A mounting device and method applied to an ALD atomic layer deposition furnace tube type equipment

Abstract

The application relates to the technical field of atomic layer deposition equipment manufacturing, in particular to a mounting device and method applied to ALD (atomic layer deposition) furnace tube type equipment, which comprises a plurality of fixed base frames and a lifting base frame, two adjacent base frames can be detachably spliced, the plurality of base frames are sequentially arranged along a mounting direction, and the lifting base frame is located on one side close to the furnace tube type equipment; a lifting platform is arranged on the top of the lifting base frame; and a lifting mechanism for driving the lifting platform to move vertically is fixedly arranged on the lifting base frame. The modularization of the plurality of base frames enables the plurality of base frames to be sequentially pushed into a narrow gap for splicing, the to-be-mounted equipment is pushed by a roller, the to-be-mounted equipment can have stable supporting force, the mounting height of the to-be-mounted equipment is finally freely adjusted by the lifting base frame, the to-be-mounted equipment can be in a correct mounting position, and the mounting operation can be completed by one person in the whole process, so that the equipment mounting process is more convenient and fast.

Description

Technical Field

[0001] This invention relates to the field of atomic layer deposition equipment manufacturing technology, specifically to an installation device and method for an ALD atomic layer deposition furnace tube equipment. Background Technology

[0002] Atomic layer deposition (ALD) is a core process used for semiconductor thin film preparation and precision material surface treatment. Atomic layer deposition furnace tube equipment is the key equipment for realizing this process, and its internal temperature control system directly determines the process accuracy and product quality.

[0003] In existing technologies, the temperature control system in furnace tube equipment typically consists of components such as heaters and radiators. These temperature control components usually weigh tens of kilograms and are typically installed in a narrow gap between the equipment shell and the furnace tube. After the temperature control components are moved into the narrow gap, it is necessary to lift or perform other operations to align the mounting holes on the temperature control components with the mounting holes on the furnace tube equipment. In other words, the temperature control components must be moved onto the mounting surface to ensure the stability of the temperature control components after installation and to guarantee the stable operation of the equipment.

[0004] However, existing installation processes require multiple people to work together to move and lift these temperature control components. This is not only time-consuming and labor-intensive, but also difficult to operate in narrow gaps. Furthermore, multi-person collaboration requires a certain degree of coordination. If one person makes a mistake, such as slipping while moving a temperature control component or mishandling a jack or pry bar, it may not only damage the equipment but also compromise safety and cause injury to workers. Therefore, this invention proposes an installation device and method for ALD atomic layer deposition furnace tube equipment to effectively solve the above-mentioned drawbacks. Summary of the Invention

[0005] The purpose of this invention is to provide an installation device and method for ALD atomic layer deposition furnace tube equipment, in order to solve the problems mentioned in the background art.

[0006] The present invention is achieved through the following technical solution: an installation device for an ALD atomic layer deposition furnace tube equipment, comprising several fixed base frames and a lifting base frame, wherein two adjacent base frames are detachably spliced ​​together, the several base frames are arranged sequentially along the installation direction and the lifting base frame is located on the side close to the furnace tube equipment;

[0007] The top of the lifting base is provided with a lifting platform, and a lifting mechanism for driving the lifting platform to move vertically is fixed on the lifting base. The lifting mechanism is used to control the lifting of the lifting platform to adjust the installation height of the equipment to be installed.

[0008] Both the fixed base frame and the top surface of the lifting platform are rotatably equipped with rollers. The rollers extend along the width direction of the base frame, and a number of the rollers are distributed parallel to each other along the installation direction of the base frame. The rollers are used to support and guide the equipment to be installed to move toward the direction of the furnace tube equipment.

[0009] Both sides of the fixed base frame are provided with limiting mechanisms that slide along the base frame installation direction. The limiting mechanism includes a sliding plate that slides along the base frame installation direction on the side of the fixed base frame. A limiting plate is movably provided on the side of the sliding plate facing the area above the roller. The sliding plate and the limiting plate are provided with a driving mechanism. The driving mechanism is used to drive the limiting plate to move along the width direction of the fixed base frame to approach or move away from the equipment to be installed.

[0010] Optionally, a limiting rod is rotatably provided on the limiting plate. The movable end of the limiting rod can retract into the limiting plate or extend out of the limiting plate toward the side facing the equipment to be installed. A transmission mechanism is connected to the sliding plate, the limiting plate, and the limiting rod. The transmission input end of the transmission mechanism is located on the sliding plate, and the transmission output end of the transmission mechanism is located on the limiting rod.

