Spray head and processing chamber comprising same

Abstract

The present invention relates to a showerhead and a processing chamber including the same, in which the showerhead includes: a top plate including a gas inlet at an upper end and a gas outlet at a lower end, receiving a process gas from the outside through the gas inlet, and discharging the process gas downward through the gas outlet; a bottom plate which is fixed to the top plate in such a manner that the upper end of the bottom plate abuts against the lower end of the top plate, covers the gas outlet, and has a plurality of injection holes formed therein so as to inject the process gas downward; and the baffle plate is arranged between the top plate and the bottom plate in a lifting manner and covers the gas outlet, and a plurality of adjusting holes are formed in the baffle plate so as to adjust the distribution of the process gas.

Description

Technical Field

[0001] The present invention relates to a spray head and a processing chamber including the same, and more particularly to a spray head and a processing chamber including the same capable of adjusting the distribution of process gas to make the process gas uniformly contact the substrate. Background Technology

[0002] With the development of semiconductor technology, various semiconductor processing technologies and equipment have emerged one after another. At the same time, as the requirements for the precision and yield of semiconductor products become higher and higher, the requirements for the stability and processing uniformity of semiconductor processing technologies and equipment are also increasing.

[0003] Taking chemical vapor deposition (CVD) as an example, in order to form a uniform thin film on a substrate, it is necessary to uniformly supply process gas to the surface of the substrate so that the film formation reaction can be uniformly carried out at various points on the substrate surface.

[0004] The commonly used method for uniformly supplying process gas is to place a base plate with densely distributed nozzles at the bottom of the spray head, so that the process gas in the spray head contacts the base plate and diffuses along the surface of the base plate before being sprayed onto the substrate, and then is sprayed out through each nozzle.

[0005] As the process gas is ejected from each nozzle, its uniformity gradually increases within a certain distance, reaching an optimal state. Afterward, the process gas distribution becomes increasingly dispersed, and the uniformity decreases. Therefore, if the distance between the spray head and the substrate is too close or too far, the process gas cannot contact the substrate uniformly. Only by adjusting the distance between the spray head and the substrate to an appropriate level can the process gas contact the substrate with a high degree of uniformity.

[0006] To adjust the distance between the spray nozzle and the substrate, a lifting device is typically installed under the mounting stage to adjust the stage's height. However, this lifting device usually only connects to the mounting stage via a single support shaft, making it difficult to ensure that all edges of the mounting stage are at the same height during or after lifting. In other words, it's difficult to ensure the substrate resting on the mounting stage is level. Even though the distance between the substrate and the spray nozzle is adjusted to an appropriate level, the process gases still cannot contact the substrate evenly.

[0007] To address the aforementioned issues, another method exists in this field: adjusting the height of the spray head. However, the position of the spray head is typically fixed. Therefore, the only way to adjust its height is to make the base plate of the spray head movable relative to its top plate. While this allows adjustment of the distance between the spray head and the substrate, it also changes the volume of the spray head, i.e., alters the distance the process gas travels within it. This factor affects the uniformity of the process gas's contact with the substrate, necessitating further adjustments.

[0008] It is evident that there is a current need for a spray head that allows for easy adjustment of the distribution of process gases. In particular, there is a need for a spray head that can ensure uniform contact of process gases with the substrate without changing the distance between the substrate and the spray head, and that can ensure uniform contact of process gases with the substrate even when the substrate is tilted. Summary of the Invention

[0009] Technical issues

[0010] One embodiment of the present invention provides a spray head with easily adjustable process gas distribution.

[0011] Another embodiment of the present invention provides a processing chamber including the spray head of the present invention.

