Dip-coating device

Abstract

The invention discloses a dip-coating device, and relates to the technical field of coating, the dip-coating device comprises a first box body and a second box body which are both rectangular flat structures, and the second box body is arranged in the first box body; a right outer panel and a left outer panel are arranged on the first box body and are in a vertical state, and a rectangular opening is formed in the right outer panel; according to the invention, the back of the glass is collided and rubbed by using the small silk balls, so that the back of the glass has positive charges, the working gas is arranged to facilitate the improvement of the electrification efficiency, and the positive charges attract the negatively charged coating liquid attached to the front of the glass, so that the downward flowing speed of the coating liquid is delayed; the retardation force is gradually increased from bottom to top on the surface of the glass plate, the downward flowing speed of the coating liquid closer to the upper part is slower, hot air is blown to the front side of the glass at the moment, the curing speed of the coating liquid is increased, and more coating liquid can be cured at the position close to the upper part of the glass plate; therefore, the problem that the upper part of the glass plate is thinner than the lower part of the glass plate in the prior art is effectively solved.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and more specifically to an immersion-lift coating apparatus. Background Technology

[0002] The dip-coating apparatus is a commonly used device for preparing silicon films on glass surfaces. It typically involves vertically immersing a glass plate in a coating solution, then vertically pulling the glass plate out of the solution. The liquid film adhering to the glass surface is dried and heat-treated to obtain the desired silicon film.

[0003] The thickness of the silicon film is closely related to the glass plate lifting speed, the viscosity of the coating solution, and the downward flow speed of the coating solution. If the coating solution has high fluidity and a fast lifting speed is used, the coating solution adhering to the glass plate surface will flow down quickly and accumulate in the lower part of the glass plate surface, resulting in uneven film thickness. This is mainly manifested in the fact that the film thickness at the top of the glass plate is thinner than that at the bottom.

[0004] In the prior art, the method to solve the above problems is to reduce the lifting speed, but at the cost of increasing the number of lifting cycles and reducing production efficiency; therefore, we provide an immersion lifting coating device to solve the above problems. Summary of the Invention

[0005] To address the problems existing in the prior art, the present invention provides an immersion-coating apparatus that can solve the problem of uneven film thickness.

[0006] To achieve the above objectives, the present invention employs an immersion-coating apparatus for preparing a silicon film on a glass surface, comprising: Both consist of a first and a second box, each with a rectangular, flat structure. The second enclosure is located inside the first enclosure; The first housing has a right outer panel and a left outer panel, which are in a vertical position. A rectangular opening is provided on the right outer panel. A frame is embedded in the right outer panel around the opening. The frame has a cavity with a rectangular cross-section. Multiple first holes are provided on the right side of the frame. The first holes allow the cavity to communicate with the atmosphere. The upper end of the frame is connected to the lower end of the eighth pipe through an opening. The upper end of the eighth pipe is connected to the vacuum pump and the second blower through the ninth pipe and the ninth valve, and the tenth pipe and the tenth valve, respectively. During coating, the glass to be coated faces outward and the back is close to the first hole. Under the action of the vacuum pump, it is fixed to the right side of the frame. The second box has a left inner panel and a right inner panel, both located between the left outer panel and the right outer panel of the first box. The first box has an upper outer panel at the top and a lower outer panel at the bottom. The upper end of the second box is connected to the upper outer panel, and there is a gap between the lower end of the second box and the lower outer panel. The front end of the first box has a front outer panel, and the rear end of the first box has a rear outer panel. The front end of the second box is connected to the front outer panel, and the rear end of the second box is connected to the rear outer panel. The glass, the first box, and the second box form a left chamber, a lower chamber, and a right chamber that are connected in sequence.

[0007] As a further optimization of the above scheme, the left inner panel, right inner panel, left outer panel and right outer panel are parallel, and there is a gap between the left inner panel and left outer panel, and between the right inner panel and right outer panel.

[0008] As a further optimization of the above scheme, the left chamber is located between the left outer panel of the first box and the left inner panel of the second box, the lower chamber is located between the bottom of the second box and the lower outer panel of the bottom of the first box, and the right chamber is located between the right outer panel of the first box and the right inner panel of the second box.

