Device and method for preparing high-purity nano gallium oxide powder through evaporation and oxidation

Abstract

The invention relates to the technical field of gallium oxide preparation, in particular to a device and method for preparing high-purity nanometer gallium oxide powder through evaporation and oxidation. Gallium metal is heated to form gallium metal liquid, the gallium metal liquid is guided into a hopper for heat preservation, a plasma gun is started, a flow guide pipe is opened, and the gallium metal liquid flows into a reaction tower through the flow guide pipe; the gallium oxide powder is evaporated in the high-temperature area to form gallium steam, meanwhile, air is exhausted outwards through air exhaust equipment to guide an air inlet pipeline to enter the top in the reaction tower, the inlet air and the gallium steam are mixed and react in the high-temperature area to generate the gallium oxide powder, and the gallium oxide powder is driven by self gravity and air exhaust to generate the gallium oxide powder. And the powder falls into the material receiving barrel along the bottom end closing part of the reaction tower and the top end closing part of the material receiving barrel, so that the powder can be efficiently collected and is not easily sucked away in a large amount in the reverse direction, and the high-purity nano gallium oxide powder can be efficiently, conveniently and continuously prepared.

Description

An apparatus and method for preparing high-purity nano-gallium oxide powder by evaporation oxidation. Technical Field

[0001] This invention relates to the field of gallium oxide preparation technology, and in particular to an apparatus and method for preparing high-purity nano-gallium oxide powder by evaporation oxidation. Background Technology

[0002] Currently, gallium oxide targets require high-purity nanoscale gallium oxide powder with a purity ≥4N and a particle size <200nm. However, most gallium oxide powders on the market are submicron-sized (around 3N purity) and micron-sized (around 1-5 microns) with a particle size of around 0.5 microns.

[0003] Currently, the main method for producing gallium oxide is the wet process, i.e., the liquid-phase method. A few dry methods, such as the solid-phase and gas-phase methods, have also been reported. The liquid-phase method is the most common method for preparing gallium oxide, with the neutralization precipitation method being a representative example. The reactant is metallic gallium, which is prepared by adding hydrochloric acid, nitric acid, etc., to obtain a gallium salt solution. Then, excess ammonia or other alkaline reagents are introduced to cause a neutralization reaction, resulting in a colloidal precipitate of gallium hydroxide. After several washings and drying, the precipitate is calcined at high temperature to obtain gallium oxide powder. This method is relatively common, but it involves many steps, a long production cycle, high production costs, and complex process control. Furthermore, this method requires a large amount of acid and alkali reagents, resulting in an unfriendly working environment. It generates a large amount of waste liquid, polluting the environment, and the precipitate requires several washings, wasting a significant amount of water. The solid-phase method is divided into high-temperature solid-phase reaction methods and room-temperature solid-phase reaction methods. The disadvantages of the solid-phase method are that the purity of the generated gallium oxide powder is difficult to guarantee, and the reaction is difficult to achieve the nanoscale, resulting in larger powder particles. Representative methods of the gas phase method are spray pyrolysis and spray combustion. Spray pyrolysis refers to the process where a precursor containing gallium salt solution is atomized into liquid mist by an atomizer and introduced into a high-temperature reaction chamber to undergo a thermal decomposition reaction, thus preparing gallium oxide powder. Spray combustion refers to the process where molten gallium metal is atomized into liquid mist by an atomizer and introduced into a high-temperature reaction chamber to burn with oxygen or air, thus preparing gallium oxide powder.

[0004] The obtained submicron or micron-sized gallium oxide powder generally needs to undergo a prolonged secondary grinding process in a sand mill or ball mill during the slurry preparation stage to reduce its particle size and ensure thorough mixing with other raw materials. This not only increases the production cost of the target material but also introduces a large number of impurities, affecting the quality of the target material and subsequent coating products.

