Semiconductor wastewater recovery device

Abstract

The invention discloses a semiconductor wastewater recovery device, and belongs to the technical field of wastewater treatment. The device comprises a membrane separation unit and an internal membrane assembly, wherein an electric field generation system and a rotational flow generation system are integrated in the membrane separation unit. Pollutants are induced by an electric field to generate in-situ micro-flocculation, charge modification is performed on the surface of the membrane, and meanwhile, micro-vortex is generated on the surface of the membrane by utilizing rotational flow, so that micro-floc forms a dynamic floc protection layer. The protective layer is used as a permeable secondary filtering medium and can effectively intercept fine pollutants and prevent membrane holes from being blocked. The electric field generation system comprises a nano charge compensation unit which is used for releasing charged nano bubbles into the wastewater, so that the electrically neutral pollutants are charged, and the migration and stability of the electrically neutral pollutants in the electric field are enhanced. According to the invention, pollutants are converted into a protective medium, so that the conversion from passive anti-fouling to active anti-fouling is realized, and the problems of pollution control and overhigh energy consumption in semiconductor wastewater membrane treatment are solved.

Description

Technical Field

[0001] This invention belongs to the field of wastewater treatment technology, and specifically relates to a semiconductor wastewater recovery device. Background Technology

[0002] Semiconductor manufacturing processes generate large quantities of highly polluting wastewater with complex compositions. The nanoparticles, colloids, and metal ions contained within pose a significant challenge to subsequent reuse and treatment. Membrane separation technology, as a core method for wastewater reuse, faces two major bottlenecks in practical applications: First, membrane fouling is a prominent issue; nanoparticles easily cause irreversible blockage of membrane pores, and traditional high-crossflow-velocity flushing methods are extremely energy-intensive and have huge operating costs. Second, while conventional chemical coagulation pretreatment can aggregate pollutants, the resulting dense flocs easily form a dense filter cake layer on the membrane surface, increasing filtration resistance, and the continuous addition of chemical agents can cause secondary pollution.

[0003] While existing technologies have introduced methods combining electrochemistry and membrane separation—for example, international patent WO2023129849A1 proposes a system that uses an electromagnetic field to pretreat fluids and then separates and degrades pollutants on a membrane using an oscillating electric field—this method applies an electromagnetic field upstream of the filter membrane to induce charged pollutants (such as PFAS and nutrients) to precipitate from the solution, and then applies an alternating electric field to the membrane surface to achieve pollutant separation and degradation. However, this technology primarily focuses on altering or destroying the pollutants themselves, rather than actively constructing a sustainably renewable physical protective layer at the membrane interface to prevent membrane fouling. Furthermore, using only a constant-intensity electric field makes it difficult to cope with fluctuations in water quality, and achieving a balance between energy consumption and treatment efficiency is challenging.

[0004] Therefore, there is an urgent need to develop a semiconductor wastewater recycling device that can effectively mitigate membrane fouling, adapt to water quality fluctuations, and operate with low energy consumption, so as to achieve efficient and sustainable wastewater reuse treatment. Summary of the Invention

[0005] The present invention aims to provide a semiconductor wastewater recycling device that utilizes the synergy of electric field and swirling current to construct a dynamic protective layer composed of micro-flocs in situ at the membrane interface. This protective layer can effectively intercept pollutants and prevent them from directly contacting the membrane surface, thereby alleviating membrane fouling, extending membrane life, and reducing system operating energy consumption.