[0011] When the limiting plate moves closer to the equipment to be installed, the transmission mechanism drives the movable end of the limiting rod to flip to the extended state, so as to limit the side of the equipment to be installed facing the furnace tube equipment.

[0012] When the limiting plate moves away from the equipment to be installed, the transmission mechanism drives the limiting rod to flip back into the limiting plate, allowing the equipment to be installed to move independently toward the furnace tube equipment.

[0013] Optionally, the top surfaces of both the fixed base frame and the lifting platform can be detachably covered with several anti-slip covers. The anti-slip covers are hollow inside and have no bottom. The top surface of the anti-slip covers has an anti-slip structure. The anti-slip covers are used to cover the area where the rollers are located to provide support after the equipment to be installed is moved.

[0014] Optionally, the installation device further includes a movable ladder, which is detachably mounted on one of the fixed base frames. The step surface of the movable ladder is provided with an anti-slip structure, and the movable ladder is detachably connected to the base frame via hooks.

[0015] Optionally, two adjacent base frames can be detachably spliced ​​together by a latch, wherein the latch is a structure with a locking function and is selected from at least one of a rotary latch and a plug-in latch.

[0016] Optionally, both the fixed base frame and the lifting base frame are provided with a number of casters and a number of liftable feet at their bottoms. The liftable feet are used to contact or move away from the ground to drive the casters away from or in contact with the ground.

[0017] Optionally, the lifting mechanism on the lifting base frame includes several cylinders fixedly installed on the lifting base frame. The cylinders are arranged vertically, and the movable end of the cylinder is fixedly connected to the lifting platform. The lifting base frame is also fixedly equipped with an electronic control device that is electrically connected to the several cylinders.

[0018] Optionally, the limiting plate has a movable cavity for accommodating the limiting rod. The transmission mechanism includes a rotating shaft that is fixedly connected to the limiting rod and rotatably connected to the movable cavity. A torsion spring is sleeved on the rotating shaft. The two ends of the torsion spring are fixedly connected to the rotating shaft and the inner wall of the movable cavity, respectively. The torsion spring always applies an elastic force to the limiting rod, causing it to rotate towards the equipment to be installed.

[0019] Optionally, the transmission mechanism further includes a gear fixedly mounted on the rotating shaft, and a rack fixedly connected to the sliding plate;

[0020] When the limiting plate and the sliding plate are in contact, the gear and the rack mesh.

[0021] When the limiting plate moves away from the sliding plate, the rack and pinion drive gear rotates to drive the limiting rod to flip towards the equipment to be installed, until the rack and the gear separate.

[0022] This invention also proposes an installation method for a tube-type ALD atomic layer deposition furnace, applicable to the aforementioned installation device, comprising the following steps:

[0023] First, push the lifting base frame and several fixed base frames into the installation space in sequence, so that the lifting base frame is located on the side closest to the furnace tube equipment, and then splice two adjacent base frames together to complete the fixation.

[0024] Subsequently, the height of the lifting platform is adjusted by the lifting mechanism so that the top surface of the lifting platform is flush with the top surface of the fixed base frame, thereby placing several rollers on the same horizontal plane;

[0025] Then, place the equipment to be installed horizontally on the top surface of the fixed base frame in an area away from the lifting base frame. This is the initial position. Then, use the drive mechanism to control the limiting plates on the left and right sides of the fixed base frame to move closer to each other, so that the two limiting plates fit against the left and right sides of the equipment to be installed, thus completing the limiting operation of the equipment.

[0026] Workers can stand on the top of the fixed base frame and push the equipment to be installed along the installation direction under the action of the rollers until the limiting mechanism and the equipment to be installed move close to the lifting base frame. Then, the drive mechanism controls the two limiting plates to move away from each other and no longer clamp and limit the equipment to be installed. At this time, the equipment to be installed can be pushed onto the lifting platform.

[0027] Finally, the lifting platform is raised and lowered using the lifting mechanism until the equipment to be installed reaches the appropriate height. The equipment is then manually fixed onto the furnace tube equipment to complete the installation.