[0009] As a further optimization of the above solution, it also includes a gas supply system for supplying working gas to the inside of the first housing. The gas supply system includes a gas source, a first gas distribution box, a second gas distribution box, a set of main pipes and a set of auxiliary pipes. Multiple main pipes and auxiliary pipes are provided. The auxiliary pipes are located inside the second housing and the main pipes are located outside the first housing. The gas source is used to provide the working gas, which is purified air with less than 10,000 particles greater than or equal to 0.1µm per cubic meter and a relative humidity of less than 45%.

[0010] As a further optimization of the above scheme, the upper end of the first gas distribution box is connected to the gas source through the first pipe and the first valve, the lower end of the first gas distribution box is connected to the upper end of the second gas distribution box through the second pipe, and the side end of the first gas distribution box is connected to a set of secondary pipes through a set of first branch pipes and a set of flow regulating valves. The flow regulating valves cause the gas flow rate entering the set of secondary pipes through the set of first branch pipes to increase sequentially from bottom to top. The second gas distribution box is a box structure in which the cross-sectional area of ​​the gas channel decreases with the direction of airflow, and the lower end of the second gas distribution box is connected to the main pipeline.

[0011] As a further optimization of the above scheme, the main pipeline is set on the outside of the left outer panel. The main pipeline is laid vertically at equal intervals from front to back. The lower end of the main pipeline is connected to the lower chamber through the opening at the lower end of the left outer panel, and the upper end of the main pipeline is connected to the lower end of the second gas distribution box. The secondary pipes are located inside the second housing and on one side near the left inner panel. Multiple secondary pipes are laid horizontally at equal intervals from bottom to top. The front ends of the secondary pipes are all closed, and the rear ends of the secondary pipes extend to the outside of the first housing through openings in the rear outer panel. The secondary pipes are connected to the first branch pipe. Each secondary pipe inside the second housing has a structure in which the cross-sectional area of ​​the gas channel decreases along the airflow direction. The right side wall of the secondary pipe is connected to the second branch pipe, and the right end of the second branch pipe has an opening located on the right inner panel.

[0012] As a further optimization of the above scheme, a communication system for connecting the left and right chambers outside the first housing is also included. The communication system includes an opening at the top of the left chamber, a third pipe, and a third valve connected in sequence. The third pipe is connected to the lower end of the storage tank. A fourth pipe is provided at the upper end of the storage tank. A fourth valve is provided on the fourth pipe. A separator is provided at the upper end of the fourth pipe. A fifth pipe is provided at the side end of the separator. A fifth valve is provided on the fifth pipe. A collection tank is provided at the fifth pipe. A sixth pipe is provided at the lower end of the collection tank. An opening is provided at the top of the right chamber, and the opening is connected to the sixth pipe.

[0013] As a further optimization of the above scheme, the side end of the storage tank is connected to the second pipe through an eleventh pipe and an eleventh valve; the eleventh valve is set on the eleventh pipe, and the storage tank contains small balls with a silk surface.

[0014] As a further optimization of the above scheme, the eleventh valve, the third valve, and the fourth valve are linked. The fourth valve can only be opened when the eleventh valve and the third valve are closed simultaneously; and the eleventh valve and the third valve can only be opened when the fourth valve is closed.

[0015] As a further optimization of the above scheme, the separator is a vertical cylinder, and the upper opening of the separator is connected to the air inlet of the first fan. A filter screen is provided at the upper opening of the separator, and the air outlet of the first fan is connected to the first pipe through the twelfth pipe and the twelfth valve; the twelfth valve is located on the twelfth pipe. The vertical cross-section of the collecting tank is a trapezoidal structure, which is used for the small balls that are input into the collecting tank through the sixth pipe. After merging, they are input into the side end of the separator through a fifth pipe. A seventh pipe is connected to the fifth pipe between the collection tank and the fifth valve, and a seventh valve is installed on the seventh pipe.

