Digital micro-control flow device and driving system

Abstract

The invention relates to a digital flow micro-control device and a driving system, the digital flow micro-control device comprises a shell and two fine adjustment control mechanisms, the shell is provided with a containing cavity, a liquid drop operation opening communicated with the containing cavity is formed in the shell, and the two fine adjustment control mechanisms are arranged on the shell; the digital micro-fluidic chip is arranged in the shell and comprises an upper polar plate and a lower polar plate which are sequentially arranged in the height direction of the shell, the two ends of the upper polar plate are connected to the two fine adjustment control mechanisms in a one-to-one correspondence mode, and each fine adjustment control mechanism can drive one end of the upper polar plate connected with the fine adjustment control mechanism to move relative to the lower polar plate. The distance or the relative inclination angle between the upper polar plate and the lower polar plate is adjusted. By respectively adjusting the two mechanisms, not only can the overall lifting of the upper polar plate and the adjustment of the distance between the upper polar plate and the lower polar plate be realized, but also one-side lifting and / or one-side lowering can be realized, so that the inclination angle of the upper polar plate is changed.

Description

Technical Field

[0001] This invention relates to the field of microfluidics, specifically to a digital microfluidic device and driving system. Background Technology

[0002] Digital microfluidics, based on the principle of dielectric wetting, achieves precise manipulation of tiny droplets by applying an electric field between the upper and lower plates of a microfluidic chip, including operations such as movement, splitting, and merging. Due to its advantages of high precision, low reagent consumption, and high degree of automation, this technology has broad application prospects in biomedical detection, high-throughput screening, and other fields.

[0003] However, existing digital microfluidic chips typically employ a monolithic packaging design with a fixed spacing between the upper and lower electrodes, which cannot be flexibly adjusted. In practical applications, the electrode spacing has a decisive impact on the electric field strength and droplet manipulation effect: too large a spacing results in a weak electric field, making droplet actuation difficult; too small a spacing easily leads to droplet adhesion, affecting operational smoothness. Furthermore, the fixed spacing design also limits the chip's adaptability to electrodes of different sizes, making it difficult to meet the diverse experimental needs of various scenarios.

[0004] Currently, most digital microfluidic chips on the market have their upper and lower electrodes packaged as a single unit, which cannot be replaced separately. This results in limited chip functionality, a short lifespan, and high costs. Although some research attempts to achieve spacing adjustment through external clamps, these often have complex structures, low adjustment accuracy, and difficulty in achieving tilt angle adjustment, failing to meet the requirements for high-precision and highly compatible droplet manipulation. Summary of the Invention

[0005] Based on the above description, the present invention provides a digital microfluidic device and driving system, which aims to solve the problem of fixed spacing between the upper and lower electrode plates of existing digital microfluidic chips.

[0006] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: In a first aspect, the present invention provides a digital microfluidic device, comprising: A digital micro-controlled flow fixture includes a housing and two fine-tuning control mechanisms. The housing has a receiving cavity and a droplet operation port communicating with the receiving cavity is provided on the housing. The two fine-tuning control mechanisms are disposed on the housing. A digital microfluidic chip is disposed within the housing. The digital microfluidic chip includes an upper electrode plate and a lower electrode plate arranged sequentially along the height direction of the housing. The two ends of the upper electrode plate are connected to two fine-tuning control mechanisms in a one-to-one correspondence. Each fine-tuning control mechanism can drive one end of the upper electrode plate connected to it to move relative to the lower electrode plate, so as to adjust the distance or relative tilt angle between the upper electrode plate and the lower electrode plate.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] Furthermore, the housing includes a top plate and a bottom plate, the top plate and the bottom plate being closed to form the receiving cavity, the droplet operation port being opened on the top plate, and both of the fine-tuning control mechanisms being located on the top plate.