[0028] Compared with the prior art, the present invention provides an installation device and method for ALD atomic layer deposition furnace tube equipment, which has the following beneficial effects:

[0029] 1. This invention uses a modular composition of multiple base frames, which can be sequentially pushed into a narrow gap for assembly to support the equipment to be installed. In conjunction with rollers, the equipment to be installed is pushed to provide stable support. Finally, the installation height of the equipment to be installed is freely adjusted by using lifting base frames to ensure that the equipment is in the correct installation position. The entire process can be completed by a single person, without the need for multiple people to work in the narrow gap. This makes the device suitable for scenarios such as precise positioning, rapid assembly and stable fixation of heating components inside furnace tube ALD equipment.

[0030] 2. The present invention symmetrically sets limiting mechanisms on the left and right sides of the base frame. By using limiting plates that can move closer or further away from each other, the equipment to be installed can be clamped and fixed when pushed, avoiding positional deviation of the equipment to be installed and preventing the equipment to be installed from hitting the furnace tube equipment, causing scratches, collisions, etc., thereby not only improving the stability of the equipment to be installed when pushing, but also improving the safety of the installation process. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the present invention;

[0032] Figure 2 This is a schematic diagram of the base frame structure of the present invention;

[0033] Figure 3 This is a schematic diagram of the lifting base structure of the present invention;

[0034] Figure 4 This is a schematic diagram of the structure of the movable ladder in the overlapping state according to the present invention;

[0035] Figure 5 This is a schematic diagram of the anti-slip cover structure of the present invention;

[0036] Figure 6 This is a schematic diagram of the locking structure of the present invention;

[0037] Figure 7 This is a front view of the limiting mechanism of the present invention;

[0038] Figure 8 This is a schematic diagram of the limiting mechanism structure of the present invention;

[0039] Figure 9This is a front sectional view of the limiting mechanism of the present invention;

[0040] Figure 10 This is a front sectional view of the drive mechanism of the present invention;

[0041] Figure 11 for Figure 8 Enlarged structural diagram at point A in the middle.

[0042] In the diagram: 1. Fixed base frame; 2. Lifting base frame; 201. Lifting platform; 202. Cylinder; 203. Electrical control device; 3. Roller; 4. Limiting mechanism; 401. Sliding plate; 402. Limiting plate; 403. Limiting rod; 404. Soft pad; 5. Drive mechanism; 501. Slider; 502. Two-way lead screw; 503. Drive rod; 6. Transmission mechanism; 601. Rotating shaft; 602. Torsion spring; 603. Gear; 604. Rack; 7. Anti-slip cover plate; 8. Movable ladder; 801. Hook; 9. Lock. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] Example 1: Please refer to Figure 1 - Figure 11 This application proposes an installation device for an ALD atomic layer deposition furnace tube equipment, including several fixed base frames 1 and a lifting base frame 2. Adjacent base frames can be detachably spliced ​​together. The several base frames are arranged sequentially along the installation direction and the lifting base frame 2 is located on the side close to the furnace tube equipment.

[0045] Both the fixed base frame 1 and the lifting base frame 2 are equipped with several casters and several adjustable feet at their bottom. The adjustable feet are used to move the casters away from or away from the ground. The casters are swivel casters made of polyurethane, nylon, or rubber, and are characterized by wear resistance, high load-bearing capacity, and quiet operation. The feet are threaded adjustable feet with a bottom diameter ranging from φ50mm to φ200mm. The threaded rod is raised or lowered by rotating a bolt. When the base frame is pushed, the bottom of the feet rises away from the ground, bringing the casters into contact with the ground. When the base frame is pushed into position, the feet are lowered to bring them into contact with the ground, lifting the casters off the ground, thus allowing the base frame to be stably placed in the narrow gap.

[0046] On the other hand, adjacent base frames can be detachably spliced ​​together via a locking buckle 9. The locking buckle 9 is a structure with a locking function and is selected from at least one of a rotary buckle and a plug-in buckle. Figure 6 As shown, the latch 9 is a rotating latch with a groove at the movable end and a protrusion on the adjacent base frame that can be inserted into the groove. By rotating the latch, the connection or separation of the adjacent base frames can be completed.

[0047] Furthermore, a lifting platform 201 is provided on the top of the lifting base frame 2. A lifting mechanism is fixed on the lifting base frame 2 to drive the lifting platform 201 to move vertically. The lifting mechanism is used to control the lifting platform 201 to adjust the installation height of the equipment to be installed. The lifting base frame 2 is the first base frame to be pushed into the narrow gap. The lifting base frame 2 is located closest to the furnace tube equipment. When the equipment to be installed is moved onto the lifting platform 201, the lifting mechanism controls the lifting platform 201 to rise and fall, so that the bottom surface of the equipment to be installed is flush with the installation plane, or the installation holes on the equipment to be installed are aligned with the installation holes on the furnace tube equipment, so that the operator can carry out the installation operation.