[0006] This invention employs the following technical solution: a semiconductor wastewater recovery device, comprising a membrane separation unit and a membrane module installed within it. The membrane separation unit integrates an electric field generating system and a vortex generation system. The electric field generating system applies an electric field to the membrane interface region of the membrane module to induce micro-flocculation of pollutants, forming micro-flocculations. The vortex generation system generates micro-vortices on the membrane surface of the membrane module, causing the micro-flocculations to form a dynamic floc protective layer. The electric field generating system applies an electric field, which, through electrochemical action (e.g., the water electrolysis reaction occurring near the cathode: 2H₂O + 2e⁻),... ﹣ →H2+ 2OH ﹣ This can generate a localized high-pH environment in situ at the membrane interface. This high-pH environment can neutralize the surface charge of colloidal particles, reduce their stability, and promote the release of metal ions (such as Ca) in the water. 2+ Mg 2+ The process forms hydroxide microcrystals, inducing rapid and slight aggregation of pollutants, known as "in-situ microflocculation." This process does not produce large, dense flocs like traditional coagulation, but rather a large number of loosely structured, tiny "microflocculations." Driven by the swirling generation system, very small "microvortices" are generated on the membrane surface. These microvortices work synergistically in two ways: first, they exert a continuous shearing effect on the membrane surface, physically flushing away any adhering pollutants; second, and more importantly, the energy of the microvortices is sufficient to keep the in-situ generated microflocculations in a suspended, mobile state, preventing them from firmly depositing on the membrane surface. These suspended microflocculations form a dynamic, constantly renewing "flocculation protective layer" at the membrane interface. The mechanism of this "flocculation protective layer" is that these loose microflocculations themselves constitute a porous, permeable secondary filtration layer, effectively intercepting even smaller, more adhesive pollutants in the wastewater, preventing them from directly contacting and clogging the membrane pores. Meanwhile, since this layer is dynamically formed under the action of micro-vortex, its structure is unstable and will not continuously compact and thicken like the traditional filter cake layer, thus maintaining a high membrane flux.

[0007] Specifically, the electric field generating system includes at least one pair of electrodes, each comprising an anode and a cathode, wherein the cathode is disposed on the inlet side of the membrane module. The electrodes of the electric field generating system are arranged such that the electric field generated within the inlet-side flow channel of the membrane module during operation has a principal component perpendicular to or substantially perpendicular to the membrane surface. Preferably, the cathode is disposed adjacent to or integrated into the membrane surface, and the anode is disposed opposite to the cathode in the flow channel, thereby forming an electric field pointing towards the membrane surface in the membrane interface region. Upon energization, the electric field force directly drives charged particles (such as OH-). ﹣ Ions move toward the membrane surface, generating OH groups. ﹣It can immediately take effect at the membrane interface, forming a localized high pH environment. The combination of electric field force and swirling flow causes the micro-flocs to be suspended at the membrane interface, thereby forming a uniform dynamic protective layer.

[0008] Specifically, the vortex generation system includes a tangential inlet pipe and / or a vortex generator disposed inside the membrane separation unit. The vortex generator is a static flow-disrupting element, its shape being one or more combinations of a spiral guide vane, baffle, or protrusion. Through the tangential inlet pipe or the built-in vortex generator, a high-intensity micro-vortex field can be created on the membrane surface. This flow field provides suspension power for the in-situ generated micro-flocs, enabling them to form a uniform and stable dynamic "floc protective layer" at the membrane interface, effectively intercepting fine pollutants. Furthermore, the micro-vortices exert a continuous shearing effect on the membrane surface, physically flushing away adhering substances and significantly delaying membrane fouling.

[0009] Specifically, the electric field generating system includes a nano-charge compensation unit for releasing charged nanobubbles into the wastewater. This unit enhances antifouling efficiency through the following mechanisms: first, by applying a charge to the surface of electrically neutral pollutants through interfacial charge transfer effects or physical adsorption and encapsulation; second, by allowing the charged nanobubbles to migrate and adhere to the membrane surface under the drive of the electric field, promoting the formation of a dense and charge-controllable interfacial layer. Through regulation, the membrane surface and the already charged pollutants can be made to carry charges of the same polarity, thereby effectively inhibiting pollutant deposition on the membrane surface using the principle of like charges repelling each other. Preferably, the membrane module includes a base membrane, which is grafted or coated with a charge-inducing layer to generate or enhance electrostatic repulsion against charged pollutants under the action of an electric field. This invention, through the nano-charge compensation unit integrated into the electric field generating system, applies a charge to the surface of electrically neutral pollutants, thereby significantly enhancing their migration response and micro-flocculation efficiency in an electric field. Charge-modified pollutants are more likely to participate in the formation of a uniform and stable dynamic protective layer under the synergistic effect of electric field and swirling current. This effectively inhibits the adsorption and accumulation of pollutants such as electrically neutral organic matter and colloids, which are difficult to treat with traditional electric fields, on the membrane surface. Combined with the continuous shearing effect of micro-vortices, it ensures that pollutants are always in a suspended and renewed state, significantly slowing down the membrane fouling process. At the same time, this unit can be linked with the control unit to adjust the bubble charge density and electric field parameters in real time according to water quality fluctuations, improving the system's adaptability to different pollutants and operational stability.

