Vacuum chamber temperature measuring device
Through innovative design of vacuum pipeline components and thermocouple sealing components, a dual radial seal is achieved for the vacuum chamber temperature measurement device, solving the sealing and maintenance convenience problems of traditional devices in high temperature and high vacuum environments, and improving the reliability and service life of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 中科光智(重庆)科技有限公司
- Filing Date
- 2026-01-30
- Publication Date
- 2026-04-24
AI Technical Summary
Traditional vacuum temperature measuring devices have poor sealing performance in high temperature and high vacuum environments, thermocouples are easily damaged, have short service life, are inconvenient to install and maintain, and are difficult to deploy and replace at multiple points.
It adopts a vacuum pipeline assembly, a thermocouple sealing assembly, and a thermocouple assembly. Through the combination design of elastic plug and gland, it achieves double radial sealing. The thermocouple sealing position is moved outward to reduce the impact of high temperature on the sealing components. The structure is simple and easy to install and maintain.
It improves sealing reliability, reduces the risk of vacuum leakage, simplifies the installation and maintenance process, extends service life, and adapts to the temperature measurement needs of various thermocouple diameters.
Smart Images
Figure CN121917082A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of temperature measurement technology in vacuum environments, specifically a temperature measuring device for vacuum chambers, which is particularly suitable for temperature monitoring under high temperature and high vacuum conditions. Background Technology
[0002] Real-time monitoring of multiple temperatures within the vacuum chamber during vacuum equipment operation is crucial for ensuring process stability and equipment safety.
[0003] Traditional vacuum temperature measurement methods often employ a simple direct thermocouple insertion structure, which has the following problems: poor sealing performance, with leakage easily occurring at the connection between the thermocouple and the vacuum chamber, affecting the vacuum level; the thermocouple is easily damaged, prone to breakage under frequent assembly and disassembly or high-temperature vibration environments, resulting in a short service life; lack of cooling design, with the sealing ring easily aging under high-temperature environments, affecting sealing performance; and inconvenient installation and maintenance, as the traditional structure is complex, difficult to disassemble, and not conducive to multi-point deployment and replacement.
[0004] Therefore, there is an urgent need for a vacuum chamber temperature measuring device that is reliably sealed, structurally stable, and easy to install and maintain. Summary of the Invention
[0005] The purpose of this application is to provide a vacuum chamber temperature measuring device that is reliably sealed, structurally stable, and easy to install and maintain.
[0006] To achieve the above objectives, the technical solution provided in this application is: a vacuum chamber temperature measuring device, comprising a vacuum pipeline assembly, a thermocouple sealing assembly, and a thermocouple assembly; the vacuum pipeline assembly has an axially extending vacuum channel, one end of which is used to communicate with a vacuum chamber; the thermocouple sealing assembly includes a connecting sleeve, an elastic plug, and a gland, wherein an axially extending receiving cavity is formed inside the connecting sleeve, the connecting sleeve is fixed to the vacuum pipeline assembly, and the receiving cavity is connected to the vacuum channel; the elastic plug is made of a compressible elastic material and is disposed within the receiving cavity of the connecting sleeve, the elastic plug having at least one through hole along its axial direction; the gland is connected to the end of the connecting sleeve away from the vacuum pipeline assembly and is used to apply axial pressure to the elastic plug. The pressure cap has a pressure cap through hole corresponding to the through hole of the elastic plug; the thermocouple assembly includes at least one thermocouple, the thermocouple wire of which passes through the through hole and the pressure cap through hole in sequence, and extends into the vacuum chamber through the vacuum channel; wherein, the elastic plug is axially positioned in the receiving cavity, so that when the pressure cap is tightened, axial pressure can be applied to the elastic plug, and the axial pressure applied by the pressure cap to the elastic plug can cause the elastic plug to be axially compressed and radially expanded in the receiving cavity, so as to simultaneously form a first radial seal and a second radial seal. The first radial seal is the seal between the outer peripheral wall of the elastic plug and the inner wall of the receiving cavity, and the second radial seal is the seal between the inner wall of the through hole and the outer periphery of the thermocouple wire.
[0007] The key working principle of this application is as follows: the elastic plug is axially positioned within the receiving cavity. When the gland is tightened, the gland applies axial pressure to the elastic plug, causing it to be axially compressed within the receiving cavity. According to the principles of elasticity, the elastic plug simultaneously undergoes radial expansion. This radial expansion produces two sealing effects: first, it causes the outer peripheral wall of the elastic plug to fit tightly against the inner wall of the receiving cavity, generating radial pressure and forming a first radial seal, thereby isolating the atmosphere from the vacuum channel; second, it causes the inner wall of the through-hole of the elastic plug to contract, fitting tightly against the outer periphery of the thermocouple wire inserted therein, generating radial pressure and forming a second radial seal, thereby preventing gas leakage from the vacuum chamber along the thermocouple wire. This application can simultaneously and reliably establish two independent sealing barriers through a simple tightening action of the gland.
