Vibration isolation device integrating horizontal-vertical cooperative control and vibration isolation method

Abstract

The invention relates to the technical field of vibration isolation, in particular to a vibration isolation device integrating horizontal-vertical cooperative control and a vibration isolation method. The bearing table is located above the foundation table, and a state monitoring component is installed on the bearing table; the vertical adjusting assembly is used for adjusting the relative position of the bearing table relative to the base table in the vertical direction, and the horizontal adjusting assembly is used for adjusting the relative position of the bearing table relative to the base table in the horizontal direction; the control module is installed on the base table and used for receiving data collected by the state monitoring component and outputting instructions to control the vertical adjusting assembly and the horizontal adjusting assembly to move respectively so as to achieve adjustment of the bearing table in the vertical direction and the horizontal direction. The technical problems that in the prior art, vibration isolation equipment is large in occupied space, the vibration isolation effect is affected due to the time delay problem, the equipment cannot adapt to a high-frequency attitude fluctuation scene, and the damping force adaptability is poor are solved.

Description

Technical Field

[0001] This invention relates to the field of vibration isolation technology, and in particular to a vibration isolation device and method that integrates horizontal-vertical coordinated control. Background Technology

[0002] With the rapid development of semiconductor manufacturing, ultra-precision measurement, and aerospace technology, core process equipment such as lithography machines, ultra-precision coordinate measuring machines, electron microscopes, and inertial navigation test benches face extremely high requirements for the micro-vibration control of their working environment. Minor vibrations in the environment have become a key factor affecting the ultimate performance of equipment, limiting manufacturing yield, and measurement accuracy. For example, in 12-inch wafer lithography processes, even minute vibration disturbances can cause lithographic pattern shifts, increasing linewidth errors from ±2nm to ±10nm, directly resulting in a sharp drop in yield and significant economic losses. Currently, vibration isolation technology for precision equipment is mainly divided into two categories: passive vibration isolation and active vibration isolation. Passive vibration isolation relies on components such as springs, rubber, or air flotation, and has the advantages of simple structure and good high-frequency vibration isolation effect, and is widely used in industry. However, passive vibration isolation systems have a resonance peak at their own natural frequency. They not only cannot isolate low-frequency vibrations below this frequency, but will also amplify them. This inherent defect makes it difficult to meet the isolation requirements of equipment such as lithography machines and electron microscopes for low-frequency (especially below 5Hz) micro-vibrations. Active vibration isolation technology monitors vibration in real time through sensors, and the controller drives the actuator to generate a reverse force to cancel the vibration. It can effectively broaden the vibration isolation bandwidth and is particularly good at handling low-frequency interference.

[0003] Existing vibration isolation devices mostly adopt a "separate design for horizontal vibration isolation and vertical leveling." The horizontal direction relies on traditional magnetorheological dampers without predictive control, while the vertical direction uses a single-rod leveling driven by an independent motor. The two are spatially dispersed and lack coordinated motion constraint design. For example, the invention patent application CN120100860A discloses a modular multi-mechanism vibration isolation and energy-dissipating vibration absorption integrated device and its control method, including a support with multiple corrugated plates fixedly connected inside. A magnetorheological damper is fixedly connected to the bottom of the inner wall of each corrugated plate. The damper includes a magnetorheological damper with a dynamic vibration absorber fixedly connected to its top, a particle damper fixedly connected to its top, and a control unit located on the outside of the support. The magnetorheological damper comprises a first outer shell, with a piston rod fixedly connected to the inner wall of the first outer shell. By integrating multiple mechanisms such as corrugated plate vibration isolation, particle damping energy dissipation, dynamic vibration absorber vibration absorption, and intelligent control of the magnetorheological damper, it achieves comprehensive suppression of vibration. Under different frequencies and vibration conditions, the modules work together to significantly improve the vibration reduction effect.

[0004] The aforementioned technologies still have many problems, such as: ① Large space occupation and motion interference: The horizontal and vertical control units are arranged independently, resulting in a large overall volume. The horizontal damper and the vertical rod are mostly rigidly connected, causing additional constraints on the vertical rod during horizontal vibration, reducing the vibration isolation accuracy by 40%; ② Time delay issues lead to control failure: The horizontal direction only uses passive damping or conventional active control (such as PID), without a predictive mechanism. The time delay (50-150ms) of the magnetorheological damper causes vibration suppression to lag, and even amplifies vibration in the high-frequency range (20-50Hz), increasing the amplitude by 30%; ③ Existing vibration isolation devices mostly use hydraulic drive or screw jack structure for vertical leveling: Hydraulic structures have the risk of oil leakage, and are prone to leveling failure due to changes in oil viscosity in low-temperature environments; Screw jacks rely on a single motor to drive a single rod for adjustment, which increases equipment costs and requires multiple iterations to correct the levelness. Moreover, the vertical adjustment frequency is limited to 0.1-1Hz, which cannot adapt to high-frequency attitude fluctuation scenarios; ④ Poor damping force adaptability: The parameters of the horizontal damper are fixed and cannot be dynamically adjusted according to the vibration frequency (such as low frequency large amplitude / high frequency small amplitude), and the vibration isolation efficiency is less than 50% in the wide frequency band (0.5-50Hz). Summary of the Invention

[0005] The purpose of this invention is to provide an integrated horizontal-vertical coordinated control vibration isolation device and method to solve the technical problems of existing vibration isolation equipment, such as large space occupation, vibration isolation effect affected by time delay, inability to adapt to high-frequency attitude fluctuation scenarios, and poor damping force adaptability.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A vibration isolation device integrating horizontal-vertical coordinated control, comprising: Basic platform; A bearing platform is located above the foundation platform, and a condition monitoring component is installed on the bearing platform to monitor the vibration data of the bearing platform. Both the vertical adjustment component and the horizontal adjustment component are installed between the base platform and the support platform. The vertical adjustment component is used to adjust the relative position of the support platform with respect to the base platform in the vertical direction, and the horizontal adjustment component is used to adjust the relative position of the support platform with respect to the base platform in the horizontal direction. The control module, installed on the base platform, receives data collected by the status monitoring component and outputs commands to control the vertical and horizontal adjustment components to move respectively, thereby adjusting the vertical and horizontal directions of the support platform, isolating vibration, and achieving vibration isolation.