[0012] Technical solution

[0013] One embodiment of the present invention provides a spray head comprising: a top plate having a gas inlet at an upper end and a gas outlet at a lower end, wherein process gas is received from the outside through the gas inlet and the process gas is discharged downward through the gas outlet; a bottom plate being fixed to the top plate such that its upper end abuts against the lower end of the top plate and covers the gas outlet, and having a plurality of spray holes for spraying the process gas downward; and a baffle being vertically and vertically disposed between the top plate and the bottom plate and covering the gas outlet, and having a plurality of adjustment holes for adjusting the distribution of the process gas.

[0014] In one embodiment, the outer end of the baffle can be sealed against the inner surface of the top plate and the inner surface of the bottom plate.

[0015] In one embodiment, the baffle may include: a frame portion constituting the outer end of the baffle; and a main body portion detachably disposed on the frame portion and having a plurality of the adjustment holes formed thereon.

[0016] As one embodiment, a lifting unit may be further included, which is disposed on the outside of the baffle and connected to the outer end of the baffle to adjust the height of the baffle.

[0017] As one embodiment, a storage space may be formed between the top plate and the bottom plate, and the storage space has an opening toward the gas outlet of the top plate. The lifting part may be disposed in the storage space and connected to the outer end of the baffle through the opening.

[0018] As one embodiment, a connecting portion protruding outward may be formed at the outer end of the baffle. The lifting portion may include: a connecting portion for connecting with the connecting portion; and an operating portion for engaging with the connecting portion to lift the connecting portion.

[0019] In one embodiment, one of the connecting portion and the operating portion may be formed with an internal thread extending in the vertical direction, while the other may be formed with an external thread extending in the vertical direction. The operating portion is threadedly connected to the connecting portion, and the connecting portion is raised or lowered by rotation.

[0020] As one implementation, a plurality of the lifting parts may be included to connect to multiple locations on the outer end of the baffle, and the height of the plurality of locations may be adjusted to adjust at least one of the height and levelness of the baffle.

[0021] In one implementation, the plurality of locations may be three or four.

[0022] Another embodiment of the present invention provides a processing chamber including the above-described spray head.

[0023] Beneficial effects

[0024] The spray head of this invention allows for easy adjustment of the distribution of process gases.

[0025] The processing chamber of this invention allows for easy adjustment of the distribution of process gases. Attached Figure Description

[0026] Figure 1 This is a top view of a spray head according to one embodiment of the present invention.

[0027] Figure 2 It is based on Figure 1 The section line DD in the figure shows a cross-sectional view of a spray head according to one embodiment of the present invention.

[0028] Figure 3 It is based on Figure 1 The section line AA in the figure shows a cross-sectional view of a spray head according to one embodiment of the present invention.

[0029] Figure 4 It is Figure 3 The diagram shows a magnified view of the details of region B.

[0030] Figure 5This is a top view of a baffle according to one embodiment of the present invention.

[0031] Figure 6 It is based on Figure 5 The section line CC in the figure shows a cross-sectional view of the baffle according to one embodiment of the present invention.

[0032] Figure 7 This is a front view that schematically shows the connection relationship between the baffle and the lifting part of the present invention.

[0033] Figure 8 Based on Figure 3 Area B in the diagram illustrates the storage space of this invention.

[0034] Figure 9 Based on Figure 3 The diagram in section B specifically illustrates the connection relationship between the baffle and the lifting part of the present invention.

[0035] Figure 10 This is a layout diagram of the lifting unit according to one embodiment of the present invention.

[0036] Figure 11 This is a schematic diagram of the processing chamber of the present invention.

