Power distribution system and power distribution method

Abstract

The invention provides a power distribution system and a power distribution method. The power distribution system comprises a source end main power distribution unit and multi-layer direct current power distribution units which are in hierarchical connection. Any layer of direct-current power distribution unit in the multiple layers of direct-current power distribution units is used for supplying power to a load connected with the any layer of direct-current power distribution unit based on an input voltage provided by a connected previous layer of direct-current power distribution unit, and the load has a required voltage corresponding to the any layer of direct-current power distribution unit; and the power supply unit is used for supplying power to the next-layer direct current power distribution unit connected with any layer of direct current power distribution unit, and the upper-layer direct current power distribution unit of the first-layer direct current power distribution unit in the multiple layers of direct current power distribution units is a source end main power distribution unit. According to the application, a distributed power supply system architecture is constructed through the source end main power distribution unit and the multi-layer direct current power distribution units in hierarchical connection, flexible deployment of the direct current power distribution units can be supported, meanwhile, the power supply demand of a load is met through voltage hierarchical management, and the power supply efficiency and the power supply stability of the power distribution system can be improved.

Description

Technical Field

[0001] This application relates to the field of electronic power technology, and in particular to a power distribution system and power distribution method. Background Technology

[0002] With the development of semiconductor equipment manufacturing technology, the integration level of semiconductor equipment is constantly increasing. The number and types of precision loads mounted on a single semiconductor device have increased significantly. Currently, the power distribution systems used in semiconductor equipment are mainly centralized power distribution modules. A single power distribution module often needs to simultaneously provide power to 40 to 50 different types of loads. This requires the power distribution module to integrate a large number of power supply interfaces, leading to a continuous increase in the size of the power distribution module. However, the internal space of the equipment is limited, making it difficult to accommodate these increasingly bulky power distribution modules. At the same time, the loads are distributed across the equipment, and all power lines are drawn from the same power supply point, resulting in cables of varying lengths and in large quantities. This significantly increases the difficulty of internal wiring and makes the dense cable arrangement prone to cable damage, leading to power outages and power failures, further increasing the difficulty of operation, maintenance, and testing. Summary of the Invention

[0003] This application provides a power distribution system and method. A distributed power supply system architecture is constructed by connecting a main power distribution unit at the source end with a multi-layer DC power distribution unit in a hierarchical manner. This architecture supports flexible deployment of DC power distribution units and meets the power supply needs of the load through voltage hierarchical management, thereby improving the power supply efficiency and stability of the power distribution system.

[0004] In a first aspect, this application provides a power distribution system comprising a source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Each of the multi-layer DC power distribution units is used to supply power to a load connected to that unit based on an input voltage provided by the preceding layer of the connected DC power distribution unit, wherein the load has a required voltage corresponding to that layer of the connected DC power distribution unit, and to supply power to the next layer of the connected DC power distribution unit. The preceding layer of the first layer of the multi-layer DC power distribution unit is the source-end main power distribution unit. In this application, a distributed power supply architecture can be constructed using the source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Furthermore, by nesting DC power distribution units at each level, the power supply interfaces of the power distribution system can be flexibly increased, while reducing the power supply interfaces of the source-end main power distribution unit, thereby reducing the size of the source-end main power distribution unit. Meanwhile, any layer of DC power distribution unit supplies power to loads with corresponding required voltages, which can avoid the redundancy of components caused by power supply layouts such as long-distance wiring or additional conversion modules required when a single power supply supplies power to the load, thereby improving the power supply efficiency and reliability of the power distribution system.

[0005] In one possible implementation of the first aspect, the DC distribution units on different layers of the aforementioned multi-layer DC distribution unit are used to connect different loads with different voltage requirements, and these different loads with different voltage requirements are deployed in different process chambers of the semiconductor equipment. In this application, by configuring DC distribution units on different layers to connect different loads with different voltage requirements, power can be supplied to these different loads with different voltage requirements, enabling voltage hierarchical management and improving the power supply efficiency and stability of the power distribution system. Simultaneously, by using DC distribution units on different layers to supply power to different loads deployed in different process chambers to adapt to the power needs of different types of loads deployed in different physical locations, power supply zoning management of loads deployed in different physical spaces can be achieved. Furthermore, the centralized supply of power from any layer of DC distribution units to different loads with the same voltage requirement can reduce the number of upper-layer traces and signal crosstalk interference, further improving the power supply stability of the power distribution system.

[0006] In one possible implementation of the first aspect, any DC power distribution unit in any of the aforementioned layer of DC power distribution units is deployed inside or outside the housing of the process chamber where the load connected to the aforementioned DC power distribution unit is located. In this application, deploying any DC power distribution unit correspondingly inside or outside the housing of the chamber where the load with the required voltage is the same as the output voltage of the DC power distribution unit allows the DC power distribution unit responsible for supplying power to the load to be closer to the physical location of the load, significantly shortening the power supply line transmission distance, reducing cable power supply transmission loss, and simultaneously reducing the complexity of cross-regional wiring and the amount of cable used, simplifying the structure of the power distribution system and thus improving the stability of the power supply. Furthermore, flexibly selecting the installation location of the DC power distribution unit according to the physical space conditions of each chamber can effectively improve the integration and space utilization of the power distribution system, meeting the stringent requirements for equipment layout in application scenarios such as semiconductor equipment manufacturing, and demonstrating strong applicability.

[0007] In one possible implementation of the first aspect, the aforementioned source-end main power distribution unit includes an information processing module. This information processing module is used to configure a target output voltage for each layer of the multi-layer DC power distribution unit, triggering each layer to output a voltage corresponding to the target voltage to supply power to the connected next layer of DC power distribution unit. In this application, the information processing module of the source-end main power distribution unit can centrally configure the target output voltage for each layer of DC power distribution unit according to the actual needs of the loads in different chambers. This achieves unified management and precise adaptation of the system voltage. Simultaneously, the remote triggering control mechanism of the information processing module ensures that each layer of DC power distribution unit outputs a voltage corresponding to the target voltage, resulting in stronger power supply stability.

[0008] In one possible implementation of the first aspect, any DC distribution unit in any of the aforementioned layered DC distribution units includes a hierarchical information processing module and a voltage conversion module. The hierarchical information processing module is used to receive voltage configuration information sent by the information processing module of the source-end main distribution unit or the hierarchical information processing module of the upper-layer DC distribution unit. The voltage configuration information is used to indicate the target voltage magnitude of the output voltage of any of the aforementioned DC distribution units. The hierarchical information processing module is also used to control the voltage conversion module to perform voltage conversion on the input voltage provided by the upper-layer DC distribution unit and output a voltage corresponding to the target voltage magnitude to supply power to the lower-layer DC distribution unit. In this application, the hierarchical information processing module in any of the layered DC distribution units and the information processing module in the source-end main distribution unit construct a distributed voltage control communication architecture, supporting the hierarchical transmission and local execution of voltage configuration information. At the same time, each DC distribution unit can autonomously complete voltage conversion control, improving the power supply control flexibility and reliability of the power distribution system.

[0009] In one possible implementation of the first aspect, any DC distribution unit in any of the aforementioned layer DC distribution units includes at least one input port and at least two output ports; the input port is used to connect to the output port of the aforementioned upper-layer DC distribution unit to receive the input voltage provided by the aforementioned upper-layer DC distribution unit; the aforementioned at least two output ports include a first output port and a second output port, the first output port is used to output a first output voltage to supply power to the load connected to the aforementioned DC distribution unit, the magnitude of the first output voltage is the same as the magnitude of the input voltage; the second output port is connected to the output terminal of the voltage conversion module, and is used to output a voltage corresponding to the magnitude of the target voltage output by the voltage conversion module after voltage conversion to supply power to the next layer DC distribution unit connected to the aforementioned DC distribution unit, the magnitude of the target voltage is different from the magnitude of the input voltage provided by the aforementioned upper-layer DC distribution unit. In this application, any layer of DC distribution unit can directly output the input voltage through the first output port, which can simultaneously power multiple loads adapted to the input voltage, reducing energy loss; through the second output port, it can provide a voltage corresponding to the target voltage after the input voltage is converted, which can power the next layer of DC distribution unit and the loads adapted to the target voltage, thereby supporting the multi-layer nested expansion and voltage hierarchical management of the power distribution system. Through precise voltage conversion, it can meet the power supply needs of DC distribution units at different levels, and has high applicability.

[0010] In one possible implementation of the first aspect, any of the aforementioned layer DC distribution units includes multiple peer DC distribution units equipped with backup power supply links; any one of the multiple peer DC distribution units is used to supply power to the loads connected to the other peer DC distribution units or the DC distribution units at the next lower level when the other peer DC distribution units have no voltage output. In this application, multiple peer DC distribution units with backup power supply links can be configured for any layer DC distribution unit. When any DC distribution unit experiences abnormal operating conditions, including but not limited to upgrades, faults, or maintenance, resulting in no voltage output, the peer DC distribution units can take over the power supply task of the DC distribution unit and supply power to the loads connected to the DC distribution unit or the DC distribution units at the next lower level. This can avoid partial power outages caused by a single DC distribution unit having no voltage output, significantly improving the power supply continuity and reliability of the power distribution system. At the same time, the backup power supply link starts when the DC distribution unit has no voltage output, without affecting independent operation under normal operating conditions. The structure is simple and highly applicable.