[0010] Specifically, it also includes a control unit, which is communicatively connected to the electric field generating system and the vortex generation system. This control unit adjusts the electric field intensity and influent flow rate based on influent water quality or transmembrane pressure difference parameters. By receiving real-time signals of influent water quality and transmembrane pressure difference, and accordingly coordinating the adjustment of the electric field generating system and the vortex generation system, precise closed-loop control of the core process of "in-situ micro-flocculation-dynamic protective layer" is achieved, resolving the contradiction between energy consumption and effectiveness under constant intensity operation. Specifically, the system no longer operates continuously at a fixed maximum intensity, but can automatically switch to a low-intensity mode based on actual needs (such as good influent water quality and light pollution), significantly reducing energy consumption; once increased pollution is detected (increased transmembrane pressure difference), a high-intensity mode is activated. This feedback-based adaptive capability allows the device to maintain stable treatment effects and economical operation even in complex and variable actual wastewater environments.

[0011] The electric field generating system, driven by an electric field, enriches one or more of the following substances on the membrane surface, thereby forming a charge-covered layer: ① ions in the solution with the opposite initial charge to the membrane surface; ② charged nanobubbles released by the nano-charge compensation unit; ③ metal hydroxide microcrystals and microflocs generated in situ by the electric field. By adjusting the electric field parameters through the control unit, the adsorption density and composition of the above substances on the membrane surface can be changed, thereby achieving precise control of the effective charge properties (electricity and density) of the membrane surface and preventing pollutant deposition using the principle of like charges repulsion. Specifically, after a neutral pollutant collides and comes into contact with a negatively charged nanobubble, it acquires a negative charge through charge transfer or adsorption. The electric field generating system applies an electric field, utilizing some of the negatively charged nanobubbles to adhere to the membrane surface, thus controlling the effective charge of the membrane surface to be negative. At this point, both the membrane surface and the pollutant are negatively charged. According to the principle of like charges repulsion, a continuous electrostatic repulsion force is generated between them, effectively preventing the deposition of charged pollutants on the membrane surface. At the same time, the micro vortices generated by the swirling generation system physically flush and resuspend the charged pollutants that have been repelled near the membrane surface, thus maintaining the cleanliness of the membrane interface.

[0012] Preferably, the electric field generating system is a pulsed electric field generating system, whose operating mode can switch between a high-intensity pulse mode and a low-intensity maintenance mode. The control unit automatically triggers the switch from the low-intensity maintenance mode to the high-intensity pulse mode based on the rate of change of the transmembrane pressure difference of the membrane module or a set time period. In the high-intensity pulse mode, the strong electric field induces the generation of a large number of micro-flocs, and the strong swirling current washes over the membrane surface and fully suspends and mixes the micro-flocs on the membrane surface, forming an initial floc protective layer. After switching to the low-intensity maintenance mode, the weak electric field and the weak swirling current jointly maintain the suspension state of the micro-flocs.

[0013] More preferably, the swirl generation system includes a pulse generator connected to the membrane separation unit. This pulse generator can periodically generate instantaneous high-intensity currents according to instructions from the control unit to enhance the swirl intensity in high-intensity pulse mode.

[0014] Specifically, the inlet surface of the membrane module is provided with periodically arranged micro-protrusion structures. The micro-protrusion structures are hemispherical, cylindrical, or frustum-shaped, which can physically anchor the floc protective layer, preventing it from being completely washed away by low-speed water flow, thereby forming a stable, porous dynamic filtration interface.

