Method for manufacturing pump component and vacuum pump

Abstract

The embodiment of the invention discloses a manufacturing method of a pump component and a vacuum pump. The manufacturing method of the pump component comprises the steps that a base material and a cladding material used for manufacturing the pump component are provided, the pump component comprises at least one of a stator and a rotor of the vacuum pump, and the base material is provided with a cladding area and a protection area; a cladding material is placed in the cladding area, the cladding material and the base material are melted and fused in a laser cladding treatment mode to form a cladding layer, and the temperature of the protection area is controlled to range from 70 DEG C to 90 DEG C in the laser cladding treatment process; and the base material and the cladding layer are machined, and the pump component is obtained. The cladding material is melted into the cladding layer metallurgically bonded with the cladding area of the base material through the laser cladding treatment, and the temperature of the protection area is controlled to be 70-90 DEG C in the laser cladding treatment process, so that the thermal stress can be reduced, the risk of generating cracks in the protection area is reduced, and the deformation of the protection area can be controlled to be smaller than or equal to 0.7 mm.

Description

Technical Field

[0001] This application relates to the field of vacuum equipment manufacturing technology, specifically to a method for manufacturing a pump component and a vacuum pump. Background Technology

[0002] In the semiconductor and panel industries, dry pumps, as critical vacuum generating devices, require their stators and rotors to withstand harsh environments with ultra-high temperatures and strong corrosion during specialized etching processes. Currently, dry pump stators and rotors are typically made of ductile iron. To improve their corrosion resistance, high-temperature resistance, and wear resistance, traditional processes such as electroplating, electroless plating, or spraying are usually applied to their surfaces. However, these traditional processes have significant drawbacks. Spraying results in coatings with low bonding strength to the substrate, making them prone to peeling under prolonged high-temperature and corrosive conditions. While electroplating and electroless plating offer relatively high bonding strength, they still cannot meet the stringent requirements of the semiconductor industry for ultra-high temperatures and strong corrosion resistance, and the coatings also have poor wear resistance and density, affecting the service life of the dry pump.

[0003] Laser cladding technology, as an advanced surface strengthening technology, possesses characteristics such as high bonding strength between the cladding layer and the substrate, strong corrosion resistance, high temperature resistance, and strong wear resistance. However, the laser cladding process suffers from excessively high temperatures (the molten pool area exceeds 1000℃). If the entire working area of ​​the dry pump stator and rotor is clad, it will produce a large amount of deformation, affecting the application of this technology in dry pump stators and rotors with extremely high precision requirements. Summary of the Invention

[0004] This application provides a method for manufacturing a pump component and a vacuum pump, aiming to solve the problem of large deformation of pump components obtained by laser cladding process.

[0005] This application provides a method for manufacturing a pump component, comprising: A substrate and a cladding material are provided for manufacturing pump components, the pump components including at least one of a stator and a rotor of a vacuum pump, the substrate having a cladding zone and a protection zone; The cladding material is placed in the cladding zone, and the cladding material is melted and fused with the substrate by laser cladding to form a cladding layer. During the laser cladding process, the temperature of the protected zone is controlled to be 70℃~90℃. The substrate and the cladding layer are processed to obtain the pump component.

[0006] Optionally, in some embodiments of this application, the initial thickness of the cladding layer obtained after the laser cladding process is 0.8 mm to 1.5 mm; and / or, After the aforementioned processing, the thickness of the cladding layer is 0.2 mm to 0.4 mm; and / or, After the aforementioned processing, the surface roughness Ra of the cladding layer is ≤1.6μm.

[0007] Optionally, in some embodiments of this application, the particle size distribution of the cladding material is 53 μm to 150 μm; and / or, The loose density of the cladding material is ≥4.0 g / cm³. 3 ; and / or, The flowability of the cladding material is ≤16s / 50g; and / or, The purity of the cladding material is ≥99.9%.

[0008] Optionally, in some embodiments of this application, the composition of the cladding material, by mass percentage, includes: Cr 20.0wt%~23.0wt%, Ni≥61.0wt%, Mo 8.0wt%~10.0wt%, Nb 3.15wt%~4.15wt%, Fe≤5.0wt%; or, The composition of the cladding material, by mass percentage, includes: Ni ≥ 57.0 wt%, Mo 15.0 wt%~17.0 wt%, Cr 15.0 wt%~16.0 wt%, Fe ≤ 5.0 wt%, and W 3.0 wt%~4.5 wt%.