[0048] The lifting mechanism on the lifting base 2 includes several cylinders 202 fixedly mounted on the lifting base 2. The cylinders 202 are arranged vertically, and their movable ends are fixedly connected to the lifting platform 201. An electrical control device 203, electrically connected to the cylinders 202, is also fixedly mounted on the lifting base 2. The cylinders 202 are fixedly mounted on the lifting base 2 via mounting brackets. In this embodiment, there are four cylinders 202, with their movable ends connected to four positions near the ends of the bottom surface of the lifting platform 201 to provide stable support. The cylinders 202 are controlled by an external control system or remote control, allowing workers to freely adjust the lifting height of the lifting platform 201 and thus change the installation height of the equipment to be installed. Furthermore, the stroke of the cylinders 202 is 50mm-250mm, and the cylinder diameter is φ30-φ60. The electrical control device 203 has the function of setting the cylinder 202's travel speed and travel distance.

[0049] like Figure 3 As shown, a downward-extending guide rail is fixedly provided on one side of the bottom surface of the lifting platform 201, and a slide block is fixedly provided on the lifting base frame 2. The guide rail and the slide block slide together vertically, thereby making the lifting process of the lifting platform 201 more stable.

[0050] In this embodiment, both the fixed base frame 1 and the top surface of the lifting platform 201 are rotatably equipped with rollers 3. The rollers 3 extend along the width of the base frame, and several rollers 3 are distributed parallel to each other along the installation direction of the base frame. The rollers 3 are used to support and guide the equipment to be installed towards the furnace tube type equipment. The rolling direction of the rollers 3 is consistent with the travel direction of the equipment to be installed. The diameter of the rollers 3 is selected according to the weight of the equipment to be installed, and the installation gap is 15mm-65mm. The rollers 3 allow workers to easily push the equipment to be installed onto the lifting platform 201, making the entire installation process more convenient and efficient.

[0051] Furthermore, the top surfaces of both the fixed base frame 1 and the lifting platform 201 are detachably covered with several anti-slip covers 7. The anti-slip covers 7 are hollow inside and have no bottom structure. The top surface of the anti-slip covers 7 has an anti-slip structure. The anti-slip covers 7 are used to cover the area where the roller 3 is located after the equipment to be installed is moved to provide support.

[0052] The distance between the left and right side walls of the anti-slip cover 7 is not less than the length of the roller 3. The anti-slip cover 7 can cover several of the rollers 3, allowing workers to stand on it to continue pushing the equipment to be installed onto the lifting platform 201. To make the anti-slip cover 7 more stable after installation, a groove matching the shape of the bottom of the anti-slip cover 7 can be made on the top surface of the fixed base 1 to prevent the anti-slip cover 7 from shaking. At the same time, anti-slip pads can be glued to the inner wall of the anti-slip cover 7 to ensure an interference fit between the inside of the anti-slip cover 7 and the left and right sides of the roller 3, achieving stable installation.

[0053] It should be noted that the installation device also includes a movable ladder 8, which is detachably mounted on one of the fixed base frames 1. The step surface of the movable ladder 8 is provided with an anti-slip structure, and the movable ladder 8 is detachably connected to the base frame via hooks 801. Figure 2 and Figure 4 As shown, when not in use, the movable ladder 8 is hung on the fixed base frame 1 via hooks 801, and is stored vertically to reduce space occupation. When in use, the movable ladder 8 is attached to the fixed base frame 1 via hooks at the top, so that the movable ladder 8 is tilted to facilitate climbing by workers. Furthermore, the radial cross-section of the steps of the movable ladder 8 can be any shape such as circular, rectangular, or triangular, and its surface can have an anti-slip texture design.

[0054] The base frame and movable ladder 8 are made of metal materials with certain strength and corrosion resistance, such as aluminum alloy, stainless steel, and cold-rolled steel, to improve the overall structural strength and extend the service life.