[0008] Compared with the prior art, this application has the following significant advantages: 1. Dual sealing, high reliability: Through the single operation of axially compressing the elastic plug, dual radial sealing of the elastic plug, sleeve and thermocouple wire is achieved simultaneously. The sealing force is uniform and has good adaptability, which greatly reduces the risk of vacuum leakage.
[0009] 2. Simple structure and easy operation: All sealing can be completed by simply tightening the gland. The assembly and maintenance process is simple and quick, without the need for special tools or complicated processes.
[0010] 3. The elastic plug is moved away from the vacuum chamber, extending its service life: Traditional sealing methods use sealing rings and other components directly installed on the high-temperature vacuum chamber to achieve a seal between the thermocouple and the vacuum chamber. This application moves the sealing position of the thermocouple outward through the vacuum pipeline assembly, reducing the impact of the high temperature of the vacuum chamber on sealing components such as the elastic plug.
[0011] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description
[0012] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein: Figure 1 This is a three-dimensional schematic diagram of the assembly structure of the vacuum chamber temperature measuring device provided in the embodiments of this application; Figure 2This is an exploded perspective view of the vacuum chamber temperature measuring device provided in the embodiments of this application; Figure 3 This is a schematic cross-sectional view of the vacuum chamber temperature measuring device provided in the embodiments of this application along the axial direction; Figure 4 yes Figures 1 to 3 A three-dimensional structural diagram of the thermocouple sealing assembly; Figure 5 yes Figure 4 A schematic diagram of the decomposed structure; Figure 6 yes Figure 4 A three-dimensional structural diagram from another perspective; Figure 7 yes Figure 6 A schematic diagram of the decomposed structure; Figure 8 yes Figure 1 and Figure 2 A schematic cross-sectional view of the first pipe section along the axial direction; Figure 9 yes Figure 1 and Figure 2 A three-dimensional structural diagram of the second pipe section; Figure 10 yes Figure 3 Enlarged view of point A in the middle.
[0013] Explanation of reference numerals in the attached figures: Thermocouple assembly 1 Thermocouple wire 101 Detection end 1010 Protective sleeve 102 Thermocouple sealing assembly 2 Connecting sleeve 21 Reception cavity 210 Sleeve body 211 Axial limiting part 2111 Sleeve connection flange 212 Sleeve bolt hole 2120 Knife flange 213 22 elastic plug Through hole 220 Cap 23 Pressure cap through hole 230 gland connection flange 231 2310 gland bolt hole Pressure application section 232 Fastener 24 Rod-shaped structure 25 Vacuum tubing assembly 3 Vacuum Channel 30 First Pipe Section 4 First vacuum channel section 40 Tubular body 41 Entry point 411 Export end 412 Cooling jacket 42 Cooling channel 43 partition 44 Cooling medium inlet 45 Cooling medium outlet 46 Second section 5 Second vacuum channel section 50 First interface 501 Second interface 502 Third Interface 503 First clamp 6 Clamp ring 61 62 elastic sealing ring Second clamp 7 Detailed Implementation
[0014] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.
[0015] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.
[0016] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.
[0017] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0018] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.
[0019] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).
[0020] In the description of the embodiments of this application, the technical terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.
[0021] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.
[0022] In this application, the term "parallel" includes not only absolute parallelism but also approximate parallelism as commonly understood in engineering; similarly, "perpendicular" also includes not only absolute perpendicularity but also approximate perpendicularity as commonly understood in engineering. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.
[0023] The structure and principle of the vacuum eutectic welding furnace provided in the embodiments of this application are described in detail below with reference to the accompanying drawings.
[0024] This application provides a vacuum chamber temperature measuring device, the core of which lies in the integration of an innovative "one-pressure double-seal" sealing mechanism, improving the sealing reliability during thermocouple installation. Please refer to [link / reference]. Figure 1 and Figure 2 , Figure 1This is a three-dimensional schematic diagram of the assembly structure of the vacuum chamber temperature measuring device provided in the embodiments of this application. Figure 2 This is an exploded perspective view of the vacuum chamber temperature measuring device provided in the embodiments of this application. The vacuum chamber temperature measuring device includes a vacuum pipeline assembly 3, a thermocouple sealing assembly 2, and a thermocouple assembly 1.
[0025] Combined Figure 3 , Figure 3 This is a cross-sectional planar structural diagram of the vacuum chamber temperature measuring device provided in the embodiment of this application along the axial direction. The vacuum pipeline assembly 3 has an axially extending vacuum channel 30, one end of which is used to communicate with the vacuum chamber (not shown in the figure).
[0026] Please see Figures 4 to 7 , Figure 4 yes Figures 1 to 3 A three-dimensional structural diagram of the thermocouple sealing assembly 2. Figure 5 yes Figure 4 A schematic diagram of the decomposed structure. Figure 6 yes Figure 4 A three-dimensional structural diagram from another perspective. Figure 7 yes Figure 6 The exploded structural diagram shows that the thermocouple sealing assembly 2 includes a connecting sleeve 21, an elastic plug 22, and a gland 23. The connecting sleeve 21 has an axially extending receiving cavity 210 inside. The connecting sleeve 21 is fixed to the vacuum pipeline assembly 3, and the receiving cavity 210 is connected to the vacuum channel 30. The elastic plug 22 is made of a compressible elastic material and is disposed in the receiving cavity 210 of the connecting sleeve 21. The elastic plug 22 has at least one through hole 220 along its axial direction. The gland 23 is connected to the end of the connecting sleeve 21 away from the vacuum pipeline assembly 3 and is used to apply axial pressure to the elastic plug 22. The gland 23 has a gland through hole 230 corresponding to the through hole 220 of the elastic plug 22.