[0007] Furthermore, the condition monitoring component includes a horizontal vibration sensor, a tilt sensor, and a force sensor, wherein the tilt sensor comprises two and is respectively installed at two adjacent corners of the support platform, the horizontal vibration sensor comprises two and is respectively installed at the midpoint of two adjacent sides of the support platform, and the force sensor is installed on the upper or lower surface of the support platform.

[0008] Furthermore, the vertical adjustment assembly includes four sets of vertical adjustment units located at the four corners of the base platform's diagonal. Each vertical adjustment unit includes a vertical rod sleeve fixedly installed at its bottom relative to the base platform and a vertical lifting seat slidably installed relative to the rod sleeve. The top of the vertical lifting seat abuts against the bottom surface of the support platform via a vertical universal connector. The bottom surface of the support platform is provided with four sets of circular limiting seats. The movement range of the vertical universal connector is limited by the circular limiting seats. The vertical lifting seat is driven to perform vertical lifting and lowering actions by a vertical drive assembly.

[0009] Furthermore, the vertical drive assembly includes a power unit, which controls the vertical lifting seat to achieve lifting and adjustment in the vertical direction through a gear and rack assembly. The power unit includes two sets, and each set of power units controls the two vertical lifting seats located diagonally to move in opposite directions through belt transmission.

[0010] Furthermore, the gear and rack assembly includes a gear rotatably mounted on a gear bearing housing, which is mounted on a base platform. The vertical lifting seat has a rack on its side that meshes with the gear. The gear also has a pulley arranged concentrically with it. The gear is driven to rotate by a power unit mounted on a support platform. Two pulleys located diagonally are connected by a transmission belt to achieve synchronous rotation.

[0011] Furthermore, the horizontal adjustment assembly includes four sets of horizontal adjustment units located at the midpoints of the four sides of the base platform. Each set of horizontal adjustment units includes a magnetorheological damper mounted on the base platform and an L-shaped sleeve connected to the power output end of the magnetorheological damper. A telescopic rod is slidably mounted on the top of the L-shaped sleeve, and the top of the telescopic rod is hinged to the bottom surface of the support platform through a horizontal universal connector. The L-shaped sleeve and the power output end of the magnetorheological damper are rotatably mounted so that while the magnetorheological dampers of two opposing horizontal adjustment units output reverse forces, the L-shaped sleeves of the other two opposing horizontal adjustment units rotate relative to the power output ends of their magnetorheological dampers to avoid interference.

[0012] Furthermore, the L-shaped sleeve is rotatably connected to the power output end of the magnetorheological damper via a bearing, and a reinforcing rib is provided at the corner of the L-shaped sleeve.

[0013] Furthermore, an integrated horizontal-vertical coordinated control vibration isolation method is also provided. The integrated horizontal-vertical coordinated control vibration isolation method includes: collecting vibration data of the bearing platform to obtain a vibration data set; calculating horizontal adjustment amount and vertical adjustment amount based on the vibration data set; controlling the movement of the horizontal adjustment component according to the horizontal adjustment amount, and controlling the movement of the vertical adjustment component according to the vertical adjustment amount, so as to achieve vibration isolation.

[0014] Further, the method for calculating the horizontal adjustment amount includes: obtaining the maximum allowable time delay based on the vibration data set and the preset motion equation; obtaining a time delay determination result based on the maximum allowable time delay, wherein the time delay determination result includes compensation required and no compensation required; calculating the predicted acceleration based on the time delay determination result; comparing the predicted acceleration with the expected value to obtain the acceleration deviation and the deviation change; inputting the acceleration deviation and the deviation change into a fuzzy controller; optimizing the fuzzy controller parameters, wherein the fuzzy controller parameters include a first quantization factor, a second quantization factor, and a scaling factor; calculating the horizontal adjustment amount based on the optimized fuzzy controller; performing co-simulation on the horizontal adjustment amount to obtain the vibration isolation effect corresponding to the horizontal adjustment amount; if the vibration isolation effect meets expectations, outputting the horizontal adjustment amount; if the vibration isolation effect does not meet expectations, continuing to optimize the fuzzy controller parameters until the vibration isolation effect meets expectations.

[0015] Furthermore, the method for calculating the vertical adjustment amount includes: obtaining the vertical extension / retraction amount based on the vibration data set; and calculating the vertical adjustment amount based on the transmission clearance and the vertical extension / retraction amount.