[0016] The dip-coating apparatus of the present invention has the following beneficial effects: This invention discloses an immersion and lifting coating device. The device utilizes silk balls to collide and rub the back of a glass, causing the back of the glass to acquire a positive charge. The use of a working gas helps improve the charging efficiency. The positive charge attracts the negatively charged coating liquid adhering to the front of the glass, slowing down the downward flow of the coating liquid. This slowing force increases from bottom to top on the glass surface, with the downward flow of the coating liquid becoming slower closer to the top. Hot air is then blown onto the front of the glass to accelerate the curing speed of the coating liquid, allowing more coating liquid to solidify in the upper part of the glass plate. This effectively improves the problem in existing technologies where the film thickness at the top of the glass plate is thinner than at the bottom.

[0017] Specific embodiments of the present invention are disclosed in detail with reference to the following description and accompanying drawings, indicating how the principles of the present invention can be adopted. It should be understood that the embodiments of the present invention are not limited in scope as a result, and that the embodiments of the present invention include many changes, modifications and equivalents within the spirit and scope of the appended claims. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the immersion-lift coating device of the present invention; Figure 2 For the present invention Figure 1 Cross-sectional view at point AA; Figure 3 For the present invention Figure 1 Cross-sectional view at point BB; Figure 4 For the present invention Figure 1 Cross-sectional view at point C; Figure 5 For the present invention Figure 1 Cross-sectional view at point DD; Figure 6 This is a schematic diagram of the structure of the first gas distributor of the present invention.

[0019] In the diagram: 1. First housing; 10. Right outer panel; 10a. Rectangular opening on the right outer panel; 11. Left outer panel; 12. Upper outer panel; 13. Lower outer panel; 14. Front outer panel; 15. Rear outer panel; 15a. A set of openings on the rear outer panel; 16. Left chamber; 16a. Opening at the lower end of the left outer panel; 16b. A set of openings at the top of the left chamber; 17. Lower chamber; 18. Right chamber; 18a. A set of openings at the top of the right chamber; 2. Second housing; 21. Left inner panel; 22. Right inner panel; 23. A set of secondary pipes; 24. A set of second branch pipes; 24a. Opening at the right end of the second branch pipe; 25. A set of first... 26. Branch pipe; 30. A set of flow regulating valves; 31. Gas source; 32. First gas distribution box; 33. Second gas distribution box; 34. A set of main pipes; 35. Storage tank; 36. Separator; 37. First blower; 38. Vacuum pump; 39. Collection tank; 41. First pipe; 42. Second pipe; 43. A set of third pipes; 44. Fourth pipe; 45. Fifth pipe; 46. A set of sixth pipes; 47. Seventh pipe; 48. Eighth pipe; 49. Ninth pipe; 410. Tenth pipe; 411. Eleventh pipe; 412. Twelfth pipe; 5. Frame; 50. Cavity; 50a. First hole; 51. First valve; 53. A set of third valves; 54. Fourth valve; 55. Fifth valve; 57. Seventh valve; 59. Ninth valve; 510. Tenth valve; 511. Eleventh valve; 512. Twelfth valve; 6. Glass. Detailed Implementation

[0020] Please refer to the instruction manual appendix. Figure 1-5 This invention provides a technical solution: an immersion-coating apparatus for preparing a silicon film on a glass surface, comprising: First box 1 and second box 2 The second box 2 is located inside the first box 1, and both are rectangular flat structures; The two parallel surfaces with the largest area of ​​the first housing 1 are the right outer panel 10 and the left outer panel 11, which are perpendicular to each other. A rectangular opening 10a is provided on the right outer panel 10. A frame 5 is embedded in the right outer panel 10 around the opening 10a. The frame 5 has a cavity 50 with a rectangular cross section. Multiple first holes 50a are provided on the right side of the frame 5, which allow the cavity 50 to communicate with the atmosphere. The upper end of the frame 5 is connected to the lower end of the eighth pipe 48 through the opening. The upper end of the eighth pipe 48 is connected to the vacuum pump 37 and the second fan 38 through the ninth pipe 49 and the ninth valve 59, and the tenth pipe 410 and the tenth valve 510, respectively. During coating, the glass 6 with the coating side facing outward and the back side close to the first hole 50a is fixed to the right side of the frame 5 under the action of the vacuum pump 37. Among them, the ninth valve 59 is installed on the ninth pipe 49, and the tenth valve 510 is installed on the tenth pipe 410. Both the ninth valve 59 and the tenth valve 510 are existing common mechanisms used to control the opening and closing of pipes, and will not be described in detail here.