[0037] Figure Labels

[0038] 100: Spray head

[0039] 101: Bolt

[0040] 110: Top plate

[0041] 111: Gas Inlet

[0042] 112: Gas outlet

[0043] 120: Base Plate

[0044] 130: Baffle

[0045] 131: Sealing ring

[0046] 132: Steps

[0047] 133: Frame Department

[0048] 134: Main Body

[0049] 135: Connecting part

[0050] 140: Lifting Unit

[0051] 141: Joint

[0052] 142: Operations Department

[0053] 150: Storage space

[0054] 151: Opening

[0055] 200: Machining Chamber

[0056] 201: Process Space

[0057] 210: Platform

[0058] 211: Substrate Detailed Implementation

[0059] The following describes one or more embodiments of the present invention in detail with reference to the accompanying drawings. Obviously, these embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0060] The terminology used in the following embodiments is for illustrative or explanatory purposes only and is not intended to limit the scope of protection of the present invention. Furthermore, the singular expressions used in this invention, such as "a," "an," "the," "the," "the," and "this," are intended to include plural forms such as "one or more," unless the context clearly indicates otherwise. It should also be understood that, in embodiments of the present invention, the use of terms such as "one or more," "at least one," and "more than one" is intended to include cases of one, two, and at least three.

[0061] Furthermore, when the terms "in one embodiment," "in some embodiments," or "in one or more embodiments" are used in the description of this invention, it is intended that one or more embodiments of the invention may include specific technical features described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," and "in one or more embodiments" appearing in different parts of this specification do not necessarily refer to the same embodiment, but may refer to both the same embodiment and different embodiments, unless the specific technical features described in those embodiments cannot be used alone or in combination.

[0062] Furthermore, in this invention, when an element is described as "comprising," "containing," or "having" another element, it is intended to be an open-ended definition, meaning that the element may include other elements besides the other element. Conversely, when an element is described as "comprising only," "containing only," "having only," or "consisting of another element," it is intended to be a closed-ended definition, meaning that the element does not include other elements besides the other element. However, it should be noted that when the term "formed by another element" is used to describe the formation relationship between multiple elements, this term is not intended to be a closed-ended definition; it should be considered that the other element forms part of the first element, and the first element may include other elements besides the other element.

[0063] It should be understood that when sequential terms such as "first" and "second" are used in this document to describe various elements, these sequential terms are only used to distinguish one element from another, and should not be interpreted as indicating a primary or secondary relationship, or a sequential relationship. Without departing from the scope of this invention, a first element may be labeled as a second element, and a second element may be labeled as a first element.

[0064] In this invention, when describing the positional relationship between two or more elements, if terms such as "above", "below", or "between" are used, it indicates that one or more other elements may be set between the two or more elements, unless terms such as "exactly" or "adjacent" are used.

[0065] Hereinafter, one or more embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can clearly and completely understand the present invention. When the description of well-known structures or features would unnecessarily obscure the main points of the present invention, the description of such well-known structures or features will be omitted.

[0066] One embodiment of the present invention provides a spray head with easily adjustable process gas distribution.

[0067] Figure 1 This is a top view of a spray head according to one embodiment of the present invention. Figure 2 It is based on Figure 1 The section line DD in the figure shows a cross-sectional view of a spray head according to one embodiment of the present invention. Figure 3 It is based on Figure 1 The section line AA in the figure shows a cross-sectional view of a spray head according to one embodiment of the present invention.

[0068] like Figures 1 to 3As shown, the spray head 100 of the present invention may include a top plate 110 and a bottom plate 120. The top plate 110 may be disposed, for example, in the upper part of the process space of a processing chamber to receive process gas from the outside. The bottom plate 120 may be fixed to the lower end of the top plate 110 to spray the process gas downwards, i.e., towards the substrate. The top plate 110 and the bottom plate 120 may be connected by a connection method commonly used in the art, such as bolt connection. Specifically, threaded holes aligned with each other may be formed in the top plate 110 and the bottom plate 120, and bolts 101 may be inserted into these threaded holes for fixing. The specific type, quantity, and position of the bolts 101 may be appropriately selected according to the actual situation. For example, as shown... Figure 1 As shown, four bolts 101 are installed perpendicularly to the circumference of the spray head 100.