[0016] Compared with the prior art, the technical solution of the present invention has the following beneficial effects: (1). This invention integrates core units such as horizontal magnetorheological damping and vertical leveling drive into the same compact space through integrated structural design. At the same time, it adopts the coordinated cooperation of L-shaped sleeve, vertical universal connector and horizontal universal connector to completely eliminate the constraint interference of vertical lifting seat during horizontal vibration, ensure that the horizontal motion freedom of the bearing platform is not restricted, and no additional error is introduced during vibration isolation. This solves the spatial redundancy and motion interference problems caused by the separation of horizontal and vertical control units that are common in the prior art. (2). This invention introduces a composite algorithm architecture of three-layer neural network prediction and adaptive fuzzy control. By utilizing the strong fitting ability of neural networks to vibration trends, it can accurately predict the displacement and velocity state of horizontal vibration in advance. Based on this, the fuzzy controller drives the magnetorheological damper to apply the corresponding damping force in advance, reducing the impact of time delay on control accuracy to less than 5ms. This solves the problem of vibration suppression lag or even amplification caused by time delay in traditional active control from the root, overcomes the time delay bottleneck of horizontal vibration control, and greatly improves the horizontal vibration isolation accuracy. (3). This invention designs a vertical adjustment mechanism with belt-driven diagonal gears and telescopic rod extension, which enables a single motor to achieve synchronous reverse movement of the diagonal vertical lifting seat, reducing the adjustment response time from the traditional 2s to less than 0.5s. At the same time, the stroke and motion characteristics of the rod structure extend the vertical adjustment frequency from 0.1~1Hz to 0.1~5Hz, effectively adapting to high-frequency attitude fluctuation scenarios and breaking through the limitations of vertical adjustment efficiency and frequency range, thus meeting the needs of precision equipment for rapid and wide-frequency vertical adjustment. (4). This invention uses vibration data collected in real time by the condition monitoring component to intelligently switch the damping strategy. When there is low-frequency large-amplitude vibration, the damping is automatically increased to absorb energy quickly, and when there is high-frequency small-amplitude vibration, the damping is reduced to ensure smooth vibration isolation, thereby realizing wide-band damping adaptive control and fully covering the complex vibration environment faced by precision equipment. By setting reinforcing ribs at the corner of the L-shaped sleeve, its fatigue resistance is greatly improved and its fatigue life is extended. The control module is independently cavityd, so there is no need to disassemble the core transmission component during maintenance. The faulty module can be directly replaced, which improves maintenance efficiency, device reliability and portability. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a three-dimensional structural diagram of the present invention without the support platform; Figure 3 This is a flowchart of the vibration isolation method integrating horizontal-vertical coordinated control according to the present invention; Figure 4 This is a schematic diagram of the adaptive fuzzy control system of the present invention; Figure 5 This is a schematic diagram of the fuzzy control rules of the present invention; Figure 6 This is a schematic diagram of the triangular membership function of the present invention; Figure 7 This is a schematic diagram of the membership function of the present invention.

[0018] In the diagram: 100, bearing platform; 101, tilt sensor; 102, horizontal vibration sensor; 103, circular limit seat; 200, base platform; 300, vertical adjustment assembly; 301, vertical rod sleeve; 302, vertical lifting seat; 303, power unit; 304, vertical universal connector; 305, gear bearing seat; 306, pulley; 307, gear; 308, rack; 309, transmission belt; 400, horizontal adjustment assembly; 401, magnetorheological damper; 402, L-shaped sleeve; 403, telescopic rod; 404, horizontal universal connector. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] The accompanying drawings are for illustrative purposes only and should not be construed as limiting the scope of this patent. The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of this application. The singular forms “a,” “described,” and “…” used in the embodiments of this application and the appended claims are also considered. The word "the" is also intended to include the majority form unless the context clearly indicates otherwise. It should also be understood that the term "and / or" as used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0021] In the following description, when referring to the accompanying drawings, the same numbers in different drawings denote the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0022] In the description of this application, it should be understood that the terms "first," "second," "third," etc., are used only to distinguish similar objects and are not necessarily used to describe a specific order or sequence, nor should they be construed as indicating or implying relative importance. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] Furthermore, in the description of this application, unless otherwise stated, "multiple" means two or more. "And / or" The description of the relationships between related objects indicates that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. The character " / " generally indicates that the preceding and following related objects have an "OR" relationship. The invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] To address the limitations of existing technologies, this embodiment provides a technical solution. The technical solution of the present invention will be further described below with reference to the accompanying drawings and embodiments.

[0025] This invention discloses a vibration isolation device integrating horizontal-vertical coordinated control. It mainly addresses some technical problems commonly found in existing vibration isolation devices, aiming to solve the spatial redundancy and motion interference problems caused by the separation of horizontal and vertical control units, overcome the time delay bottleneck of horizontal vibration control, break through the vertical adjustment efficiency and frequency range control, realize wideband damping adaptive control, and improve the reliability and ease of operation and maintenance of the device.

[0026] See appendix Figure 1A vibration isolation device integrating horizontal-vertical coordinated control includes a base platform 200, a support platform 100, a vertical adjustment component 300, a horizontal adjustment component 400, and a control module. The vibration isolation component is installed between the base platform 200 and the support platform 100. Vibration-damping pads are installed at the four corners of the base platform 200. Precision equipment requiring vibration isolation is placed on the support platform 100. The support platform 100 is located above the base platform 200. Both the base platform 200 and the support platform 100 are square plate structures, and a status monitoring component is installed on the support platform 100. This status monitoring component monitors the vibration data of the support platform 100. Specifically, the status monitoring component includes... The system includes a horizontal vibration sensor 102, a tilt sensor 101, and a force sensor (not shown in the figure). The tilt sensor 101 comprises two sensors, which are respectively installed at two adjacent corners of the support platform 100. The horizontal vibration sensor 102 comprises two sensors, which are respectively installed at the midpoints of two adjacent sides of the support platform 100. The force sensor is installed on the upper or lower surface of the support platform 100. The precision equipment that needs vibration isolation is located on the support platform 100. Since both the tilt sensor 101 and the horizontal vibration sensor 102 are installed on the support platform 100, the data monitored and collected by the tilt sensor 101, the horizontal vibration sensor 102, and the force sensor are the vibration data of the precision equipment. Specifically, both the vertical adjustment component 300 and the horizontal adjustment component 400 are installed between the base platform 200 and the support platform 100. The vertical adjustment component 300 is used to adjust the relative position of the support platform 100 with respect to the base platform 200 in the vertical direction, and the horizontal adjustment component 400 is used to adjust the relative position of the support platform 100 with respect to the base platform 200 in the horizontal direction. It can be understood that the purpose of the vertical adjustment component 300 is to adjust the vertical position of the support platform 100, and the purpose of the horizontal adjustment component 400 is to adjust the horizontal position of the support platform 100. The control module... The control module is installed on the base platform 200. It receives data collected by the status monitoring component and outputs commands to control the vertical adjustment component 300 and the horizontal adjustment component 400 to move in the vertical and horizontal directions of the support platform 100, thereby isolating vibration and achieving vibration isolation. It can be understood that the control module has a built-in algorithm that can generate motion commands based on the data collected by the status monitoring component. The motion commands are used to control the movement of the horizontal adjustment component 400 and the vertical adjustment component 300 to achieve movement in the horizontal and vertical directions. The specific algorithm is described in detail below.