[0027] Thermocouple assembly 1 includes at least one thermocouple. The thermocouple wire 101 of the thermocouple is sequentially inserted through the pressure cover through hole 230 and the through hole 220, and extends into the vacuum chamber through the vacuum channel 30. That is, the detection end 1010 of the thermocouple wire 101 passes out of the vacuum channel 30 and enters the vacuum chamber to detect the temperature in the vacuum chamber.
[0028] The elastic plug 22 is axially positioned within the receiving cavity 210, such that when the gland 23 is tightened, axial pressure can be applied to the elastic plug 22. The axial pressure applied by the gland 23 to the elastic plug 22 causes the elastic plug 22 to be axially compressed and radially expanded within the receiving cavity 210, thereby simultaneously forming a first radial seal and a second radial seal. The first radial seal is the seal between the outer peripheral wall of the elastic plug 22 and the inner wall of the receiving cavity 210, and the second radial seal is the seal between the inner wall of the through hole 220 and the outer periphery of the thermocouple wire 101.
[0029] Traditional thermocouples are typically introduced directly through a single-point sealing joint (such as a through-wall thermocouple socket) mounted on the wall of a vacuum chamber. The sealing surface of this joint (whether welded, crimped, or with an O-ring) lies directly on the body or flange of the vacuum chamber.
[0030] In this application, the thermocouple is sealed within the thermocouple sealing assembly 2, which is indirectly connected to the vacuum chamber via a vacuum pipeline assembly 3. Therefore, the critical sealing interface is located in a separate, detachable module at a certain distance outside the vacuum chamber. This outward shift of the sealing position cleverly breaks the direct thermal coupling between the thermocouple sealing assembly 2 and the high-temperature vacuum chamber. A thermal resistance path is introduced through the vacuum pipeline assembly 3, achieving temperature isolation and reducing the impact of the high temperature in the vacuum chamber on the service life of the thermocouple sealing assembly 2. It also reduces the high-temperature aging of the critical sealing component (the elastic plug 22 described later) in the thermocouple sealing assembly 2, thereby improving the long-term reliability of the thermocouple seal.
[0031] The thermocouple sealing assembly 2 of this application includes a connecting sleeve 21, an elastic plug 22, and a gland 23. The elastic plug 22 is axially positioned within the receiving cavity 210. When the gland 23 is tightened to the connecting sleeve 21, the gland 23 applies axial pressure to the elastic plug 22. This pressure causes the elastic plug 22 to be axially compressed within the receiving cavity 210. According to the principle of elasticity, the elastic plug 22 simultaneously undergoes radial expansion. This radial expansion produces two sealing effects: first, it causes the outer peripheral wall of the elastic plug 22 to fit tightly against the inner wall of the receiving cavity 210, generating radial pressure and forming a first radial seal; second, it causes the inner wall of the through hole 220 of the elastic plug 22 to contract, fitting tightly against the outer periphery of the thermocouple wire 101 inserted therein, generating radial pressure and forming a second radial seal, thereby preventing gas leakage from the vacuum chamber along the thermocouple wire 101. This application can simultaneously and reliably establish two independent sealing barriers through a simple action of tightening the gland 23.
[0032] It should be noted that the thermocouple wire 101 of the thermocouple needs to be sequentially passed through the pressure cover through hole 230 on the pressure cover 23 and the through hole 220 on the elastic plug 22. Therefore, the pressure cover through hole 230 on the pressure cover 23 and the through hole 220 on the elastic plug 22 should be aligned one by one. The diameters of a pair of corresponding pressure cover through holes 230 and through holes 220 are not necessarily exactly the same, but at least the diameters of both need to be larger than the diameter of the thermocouple wire 101 of the thermocouple. Furthermore, the diameters of the pressure cover through hole 230 and through hole 220 cannot be too small, and must at least meet the condition of facilitating the passage of the thermocouple wire 101.
[0033] The vacuum chamber temperature measuring device provided in this application moves the sealing position of the thermocouple outward through the vacuum pipeline assembly 3, reducing the impact of the high temperature of the vacuum chamber on sealing components such as the elastic plug 22 in the thermocouple sealing assembly 2, and achieves double radial sealing by squeezing the elastic plug 22, thereby improving the sealing reliability of the thermocouple installation and reducing the risk of vacuum leakage in the vacuum chamber.
[0034] Continue reading Figures 4 to 7 In some embodiments, the pressure cap 23 includes a centrally protruding pressure-applying portion 232 and a pressure cap connecting flange 231 surrounding the pressure-applying portion 232; the connecting sleeve 21 is provided with a sleeve connecting flange 212 on its axial end face facing the pressure cap 23; the pressure-applying portion 232 extends into the receiving cavity 210 of the connecting sleeve 21 and abuts against the end face of the elastic plug 22; the pressure cap connecting flange 231 and the sleeve connecting flange 212 are fastened together by fasteners 24.