[0009] Furthermore, the top plate includes a circuit board cover and two fixing brackets. The circuit board cover is disposed between the two fixing brackets. The circuit board cover and the two fixing brackets are closed with the bottom plate to form the receiving cavity. The droplet operation port is opened on the circuit board cover. The two fine-tuning control mechanisms are correspondingly disposed on the two fixing brackets.

[0010] Furthermore, the digital micro-controlled flow fixture includes an upper circuit board and a lower circuit board, wherein the upper circuit board is electrically connected to the lower electrode plate, and the lower circuit board is electrically connected to the upper electrode plate.

[0011] Furthermore, the upper electrode plate includes a first base layer, a first electrode layer, and a first hydrophobic layer stacked sequentially from top to bottom.

[0012] Furthermore, the lower electrode plate includes a second base layer, a second electrode layer, a dielectric layer, and a second hydrophobic layer stacked sequentially from bottom to top.

[0013] Furthermore, the fine-tuning control mechanism includes a clamping plate and an adjusting bolt. The clamping plate has a hollow structure and is sleeved on one end of the upper electrode plate. The tail of the adjusting bolt passes through the fixing frame and abuts against the clamping plate.

[0014] Furthermore, the fine-tuning control mechanism includes a locking member located on one side of the housing, which is used to lock the adjusting bolt.

[0015] In a second aspect, the present invention provides a digital micro-controlled flow drive system, comprising: The digital microfluidic device according to the first aspect; A control board, which is electrically connected to the upper circuit board and the lower circuit board.

[0016] Furthermore, the control board includes a power input module, a boost module, a control module, a signal isolation module, an upper plate signal output module, and a lower plate high voltage output module. The power input module supplies power to the boost module and the control module. The signal input terminal of the signal isolation module is electrically connected to the signal output terminal of the control module. The voltage input terminals of the upper plate signal output module and the lower plate high voltage output module are electrically connected to the two output terminals of the boost module in a one-to-one correspondence. The signal input terminals of the upper plate signal output module and the lower plate high voltage output module are electrically connected to the two signal output terminals of the signal isolation module in a one-to-one correspondence. The signal input terminal of the lower circuit board is electrically connected to the signal output terminal of the upper plate signal output module. The voltage input terminal of the upper circuit board is electrically connected to the voltage output terminal of the lower plate high voltage output module.

[0017] Compared with the prior art, the technical solution of this application has the following beneficial technical effects: (1) By adjusting the two mechanisms separately, the present invention can realize the overall lifting and lowering of the upper electrode plate, adjust the distance between the upper electrode plate and the lower electrode plate to adapt to different electrode sizes and droplet volumes, optimize the electric field strength, and avoid driving failure or droplet adhesion caused by improper spacing. It can also realize the raising and / or lowering of one side, thereby changing the tilt angle of the upper electrode plate to be suitable for experimental scenarios with non-uniform electrode layout or requiring tilted electric field distribution, thus enhancing the applicability of digital microfluidic chips.

[0018] (2) The present invention uses a split design of top plate and bottom plate to realize the disassembly and assembly of top plate and bottom plate, and can quickly replace the upper electrode plate of different specifications.

[0019] (3) The present invention integrates functions such as signal generation and high voltage output on the control board, and can uniformly control the electric field of the upper and lower plates. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a digital microfluidic device provided in an embodiment of the present invention; Figure 2 This is a cross-sectional view of a digital microfluidic device provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the internal structure of the shell in an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the base plate in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the first electrode layer and the second electrode layer in an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the first electrode layer in an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the second electrode layer in an embodiment of the present invention; Figure 8 This is a schematic diagram of the control board in an embodiment of the present invention; Figure 9 This is a circuit connection diagram of a digital micro-controlled flow drive system provided in an embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures: 10. Digital microfluidic device; 11. Digital microfluidic fixture; 111. Housing; 1111. Top plate; 11111. Circuit board cover; 11112. Fixing frame; 1112. Base plate; 11121. Receiving groove; 112. Fine-tuning control mechanism; 1121. Clamping plate; 1122. Adjusting bolt; 1123. Locking element; 1124. Bearing; 113. Upper circuit board; 114. Lower circuit board; 12. Digital microfluidic chip; 121 1211. Upper electrode plate; 1212. First substrate layer; 1213. First electrode layer; 12121. First pin area; 12122. First droplet control area; 12123. Ground area; 1214. First hydrophobic layer; 1225. Lower electrode plate; 1221. Second substrate layer; 1222. Second electrode layer; 12221. Second pin area; 12222. Second droplet control area; 1223. Dielectric layer; 1224. Second hydrophobic layer; 20. Control board; 21. Power input module; 22. Boost module; 23. Control module; 24. Signal isolation module; 25. Upper plate signal output module; 26. Lower plate high voltage output module. Detailed Implementation

