High-voltage pulse deburring device and using method thereof

Abstract

The invention relates to a high-voltage pulse deburring device and a using method thereof, and belongs to the technical field of electric vacuum device manufacturing, the high-voltage pulse deburring device comprises an ignition power supply unit, a pulse modulation and boosting unit, an energy power supply unit, a pulse forming network, a detection power supply unit and an output terminal, high-voltage ignition pulses are modulated by the pulse modulation and boosting unit; the energy power supply unit outputs a second direct-current voltage; and the detection power supply unit outputs a third direct-current high voltage and cooperates with the double-range leakage current detection meter to perform a withstand voltage test. According to the invention, the functions of ignition, ablation and detection are integrated, and the deburring process which is efficient, energy-saving, accurate and controllable in energy, free of damage to electrodes and simplified in process is realized through ignition and ablation separation design, pulse width and hot melting time constant matching, automatic switching of circuit isolation devices and safe interlocking of a control unit.

Description

Technical Field

[0001] This invention relates to the field of electro-vacuum device manufacturing technology, and in particular to a high-voltage pulse deburring device and its usage method. Background Technology

[0002] During the manufacturing process of vacuum electronic devices (such as vacuum switch tubes, electron tubes, ion thrusters, etc.), tiny burrs, sharp points, or residual dirt will inevitably be generated on the electrode surface. These defects can become the trigger points for field emission when the device is subjected to high voltage, leading to a decrease in the device's withstand voltage performance or even breakdown damage. Therefore, deburring is a key process in the production of vacuum electronic devices.

[0003] Traditional deburring methods mainly include DC high-voltage aging, AC high-voltage aging, and pulse aging. These methods generally have the following problems: 1. High energy consumption: Traditional equipment requires a current-limiting resistor to be connected in series in the high-voltage circuit to prevent short-circuit discharge. More than 90% of the power is consumed in the current-limiting resistor. The power of the equipment is usually between several kilowatts and tens of kilowatts, resulting in serious energy waste. 2. Low efficiency and uncontrollable: The aging time varies from half an hour to more than ten hours, resulting in low production efficiency. Due to the fixed resistance value of the current limiting resistor, the ignition discharge current increases synchronously with the voltage increase. In the low voltage stage, the current is small and the ablation energy is insufficient, which leads to the extension of the process. In the high voltage stage, the current is large and the energy is too large, which easily produces new ablation defects on the electrode surface, making it difficult to achieve precise control. 3. Limited functionality: Deburring equipment and pressure testing equipment are usually separate, which increases process flow and time costs; 4. Easily damaged devices: Traditional high-voltage, low-current continuous discharge methods, although the current is small, have a long duration, and the device as a whole absorbs more energy, which can easily cause overheating or irreversible damage.

[0004] Therefore, developing a deburring device that is efficient, energy-saving, controllable, and does not damage the device has become an urgent technical problem to be solved in this field. Summary of the Invention

[0005] This invention provides a high-pressure pulse deburring device and its usage method, which solves the problems of high energy consumption, low efficiency, uncontrollable energy, easy damage to devices, and process separation in traditional deburring technology, and realizes a high-efficiency, energy-saving, controllable and safe deburring process.