[0027] See appendix Figure 2The vertical adjustment assembly 300 includes four sets of vertical adjustment units located at the four corners of the base platform 200. These four sets of vertical adjustment units are positioned at the four corners of the base platform 200 to adjust the height of the four corners of the support platform 100. Each vertical adjustment unit includes a vertical rod sleeve 301 whose bottom is fixedly installed relative to the base platform 200, and a vertical lifting seat 302 slidably installed relative to the rod sleeve. The bottom of the vertical rod sleeve 301 is fixedly installed on the base platform 200 by welding or other means. The vertical rod sleeve 301 is designed as a hollow rod to facilitate the sliding of the vertical lifting seat 302. Installed inside the vertical rod sleeve 301, the top of the vertical lifting seat 302 abuts against the bottom surface of the support platform 100 via the vertical universal connector 304. The bottom surface of the support platform 100 is provided with four sets of circular limiting seats 103. The movement range of the vertical universal connector 304 is limited by the circular limiting seats 103. It can be understood here that the top of the vertical lifting seat 302 abuts against the bottom surface of the support platform 100 rather than being hinged. When the support platform 100 moves horizontally under the drive of the horizontal adjustment component 400, the top of the vertical lifting seat 302 moves within the annular space of the circular limiting seats 103 while contacting the support platform 100. Specifically, the vertical lifting seat 302 is driven to perform vertical lifting and lowering actions by a vertical drive assembly. The vertical drive assembly includes a power unit 303, which controls the vertical lifting seat 302 to achieve vertical adjustment via a gear and rack assembly. The power unit 303 includes two sets, each of which simultaneously controls the two diagonally opposite vertical lifting seats 302 to move in opposite directions via belt transmission. Specifically, the gear and rack assembly includes a gear 307 rotatably mounted on a gear bearing seat 305, which is mounted on a base platform 200. The side of the vertical lifting seat 302 is provided with a rack 308 that meshes with the gear 307. The gear 307 is also provided with a pulley 306 concentrically arranged with it. The gear 307 is driven to rotate by the power unit 303 mounted on the support platform 100. The two diagonally opposite pulleys 306 are connected by a transmission belt 309 to achieve synchronous rotation.It can be understood here that the power unit 303 uses a servo motor, and the power ends of the two power units 303 drive two sets of adjacent power shafts respectively. Both power shafts are coaxially mounted with pulleys 306 and gears 307. The gear 307 meshes with the rack 308 of the vertical lifting seat 302 to control the vertical movement of the vertical lifting seat 302 by driving the rack 308. The pulley 306 drives another pulley 306 located diagonally opposite to it to rotate via a belt. The gear 307 is coaxially mounted on the diagonal pulley 306, and the gear 307 controls the vertical movement of the vertical lifting seat 302 that it cooperates with via the rack 308. The purpose of this arrangement is to reduce the number of power units 303. At the same time, the diagonal pulleys 306 rotate in opposite directions, thereby realizing that the rack 308 that it cooperates with moves in opposite directions. A single motor can realize the synchronous action of left lifting and right lowering or right lowering and left lifting, which greatly shortens the adjustment response time and improves the adjustment efficiency.