[0009] Optionally, in some embodiments of this application, the temperature of the protected area is controlled by using a temperature control device during the laser cladding process; The temperature control device includes: a cooling radiator, a temperature monitoring module, a switch module, and a control module. The temperature monitoring module and the switch module are electrically connected to the control module. The cooling radiator is used to support the substrate, and a cooling channel for supplying coolant flow is formed within the cooling radiator. The temperature monitoring module is used to detect the temperature of the protected area, and the switch module is used to control the opening and closing of the cooling channel.

[0010] Optionally, in some embodiments of this application, the processing includes cooling and finishing processes, wherein the cooling rate of the cooling process is ≤5℃ / min.

[0011] Optionally, in some embodiments of this application, the method for manufacturing the pump component further includes: Before placing the cladding material in the cladding zone, the cladding zone is machined to reduce its thickness by 0.2 mm to 0.4 mm; and / or, The method for manufacturing the pump component further includes: Before placing the cladding material in the cladding zone, the cladding zone is pretreated. The pretreatment includes degreasing, derusting, and roughening. After the roughening treatment, the surface roughness Ra of the cladding zone is 0.8 μm to 3.2 μm.

[0012] Optionally, in some embodiments of this application, the method for manufacturing the pump component further includes: After the processing, a sealing agent is used to seal and cure the cladding layer to form a sealing layer on the surface of the cladding layer.

[0013] Optionally, in some embodiments of this application, the sealing agent includes at least one of an organosilicon resin sealing agent and a polyimide sealing agent; and / or, The sealing and curing treatment includes a coating process and a curing process; and / or, The thickness of the sealing layer is 1.5μm to 2.5μm.

[0014] Accordingly, this application also provides a vacuum pump, including a pump component manufactured by the above-described pump component manufacturing method.

[0015] This application sets a local area of ​​the substrate as the cladding zone and uses laser cladding to melt the cladding material into a cladding layer that is metallurgically bonded to the cladding zone of the substrate. The protected area, which is independent of the cladding zone, can avoid the laser during the laser cladding process, thus controlling the temperature rise of the protected area to a certain extent. Furthermore, during the laser cladding process, the temperature of the protected area, which is the heat-affected zone, is controlled at 70℃~90℃. This can reduce thermal stress, reduce the risk of cracks in the protected area, and control the deformation of the protected area to ≤0.7mm. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a laser cladding system formed by combining a temperature control device and a laser cladding equipment according to an exemplary embodiment of this application; Figure 2 This is a schematic diagram of the cooling radiator in the temperature control device provided in an exemplary embodiment of this application.

[0018] Explanation of reference numerals in the attached figures: 1. Laser cladding equipment; 2. Control module; 3. Switch module; 4. Worktable; 5. Cooling radiator; 6. Substrate; 7. Temperature monitoring module; 8. Cooling channel. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] This application provides a method for manufacturing a pump component and a vacuum pump. Detailed descriptions are provided below. It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments. Furthermore, in the description of this application, the term "comprising" means "including but not limited to". The terms first, second, third, etc., are used merely as illustrative and do not impose numerical requirements or establish an order. Various embodiments of the present invention may exist in the form of a range; it should be understood that the description in the form of a range is merely for convenience and brevity and should not be construed as a rigid limitation on the scope of the invention; therefore, it should be considered that the range description has specifically disclosed all possible sub-ranges and single numerical values ​​within that range. For example, it should be considered that the range description from 1 to 6 has specifically disclosed sub-ranges, such as from 1 to 3, from 1 to 4, from 1 to 5, from 2 to 4, from 2 to 6, from 3 to 6, etc., and single digits within the range, such as 1, 2, 3, 4, 5, and 6, regardless of the range. Additionally, whenever a numerical range is indicated herein, it means including any referenced number (fraction or integer) within the indicated range.

[0021] This application provides a method for manufacturing a pump component, including: A substrate and a cladding material are provided for manufacturing pump components, the pump components including at least one of a stator and a rotor of a vacuum pump, the substrate having a cladding zone and a protection zone; Placing material is placed in the cladding zone, and the cladding material is melted and fused with the substrate through laser cladding to form a cladding layer. During the laser cladding process, the temperature of the protected area is controlled at 70℃~90℃. The substrate and cladding layer are processed to obtain the pump components.