[0006] The present invention provides the following solution to the above-mentioned technical problems: a high-voltage pulse deburring device and its usage method, comprising an ignition power supply unit, a pulse modulation and boosting unit, an energy power supply unit, a pulse forming network, a detection power supply unit, and an output terminal, wherein the ignition power supply unit is used to generate an adjustable first DC voltage; The pulse modulation and boosting unit is connected to the ignition power supply unit and is used to modulate the first DC voltage into a pulse and boost it to finally output a high-voltage ignition pulse. This high-voltage ignition pulse is applied between the two electrodes of the vacuum device to break down the vacuum gap and form a discharge channel. The energy supply unit is used to generate an adjustable second DC voltage; The pulse forming network is connected to the energy power supply unit to store electrical energy and release a large current pulse through the discharge channel after the discharge channel is formed to ablate the burrs. The detection power supply unit is used to generate an adjustable third DC high voltage, and a leakage current detection meter is connected in series in its circuit for testing the withstand voltage and leakage current of the device after deburring. The output terminals include a high-voltage output terminal and a ground output terminal, which are used to connect to the device to be processed.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] Furthermore, the pulse modulation and boosting unit includes a pulse modulation switch and a high boost ratio pulse transformer. The pulse modulation switch modulates the first DC voltage into a pulse current with a repetition frequency of 0.5Hz. The high boost ratio pulse transformer is connected to the pulse modulation switch and boosts the pulse voltage to ultimately output a high-voltage ignition pulse with a peak value of 80kV. The pulse modulation switch can convert a continuous DC voltage into an intermittent pulse current. By controlling the pulse repetition frequency (0.5Hz), the high-voltage ignition pulse is applied between the electrodes at a lower repetition frequency, which ensures effective breakdown of the vacuum gap to form a discharge channel while avoiding electrode overheating or material fatigue caused by continuous high-voltage discharge. The high boost ratio pulse transformer can boost the voltage to a high peak value of 80kV in a short time, meeting the high voltage conditions required for vacuum gap breakdown in electro-vacuum devices. This ensures reliable ignition within a wide range of gap distances and vacuum levels, improving the versatility and ignition success rate of the device.

[0009] Furthermore, the second DC voltage output by the power supply unit is 0-2500V, and the peak value of the ablation pulse current output by the pulse forming network is 0-250A with a pulse width of 250μs. This pulse width is set to match the thermal melting time constant of the burr to avoid thermal damage to the electrode body while ablating the burr. The specific limitations on the output voltage range, peak value of the ablation pulse current, and pulse width of the power supply unit have the following functions and advantages: The maximum output voltage of 2500V and the peak current of 250A provide sufficient energy density to ensure a sufficient Joule heating effect on the metal burr, causing it to melt or vaporize rapidly. The 250μs pulse width is carefully selected; this timescale matches the thermal melting time constant of the metal burr—long enough to concentrate heat sufficiently in the burr micro-area and ablate it, and short enough to prevent a large amount of heat from diffusing to the electrode substrate. This effectively removes the burr while maximizing the protection of the electrode body from thermal damage, ensuring that the geometric accuracy and electrical performance of the device after processing are not affected.

[0010] Furthermore, the third DC high voltage output of the detection power supply unit is 0-80kV, and the leakage current detector has at least two ranges, 0-200μA and 0-2mA. The multi-range settings of the detection power supply unit's output voltage range and the leakage current detector offer the following functions and advantages: The adjustable DC high voltage output of 0-80kV allows the detection power supply unit to simulate the withstand voltage state of vacuum electronic devices under actual working conditions, enabling rigorous withstand voltage testing of devices that have undergone deburring treatment, ensuring their reliability in practical applications. The 0-200μA and 0-2mA ranges of the leakage current detector balance the needs for high-precision and wide-range measurement: in the small current range (0-200μA), minute changes in leakage current can be accurately detected, promptly identifying potential insulation defects; in the large current range (0-2mA), potentially larger leakage currents can be measured, avoiding the inability to read values ​​or damage to the instrument due to an excessively small range. This multi-range design improves the accuracy of detection and the applicability of the instrument.

[0011] Furthermore, a discharge current-limiting resistor is connected in series between the energy power supply unit and the pulse forming network. This series connection of the discharge current-limiting resistor between the energy power supply unit and the pulse forming network has the following functions and advantages: When the pulse forming network releases a large current pulse through the discharge channel, the current-limiting resistor can limit the current flowing directly from the energy power supply unit to the discharge circuit, preventing the energy power supply unit from being impacted or damaged due to excessive instantaneous discharge current, thus protecting the power supply. Simultaneously, this resistor also helps stabilize the charging process of the pulse forming network, ensuring that the pulse forming network stores consistent electrical energy before each discharge, thereby ensuring good consistency and controllability of the energy of each ablation pulse.