[0035] The pressure-applying part 232 is the protruding part in the middle of the pressure cap 23. The pressure cap through hole 230 on the pressure cap 23 is located in the area where the pressure-applying part 232 is located. Correspondingly, the pressure cap connecting flange 231 is the part around the pressure cap 23 that is not protruding. The pressure cap connecting flange 231 is used to facilitate the fastening with the connecting sleeve 21. At the same time, since the pressure-applying part 232 is protruding, after the pressure cap connecting flange 231 is connected and fastened to the sleeve connecting flange 212 of the connecting sleeve 21, the pressure-applying part 232 can squeeze the elastic plug 22. The pressure cap 23 adopts this structure so that after the pressure cap 23 is fastened to the connecting sleeve 21, the pressure cap 23 can simultaneously squeeze the elastic plug 22.
[0036] The gland 23 can be fastened to the connecting sleeve 21 by fasteners 24 passing through the gland connecting flange 231 and the sleeve connecting flange 212. The fasteners 24 can be bolts, screws, etc. Correspondingly, the gland connecting flange 231 and the sleeve connecting flange 212 have bolt holes. The bolt holes on the gland connecting flange 231 are gland bolt holes 2310, and the bolt holes on the sleeve connecting flange 212 are sleeve bolt holes 2120. By fastening the bolts 24 through and fastening the corresponding pair of bolt holes on the gland connecting flange 231 and the sleeve connecting flange 212, the connection between the gland connecting flange 231 and the sleeve connecting flange 212 is achieved, thereby fastening the gland 23 to the end of the connecting sleeve 21, so that the gland 23 is in a state of pressing and squeezing the elastic plug 22. It is understood that the embodiments of this application are not limited to bolted connections. The gland connecting flange 231 and the sleeve connecting flange 212 can also be fastened by other mechanical connections or welding.
[0037] The shape and size of the cross-section of the pressure part 232 and the receiving cavity 210 can be the same, that is, the pressure part 232 and the receiving cavity 210 adopt a clearance fit so that the pressure part 232 can more fully compress the elastic plug 22, and the elastic plug 22 can achieve radial expansion after being compressed.
[0038] In some embodiments, the receiving cavity 210 is provided with an axial limiting portion 2111, one end of the elastic plug 22 abuts against the axial limiting portion 2111, and the axial limiting portion 2111 exposes the through hole 220 of the elastic plug 22.
[0039] The axial limiting part 2111 is typically an annular step formed directly by machining on the inner wall of the receiving cavity 210; alternatively, it can be an independent retaining ring, retaining ring, or pad with a central through hole that is pressed into the cavity wall later. The axial limiting part 2111 provides a fixed, immovable fulcrum for the reaction force, serving as the stationary end in the mechanical basis for compressing the elastic plug 22. Furthermore, the axial limiting part 2111 exposes the through hole 220 of the elastic plug 22, meaning the center of the axial limiting part 2111 is a through hole or hollow structure, ensuring that the through hole 220 of the elastic plug 22 remains unobstructed with the vacuum channel 30 on the other side of the axial limiting part 2111, without obstructing the passage path of the thermocouple wire 101.
[0040] The elastic plug 22 is placed inside the receiving cavity 210, with one end tightly abutting against the end face of the axial limiting part 2111, establishing a clear initial positioning. This defines the axial position of the elastic plug 22 within the receiving cavity 210 before compression, ensuring the certainty of the pre-compression stroke. The pressure cap 23 is installed at the end of the connecting sleeve 21, with its pressure-applying part 232 extending into the receiving cavity 210, opposite the other end of the elastic plug 22. That is, the elastic plug 22 is sandwiched between the axial limiting part 2111 and the pressure cap 23. As an active force-applying component, when the pressure cap 23 is tightened (e.g., by tightening a bolt), the pressure-applying part 232 moves toward the axial limiting part 2111, applying axial pressure to the end face of the elastic plug 22.
[0041] The mechanical transmission path and sealing process of this embodiment are as follows: the pressure cap 23 is tightened → the pressure part 232 moves toward the elastic plug 22 → pressure is applied to the end face of the elastic plug 22 → the elastic plug 22 is squeezed between the pressure part 232 and the axial limiting part 2111 → the elastic plug 22 undergoes axial compression and radial expansion (the expanded outer wall is tightly attached to the inner wall of the receiving cavity 210 to form a first radial seal; at the same time, the expansion causes the inner diameter of the through hole 220 of the elastic plug 22 to shrink, and it is tightly attached to the thermocouple wire 101 to form a second radial seal).