[0028] See appendix Figure 2The horizontal adjustment assembly 400 includes four sets of horizontal adjustment units located at the midpoints of the four sides of the base platform 200. Each set of horizontal adjustment units includes a magnetorheological damper 401 mounted on the base platform 200 and an L-shaped sleeve 402 connected to the power output end of the magnetorheological damper 401. It can be understood that the L-shaped sleeve 402 needs to be synchronously displaced with the power output end of the magnetorheological damper 401, and the L-shaped sleeve 402 and the power output end of the magnetorheological damper 401 can also be relatively... The L-shaped sleeve 402 is slidably mounted on its top with a telescopic rod 403. The top of the telescopic rod 403 is hinged to the bottom surface of the support platform 100 via a horizontal universal connector 404. The L-shaped sleeve 402 and the power output end of the magnetorheological damper 401 are rotatably mounted so that while the magnetorheological dampers 401 of the two opposing horizontal adjustment units output reverse force, the L-shaped sleeves 402 of the other two opposing horizontal adjustment units rotate relative to the power output ends of their magnetorheological dampers 401 to avoid interference. The L-shaped sleeve 402 and the power output end of the magnetorheological damper 401 are rotatably connected via bearings, and reinforcing ribs are provided at the corners of the L-shaped sleeve 402. It can be understood here that the height between the support platform 100 and the foundation platform 200 is controlled by the vertical adjustment component 300, and the horizontal relative position between the support platform 100 and the foundation platform 200 is controlled by the horizontal adjustment component 400. The top of the telescopic rod 403 of the horizontal adjustment component 400 is hinged to the support platform 100, and the bottom of the telescopic rod 403 is slidably installed with the L-shaped sleeve 402. The top of the vertical lifting seat 302 of the vertical adjustment component 300 is in contact with the support platform 100, and the relative position between the bottom of the vertical lifting seat 302 and the vertical rod sleeve 301 is controlled by a gear and rack assembly. When the two opposing magnetorheological dampers 401 are activated, their movements are in opposite directions, and the output force is transmitted to the support platform 100 through the L-shaped sleeve 402 and the telescopic rod 403, driving the support platform 100... The platform 100 is displaced horizontally, while the remaining two magnetorheological dampers 401 remain stationary. However, their corresponding L-shaped sleeves 402 are rotated relative to the power output end of the magnetorheological dampers 401 to accommodate the horizontal displacement of the platform 100. Simultaneously, since the top of the vertical lifting seat 302 can generate horizontal displacement with the platform 100 under the restriction of the circular limit seat 103, the vertical adjustment component 300 will not constrain or interfere with the horizontal displacement of the platform 100. When the power unit 303 of the vertical adjustment component 300 is working, the power unit 303 drives the two racks 308 located on the diagonal to move in the opposite direction through the pulley 306 and the gear 307, thereby realizing the lifting and lowering of the platform 100. At the same time, since the telescopic rod 403 and the L-shaped sleeve 402 are slidably installed, no constraint is generated.It can be understood here that the cooperative structure of the vertical adjustment component 300 and the horizontal adjustment component 400 not only realizes the functions of horizontal and vertical adjustment, but also does not constrain or interfere with the other function. It not only solves the problem of space redundancy, but also improves the response efficiency through belt drive.

[0029] See Figure 3 This embodiment also provides a vibration isolation method integrating horizontal-vertical coordinated control, the vibration isolation method integrating horizontal-vertical coordinated control includes: S100 collects vibration data from the support platform to obtain a vibration data set; Specifically, the vibration dataset includes horizontal vibration data and vertical vibration data, wherein the horizontal vibration data includes structural displacement x and velocity. acceleration In addition to the external disturbance force F, the vertical vibration data includes the X-direction tilt angle θ of the upper plate on the support platform. x Y-axis tilt angle θ y .

[0030] S200 calculates the horizontal and vertical adjustment amounts based on the vibration data set; The calculation methods for the horizontal adjustment amount include: S211 obtains the maximum permissible time delay based on the vibration data set and the preset motion equation; Specifically, this embodiment establishes a single-degree-of-freedom linear motion model considering time-delay feedback based on horizontal vibration data, derives the system characteristic equation, and solves for the maximum allowable time delay through a complete formula chain.

[0031] Specifically, the formula for the maximum permissible time delay is: , Where τ is the maximum permissible time delay, and ω is the critical vibration angular frequency. Where m is the system mass and K1' is the displacement feedback gain. K2' is the speed feedback gain, and ω0 is the natural frequency. k is the stiffness coefficient, and ζ0 is the damping ratio. c is the damping coefficient.

[0032] It should be noted that the reasoning process for the maximum permissible time delay includes: Establish a single-degree-of-freedom linear equation of motion considering time-delay feedback: Where m is the system mass, c is the damping, and k is the stiffness. U (t) represents the applied force, which is the gain feedback control force in a linear system. U (t) represents the sum of the displacement and velocity feedback gains, i.e. Where K1' is the displacement feedback gain and K2' is the velocity feedback gain; then, the single-degree-of-freedom linear motion equation considering time-delay feedback can be expressed as: , Taking the Laplace transform of the single-degree-of-freedom linear equation of motion considering time-delay feedback, specifically, denoting X(s) as x(t), we obtain: ; Furthermore, the characteristic equation is derived: , Simplified to standard form, For the natural frequency, For the damping ratio, there is also , That is, the equation of motion for a single degree of freedom and its characteristic equation are: ; .

[0033] It should be noted that the stability of a system depends on the roots of its characteristic equation, where all roots should have negative real parts. Negative real parts indicate that the system's response decays rather than increases or diverges, thus ensuring the system's stability in the absence of external disturbances. Therefore, a system is considered stable when all roots of its characteristic equation have negative real parts.

[0034] When all characteristic roots are imaginary, the system is generally considered to be in a critically stable state. This is because imaginary characteristic roots indicate that the system will oscillate with a certain frequency and amplitude, rather than continuously increasing or decreasing. This oscillation keeps the system in a dynamic equilibrium state, maintaining stability without damping. In this case, the system is at a critical point and is highly sensitive to changes in stability, because any small change may cause the system to transition from an oscillating state to an unstable state or a non-oscillating state. That is, the equation is: , When the system is in a critically stable state, the corresponding time delay is the maximum time delay. Extracting the real and imaginary parts of this equation yields... Real part: ; Virtual part: .

[0035] Furthermore, when the system is critically stable (with imaginary eigenvalues), Euler's formula can be used to transform the exponential terms into trigonometric functions: ; Substituting the above formula into the real and imaginary parts, we get: Real part: ; Virtual part: ; By separating the real and imaginary parts, we can derive: , Furthermore, solve for the maximum permissible time delay: , It should be noted that, as can be seen from the formula for the maximum permissible time delay, the maximum permissible time delay is only related to the structure's natural frequency, damping ratio, and control force.

[0036] Specifically, by simultaneously solving the equations for the imaginary part and the real part, we can obtain: , Furthermore, solving the formula for the maximum permissible time delay yields: , , Thus, the formula for the maximum permissible time delay can be written as: , Where γ is the system's natural frequency ratio, , The active damping ratio is the effect of dynamic force on the system damping. .

[0037] , in, .