[0055] Furthermore, limiting mechanisms 4 are slidably provided on both the left and right sides of the fixed base frame 1 along the base frame installation direction. Each limiting mechanism 4 includes a sliding plate 401 slidably disposed on the side of the fixed base frame 1 along the base frame installation direction. A limiting plate 402 is movably disposed on the side of the sliding plate 401 facing the area above the roller 3. A driving mechanism 5 is jointly provided on the sliding plate 401 and the limiting plate 402. The driving mechanism 5 is used to drive the limiting plate 402 to move along the width direction of the fixed base frame 1 to approach or move away from the equipment to be installed. Therefore, when pushing the equipment to be installed, the driving mechanism 5 can be used to drive the limiting plates 402 on the left and right sides of the fixed base frame 1 to move closer to each other, thereby clamping and fixing the left and right sides of the equipment to be installed. This allows the limiting mechanism 4 and the equipment to be installed to move forward together, preventing the equipment to be installed from swaying left and right or even tilting during movement, thus improving the stability and safety of the installation process.

[0056] Among them, such as Figure 7 - Figure 11 As shown, the sliding plate 401 is L-shaped. A slide rail is fixed on the side of the fixed base 1 along its own length direction for the sliding plate 401 to slide. The sliding plate 401 and the slide rail slide together in the installation direction. The limiting plate 402 is connected to the sliding plate 401 through the driving mechanism 5. A soft pad 404 is fixedly adhered to the side of the limiting plate 402 facing the equipment to be installed. The soft pad 404 is made of soft materials such as rubber and can flexibly contact the equipment to be installed. It can not only prevent scratching the surface of the equipment, but also increase the friction and improve the clamping stability.

[0057] On the other hand, the drive mechanism 5 can be a linear drive structure such as an electric push rod. For example, an electric push rod is fixedly installed on the side of the sliding plate 401 away from the limiting plate 402. The movable end of the electric push rod passes through the sliding plate 401 along the width direction of the fixed base frame 1 and is fixedly connected to the limiting plate 402. The limiting plate 402 can be directly controlled to move closer to or away from the equipment to be installed by the electric push rod.

[0058] In this embodiment, vertical grooves are provided on both the front and rear sidewalls of the sliding plate 401. The driving mechanism 5 includes two sliders 501 that slide vertically in the grooves. The shape of the sliders 501 matches the shape of the grooves. A bidirectional lead screw 502 is provided in the grooves and is distributed vertically. The bottom end of the bidirectional lead screw 502 is rotatably connected to the sliding plate 401 through a rotating bearing. The bidirectional lead screw 502 passes through the two sliders 501 and is threadedly connected to the two sliders 501. By rotating the bidirectional lead screw 502, the two sliders 501 can be driven to move closer or further apart.

[0059] A drive rod 503 is rotatably connected to the side of each of the two sliders 501 facing outward from the slide groove. The ends of the two drive rods 503 away from the sliders 501 are rotatably connected to the side of the limiting plate 402. Therefore, when the two sliders 501 approach each other, the driving rods 503 can drive the limiting plate 402 to move away from the sliding plate 401. When the two sliders 501 move away from each other, the driving rods 503 can drive the limiting plate 402 to move closer to the sliding plate 401.

[0060] It should be noted that the top of the bidirectional lead screw 502 extends above the sliding plate 401 and is fixedly fitted with a pulley. There are pulleys on both the front and rear sides of the top of the sliding plate 401. The two pulleys are connected by a timing belt. The inner side of the timing belt has teeth for meshing with the pulleys. When the operator rotates one side of the bidirectional lead screw 502, the bidirectional lead screws 502 on both the front and rear sides of the sliding plate 401 will be driven to rotate simultaneously. This will cause the drive rod 503 to drive the limit plate 402 to move, providing stable and sufficient support for the limit plate 402.

[0061] It is worth mentioning that a drive button is fixedly connected to the top of the bidirectional lead screw 502. The diameter of the drive button is larger than that of the bidirectional lead screw 502, and the surface has anti-slip texture so that the operator can drive the bidirectional lead screw 502 to rotate.

[0062] Furthermore, a limiting rod 403 is rotatably provided on the limiting plate 402. The movable end of the limiting rod 403 can retract into the limiting plate 402 or extend out of the limiting plate 402 toward the side facing the equipment to be installed. A transmission mechanism 6 is connected to the sliding plate 401, the limiting plate 402 and the limiting rod 403. The transmission input end of the transmission mechanism 6 is located on the sliding plate 401 and the transmission output end of the transmission mechanism 6 is located on the limiting rod 403.