[0042] In this embodiment, during assembly, the operator only needs to place the elastic plug 22 into the receiving cavity 210 and make the end face of the elastic plug 22 touch the axial limiting part 2111 to complete the positioning of the elastic plug 22. The assembly process is good and the operation is simple. When the elastic plug 22 needs to be replaced, after the pressure cap 23 is loosened, the old elastic plug 22 will expand axially and contract radially under its own elasticity. The old elastic plug 22 will no longer be tightly attached to the inner wall of the receiving cavity 210. The old elastic plug 22 can be easily removed, and the new elastic plug 22 can be quickly positioned and installed by means of the axial limiting part 2111, which is conducive to the replacement and maintenance of the sealing components.
[0043] In some embodiments, the elastic plug 22 is a replaceable component; by replacing the elastic plug 22 with different through hole 220 diameters, it can accommodate thermocouple wires 101 of different diameters.
[0044] This embodiment features modularity and high adaptability. The elastic plug 22, as an independent component, can be easily replaced with specifications that have different through-hole diameters 220, thereby adapting to thermocouple wires 101 of different diameters. This gives the device a high degree of flexibility and versatility. By purchasing one set of devices and equipping them with a "spare kit" of elastic plugs 22 of different specifications, users can meet the temperature measurement needs of various models and diameters of thermocouples in laboratories or production lines. This greatly expands the application scenarios of a single product and meets the diverse needs of customers.
[0045] In some embodiments, the pressure cap 23 is provided with at least one rod-shaped structure 25 on the outer side opposite to the receiving cavity 210. The rod-shaped structure 25 is configured to fix the protective sleeve 102 of the thermocouple to enhance the mechanical strength of the protective sleeve 102.
[0046] The rod-like structure 25 is typically a rigid rod that is vertically fixed to the outer surface of the pressure cap 23, such as a long screw, a welded column, or an integrally formed protruding column. The number can be one (to form a cantilever support with binding) or multiple (to form a stable multi-point fixation), and the number of rod-like structures 25 can usually be matched with the number of thermocouples.
[0047] The protective sheath 102 of the thermocouple is the object protected by the rod-shaped structure 25. The protective sheath 102 of the thermocouple usually refers to the metal sheath of the armored thermocouple, or a flexible or semi-rigid insulating sheath that is wrapped around the exposed thermocouple wire 101. This part extends outside the device. Under frequent assembly and disassembly or high-temperature vibration environment, the protective sheath 102 of the thermocouple is prone to breakage and has a short service life.
[0048] In this embodiment, the protective sleeve 102 is firmly bound or clamped to the rod-shaped structure 25, which forms a rigid or semi-rigid connection between the protective sleeve 102 and the rod-shaped structure 25. The two move almost as a whole, thereby increasing the mechanical strength of the protective sleeve 102 and reducing the risk of breakage of the protective sleeve 102 under frequent assembly and disassembly or high temperature vibration environment.
[0049] In some embodiments, the vacuum tubing assembly 3 includes a detachably connected first tubing segment 4 and a second tubing segment 5; see also Figure 3 as well as Figure 8 and Figure 9 , Figure 8 yes Figure 1 and Figure 2 A schematic cross-sectional view of the first pipe section along the axial direction. Figure 9 yes Figure 1 and Figure 2 The schematic diagram of the three-dimensional structure of the second pipe section is shown. The first pipe section 4 is used to connect to the vacuum chamber. The second pipe section 5 is a three-way pipe. Its first interface 501 is connected to the first pipe section 4, the second interface 502 is connected to the connecting sleeve 21, and the third interface 503 is used to connect to the vacuum pump (not shown in the figure).
[0050] In this embodiment, the vacuum pipeline assembly 3 includes two independent pipe segments: a first pipe segment 4 and a second pipe segment 5. The two pipe segments are detachably connected, allowing for functional separation. The first pipe segment 4 is dedicated to connecting the vacuum chamber and can be a straight pipe, forming a first vacuum channel segment 40 inside. The second pipe segment 5 is dedicated to serving as a three-way hub, connecting three directions (the first pipe segment 4, the thermocouple sealing assembly 2, and the vacuum pump). The second pipe segment 5 can be a three-way pipe, forming a second vacuum channel segment 50 inside. The first vacuum channel segment 40 and the second vacuum channel segment 50 together constitute the vacuum channel 30.
[0051] The core function of the second pipe section 5, besides providing a thermal resistance path for the thermocouple sealing assembly 2, is mainly to connect the vacuum pump. This reuses the function of the second pipe section 5, eliminating the need for additional vacuum piping to connect to the vacuum pump in the entire system. Furthermore, in this embodiment, the vacuum piping assembly 3 connects both the vacuum pump and the thermocouple sealing assembly 2, integrating the vacuum pump's connection piping and the thermocouple's sealing structure into the same device. Even if the thermocouple sealing assembly 2 fails to seal, the leakage will first occur within the external, independent vacuum piping assembly 3. The leaked gas will be quickly pumped away by the vacuum pump, significantly reducing the risk of harmful process gases leaking directly from the vacuum chamber into the atmosphere or a large influx of air into the chamber. This is equivalent to adding a "buffer / isolation zone" between the vacuum chamber and the external environment, further reducing the risk of sealing leaks in the vacuum chamber.