[0022] The pump component manufacturing method provided in this application embodiment is used to manufacture the stator and / or rotor of a vacuum pump, that is, the pump component includes at least one of the stator and rotor of a vacuum pump.

[0023] The substrate refers to the blank used to manufacture pump components. For example, the substrate is ductile iron. The substrate has a cladding zone and a protection zone. The cladding zone and the protection zone are different local areas on the substrate. The cladding zone is the area on the substrate that bears the cladding layer. The protection zone is the area on the substrate that needs to be protected, and its deformation needs to be reduced during the laser cladding process. Here, the protection zone can be an area on the substrate with assembly structures (e.g., assembly pins), where deformation is suppressed to reduce adverse effects on the assembly effect. The protection zone can also be a mechanically weak area on the substrate that is prone to deformation under heat; suppressing deformation in this area controls the overall shape stability of the blank. Optionally, the cladding zone and the protection zone are spaced apart.

[0024] Laser cladding is a technique that uses a high-energy laser beam as a heat source to melt an alloy material on the surface of a substrate, forming a surface coating that is metallurgically bonded to the substrate. The cladding material is the alloy material. The cladding material can be alloy powder or alloy wire. For an example, please see [link to example]. Figure 1 The laser cladding device 1 uses a high-energy laser beam to melt the cladding material. Laser cladding fuses the cladding material with the substrate, achieving a metallurgical bond with a strength exceeding 380 MPa, effectively preventing the cladding layer from peeling off.

[0025] In the process of creating the cladding layer, the cladding material is placed only on the cladding zone, and then melted into a cladding layer that is metallurgically bonded to the substrate through laser cladding. During the laser cladding process, the cladding zone, which is directly exposed to the laser, has a higher temperature, while the protected zone, which is independent of the cladding zone, has a relatively lower temperature because it is not directly exposed to the laser.

[0026] To reduce the risk of deformation in the protected area, the temperature of the protected area is further controlled during laser cladding. Practice has shown that higher temperatures in the protected area during laser cladding are more detrimental to deformation control; when the temperature exceeds 90℃, the deformation increases significantly. However, excessively low temperatures also have adverse effects; specifically, when the temperature is below 70℃, the risk of cracking in the protected area increases significantly. Maintaining the temperature of the protected area between 70℃ and 90℃ during laser cladding ensures sufficient melting of the cladding material to form a metallurgical bond while reducing thermal stress and controlling deformation to ≤0.7mm.

[0027] It should be noted that during the laser cladding process, the temperature of the protected area can be controlled by means of air cooling or water cooling.

[0028] The substrate and cladding layer are processed to improve their dimensions and surface morphology, thereby obtaining the pump component.

[0029] In summary, by designating a localized cladding zone on the substrate, laser cladding is used to melt the cladding material into a cladding layer that is metallurgically bonded to the cladding zone of the substrate. The protected zone, independent of the cladding zone, can avoid the laser during laser cladding, thus controlling the temperature rise of the protected zone to a certain extent. Furthermore, during the laser cladding process, the temperature of the protected zone, which is the heat-affected zone, is controlled at 70℃~90℃. This not only reduces thermal stress and the risk of cracks in the protected zone, but also controls the deformation of the protected zone to ≤0.7mm.

[0030] In some embodiments of this application, the initial thickness of the cladding layer obtained by laser cladding is 0.8 mm to 1.5 mm. Typically, the initial thickness of the cladding layer is greater than the thickness of the cladding layer after processing, in order to retain processing allowance. For example, the initial thickness of the cladding layer is 0.8 mm, 0.9 mm, 1.0 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.4 mm, or 1.5 mm.

[0031] In some embodiments of this application, the thickness of the cladding layer after processing is 0.2 mm to 0.4 mm. As an example, the thickness of the cladding layer after processing is 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, or 0.4 mm.

[0032] In some embodiments of this application, the surface roughness Ra of the cladding layer after processing is ≤1.6μm. As an example, the surface roughness Ra of the cladding layer after processing is 0.2μm, 0.4μm, 0.63μm, 0.8μm, 1.25μm, or 1.6μm.