[0021] The two parallel surfaces with the largest areas of the second box 2 are the left inner panel 21 and the right inner panel 22, which are located between the left outer panel 11 and the right outer panel 10 of the first box 1. The left inner panel 21, the right inner panel 22, the left outer panel 11 and the right outer panel 10 are parallel. There is a certain distance between the left inner panel 21 and the left outer panel 11, and between the right inner panel 22 and the right outer panel 10. The first box 1 has an upper outer panel 12 at the top and a lower outer panel 13 at the bottom. The upper end of the second box 2 is connected to the upper outer panel 12, and there is a certain distance between the lower end of the second box 2 and the lower outer panel 13. The front end of the first box 1 has a front outer panel 14, and the rear end of the first box 1 has a rear outer panel 15. The front end of the second box 2 is connected to the front outer panel 14, and the rear end of the second box 2 is connected to the rear outer panel 15. In this invention, the glass 6, the first box 1, and the second box 2 form a left chamber 16, a lower chamber 17, and a right chamber 18 that are connected in sequence. The left chamber 16 is located between the left outer panel 11 of the first box 1 and the left inner panel 21 of the second box 2. The lower chamber 17 is located between the bottom of the second box 2 and the lower outer panel 13 of the bottom of the first box 1. The right chamber 18 is located between the right outer panel 10 of the first box 1 and the right inner panel 22 of the second box 2.

[0022] The present invention also proposes a gas supply system for supplying working gas to the interior of the first housing 1. The gas supply system includes a gas source 30, a first gas distribution box 31, a second gas distribution box 32, a set of main pipes 33 and a set of auxiliary pipes 23. Multiple main pipes 33 and auxiliary pipes 23 are provided. The auxiliary pipes 23 are located inside the second housing 2 and the main pipes 33 are located outside the first housing 1. The gas source 30 is used to provide working gas, which is purified air with less than 10,000 particles greater than or equal to 0.1µm per cubic meter and a relative humidity of less than 45%. In this embodiment, the gas source 30 includes a gas purification device, an air compressor, and a gas storage tank. The purification device is used to provide working gas, and the air compressor compresses the working gas and sends it to the gas storage tank for later use. The gas purification device, air compressor, and gas storage tank can all be obtained from the prior art, and will not be described in detail here. The upper end of the first gas distribution box 31 is connected to the gas source 30 through the first pipe 41 and the first valve 51. The lower end of the first gas distribution box 31 is connected to the upper end of the second gas distribution box 32 through the second pipe 42. The side end of the first gas distribution box 31 is connected to a set of auxiliary pipes 23 through a set of first branch pipes 25 and a set of flow regulating valves 26. The flow regulating valves 26 cause the gas flow rate entering the set of auxiliary pipes 23 through the set of first branch pipes 25 to increase sequentially from bottom to top. It should be noted that the first valve 51 is installed on the first pipeline 41, and the flow regulating valve 26 is installed on the first branch pipe 25.

[0023] The second gas distribution box 32 is a box structure in which the cross-sectional area of ​​the gas channel decreases with the direction of airflow. The lower end of the second gas distribution box 32 is connected to the main pipe 33, so that each of the main pipes 33 receives the same gas flow rate. The main pipe 33 is located on the outside of the left outer panel 11. The main pipe 33 is laid vertically at equal intervals from front to back. The lower end of the main pipe 33 is connected to the lower chamber 17 through the opening 16a at the lower end of the left outer panel 11. The upper end of the main pipe 33 is connected to the lower end of the second gas distribution box 32. The secondary pipe 23 is located inside the second housing 2 and on the side close to the left inner panel 21. Multiple secondary pipes 23 are laid horizontally at equal intervals from bottom to top. The front ends of the secondary pipes 23 are all closed. The rear ends of the secondary pipes 23 extend to the outside of the first housing 1 through the opening 15a on the rear outer panel 15. The secondary pipes 23 are connected to the first branch pipe 25. The pipes of each secondary pipe 23 inside the second housing 2 have a structure in which the cross-sectional area of ​​the gas channel decreases along the airflow direction. The right side wall of the secondary pipe 23 is connected to the second branch pipe 24. The right end of the second branch pipe 24 has an opening 24a, which is located on the right inner panel 22.