[0011] In one possible implementation of the first aspect, a backup switch is provided on the backup power supply link; the backup switch is used to turn on the backup power supply link when the DC distribution unit has no voltage output. In this application, by setting a backup switch on the backup power supply link, the backup power supply link can be turned on when the same-level DC distribution unit has no voltage output, so that other same-level DC distribution units connected to the backup power supply link can supply power to the load connected to the same-level DC distribution unit or the next-level DC distribution unit. Under normal operating conditions, the backup switch keeps the backup power supply link disconnected, ensuring that each same-level DC distribution unit operates independently, further improving the power supply continuity and controllability of the power distribution system. The structure is simple and highly applicable.

[0012] In one possible implementation of the first aspect, the first output port of any one of the plurality of peer-level DC distribution units is used to connect to a first load to supply power to the first load, or to connect to the input port of other peer-level DC distribution units to provide input voltage to the other peer-level DC distribution units; the second output port of any one of the peer-level DC distribution units is used to connect to the next-level DC distribution unit connected to the second output port of the other peer-level DC distribution unit, so as to supply power to the next-level DC distribution unit connected to the second output port of the other peer-level DC distribution unit when the other peer-level DC distribution unit has no voltage output. In this application, a flexible backup power supply system can be constructed through port interconnection between peer-level DC distribution units, avoiding partial power supply interruption caused by no voltage output from a single DC distribution unit, eliminating the need for additional dedicated backup power supply links, further simplifying the architecture design of the power distribution system, and improving the power supply continuity and reliability of the power distribution system.

[0013] In one possible implementation of the first aspect, any DC distribution unit in any of the aforementioned layered DC distribution units further includes a backup voltage conversion module; wherein the backup voltage conversion module and the aforementioned voltage conversion module have the same electrical specifications; the backup voltage conversion module is used to convert the input voltage provided by the aforementioned upper-layer DC distribution unit and output a voltage corresponding to the target voltage to supply power to the aforementioned lower-layer DC distribution unit when the aforementioned voltage conversion module has no voltage output. In this application, during the normal operation of the voltage conversion module, the backup voltage conversion module is in a standby state; when the voltage conversion module has no voltage output, the backup voltage conversion module replaces the voltage conversion module to continue providing a stable voltage output, effectively avoiding power outages caused by the voltage conversion module having no voltage output under abnormal operating conditions, including but not limited to upgrades, faults, or maintenance, thereby effectively improving the power supply continuity and reliability of the power distribution system.

[0014] In one possible implementation of the first aspect, any of the aforementioned DC power distribution units in any of the aforementioned layered DC power distribution units further includes a switching circuit. The input terminals of the aforementioned voltage conversion module and the aforementioned backup voltage conversion module are connected to the input terminal of the aforementioned DC power distribution unit through the aforementioned switching circuit. The switching circuit is used to switch the input terminal of the aforementioned DC power distribution unit from being connected to the aforementioned voltage conversion module to being connected to the aforementioned backup voltage conversion module when the aforementioned voltage conversion module has no voltage output. In this application, the switching circuit enables selective connection between the input terminals of the voltage conversion module and the backup voltage conversion module and the input terminal of the DC power distribution unit. Under normal operating conditions, the switching circuit maintains the connection between the voltage conversion module and the input terminal of the DC power distribution unit, ensuring that the input voltage is converted into a stable output voltage corresponding to the target voltage after voltage conversion. When the voltage conversion module has no voltage output, the switching circuit can switch the power supply path to the backup voltage conversion module, allowing the backup voltage conversion module to take over the work of the voltage conversion module and continuously output the input voltage corresponding to the target voltage. This can effectively improve the operational reliability of the DC power distribution unit and ensure a continuous and stable power supply to the next layer of DC power distribution units or loads connected to the DC power distribution unit.

[0015] Secondly, this application provides a semiconductor device, which includes multiple process chambers and a power distribution system as described in the first aspect and any possible embodiment of the first aspect; wherein, one or more loads with the same required voltage are deployed in one of the multiple process chambers, and different loads with different required voltages are deployed in different process chambers. In this application, by using DC power distribution units at different layers to supply power to loads deployed in different process chambers to adapt to the power needs of different types of loads deployed in different physical locations, it is possible to realize power supply zone management of loads deployed in different physical spaces, thereby improving the power supply flexibility and stability of the power distribution system.

[0016] In one possible implementation of the second aspect, the load includes at least one of a motor, a sensor, or an optical device.

[0017] Thirdly, this application provides a power distribution method applied to an information processing module of a power distribution system. The power distribution system includes a source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Each layer of the multi-layer DC power distribution units supplies power to a load connected to it based on an input voltage provided by the layer above it, wherein the load has a required voltage corresponding to the layer above it. The method also supplies power to the next layer of DC power distribution units connected to the layer above it. The method includes: configuring a target voltage magnitude for the output voltage of each layer of the multi-layer DC power distribution units; triggering each layer of the multi-layer DC power distribution units to output a voltage corresponding to the target voltage magnitude based on an input voltage provided by the layer above it, supplying power to the next layer of DC power distribution units connected to it. The layer above the first layer of the multi-layer DC power distribution unit is the source-end main power distribution unit. In this application, the target voltage of the output voltage of DC distribution units at different levels can be centrally configured through the information processing module. This allows for the configuration of the target voltage of each level of DC distribution unit based on the actual voltage requirements of different loads, improving the voltage configuration flexibility and power supply efficiency of the power distribution system. Simultaneously, the remote trigger control mechanism of the information processing module ensures that the output voltage of each level of DC distribution unit corresponds to the target voltage, resulting in stronger power supply stability.

[0018] In one possible implementation of the third aspect, any DC distribution unit in any of the aforementioned layered DC distribution units includes a hierarchical information processing module and a voltage conversion module. The triggering of any of the aforementioned layered DC distribution units to output a voltage corresponding to the target voltage based on the input voltage provided by the connected upper-layer DC distribution unit to supply power to the connected lower-layer DC distribution unit includes: sending voltage configuration information to the hierarchical information processing module of the aforementioned DC distribution unit, the voltage configuration information indicating the target voltage magnitude of the output voltage of the aforementioned DC distribution unit; and triggering the voltage conversion module in the aforementioned DC distribution unit based on the voltage configuration information to perform voltage conversion based on the input voltage provided by the upper-layer DC distribution unit and output a voltage corresponding to the target voltage magnitude to supply power to the lower-layer DC distribution unit. In this application, the information processing module in the source-end main distribution unit and the hierarchical information processing module in any of the layered DC distribution units construct a distributed voltage control communication architecture, supporting the hierarchical transmission and local execution of voltage configuration information. Simultaneously, each DC distribution unit can autonomously complete voltage conversion control, improving the power supply control flexibility and reliability of the power distribution system.

[0019] In one possible implementation of the third aspect, any of the aforementioned layer DC distribution units includes multiple peer DC distribution units equipped with backup power supply links. The method further includes: controlling any one of the multiple peer DC distribution units to supply power to the loads connected to the other peer DC distribution units or the DC distribution units at the next lower level when the other peer DC distribution units have no voltage output. In this application, multiple peer DC distribution units with backup power supply links can be configured for any layer DC distribution unit. When any DC distribution unit has no voltage output due to abnormal operating conditions including but not limited to upgrades, faults, or maintenance, the peer DC distribution units can take over the power supply task of the DC distribution unit and supply power to the loads connected to the DC distribution unit or the DC distribution units at the next lower level. This can avoid partial power outages caused by a single DC distribution unit having no voltage output, greatly improving the power supply continuity and reliability of the power distribution system. At the same time, the backup power supply link starts when the DC distribution unit has no voltage output, without affecting independent operation under normal operating conditions. The structure is simple and highly applicable.

[0020] In one possible implementation of the third aspect, any DC distribution unit in any of the aforementioned layered DC distribution units includes a backup voltage conversion module; wherein the backup voltage conversion module and the aforementioned voltage conversion module have the same electrical specifications, and the method further includes: controlling the backup voltage conversion module to perform voltage conversion on the input voltage provided by the aforementioned upper-layer DC distribution unit and output a voltage corresponding to the target voltage magnitude to supply power to the aforementioned lower-layer DC distribution unit when the aforementioned voltage conversion module has no voltage output. In this application, two voltage conversion modules with the same electrical specifications are configured in any layered DC distribution unit. During the normal operation of the voltage conversion module, the backup voltage conversion module is in a standby state; when the voltage conversion module has no voltage output, the backup voltage conversion module replaces the voltage conversion module to continue providing a stable voltage conversion output, effectively avoiding power interruption caused by the lack of output of the voltage conversion module under abnormal operating conditions such as upgrades, faults, or maintenance, etc., and effectively improving the power supply continuity and reliability of the power distribution system.