[0052] The core purpose of using a detachable connection between the first pipe segment 4 and the second pipe segment 5 in this embodiment includes: First, it achieves spatial decoupling and sequential optimization of installation and maintenance: This is the most direct and fundamental purpose. The interface positions of the vacuum chamber are usually fixed and restricted. Splitting the vacuum piping assembly 3 into two sections brings great flexibility to the installation process. During installation, the first pipe section 4 can be docked and fixed to the vacuum chamber, which is difficult to move. Then, the second pipe section 5 (tee pipe), as an independent component, can rotate and move freely in space to connect the first pipe section 4, the thermocouple sealing assembly 2, and the vacuum pump piping in the best posture. This solves the almost impossible problem of aligning multiple interfaces of a single complex component in a narrow space. During maintenance, if the second pipe section 5 or its second interface 502 (for connecting the thermocouple assembly 1) or third interface 503 (for connecting the vacuum pump) needs maintenance, replacement, or cleaning, only the second pipe section 5 can be disassembled without disturbing the first pipe section 4, which is already sealed to the vacuum chamber.
[0053] Secondly, it provides flexibility in system configuration and fault isolation: the first pipe section 4 and the second pipe section 5 can be designed as standard modules of different lengths and materials. Users or system integrators can select the appropriate length of the first pipe section 4 to match according to the physical layout of the specific equipment (distance from the chamber interface to the installation position) without having to customize the entire complex piping assembly. If the first pipe section 4 (especially the part near the high-temperature chamber) is damaged due to overheating, corrosion or mechanical damage, the first pipe section 4 can be replaced separately without scrapping the entire tee hub and the second pipe section 5. This enables rapid replacement of faulty components and cost control.
[0054] In short, the core purpose of the detachable connection of the first pipe section 4 and the second pipe section 5 is to solve the spatial constraints and multi-interface alignment problems faced by a complex L-shaped or T-shaped integral pipeline in the installation of a vacuum system. By breaking down a complex structure with integrated functions into two simple modules with focused functions and connected by detachable interfaces, the difficult problem of simultaneous alignment of multiple interfaces in three-dimensional space is reduced to a simple sequential series docking problem. This greatly reduces the installation difficulty and the accuracy requirements, and physically creates a clear maintenance disconnect point, so that the maintenance of the latter part of the device (temperature measurement and pumping part) can be isolated from the main body of the vacuum chamber, improving the convenience and safety of maintenance operations.
[0055] In other embodiments, the vacuum tubing assembly 3 may also be a single, non-removable tubing structure.
[0056] In some embodiments, the second interface 502 of the second pipe segment 5 is detachably connected to the connecting sleeve 21.
[0057] In this embodiment, when the thermocouple sealing assembly 2 needs to be repaired or replaced, it is only necessary to disconnect its connection with the second interface 502 of the second pipe section 5 (tee pipe) to remove it as a whole. This does not affect the sealing and status of the main valve of the vacuum chamber and the vacuum pump pipeline, which greatly simplifies the maintenance process and shortens the downtime.
[0058] In some embodiments, the first pipe segment 4 and the second pipe segment 5 are detachably connected by clamps.
[0059] In some embodiments, the second interface 502 and the connecting sleeve 21 are detachably connected by a clamp.
[0060] In this embodiment, the connection and sealing between the end 412 of the first pipe section 4 and the first interface 501 of the second pipe section 5, and between the second interface 502 of the second pipe section 5 and the inlet end of the connecting sleeve 21 (the knife-edge flange 213 of the connecting sleeve 211), are achieved through clamps, enabling rapid assembly and disassembly and improving sealing reliability. This requires that the end 412 of the first pipe section 4, the first interface 501 and the second interface 502 of the second pipe section 5, and the inlet end of the connecting sleeve 21 all be processed or assembled into standard interfaces that match the selected clamp specifications, i.e., uniformly interchangeable standard parts at the interfaces. The clamp between the end 412 of the first pipe section 4 and the first interface 501 of the second pipe section 5 can be referred to as the first clamp 6, and the clamp between the second interface 502 of the second pipe section 5 and the inlet end of the connecting sleeve 21 can be referred to as the second clamp 7.
[0061] Please see Figure 10 , Figure 10 yes Figure 3 Enlarged view of point A in the middle. Figure 10 The diagram illustrates the specific structure of the connection and sealing between the end 412 of the first pipe section 4 and the first interface 501 of the second pipe section 5 via the first clamp 6. The structure of the connection and sealing between the second interface 502 of the second pipe section 5 and the knife-edge flange 213 of the connecting sleeve 21 via the second clamp 7 is similar. The structures of the first clamp 6 and the second clamp 7 can be the same or different, as long as a detachable connection is achieved. Taking the example where the structures of the first clamp 6 and the second clamp 7 are the same, the first clamp 6 is a standardized quick-connect and sealing actuator. Its physical form is typically a vacuum clamp (such as ISO-KF type or small ISO-F type), consisting of two semi-circular clamp rings 61, an elastic sealing ring 62 (O-ring or central sealing ring), and a set of fastening bolts / nuts. The clamp achieves integrated, standardized, and rapid connection and sealing. By tightening the bolts, the two pipe fitting end faces with standard knife edges or flanges are mechanically pulled together and fixed to achieve the connection function; during the tightening process, the elastic sealing ring 62 pre-placed between the two pipe fitting end faces is squeezed, causing it to deform and fill all micro gaps, thereby forming a reliable vacuum static seal.