[0005] Therefore, there is an urgent need for an efficient and convenient method for the continuous preparation of high-purity nano-gallium oxide powder. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to provide an apparatus and method for preparing high-purity nano-gallium oxide powder by evaporation oxidation, so as to solve one or more of the problems mentioned above.

[0007] To achieve the above objectives, this invention provides an apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation, comprising: a reaction tower, with a feed inlet at the top and a hopper above the feed inlet, the hopper containing molten gallium metal at an insulated temperature, and a guide pipe connected to the bottom of the hopper; a plasma gun is installed at the top of the reaction tower to form a high-temperature zone below the feed inlet at the top of the reaction tower, where the molten gallium metal evaporates into gallium vapor as it flows into the reaction tower through the guide pipe; the reaction tower is divided into an upper cylindrical section. And a variable diameter section connected to the bottom of the straight section, the diameter of which gradually decreases from top to bottom. A receiving cylinder is connected to the bottom of the variable diameter section. An air outlet is opened on one side of the variable diameter section. An air inlet pipe is connected to the top side of the reaction tower. An air outlet pipe is connected to the air outlet. An air extraction device is connected to one end of the air outlet pipe. Air is extracted outward through the air extraction device to guide the air inlet pipe into the top of the reaction tower. The air inlet and gallium vapor mix and react in the high temperature area to generate gallium oxide powder. The gallium oxide powder falls downward into the receiving cylinder.

[0008] Preferably, the air inlet pipe is located on the opposite side of the air outlet.

[0009] Preferably, the receiving cylinder is divided into an upper variable diameter cylinder section and a straight cylinder section connected to the bottom of the variable diameter cylinder section, and the diameter of the variable diameter cylinder section gradually increases from top to bottom.

[0010] Preferably, the exhaust device includes a cyclone separator and a cartridge dust collector connected in series. Gallium oxide powder is driven by its own gravity and the exhaust to fall into the receiving cylinder and the collection buckets of the cyclone separator and the cartridge dust collector, respectively.

[0011] Preferably, the exhaust device includes an exhaust fan, and a connecting port is provided on the lower side of the outlet on the variable diameter cylinder section. A transition channel is provided between the bottom end of the outlet pipe near the outlet and the connecting port. A rotating shaft is rotatably connected to the bottom end of the outlet. A filter frame is connected to the outside of the rotating shaft along its radial direction. Multiple filter frames are arranged around the rotating shaft at intervals. A one-way breathable filter membrane is provided in the filter frame. One filter frame abuts against the outlet and exhausts air unidirectionally toward the outlet pipe through the one-way breathable filter membrane. Another filter frame is located in the transition channel and is used to block the transition channel from exhausting air toward the outlet pipe.

[0012] Preferably, a stop block is elastically connected to the top of the air outlet. The side of the stop block facing the air outlet pipe is designed with an inclined end face. One end of the filter frame at the air outlet abuts against the stop block to prevent the filter frame at the air outlet from rotating towards the air outlet pipe.

[0013] Preferably, the transition channel is divided into an inclined pipe section connected to the outside of the communication port, and an arc-shaped pipe section connected between the inclined pipe section and the air outlet pipe. When the filter frame is rotated into the arc-shaped pipe section, the outer side of the filter frame abuts against the inner wall of the arc-shaped pipe section for unidirectional sealing of the transition channel.

[0014] Preferably, multiple jet nozzles are arranged inside the reaction tower for jet purging towards the bottom of the filter rack that has been transferred into the reaction tower.

[0015] This invention also provides a method for preparing high-purity nano-gallium oxide powder by evaporation oxidation, comprising the following steps: heating gallium metal to form a gallium metal liquid, introducing it into a hopper for heat preservation, starting the plasma gun, opening the guide pipe, allowing the gallium metal liquid to flow into the reaction tower through the guide pipe, where it evaporates to form gallium vapor in the high-temperature region; simultaneously, drawing air outward through an exhaust device to guide the air intake pipe into the top of the reaction tower; the air intake and gallium vapor mix and react in the high-temperature region to generate gallium oxide powder; and the gallium oxide powder, driven by its own gravity and the exhaust, falls into the collection cylinder.