[0012] Furthermore, a circuit isolation device is connected in series between the pulse forming network and the high-voltage output terminal. When the vacuum gap is not broken down, the circuit isolation device is in a cutoff or high-resistance state, used to apply the energy stored in the pulse forming network as a voltage to the two electrodes of the device to assist ignition. After the vacuum gap is broken down, it automatically switches to a conduction or low-resistance state, allowing the pulse forming network to discharge to the device. The circuit isolation device connected in series between the pulse forming network and the high-voltage output terminal has the following functions and advantages: When the vacuum gap is not broken down, the device is in a cutoff or high-resistance state, preventing the energy stored in the pulse forming network from flowing directly to the output terminal. Instead, it is applied as a voltage between the two electrodes of the device, effectively assisting ignition—it allows the high-voltage ignition pulse and the stored voltage to act together on the gap, improving the success rate of breakdown. Once the vacuum gap is broken down, forming a discharge channel, the isolation device can automatically and quickly switch to a conduction or low-resistance state, instantly releasing the energy stored in the pulse forming network through the discharge channel, achieving the ablation of burrs. This design avoids premature discharge of the energy storage network before the gap breaks down, eliminates the need for additional triggering circuits, simplifies the circuit structure, and improves the reliability and response speed of the discharge.

[0013] Furthermore, it also includes a control unit configured to automatically cut off the output of the ignition power unit and the energy power unit when the detection power unit is activated for leakage current detection. Setting up the control unit and configuring the aforementioned linkage cut-off function has the following functions and advantages: Automatically cutting off the output of the ignition power unit and the energy power unit during leakage current detection completely avoids interference from high-voltage ignition pulses or ablation pulses on the detection process, ensuring that leakage current detection is performed under pure DC high-voltage conditions, thereby obtaining accurate and reliable detection results. Simultaneously, this automatic cut-off function also prevents discharge caused by misoperation or accidental triggering during the detection process, ensuring the safety of the operator and the integrity of the device under test, and achieving safe isolation and automatic switching between the deburring and detection processes.

[0014] The present invention also provides a method of using the above-mentioned high-pressure pulse deburring device, comprising the following steps: S1. Connect the two electrodes of the vacuum electronic device to be processed to the high-voltage output terminal and the ground output terminal respectively; S2. Start the energy power unit and adjust its output voltage to the preset value so that it corresponds to the preset ignition current value; S3. Start the ignition power unit and adjust its output voltage to the preset ignition voltage value so that the high-voltage ignition pulse is automatically applied to the device at a frequency of 0.5HZ until the device is broken down and discharged. Repeat this process until the discharge current is stable, indicating that the burrs have been removed. S4. Automatically or manually disconnect the ignition power supply unit and the energy power supply unit, start the detection power supply unit, adjust its output voltage to the specified detection voltage value, and read the leakage current of the device through the leakage current detection meter. S5. Stop the power supply unit, discharge the high voltage output terminal, and then remove the device.