[0063] The limiting plate 402 has a movable cavity for accommodating the limiting rod 403. The transmission mechanism 6 includes a rotating shaft 601 fixedly connected to the limiting rod 403 and rotatably connected within the movable cavity. The rotating shaft 601 is distributed along the mounting direction of the base frame, allowing the limiting rod 403 to rotate up and down in the width direction of the fixed base frame 1. A torsion spring 602 is sleeved on the rotating shaft 601. The two ends of the torsion spring 602 are fixedly connected to the rotating shaft 601 and the inner wall of the movable cavity, respectively. The torsion spring 602 always applies an elastic force to the limiting rod 403, causing it to rotate towards the equipment to be installed. Therefore, when the rotating shaft 601 and the limiting rod 403 are only subjected to the elastic force of the torsion spring 602, they will rotate towards the equipment to be installed. Figure 10As shown, the top wall of the receiving cavity is flat. After the limiting rod 403 flips from the vertical state to the horizontal state, it will abut against the top wall of the receiving cavity, thereby keeping the limiting rod 403 in a horizontal state to limit the side of the equipment to be installed facing the lifting base frame 2. This prevents the equipment to be installed from moving forward alone when the limiting plate 402 is loose, further limiting the equipment to be installed and improving the stability and safety of the movement process.

[0064] Furthermore, when the limiting plate 402 approaches the equipment to be installed, the transmission mechanism 6 drives the movable end of the limiting rod 403 to rotate to an extended state, thereby limiting the equipment to be installed on the side facing the furnace tube equipment. When the limiting plate 402 moves away from the equipment to be installed, the transmission mechanism 6 drives the limiting rod 403 to rotate back into the limiting plate 402, allowing the equipment to be installed to move independently towards the furnace tube equipment. This ensures that the equipment to be installed is limited during the process of being pushed onto the lifting platform 201, but is not obstructed during the process of being pushed from the lifting platform 201 to the installation plane, so as to push the equipment to be installed to the installation position.

[0065] Specifically, the transmission mechanism 6 also includes a gear 603 fixedly mounted on the rotating shaft 601, and a rack 604 fixedly connected to the sliding plate 401. Among these, as shown... Figure 11 As shown, the top of the receiving cavity has an opening for one side of the gear 603 to pass through. When the limiting plate 402 and the sliding plate 401 are in contact, the side of the gear 603 extending out of the opening meshes with the rack 604. At this time, the limiting rod 403 is vertically distributed and located inside the receiving cavity. When the limiting plate 402 moves away from the sliding plate 401, the rack 604 drives the gear 603 to rotate, causing the limiting rod 403 to flip towards the equipment to be installed, until the rack 604 and the gear 603 separate. At this time, the limiting rod 403 just rotates to a horizontal state and abuts against the top wall of the receiving cavity. The elastic force exerted by the torsion spring 602 on the limiting rod 403 is greater than the weight of the limiting rod 403. Therefore, under the action of the torsion spring 602, the limiting rod 403 always remains in a horizontal state and will not fall due to its own weight. Only when the limiting plate 402 is close to the sliding plate 401 can the limiting rod 403 return to the receiving cavity through the rack 604 and the gear 603.

[0066] Example 2: This application provides an installation method for a tube-type ALD atomic layer deposition furnace, applicable to the installation device of Example 1, including the following steps:

[0067] First, raise the feet at the bottom of the fixed base frame 1 and the lifting base frame 2 so that the casters contact the ground. Then, push the lifting base frame 2 into the installation space until it reaches the side closest to the furnace tube equipment, and lower the feet so that they contact the ground and the casters are away from the ground. Next, push several fixed base frames 1 into the installation space in sequence, and connect adjacent base frames by rotating the locking buckle 9. The fixed base frame 1 and the lifting base frame 2 can be spliced ​​together by the locking buckle 9, and the fixed base frame 1 can also be used to directly limit the lifting base frame 2.

[0068] Subsequently, the height of the lifting platform 201 is adjusted by the cylinder 202 in the lifting mechanism so that the top surface of the lifting platform 201 is flush with the top surface of the fixed base frame 1, thereby placing the rollers 3 on the same horizontal plane. Then, the movable ladder 8 on the outermost fixed base frame 1 is removed, and the hook 801 at the top of the movable ladder 8 is used to hook the fixed base frame 1, so that the movable ladder 8 is tilted and the bottom end of the movable ladder 8 is placed on the ground.