[0021] Fourthly, this application provides a computer-readable storage medium storing a computer program adapted to be loaded by a processor and executed by the power distribution method provided in the third aspect or any possible implementation thereof.

[0022] Fifthly, this application provides a computer program product, which includes computer instructions stored in a computer-readable storage medium; a processor of a computer device reads the computer instructions from the computer-readable storage medium and executes the computer instructions, causing the computer device to perform the power distribution method provided in the third aspect or any possible implementation thereof.

[0023] The technical effects of the fourth and fifth aspects can be referred to the technical effects of the third aspect and any possible implementation of the third aspect, and will not be repeated here. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a power distribution system. Figure 2 This is a schematic diagram of the power distribution system provided in an embodiment of this application; Figure 3 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application; Figure 4 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application; Figure 5 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application; Figure 6 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application; Figure 7 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application; Figure 8 This is a schematic flowchart of the power distribution method provided in the embodiments of this application.

[0025] Explanation of reference numerals in the attached figures: 200—Source-end main power distribution unit; 201a to 201n – DC power distribution units on the first floor; 202a to 202n – DC power distribution units on the second floor; 20ka to 20kn — DC power distribution unit of the kth layer. Detailed Implementation

[0026] See Figure 1 , Figure 1 This is a schematic diagram of a power distribution system. For example... Figure 1As shown, in this power distribution system, loads 1, 2, ..., n typically obtain power from the main distribution cabinet through a distribution box. The distribution box then supplies power to multiple alternating current to direct current (AC-DC) voltage conversion modules mounted on it. These AC-DC modules 1, 2, ..., n respectively convert the voltage to the appropriate voltage required by loads 1, 2, ..., n, thus supplying power to each load. Therefore, as the number of loads increases, the number of power supply interfaces in the distribution box also needs to increase, leading to a continuous increase in the overall size of the distribution box. However, the internal space of semiconductor equipment is limited, making it difficult to accommodate such a large distribution box. Meanwhile, since a large number of power lines are drawn from the same distribution point and extend to the loads in various parts of the semiconductor equipment, the power cables are of varying lengths and are numerous. This not only greatly increases the difficulty of internal wiring in the semiconductor equipment, but also makes the dense cable arrangement prone to damage to the cable insulation layer due to friction, bending and other reasons, which can lead to load power loss, chain breakage and other faults, significantly increasing the difficulty of operation, maintenance and fault detection of the power distribution system.

[0027] The power distribution system provided in this application embodiment constructs a distributed power supply architecture through a source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Any layer of DC power distribution unit can supply power to the load or the next layer of DC power distribution unit based on the input voltage provided by the layer above. By nesting DC power distribution units at each level, the power supply interfaces of the power distribution system can be flexibly increased, while reducing the power supply interfaces of the source-end main power distribution unit, thereby reducing the size of the source-end main power distribution unit. The power distribution system provided in this application embodiment can support the flexible deployment of DC power distribution units at different physical locations of the connected loads, significantly reducing the number of power supply lines and wiring complexity. Furthermore, by setting different layers of DC power distribution units to supply power to different loads with different voltage requirements, voltage hierarchical management can be achieved, avoiding the redundancy of additional voltage conversion modules required for a single power supply to supply different loads with different voltage requirements, reducing energy loss across voltage conversions, and reducing the number of upper-layer lines and cross-interference through centralized power supply to different loads with the same voltage requirements. This accurately adapts to the voltage characteristics and protection requirements of different loads, thereby improving the overall system efficiency and power supply quality.

[0028] The power distribution system provided in this application is applicable to various power consumption scenarios, such as semiconductor equipment, industrial automated production lines, or precision instrument clusters. For ease of description, this application will use a power supply scenario on semiconductor equipment as an example to illustrate the power distribution system provided in this application.

[0029] This application provides a semiconductor device, which includes multiple process chambers and a power distribution system provided in this application. One of the process chambers houses one or more loads with the same required voltage, while different process chambers house different loads with different required voltages. Here, the loads include at least one of a motor, a sensor, or an optical device. In a semiconductor device, multiple process chambers are typically arranged functionally within the machine. Each process chamber can house various loads such as motors, sensors, and optical devices. A dedicated power supply network for the semiconductor device supplies power to the loads in each process chamber, and the power distribution system provides a stable power supply to the loads, ensuring the reliable operation of the precision manufacturing process of the semiconductor device.

[0030] To facilitate understanding, the following will combine... Figures 2 to 8 The power distribution system and power distribution method provided in the embodiments of this application are illustrated by examples.

[0031] See Figure 2 , Figure 2 This is a schematic diagram of a power distribution system provided in an embodiment of this application. Figure 2As shown, the power distribution system includes a source-end main power distribution unit 200 and hierarchically connected multi-layer DC power distribution units. The hierarchically connected multi-layer DC power distribution units include first-layer DC power distribution units (e.g., DC power distribution units 201a, 201b, ..., 201n), second-layer DC power distribution units (e.g., DC power distribution units 202a, ..., 202n), ..., and k-th-layer DC power distribution units (e.g., DC power distribution units 20ka, ..., 20kn). Here, the source-end main power distribution unit 200 can provide a stable power input to the entire power distribution system. This power input can be provided by an external power source or an internal power source, depending on the actual application scenario, and is not limited here. External power sources include, but are not limited to, three-phase AC power, centralized DC bus, or grid-side distributed energy storage power sources, depending on the actual application scenario, and are not limited here. Internal power sources include, but are not limited to, energy storage battery packs (such as lithium battery packs or lead-acid battery packs) or regenerative braking energy power sources recovered from within the equipment. The specific power source can be determined based on the actual application scenario and is not limited here. For different types of input power sources, the source-side main power distribution unit 200 can integrate, but is not limited to, AC-DC rectifier modules, power factor correction modules, isolation transformers, and DC-DC pre-regulator modules. The specific power source can be determined based on the actual application scenario and is not limited here. The source-side main power distribution unit 200 can convert the input AC or DC power supply into a stable voltage usable by the DC power distribution unit. The source-side main power distribution unit 200 can provide multiple power supply interfaces for connecting to the first-layer DC power distribution units (such as DC power distribution unit 201a, DC power distribution unit 201b, ..., DC power distribution unit 201n, etc.) to supply power to each DC power distribution unit in the first layer. Here, a DC power distribution unit can connect to the source-side main power distribution unit 200 via one power supply interface to obtain power from the source-side main power distribution unit 200. It is understandable that there can be one or more DC power distribution units in each layer.

[0032] In some feasible implementations, any one of the aforementioned multi-layer DC distribution units is used to supply power to the load connected to that layer based on the input voltage provided by the connected upper-layer DC distribution unit, wherein the load has a required voltage corresponding to that layer. It is also used to supply power to the next layer connected to that layer, wherein the upper-layer DC distribution unit of the first layer in the multi-layer DC distribution units is the aforementioned source-side main distribution unit. In the power distribution system provided in the embodiments of this application, each DC distribution unit can supply power to the connected load with the corresponding required voltage based on the input voltage provided by the connected upper-layer DC distribution unit, or it can supply power to the connected lower-layer DC distribution unit. For example, such as... Figure 2As shown, the source-end main power distribution unit 200 is used to supply power to the first-layer DC power distribution units 201a, 201b, ..., 201n in the aforementioned multi-layer DC power distribution units. The first-layer DC power distribution unit (e.g., DC power distribution unit 201a) can supply power to the load and to the connected next-layer DC power distribution unit (e.g., DC power distribution unit 202a) based on the input voltage provided by the source-end main power distribution unit 200. It can be understood that... Figure 2 In the power distribution system shown, multiple levels of DC power distribution units can be built based on nested expansion. The number of levels of DC power distribution units can be determined according to actual application requirements and is not limited here. Here, any level of DC power distribution unit is used to supply power to a load with a corresponding required voltage. It can be understood that DC power distribution units at the same level can supply power to loads with the same required voltage, and DC power distribution units at different levels can supply power to loads with the same required voltage or loads with different required voltages; this is not limited here. Here, the load can be a motor, sensor, optical device, or other equipment deployed in different process chambers within a semiconductor device. Each chamber is arranged functionally within the equipment, and each chamber can deploy one or more loads. In this embodiment, a distributed power supply architecture can be constructed by connecting a source-end main power distribution unit with multi-level DC power distribution units. Furthermore, by nesting DC power distribution units level by level, the power supply interfaces of the power distribution system can be flexibly increased, while reducing the power supply interfaces of the source-end main power distribution unit, thereby reducing the size of the source-end main power distribution unit. Meanwhile, any layer of DC power distribution unit supplies power to loads with corresponding required voltages, which avoids the device redundancy caused by the need to configure additional conversion modules for a single power supply to supply loads with different required voltages, reduces energy loss during voltage conversion, and improves the power supply efficiency and reliability of the power distribution system.