[0023] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0025] It is understood that spatial relation terms such as "below," "under," "below," "below," "above," "above," etc., can be used here to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as "below" or "below" of the other element or feature will be oriented "above" the other element or feature. Therefore, the exemplary terms "below" and "below" can include both upper and lower orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0026] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0027] Reference Figures 1 to 3 As shown, the present invention provides a technical solution: a digital microfluidic device 10, including a digital microfluidic fixture 11 and a digital microfluidic chip 12; the digital microfluidic fixture 11 includes a housing 111 and two fine-tuning control mechanisms 112, the housing 111 has a receiving cavity, and a droplet operation port communicating with the receiving cavity is opened on the housing 111, and the two fine-tuning control mechanisms 112 are disposed on the housing 111; the digital microfluidic chip 12 is disposed inside the housing 111, and the digital microfluidic chip 12 includes an upper electrode plate 121 and a lower electrode plate 122 arranged sequentially along the height direction of the housing 111, the two ends of the upper electrode plate 121 are connected to the two fine-tuning control mechanisms 112 respectively, and each fine-tuning control mechanism 112 can drive one end of the upper electrode plate 121 connected to it to move relative to the lower electrode plate 122, so as to adjust the distance or relative tilt angle between the upper electrode plate 121 and the lower electrode plate 122.

[0028] In this embodiment, two fine-tuning control mechanisms 112 can independently drive both ends of the upper electrode plate 121, enabling independent displacement of the upper electrode plate 121 relative to the lower electrode plate 122 along the height direction of the housing 111. By adjusting the two mechanisms respectively, the upper electrode plate 121 can be raised and lowered as a whole, adjusting the distance between the upper electrode plate 121 and the lower electrode plate 122 to adapt to different electrode sizes and droplet volumes, optimizing the electric field strength, and avoiding drive failure or droplet adhesion caused by improper spacing. Alternatively, one side can be raised and / or the other side lowered, thereby changing the tilt angle of the upper electrode plate 121 to suit experimental scenarios with non-uniform electrode layouts or requiring tilted electric field distribution, enhancing the applicability of the digital microfluidic chip 12.

[0029] Reference Figures 1 to 3 As shown, in some embodiments, the housing 111 includes a top plate 1111 and a bottom plate 1112, which cover each other to form a receiving cavity. A droplet operation port is opened on the top plate 1111, and two fine-tuning control mechanisms 112 are both disposed on the top plate 1111. The top plate 1111 and the bottom plate 1112 can be connected by a snap-fit ​​or other means.

[0030] In this embodiment, the top plate 1111 and the bottom plate 1112 are designed to be separate, allowing for the disassembly and assembly of the top plate 1111 and the bottom plate 1112, and enabling the quick replacement of the upper electrode plate 121 of different specifications.

[0031] Reference Figures 1 to 3 As shown, in some embodiments, the top plate 1111 includes a circuit board cover 11111 and two fixing brackets 11112. The circuit board cover 11111 is disposed between the two fixing brackets 11112. The circuit board cover 11111 and the two fixing brackets 11112 cover the bottom plate 1112 to form a receiving cavity. The droplet operation port is opened on the circuit board cover 11111. Two fine adjustment control mechanisms 112 are correspondingly disposed on the two fixing brackets 11112.