[0069] Furthermore, a sealing material such as a gasket (not shown) can be disposed between the top plate 110 and the bottom plate 120 to prevent process gas from leaking outward through the connection between the top plate 110 and the bottom plate 120. The specific type, quantity, and position of the gasket can be appropriately selected according to the actual situation. For example, one or more rings can be provided along the circumference of the spray head 100. Alternatively, gaskets made of any one or more of the following materials can be used: silicone rubber, ethylene propylene diene monomer (EPDM), nitrile butadiene rubber (NBR), polytetrafluoroethylene (PTFE), fluororubber (FKM), and hydrogenated nitrile butadiene rubber (HNBR).

[0070] Of course, the connection methods and sealing methods that can be used in this invention are not limited to these, and those skilled in the art can make appropriate selections according to actual needs.

[0071] On the other hand, the top plate 110 may include a gas inlet 111 at the upper end and a gas outlet 112 at the lower end. The gas inlet 111 may be connected, for example, to an external process gas source (not shown) via a gas pipe to receive process gas from the outside. The process gas enters the top plate 110 through the gas inlet 111 and then exits downwards through the gas outlet 112, thereby entering the bottom plate 120. The top plate 110 may be cylindrical in shape, as is common in the art, and may have an annular groove formed on its upper surface for mounting devices such as spray head heaters. The gas inlet 111 and the gas outlet 112 may be circular gas inlets and outlets, as is common in the art. The cross-sectional area of ​​the gas inlet 111 may be relatively small to match the cross-sectional area of ​​the gas pipe connected to the external process gas source, while the cross-sectional area of ​​the gas outlet 112 may be relatively large to create sufficient space for the process gas to contact the bottom plate 120 and diffuse along its surface. That is, the internal space of the top plate 110 can be formed by connecting two concentric cylindrical cavities with different cross-sectional areas in sequence. Of course, the gas inlet 111 can also be formed into a laterally bent shape according to the actual angle of connection with the gas pipe, and the present invention is not limited thereto.

[0072] The base plate 120 is fixed to the top plate 110 with its upper end abutting against the lower end of the top plate 110 and covering the gas outlet 112. It also has multiple nozzles (not shown) to spray the process gas downwards. The base plate 120 can be a conventional cylindrical shape, forming an upwardly opening cylindrical cavity with a cross-sectional area identical to that of the gas outlet 112 to receive the process gas from the gas inlet 111. A through-hole is formed on the bottom surface of the base plate 120 at a location corresponding to this cavity, serving as the nozzle. The depth of the cavity in the base plate 120 can be appropriately selected according to actual conditions. The multiple nozzles can be formed in a specified number, shape, size, and arrangement, etc., as needed; the present invention is not limited thereto.

[0073] Based on this, the spray head 100 of the present invention may further include a baffle 130, which is vertically and elliptically disposed between the top plate 110 and the bottom plate 120 and covers the gas outlet 112, and has a plurality of adjustment holes (not shown) to adjust the distribution of the process gas. That is, the present invention enables the process gas to be pre-adjusted by passing through the plurality of adjustment holes of the baffle 130 before being sprayed downwards through the bottom plate 120, and this pre-adjustment is performed by adjusting the height of the baffle 130 (i.e., the distance between the baffle 130 and the bottom plate 120) according to actual needs, thereby ensuring a predetermined distribution of the process gas. Therefore, the spray head 100 of the present invention does not require adjusting the position of the bottom plate 120 or the stage as in the prior art; the distribution of the process gas can be easily adjusted simply by adjusting the baffle 130, thereby ensuring that the process gas contacts the substrate uniformly.

[0074] The baffle 130 may have the same cross-sectional shape and cross-sectional area as the gas outlet 112. That is, the baffle 130 may be a disc of a predetermined size, and a plurality of through holes extending along its thickness direction are uniformly formed on its bottom surface as adjustment holes. The thickness, curvature, etc. of the baffle 130 may be appropriately selected according to actual conditions, and the plurality of adjustment holes may be formed in a prescribed number, shape, size, and arrangement according to actual needs. The present invention is not limited thereto.