[0033] In some feasible implementations, the DC distribution units at different levels of the aforementioned multi-layer DC distribution unit are used to connect different loads with different voltage requirements to supply power to these loads, which are deployed in different process chambers of the semiconductor equipment. Here, each level of the DC distribution unit outputs a voltage of a specific magnitude to supply power to loads whose voltage requirements match that voltage. Loads with the same voltage requirement are deployed in the same process chamber, while loads with different voltage requirements are deployed in different process chambers. The DC distribution units at different levels supply power to loads deployed in different process chambers. See also... Figure 3 , Figure 3 This is another structural schematic diagram of the power distribution system provided in an embodiment of this application. For example... Figure 3As shown, different loads with different voltage requirements are deployed in different process chambers (e.g., process chamber 1, process chamber 2). Here, the number of loads in each process chamber can be one or more (for ease of description, three loads are shown in each process chamber in the figure). The DC distribution units on different layers of the multi-layer DC distribution unit are used to connect the loads deployed in the different process chambers to supply power to the loads deployed in the different process chambers. For example, the DC distribution unit on the first layer (e.g., DC distribution unit 201a) supplies power to the load in process chamber 1, and the DC distribution unit on the second layer (e.g., DC distribution unit 202a) supplies power to the load in process chamber 2. Here, DC distribution units on the same layer are used to supply power to different loads with the same voltage requirement, while DC distribution units on different layers of the multi-layer DC distribution unit are used to supply power to different loads with different voltage requirements. For example, the source-side main power distribution unit 200 can output a 48V bus voltage to power the first-level DC power distribution unit. The first-level DC power distribution unit can directly output the 48V input voltage provided by the source-side main power distribution unit to power loads requiring 48V, and can convert the 48V input voltage to 24V to power the second-level DC power distribution unit. The second-level DC power distribution unit can directly output the 24V input voltage to power loads requiring 24V, and can convert the 24V input voltage to 12V to power the third-level DC power distribution unit, and so on, thus achieving hierarchical voltage management. In this embodiment, by configuring DC distribution units at different layers to supply power to different loads with different voltage requirements, voltage hierarchical management can be achieved, improving the power supply efficiency and stability of the power distribution system. Simultaneously, by using DC distribution units at different layers to supply power to different loads deployed in different process chambers to adapt to the power needs of different types of loads deployed in different physical locations, power supply zoning management of loads deployed in different physical spaces can be achieved. Furthermore, centralized power supply of different loads with the same voltage requirement from any layer of DC distribution units can reduce the number of upper-layer wiring and signal crosstalk interference, further improving the power supply stability of the power distribution system. Optionally, in some feasible implementations, any DC distribution unit in any layer of DC distribution units is deployed inside or outside the housing of the process chamber where the load connected to the aforementioned DC distribution unit is located. Here, any DC distribution unit can be installed inside or outside the housing of the process chamber where the connected load is located in various forms, including but not limited to wall-mounted, embedded, DIN rail, or modular installations, depending on the actual application scenario, and is not limited here.In this embodiment, deploying any DC power distribution unit near the load, whose required voltage matches the output voltage of the DC power distribution unit, inside or outside the chamber housing, allows the DC power distribution unit responsible for supplying power to the load to be closer to the physical location of the load. This significantly shortens the power supply line transmission distance, reduces cable power transmission loss, and decreases the complexity of cross-regional wiring and cable usage, simplifying the power distribution system structure and thus improving the stability of the power supply. Furthermore, flexibly selecting the installation location of the DC power distribution unit based on the physical space conditions of each chamber effectively improves the integration and space utilization of the power distribution system, meeting the stringent requirements for equipment layout in applications such as semiconductor equipment manufacturing, and demonstrating strong applicability.

[0034] In some feasible implementations, see Figure 4 , Figure 4 This is another structural schematic diagram of the power distribution system provided in an embodiment of this application. For example... Figure 4 As shown, the aforementioned source-end main power distribution unit 200 may include an information processing module. Figure 4In the power distribution system shown, the information processing module can be used to configure the target output voltage for each layer of the multi-layer DC power distribution unit, triggering each layer's output voltage corresponding to the target voltage to supply power to the connected next layer's DC power distribution unit. This information processing module can be the central control unit of the power distribution system, a functional module integrated within the main power distribution unit at the source end, or a functional unit independent of the main power distribution unit at the source end, depending on the specific application scenario. The information processing module can be, but is not limited to, a microprocessor, microcontroller, or system-on-a-chip, depending on the specific application scenario. The specific output voltage value of each layer's DC power distribution unit can be preset, automatically generated based on pre-stored equipment power supply specifications, or dynamically generated by real-time detection of downstream load operating characteristics, depending on the specific application scenario. For example, this information processing module can be used to receive the operating status data of each layer's DC power distribution unit and configure the output voltage for the multi-layer DC power distribution unit based on this operating status data. Here, the operating status data may include, but is not limited to, one or more key parameters of the DC power distribution unit, such as input / output voltage, output current, operating temperature, operating efficiency, and fault status flags. The specific parameters are determined based on the actual application scenario and are not limited here. For example, the information processing module can establish a centralized communication connection with the DC power distribution units at each layer through the system control bus, directly sending voltage configuration information to each DC power distribution unit. Alternatively, the information processing module can also establish a distributed communication connection with the DC power distribution units at each layer, sending voltage configuration information to the first-layer DC power distribution unit and forwarding it downwards through the first-layer DC power distribution unit, effectively reducing the complexity of system wiring. The above communication connection is not limited to a specific method; it can be directly or indirectly connected via wired communication or wireless communication, depending on the actual application scenario and is not limited here. Optionally, the information processing module can also configure voltage characteristic parameters of each layer of DC power distribution units, including but not limited to voltage stability accuracy range, dynamic response rate, or overvoltage / undervoltage protection thresholds, depending on the actual application scenario and is not limited here. In this embodiment, the target voltage of the output voltage of each layer of DC power distribution unit can be centrally configured by the information processing module of the main power distribution unit at the source end according to the actual needs of the load in different chambers. This enables unified management and precise adaptation of the system voltage. At the same time, the remote triggering control mechanism of the information processing module ensures that the DC power distribution unit of each layer outputs the voltage corresponding to the target voltage, resulting in stronger power supply stability.

[0035] In some feasible implementations, such as Figure 4As shown, any layer of DC distribution unit (e.g., DC distribution unit 201a) includes a hierarchical information processing module and a voltage conversion module. The hierarchical information processing module receives voltage configuration information sent by the information processing module of the source-end main distribution unit 200 or the hierarchical information processing module of the previous layer DC distribution unit. This voltage configuration information indicates the target voltage magnitude of the output voltage of any DC distribution unit. The hierarchical information processing module also controls the voltage conversion module to transform the input voltage provided by the previous layer DC distribution unit and output a voltage corresponding to the target voltage magnitude to supply power to the next layer DC distribution unit. Figure 4 In the power distribution system shown, the information processing module in the source-end main power distribution unit 200 establishes a communication connection with the hierarchical information processing module of the first-layer DC power distribution unit. The hierarchical information processing module of any layer of DC power distribution unit establishes a communication connection with the hierarchical information processing module of the connected next-layer DC power distribution unit, thus constructing a complete distributed communication architecture. Furthermore, each DC power distribution unit can receive voltage configuration information from the information processing module of the source-end main power distribution unit 200 or the hierarchical information processing module of the previous layer's DC power distribution unit. Based on this voltage configuration information, it controls the voltage conversion module in the DC power distribution unit to perform corresponding voltage transformation on the input voltage provided by the previous layer's DC power distribution unit. Here, the corresponding voltage transformation can be a boost transformation or a buck transformation, depending on the actual application scenario, and is not limited here. The voltage conversion module can adopt, but is not limited to, non-isolated circuit topologies such as buck and boost, isolated circuit topologies such as flyback and full-bridge, or resonant circuit topologies such as LLC and LCC, depending on the actual application scenario, and is not limited here. The hierarchical information processing module can control parameters such as the on-time, switching frequency, or duty cycle of the power switching devices (e.g., bipolar transistors, MOSFETs) in the voltage conversion module to ultimately stabilize the output voltage of the voltage conversion module to the target voltage. Here, the voltage corresponding to the target voltage output by any layer of DC distribution unit can supply power to the connected next layer of DC distribution unit, or to a load whose required voltage is adapted to the target voltage. In this embodiment, the hierarchical information processing module in any layer of DC distribution unit and the information processing module in the source-end main distribution unit construct a distributed voltage control communication architecture, supporting the hierarchical transmission and local execution of voltage configuration information. Simultaneously, each DC distribution unit can autonomously complete voltage conversion control, improving the power supply control flexibility and reliability of the distribution system.

