embodiment of this application also provides a processing method, including:

[0086] The target transmission position of the transmission component is calibrated according to the calibration method described above;

[0087] After calibrating the target transmission position of the transmission component, the transmission component acquires the sample and moves to the target transmission position; the transmission component transfers the sample along the transmission surface to the carrier component at the target transmission position; and / or, after calibrating the target transmission position of the transmission component, the transmission component moves to the target transmission position; the transmission component removes the sample from the carrier component along the transmission surface at the target transmission position.

[0088] After calibrating the target transmission position of the transmission component, the transmission component acquires the sample and moves to the target transmission position. At the target transmission position, the transmission component transfers the sample along the transmission surface to the carrier component. Specifically, after calibrating the target transmission position of the transmission component, the protrusion fixture is removed from the pick-and-place end. The transmission component acquires the sample and moves along the transmission surface to the target transmission position, lifting and supporting the sample with the ejector pin. Then, the ejector pin is lowered to place the sample on the upper surface of the carrier component.

[0089] After calibrating the target transmission position of the transmission component, the transmission component is moved to the target transmission position; the transmission component then removes the sample from the support component. Specifically, after calibrating the target transmission position of the transmission component, the protrusion fixture is removed from the pick-and-place end, the ejector pin is lifted to support the sample, the transmission component is moved to the target transmission position, the ejector pin descends to place the sample on the transmission component, and the transmission component removes the sample from the support component and transmits it to another position.

[0090] In this embodiment, the calibration method further includes: after the transmission component transmits the sample to the carrier component at the target transmission position, the transmission component is processed by the processing module.

[0091] In this embodiment, the processing module and the measurement module are the same module; the processing module is an imaging component. In other embodiments, the processing module and the measurement module are different modules. Obviously, the above embodiments are merely examples for clear illustration and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementation methods here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A device, characterized in that, include: A support component for supporting a sample, and the support component includes a first reference point having a preset position; A transport component for moving at least within a transport plane to transport a sample, and the transport component having a second reference point; A measurement component is used to measure the transmission component to obtain the detection position of the second reference point, and to calibrate the target transmission position of the transmission component based on the detection position of the second reference point and the preset position.

2. The device according to claim 1, characterized in that, The transmission assembly includes a bump fixture and a transmission arm, the bump fixture being disposed on the pick-and-place end surface of the transmission arm; the second reference point is located at the pick-and-place end. The measuring component obtains the position of the second reference point of the pick-and-place end by detecting the position of the bump fixture.

3. The device according to claim 2, characterized in that, The pick-and-place end has a mounting area for setting the protrusion fixture, and the surface of the protrusion fixture that contacts the mounting area is the mounting surface; The mounting area and the mounting surface are provided with a groove on one side and a locking part on the other side; the locking part is embedded in the groove, the center of the mounting surface of the protrusion fixture and the center of the mounting area coincide along the central axis of the groove, and the center of the mounting area serves as the second reference point; The installation area is the surface of the pick-and-place end opposite to the side that carries the sample; or, the installation area is the side of the pick-and-place end that carries the sample.

4. The device according to claim 3, characterized in that, The installation area is the side of the sample-bearing end; the protrusion fixture is detachably connected to the transfer arm; The mounting area is provided with the groove, and the mounting surface is provided with the card portion.

5. The device according to claim 3, characterized in that, The cross-sectional shape of the bump fixture is circular or regular polygonal; the measuring component obtains the position of the center of the mounting surface of the bump fixture by detecting the position of the sidewall of the bump fixture; the sidewall of the bump fixture is perpendicular to the transmission surface.

6. The device according to claim 5, characterized in that, The number of the measuring components is one; the measuring components detect multiple points on the sidewall of the protrusion fixture by rotating around a preset axis, thereby obtaining the center position of the protrusion fixture; or, the number of the measuring components is multiple, and the multiple measuring components are arranged in a circumferential direction around the rotation axis of the bearing component.

7. The device according to claim 6, characterized in that, If the number of the measuring components is one, the measuring component is fixed to the bearing component; the bearing component is used to rotate around the rotation axis of the bearing component, and the preset axis is the rotation axis of the bearing component; The first reference point is located on the rotation axis.

