Cooling system of diamond wire cutting machine and diamond wire cutting method

By adopting a dual independent pump cooling architecture and closed-loop control, the problem of temperature fluctuation in a single pump large circulation system has been solved, achieving precise and stable temperature control in the oil tank and bearing housing. This improves the cutting accuracy and stability of the diamond wire cutting machine, meeting the processing requirements of high-precision materials.

CN121912508APending Publication Date: 2026-04-24HAINA SEMICONDUCTOR (JINHUA) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
HAINA SEMICONDUCTOR (JINHUA) CO LTD
Filing Date
2026-02-04
Publication Date
2026-04-24

AI Technical Summary

Technical Problem

The cooling system of existing diamond wire cutting machines uses a single-pump large circulation architecture, which makes the coolant temperature susceptible to fluctuations in cutting conditions and ambient temperature. This makes it difficult to achieve precise and stable operation, affecting the bearing running accuracy and the stability of diamond wire cutting, and making it difficult to meet the processing requirements of high-precision materials.

Method used

The system adopts a dual independent pump cooling architecture, which independently controls the temperature of the oil tank and bearing housing. The temperature of the oil tank and bearing housing is accurately stabilized through cooling circuit one and cooling circuit two. A proportional valve and temperature sensor are used for closed-loop control to ensure that the temperature of each bearing housing is within the set range.

Benefits of technology

It achieves precise and stable temperature control in the oil tank and bearing housing, improves the operating accuracy of the bearing and the stability of diamond wire cutting, enhances the cutting accuracy of high-precision materials, and reduces the surface damage rate.

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Abstract

The invention discloses a cooling system of a diamond wire cutting machine and a diamond wire cutting method, and relates to the technical field of diamond wire cutting machines, the cooling system comprises a cooling loop I and a cooling loop II, the cooling loop I is used for cooling a cooling liquid in an oil tank, and a circulating pump I and a heat exchanger are arranged on the cooling loop I; the second cooling loop is used for cooling the bearing boxes, a pipeline of the second cooling loop extends out of the oil tank, flows through the bearing boxes and then flows back to the oil tank, and a second circulating pump is arranged on the second cooling loop. According to the cooling system of the diamond wire cutting machine, a double-independent-pump branch cooling structure is adopted, a first cooling loop is connected with a peripheral heat exchanger, and cooling liquid in an oil tank is stabilized through adjustment of a proportional valve; the second cooling loop is independently connected with the bearing boxes corresponding to the guide wheels, independent temperature control is achieved through a proportional valve, the temperature of the bearing boxes is accurate and stable, and the problem of single-pump large-cycle temperature control fluctuation is solved.
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Description

Technical Field

[0001] This invention relates to the field of diamond wire cutting machine technology, and in particular to a cooling system for a diamond wire cutting machine and a diamond wire cutting method. Background Technology

[0002] Current diamond wire cutting machines generally employ a single-pump driven large-circulation cooling system. This system uses a single power pump to deliver coolant, allowing the same coolant to flow simultaneously through all six bearings and the cutting area, achieving full-area cooling. However, this design has significant drawbacks: because each cooling branch within the large circulation system lacks an independent temperature control unit, the coolant temperature is easily affected by cutting conditions (such as changes in cutting load and ambient temperature fluctuations). Furthermore, since the six bearings share the same circulating coolant, their operating temperature changes synchronously with the coolant temperature, making it impossible to precisely stabilize within the preset optimal operating temperature range.

[0003] This will not only reduce the operating accuracy and service life of the bearing, but also indirectly affect the cutting stability of the diamond wire, resulting in a decrease in the cutting accuracy of the workpiece and an increase in the surface damage rate, making it difficult to meet the processing requirements of high-precision materials such as photovoltaic silicon wafers and silicon carbide wafers. Summary of the Invention

[0004] The purpose of this invention is to provide a cooling system and a diamond wire cutting method for a diamond wire cutting machine to solve the problems existing in the prior art. It adopts a dual independent pump split cooling architecture to achieve independent temperature control of the oil tank and bearing housing, so that the temperature of the oil tank and bearing housing is accurate and stable, and solves the problem of temperature fluctuation in a single pump large circulation.

[0005] To achieve the above objectives, the present invention provides the following solution:

[0006] This invention provides a cooling system for a diamond wire cutting machine, including a first cooling circuit and a second cooling circuit. The first cooling circuit is used to cool the coolant in the oil tank and is equipped with a first circulating pump and a heat exchanger. The second cooling circuit is used to cool the bearing housings. The pipes of the second cooling circuit extend from the oil tank, flow through each bearing housing, and then return to the oil tank. The second cooling circuit is equipped with a second circulating pump.