[0024] The present invention also discloses a communication system for connecting a left chamber 16 and a right chamber 18 outside the first housing 1. The communication system includes an opening 16b at the top of the left chamber 16, a third pipe 43 and a third valve 53 connected in sequence. The third pipe 43 is connected to the lower end of the storage tank 34. A fourth pipe 44 is provided at the upper end of the storage tank 34. A fourth valve 54 is provided on the fourth pipe 44. A separator 35 is connected to the upper end of the fourth pipe 44. A fifth pipe 45 is provided at the side end of the separator 35. A fifth valve 55 is provided on the fifth pipe 45. A collection tank 39 is provided at the lower end of the collection tank 39. A sixth pipe 46 is provided at the lower end of the collection tank 39. An opening 18a is provided at the top of the right chamber 18 and the opening 18a is connected to the sixth pipe 46. The third valve 53 is installed on the third pipeline 43.

[0025] The side end of the storage tank 34 is connected to the second pipe 42 through the eleventh pipe 411 and the eleventh valve 511; the eleventh valve 511 is provided on the eleventh pipe 411, and the storage tank 34 contains small balls with a silk surface.

[0026] Among them, the eleventh valve 511, the third valve 53 and the fourth valve 54 are linked. The fourth valve 54 can only be opened when the eleventh valve 511 and the third valve 53 are closed at the same time; the eleventh valve 511 and the third valve 53 can only be opened when the fourth valve 54 is closed.

[0027] In this invention, the separator 35 is a vertical cylinder. The upper opening of the separator 35 is connected to the air inlet of the first fan 36. A filter screen is provided at the upper opening of the separator (35) to prevent small balls from entering the first fan. The air outlet of the first fan 36 is connected to the first pipe 41 through the twelfth pipe 412 and the twelfth valve 512. The twelfth valve 512 is located on the twelfth pipe 412.

[0028] In this invention, the vertical cross-section of the collecting tank 39 is a trapezoidal structure, which is used for the small balls that are input into the collecting tank through the sixth pipe 46, and after merging, they are input into the side end of the separator 35 through a fifth pipe 45. A seventh pipe 47 is connected to the fifth pipe 45 between the collection tank 39 and the fifth valve 55, and a seventh valve 57 is installed on the seventh pipe 47.