[0016] The beneficial effects of this invention are as follows: By heating gallium metal to form a gallium molten metal, which is then introduced into a hopper for heat preservation, the plasma gun is activated, and the guide pipe is opened, allowing the gallium molten metal to flow into the reaction tower through the guide pipe. At the same time, air is drawn out through the exhaust device to guide the air intake pipe into the top of the reaction tower. The air intake and gallium vapor mix and react in the high-temperature area to generate gallium oxide powder. Driven by its own gravity and the exhaust, the gallium oxide powder falls into the collection cylinder along the bottom end of the reaction tower and the top end of the collection cylinder, which facilitates efficient collection of the powder. The powder is not easily drawn away in large quantities in the opposite direction. When gallium metal evaporates and vaporizes, the metal vapor is very small, resulting in very small gallium oxide (reaching the nanometer scale). This enables efficient and convenient continuous preparation of high-purity nano-gallium oxide powder. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 is a schematic diagram of the overall structure of the reaction tower, cyclone separator, and cartridge dust collector of the present invention; Figure 2 is a schematic diagram of the overall structure of the reaction tower and transition channel of the present invention; Figure 3 is a schematic diagram of the structure of one of the filter frames of the present invention when it abuts against the air outlet; Figure 4 is a schematic diagram of the structure of the rotating shaft, filter frame, and air nozzle of the present invention; Figure 5 is a schematic diagram of the structure of the filter frame and unidirectional permeable filter membrane of the present invention; Figure 6 is a schematic diagram of the structure of the rotating shaft and filter frame of the present invention when they rotate counterclockwise; Figure 7 is a schematic diagram of the particle size distribution of gallium oxide powder of the present invention; Figure 8 is a SEM image of gallium oxide powder of the present invention.

[0019] The following are labeled in the diagram: 1. Reaction tower; 2. Feed inlet; 3. Hopper; 4. Gallium metal liquid; 5. Guide pipe; 6. Plasma gun; 7. Collection cylinder; 8. Gas outlet; 9. Inlet pipe; 10. Outlet pipe; 11. Cyclone separator; 12. Cartridge dust collector; 13. Connecting port; 14. Transition channel; 141. Inclined tube section; 142. Arc-shaped tube section; 15. Rotating shaft; 16. Filter frame; 160. One-way permeable filter membrane; 17. Abutment block; 18. Air nozzle. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments.

[0021] It should be noted that, unless otherwise defined, the technical or scientific terms used in this invention should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] As shown in Figures 1, 7, and 8, an apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation includes a reaction tower 1. A feed inlet 2 is located at the top of the reaction tower 1, and a hopper 3 is located above the feed inlet 2. Gallium metal liquid 4 is stored in the hopper 3 under heat preservation. A guide pipe 5 is connected to the bottom of the hopper 3. A plasma gun 6 is located at the top of the reaction tower 1 to create a high-temperature zone below the feed inlet 2. When the gallium metal liquid 4 flows into the reaction tower 1 through the guide pipe 5, it evaporates in the high-temperature zone to form gallium vapor. The reaction tower 1 is divided into an upper section and a lower section. The cylindrical section and the variable diameter cylindrical section connected to the bottom of the straight cylindrical section have a diameter that gradually decreases from top to bottom. The bottom of the variable diameter cylindrical section is connected to a receiving cylinder 7. An air outlet 8 is opened on one side of the variable diameter cylindrical section. An air inlet pipe 9 is connected to the top side of the reaction tower 1. An air outlet pipe 10 is connected to the air outlet 8. An air extraction device is connected to one end of the air outlet pipe 10. The air extraction device draws air outward to guide the air inlet pipe 9 into the top of the reaction tower 1. The air inlet and gallium vapor mix and react in the high temperature area to generate gallium oxide powder. The gallium oxide powder falls downward into the receiving cylinder 7.