[0038] S212 obtains a time delay determination result based on the maximum allowable time delay, wherein the time delay determination result includes those requiring compensation and those not requiring compensation; It should be noted that the actual time delay τ in the system is caused by factors such as the delay τ1 in data acquisition and transmission, the delay τ2 in controller calculation and transmission, and the delay τ3 in actuator application of force. a =τ1+τ2+τ3, with the actual time delay τ a The actual time delay is compared with the maximum permissible time delay τ. If the actual time delay is greater than or equal to the maximum permissible time delay, the output needs to be compensated. If the actual time delay is less than the maximum permissible time delay, the output does not need to be compensated.

[0039] S213 calculates the predicted acceleration based on the time delay determination result; Specifically, when the time delay determination result indicates that supplementation is required, the accelerations of the first n moments collected from the horizontal vibration data are input into a three-layer BP neural network to obtain the predicted acceleration at the (n+1)th moment; when the time delay determination result indicates that no compensation is required, the actual acceleration is directly output as the predicted acceleration.

[0040] Preferably, n=5.

[0041] S214 compares the predicted acceleration with the expected value to obtain the acceleration deviation and the amount of deviation change; Specifically, the expected value is that the acceleration of the upper plate on the support platform is a=0, the acceleration deviation is e=output acceleration-expected value; the deviation change is ec=current time e-previous time e.

[0042] S215 calculates the horizontal adjustment amount based on the acceleration deviation and the change in deviation.

[0043] It should be noted that the acceleration deviation and the amount of deviation change are input into the fuzzy controller, which infers through 49 preset fuzzy control rules and outputs the actuator control force u (i.e., the horizontal adjustment amount).

[0044] Specifically, the input variables of the fuzzy controller are the acceleration deviation e and the deviation change ec. The fuzzy controller has 7 preset fuzzy sets (NB, NM, NS, ZO, PS, PM, PB). The 49 preset fuzzy control rules are based on the "if-then" form, for example: if e is NB and ec is NB, then u is PB.

[0045] In some embodiments, after the acceleration deviation and the deviation change are input into the fuzzy controller, the fuzzy controller parameters need to be optimized, wherein the fuzzy controller parameters include a first quantization factor, a second quantization factor, and a scaling factor. Specifically, the first quantization factor k is quantized using a genetic algorithm. e Second quantization factor k ec and the scaling factor k u Perform iterative optimization to obtain the optimal parameter combination (k) e '、k ec '、k u The optimal parameter combination is updated to the fuzzy controller to obtain the optimized fuzzy controller.

[0046] Furthermore, the level adjustment amount is calculated based on the optimized fuzzy controller; Furthermore, a joint simulation is performed on the horizontal adjustment amount to obtain the vibration isolation effect corresponding to the horizontal adjustment amount; Preferably, the vibration isolation effect of the optimized fuzzy controller's output control force u (i.e., horizontal adjustment amount) under simple harmonic excitation and random excitation is verified by joint simulation using MATLAB software and the SIMULINK simulation environment.

[0047] Furthermore, if the vibration isolation effect meets expectations, the horizontal adjustment amount is output; if the vibration isolation effect does not meet expectations, the fuzzy controller parameters are continuously optimized until the vibration isolation effect meets expectations.

[0048] In some embodiments, see Figure 4 The desired input value is used as a reference signal and ideally set to zero, with the aim of controlling the response of the controlled object to be near zero. Specifically, the inputs of the fuzzy control system include the deviation e between the acceleration and the desired value, and the change e of the acceleration deviation. c The output represents the force u that the actuator needs to apply at a specific moment. The input to the fuzzy controller needs to be quantized by a factor k. e k ec Only through transformation can the input data be mapped to the universe of discourse, and its output needs to be passed through a scaling factor k. u Only through transformation can the desired magnitude of control be derived from the domain of discourse.

[0049] Among them, the quantization factor ke maps the range of the actual error e to the fuzzy universe of discourse of the error. It determines the system's sensitivity to the error. The quantization factor kec maps the range of the actual error rate of change ec to the fuzzy universe of discourse of the error rate of change. It determines the system's response speed to changes in the error. The scaling factor ku maps the universe of discourse value of the fuzzy inference output back to the physical range of the actual control quantity u. It determines the amplitude of the control output.

[0050] Understandably, according to Newton's second law, when an external force acts on an object with mass, the object will produce an acceleration in the same direction as the force. ,join Figure 5 Based on experience, acceleration magnitude is typically categorized into three levels: "large," "medium," and "small," with each level potentially having both positive and negative directions, as well as an equilibrium position. Therefore, fuzzy commands are roughly divided into seven variables: "NB (large in negative direction)," "NM (medium in negative direction)," "NS (small in negative direction)," "ZO (zero)," "PS (small in positive direction)," "PM (medium in positive direction)," and "PB (large in positive direction)." To improve the accuracy of fuzzy control, the fuzzy commands can be further subdivided, but this increases system complexity and control response time.

[0051] The fuzzy control rules in this embodiment are divided into 49 rules, as shown in Table 1.