[0036] Optionally, in some feasible implementations, any DC distribution unit in any layer of DC distribution unit can also integrate functional components including, but not limited to, a soft-start switch and a voltage and current sampling module. For example, the voltage and current sampling module can be used to detect the output voltage, output current, and other status information of the DC distribution unit. The hierarchical information processing module can upload the above status information to the information processing module of the source-end main distribution unit. Based on the received status information of the DC distribution unit, the information processing module of the source-end main distribution unit can remotely configure parameters such as overcurrent and overvoltage protection thresholds of any DC distribution unit. Furthermore, it can independently configure parameters such as overcurrent and overvoltage points according to the real-time electrical properties of the load connected to any DC distribution unit, thereby improving the reliability of the power supply system. In addition, by configuring an independent soft-start switch for any DC distribution unit, the information processing module in the source-end main distribution unit can remotely send power-on or power-off commands to any DC distribution unit, realizing the switching control of the DC distribution unit and thus improving the operational control flexibility of the power distribution system.

[0037] In some feasible implementations, any DC distribution unit in any layer of DC distribution units includes at least one input port and at least two output ports. The input port is used to connect to the output port of the DC distribution unit in the previous layer to receive the input voltage provided by the previous layer. The at least two output ports include a first output port and a second output port. The first output port is used to output a first output voltage to power the load connected to the DC distribution unit, and the magnitude of the first output voltage is the same as the magnitude of the input voltage. The second output port is connected to the output terminal of the voltage conversion module and is used to output a voltage corresponding to the target voltage output by the voltage conversion module after voltage conversion to power the DC distribution unit in the next layer connected to the DC distribution unit, and the magnitude of the target voltage is different from the magnitude of the input voltage provided by the previous layer. For example, see [link to example]. Figure 5 , Figure 5 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application, such as... Figure 5As shown, the input port of DC distribution unit 201a is connected to the output port of the DC distribution unit at the upper level (i.e., the source-end main distribution unit 200) to receive the input voltage provided by the source-end main distribution unit 200. The first output port of DC distribution unit 201a is connected to the load, directly outputting the input voltage to power the load. The second output port of DC distribution unit 201a is connected to the input port of the next-level DC distribution unit (i.e., DC distribution unit 202a), converting the input voltage through a voltage conversion module to output a voltage corresponding to the target voltage to power DC distribution unit 202a. Here, the input port, the first output port, and the second output port can all be one or more, depending on the actual application scenario, and are not limited here. It can be understood that, depending on the actual application requirements, the second output port can also be used to power a load with a voltage requirement consistent with the target voltage, and are not limited here. The first output port can be connected in parallel with the input port through paths including but not limited to a through circuit, bus branch, or electronic switch, to output a first output voltage with the same magnitude as the input voltage, depending on the actual application scenario, and are not limited here. The second output port is connected to the output of the voltage conversion module, outputting the voltage corresponding to the target voltage after precise voltage conversion. This voltage conversion can be a boost conversion or a buck conversion, depending on the actual application scenario, and is not limited here. For example, the source-side main power distribution unit can output a 48V bus voltage to power the first-layer DC power distribution unit. The first-layer DC power distribution unit can receive the input voltage provided by the source-side main power distribution unit through the input port. The first-layer DC power distribution unit can directly output the 48V input voltage provided by the source-side main power distribution unit to power a load with a voltage requirement of 48V through the first output port. The first-layer DC power distribution unit can also convert the 48V input voltage to a 24V voltage and output the 24V voltage through the second output port to power the second-layer DC power distribution unit. Similarly, the second-layer DC distribution unit can receive the input voltage (e.g., 24V) from the first-layer DC distribution unit via its input port, and can directly output the 24V input voltage to power loads requiring 24V via its first output port. The second-layer DC distribution unit can also convert the 24V input voltage to 12V and output 12V via its second output port to power the third-layer DC distribution unit. This can be understood as... Figure 2Taking the power distribution system shown as an example, assuming the last layer of the multi-layer DC power distribution units in this system is layer k, the second output port of the DC power distribution unit in layer (k-1) is used to supply power to the DC power distribution unit in layer k. The second output port of the DC power distribution unit in layer k (e.g., DC power distribution unit 20ka) can be used to supply power to loads whose required voltage matches the output voltage of its second output port. In the embodiments of this application, any layer of DC power distribution unit can directly output the input voltage through the first output port, which can simultaneously supply power to multiple loads adapted to the input voltage, reducing energy loss; through the second output port, a voltage corresponding to the target voltage after input voltage conversion is provided to supply power to the next layer of DC power distribution unit or loads adapted to the target voltage, thereby supporting the multi-layer nested expansion and voltage hierarchical management of the power distribution system. Through precise voltage conversion, the power supply needs of DC power distribution units at different levels are met, resulting in high applicability.

[0038] In some feasible implementations, see Figure 6 , Figure 6 This is another structural schematic diagram of the power distribution system provided in the embodiments of this application. Any layer of DC power distribution unit includes multiple peer DC power distribution units with backup power supply links; any one of these peer DC power distribution units is used to supply power to the load connected to the other peer DC power distribution units or the DC power distribution unit of the next layer when the other peer DC power distribution units have no voltage output. For example, such as... Figure 6As shown, a backup power supply link is provided between DC distribution units 201a and 201b in the first layer; a backup power supply link is also provided between DC distribution units 201c and 201d. When DC distribution unit 201a has no voltage output, its peer DC distribution unit (i.e., DC distribution unit 201b) can take over the power supply task of DC distribution unit 201a through the backup power supply link, supplying power to the load connected to DC distribution unit 201a or the DC distribution unit 202a in the next layer. When DC distribution unit 201c has no voltage output, its peer DC distribution unit (i.e., DC distribution unit 201d) can take over the power supply task of DC distribution unit 201c through the backup power supply link, supplying power to the load connected to DC distribution unit 201c and the DC distribution units in the next layer. It is understandable that configuring multiple DC distribution units at the same level with backup power supply links for any given level of DC distribution unit allows for the backup power supply of any DC distribution unit to take over its power supply task when any of these units experiences a lack of voltage output due to abnormal operating conditions, including but not limited to upgrades, faults, or maintenance. For example, during a power distribution system upgrade, voltage conversion modules typically experience temporary power outages due to upgrade operations (such as program updates or hardware debugging). Since every DC distribution unit includes a voltage conversion module, a power outage in any one of these units could lead to a large-scale power outage in the entire power distribution system. Because DC distribution units at the same level are configured with the same output voltage, a backup power supply link can be established between these units to ensure uninterrupted power supply during system upgrades. During system upgrades, the information processing module must be upgraded sequentially from high to low levels, first upgrading the DC distribution units at the first level, then upgrading the DC distribution units at the second level. During the upgrade of each level's DC distribution units, multiple DC distribution units with backup power links can be upgraded sequentially, with only one unit upgraded at a time, to avoid multiple DC distribution units with backup power links simultaneously experiencing voltage loss. This backup power mechanism can be triggered in several ways. Each DC distribution unit can monitor the operating status of its peer DC distribution units in real time through its own hierarchical information processing module. When a peer DC distribution unit is detected to have no voltage output, it automatically supplies power to the load connected to that peer DC distribution unit and the next-level DC distribution unit through the backup power link. Alternatively, the information processing module of the main power distribution unit at the source end can centrally monitor the global status. When a DC distribution unit is detected to have no voltage output, it directly sends a trigger command to a peer DC distribution unit with power supply capability, driving that peer DC distribution unit to take over power supply through the backup power link.In this embodiment, by enabling DC power distribution units on the same floor to supply power to each other, partial power supply interruption caused by a single DC power distribution unit having no voltage output can be avoided, which greatly improves the power supply continuity and reliability of the power distribution system. At the same time, the backup power supply link starts when the DC power distribution unit has no voltage output, without affecting the independent operation under normal working conditions. The structure is simple and highly applicable.

[0039] In some feasible implementations, a backup switch is provided on the aforementioned backup power supply link. The backup switch is used to activate the backup power supply link when the DC distribution unit has no voltage output. Here, the backup switch can be selected from, but is not limited to, relays, power semiconductor switching devices, etc., which can be determined according to the actual application scenario and are not limited here. It can be understood that the backup switch is in the open state under normal operating conditions and only activates when a power failure signal of the same-level DC distribution unit is detected, ensuring that each same-level DC distribution unit operates independently and further improving the power supply continuity and controllability of the power distribution system. Optionally, the backup switch can be coupled to the hierarchical information processing module of the same-level DC distribution unit connected to the backup power supply link. When the hierarchical information processing module detects that a certain same-level DC distribution unit has no voltage output, it can trigger the corresponding backup switch to activate, so that the backup power supply link forms a path. At this time, the normally operating same-level DC distribution unit can supply power to the load connected to the DC distribution unit with no voltage output and the next-level DC distribution unit through this path. For example, when the hierarchical information processing module confirms that a certain DC distribution unit at the same level has no voltage output through detection methods including but not limited to voltage sampling circuits, current sensors, or digital status signals, and this state continues for a preset confirmation time (e.g., 100ms-500ms), it generates a trigger command to control the backup switch to conduct. Simultaneously, the backup switch can also respond to the trigger command issued by the information processing module of the main distribution unit at the source end, and conduct the backup power supply link. The specific method depends on the actual application scenario and is not limited here. In the embodiments of this application, by setting a backup switch on the backup power supply link, the backup power supply link can be conducted through the backup switch when the DC distribution unit at the same level has no voltage output. This allows other DC distribution units at the same level connected to the backup power supply link to supply power to the load connected to the DC distribution unit at the same level or to the next-level DC distribution unit. Under normal operating conditions, the backup switch keeps the backup power supply link disconnected, ensuring that each DC distribution unit at the same level operates independently, further improving the power supply continuity and controllability of the power distribution system. The structure is simple and highly applicable.