[0069] Then, using lifting equipment such as electric hoists, forklifts, and electric lifting platforms, the equipment to be installed is placed horizontally on the top surface of the fixed base frame 1 in an area away from the lifting base frame 2. This is the initial position. Subsequently, the staff can use the movable ladder 8 to climb to the highest point, while several anti-slip covers 7 are carried and stored in the toolbox.

[0070] Then, by rotating the bidirectional lead screw 502, the limiting plates 402 on the left and right sides of the fixed base frame 1 are controlled to move closer to each other, so that the soft pads 404 on the sides of the two limiting plates 402 are attached to the left and right sides of the equipment to be installed, thus completing the limiting operation on the left and right sides of the equipment. At the same time, the rack 604 drives the gear 603 to rotate, so that the limiting rod 403 flips outward of the receiving cavity on the limiting plate 402, and the side of the equipment to be installed facing the lifting base frame 2 abuts against the limiting rod 403, thus completing the limiting operation on the side of the equipment to be installed facing the lifting base frame 2.

[0071] Subsequently, the anti-slip cover 7 is moved forward by the width of the equipment to be installed. The anti-slip cover 7 is placed at the position where the equipment to be installed slides. One anti-slip cover 7 is installed each time the equipment to be installed is moved, until the equipment to be installed is completely placed on the lifting platform 201.

[0072] When the device moves close to the lifting platform 201, the staff controls the two limit plates 402 to move away from each other through the drive mechanism 5. At the same time, the limit rod 403 retracts into the receiving cavity and no longer clamps or limits the device to be installed. At this time, the device to be installed can be pushed onto the lifting platform 201.

[0073] At this point, the lifting platform 201 is raised and lowered using the electronic control device 203 and the cylinder 202 to adjust the height of the equipment to be installed, so that the bottom of the equipment is slightly higher than the installation plane. The equipment is then pushed onto the installation plane to align the mounting holes. Finally, the equipment is manually fixed onto the furnace tube equipment to complete the installation operation.

[0074] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0075] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An installation device for a tube-type ALD atomic layer deposition furnace, characterized in that: It includes several fixed base frames (1) and one lifting base frame (2), two adjacent base frames can be detachably spliced, several base frames are arranged in sequence along the installation direction and the lifting base frame (2) is located on the side close to the furnace tube equipment; The top of the lifting base (2) is provided with a lifting platform (201), and a lifting mechanism for driving the lifting platform (201) to move vertically is fixed on the lifting base (2). The lifting mechanism is used to control the lifting platform (201) to lift and lower to adjust the installation height of the equipment to be installed. The top surfaces of the fixed base frame (1) and the lifting platform (201) are both rotatably equipped with rollers (3). The rollers (3) extend along the width direction of the base frame. Several rollers (3) are distributed parallel to each other along the installation direction of the base frame. The rollers (3) are used to carry and guide the equipment to be installed to move towards the direction of the furnace tube equipment. The fixed base frame (1) is provided with limiting mechanisms (4) on both the left and right sides along the base frame installation direction. The limiting mechanism (4) includes a sliding plate (401) that is slidably disposed on the side of the fixed base frame (1) along the base frame installation direction. A limiting plate (402) is movably disposed on the side of the sliding plate (401) facing the area above the roller (3). A driving mechanism (5) is provided on both the sliding plate (401) and the limiting plate (402). The driving mechanism (5) is used to drive the limiting plate (402) to move along the width direction of the fixed base frame (1) to approach or move away from the equipment to be installed.

2. The installation device according to claim 1, characterized in that: The limiting plate (402) is rotatably provided with a limiting rod (403). The movable end of the limiting rod (403) can retract into the limiting plate (402) or extend out of the limiting plate (402) towards the side of the equipment to be installed. The sliding plate (401), the limiting plate (402) and the limiting rod (403) are all connected to a transmission mechanism (6). The transmission input end of the transmission mechanism (6) is located on the sliding plate (401), and the transmission output end of the transmission mechanism (6) is located on the limiting rod (403). When the limiting plate (402) approaches the equipment to be installed, the transmission mechanism (6) drives the movable end of the limiting rod (403) to flip to the extended state, so as to limit the side of the equipment to be installed facing the furnace tube equipment; When the limiting plate (402) moves away from the equipment to be installed, the transmission mechanism (6) drives the limiting rod (403) to flip back into the limiting plate (402), so that the equipment to be installed can move alone toward the direction of the furnace tube equipment.