[0032] In this embodiment, the fixing frame 11112 provides stable support for the fine-tuning mechanism, and the circuit board cover 11111 facilitates observation of the droplets.

[0033] Reference Figure 4 As shown, in some embodiments, a receiving groove 11121 is provided on the base plate 1112, which is used to receive the upper electrode plate 121, the lower electrode plate 122 and the lower circuit board 114.

[0034] Reference Figures 1 to 3 As shown, in some embodiments, the digital microfluidic fixture 11 includes an upper circuit board 113 and a lower circuit board 114. The upper circuit board 113 is electrically connected to the lower electrode plate 122, and the lower circuit board 114 is electrically connected to the upper electrode plate 121.

[0035] In this embodiment, the upper circuit board 113 is responsible for the signal and high-voltage power supply of the lower electrode plate 122, and the lower circuit board 114 is responsible for the signal and high-voltage power supply of the upper electrode plate 121, achieving independent control. Through the circuit separation design, signal interference is avoided, and control accuracy and reliability are improved.

[0036] Reference Figure 5 As shown, in some embodiments, the upper electrode plate 121 includes a first base layer 1211, a first electrode layer 1212 and a first hydrophobic layer 1213 stacked sequentially from top to bottom.

[0037] In this embodiment, a base layer provides structural support, an electrode layer is used to apply control signals, and a hydrophobic layer prevents droplet adhesion, thereby improving the smoothness of droplet movement.

[0038] Reference Figure 6 As shown, in some embodiments, the first electrode layer 1212 includes a first pin region 12121, a first droplet manipulation region 12122, and a ground region 12123, and the lower circuit board 114 contacts the first pin region 12121 through a first contact array.

[0039] In this embodiment, the first pin region 12121 receives electrical signals, the first droplet manipulation region 12122 generates an electric field, and the grounding region 12123 ensures potential stability. The contact array connection method ensures reliable contact, low resistance, and improved signal transmission efficiency.

[0040] Reference Figure 6 As shown, in some embodiments, the lower electrode 122 includes a second base layer 1221, a second electrode layer 1222, a dielectric layer 1223, and a second hydrophobic layer 1224 stacked sequentially from bottom to top.

[0041] In this embodiment, the functions of the second substrate layer 1221, the second electrode layer 1222, and the second hydrophobic layer 1224 are the same as those of the first substrate layer 1211, the first electrode layer 1212, and the first hydrophobic layer 1213. The dielectric layer 1223 can enhance the electric field concentration effect. By optimizing the electric field distribution through a multilayer structure, the droplet driving efficiency is improved.

[0042] Reference Figure 7 As shown, in some embodiments, the second electrode layer 1222 includes a second pin region 12221 and a second droplet manipulation region 12222, and the upper circuit board 113 contacts the second pin region 12221 through a second contact array.

[0043] In this embodiment, similar to the upper electrode plate 121, the lower electrode plate 122 also adopts a contact array connection to ensure reliable electrical connection.

[0044] Reference Figures 1 to 3As shown, in some embodiments, the fine-tuning control mechanism 112 includes a clamping plate 1121 and an adjusting bolt 1122. The clamping plate 1121 is a hollow structure and is sleeved on one end of the upper electrode plate 121. The tail of the adjusting bolt 1122 penetrates the top of the housing 111 and abuts against the clamping plate 1121. The hole on the housing 111 through which the adjusting bolt 1122 can pass can be a threaded hole.

[0045] In this embodiment, the clamping plate 1121 can be pushed or pulled by rotating the adjusting bolt 1122, thereby realizing the height adjustment of the corresponding end of the upper electrode plate 121.

[0046] Reference Figures 1 to 3 As shown, in some embodiments, the fine-tuning control mechanism 112 includes a locking member 1123, which is located on one side of the housing 111 and is used to lock the adjusting bolt 1122. The locking member 1123 may be a locking knob.