[0033] In some embodiments of this application, the composition of the cladding material, by mass percentage, includes: Cr 20.0wt%~23.0wt%, Ni≥61.0wt%, Mo 8.0wt%~10.0wt%, Nb 3.15wt%~4.15wt%, and Fe≤5.0wt%. As an example, the cladding material contains 20.0 wt%, 21.0 wt%, 22.0 wt%, or 23.0 wt% of Cr, 61.0 wt%, 62.0 wt%, 63.0 wt%, 64.0 wt%, 65.0 wt%, 66.0 wt%, 67.0 wt%, or 68.0 wt% of Ni, 8.0 wt%, 8.5 wt%, 9.0 wt%, 9.5 wt%, or 10.0 wt% of Mo, 3.15 wt%, 3.35 wt%, 3.55 wt%, 3.75 wt%, 3.95 wt%, or 4.15 wt% of Nb, and 0, 1.0 wt%, 2.0 wt%, 3.0 wt%, 4.0 wt%, or 5.0 wt% of Fe.

[0034] In some embodiments of this application, the composition of the cladding material, by mass percentage, includes: Ni ≥ 57.0 wt%, Mo 15.0 wt% ~ 17.0 wt%, Cr 15.0 wt% ~ 16.0 wt%, Fe ≤ 5.0 wt%, and W 3.0 wt% ~ 4.5 wt%. The cladding material contains Cr at 15.0 wt%, 15.2 wt%, 15.4 wt%, 15.6 wt%, 15.8 wt%, or 16.0 wt%, Ni at 57.0 wt%, 59.0 wt%, 61.0 wt%, 63.0 wt%, 65.0 wt%, or 67.0 wt%, Mo at 15.0 wt%, 15.5 wt%, 16.0 wt%, 16.5 wt%, or 17.0 wt%, W at 3.0 wt%, 3.2 wt%, 3.4 wt%, 3.6 wt%, 3.8 wt%, 4.0 wt%, 4.2 wt%, 4.4 wt%, or 4.5 wt%, and Fe at 0, 1.0 wt%, 2.0 wt%, 3.0 wt%, 4.0 wt%, or 5.0 wt%.

[0035] The aforementioned cladding materials are all nickel-based alloys. Using these nickel-based alloys to prepare the cladding layer can enable the cladding layer to have high temperature resistance and strong corrosion resistance, thereby enabling pump components (such as the rotor or stator of a vacuum pump) to better withstand harsh environments with ultra-high temperature and strong corrosion.

[0036] In some embodiments of this application, the particle size distribution of the cladding material is 53 μm to 150 μm, and the loose packing density of the cladding material is ≥4.0 g / cm³. 3 The flowability of the cladding material is ≤16s / 50g, and the purity of the cladding material is ≥99.9%.

[0037] In some embodiments of this application, the laser cladding process satisfies at least one of the following conditions: the laser source is a semiconductor laser, the laser power is 1500W~2500W, the laser scanning speed is 5mm / s~15mm / s, the powder feeding rate of the cladding material is 5L / min~10L / min, the laser spot diameter is 2mm~5mm, and the flow rate of the protective gas is 10L / min~15L / min.

[0038] As an example, the laser power is 1500W, 1700W, 1900W, 2100W, 2300W or 2500W, the laser scanning speed is 5mm / s, 7mm / s, 9mm / s, 11mm / s, 13mm / s or 15mm / s, the powder feeding rate of the cladding material is 5L / min, 6L / min, 7L / min, 8L / min, 9L / min or 10L / min, the laser spot diameter is 2mm, 2.5mm, 3mm, 3.5mm, 4mm, 4.5mm or 5mm, and the flow rate of the protective gas is 10L / min, 11L / min, 12L / min, 13L / min, 14L / min or 15L / min.

[0039] Optionally, the laser cladding process is carried out under the protection of a protective gas, which can be nitrogen or argon.

[0040] For some embodiments of this application, please refer to Figure 1 and Figure 2 During the laser cladding process, a temperature control device is used to control the temperature of the protected area. The temperature control device includes a cooling radiator 5, a temperature monitoring module 7, a switch module 3, and a control module 2. The temperature monitoring module 7 and the switch module 3 are electrically connected to the control module 2. The cooling radiator 5 is used to support the substrate 6, and a cooling channel 8 for supplying coolant flow is formed inside the cooling radiator 5. The temperature monitoring module 7 is used to detect the temperature of the protected area on the substrate 6, and the switch module 3 is used to control the opening and closing of the cooling channel 8.

[0041] Optionally, the temperature control device also includes a workbench 4, which is used to fix the cooling radiator 5.