[0075] Figure 4 It is Figure 3 The diagram shows a magnified view of the details of region B.

[0076] like Figure 4 As shown, the outer end of the baffle 130 can be sealed against the inner surface of the top plate 110 and the inner surface of the bottom plate 120 to prevent process gas from leaking outward through the connection between the baffle 130 and the top plate 110 and the bottom plate 120, so that all process gas is regulated through the regulating hole.

[0077] As a specific implementation, a sealing ring 131 can be provided on the outer surface of the outer end of the baffle 130. Preferably, sealing rings 131 can be provided on the portions of the outer surface corresponding to the top plate 110 and the bottom plate 120, respectively, to further seal the connection between the top plate 110 and the bottom plate 120. More preferably, protruding steps 132 can be formed at the upper and lower parts of the outer end of the baffle 130, and sealing rings 131 can be provided on the portions of the upper step 132 corresponding to the top plate 110 and the lower step 132 corresponding to the bottom plate 120, respectively, to ensure that during the lifting and lowering process, the outer end of the baffle 130 always abuts against the inner surfaces of the top plate 110 and the bottom plate 120 in a sealed manner, and always seals the connection between the top plate 110 and the bottom plate 120. The number, position, material, shape, and size of the sealing rings 131 can be appropriately selected according to actual needs. For example, depending on its shape, the sealing ring 131 can be an O-ring, X-ring, D-ring, Y-ring, V-ring, T-ring, triangle ring, square ring, or spiral ring. As another example, depending on the material, the sealing ring 131 can be a sealing ring made of any one or more of the following materials: silicone rubber, EPDM (ethylene propylene diene monomer), NBR (nitrile butadiene rubber), PTFE (polytetrafluoroethylene), FKM (fluorocarbon), or HNBR (hydrogenated nitrile butadiene rubber).

[0078] Additionally, a groove can be formed on the outer surface to accommodate the sealing ring 131.

[0079] Figure 5 This is a top view of a baffle according to one embodiment of the present invention. Figure 6 It is based on Figure 5 The section line CC in the figure shows a cross-sectional view of the baffle according to one embodiment of the present invention.

[0080] like Figures 5 to 6 As shown, the baffle 130 may include a frame portion 133 and a main body portion 134.

[0081] The frame portion 133 can form the outer end of the baffle 130. That is, the frame portion 133 can abut against the inner surface of the top plate 110 and the inner surface of the bottom plate 120 in a sealing manner, the sealing ring 131 is provided on the outer surface of the frame portion 133, and the steps 132 are formed on the upper and lower parts of the frame portion 133.

[0082] The main body 134 may have a plurality of adjustment holes. That is, the process gas is regulated through the adjustment holes formed in the main body 134. Adjusting the height of the baffle 130 refers to adjusting the height of the main body 134, that is, the distance between the main body 134 and the base plate 120.

[0083] Furthermore, the frame portion 133 and the main body portion 134 are detachable, meaning the main body portion 134 is detachably mounted on the frame portion 133. For example, a boss can be formed on the inner surface of the frame portion 133, and the main body portion 134 can be disposed on the boss. Therefore, when different adjustment holes are required, it is not necessary to replace the entire baffle 130; only the main body portion 134 needs to be replaced.

[0084] Furthermore, the spray head 100 of the present invention may include a lifting part to adjust the height of the baffle 130.

[0085] Figure 7 This is a front view that schematically shows the connection relationship between the baffle and the lifting part of the present invention.

[0086] like Figure 7 As shown, the lifting part 140 can be disposed on the outside of the baffle 130 and connected to the outer end of the baffle 130. In this case, the lifting part 140 can allow the center of the baffle 130 to pass through, thus not obstructing the normal passage of process gas through the adjustment hole of the baffle 130. Moreover, compared to raising or lowering the center of the baffle 130, it is more advantageous to adjust the baffle 130 so that each edge has a predetermined height, thereby achieving smooth and precise adjustment of the baffle 130.