[0040] Alternatively, in some feasible implementations, the first output port of any one of the multiple peer-level DC distribution units is used to connect to a first load to supply power to the first load, or to connect to the input port of another peer-level DC distribution unit to provide input voltage to that other peer-level DC distribution unit. Here, the required voltage of the first load is matched with the output voltage of the first output port. That is, the first output port of any peer-level DC distribution unit can supply power to a load whose required voltage matches its output voltage, or it can connect to the input port of another peer-level DC distribution unit to provide input voltage to that other peer-level DC distribution unit. The second output port of any peer-level DC distribution unit is used to connect to the next-level DC distribution unit connected to the second output port of the other peer-level DC distribution unit, so as to supply power to the next-level DC distribution unit connected to the second output port of the other peer-level DC distribution unit when the other peer-level DC distribution unit has no voltage output. Here, when the second output port of any peer-level DC distribution unit has no voltage output, power can be supplied to the next-level DC distribution unit connected to that peer-level DC distribution unit through the second output port of another DC distribution unit. It is understood that the second output port of any DC distribution unit of the same level can also be connected to a second load, and the required voltage of the second load is compatible with the output voltage of the second output port. In the embodiments of this application, a flexible backup power supply system can be constructed through port interconnection between DC distribution units of the same level, avoiding partial power outages caused by a single DC distribution unit having no voltage output, eliminating the need for additional dedicated backup links, further simplifying the architecture design of the power distribution system, and improving the power supply stability of the power distribution system.

[0041] In one feasible implementation, see Figure 7 , Figure 7 This is another structural schematic diagram of the power distribution system provided in an embodiment of this application. For example... Figure 7As shown, any DC distribution unit in any of the aforementioned layered DC distribution units (such as DC distribution unit 201a) also includes a backup voltage conversion module; wherein, the backup voltage conversion module has the same electrical specifications as the voltage conversion module. The backup voltage conversion module is used to convert the input voltage provided by the upper-layer DC distribution unit and output a voltage corresponding to the target voltage to power the lower-layer DC distribution unit when the voltage conversion module has no voltage output. For example, during normal operation of the voltage conversion module, the backup voltage conversion module is in standby mode; when the voltage conversion module has no voltage output, the backup voltage conversion module can take over the work of the voltage conversion module and continue to provide a voltage output based on the input voltage conversion. It can be understood that the voltage conversion module can also take over the work of the backup voltage conversion module when the backup voltage conversion module has no voltage output and continue to provide a voltage output based on the input voltage conversion. For example, during the upgrade of the power distribution system, the voltage conversion module usually experiences a brief power outage due to upgrade operations (such as program refresh, hardware debugging, etc.). Since every DC distribution unit includes a voltage conversion module, a power outage in any DC distribution unit may lead to a large-scale power outage in the power distribution system. When each DC power distribution unit contains at least two identical voltage conversion modules, the backup voltage conversion module can power the upgrade process, and vice versa, ensuring that all DC power distribution modules can be upgraded simultaneously. In this embodiment, by setting two voltage conversion modules with identical electrical specifications in each DC power distribution unit, power interruption due to no output from the voltage conversion module can be effectively avoided under abnormal operating conditions, including but not limited to upgrades, faults, or maintenance. This effectively improves the continuity and reliability of the power distribution system.

[0042] In some feasible implementations, such as Figure 7 As shown, any DC distribution unit in any layer of DC distribution units (e.g., DC distribution unit 201a) also includes a switching circuit. The input terminals of the voltage conversion module and the backup voltage conversion module are connected to the input terminal of the aforementioned DC distribution unit through this switching circuit. The switching circuit is used to switch the input terminal of the aforementioned DC distribution unit from being connected to the voltage conversion module to being connected to the backup voltage conversion module when the voltage conversion module has no voltage output. Here, the switching circuit can be a single-pole double-throw switch (e.g., ...). Figure 6The circuit can be configured as shown in the diagram, or it can be composed of a combination of multiple independent switches. The specific configuration depends on the actual application scenario and is not limited here. Optionally, the hierarchical information processing module can detect the operating status of the voltage conversion module and send a switching control signal to the switching circuit. For example, the hierarchical information processing module can acquire the output voltage data of the voltage conversion module in real time through a voltage sampling circuit, including but not limited to. When it is determined that the output voltage is lower than a preset threshold (i.e., the main voltage conversion module cannot output an effective voltage), it can generate a switching command and send it to the switching circuit. After receiving the command, the switching circuit can disconnect the voltage conversion module from the input terminal and simultaneously connect the backup voltage conversion module to the input terminal of the DC distribution unit, allowing the backup voltage conversion module to access the input voltage provided by the upper-level DC distribution unit, ensuring the power supply stability of the DC distribution unit. Under normal operating conditions, the switching circuit maintains the connection between the voltage conversion module and the input terminal of the DC distribution unit, ensuring that the input voltage of the DC distribution unit can be converted into a stable output voltage corresponding to the target voltage after voltage conversion. It can be understood that the backup voltage conversion module can also serve as the main voltage conversion module under normal operating conditions, while the original voltage conversion module serves as the backup voltage conversion module. In this embodiment, a switching circuit is used to selectively connect the input terminals of the voltage conversion module and the backup voltage conversion module to the input terminal of the DC power distribution unit. The switching circuit can quickly switch the power supply path to the backup voltage conversion module when the main voltage conversion module has no voltage output, which can effectively improve the operational reliability of the DC power distribution unit and ensure a continuous and stable power supply to the next layer of DC power distribution units or loads connected to the DC power distribution unit.

[0043] This application provides a power distribution method, which is applicable to the above-mentioned... Figures 2 to 7 The provided power distribution system, the method can be derived from the above. Figures 2 to 7The information processing module in the provided power distribution system is executed. This information processing module can be implemented using processing units including, but not limited to, microprocessors, microcontrollers, or system-on-a-chip, depending on the actual application scenario, and is not limited here. The information processing module can be the central control unit of the power distribution system, and can be a device located inside the power distribution system or an independent device located outside the system. If the information processing module is located inside the power distribution system, it can be integrated inside the main power distribution unit at the source end, or it can be independently located outside the main power distribution unit at the source end. If the information processing module is located outside the system, it can interact with other functional modules in the power distribution system through a communication connection, depending on the actual application scenario, and is not limited here. The information processing module may include one or more processors and a memory. The memory is used to store program code, and the processor reads the program code in the memory to execute the power distribution method during runtime. If there is one information processing module, the processor centrally controls all devices and components in the power distribution system; if there are multiple information processing modules, at least one device or component is controlled by a different processor. The methods provided in the embodiments of this application are all described with an information processing module in the power distribution system. The aforementioned processor may include, but is not limited to, microprocessors, microcontrollers, or central processing units, and the specific type may be determined based on the actual product form, without any restrictions here.

[0044] See Figure 8 , Figure 8 This is a schematic flowchart of the power distribution method provided in the embodiments of this application. The power distribution method provided in the embodiments of this application is applicable to the above-mentioned... Figures 2 to 7 The provided power distribution system includes a source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Each of the multi-layer DC power distribution units is used to supply power to a load connected to that unit based on an input voltage provided by the preceding DC power distribution unit, wherein the load has a required voltage corresponding to that unit, and is also used to supply power to the next connected DC power distribution unit. Figure 8 As shown, the method includes the following steps: S801 configures the target voltage magnitude of the output voltage of each layer of DC distribution unit in the multi-layer DC distribution unit.