[0015] Specifically, it also includes a pretreatment unit connected to the membrane separation unit, the pretreatment unit including a pH adjustment tank and / or a multi-media filter.

[0016] Specifically, the membrane module includes a first-stage silicon removal nanofiltration membrane and a second-stage silicon removal nanofiltration membrane. The filtration pore size of the first-stage silicon removal nanofiltration membrane is 10-20 nm, and the filtration pore size of the second-stage silicon removal nanofiltration membrane is 1-2 nm. This invention utilizes "micro-flocs" generated by an electric field, with sizes ranging from submicron to tens of micrometers. Because the diameter of the micro-flocs is much larger than the diameter of the membrane pores, the micro-flocs themselves cannot pass through the membrane pores; this is the fundamental physical prerequisite for achieving its protective function. Under the action of micro-vortices generated by the swirling generation system, these trapped micro-flocs do not densely block the membrane pores, but instead form a suspended, moving dynamic layer on the membrane surface. This protective layer itself constitutes a secondary filtration network, with pores much larger than the membrane pores but much smaller than the flocs themselves. This allows for more efficient interception of pre-existing, finer pollutants in the wastewater, preventing them from directly contacting and contaminating the membrane pores, thereby improving the service life of the membrane module and reducing maintenance frequency.

[0017] The core advantage of this invention lies in its intelligent antifouling mechanism of "in-situ micro-flocculation-dynamic protective layer" achieved through the synergistic effect of an electric field generation system and a swirling flow generation system at the membrane interface. Specifically, the electric field generation system applies an electric field to the membrane interface, generating a localized high-pH environment in situ through electrochemical action, inducing slight aggregation of pollutants and forming loosely structured micro-flocs. Simultaneously, the swirling flow generation system generates a micro-vortex flow field on the membrane surface, exerting continuous shearing action on the membrane surface to physically wash away adhering substances; and keeping the micro-flocs in suspension, forming a dynamic, continuously renewing floc protective layer at the membrane interface. This dynamic protective layer, as a permeable secondary filtration medium, effectively intercepts finer pollutants in wastewater, preventing them from directly contacting and clogging the membrane pores. Furthermore, because it is continuously renewed, it does not compact and thicken like a traditional filter cake layer, thus maintaining high membrane flux while achieving highly efficient antifouling. This invention significantly reduces system energy consumption through multiple synergistic mechanisms. First, the electric field-induced "in-situ micro-flocculation" process requires only low energy to transform pollutants into protective micro-flocs. Second, the use of a swirling flow field to maintain a dynamic protective layer significantly reduces dependence on high-velocity scouring and substantially reduces fluid transport energy consumption. More importantly, the control unit can intelligently adjust the electric field and swirling flow intensity based on real-time parameters such as influent water quality or transmembrane pressure difference, achieving automatic switching from a high-intensity pulse mode to a low-intensity maintenance mode, thus realizing a shift from continuous energy supply to on-demand energy supply. This design concept, which transforms pollutants from "treatment targets" into "protective media," enables this invention to significantly reduce energy consumption while ensuring treatment effectiveness. Attached Figure Description

[0018] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other embodiments based on the provided drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of a semiconductor wastewater recycling device.

[0020] Figure 2 This is a schematic diagram of the membrane separation unit in Example 1.

[0021] Figure 3 This is a schematic diagram of the swirl generation system in Example 1.

[0022] Figure 4 This is a schematic diagram of the working principle of a membrane separation unit.

[0023] Figure 5This is a schematic diagram of the electrode arrangement in an electric field generating system.

[0024] Figure 6 This is a schematic diagram of the electric field near the membrane interface.