[0087] Additionally, the outer side of the baffle 130 may refer to the side wall of the spray head 100 and / or the outer side of the spray head 100, that is, the lifting part 140 may be disposed inside the side wall of the spray head 100 (e.g., the side wall of the top plate 110, the side wall of the bottom plate 120), or may be disposed outside the side wall of the spray head 100.

[0088] When the lifting part 140 is disposed on the outer side wall of the spray head 100, it not only occupies external space but also requires additional fixing units to secure it. Furthermore, the lifting part 140 is directly exposed, making it susceptible to external interference or capable of interfering with other external devices or components. When the lifting part 140 is disposed inside the side wall of the spray head 100, it saves space, reduces overall weight, and isolates the lifting part 140 from the outside environment to prevent interference. Therefore, it is preferable to dispose of the lifting part 140 inside the side wall of the spray head 100.

[0089] Figure 8 Based on Figure 3 Area B in the diagram illustrates the storage space of this invention.

[0090] like Figure 8 As shown, a storage space 150 can be formed between the top plate 110 and the bottom plate 120 to accommodate the lifting part 140. Further, the storage space 150 may have an opening 151 facing the gas outlet 112 of the top plate 110, thereby allowing the lifting part 140 to be connected to the outer end of the baffle 130 through the opening 151.

[0091] As one implementation, a recess and a groove extending from the recess to the side corresponding to the baffle 130 can be formed on the surface of at least one of the lower end of the top plate 110 and the upper end of the bottom plate 120. In this case, by combining the top plate 110 and the bottom plate 120, the storage space 150 can be formed in the recess, and the opening 151 of the storage space 150 can be formed in the groove. The size and shape of the storage space 150 are sufficient to ensure complete housing of the lifting part 140 and to allow the lifting part 140 to raise and lower the baffle 130. The size and shape of the opening 151 are sufficient to ensure connection between the lifting part 140 and the baffle 130 and allow the baffle 130 to raise and lower within a predetermined height range.

[0092] Figure 9 Based on Figure 3 The diagram in section B specifically illustrates the connection relationship between the baffle and the lifting part of the present invention.

[0093] like Figure 9As shown, the lifting part 140 is located in the storage space 150 and is connected to the baffle 130 through the opening 151. Specifically, a connecting part 135 protruding outward may be formed at the outer end of the baffle 130. The lifting part 140 may include: a connecting part 141 for connecting with the connecting part 135; and an operating part 142 for engaging with the connecting part 141 to raise or lower the connecting part 141.

[0094] The connection method between the connecting portion 135 and the connecting portion 141 can be, for example, a commonly used plug-in method in the art. As one embodiment, the connecting portion 135 can be formed as a sheet with a predetermined thickness, and the connecting portion 141 can have a socket corresponding to the cross-sectional shape of the connecting portion 135. The connecting portion 135 can be inserted into the socket, thereby achieving the connection between the connecting portion 135 and the connecting portion 141. Further, fixing holes aligned with each other can be formed in the connecting portion 135 and the connecting portion 141 respectively, so that after the connecting portion 135 is inserted into the socket, a fixing pin or the like can be inserted into the fixing hole for fixation. The shape, size, etc., of the connecting portion 135 and the connecting portion 141, as well as the connection method between the connecting portion 135 and the connecting portion 141, are not limited to these; those skilled in the art can make appropriate selections according to the actual situation.