[0007] In one embodiment, the cooling circuit is connected to the oil tank, the circulating pump is located outside the oil tank, and the cooling circuit is also equipped with a proportional valve for adjusting the temperature of the coolant in the oil tank.

[0008] In one embodiment, the heat exchanger is a plate heat exchanger.

[0009] In one embodiment, the second cooling circuit includes multiple cooling branches, each of which is connected in parallel, and each of the cooling branches is provided with a proportional valve.

[0010] In one embodiment, the main flow path and the main circuit of the second cooling circuit are both connected to the oil tank. Multiple cooling branches are connected in parallel on the main flow path. The branch flow path of each cooling branch is connected to the main flow path, and the branch circuit of each cooling branch is connected to the main circuit.

[0011] In one embodiment, temperature sensors are installed at two bearing housings located at both ends of the guide wheel on the same cooling branch.

[0012] In one embodiment, each of the cooling branch paths is further provided with a solenoid valve.

[0013] The present invention also provides a diamond wire cutting method, including a cooling system for a diamond wire cutting machine as described in any one of claims 1-7, characterized in that it includes the following steps:

[0014] Step 1: Using an automatic gluing machine, the crystal rods to be glued, the metal substrate, and the plastic plate are connected together and fixed on the worktable of the diamond wire cutting machine.

[0015] Step 2: Set the bearing cooling temperature, oil tank temperature, cutting fluid temperature, diamond wire tension, and cutting speed; check the nozzle spacing and nozzle height; set the cutting zero point; install the baffle; and start cutting.

[0016] Step 3: After cutting is completed, the crystal ingot is fed into the insertion and cleaning machine.

[0017] The present invention achieves the following technical effects compared to the prior art:

[0018] The cooling system of the diamond wire cutting machine of the present invention includes a first cooling circuit and a second cooling circuit. The first cooling circuit cools the coolant in the oil tank and is equipped with a first circulating pump and a heat exchanger. The second cooling circuit cools the bearing housings; its pipes extend from the oil tank, flow through each bearing housing, and then return to the oil tank. The second cooling circuit is also equipped with a second circulating pump. This cooling system of the diamond wire cutting machine adopts a dual independent pump cooling architecture. The first cooling circuit is connected to an external heat exchanger, and the coolant in the oil tank is stabilized by a proportional valve. The second cooling circuit is individually connected to each bearing housing corresponding to the guide wheel, and its temperature is independently controlled by a proportional valve, achieving precise and stable bearing housing temperature and solving the problem of temperature fluctuations in a single-pump large-circulation system. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the cooling system of a diamond wire cutting machine.

[0021] In the diagram: 1. Oil tank; 2. Circulating pump II; 3. Main flow path; 4. Main circuit; 5. Cooling branch path; 6. Proportional valve; 7. Guide wheel; 8. Circulating pump I; 9. Proportional valve I; 10. Plate heat exchanger. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] The purpose of this invention is to provide a cooling system and a diamond wire cutting method for a diamond wire cutting machine to solve the problems existing in the prior art. It adopts a dual independent pump split cooling architecture to achieve independent temperature control of the oil tank and bearing housing, so that the temperature of the oil tank and bearing housing is accurate and stable, and solves the problem of temperature fluctuation in a single pump large circulation.

[0024] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] like Figure 1 As shown, the present invention provides a cooling system for a diamond wire cutting machine, including a first cooling circuit and a second cooling circuit. The first cooling circuit is used to cool the coolant in the oil tank 1, and a circulation pump 8 and a heat exchanger are installed on the first cooling circuit. The second cooling circuit is used to cool the bearing housings. The pipes of the second cooling circuit extend from the oil tank 1 and flow through each bearing housing before returning to the oil tank 1. A second circulation pump 2 is installed on the second cooling circuit.

[0026] The cooling system of this diamond wire cutting machine adopts a dual independent pump cooling architecture. Cooling circuit one is connected to an external heat exchanger, and the coolant in oil tank 1 is stabilized by adjusting the proportional valve 6. Cooling circuit two is separately connected to each bearing box corresponding to the guide wheel 7, and the temperature is independently controlled by the proportional valve 6 to achieve precise and stable bearing box temperature, thus solving the problem of temperature fluctuation in a single pump large circulation.