[0047] In this embodiment, after the upper electrode plate 121 is adjusted to the correct position, the locking member 1123 can fix the position of the adjusting bolt 1122 to prevent positional displacement due to vibration or external force. The locking member 1123 enhances the adjustment stability and ensures that the position of the upper electrode plate 121 remains unchanged during the experiment.

[0048] Reference Figures 1 to 3 As shown, in some embodiments, the fine-tuning control mechanism 112 includes a bearing 1124, which is sleeved on the tail of the adjusting bolt 1122 so that the adjusting bolt 1122 abuts against the clamping plate 1121 through the bearing 1124.

[0049] In this embodiment, the bearing 1124 reduces the friction between the adjusting bolt 1122 and the clamping plate 1121, making the adjustment smoother.

[0050] Reference Figures 8 to 9 As shown, the present invention provides a technical solution, a digital micro-controlled flow drive system comprising: According to the aforementioned digital micro-flow control device 10; Control board 20 is electrically connected to upper circuit board 113 and lower circuit board 114.

[0051] In this embodiment, the control board 20 integrates functions such as signal generation and high voltage output, and can uniformly control the electric fields of the upper electrode plate 121 and the lower electrode plate 122.

[0052] Reference Figures 8 to 9As shown, in some embodiments, the control board 20 includes a power input module 21, a boost module 22, a control module 23, a signal isolation module 24, an upper plate signal output module 25, and a lower plate high voltage output module 26. The power input module 21 supplies power to the boost module 22 and the control module 23. The signal input terminal of the signal isolation module 24 is electrically connected to the signal output terminal of the control module 23. The voltage input terminals of the upper plate signal output module 25 and the lower plate high voltage output module 26 are electrically connected to the two output terminals of the boost module 22 in a one-to-one correspondence. The signal input terminals of the upper plate signal output module 25 and the lower plate high voltage output module 26 are electrically connected to the two signal output terminals of the signal isolation module 24 in a one-to-one correspondence. The signal input terminal of the lower circuit board 113 is electrically connected to the signal output terminal of the upper plate signal output module 25. The voltage input terminal of the upper circuit board 114 is electrically connected to the voltage output terminal of the lower plate high voltage output module 26.

[0053] In this embodiment, the power input module 21 is connected to an external power source to power the boost module 22 and the control module 23. The control module 21 generates corresponding control signals according to a preset droplet operation program. The key function of the signal isolation module 24 is to electrically isolate the control side from the high-voltage side. It transmits the control signals from the control module 23 to the high-voltage side without loss, while ensuring that any noise or interference generated on the high-voltage side will not backflow to the precision control module 23. The isolated control signals are respectively sent to the upper electrode plate signal output module 25 and the lower electrode plate high-voltage output module 26. At the same time, the boost module 23 boosts the input voltage to the high voltage required for the driving fluid and provides high-voltage power to the upper electrode plate signal output module 25 and the lower electrode plate high-voltage output module 26 respectively. After receiving the control signals and the high voltage, the upper electrode plate signal output module 25 generates a high-voltage AC signal with specific timing, frequency and amplitude, which is transmitted to a specific electrode of the upper electrode plate 121 through the lower circuit board 114. The lower electrode high voltage output module 26 distributes the high voltage power supply to each independent electrode of the lower electrode 122 in a specific on / off sequence according to the control signal, thereby forming a dynamically changing potential pattern on the surface of the lower electrode 122.

[0054] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A digital microfluidic device, characterized in that, include: The digital micro-controlled flow fixture (11) includes a housing (111) and two fine-tuning control mechanisms (112). The housing (111) has a receiving cavity, and a droplet operation port communicating with the receiving cavity is opened on the housing (111). The two fine-tuning control mechanisms (112) are disposed on the housing (111). A digital microfluidic chip (12) is disposed inside the housing (111). The digital microfluidic chip (12) includes an upper electrode plate (121) and a lower electrode plate (122) arranged sequentially along the height direction of the housing (111). The two ends of the upper electrode plate (121) are connected to two fine-tuning control mechanisms (112) respectively. Each fine-tuning control mechanism (112) can drive one end of the upper electrode plate (121) connected to it to move relative to the lower electrode plate (122) to adjust the distance or relative tilt angle between the upper electrode plate (121) and the lower electrode plate (122).