[0015] The beneficial effects of this invention are as follows: This invention provides a high-pressure pulse deburring device and its method of use, which has the following advantages: 1. A highly efficient and energy-saving deburring process has been achieved. It adopts the principle of pulsed energy release, and generates a high-voltage ignition pulse through the ignition power unit and the pulse modulation and boosting unit to break down the vacuum gap and form a discharge channel. Once the discharge channel is established, the energy power unit and the pulse forming network immediately release a large current ablation pulse through the channel, so that almost all the ablation energy is used for the melting and vaporization of the burrs. Unlike traditional technologies, there is no need to consume energy by connecting a high-power current-limiting resistor in the high-voltage circuit, which significantly reduces the power consumption and operating cost of the equipment. 2. Precise controllability of ablation energy is achieved, avoiding damage to the electrode body. The ignition and ablation functions are designed separately, and the parameters of the ablation pulse are optimized and limited. The energy power supply unit outputs an adjustable second DC voltage of 0-2500V, and the pulse forming network outputs an ablation pulse with a peak value of 0-250A and a width of 250μs. The pulse width is precisely matched with the thermal melting time constant of the metal burr. This provides sufficient energy density to rapidly melt and vaporize the burr micro-area, while strictly controlling the heat in the burr local area to prevent heat from diffusing to the electrode body substrate. Thus, while thoroughly removing burrs, it effectively avoids secondary melting or thermal damage to the electrode surface caused by uncontrollable energy in traditional processes, ensuring the geometric accuracy and electrical performance of the device after processing. 3. It integrates both deburring and withstand voltage testing functions, simplifying the process flow. It integrates a test power supply unit, which can output an adjustable third DC high voltage of 0-80kV. A leakage current tester with dual ranges of 0-200μA and 0-2mA is connected in series in the circuit. One device can complete both deburring and withstand voltage testing, reducing equipment investment and process flow time. The design of the multi-range leakage current tester can accurately measure small leakage current to find potential insulation defects, and can also cover the measurement range of larger leakage current, improving the accuracy and applicability of the test. 4. Improved ignition reliability and discharge response speed: A circuit isolation device is connected in series between the pulse forming network and the high-voltage output terminal. When the vacuum gap is not broken down, this device is in a cutoff or high-resistance state, allowing the electrical energy stored in the pulse forming network to be applied to the electrodes in the form of voltage. This voltage, together with the high-voltage ignition pulse, acts on the gap, significantly improving the breakdown success rate. Once the vacuum gap is broken down, the isolation device can automatically and quickly switch to a conducting state, allowing the electrical energy stored in the pulse forming network to be released instantaneously through the discharge channel. No additional triggering circuit is required, simplifying the circuit structure and improving the reliability and response speed of the discharge. 5. It achieves safe isolation and automatic switching between deburring and testing processes. When the control unit starts the testing power supply unit for leakage current detection, it automatically cuts off the output of the ignition power supply unit and the energy power supply unit. This design completely avoids interference from high-voltage ignition pulses or ablation pulses on the testing process, ensuring that leakage current detection is carried out under pure DC high voltage conditions and obtaining accurate and reliable test results. At the same time, it prevents discharge caused by misoperation or accidental triggering during the testing process, ensuring the safety of operators and the integrity of the device under test.

[0016] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it according to the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Specific embodiments of the present invention are given in detail below with reference to the accompanying drawings. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 An electrical principle block diagram of a high-voltage pulse deburring device and its usage method provided in an embodiment of the present invention; Figure 2 A system architecture diagram of a high-pressure pulse deburring device and its usage method provided in an embodiment of the present invention; Figure 3 A flowchart illustrating a high-pressure pulse deburring device and its usage method according to an embodiment of the present invention. Detailed Implementation

[0018] The following is in conjunction with the appendix Figure 1-3The principles and features of the present invention are described below. The examples given are for illustrative purposes only and are not intended to limit the scope of the invention. The invention is described more specifically in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the invention.