[0062] Please see Figure 8 In some embodiments, the first pipe segment 4 includes a tubular body 41 and a cooling sleeve 42 sleeved and fixed to the outside of the tubular body 41; a surrounding cooling channel 43 is formed between the inner wall of the cooling sleeve 42 and the outer wall of the tubular body 41; the cooling sleeve 42 is provided with a cooling medium inlet 45 and a cooling medium outlet 46 communicating with the cooling channel 43, and the cooling medium inlet 45 and the cooling medium outlet 46 are spaced apart along the axial direction of the tubular body 41.
[0063] In this embodiment, an active heat exchange system is integrated on the first pipe section 4 to address the risk of thermal damage to the clamp seal and the elastic plug 22 seal caused by the high-temperature vacuum process environment.
[0064] The tubular body 41 serves as the component for sealing the connection at both ends of the first pipe section 4, and also as the core flow channel and heat conduction body. Its physical form is a straight metal (usually stainless steel) pipe, with an internal first vacuum channel section 40 forming part of the vacuum channel 30. The inlet end 411 of the tubular body 41 is directly and fixedly connected to the vacuum channel 30, and the outlet end 412 (i.e., the end of the tubular body 41) is connected to the first interface 501 of the second pipe section 5 via a first clamp 6. Both the inlet end 411 and the outlet end 412 of the tubular body 41 are knife-edge or flange-shaped for easy external connection. The core functions of the tubular body 41 are: firstly, to act as the physical boundary of the vacuum channel 30, bearing the internal and external pressure difference and ensuring smooth airflow; secondly, to act as the first heat conduction path, with heat axially conducted from the high-temperature vacuum chamber side through the metal pipe wall to the other end of the tubular body 41; and thirdly, to act as a heat exchange interface, with its outer wall becoming the main heat transfer surface for heat exchange with the cooling medium.
[0065] The cooling jacket 42, as an external active heat exchanger housing, is a cylindrical outer shell that fits over the tubular body 41. It is usually fixedly connected to the tubular body 41 by welding, interference fit, or threads to form a sealed jacket. Its core functions are: first, to form a sealed flow channel, which together with the outer wall of the tubular body 41 encloses the cooling flow channel 43; second, to bear pressure and seal, acting as a pressure vessel to withstand the pressure of the cooling medium and ensure the sealing of the cooling flow channel 43 to prevent coolant leakage; and third, to serve as a second heat conduction path, absorbing the heat transferred from the tubular body 41 and carried away by the cooling medium.
[0066] The cooling channel 43 serves as a heat exchange area. Its physical form is an annular space between the tubular body 41 and the cooling jacket 42. Its core function is to guide the flow of the cooling medium inside and maximize its contact area and contact time with the high-temperature pipe wall. It is the core area where heat is actively removed.
[0067] The cooling medium inlet 45 and the cooling medium outlet 46 serve as channels for the cooling medium to flow into and out of the cooling channel 43, enabling the circulation and renewal of the cooling medium. Furthermore, the cooling medium inlet 45 and the cooling medium outlet 46 maintain a distance along the axial direction of the tubular body 41, which determines the basic flow pattern of the cooling medium within the cooling channel 43 as flowing from one end to the other, ensuring that the cooling medium can flow through the entire length of the pipe section requiring cooling.
[0068] The cooling medium (usually water or a special coolant) acts as a heat carrier. When the cooling medium flows through the cooling channel 43, it absorbs the heat from the outer wall of the tubular body 41 through convection heat transfer. After its own temperature rises, it is discharged from the cooling medium outlet 46, carrying the heat away from the system.
[0069] This embodiment integrates active cooling into the first pipe section 4, creating an active and efficient thermal protection layer for the entire device. This protects the core sealing components (the elastic sealing ring 62 within the clamp and the elastic plug 22 in the thermocouple sealing assembly 2), reducing seal failures caused by high temperatures and extending the device's lifespan. Furthermore, it improves temperature measurement accuracy and stability. Cooling lowers the temperature of the outer wall of the pipe, thereby reducing its thermal radiation interference to nearby thermocouple wires 101, which helps improve the accuracy of the temperature measurement signal. Active cooling also provides a stable and controllable boundary temperature, reducing the thermal shock to the temperature measuring device body caused by process temperature fluctuations, thus placing the entire system in a more stable thermodynamic state.
[0070] Continue reading Figure 8 In some embodiments, a plurality of baffles 44 are provided in the cooling channel 43, which are spaced apart along the axial direction of the tubular body 41; each baffle 44 divides the cooling channel 43 into a plurality of chambers connected in series; each baffle 44 is provided with a baffle through hole that connects two adjacent chambers, and the baffle through holes on adjacent baffles 44 are radially staggered from each other.