[0029] This invention also discloses an immersion-coating method: a storage tank 34 supplies small balls into the first housing 1, causing the working gas to form a horizontal airflow from left to right and a vertical airflow from bottom to top within the right chamber 18, propelling the small balls upwards along the right chamber 18 and causing them to impact and rub against the back of the glass 6; specifically including the following steps: S1. Prepare the working gas; In this embodiment, the gas source 30 includes a gas purification device, an air compressor, and a gas storage tank. The purification device is used to provide purified air with a particle size greater than or equal to 0.1µm of less than 10,000 per cubic meter of gas and a relative humidity of less than 45%. The air compressor compresses the purified air and sends it to the gas storage tank for later use. The gas purification device, air compressor, and gas storage tank can all be obtained from the prior art, and will not be described in detail here. S2. Prepare the coating solution; A coating solution containing silica particles is prepared and the coating solution is made negatively charged. In the prior art, there are many methods to make the coating solution negatively charged. In this embodiment, the pH value of the above coating solution is adjusted to be greater than 2.5 to make the coating solution negatively charged. S3. Place the back of the glass 6 to be coated onto the right side of the frame 5, close the tenth valve 510, open the ninth valve 59 and the vacuum pump 37, and evacuate the cavity 50 so that the glass is adsorbed and fixed on the right side of the frame 5. S4, Empty; First, open the first valve 41, the seventh valve 57, and the flow regulating valve 26 in the gas supply and communication systems; close all other valves. Then, the gas source 30 is activated, allowing the working gas to enter the first gas distribution box 31. A portion of the working gas passes through the lower port of the first gas distribution box 31, the second pipe 42, the second gas distribution box 32, the main pipe 33, and the left opening 16a of the lower chamber before entering the lower chamber 17. The other portion of the working gas passes through the first branch pipe 25, the auxiliary pipe 23, and the second branch pipe 24 on the side of the first gas distribution box 31 before entering the right chamber 18. After the two working gases are collected in the right chamber 18, they are discharged through the top opening 18a of the right chamber, the sixth pipe 46, the collection tank 39, the fifth pipe 45, the seventh pipe 47, and the seventh valve 57. After a period of time, all the air in the space through which the working gas flows is replaced by the working gas. Then the first valve 51 and the seventh valve 57 are closed. S5. Insert the small ball; Open the third valve 43 to allow all the small balls in the storage tank 34 to fall into the left chamber 16 and the lower chamber 17, and then close the third valve; S6, Work; Open the fifth valve 55 and the twelfth valve 512, start the first blower 36, so that the working gas passes through the twelfth pipe 412, the first pipe 41, and the first gas distribution box 31. Then, part of the working gas passes through the second pipe 42, the second gas distribution box 32, the main pipe 33, the left opening 16a of the lower chamber, and the lower chamber 17 to enter the right chamber 18. The other part of the working gas passes through the first branch pipe 25, the auxiliary pipe 23, and the second branch pipe 24 to enter the right chamber 18. After the two parts of the working gas are collected in the right chamber 18, they pass through the top opening 18a of the right chamber, the sixth pipe 46, the collection tank 39, the fifth pipe 45, the side opening of the separator 35, the upper opening of the separator 35, the first blower 36, and the twelfth pipe 41 to form a circulation of the working gas. During the above cycle, the small ball that falls into the left chamber 16 and the lower chamber 17 is blown into the right chamber 18 by the working gas input from the main pipe 33. While moving from bottom to top, it is also blown towards the back of the glass 6 by the transverse working gas output from the auxiliary pipe 23 and its second branch pipe 24. The surface of the small ball silk collides and rubs against the back of the glass, causing the back of the glass to become positively charged. Because the flow regulating valve 26 causes the gas flow rate entering the secondary pipe 23 through the first branch pipe 25 to increase sequentially from bottom to top, in this embodiment, as... Figure 6As shown, starting from the bottommost first branch pipe 25a, the flow rate increases sequentially upwards until the topmost first branch pipe 25n. The gas flow rate in each first branch pipe 25a increases sequentially from bottom to top. Meanwhile, since each secondary pipe 23 inside the second housing 2 has a structure in which the cross-sectional area of ​​the gas channel decreases along the airflow direction, and each of its right-side pipe walls is connected to a second branch pipe 24, and the second branch pipe 24 on each secondary pipe 23 evenly distributes the gas flow rate of that secondary pipe, the pressure of the airflow output from each second branch pipe 24 also gradually increases from bottom to top. This causes the friction force of the ball on the back of the glass to increase from bottom to top, and thus the amount of positive charge accumulated on the back of the glass also increases from bottom to top.

[0030] During the above cycle, the small balls entering the separator 35 cannot enter the first blower 36 due to the obstruction of the filter screen, and can only fall to the bottom of the separator 35 for temporary storage. When the small balls in the left chamber and the lower chamber are consumed to a certain limit, they are replenished. Specifically, the fourth valve 54 is opened to allow the small balls to fall into the storage tank 34, and then the fourth valve 54 is closed. Then the eleventh valve 511 and the third valve 53 are opened to allow the small balls to fall into the left chamber and the lower chamber, and then the two valves are closed. The function of the eleventh pipe 411 and the eleventh valve 511 is to input working gas into the storage tank so that the small balls are evenly distributed to each pipe in a set of third pipes 43. S7. Maintain the above cycle state, immerse the coating device in the coating solution until the upper outer panel 12 is immersed in the coating solution for a period of time, then pull the coating device out of the coating solution, and then use hot air to dry the wet film attached to the glass surface. After the glass leaves the coating solution, the coating solution adhering to the glass surface flows downwards under the influence of gravity. At this time, the positive charge on the back of the glass attracts the negatively charged coating solution adhering to the front of the glass, slowing down the downward flow of the coating solution. This delaying force increases from bottom to top on the glass surface, with the downward flow of the coating solution slowing down closer to the top. Blowing hot air onto the front of the glass accelerates the curing speed of the coating solution, allowing more coating solution to solidify in the upper part of the glass plate, thus effectively improving the problem of the film thickness being thinner at the top than at the bottom in existing technologies. In this embodiment, the silicon film prepared by this invention has a thickness of 161 nm at the top and 168 nm at the bottom, while in contrast, the glass prepared by existing technologies has a film thickness of 135 nm at the top and 188 nm at the bottom at the same test location.