[0045] In some feasible implementations, the information processing module can configure the target voltage of the output voltage of each layer of the multi-layer DC distribution unit. Here, any layer of DC distribution unit can supply power to a load with a corresponding required voltage. It is understood that DC distribution units on the same layer can supply power to loads with the same required voltage, and DC distribution units on different layers can supply power to loads with the same required voltage or loads with different required voltages; this is not limited here. The information processing module configures different target voltage values ​​for the output voltage of the DC distribution units on different layers, so as to supply power to different loads with different required voltages through the DC distribution units on different layers. The specific value of the output voltage of each layer of DC distribution unit can be preset, automatically generated according to pre-stored equipment power supply specifications, or dynamically generated by real-time detection of the operating characteristics of downstream loads, depending on the actual application scenario; this is not limited here. In semiconductor equipment power supply scenarios, the information processing module can configure different output voltages for the corresponding layer of DC distribution units according to the load power supply requirements of different process chambers of the semiconductor equipment, thereby realizing hierarchical management of system voltage and improving power supply stability. The power distribution method provided by the information processing module for configuring the target voltage of the output voltage of each layer of DC power distribution unit can be found in the description of the implementation of the power distribution system above, and will not be repeated here. In the embodiments of this application, the target voltage of the output voltage of different layers of DC power distribution units can be centrally configured by the information processing module. The output voltage of each layer of DC power distribution unit can be configured according to the actual voltage requirements of different loads, thereby improving the voltage configuration flexibility and power supply efficiency of the power distribution system.

[0046] S802, triggering any layer of DC distribution unit in the multi-layer DC distribution unit to output a voltage corresponding to the target voltage based on the input voltage provided by the connected upper layer DC distribution unit, to supply power to the connected lower layer DC distribution unit, wherein the upper layer DC distribution unit of the first layer DC distribution unit in the above multi-layer DC distribution unit is the source-end main distribution unit.

[0047] In some feasible implementations, the information processing module triggers any one of the multi-layer DC distribution units to output a voltage corresponding to the target voltage value based on the input voltage provided by the connected upper-layer DC distribution unit, thus supplying power to the connected lower-layer DC distribution unit. The power distribution method provided by the implementation of the information processing module triggering any one-layer DC distribution unit to output the target voltage value can be found in the embodiments of the power distribution system described above. Figure 4The corresponding implementation methods will not be described in detail here. In the embodiments of this application, the output voltage of each layer of DC power distribution unit can be centrally configured by the information processing module of the main power distribution unit at the source end according to the actual needs of the load in different process chambers. This can achieve unified management and precise adaptation of the system voltage. At the same time, through the remote trigger control mechanism of the information processing module, it can be ensured that the DC power distribution unit of each layer outputs the voltage corresponding to the target voltage, resulting in stronger power supply stability.

[0048] In some feasible implementations, such as Figure 4 As shown, any layer of DC distribution unit (e.g., DC distribution unit 201a) includes a hierarchical information processing module and a voltage conversion module. The above-mentioned triggering of any layer of DC distribution units in a multi-layered DC distribution system to output a voltage corresponding to a target voltage value based on the input voltage provided by the connected upper-layer DC distribution unit to supply power to the connected lower-layer DC distribution unit includes: the information processing module sending voltage configuration information to the hierarchical information processing module of any DC distribution unit, the voltage configuration information indicating the magnitude of the target voltage output by the aforementioned DC distribution unit; the information processing module triggering the voltage conversion module in any DC distribution unit based on the voltage configuration information to perform voltage conversion based on the input voltage provided by the upper-layer DC distribution unit and output a voltage corresponding to the target voltage value to supply power to the lower-layer DC distribution unit. The power distribution method provided by the implementation method of the information processing module triggering any layer of DC distribution unit to output a target voltage value can be found in the embodiments of the above-described power distribution system. Figure 4 The corresponding implementation methods will not be described in detail here. In the embodiments of this application, the information processing module in the source-end main power distribution unit and the hierarchical information processing modules in each layer of DC power distribution unit construct a distributed voltage control communication architecture, thereby supporting the step-by-step transmission and local execution of voltage configuration information. At the same time, each DC power distribution unit can autonomously complete voltage conversion control, improving the flexibility and reliability of power supply control in the power distribution system.

[0049] In some feasible implementations, any of the aforementioned layer-level DC distribution units includes multiple peer-level DC distribution units equipped with backup power supply links. The method further includes: an information processing module controlling any one of the multiple peer-level DC distribution units to supply power to the load connected to the other peer-level DC distribution units or the next-level DC distribution unit when the other peer-level DC distribution units have no voltage output. Optionally, in some feasible implementations, a backup switch is provided on the backup power supply link. When any DC distribution unit has no voltage output, the information processing module can control the backup switch to activate the backup power supply link. The power distribution method provided by the implementation of the information processing module controlling multiple peer-level DC distribution units to achieve mutual backup power supply can be found in the embodiments of the aforementioned power distribution system. Figure 6The corresponding implementation methods will not be described in detail here. In the embodiments of this application, by equipping any layer of DC power distribution unit with multiple DC power distribution units of the same level, the partial power supply interruption caused by the lack of voltage output of a single DC power distribution unit can be avoided, which greatly improves the power supply continuity and reliability of the power distribution system. At the same time, the backup power supply link starts when the DC power distribution unit loses power, without affecting the independent operation under normal working conditions. The structure is simple and highly applicable.

[0050] Alternatively, in some feasible implementations, any DC distribution unit in any layer of DC distribution units includes a backup voltage conversion module. The backup voltage conversion module and the voltage conversion module have the same electrical specifications. The method further includes: the information processing module controls the backup voltage conversion module to convert the input voltage provided by the upper-layer DC distribution unit and output a voltage corresponding to the target voltage to power the lower-layer DC distribution unit when the voltage conversion module has no voltage output. Optionally, in some feasible implementations, any DC distribution unit in any layer of DC distribution units also includes a switching circuit, through which the input terminals of the voltage conversion module and the backup voltage conversion module are connected to the input terminal of the DC distribution unit. When the voltage conversion module has no voltage output, the information processing module can use the switching circuit to switch the input terminal of the DC distribution unit from being connected to the voltage conversion module to being connected to the backup voltage conversion module. The power distribution method provided by the implementation of the information processing module controlling the backup voltage conversion module of any DC distribution unit to achieve backup power supply can be found in the embodiments of the above power distribution system. Figure 7 The corresponding implementation details will not be repeated here. In the embodiments of this application, by setting two voltage conversion modules with the same electrical specifications in each DC power distribution unit, the power supply interruption caused by the lack of output of the voltage conversion module can be effectively avoided under abnormal operating conditions such as upgrades, faults, or maintenance of the DC power distribution unit, thereby effectively improving the power supply continuity and reliability of the power distribution system.

[0051] The power distribution method provided in this application constructs a distributed power supply architecture through a source-end main power distribution unit and hierarchically connected multi-layer DC power distribution units. Any layer of DC power distribution unit can supply power to the load or the next layer based on the input voltage provided by the layer above it. By nesting DC power distribution units layer by layer, the power supply interfaces of the power distribution system can be flexibly increased, while reducing the power supply interfaces of the source-end main power distribution unit, thereby reducing the size of the source-end main power distribution unit. Furthermore, by setting different layers of DC power distribution units to supply power to different loads with different voltage requirements, voltage hierarchical management can be achieved. This avoids the redundancy of configuring additional voltage conversion modules for different loads with different voltage requirements from a single power source, reducing energy loss across voltage conversions. Moreover, centralized power supply to different loads with the same voltage requirements reduces the number of upper-layer wiring and cross-interference, accurately adapting to the voltage characteristics and protection requirements of different loads, thereby improving the overall system efficiency and power supply quality.

[0052] This application also provides a computer-readable storage medium storing a computer program, the computer program instructions being adapted to be loaded and executed by a processor. Figure 8 For details on the power distribution methods provided in each step, please refer to the above. Figure 8 The implementation methods provided for each step will not be elaborated here.

[0053] The aforementioned computer-readable storage medium can be an internal storage unit of the power distribution system or computer equipment provided in any of the foregoing embodiments, such as a hard disk or memory of the computer equipment. The computer-readable storage medium can also be an external storage device of the computer equipment, such as a plug-in hard disk, smart media card (SMC), secure digital (SD) card, flash card, etc., provided on the computer equipment. Furthermore, the computer-readable storage medium can include both internal storage units and external storage devices of the computer equipment. The computer-readable storage medium is used to store the computer program and other programs and data required by the computer equipment. The computer-readable storage medium can also be used to temporarily store data that has been output or will be output.

[0054] This application also provides a computer program product, which includes computer instructions stored in a computer-readable storage medium; a processor of a computer device reads the computer instructions from the computer-readable storage medium and executes the computer instructions, causing the computer device to perform... Figure 8 For details on the power distribution methods provided in each step, please refer to the above. Figure 8 The implementation methods provided for each step will not be elaborated here.