[0023] This invention is based on existing gallium oxide preparation processes and equipment. Specifically, it involves setting up a reaction tower 1 with a feed inlet 2 at its top. Above the feed inlet 2 is a hopper 3 containing insulated gallium metal liquid 4. A guide pipe 5 is connected to the bottom of the hopper 3. Specifically, the bottom of the hopper 3 has a funnel-shaped design. The guide pipe 5 is equipped with a switching valve for controlling the flow. The hopper 3 can be made of stainless steel or titanium alloy. An outer heating element is used to maintain a temperature of 200°C, eliminating the need for overall high-temperature heating, resulting in minimal metal slag formation and high raw material utilization. The reaction tower 1 is equipped with a plasma gun 6 at the top to create a high-temperature zone below the feed inlet 2. The reaction tower 1 is divided into an upper straight section and a variable-diameter section connected to the bottom of the straight section. The diameter of the variable-diameter section gradually decreases from top to bottom. A receiving cylinder 7 is connected to the bottom of the variable-diameter section. An outlet 8 is opened on one side of the variable-diameter section. An inlet pipe 9 is connected to the top side of the reaction tower 1. An outlet pipe 10 is connected to the outlet 8. One end of the outlet pipe 10 is connected to an exhaust device. Preferably, the inlet pipe 9 is located at the outlet 8. On one side, the receiving cylinder 7 is divided into an upper variable-diameter cylinder section and a straight cylinder section connected to the bottom of the variable-diameter cylinder section. The diameter of the variable-diameter cylinder section gradually increases from top to bottom, that is, the bottom of the reaction tower 1 is a gradually narrowing design, and the top of the receiving cylinder 7 is a gradually narrowing design. In use, gallium metal is heated to 200°C to form gallium metal liquid 4, which is introduced into the hopper 3 for heat preservation. The plasma gun 6 is started, and the guide pipe 5 is opened, so that when the gallium metal liquid 4 flows into the reaction tower 1 through the guide pipe 5, it evaporates in the high-temperature area to form gallium vapor. At the same time, air is drawn out through the exhaust device to guide the air inlet pipe 9 towards Gas is introduced from the top of the reaction tower 1. The gas and gallium vapor mix and react in the high-temperature area to generate gallium oxide powder. Driven by its own gravity and the suction, the gallium oxide powder falls downward into the collection cylinder 7. The gallium oxide powder falls into the collection cylinder 7 along the bottom end of the reaction tower 1 and the top end of the collection cylinder 7, which is conducive to efficient collection of powder. The powder is not easily drawn away in large quantities in the opposite direction. When gallium metal evaporates and vaporizes, the metal vapor is very small in size, and the resulting gallium oxide is also very small (reaching the nanoscale). This enables efficient and convenient continuous preparation of high-purity nano-gallium oxide powder.

[0024] The intake air can be pure oxygen or atmospheric air. In actual production experiments, even if atmospheric air is used, the high temperature will not react with nitrogen or other gases to generate other materials, and will not have a significant impact on the purity of gallium oxide powder.

[0025] In an embodiment of the present invention, as shown in Figures 1, 7, and 8, the air extraction device may optionally include a cyclone separator 11 and a cartridge dust collector 12 connected in series. Gallium oxide powder is driven by its own gravity and the air extraction to fall into the collection cylinder 7 and the collection buckets of the cyclone separator 11 and the cartridge dust collector 12, respectively. The powder collected at different locations is prepared and mixed evenly as required to obtain the corresponding gallium oxide powder product.