[0027] In one embodiment, cooling circuit one is connected to oil tank 1, the circulation pump is located outside oil tank 1, and cooling circuit one is also equipped with proportional valve one 9, which is used to regulate the temperature of the coolant in oil tank 1. The heat exchanger is a plate heat exchanger 10. Cooling circuit one is connected to the outside and connected to the heat exchanger. The coolant temperature is set at 17.5℃ (which can also be adjusted according to the actual operating temperature). The temperature in oil tank 1 is always maintained at 17.5℃ (the set temperature of oil tank 1) by the proportional valve one 9 of circulation pump one 8.

[0028] In one embodiment, such as Figure 1 As shown, the second cooling circuit includes multiple cooling branches 5, which are connected in parallel. Each cooling branch 5 is equipped with a proportional valve 6, and each cooling branch 5 can be adjusted independently without affecting the normal operation of other cooling branches 5.

[0029] In one embodiment, the main flow path 3 and the main circuit 4 of the second cooling circuit are both connected to the oil tank 1. Multiple cooling branches 5 are connected in parallel on the main flow path 3. The branch flow path of each cooling branch 5 is connected to the main flow path 3, and the branch circuit of each cooling branch 5 is connected to the main circuit 4. The second circulating pump 2 is installed on the main circuit 4 and is located close to the oil tank 1.

[0030] In one embodiment, temperature sensors are installed at the two bearing housings located at both ends of the guide wheel 7 on the same cooling branch 5.

[0031] Based on the dual-pump independent cooling architecture and the parallel branch design of cooling loop two, the adjustment process of each cooling branch 5 revolves around the core principles of precise temperature control, independent adjustment, and non-interference, which is achieved by combining temperature monitoring and closed-loop control with proportional valve 6. The specific working method is as follows:

[0032] Cooling circuit two is a dedicated cooling circuit for the bearing housing driven by circulating pump two 2. Its main flow path 3 obtains basic coolant from oil tank 1 (pre-temperature controlled to 17.5℃ by circulating pump one 8). Taking the three guide wheels 7 as an example, the coolant is split into multiple independent cooling branches 5 corresponding to the six bearing housings (the movable end bearing housing of guide wheel 7-1 is fixed to the fixed end bearing housing of guide wheel 7-1, the movable end bearing housing of guide wheel 7-2 is fixed to the fixed end bearing housing of guide wheel 7-2, and the movable end bearing housing of guide wheel 7-3 is fixed to the fixed end bearing housing of guide wheel 7-3) and proportional valve 6. The end of each branch flows into the main circuit 4 through the branch circuit and finally returns to oil tank 1 to form a complete cycle.

[0033] The key adjustment process is as follows:

[0034] Monitoring and Triggering Phase: Temperature sensors are installed at the bearing housings and motors corresponding to each cooling branch 5 to collect the equipment's operating temperature in real time and feed the data back to the central control system. The system continuously compares the collected temperature with the preset target temperature (such as a constant temperature setting for the bearing housing) to determine whether adjustment needs to be initiated.

[0035] Independent adjustment stage of proportional valve 6: When the monitored temperature of a certain branch deviates from the set value, the control system only issues adjustment commands for that branch, without affecting the normal operation of other parallel branches. If the temperature is too high, the system controls the proportional valve 6 of that branch to increase its opening, increasing the coolant flow and accelerating heat removal efficiency; if the temperature is too low, it decreases the opening of the proportional valve 6 to reduce the coolant flow and avoid excessive cooling. For example, when the temperature of the movable bearing housing of guide wheel 7-1 rises, only the proportional valve 6 of the movable bearing branch of guide wheel 7-1 is activated, while the flow and temperature of other branches such as guide wheel 7-2 and guide wheel 7-3 remain stable.

[0036] Dynamic balancing phase: After the proportional valve 6 is adjusted, the sensor continuously monitors temperature changes, forming a closed-loop control. The system fine-tunes the opening of the proportional valve 6 in real time based on temperature feedback, ensuring precise matching between the coolant flow rate in the branch and the heat generation of the equipment, ultimately stabilizing the temperature of each bearing housing and motor within the set range. Simultaneously, because each branch is connected in parallel and adjusted independently, even if the heat generation of different equipment differs (e.g., the loads of bearing 1 and bearing 2 of guide wheel 7 are different), precise and controllable temperature across the entire range can be achieved through differentiated adjustments of their respective proportional valves 6.