[0071] Among them, the baffle 44 is a flow guiding and turbulence-inducing element within the cooling channel 43. Its physical form is an annular plate structure, with its outer edge sealed to the inner wall of the cooling jacket 42 (usually welded), and its inner edge sealed to the outer wall of the tubular body 41. Multiple baffles 44 are distributed equidistantly or unequally along the axial direction. The core function of the multiple baffles 44 is to divide the space, physically separating the originally continuous annular cooling channel 43 into multiple independent chambers. At the same time, in conjunction with the through holes of the baffles, they force and define the flow path of the cooling medium, preventing it from passing through in a straight line at high speed, thereby increasing the cooling path.
[0072] The baffle through-holes on the baffle 44 are the only directional communication ports between the chambers, that is, the only channel for the cooling medium to flow from one chamber to the next. Furthermore, the baffle through-holes on adjacent baffles 44 are radially staggered, meaning that the baffle through-holes on adjacent baffles 44 are not in the same position in the circumferential direction, which greatly extends the effective flow path of the cooling medium and improves the heat absorption rate.
[0073] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0074] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.
Claims
1. A vacuum chamber temperature measuring device, characterized in that, include: A vacuum piping assembly having an axially extending vacuum channel, one end of which is used to communicate with a vacuum chamber; Thermocouple sealing assembly, including: A connecting sleeve has an axially extending receiving cavity inside. The connecting sleeve is fixed to the vacuum pipeline assembly, and the receiving cavity is connected to the vacuum channel. An elastic plug, made of a compressible elastic material, is disposed in the receiving cavity of the connecting sleeve, and the elastic plug has at least one through hole along its axial direction; A pressure cap is connected to the end of the connecting sleeve away from the vacuum pipeline assembly and is used to apply axial pressure to the elastic plug. The pressure cap has a pressure cap through hole corresponding to the through hole of the elastic plug. A thermocouple assembly includes at least one thermocouple, wherein the thermocouple wires of the thermocouple are sequentially passed through the pressure cap through hole and the through hole, and extend into the vacuum chamber via the vacuum channel; The elastic plug is axially positioned within the receiving cavity such that when the gland is tightened, axial pressure can be applied to the elastic plug. This axial pressure causes the elastic plug to be axially compressed and radially expanded within the receiving cavity, simultaneously forming: First radial seal: a seal between the outer peripheral wall of the elastic plug and the inner wall of the receiving cavity; and Second radial seal: a seal between the inner wall of the through hole and the outer periphery of the thermocouple wire.
2. The vacuum chamber temperature measuring device according to claim 1, characterized in that, The gland includes a centrally protruding pressure-applying portion and a gland connection flange surrounding the pressure-applying portion; The connecting sleeve is provided with a sleeve connecting flange on its axial end face facing the gland; The pressure-applying part extends into the receiving cavity of the connecting sleeve and abuts against the end face of the elastic plug. The gland connecting flange and the sleeve connecting flange are fastened together by fasteners.
3. The vacuum chamber temperature measuring device according to claim 1, characterized in that, The cavity is provided with an axial limiting part, one end of the elastic plug abuts against the axial limiting part, and the axial limiting part exposes the through hole of the elastic plug.
4. The vacuum chamber temperature measuring device according to claim 1, characterized in that, The elastic plug is a replaceable component; by replacing the elastic plug with different through-hole diameters, it can accommodate thermocouple wires of different diameters.
5. The vacuum chamber temperature measuring device according to claim 1, characterized in that, The pressure cap has at least one rod-shaped structure on its outer side away from the receiving cavity. The rod-shaped structure is configured to fix the protective sleeve of the thermocouple to enhance the mechanical strength of the protective sleeve.
6. The vacuum chamber temperature measuring device according to claim 1, characterized in that, The vacuum tubing assembly includes a detachably connected first tubing segment and a second tubing segment; The first pipe section is used to connect to the vacuum chamber; The second pipe section is a tee pipe, with its first port connected to the first pipe section, its second port connected to the connecting sleeve, and its third port used to connect to the vacuum pump.
7. The vacuum chamber temperature measuring device according to claim 6, characterized in that, The second interface of the second pipe section is detachably connected to the connecting sleeve.
8. The vacuum chamber temperature measuring device according to claim 6 or 7, characterized in that, The first pipe segment and the second pipe segment, and / or the second interface and the connecting sleeve are detachably connected by clamps.
9. The vacuum chamber temperature measuring device according to claim 6, characterized in that, The first pipe section includes: Tubular body, and A cooling jacket fitted and fixed to the outside of the tubular body; The inner wall of the cooling jacket forms a surrounding cooling channel with the outer wall of the tubular body; the cooling jacket is provided with a cooling medium inlet and a cooling medium outlet communicating with the cooling channel, and the cooling medium inlet and the cooling medium outlet are spaced apart along the axial direction of the tubular body.
10. The vacuum chamber temperature measuring device according to claim 9, characterized in that, The cooling channel is provided with multiple baffles spaced apart along the axial direction of the tubular body; Each of the aforementioned baffles divides the cooling channel into multiple chambers connected in series; Each of the partitions has a partition through hole that connects two adjacent chambers, and the partition through holes on adjacent partitions are radially offset from each other.