[0026] As another embodiment of the present invention, optionally, as shown in Figures 2, 3, 4, 5, and 6, the exhaust device includes an exhaust fan and a dust removal device at the rear end. A connecting port 13 is provided on the lower side of the outlet 8 on the variable diameter cylinder section. A transition channel 14 is provided between the bottom end of the outlet pipe 10 near the outlet 8 and the connecting port 13. A rotating shaft 15 is rotatably connected to the bottom end of the outlet 8. A filter frame 16 is connected to the outer side of the rotating shaft 15 along its radial direction. Multiple filter frames 16 are spaced around the rotating shaft 15. A one-way breathable filter membrane 160 is provided inside the filter frame 16. Specifically, three filter frames 16 are evenly spaced around the rotating shaft 15. The one-way breathable filter membrane 160 can be an existing conventional filter frame 16. Standard types include check valve membranes (whose core is two heat-sealed thin films, using heat-resistant ink to form a one-way valve in a certain area; it opens under forward pressure and closes under reverse pressure. When gas enters from a specific direction, it can open the channel; when gas attempts to flow out in the opposite direction, the air pressure will cause the film to adhere more tightly, thus sealing the channel and preventing reverse airflow. The structure is simple and reliable, and it is widely used in the packaging field) or asymmetric porous membranes (whose core is that the membrane pores are asymmetrically conical, wider at one end and narrower at the other; gas flows with less resistance from the narrow side to the wide side, and with greater resistance in the reverse direction), as shown in Figure 4. The arrows represent the air permeability direction of the one-way permeable filter membrane 160. As shown in Figure 3, one of the filter frames 16 rests against the air outlet 8. The air exits unidirectionally through the one-way permeable filter membrane 160 towards the outlet pipe 10. Another filter frame 16 is located within the transition channel 14, used to block the air from exiting through the transition channel 14 towards the outlet pipe 10. As shown in Figure 5, the filter frame 16 can be rectangular in shape, and the outlet port 8 and outlet pipe 10 are also rectangular in shape accordingly. The one-way permeable filter membrane 160 is laid flat and connected to the frame of the filter frame 16. One end of the rotating shaft 15 extends out of the reaction tower 1 and is connected to conventional drive components such as a rotary cylinder or rotary motor to drive the rotating shaft 15 to rotate 120° counterclockwise in a single cycle. The cross-section of the constricted portion of the reaction tower 1 can be designed as a rectangle to allow the filter frame 16 to rotate. During use, the one-way breathable filter membrane 160 at the outlet 8 filters and blocks gallium oxide powder, preventing a large amount of gallium oxide powder from being drawn away along the outlet 8. After a period of use, gallium oxide powder adheres and accumulates on the one-way breathable filter membrane 160 at the outlet 8. The drive component drives the rotating shaft 15 to rotate counterclockwise by 120°. The one-way breathable filter membrane 160 at the outlet 8 is moved into the reaction tower 1, and the gallium oxide powder adhering and accumulated on it naturally falls downward. The one-way breathable filter membrane 160 originally located in the reaction tower 1 is moved into the transition channel 14, forming a one-way seal. The one-way breathable filter membrane 160 originally located in the transition channel 14 is moved into the outlet 8, forming a one-way air filtration.

[0027] In an embodiment of the present invention, optionally, as shown in Figures 2, 3, 4, 5, and 6, a stop block 17 is elastically connected to the top of the air outlet 8. Specifically, the top of the stop block 17 can be connected to the top of the air outlet 8 by an elastic component such as a spring. The side of the stop block 17 facing the air outlet pipe 10 is designed as an inclined end face, and the side of the stop block 17 facing away from the air outlet pipe 10 is designed as a vertical end face. One end of the filter frame 16 at the air outlet 8 abuts against the vertical end face of the stop block 17 to prevent the filter frame 16 at the air outlet 8 from rotating in the direction of the air outlet pipe 10, i.e., rotating clockwise. When the rotating shaft 15 drives the filter frame 16 to rotate counterclockwise, one end of the filter frame 16 pushes against the inclined end face of the stop block 17, so that the stop block 17 retracts into the side wall of the reaction tower 1 until one end of the filter frame 16 passes over the stop block 17 and abuts against the vertical end face of the stop block 17.