2. The digital microfluidic device according to claim 1, characterized in that, The housing (111) includes a top plate (1111) and a bottom plate (1112). The top plate (1111) and the bottom plate (1112) are closed to form the receiving cavity. The droplet operation port is opened on the top plate (1111), and the two fine-tuning control mechanisms (112) are both provided on the top plate (1111).

3. The digital microfluidic device according to claim 2, characterized in that, The top plate (1111) includes a circuit board cover (11111) and two fixing brackets (11112). The circuit board cover (11111) is located between the two fixing brackets (11112). The circuit board cover (11111) and the two fixing brackets (11112) are closed with the bottom plate (1112) to form the receiving cavity. The droplet operation port is opened on the circuit board cover (11111). The two fine adjustment control mechanisms (112) are correspondingly located on the two fixing brackets (11112).

4. The digital microfluidic device according to claim 1, characterized in that, The digital micro-control flow fixture (11) includes an upper circuit board (113) and a lower circuit board (114). The upper circuit board (113) is electrically connected to the lower electrode plate (122), and the lower circuit board (114) is electrically connected to the upper electrode plate (121).

5. The digital microfluidic device according to claim 4, characterized in that, The upper electrode plate (121) includes a first base layer (1211), a first electrode layer (1212) and a first hydrophobic layer (1213) stacked from top to bottom.

6. The digital microfluidic device according to claim 4, characterized in that, The lower electrode plate (122) includes a second base layer (1221), a second electrode layer (1222), a dielectric layer (1223), and a second hydrophobic layer (1224) stacked sequentially from bottom to top.

7. The digital microfluidic device according to claim 3, characterized in that, The fine-tuning control mechanism (112) includes a clamping plate (1121) and an adjusting bolt (1122). The clamping plate (1121) is a hollow structure. The clamping plate (1121) is sleeved on one end of the upper electrode plate (121). The tail of the adjusting bolt (1122) passes through the fixing frame (11112) and abuts against the clamping plate (1121).

8. The digital microfluidic device according to claim 7, characterized in that, The fine-tuning control mechanism (112) includes a locking member (1123), which is located on one side of the housing (111) and is used to lock the adjusting bolt (1122).

9. A digital micro-controlled flow drive system, characterized in that, include: The digital microflow control device (10) according to claim 4; The control board (20) is electrically connected to the upper circuit board (113) and the lower circuit board (114).

10. The digital micro-controlled flow drive system according to claim 9, characterized in that, The control board (20) includes a power input module (21), a boost module (22), a control module (23), a signal isolation module (24), an upper plate signal output module (25), and a lower plate high voltage output module (26). The power input module (21) supplies power to the boost module (22) and the control module (23). The signal input terminal of the signal isolation module (24) is electrically connected to the signal output terminal of the control module (23). The voltage input terminal of the upper plate signal output module (25) and the lower plate high voltage output module (26) are connected to the signal output terminal of the control module (23). The voltage input terminals of the upper plate signal output module (25) and the lower plate high voltage output module (26) are electrically connected to the two output terminals of the boost module (22) in a one-to-one correspondence. The signal input terminals of the upper plate signal output module (25) and the lower plate high voltage output module (26) are electrically connected to the two signal output terminals of the signal isolation module (24) in a one-to-one correspondence. The signal input terminal of the lower circuit board (113) is electrically connected to the signal output terminal of the upper plate signal output module (25). The voltage input terminal of the upper circuit board (114) is electrically connected to the voltage output terminal of the lower plate high voltage output module (26).

Images