[0095] Furthermore, the engagement between the operating part 142 and the connecting part 141 can be a threaded engagement, allowing the connecting part 141 to move up and down via threaded transmission. Specifically, one of the connecting part 141 and the operating part 142 can be formed with an internal thread extending in the vertical direction, while the other can be formed with an external thread extending in the vertical direction. For example, as... Figure 9 As shown, the connecting portion 141 may have a threaded hole with internal threads extending in the vertical direction, and the operating portion 142 may be a screw with external threads extending in the vertical direction. The operating portion 142 is threadedly connected to the connecting portion 141, and the connecting portion 141 is raised or lowered by rotation. At this time, by adjusting the rotation angle of the operating portion 142, the raising or lowering height of the connecting portion 141 can be precisely adjusted, thereby precisely adjusting the height of the baffle 130. The upper end of the operating portion 142 may, for example, be inserted into the upper surface of the top plate 110 to receive external control, for example, by the user manually rotating the upper end, or by another driving device rotating the upper end, thereby ultimately achieving control of the baffle 130.

[0096] The connection method and transmission method between the operating part 142 and the connecting part 141 are not limited to this. Those skilled in the art can choose other methods such as gear and rack connection, worm gear connection, etc. However, considering that the lifting part 140 should be small in size and compact in structure, the above-mentioned threaded connection is preferred.

[0097] Figure 10 This is a layout diagram of the lifting unit according to one embodiment of the present invention.

[0098] like Figure 10 As shown, in a preferred embodiment, the spray head 100 of the present invention may include a plurality of lifting portions 140 for connection to multiple locations on the outer end of the baffle 130, and the height of each of the plurality of locations may be adjusted to adjust at least one of the height and levelness of the baffle 130. For example, a plurality of the aforementioned connecting portions 135 may be formed on the outer end of the baffle 130, such that the connecting portion 141 of each lifting portion 140 is connected to one of the connecting portions 135, and the operating portion 142 of each lifting portion 140 is used to adjust at least one of the height and levelness of the baffle 130.

[0099] That is, the height of the multiple locations can be adjusted to be the same by multiple lifting parts 140 connected to the multiple locations, so that the baffle 130 has a predetermined height and is horizontal as a whole; or, the height of the multiple locations can be adjusted to be different by multiple lifting parts 140 connected to the multiple locations, so that the baffle 130 has a predetermined height and is tilted at a predetermined angle as a whole.

[0100] The technical effects achievable by adjusting the height of the baffle 130 include: when the substrate is horizontal, the baffle 130 is positioned at an appropriate height to pre-adjust the process gas, so that the process gas has a predetermined uniform distribution pattern and is uniformly sprayed onto the substrate through the base plate 120 to achieve uniform contact with the substrate. The technical effects achievable by adjusting the levelness of the baffle 130 include: when the substrate is slightly tilted and not horizontal due to the mounting stage, the baffle 130 is positioned at an appropriate height and at an appropriate tilt angle to pre-adjust the process gas, so that the process gas is sprayed onto the substrate in a specific distribution pattern different from the overall uniformity, thereby counteracting the effect of the substrate tilt and achieving uniform contact with the substrate.

[0101] Furthermore, the number of lifting parts 140 and the number of connection points with the baffle 130 can be appropriately selected according to actual needs. For example, when there are two lifting parts 140 connected to two points on the outer end of the baffle 130, the height of the baffle 130 can be adjusted, but the adjustment angle is limited when adjusting the level of the baffle 130. When there are three lifting parts 140 connected to three points on the outer end of the baffle 130, both the height and level of the baffle 130 can be adjusted. When there are four lifting parts 140 connected to four points on the outer end of the baffle 130, both the height and level of the baffle 130 can be adjusted. When there are five or more lifting parts 140 and they are connected to the outer end of the baffle 130 at five or more locations, although the height and level of the baffle 130 can still be adjusted, the increased number of lifting parts 140 and the number of connection points with the baffle 130 leads to increased manufacturing costs and operational difficulty, and also increases the risk of the entire system being affected by a misoperation at one point. Therefore, as a preferred embodiment, the number of lifting parts 140 can be three or four, connecting to the outer end of the baffle 130 at three or four locations.