[0037] The entire adjustment process relies on the parallel branch structure and independent proportional valve 6 control, which completely solves the temperature control fluctuation problem of "one adjustment for all" in the traditional single pump large circulation, ensuring that each key component is always at the optimal working temperature, and providing a guarantee for the high precision and stability of diamond wire cutting.

[0038] In one embodiment, a solenoid valve is also installed on the branch flow path of each cooling branch 5. The bearing housing of the existing diamond wire cutting machine itself has secondary cooling. Originally, the secondary cooling copper sleeve was always open, resulting in a relatively low temperature and poor heating effect. The temperature of the fixed bearing was greatly affected by the motor temperature. In this invention, a solenoid valve is added to the cooling pipe of each cooling branch 5. It only controls the 0 and 1 relationship. When the temperature reaches 35°C, the secondary cooling copper sleeve will open, and when the temperature drops to 30°C, it will close. This not only eliminates the influence of the self-heating temperature generated by the high speed of the motor on the fixed bearing, but also allows for faster adjustment and maintenance of the set temperature.

[0039] A method for diamond wire cutting, wherein the diamond wire cutting machine used in this method is a novel diamond wire cutting machine including the cooling system of the aforementioned diamond wire cutting machine, using diamond wire with a female diameter of 70μm, and diamond particles with a diameter of approximately 3-4μm electroplated on the surface of the diamond wire, and adding an appropriate amount of cutting coolant to the liquid cylinder before cutting, and using the high-speed reciprocating motion of the diamond wire to grind the single crystal silicon, the specific steps are as follows:

[0040] (1) Sticking rods: Using an automatic sticking rod machine, the crystal rods to be stuck and the metal material seat are connected together by sticking rod A and B glue and plastic plate and fixed on the worktable of the wire cutting machine;

[0041] (2) Cutting: Set the bearing cooling temperature, oil tank 1 temperature, cutting fluid temperature, diamond wire tension, and cutting speed;

[0042] (3) Check and adjust the nozzle spacing and nozzle height;

[0043] (4) Set the cutting zero point, install the baffle, and start cutting;

[0044] (5) After the cutting is completed, the crystal rod is fed into the insertion and cleaning machine.

[0045] Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this invention. Furthermore, those skilled in the art will recognize that, based on the ideas of this invention, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this invention.

Claims

1. A cooling system for a diamond wire cutting machine, characterized in that: It includes a first cooling circuit and a second cooling circuit. The first cooling circuit is used to cool the coolant in the oil tank and is equipped with a first circulating pump and a heat exchanger. The second cooling circuit is used to cool the bearing housings. The pipes of the second cooling circuit extend from the oil tank, flow through each bearing housing, and then return to the oil tank. The second cooling circuit is equipped with a second circulating pump.

2. The cooling system of the diamond wire cutting machine according to claim 1, characterized in that: The cooling circuit is connected to the oil tank, the circulating pump is located outside the oil tank, and the cooling circuit is also equipped with a proportional valve, which is used to regulate the temperature of the coolant in the oil tank.

3. The cooling system of the diamond wire cutting machine according to claim 1, characterized in that: The heat exchanger is a plate heat exchanger.

4. The cooling system of the diamond wire cutting machine according to claim 1, characterized in that: The second cooling circuit includes multiple cooling branches, which are connected in parallel, and each cooling branch is equipped with a proportional valve.

5. The cooling system of the diamond wire cutting machine according to claim 4, characterized in that: The main flow path and main circuit of the second cooling circuit are both connected to the oil tank. Multiple cooling branches are connected in parallel on the main flow path. The branch flow path of each cooling branch is connected to the main flow path, and the branch circuit of each cooling branch is connected to the main circuit.

6. The cooling system of the diamond wire cutting machine according to claim 5, characterized in that: Temperature sensors are installed at the two bearing housings located at both ends of the guide wheel on the same cooling branch.

7. The cooling system of the diamond wire cutting machine according to claim 5, characterized in that: Each of the cooling branch circuits is also equipped with a solenoid valve.

8. A method for diamond wire cutting, comprising a cooling system for a diamond wire cutting machine as described in any one of claims 1-7, characterized in that, Includes the following steps: Step 1: Using an automatic gluing machine, the crystal rods to be glued, the metal substrate, and the plastic plate are connected together and fixed on the worktable of the diamond wire cutting machine. Step 2: Set the bearing cooling temperature, oil tank temperature, cutting fluid temperature, diamond wire tension, and cutting speed; check the nozzle spacing and nozzle height; set the cutting zero point; install the baffle; and start cutting. Step 3: After cutting is completed, the crystal rod is fed into the insertion and cleaning machine.