[0025] Figure descriptions: 1-Membrane separation unit; 11-Membrane module; 2-Electric field generation system; 21-Anode; 22-Cathode; 3-Swirl generation system; 31-Tangential inlet pipe; 32-Edge generator; 4-Control unit; 5-Pretreatment unit; 6-Micro-floc recovery unit. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] The concepts involved in this application will first be described with reference to the accompanying drawings. It should be noted that the following descriptions of various concepts are only for the purpose of making the content of this application easier to understand and do not constitute a limitation on the scope of protection of this application; furthermore, the embodiments and features in the embodiments of this application can be combined with each other unless otherwise specified. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0028] Example 1 See Figures 1-3 A semiconductor wastewater recycling device includes a membrane separation unit 1 and a membrane module 11 installed inside it. The membrane separation unit 1 integrates an electric field generating system 2 and a vortex generating system 3. The electric field generating system 2 is used to apply an electric field to the membrane interface region of the membrane module 11 to induce pollutants to undergo micro-flocculation and form micro-flocs. The vortex generating system 3 is used to generate micro-vortices on the membrane surface of the membrane module 11, so that the micro-flocs form a dynamic floc protective layer.

[0029] Electric field generating system 2 applies an electric field, and through electrochemical action (e.g., the water electrolysis reaction occurring near the cathode: 2H2O + 2e), ﹣ →H2+ 2OH ﹣ This can generate a localized high-pH environment in situ at the membrane interface. This high-pH environment can neutralize the surface charge of colloidal particles, reduce their stability, and promote the release of metal ions (such as Ca) in the water. 2+ Mg 2+The formation of hydroxide microcrystals induces rapid, slight aggregation of pollutants, known as "in-situ microflocculation." This process does not produce large, dense flocs like in traditional coagulation, but rather a large number of loosely structured, tiny "microflocculations." Driven by the swirling generation system 3, very small "microvortices" are generated on the membrane surface. These microvortices work synergistically in two ways: first, they exert continuous shearing action on the membrane surface, physically washing away any adhering pollutants; second, and more importantly, the energy of the microvortices is sufficient to keep the in-situ generated microflocculations in a suspended, mobile state, preventing them from firmly depositing on the membrane surface. These suspended microflocculations form a dynamic, constantly renewing "flocculation protective layer" at the membrane interface, such as... Figure 4 The mechanism of this "floc protective layer" is as follows: these loose micro-flocs themselves constitute a porous, permeable secondary filtration layer, which can effectively intercept finer and more adhesive pollutants in wastewater, preventing them from directly contacting and clogging the membrane pores. At the same time, because this layer is dynamically formed under the action of micro-vortices, its structure is unstable and will not continuously compact and thicken like a traditional filter cake layer, thus maintaining a high membrane flux.

[0030] See Figure 5 and Figure 6 Specifically, the electric field generating system 2 includes at least one pair of electrodes, each comprising an anode 21 and a cathode 22, wherein the cathode 22 is disposed on the inlet side of the membrane module 11. The electrodes of the electric field generating system 2 are arranged such that the electric field generated within the inlet-side flow channel of the membrane module 11 during operation has a principal component perpendicular to or substantially perpendicular to the membrane surface. Preferably, the cathode 22 is disposed adjacent to or integrated into the membrane surface, and the anode 21 is disposed opposite to the cathode 22 in the flow channel, thereby forming an electric field pointing towards the membrane surface in the membrane interface region. After energization, the electric field force directly drives charged particles (such as OH-). ﹣ Ions move toward the membrane surface, generating OH groups. ﹣ It can immediately take effect at the membrane interface, forming a localized high pH environment. The combination of electric field force and swirling flow causes the micro-flocs to be suspended at the membrane interface, thereby forming a uniform dynamic protective layer.

[0031] See Figure 1 and Figure 3Specifically, the vortex generation system 3 includes a tangential inlet pipe 31 and / or a vortex generator 32 disposed inside the membrane separation unit 1. The vortex generator 32 is a static turbulence element, and its shape is one or more combinations of a spiral guide vane, a baffle, or a protrusion. Through the tangential inlet pipe 31 or the built-in vortex generator 32, a high-intensity micro-vortex field can be created on the membrane surface. This flow field provides suspension power for the in-situ generated micro-flocs, enabling them to form a uniform and stable dynamic "floc protective layer" at the membrane interface, effectively intercepting fine pollutants; on the other hand, the micro-vortex generates a continuous shearing effect on the membrane surface, which can physically wash away the attached substances and significantly delay membrane fouling.