3. The installation device according to claim 1 or 2, characterized in that: The top surfaces of the fixed base frame (1) and the lifting platform (201) are detachably covered with several anti-slip covers (7). The anti-slip covers (7) are hollow inside and have no bottom. The top surface of the anti-slip covers (7) has an anti-slip structure. The anti-slip covers (7) are used to cover the area where the roller (3) is located after the equipment to be installed is moved to provide support.

4. The installation device according to claim 3, characterized in that: The installation device also includes a movable ladder (8), which is detachably mounted on one of the fixed base frames (1). The step surface of the movable ladder (8) is provided with an anti-slip structure, and the movable ladder (8) is detachably connected to the base frame via hooks (801).

5. The installation device according to claim 1 or 4, characterized in that: The two adjacent base frames can be detachably spliced ​​by a latch (9), which is a structure with locking function and is selected from at least one of rotating latch and plug-in latch.

6. The installation device according to claim 5, characterized in that: The bottom of both the fixed base frame (1) and the lifting base frame (2) is provided with several casters and several liftable feet. The liftable feet are used to contact or move away from the ground to drive the casters away from or in contact with the ground.

7. The installation device according to claim 6, characterized in that: The lifting mechanism on the lifting base (2) includes several cylinders (202) fixedly installed on the lifting base (2). The cylinders (202) are arranged vertically, and the movable end of the cylinders (202) is fixedly connected to the lifting platform (201). The lifting base (2) is also fixedly provided with an electric control device (203) that is electrically connected to several cylinders (202).

8. The installation device for a tube-type ALD atomic layer deposition furnace according to claim 2, characterized in that: The limiting plate (402) has an open cavity for accommodating the limiting rod (403). The transmission mechanism (6) includes a rotating shaft (601) that is fixedly connected to the limiting rod (403) and rotatably connected to the open cavity. A torsion spring (602) is sleeved on the rotating shaft (601). The two ends of the torsion spring (602) are fixedly connected to the rotating shaft (601) and the inner wall of the open cavity, respectively. The torsion spring (602) always applies an elastic force to the limiting rod (403) to rotate towards the direction of the equipment to be installed.

9. The installation device for a tube-type ALD atomic layer deposition furnace according to claim 8, characterized in that: The transmission mechanism (6) also includes a gear (603) fixedly mounted on the rotating shaft (601) and a rack (604) fixedly connected to the sliding plate (401). When the limiting plate (402) and the sliding plate (401) are in contact, the gear (603) and the rack (604) mesh. When the limiting plate (402) moves away from the sliding plate (401), the rack (604) drives the gear (603) to rotate, thereby causing the limiting rod (403) to flip towards the direction of the device to be installed, until the rack (604) and the gear (603) separate.

10. An installation method for a tube-type ALD atomic layer deposition furnace, applicable to the installation device described in any one of 1-9, characterized in that: Includes the following steps: First, push the lifting base frame (2) and several fixed base frames (1) into the installation space in sequence, so that the lifting base frame (2) is located on the side closest to the furnace tube equipment, and then splice the two adjacent base frames together to complete the fixation; Subsequently, the height of the lifting platform (201) is adjusted by the lifting mechanism so that the top surface of the lifting platform (201) is flush with the top surface of the fixed base frame (1), thereby placing several rollers (3) on the same horizontal plane; Then, place the equipment to be installed horizontally on the top surface of the fixed base frame (1) away from the lifting base frame (2). This is the initial position. Then, use the drive mechanism (5) to control the limiting plates (402) on the left and right sides of the fixed base frame (1) to move closer to each other, so that the two limiting plates (402) are attached to the left and right sides of the equipment to be installed, and the limiting operation of the equipment is completed. Workers can stand on the top surface of the fixed base frame (1) and push the equipment to be installed to move along the installation direction under the action of the roller (3) until the limiting mechanism (4) and the equipment to be installed move to a position close to the lifting base frame (2). Then the drive mechanism (5) controls the two limiting plates (402) to move away from each other and no longer clamp and limit the equipment to be installed. At this time, the equipment to be installed can be pushed onto the lifting platform (201). Finally, the lifting platform (201) is raised and lowered using the lifting mechanism until the equipment to be installed reaches a suitable height. Finally, the equipment to be installed is fixed on the furnace tube equipment by manual labor to complete the installation operation.

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