8. The device according to claim 1 or 4, characterized in that, The pick-and-place end of the transmission component has a groove on the side surface opposite to the carrier component, and the center of the groove serves as the second reference point; the measurement component includes an imaging module, which takes a picture of the groove to obtain the detection position of the second reference point on the transmission surface.

9. The device according to claim 1, characterized in that, Also includes: A location calibration component is used to calibrate the target transmission position of the transmission component based on the offset between the first reference point and the second reference point.

10. A calibration method, characterized in that, include: The transmission component is moved to the initial transmission position, the carrying component is used to carry the sample, the carrying component includes a first reference point with a preset position, the transmission component is used to transmit the sample at least in the transmission surface, and the transmission component has a second reference point; The transmission component is measured by the measurement component to obtain the detection position of the second reference point; The target transmission position of the transmission component is determined based on the detection position of the second reference point and the preset position.

11. The calibration method according to claim 10, characterized in that, Based on the detection position of the second reference point and the preset position, the target transmission position of the transmission component is determined, including: Obtain the deviation between the detection position and the preset position; The initial transmission position is compensated based on the deviation to obtain the target transmission position.

12. The calibration method according to claim 10, characterized in that, The transmission assembly includes a bump fixture and a transmission arm; the second reference point is located at the pick-and-place end; the feature point of the bump fixture coincides with the second reference point; Measuring the transmission component using the measuring component to obtain the detection position of the second reference point includes: measuring the feature point position of the bump fixture using the measuring component to obtain the detection position of the second reference point at the pick-up and place-down end.

13. The calibration method according to claim 12, characterized in that, The feature point is the center of the mounting surface of the bump fixture, and the mounting surface is the surface of the bump fixture that contacts the mounting area of ​​the pick-and-place end; the sidewall of the fixture is perpendicular to the transmission surface; The measurement component measures the feature point position of the bump fixture to obtain the detection position of the second reference point of the pick-and-place end, including: detecting the side wall position of the bump fixture through the measurement component to obtain the position of the center of the mounting surface of the bump fixture; The detection position of the second reference point of the pick-and-place end is obtained based on the position of the center of the mounting surface of the bump fixture.

14. The calibration method according to claim 13, characterized in that, The number of the measuring components is one; The method of detecting the sidewall position of the bump fixture by means of the measuring component to obtain the center position of the mounting surface of the bump fixture includes: detecting multiple points on the sidewall of the bump fixture by rotating the measuring component around a rotation axis to obtain multiple edge positions, wherein the rotation axis is perpendicular to the transmission surface; and obtaining the center position of the mounting surface of the bump fixture based on the multiple edge positions.

15. The calibration method according to claim 13, characterized in that, Detecting the sidewall position of the bump fixture using the measuring component includes: detecting the position information of multiple points on the sidewall using a ranging module; or, acquiring a first projection image of the bump fixture in the transmission surface using an imaging component, and obtaining the position information of the sidewall in the transmission surface based on the first projection image.

16. The calibration method according to claim 10, characterized in that, The measuring component is an imaging module; the pick-and-place end of the transmission component has a groove on the side surface facing away from the carrier component, and the center of the groove serves as the second reference point; The measurement component measures the transmission component to obtain the detection position of the second reference point, including: taking a picture of the groove with the measurement component to obtain a second projection image of the groove in the transmission surface; obtaining the edge of the groove image based on the second projection image; obtaining the position of the center of the groove based on the edge of the groove image to obtain the detection position of the second reference point.

17. A processing method, characterized in that, include: The calibration method according to any one of claims 10 to 16 is used to calibrate the target transmission position of the transmission component; After calibrating the target transmission position of the transmission component, the transmission component acquires the sample and moves to the target transmission position. The transmission component conveys the sample along the transmission surface to the carrier component at the target transmission position; And / or, after calibrating the target transmission position of the transmission component, move the transmission component to the target transmission position; The transmission component removes the sample from the carrier component along the transmission surface at the target transmission position.

18. The processing method according to claim 17, characterized in that, Also includes: After the transmission component conveys the sample along the transmission surface to the carrier component at the target transmission position, the transmission component is processed by the processing module. The processing module and the measurement module are the same module; the processing module is an imaging component.

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