[0019] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0020] like Figure 1-3 As shown, the present invention provides a high-voltage pulse deburring device and its usage method, including an ignition power supply unit, a pulse modulation and boosting unit, an energy power supply unit, a pulse forming network, a detection power supply unit, an output terminal, and preferably a control unit; Specifically, the ignition power unit is used to generate an adjustable first DC voltage. In one specific embodiment, the ignition power unit can be an adjustable DC regulated power supply, whose output voltage can be adjusted according to the breakdown characteristics of the vacuum gap of the device to be processed, for example, the adjustment range is 0-1000V DC. The pulse modulation and boost unit is electrically connected to the ignition power supply unit. This unit is used to modulate the first DC voltage output by the ignition power supply unit into a pulse form and boost it to finally output a high-voltage ignition pulse. This high-voltage ignition pulse is applied between the two electrodes of the vacuum device, and its peak voltage is sufficient to break down the vacuum gap and form an instantaneous discharge channel. In a preferred embodiment, such as Figure 2 As shown, the pulse modulation and boost unit includes a pulse modulation switch and a high boost ratio pulse transformer. The pulse modulation switch (e.g., a semiconductor switching device such as an IGBT or thyristor) is used to chop and modulate the continuous first DC voltage to form a pulse current with a repetitive frequency. In this embodiment, the repetition frequency is set to 0.5Hz, which is an optimal value verified by experiments. This ensures sufficient chance for the gap to break down and avoids local overheating of the electrodes due to excessive frequency. The high boost ratio pulse transformer is connected to the output terminal of the pulse modulation switch. Its primary winding receives the pulse current, and its secondary winding induces a high voltage pulse. By designing the transformer's turns ratio (e.g., the boost ratio can reach 1:100 or higher), a high voltage ignition pulse with a peak value of up to 80kV is finally output. This design allows the device to adapt to devices with different gap distances and vacuum levels, making it highly versatile and with a high ignition success rate. The energy power supply unit is used to generate an adjustable second DC voltage. This unit can also be an adjustable DC regulated power supply, and its output voltage is adjusted independently of the ignition power supply unit. The pulse forming network is connected to the energy power supply unit. The core function of this network is to store electrical energy and release a large current pulse instantaneously through the discharge channel after the discharge channel is formed. The powerful Joule heating effect is used to ablate the burrs. The pulse forming network is usually composed of a group of high voltage capacitors and inductors in a specific topology (such as Blumlein lines, Guillemin networks, etc.) to shape the waveform of the discharge pulse. In this embodiment, the second DC voltage output by the power supply unit is adjustable from 0 to 2500V. The pulse forming network charges and stores energy accordingly, and the peak value of its output ablation pulse current can reach 0 to 250A. The pulse width (half-width at half maximum) is designed to be 250μs. This 250μs pulse width was determined through a large number of experiments and matches the hot melting time constant of the metal burr. Its physical significance is that this time scale is sufficient to concentrate energy on the micron-level burr tip, causing it to heat up rapidly, melt, or even vaporize. However, due to the extremely short time, the heat does not have time to diffuse to the electrode substrate. Thus, while thoroughly removing the burr, the surface smoothness and material properties of the electrode substrate are protected to the maximum extent, avoiding the electrode surface "pockmarking" or thermal damage problems commonly seen in traditional aging processes. To protect the power supply unit, a discharge current-limiting resistor is connected in series between the power supply unit and the pulse forming network. The resistance value of this resistor is calculated so that when the pulse forming network releases a large current through the discharge channel, it can effectively limit the current flowing directly from the power supply unit to the discharge circuit, preventing instantaneous large current from damaging the delicate power supply circuit. At the same time, the time constant of the charging circuit formed by this resistor and the charging capacitor of the pulse forming network helps to stabilize the charging process and ensure that the electrical energy stored in the pulse forming network before each discharge has good consistency, so that the energy of each ablation pulse is controllable and repeatable. In a key implementation, a circuit isolation device is connected in series between the pulse forming network and the high-voltage output terminal. This device has a unique automatic switching function: when the vacuum gap is not broken down, it is in a cutoff or high-resistance state, acting like an open switch, isolating the high-voltage energy stored in the pulse forming network outside the output terminal. At this time, the energy is applied only as voltage between the two electrodes of the device through the isolation device, effectively playing the role of auxiliary ignition—it allows the high voltage of the ignition pulse and the stored voltage to act together on the gap, enhancing the electric field strength of the gap and improving the breakdown success rate. Once the high-voltage ignition pulse successfully breaks down the vacuum gap... As a discharge channel is formed, the gap impedance drops sharply. The circuit isolation device can automatically and instantaneously switch to a conducting or low-resistance state by utilizing the change in voltage or the establishment of current across its