[0031] S8. Depending on the required film thickness, the above operation steps can be performed once or multiple times until the required film thickness is obtained. S9. Then, close the ninth valve 59 and the vacuum pump 37, open the tenth valve 510, and start the second fan 38 to detach the glass 6 from the frame 5.

Claims

1. An dip-coating apparatus for preparing a silicon film on a glass (6) surface, characterized in that, include: Both are rectangular flat structures: the first box (1) and the second box (2). The second box (2) is located inside the first box (1); The first box (1) has a right outer panel (10) and a left outer panel (11) and is in a vertical state. A rectangular opening (10a) is provided on the right outer panel (10). A frame (5) is embedded in the right outer panel (10) around the opening (10a). The frame (5) has a cavity (50) with a rectangular cross section. Multiple first holes (50a) are provided on the right side of the frame (5). The first holes (51) make the cavity (50) communicate with the atmosphere. The upper end of the frame (5) is connected to the lower end of the eighth pipe (48) through the opening. The upper end of the eighth pipe (48) is connected to the vacuum pump (37) and the second fan (38) through the ninth pipe (49) and the ninth valve (59), and the tenth pipe (410) and the tenth valve (510) respectively. During coating, the glass (6) is coated with the coating side facing outward and the back side close to the first hole (50a). Under the action of the vacuum pump (37), it is fixed on the right side of the frame (5). The second box (2) has a left inner panel (21) and a right inner panel (22), both located between the left outer panel (11) and the right outer panel (10) of the first box (1). The first box (1) has an upper outer panel (12) at the top and a lower outer panel (13) at the bottom. The upper end of the second box (2) is connected to the upper outer panel (12), and there is a gap between the lower end of the second box (2) and the lower outer panel (13). The front end of the first box (1) has a front outer panel (14), and the rear end of the first box (1) has a rear outer panel (15). The front end of the second box (2) is connected to the front outer panel (14), and the rear end of the second box (2) is connected to the rear outer panel (15). Among them, the glass (6), the first box (1), and the second box (2) form a left chamber (16), a lower chamber (17), and a right chamber (18) that are connected in sequence.

2. The dip-coating apparatus according to claim 1, characterized in that: The left inner panel (21), right inner panel (22), left outer panel (11) and right outer panel (10) are parallel, and there is a gap between the left inner panel (21) and left outer panel (11), and between the right inner panel (22) and right outer panel (10).

3. The dip-coating apparatus according to claim 1, characterized in that: The left chamber (16) is located between the left outer panel (11) of the first box (1) and the left inner panel (21) of the second box (2). The lower chamber (17) is located between the bottom of the second box (2) and the lower outer panel (13) of the bottom of the first box (1). The right chamber (18) is located between the right outer panel (10) of the first box (1) and the right inner panel (22) of the second box (2).

4. The dip-coating apparatus according to claim 1, characterized in that: It also includes a gas supply system for supplying working gas to the interior of the first housing (1). The gas supply system includes a gas source (30), a first gas distribution box (31), a second gas distribution box (32), a set of main pipes (33) and a set of auxiliary pipes (23). There are multiple main pipes (33) and auxiliary pipes (23). The auxiliary pipes (23) are located inside the second housing (2) and the main pipes (33) are located outside the first housing (1). The gas source (30) is used to provide working gas, which is purified air with less than 10,000 particles greater than or equal to 0.1µm per cubic meter and a relative humidity of less than 45%.