[0028] In an embodiment of the present invention, optionally, as shown in Figures 2, 3, 4, 5, and 6, the transition channel 14 can be divided into an inclined tube section 141 connected to the outside of the connecting port 13, and an arc-shaped tube section 142 connected between the inclined tube section 141 and the air outlet pipe 10. Specifically, the sidewall of the transition channel 14 can be a vertical straight wall abutting against both sides of the filter frame 16, while the bottom wall of the inclined tube section 141 is inclined and the bottom wall of the arc-shaped tube section 142 is arc-shaped. When the filter frame 16 is inserted into the arc-shaped tube section 142, the outer side of the filter frame 16, as shown in Figure 5, i.e., the three sides of the outer side of the filter frame 16, abuts against the inner wall of the arc-shaped tube section 142, and relies on the one-way permeable filter membrane 160 to unidirectionally seal the transition channel 14.

[0029] In an embodiment of the present invention, optionally, as shown in Figures 2, 3, 4, 5, and 6, a plurality of jet nozzles 18 are arranged inside the reaction tower 1. Thus, when the one-way permeable filter membrane 160 at the original outlet 8 is transferred into the reaction tower 1, the gallium oxide powder adhering and accumulated on it falls naturally downwards. On the other hand, by controlling the jet nozzles 18 to spray air towards the bottom of the filter frame 16 transferred into the reaction tower 1, the gallium oxide powder adhering and accumulated on the one-way permeable filter membrane 160 is further efficiently removed, so that the gallium oxide powder is efficiently collected in the collection cylinder 7.

[0030] This invention also provides a method for preparing high-purity nano-gallium oxide powder by evaporation oxidation, comprising the following steps: heating gallium metal to 200°C to form gallium metal liquid 4, introducing it into hopper 3 for heat preservation, starting plasma gun 6, opening guide pipe 5, so that when gallium metal liquid 4 flows into reaction tower 1 through guide pipe 5, it evaporates to form gallium vapor in the high-temperature area. At the same time, air is drawn out through the exhaust device to guide air intake pipe 9 into the top of reaction tower 1. The air intake and gallium vapor mix and react in the high-temperature area to generate gallium oxide powder. Driven by its own gravity and the exhaust, the gallium oxide powder falls into the collection cylinder 7 along the bottom end of reaction tower 1 and the top end of collection cylinder 7, which is conducive to efficient collection of powder. The powder is not easily drawn away in large quantities in the reverse direction. When gallium metal evaporates and vaporizes, the metal vapor is very small in size, and the resulting gallium oxide is also very small (reaching the nanoscale), thereby achieving efficient and convenient continuous preparation of high-purity nano-gallium oxide powder.

[0031] The gallium oxide powder prepared by the above apparatus and method was tested, as shown in Figures 7 and 8: the specific surface area of ​​gallium oxide powder BET = 10.17 m2 / g; the laser particle size of gallium oxide powder D10 = 0.206 μm, D50 = 0.304 μm, D90 = 0.549 μm; impurity analysis showed Fe = 0.98, Ni = 0.04, Pb < 0.05, Cu = 0.20, Cr = 0.02, and total = 36.9 ppm.

[0032] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the invention is limited to these examples; within the framework of the invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity.

Claims

1. An apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation, characterized in that, include: The reaction tower (1) has a feed inlet (2) at its top and a hopper (3) above the feed inlet (2). The hopper (3) contains gallium metal liquid (4) and a guide pipe (5) is connected to the bottom of the hopper (3). A plasma gun (6) is installed at the top of the reaction tower (1) to form a high-temperature zone below the feed inlet (2). When the gallium metal liquid (4) flows into the reaction tower (1) through the guide pipe (5), it evaporates in the high-temperature zone to form gallium vapor. The reaction tower (1) is divided into an upper straight section and a section connected to the bottom of the straight section. The diameter of the variable diameter cylinder section gradually decreases from top to bottom. The bottom end of the variable diameter cylinder section is connected to a receiving cylinder (7). An outlet (8) is opened on one side of the variable diameter cylinder section. An inlet pipe (9) is connected to the top side of the reaction tower (1). An outlet pipe (10) is connected to the outlet (8). An exhaust device is connected to one end of the outlet pipe (10). The exhaust device draws air outward to guide the inlet pipe (9) to the top of the reaction tower (1). The air and gallium vapor mix and react in the high temperature area to generate gallium oxide powder. The gallium oxide powder falls downward into the receiving cylinder (7).

2. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 1, characterized in that, The air inlet pipe (9) is located on the opposite side of the air outlet (8).

3. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 1, characterized in that, The receiving cylinder (7) is divided into an upper variable diameter cylinder section and a straight cylinder section connected to the bottom of the variable diameter cylinder section. The diameter of the variable diameter cylinder section gradually increases from top to bottom.

4. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 1, characterized in that, The air extraction device includes a cyclone separator (11) and a cartridge dust collector (12) connected in series. Gallium oxide powder falls into the receiving cylinder (7) and the collection buckets of the cyclone separator (11) and the cartridge dust collector (12) respectively, driven by its own gravity and the air extraction.

5. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 1, characterized in that, The exhaust device includes an exhaust fan. A connecting port (13) is provided on the lower side of the outlet (8) on the variable diameter cylinder section. A transition channel (14) is provided between the bottom end of the outlet pipe (10) near the outlet (8) and the connecting port (13). A rotating shaft (15) is rotatably connected to the bottom end of the outlet (8). A filter frame (16) is connected to the outside of the rotating shaft (15) along its radial direction. Multiple filter frames (16) are arranged around the rotating shaft (15) at intervals. A one-way breathable filter membrane (160) is provided in the filter frame (16). One filter frame (16) is abutted against the outlet (8) and unidirectionally exhausts air towards the outlet pipe (10) through the one-way breathable filter membrane (160). Another filter frame (16) is located in the transition channel (14) and is used to block the transition channel (14) from exhausting air towards the outlet pipe (10).

6. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 5, characterized in that, A stop block (17) is elastically connected to the top of the air outlet (8). The side of the stop block (17) facing the air outlet pipe (10) is designed with an inclined end face. One end of the filter frame (16) at the air outlet (8) abuts against the stop block (17) to prevent the filter frame (16) at the air outlet (8) from rotating towards the air outlet pipe (10).

7. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 5, characterized in that, The transition channel (14) is divided into an inclined tube section (141) connected to the outside of the connecting port (13) and an arc-shaped tube section (142) connected between the inclined tube section (141) and the air outlet pipe (10). When the filter frame (16) is inserted into the arc-shaped tube section (142), the outer side of the filter frame (16) abuts against the inner wall of the arc-shaped tube section (142) for unidirectional sealing of the transition channel (14).

8. The apparatus for preparing high-purity nano-gallium oxide powder by evaporation oxidation according to claim 5, characterized in that, The reaction tower (1) is provided with a plurality of jet nozzles (18) arranged inside, which are used to spray air towards the bottom end of the filter frame (16) that is transferred into the reaction tower (1).

9. A method for preparing high-purity gallium oxide nanoparticles by evaporation oxidation, wherein the method uses the apparatus for preparing high-purity gallium oxide nanoparticles by evaporation oxidation as described in any one of claims 1-8, characterized in that, Includes the following steps: Gallium metal is heated to form gallium metal liquid (4), which is then introduced into the hopper (3) for heat preservation. The plasma gun (6) is started and the guide pipe (5) is opened so that the gallium metal liquid (4) flows into the reaction tower (1) through the guide pipe (5). At the same time, gallium vapor is formed in the high-temperature area. Simultaneously, air is drawn out through the air extraction device to guide the air inlet pipe (9) into the top of the reaction tower (1). The air inlet and gallium vapor mix and react in the high-temperature area to generate gallium oxide powder. The gallium oxide powder falls into the collection cylinder (7) under its own gravity and the drive of the air extraction.

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