terminals. At this time, the huge electrical energy stored in the pulse forming network is released without hindrance through the isolation device and the formed discharge channel, achieving concentrated ablation of burrs. This design cleverly isolates and links the "ignition" and "ablation" stages in the circuit, eliminating the need for complex electronic trigger circuits, simplifying the system structure, and improving the reliability and response speed of the action. The isolation device can use a specially designed high-voltage trigger gap, trigger tube, or semiconductor device with similar characteristics. The detection power supply unit is used to perform withstand voltage and leakage current tests on the device after the deburring process is completed. The unit outputs an adjustable third DC high voltage, and its output terminal is connected to the high voltage output terminal through a leakage current tester. The detection circuit is connected in series in the circuit. In this embodiment, the third DC high voltage output of the detection power supply unit has an adjustment range of 0-80kV, which can simulate the withstand voltage of vacuum electronic devices under various actual operating conditions. The leakage current detection meter has at least two ranges, namely 0-200μA and 0-2mA. The advantage of this design is that when testing normal devices with high insulation performance, the leakage current is usually in the microampere level. Using the small range of 0-200μA can obtain high-precision readings and detect small insulation defects in time. If the device has hidden dangers or insufficient withstand voltage, the leakage current may reach the milliampere level. At this time, switching to the large range of 0-2mA can avoid pointer failure or instrument overload due to the small range, thus ensuring the safety and effectiveness of the measurement. The output terminals include high-voltage output terminals and grounding output terminals, which are used to conveniently and safely connect to the vacuum electronic device to be processed via a high-voltage cable. To further improve the automation and safety of the operation, the device preferably also includes a control unit, which can be a PLC (Programmable Logic Controller), a microcontroller, or an embedded system, connected to a human-machine interface (such as a touch screen). The control unit is configured to automatically cut off the output of the ignition power unit and the energy power unit when the detection power unit is started to detect leakage current. This achieves hardware isolation between the deburring and detection processes, ensures the purity of the detection environment, avoids high-voltage pulse interference with the detection results, and also prevents accidental ignition during the test, thus preventing safety accidents. The specific working principle and usage method of the present invention are as follows: Step S1, connecting the device: connect the two electrodes of the vacuum device to be processed (such as a vacuum interrupter) to the high voltage output terminal and the grounding output terminal of the device respectively through a high voltage cable, ensuring that the connection is firm and without looseness, and complying with the high voltage safety operation procedures; Step S2: Set ablation energy: Start the energy power unit and set a preset ignition current value on the human-machine interface according to the severity of the burrs on the device to be processed and the thermal characteristics of the electrode material. The control unit automatically adjusts the output voltage of the energy power unit to the corresponding preset value. This step is to set a suitable energy storage level for the pulse forming network. Step S3, Ignition and Ablation Cycle: Start the ignition power unit and adjust its output voltage to the preset ignition voltage value (this value should be slightly higher than the normal withstand voltage of the device to ensure that breakdown can be triggered). Then, the device automatically starts working: the pulse modulation and boost unit applies a high-voltage ignition pulse to the device at a frequency of 0.5Hz. Each ignition pulse attempts to break down the vacuum gap. Once breakdown occurs, the circuit isolation device automatically conducts, and the pulse forming network immediately releases a large current pulse with a width of 250μs and a peak value of up to 250A through the discharge channel to ablate the burrs. The operator can judge the ablation process by observing the waveform and sound of the discharge current. In the initial stage, the discharge may be unstable and the current waveform may be chaotic. As the burrs are gradually removed, the discharge will become stable and the current waveform will tend to be consistent. When it is observed that the discharge current is stable at a certain value for several consecutive discharges, it indicates that the burrs have been basically removed. Step S4, Withstand Voltage and Leakage Current Detection: Automatically or manually disconnect the output of the ignition power unit and the energy power unit. Then, start the detection power unit and adjust its output voltage to the specified detection voltage value according to the device datasheet. At this time, the leakage current of the device under the current voltage can be obtained by reading the value on the leakage current test meter. Since the leakage current test meter has dual ranges, the operator can select the appropriate range according to the actual situation to obtain an accurate reading. If the leakage current is within the specified range, it means that the withstand voltage performance of the device is qualified after deburring. Step S5, End and Disassembly: After the test is completed, first stop testing the output of the power supply unit. Since there may be residual charge on the high voltage output terminal, a special discharge rod must be used to fully discharge the high voltage output terminal to ground. Only after confirming that there is no voltage can the processed device be safely removed and the next cycle be started.