[0102] The spray head provided by one embodiment of the present invention has been described in detail above. Hereinafter, a processing chamber provided by another embodiment of the present invention will be described, but details regarding the spray head of the present invention that are repeated above will be omitted.

[0103] Figure 11 This is a schematic diagram of the processing chamber of the present invention.

[0104] like Figure 11 As shown, the processing chamber 200 of the present invention includes a spray head 100. The spray head 100 may be disposed in the upper part of the process space 201 of the processing chamber 200. In the lower part of the process space 201, a mounting stage 210 may be disposed, on which a substrate 211 to be processed may be held. The process gas sprayed downward from the spray head 100 can uniformly contact the substrate 211 below, thereby performing a uniform reaction (e.g., film formation reaction) on the substrate 211.

[0105] The spray head 100 can adjust the distribution pattern of the process gas according to the levelness of the substrate 211. That is, when the substrate 211 is level, the spray head 100 pre-adjusts the process gas so that the process gas has a predetermined uniform distribution pattern, so as to spray it evenly onto the substrate 211 and thus make uniform contact with the substrate 211. When the substrate 211 is not level due to the slight tilt of the mounting stage 210, the spray head 100 pre-adjusts the process gas so that the process gas is sprayed onto the substrate 211 in a specific distribution pattern that is different from the overall uniformity, so as to counteract the effect of the tilt of the substrate 211 and thus make uniform contact with the substrate 211.

[0106] The embodiments of the present invention have been described above, but this is only for the purpose of helping to fully understand the present invention. The present invention is not limited thereto, and those skilled in the art can make various modifications and variations based on these descriptions. Therefore, the technical concept of the present invention is not limited to the above-described embodiments, and the appended claims and their equivalents or variations are all within the scope of the present invention.

Claims

1. A spray head, characterized in that, include: The top plate includes a gas inlet at the upper end and a gas outlet at the lower end. The gas inlet receives process gas from the outside, and the gas outlet discharges the process gas downwards. A base plate, with its upper end abutting against the lower end of the top plate and covering the gas outlet, and having multiple nozzles for spraying the process gas downwards; and A baffle is vertically and flexibly disposed between the top plate and the bottom plate and covers the gas outlet, and has multiple adjustment holes to adjust the distribution of the process gas.

2. The spray head according to claim 1, characterized in that, The outer end of the baffle is in sealing contact with the inner surface of the top plate and the inner surface of the bottom plate.

3. The spray head according to claim 1, characterized in that, The baffle includes: The frame portion, constituting the outer end of the baffle; and The main body is detachably mounted on the frame and has a plurality of adjustment holes formed thereon.

4. The spray head according to claim 1, characterized in that, It further includes a lifting part, which is disposed on the outside of the baffle and connected to the outer end of the baffle to adjust the height of the baffle.

5. The spray head according to claim 4, characterized in that, A storage space is formed between the top plate and the bottom plate, and the storage space has an opening facing the gas outlet of the top plate. The lifting unit is disposed in the storage space and is connected to the outer end of the baffle through the opening.

6. The spray head according to claim 4, characterized in that, A connecting portion protruding outward is formed at the outer end of the baffle. The lifting unit includes: A connecting portion, for connection with the connecting portion; and An operating part, which is connected to the connecting part, is used to raise and lower the connecting part.

7. The spray head according to claim 6, characterized in that, One of the connecting portion and the operating portion has an internal thread extending in the vertical direction, while the other has an external thread extending in the vertical direction. The operating part is threadedly connected to the connecting part, and the connecting part is raised or lowered by rotation.

8. The spray head according to claim 4, characterized in that, It includes multiple lifting parts for connecting to multiple points on the outer end of the baffle, and adjusting the height of each of the multiple points to adjust at least one of the height and level of the baffle.

9. The spray head according to claim 8, characterized in that, The "multiple locations" refers to three or four locations.

10. A processing chamber, characterized in that, Includes the spray head as described in any one of claims 1 to 9.

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