[0055] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly, for example, they can be fixed connections, detachable connections, abutting connections, or integral connections; those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0056] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to limit the application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. The terms “first,” “second,” etc., used in this application are for distinguishing purposes only and should not be construed as indicating or implying relative importance or order. The term “multiple” used in this application means at least two, i.e., two or more. The term “comprising,” and any variations thereof, in the specification, claims, and drawings of this application are intended to cover non-exclusive inclusion. For example, a process, method, apparatus, product, or device that includes a series of steps or modules is not limited to the listed steps or modules but may optionally include steps or modules not listed, or may optionally include other steps or modules inherent to such processes, methods, apparatus, products, or devices. Any embodiment or design described as “exemplary” or “for example” in the embodiments of this application should not be construed as preferred or advantageous over other embodiments or designs. Specifically, the use of words such as “exemplary” or “for example” is intended to present the relevant concepts in a specific manner. Those skilled in the art will recognize that the modules and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0057] The methods and related apparatuses provided in this application are described with reference to the method flowcharts and / or structural diagrams provided in this application. Specifically, each block of the method flowchart and / or structural diagram, as well as combinations of blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing device to create a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing device, generate instructions for implementing the process. Figure 1 A schematic diagram of one or more processes and / or structures. Figure 1 The computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to operate in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 A schematic diagram of one or more processes and / or structures. Figure 1 The functions specified in one or more boxes. These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable apparatus for implementing the process. Figure 1 A process or multiple processes and / or structures illustrate the steps of the functions specified in one or more boxes.

[0058] The above-disclosed embodiments are merely preferred embodiments of this application and should not be construed as limiting the scope of this application. Therefore, any equivalent variations made in accordance with the claims of this application shall still fall within the scope of this application.

Claims

1. A power distribution system, characterized in that, include: The main power distribution unit at the source end and the multi-layer DC power distribution unit with hierarchical connections; Any one of the multi-layer DC distribution units is used to supply power to the load connected to the any one layer DC distribution unit based on the input voltage provided by the connected upper layer DC distribution unit, wherein the load has a required voltage corresponding to the any one layer DC distribution unit, and is used to supply power to the next layer DC distribution unit connected to the any one layer DC distribution unit. Among them, the DC distribution unit above the first layer of the multi-layer DC distribution unit is the source-end main distribution unit.

2. The system according to claim 1, characterized in that, The DC power distribution units in the multi-layer DC power distribution unit are used to connect different loads with different voltage requirements, and the different loads with different voltage requirements are deployed in different process chambers of the semiconductor equipment.

3. The system according to claim 2, characterized in that, Any DC distribution unit in any layer of DC distribution units is deployed inside or outside the shell of the process chamber where the load connected to any DC distribution unit is located.

4. The system according to any one of claims 1 to 3, characterized in that, The source-end main power distribution unit includes an information processing module; The information processing module is used to configure a target voltage for the output voltage of each layer of the multi-layer DC distribution unit, and trigger each layer of DC distribution unit to output the voltage corresponding to the target voltage to supply power to the connected next layer of DC distribution unit.

5. The system according to claim 4, characterized in that, Each DC distribution unit in any layer of DC distribution unit includes a hierarchical information processing module and a voltage conversion module; The hierarchical information processing module is used to receive voltage configuration information sent by the information processing module of the source-end main power distribution unit or the hierarchical information processing module of the upper-level DC power distribution unit. The voltage configuration information is used to indicate the target voltage magnitude of the output voltage of any DC power distribution unit. The hierarchical information processing module is also used to control the voltage conversion module to perform voltage conversion on the input voltage provided by the upper-level DC distribution unit and output the voltage corresponding to the target voltage to supply power to the lower-level DC distribution unit.

6. The system according to claim 5, characterized in that, Each DC distribution unit in any layer of DC distribution unit includes at least one input port and at least two output ports; The input port is used to connect to the output port of the upper-level DC power distribution unit to receive the input voltage provided by the upper-level DC power distribution unit; The at least two output ports include a first output port and a second output port. The first output port is used to output a first output voltage to supply power to the load connected to any DC power distribution unit. The magnitude of the first output voltage is the same as the magnitude of the input voltage. The second output port is connected to the output terminal of the voltage conversion module and is used to output the voltage corresponding to the target voltage after the voltage conversion module performs voltage conversion to supply power to the next layer DC distribution unit connected to any DC distribution unit. The target voltage is different from the input voltage provided by the previous layer DC distribution unit.

7. The system according to claim 6, characterized in that, Each of the aforementioned DC distribution units includes multiple DC distribution units at the same level equipped with backup power supply links; Any one of the multiple DC distribution units of the same level is used to supply power to the load connected to the other DC distribution units of the same level or the DC distribution unit of the next level when the other DC distribution units of the same level have no voltage output.

8. The system according to claim 7, characterized in that, A backup switch is provided on the backup power supply link; The backup switch is used to activate the backup power supply link when other DC power distribution units of the same level have no voltage output.

9. The system according to claim 7, characterized in that, The first output port of any one of the plurality of DC distribution units of the same level is used to connect to a first load to supply power to the first load, or to connect to the input port of the other DC distribution units of the same level to provide input voltage to the other DC distribution units of the same level. The second output port of any one of the same level DC distribution units is used to connect to the next level DC distribution unit connected to the second output port of the other same level DC distribution unit, so as to supply power to the next level DC distribution unit connected to the second output port of the other same level DC distribution unit when the other same level DC distribution unit has no voltage output.

10. The system according to claim 5 or 6, characterized in that, Any DC power distribution unit in any layer of the DC power distribution unit further includes a backup voltage conversion module; wherein, the backup voltage conversion module and the voltage conversion module have the same electrical specifications. The backup voltage conversion module is used to convert the input voltage provided by the upper-level DC power distribution unit and output a voltage corresponding to the target voltage to supply power to the lower-level DC power distribution unit when the voltage conversion module has no voltage output.

11. The system according to claim 10, characterized in that, The DC power distribution unit in any layer further includes a switching circuit, and the input terminals of the voltage conversion module and the backup voltage conversion module are connected to the input terminal of the DC power distribution unit through the switching circuit. The switching circuit is used to switch the input terminal of any DC power distribution unit from being connected to the voltage conversion module to being connected to the backup voltage conversion module when the voltage conversion module has no voltage output.

12. A semiconductor device, characterized in that, The semiconductor device includes multiple process chambers and a power distribution system as described in any one of claims 1 to 11; Among the plurality of process chambers, one or more loads with the same required voltage are deployed in one of the process chambers, and different loads with different required voltages are deployed in different process chambers.

13. The semiconductor device according to claim 12, characterized in that, The load includes at least one of a motor, a sensor, or an optical device.

14. A power distribution method, characterized in that, The method is applied to the information processing module of a power distribution system, which includes a source-end main power distribution unit and hierarchically connected multi-level DC power distribution units. Any one of the multi-level DC power distribution units is used to supply power to a load connected to that unit based on an input voltage provided by the connected upper-level DC power distribution unit, wherein the load has a required voltage corresponding to that unit, and is also used to supply power to the next-level DC power distribution unit connected to that unit. The method includes: Configure the target voltage magnitude of the output voltage of each layer of DC distribution unit in the multi-layer DC distribution unit; The DC distribution unit in the multi-layer DC distribution unit is triggered to output a voltage corresponding to the target voltage based on the input voltage provided by the connected upper layer DC distribution unit, so as to supply power to the connected lower layer DC distribution unit. The upper layer DC distribution unit of the first layer DC distribution unit in the multi-layer DC distribution unit is the source-end main distribution unit.

15. The method according to claim 14, characterized in that, Each of the aforementioned DC distribution units in any layer includes a hierarchical information processing module and a voltage conversion module; triggering any of the aforementioned multi-layer DC distribution units to output a voltage corresponding to the target voltage based on the input voltage provided by the connected upper-layer DC distribution unit to supply power to the connected lower-layer DC distribution unit includes: Voltage configuration information is sent to the hierarchical information processing module of any DC power distribution unit, the voltage configuration information being used to indicate the target voltage magnitude of the output voltage of any DC power distribution unit; Based on the voltage configuration information, the voltage conversion module in any DC distribution unit is triggered to perform voltage conversion based on the input voltage provided by the upper-level DC distribution unit and output a voltage corresponding to the target voltage to supply power to the lower-level DC distribution unit.

16. The method according to claim 14 or 15, characterized in that, The DC distribution unit at any level includes multiple DC distribution units at the same level equipped with backup power supply links, and the method further includes: When any one of the multiple DC distribution units of the same level has no voltage output, it can supply power to the load connected to the other DC distribution units of the same level or the DC distribution unit of the next level.

17. The method according to claim 15, characterized in that, Any DC distribution unit in any layer of DC distribution unit includes a backup voltage conversion module; wherein the backup voltage conversion module and the voltage conversion module have the same electrical specifications, and the method further includes: When the backup voltage conversion module has no voltage output, it controls the input voltage provided by the upper-level DC power distribution unit to perform voltage conversion and output a voltage corresponding to the target voltage to supply power to the lower-level DC power distribution unit.

18. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program adapted to be loaded by a processor and executed as described in any one of claims 14 to 17.

19. A computer program product, characterized in that, The computer program product includes computer instructions stored in a computer-readable storage medium; a processor of a computer device reads the computer instructions from the computer-readable storage medium and executes the computer instructions to cause the computer device to perform the method as described in any one of claims 14 to 17.

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