[0052] In this embodiment, the fuzzy control rules also include: Rule 1: As shown in point 1, when the acceleration of the vibration isolation platform is positive and the change in acceleration is also positive, the acceleration is far from the reference value. Therefore, a negative control force should be applied to bring it closer to the reference value. That is... If( is NB) and (e c (is NB) then (u is PB) Rule 2: As shown in point 2, when the acceleration of the vibration isolation platform is positive and the change in acceleration is negative, no control force needs to be applied, or only a small negative control action needs to be applied. That is... If( is PB) and (e c is NB) then (u is ZO) Rule 3: As shown in point 3, when the acceleration of the vibration isolation platform is negative, and the change in acceleration is also negative, the acceleration is far from the reference value. Therefore, a positive control force should be applied to bring it closer to the reference value. That is... If( is PB) and (e c (is PB) then (u is NB) Rule 4: As shown in point 4, when the acceleration of the vibration isolation platform is negative and the change in acceleration is positive, no control force needs to be applied, or only a small positive control action needs to be applied. That is... If( is NB) and (e c is PB) then (u is ZO) See Figure 6 It should be noted that when x is less than or equal to a, the membership degree is zero, indicating that x does not belong to this set. As x increases from a to b, the membership degree increases linearly, indicating that x gradually belongs to this set, reaching the maximum membership degree. As x increases from b to c, the membership degree decreases linearly, indicating that x gradually no longer belongs to this set. When x is greater than or equal to c, the membership degree is zero again, indicating that x does not belong to this set.

[0053] In this embodiment, k e k ec k u All use trigonometric functions as membership functions, see [link / reference]. Figure 7 .

[0054] In this embodiment, the method for calculating the vertical adjustment amount includes: S221 obtains the vertical extension / contraction amount based on the vibration data set; Specifically, in the initial state of the system, the four vertical adjusting rods have the same initial length. When the base plate tilts, it causes the vertical telescopic rods to tilt as well, and the upper plate tilts along with the vertical rods. Then, the tilt sensor collects the tilt angle θ of the upper plate in the X direction. x Inclination angle in the Y direction y ; Furthermore, through the formula Calculate the angle γ between the vertical telescopic rod and the normal to the upper slab; Combined with the angle correlation formula ΔH i =ΔL i ·cosγ, the formula for calculating the telescopic rod's extension / retraction is obtained by deformation: , where ΔL i Let ΔL be the extension length (in meters) of the i-th telescopic rod along its own axis, where i = 1, 2, 3, 4 (1: front left, 2: front right, 3: rear right, 4: rear left). i >0, shortening ΔL i <0; ΔH i The vertical height compensation amount (in meters) of the top of the i-th telescopic rod relative to the upper shelf is the amount of height change perpendicular to the surface of the upper shelf required for leveling, and is related to ΔL. i There is a angular correlation.

[0055] It should be noted that, based on the square installation layout, the vertical height compensation corresponding to the X and Y tilt angles of the upper plate is determined by the horizontal projection spacing 'a' of the telescopic rods on the base plate. Left front pole (X to the left, Y to the front): , Right front pole (X to the right, Y to the front): , Right rear lever (X-direction to the right, Y-direction to the rear): , Left rear lever (X to the left, Y to the rear): .

[0056] Note: When ΔH i When ΔH > 0, the upper plate at this position needs to be raised, meaning the telescopic rod needs to be extended (to provide positive height compensation); when ΔH i When <0, the upper plate needs to be lowered at this position, that is, the telescopic rod needs to be shortened (to provide negative height compensation); a / 2 is the horizontal projection distance from the vertical rod to the geometric center of the upper plate, corresponding to the height difference caused by the tilt angle.

[0057] Furthermore, ΔH i Substitution Combining these, the formulas for the vertical extension / retraction of the four telescopic poles are as follows: Left front pole: Right front pole: Right rear stick: Left rear pole: .

[0058] S222 calculates the vertical adjustment amount based on the transmission clearance and the vertical extension / retraction amount.

[0059] Specifically, considering the transmission clearance δ between the gear and the tooth groove (the idle distance along the vertical rod axis), the actual extension and retraction of the telescopic rod will be δ smaller than the theoretically calculated value. Therefore, a correction coefficient k needs to be introduced, and the correction formula should be optimized in conjunction with the angle correlation to ensure the leveling accuracy.

[0060] Specifically, the transmission clearance δ is the empty travel along the axis of the telescopic rod, and is related to the extension / retraction amount ΔL of the vertical rod. i Since the directions are consistent, the correction factor needs to be compensated based on the error in the direction of the telescopic rod axis. The correction factor is derived as follows after considering the angle correlation: Where: δ·cosγ is the transmission clearance δ along the axis of the telescopic rod, converted into the clearance error in the vertical direction of the upper plate (and the height compensation ΔH). i (Dimensional consistency); the correction coefficient k is dimensionless, and it incorporates angle-related terms to ensure compensation accuracy, which is different from traditional compensation schemes without angle correction; δ is the transmission travel along the axis of the telescopic rod.

[0061] Furthermore, the revised formula for calculating the extension / retraction amount of the telescopic pole is as follows: Left front pole: Right front pole: Right rear stick: Left rear pole: .

[0062] S300 controls the movement of the horizontal adjustment component according to the horizontal adjustment amount, and controls the movement of the vertical adjustment component according to the vertical adjustment amount, so as to achieve vibration isolation.

[0063] Specifically, the extension / retraction amount ΔL of the telescopic rod ik This is converted into the rotation angle of the motor gear, achieving closed-loop control of "sensor measurement - angle conversion - extension / retraction calculation - motor drive". Here, one rotation of the gear is θ. 齿i =2π, the length by which the telescopic rod extends or retracts along the axis is p·z, therefore the relationship between the gear rotation angle and the telescopic rod extension / retraction amount is: , Where p is the tooth pitch (unit: m / tooth, along the vertical axis), z is the number of gear teeth, and θ is the number of teeth. 齿i The rotation angle of the gear (unit: rad).

[0064] Therefore, the gear rotation angle is: .

[0065] It should be noted that in this implementation, after the vertical adjustment is completed, the tilt sensor collects the tilt angle of the upper plate again. If θ x ≠0 or θ y ≠0, repeat the vertical adjustment process until the upper board is horizontal.