[0032] Specifically, it also includes a control unit 4, which is communicatively connected to the electric field generating system 2 and the vortex generating system 3. This control unit adjusts the electric field strength and influent flow rate based on influent water quality or transmembrane pressure difference parameters. By receiving real-time signals of influent water quality and transmembrane pressure difference, and accordingly coordinating the adjustment of the electric field generating system 2 and the vortex generating system 3, precise closed-loop control of the core process of "in-situ micro-flocculation-dynamic protective layer" is achieved, resolving the contradiction between energy consumption and effectiveness under constant intensity operation. Specifically, the system no longer operates continuously at a fixed maximum intensity, but can automatically switch to a low-intensity mode according to actual needs (such as when the influent water quality is good and the pollution is relatively light), significantly reducing energy consumption; once increased pollution is detected (increased transmembrane pressure difference), a high-intensity mode is activated. This feedback-based adaptive capability allows the device to maintain stable treatment effects and economical operation even in complex and variable actual wastewater environments.

[0033] Preferably, the electric field generating system 2 is a pulsed electric field generating system, whose operating mode can switch between a high-intensity pulse mode and a low-intensity maintenance mode. The specific parameters of the high-intensity pulse mode are: electric field strength of 200~500V / m, pulse width of 10~100ms, and frequency of 1~5Hz; simultaneously, the influent flow rate or velocity of the vortex generating system 3 reaches its peak value; the specific parameters of the low-intensity maintenance mode are: electric field strength of 20~80V / m, and the influent flow rate or velocity of the vortex generating system 3 drops to 30%~60% of the peak flow rate. The control unit 4 automatically triggers the switch from the low-intensity maintenance mode to the high-intensity pulse mode according to the transmembrane pressure difference change rate of the membrane module 11 or the set time period; in the high-intensity pulse mode, the strong electric field induces the generation of a large number of micro-flocs, and the strong vortex washes the membrane surface and makes the micro-flocs fully suspended and mixed on the membrane surface, forming an initial floc protective layer; after switching to the low-intensity maintenance mode, the weak electric field and the weak vortex together maintain the suspension state of the micro-flocs. More preferably, the swirl generation system 3 includes a pulse generator connected to the membrane separation unit 1. This pulse generator can periodically generate instantaneous high-intensity currents according to instructions from the control unit 4 to enhance the swirl intensity in high-intensity pulse mode.

[0034] Specifically, the inlet surface of the membrane module 11 is provided with periodically arranged micro-protrusion structures. The micro-protrusion structures are hemispherical, cylindrical, or frustum-shaped, which can physically anchor the floc protective layer, preventing it from being completely washed away by low-speed water flow, thereby forming a stable, porous dynamic filtration interface.

[0035] Specifically, it also includes a pretreatment unit 5 connected to the membrane separation unit 1, the pretreatment unit 5 including a pH adjustment tank and / or a multi-media filter.

[0036] Preferably, the membrane module 11 is a staged nanofiltration membrane, wherein the first-stage silicon removal nanofiltration membrane has a filtration pore size of 10-20 nm and is made of one of sulfonated polysulfone, polysulfone, or polyethersulfone; the second-stage silicon removal nanofiltration membrane has a filtration pore size of 1-2 nm, thereby achieving efficient staged removal of dissolved silicon and suspended solids. The surfaces of the first-stage and / or second-stage silicon removal nanofiltration membranes are grafted or coated with a charge-inducing layer to generate or enhance electrostatic repulsion against charged pollutants under an electric field. More preferably, the membrane module 11 is an acid-resistant nanofiltration membrane, and the acid-resistant layer on its surface contains a hydrophilic modified resin to enhance stability and service life in acidic environments.