5. The dip-coating apparatus according to claim 4, characterized in that: The upper end of the first gas distribution box (31) is connected to the gas source (30) through the first pipe (41) and the first valve (51). The lower end of the first gas distribution box (31) is connected to the upper end of the second gas distribution box (32) through the second pipe (42). The side end of the first gas distribution box (31) is connected to a set of secondary pipes (23) through a set of first branch pipes (25) and a set of flow regulating valves (26). The flow regulating valves (26) cause the gas flow rate entering the set of secondary pipes (23) through the set of first branch pipes (25) to increase sequentially from bottom to top. The second gas distribution box (32) is a box structure in which the cross-sectional area of ​​the gas channel decreases with the direction of airflow. The lower end of the second gas distribution box (32) is connected to the main pipe (33).

6. The dip-coating apparatus according to claim 4, characterized in that: The main pipe (33) is located on the outside of the left outer panel (11). The main pipe (33) is laid vertically at equal intervals from front to back. The lower end of the main pipe (33) is connected to the lower chamber (17) through the opening (16a) at the lower end of the left outer panel (11). The upper end of the main pipe (33) is connected to the lower end of the second gas distribution box (32). The secondary pipe (23) is located inside the second housing (2) and on one side near the left inner panel (21). Multiple secondary pipes (23) are laid horizontally at equal intervals from bottom to top. The front ends of the secondary pipes (23) are all closed. The rear ends of the secondary pipes (23) extend to the outside of the first housing (1) through the opening (15a) on the rear outer panel (15). The secondary pipes (23) are connected to the first branch pipe (25). The pipes of each secondary pipe (23) inside the second housing (2) are all structures in which the cross-sectional area of ​​the gas channel decreases along the airflow direction. The right side wall of the secondary pipe (23) is connected to the second branch pipe (24). The right end of the second branch pipe (24) has an opening (24a) located on the right inner panel (22).

7. The dip-coating apparatus according to claim 1, characterized in that: It also includes a communication system for connecting the left chamber (16) and the right chamber (18) outside the first housing (1). The communication system includes an opening (16b) at the top of the left chamber (16), a third pipe (43) and a third valve (53) connected in sequence. The third pipe (43) is connected to the lower end of the storage tank (34). A fourth pipe (44) is provided at the upper end of the storage tank (34). A fourth valve (54) is provided on the fourth pipe (44). A separator (35) is provided at the upper end of the fourth pipe (44). A fifth pipe (45) is provided at the side end of the separator (35). A fifth valve (55) is provided on the fifth pipe (45). A collection tank (39) is provided at the lower end of the collection tank (39). A sixth pipe (46) is provided at the lower end of the collection tank (39). An opening (18a) is provided at the top of the right chamber (18). The opening (18a) is connected to the sixth pipe (46).

8. The dip-coating apparatus according to claim 7, characterized in that: The side end of the storage tank (34) is connected to the second pipe (42) through the eleventh pipe (411) and the eleventh valve (511). The eleventh valve (511) is located on the eleventh pipe (411). The storage tank (34) contains small balls with a silk surface.

9. The dip-coating apparatus according to claim 8, characterized in that: The eleventh valve (511), the third valve (53), and the fourth valve (54) are linked. When the eleventh valve (511) and the third valve (53) are closed at the same time, the fourth valve (54) can be opened; when the fourth valve (54) is closed, the eleventh valve (511) and the third valve (53) can be opened.

10. The dip-coating apparatus according to claim 9, characterized in that: The separator (35) is a vertical cylinder. The upper opening of the separator (35) is connected to the air inlet of the first fan (36). A filter screen is provided at the upper opening of the separator (35). The air outlet of the first fan (36) is connected to the first pipe (41) through the twelfth pipe (412) and the twelfth valve (512). The twelfth valve (512) is located on the twelfth pipe (412). The vertical cross section of the collecting tank (39) is a trapezoidal structure, which is used for the small balls entering the collecting tank through the sixth pipe (46), and after merging, they enter the side end of the separator (35) through a fifth pipe (45); A seventh pipe (47) is connected to the fifth pipe (45) between the collection tank (39) and the fifth valve (55), and a seventh valve (57) is provided on the seventh pipe (47).

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