[0021] Through the description of the above specific embodiments, those skilled in the art can clearly understand that the present invention integrates high-voltage ignition, high-current ablation, and precision detection into one through ingenious circuit design and method steps. This not only significantly improves the efficiency and effect of deburring of vacuum electronic devices, but also effectively avoids damage to devices caused by traditional processes and simplifies the production process. It has high practical value and promising prospects for promotion.

[0022] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Content not described in detail in this specification is prior art known to those skilled in the art.

[0023] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Those skilled in the art can readily implement the present invention based on the accompanying drawings and the above description. However, any modifications, alterations, or variations made by those skilled in the art without departing from the scope of the present invention, utilizing the disclosed technical content, are equivalent embodiments of the present invention. Furthermore, any modifications, alterations, or variations made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the present invention.

Claims

1. A high-voltage pulse deburring device, comprising an ignition power supply unit, a pulse modulation and boosting unit, an energy power supply unit, a pulse forming network, a detection power supply unit, and output terminals, characterized in that: The ignition power unit is used to generate an adjustable first DC voltage; The pulse modulation and boosting unit is connected to the ignition power supply unit and is used to modulate the first DC voltage into a pulse and boost it to finally output a high-voltage ignition pulse. The high-voltage ignition pulse is applied between the two electrodes of the vacuum device to break down the vacuum gap and form a discharge channel. The energy supply unit is used to generate an adjustable second DC voltage; The pulse forming network is connected to the energy power supply unit to store electrical energy and release a large current pulse through the discharge channel after the discharge channel is formed to ablate the burrs. The detection power supply unit is used to generate an adjustable third DC high voltage, and a leakage current detection meter is connected in series in its circuit for testing the withstand voltage and leakage current of the device after deburring. The output terminals include a high-voltage output terminal and a ground output terminal, which are used to connect to the device to be processed.

2. The high-pressure pulse deburring device according to claim 1, characterized in that, The pulse modulation and boost unit includes a pulse modulation switch and a high boost ratio pulse transformer; The pulse modulation switch is used to modulate the first DC voltage into a pulse current with a repetition frequency of 0.5Hz. The high boost ratio pulse transformer is connected to the pulse modulation switch and is used to boost the pulse voltage, ultimately outputting a high-voltage ignition pulse with a peak value of 80kV.

3. The high-pressure pulse deburring device according to claim 1, characterized in that, The second DC voltage output by the power supply unit is 0-2500V, and the peak value of the ablation pulse current output by the pulse forming network is 0-250A with a pulse width of 250μs. This pulse width is set to match the thermal melting time constant of the burr so as to avoid thermal damage to the electrode body while ablating the burr.

4. The high-pressure pulse deburring device according to claim 1, characterized in that, The third DC high voltage output by the detection power supply unit is 0-80kV, and the leakage current detection meter has at least two ranges, namely 0-200μA and 0-2mA.

5. The high-pressure pulse deburring device according to claim 1, characterized in that, A discharge current-limiting resistor is connected in series between the energy power supply unit and the pulse forming network.

6. The high-pressure pulse deburring device according to claim 1, characterized in that, A circuit isolation device is connected in series between the pulse forming network and the high-voltage output terminal. When the vacuum gap is not broken down, the circuit isolation device is in a cut-off or high-resistance state, which is used to apply the electrical energy stored in the pulse forming network to the two electrodes of the device in the form of voltage to assist ignition. After the vacuum gap is broken down, it automatically switches to a conduction or low-resistance state, allowing the pulse forming network to discharge to the device.

7. The high-pressure pulse deburring device according to claim 1, characterized in that, It also includes a control unit configured to automatically cut off the output of the ignition power unit and the energy power unit when the detection power unit is started to perform leakage current detection.

8. A method of using the high-pressure pulse deburring device according to any one of claims 1-7, characterized in that, Includes the following steps: S1. Connect the two electrodes of the vacuum electronic device to be processed to the high-voltage output terminal and the ground output terminal respectively; S2. Start the power supply unit and adjust its output voltage to a preset value to correspond to the preset ignition current value; S3. Start the ignition power unit, adjust its output voltage to the preset ignition voltage value, so that the high-voltage ignition pulse is automatically applied to the device at a frequency of 0.5Hz until the device is broken down and discharged, and repeat until the discharge current is stable, indicating that the burr has been removed. S4. Automatically or manually disconnect the ignition power supply unit and the energy power supply unit, start the detection power supply unit, adjust its output voltage to the specified detection voltage value, and read the leakage current of the device through the leakage current detection meter; S5. Stop testing the power supply unit, discharge the high-voltage output terminal, and then remove the device.

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