[0037] Example 2 To further optimize system operation, a micro-floc recovery unit 6 is provided below the membrane separation unit 1. The bottom of the membrane separation unit 1 is equipped with a drain outlet, a drain pipe connected to the drain outlet, and a drain valve installed on the drain pipe. Preferably, the drain valve is communicatively connected to the control unit 4. The control unit 4 is configured to automatically open the drain valve for a predetermined period of time after the electric field generating system 2 completes one or more "high-intensity pulse modes" to discharge aged micro-flocs and precipitates detached due to strong scouring from the system. This effectively prevents the accumulation of pollutants in the system, maintains the activity of the dynamic protective layer at the membrane interface, and thus further improves the stability and energy efficiency of the device operation.

[0038] As a further optimization of the present invention, the micro-floc recovery unit 6 includes a micro-floc adsorption module, which is filled with a positively charged porous adsorption medium for adsorbing and capturing excess micro-flocs drawn from the membrane separation unit 1 through electrostatic action. The liquid after adsorption and clarification can be returned to the system inlet or discharged in compliance with standards.

[0039] A process for treating semiconductor manufacturing wastewater includes the following steps: Step S1. The acidic silicon-containing wastewater is pumped into a semiconductor wastewater recovery device for treatment. The electric field generating system 2 applies an electric field to the interface region of the membrane module 11, inducing in-situ micro-flocculation of pollutants such as colloids and metal ions in the wastewater, forming loosely structured micro-flocs; simultaneously, the vortex generating system 12 generates micro-vortices on the membrane surface, suspending the micro-flocs and forming a dynamic floc protective layer. After this treatment, the wastewater is separated into acidic permeate and silicon-containing concentrate.

[0040] Step S2. The acidic permeate obtained in step S1 is transported to an ion exchange system for treatment to obtain high-quality reusable permeate.

[0041] Step S3. The silicon-containing concentrated water generated in step S1 is transported to the silicon removal integrated physicochemical system for treatment. By adding precipitants and flocculants and other physicochemical methods, silicon and other impurities in the water are precipitated and separated, and finally wastewater that meets the discharge standards is obtained.

[0042] The recycling device of the present invention can recycle specific wastewater, and the recycled water can be used as supplementary water for front-end cleaning, thereby improving the water recycling rate and reducing the system water cost.

[0043] Example 3 To further improve the treatment effect of electrically neutral pollutants (such as some organic molecules, neutral colloids, etc.) in semiconductor wastewater, this embodiment introduces nano-charge compensation technology in membrane separation unit 1.

[0044] The electric field generating system 2 includes a nano-charge compensation unit for releasing charged nanobubbles into the wastewater, thereby charging electrically neutral pollutants. The nano-charge compensation unit includes a nanobubble generator, a charge loading module, and a bubble distributor.

[0045] Specifically, the charge loading module imparts a negative charge to the surface of the nanobubbles through corona discharge or electrode polarization. The bubble distributor is arranged in the inlet-side flow channel of the membrane module 11 and is made of porous ceramic or microporous titanium plate.

[0046] Preferably, the nano-charge compensation unit is communicatively connected to the control unit 4 and is used to adjust the bubble charge density and electric field strength according to the influent water quality.

[0047] This embodiment integrates nano-charge compensation technology into the electric field generating system 2. Specifically, the electric field generating system 2 not only includes an electrode pair (anode 21 and cathode 22), but also integrates a nano-aeration system to generate and release nanoscale charged bubbles (bubble diameter less than 200 nm) at the membrane interface region. This achieves charge modification of electrically neutral pollutants, enhances their responsiveness and stability in the electric field, and effectively prevents their deposition on the membrane surface. Specifically, when these charged nanobubbles collide with electrically neutral pollutants, they can transfer or adsorb charges through the interface, thereby increasing the mobility and stability of the substances under the influence of the electric field and preventing their deposition on the membrane surface. This system, through the synergistic effect of the "charge compensation-electric field drive-swirling suspension" mechanism, significantly improves the controllability and removal efficiency of electrically neutral pollutants, while further reducing the risk of membrane fouling. It is particularly suitable for semiconductor wastewater containing complex components such as residual organic solvents and surfactants.