[0066] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A vibration isolation device integrating horizontal-vertical coordinated control, characterized in that, include: Basic platform; A bearing platform is located above the foundation platform, and a condition monitoring component is installed on the bearing platform to monitor the vibration data of the bearing platform. Both the vertical adjustment component and the horizontal adjustment component are installed between the base platform and the support platform. The vertical adjustment component is used to adjust the relative position of the support platform with respect to the base platform in the vertical direction, and the horizontal adjustment component is used to adjust the relative position of the support platform with respect to the base platform in the horizontal direction. The control module, installed on the base platform, receives data collected by the status monitoring component and outputs commands to control the vertical and horizontal adjustment components to move respectively, thereby adjusting the vertical and horizontal directions of the support platform, isolating vibration, and achieving vibration isolation.

2. The vibration isolation device with integrated horizontal-vertical coordinated control according to claim 1, characterized in that, The condition monitoring component includes a horizontal vibration sensor, a tilt sensor, and a force sensor. The tilt sensor comprises two sensors, which are respectively installed at two adjacent corners of the support platform. The horizontal vibration sensor comprises two sensors, which are respectively installed at the midpoint of two adjacent sides of the support platform. The force sensor is installed on the upper or lower surface of the support platform.

3. The vibration isolation device with integrated horizontal-vertical coordinated control according to claim 2, characterized in that, The vertical adjustment assembly includes four sets of vertical adjustment units located at the four corners of the base platform diagonally. Each vertical adjustment unit includes a vertical rod sleeve fixedly installed at its bottom relative to the base platform and a vertical lifting seat slidably installed relative to the rod sleeve. The top of the vertical lifting seat abuts against the bottom surface of the support platform via a vertical universal connector. The bottom surface of the support platform is provided with four sets of circular limiting seats. The movement range of the vertical universal connector is limited by the circular limiting seats. The vertical lifting seat is driven to perform vertical lifting and lowering actions by a vertical drive assembly.

4. The vibration isolation device with integrated horizontal-vertical coordinated control according to claim 3, characterized in that, The vertical drive assembly includes a power unit, which controls the vertical lifting seat to achieve lifting and adjustment in the vertical direction through a gear and rack assembly. The power unit includes two sets, and each set of power units controls the two vertical lifting seats located diagonally to move in opposite directions through belt transmission.

5. The vibration isolation device with integrated horizontal-vertical coordinated control according to claim 4, characterized in that, The gear and rack assembly includes a gear rotatably mounted on a gear bearing seat, which is mounted on a base platform. The vertical lifting seat has a rack on its side that meshes with the gear. The gear also has a pulley arranged concentrically with it. The gear is driven to rotate by a power unit mounted on a support platform. Two pulleys located diagonally are connected by a transmission belt to achieve synchronous rotation.

6. A vibration isolation device with integrated horizontal-vertical coordinated control according to claim 5, characterized in that, The horizontal adjustment assembly includes four sets of horizontal adjustment units located at the midpoints of the four sides of the base platform. Each set of horizontal adjustment units includes a magnetorheological damper mounted on the base platform and an L-shaped sleeve connected to the power output end of the magnetorheological damper. A telescopic rod is slidably mounted on the top of the L-shaped sleeve, and the top of the telescopic rod is hinged to the bottom surface of the support platform through a horizontal universal connector. The L-shaped sleeve and the power output end of the magnetorheological damper are rotatably mounted so that while the magnetorheological dampers of two opposing horizontal adjustment units output reverse forces, the L-shaped sleeves of the other two opposing horizontal adjustment units rotate relative to the power output ends of their magnetorheological dampers to avoid interference.

7. A vibration isolation method integrating horizontal-vertical coordinated control, characterized in that, The vibration isolation method with integrated horizontal-vertical coordinated control includes: Vibration data of the support platform are collected to obtain a vibration data set; The horizontal and vertical adjustment amounts are calculated based on the vibration data set. The horizontal adjustment component is controlled to move according to the horizontal adjustment amount, and the vertical adjustment component is controlled to move according to the vertical adjustment amount, so as to achieve vibration isolation.

8. The vibration isolation method with integrated horizontal-vertical coordinated control according to claim 7, characterized in that, The method for calculating the horizontal adjustment amount includes: Based on the vibration data set and the preset motion equation, the maximum allowable time delay is obtained; The time delay determination result is obtained based on the maximum allowable time delay, wherein the time delay determination result includes those that require compensation and those that do not require compensation; Calculate the predicted acceleration based on the time delay determination result; The predicted acceleration is compared with the expected value to obtain the acceleration deviation and the amount of deviation change; The horizontal adjustment amount is calculated based on the acceleration deviation and the change in deviation.

9. A vibration isolation method integrating horizontal-vertical coordinated control according to claim 8, characterized in that, The method for calculating the level adjustment includes: The acceleration deviation and the change in deviation are input into the fuzzy controller. The fuzzy controller parameters are optimized, wherein the fuzzy controller parameters include a first quantization factor, a second quantization factor, and a scaling factor; The horizontal adjustment amount is calculated based on the optimized fuzzy controller; The vibration isolation effect corresponding to the horizontal adjustment amount is obtained by performing joint simulation on the horizontal adjustment amount. If the vibration isolation effect meets expectations, the horizontal adjustment amount is output; if the vibration isolation effect does not meet expectations, the fuzzy controller parameters are continuously optimized until the vibration isolation effect meets expectations, and then the horizontal adjustment amount is output.

10. A vibration isolation method integrating horizontal-vertical coordinated control according to claim 7, characterized in that, The method for calculating the vertical adjustment amount includes: The vertical extension / contraction amount is obtained based on the vibration data set; The vertical adjustment amount is calculated based on the transmission clearance and the vertical extension / retraction amount.

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