[0048] The embodiments and / or implementation methods described above are merely preferred embodiments and / or implementation methods for implementing the technology of the present invention, and are not intended to limit the implementation methods of the technology of the present invention in any way. Any person skilled in the art may make some modifications to other equivalent embodiments without departing from the scope of the technical means disclosed in the content of the present invention, but these should still be regarded as the technology or embodiments that are substantially the same as the present invention.

[0049] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the methods and core ideas of this application. The above descriptions are only preferred embodiments of this application. It should be noted that due to the limitations of written expression, while there are objectively infinite specific structures, those skilled in the art can make several improvements, modifications, or changes without departing from the principles of this application, and can also combine the above technical features in an appropriate manner. These improvements, modifications, changes, or combinations, or the direct application of the inventive concept and technical solution to other situations without modification, should all be considered within the scope of protection of this application.

Claims

1. A semiconductor wastewater recycling device, comprising a membrane separation unit (1) and a membrane module (11) installed therein, characterized in that, The membrane separation unit (1) integrates an electric field generating system (2) and a vortex generating system (3); the electric field generating system (2) is used to apply an electric field to the membrane interface region of the membrane module (11) to induce pollutants to undergo micro-flocculation and form micro-flocs; the electric field generating system (2) includes a nano-charge compensation unit for releasing charged nanobubbles to charge electrically neutral pollutants and promote the formation of a charge layer on the membrane surface; the vortex generating system (3) is used to generate micro-vortices on the feed water side of the membrane module (11) so that the micro-flocs form a dynamic floc protective layer.

2. The semiconductor wastewater recycling device according to claim 1, characterized in that, The electric field generating system (2) includes at least one pair of electrodes, the electrodes including an anode (21) and a cathode (22), wherein the cathode (22) is disposed on the water inlet side of the membrane module (11).

3. The semiconductor wastewater recovery device according to claim 1, characterized in that, The vortex generation system (3) includes a tangential water inlet pipe (31) and / or a vortex generator (32) disposed inside the membrane separation unit (1).

4. The semiconductor wastewater recovery device according to claim 3, characterized in that, The eddy current generator (32) is a static turbulence element, and its shape is one or more combinations of spiral guide vanes, baffles or protrusions.

5. The semiconductor wastewater recycling device according to claim 1, characterized in that, It also includes a control unit (4), which is communicatively connected to the electric field generating system (2) and the vortex generating system (3) for adjusting the electric field strength and the influent flow rate according to the influent water quality or transmembrane pressure difference parameters.

6. The semiconductor wastewater recycling device according to claim 1, characterized in that, The electric field generating system (2) is a pulsed electric field generating system, and its working mode can be switched between high-intensity pulse mode and low-intensity maintenance mode.

7. A semiconductor wastewater recovery device according to claim 6, characterized in that, The cyclone generation system (3) includes a pulse generator connected to the membrane separation unit (1).

8. A semiconductor wastewater recovery device according to claim 1 or 6, characterized in that, The inlet side surface of the membrane module (11) is provided with periodically arranged micro-protrusion structures.

9. A semiconductor wastewater recycling device according to claim 1, characterized in that, It also includes a pretreatment unit (5) connected to the membrane separation unit (1), the pretreatment unit (5) including a pH adjustment tank and / or a multi-media filter.

10. A semiconductor wastewater recycling device according to claim 1, characterized in that, The membrane module (11) includes a first-stage silicon removal nanofiltration membrane and a second-stage silicon removal nanofiltration membrane. The filtration pore size of the first-stage silicon removal nanofiltration membrane is 10~20nm, and the filtration pore size of the second-stage silicon removal nanofiltration membrane is 1~2nm. The surfaces of the first-stage silicon removal nanofiltration membrane and / or the second-stage silicon removal nanofiltration membrane are grafted or coated with a charge-inducing layer to generate or enhance electrostatic repulsion against charged pollutants under the action of an electric field.

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