[0042] The cooling array 5 can be divided into a stator cooling array and a rotor cooling array. When the pump component is the stator of a vacuum pump, the stator cooling array is used to support and cool the substrate 6; when the pump component is the rotor of a vacuum pump, the rotor cooling array is used to support and cool the substrate 6. Alternatively, a single universal cooling array can be used to support and cool the substrate 6 separately. Cooling channels 8 are formed within the cooling array 5, extending in a meandering pattern. This increases the heat exchange area of ​​the cooling channels 8 and improves the cooling efficiency of the cooling array 5 for the substrate 6. As an example, the cooling channels 8 extend in a serpentine pattern within the cooling array 5. It should be noted that the coolant can be either oil or water.

[0043] The temperature monitoring module 7 can be a thermocouple or an infrared temperature measurement, or a combination of both.

[0044] The switch module 3 includes a solenoid valve, which controls the opening and closing of the cooling channel 8 by opening and closing. In addition, the opening degree of the solenoid valve can adjust the flow rate of coolant in the cooling channel 8. Furthermore, the switch module 3 can not only input coolant into the cooling radiator 5, but also receive high-temperature water output from the cooling radiator 5, cool the high-temperature water, and continue to input it into the cooling radiator 5 for recycling.

[0045] Control module 2 is electrically connected to temperature monitoring module 7 and switch module 3. Thus, Control module 2 receives temperature data from temperature monitoring module 7 and feeds it back to switch module 3. By controlling the opening degree of the solenoid valve in switch module 3, it maintains the temperature at the measuring point (within the protected area) between 70℃ and 90℃. This temperature range ensures that the cladding material fully melts to form a metallurgical bond while reducing thermal stress and controlling the deformation of the protected area to ≤0.7mm. Optionally, control module 2 is a programmable logic controller (PLC) module.

[0046] By relying on a dedicated temperature control device, precise temperature control can be achieved in the protected area of ​​substrate 6.

[0047] For some embodiments of this application, please refer to Figure 1 The temperature control device and the laser cladding equipment 1 constitute a laser cladding system. During the manufacturing process of the pump component, the substrate 6 is placed on the cooling radiator 5, which is used to control the temperature of the substrate 6. The cladding material is placed on the cladding area of ​​the substrate 6, and the laser cladding equipment 1 emits a laser to melt the cladding material and metallurgically bond it to the cladding area of ​​the substrate 6. During the laser cladding process, the temperature monitoring module 7 detects the temperature of the protected area of ​​the substrate 6 and feeds the temperature back to the control module 2. The control module 2 adjusts the operation of the switching module 3 according to the temperature. For example, if the temperature is too low, the control module 3 reduces the flow rate of the coolant in the cooling channel 8 of the cooling radiator 5, reducing heat exchange efficiency and causing the temperature of the protected area of ​​the substrate 6 to rise; if the temperature is too high, the control module 3 increases the flow rate of the coolant in the cooling channel 8 of the cooling radiator 5, increasing heat exchange efficiency and causing the temperature of the protected area of ​​the substrate 6 to drop.

[0048] In summary, by selecting the cladding material, setting the laser parameters, and coordinating the temperature control device, performance requirements can be met while achieving deformation prevention control.

[0049] In some embodiments of this application, the processing includes a cooling process and a finishing process, with the cooling rate ≤5℃ / min. During laser cladding, the laser energy acts on the cladding material and the cladding zone, causing the substrate temperature to rise. To further finish the substrate and cladding layer, the temperature of the substrate and cladding layer needs to be lowered to a relatively low temperature, such as room temperature. By controlling the cooling rate during the cooling process to ≤5℃ / min, cracks caused by rapid cooling can be avoided.

[0050] During the finishing process, a CNC machining center is used to process the substrate and the cladding layer. After processing to the forming size of the pump component (such as the stator or rotor of the vacuum pump), the final thickness of the cladding layer is 0.2mm~0.3mm, and the surface roughness Ra of the final cladding layer is ≤1.6μm.

[0051] In some embodiments of this application, the processing further includes inspecting the cladding layer after cooling, and repairing any defects such as cracks or pores found in the cladding layer to ensure its integrity. As an example, DPT-5 fluorescent penetrant is used for inspection: after pretreatment, penetrant is applied for 10-15 minutes, then excess penetrant is cleaned, followed by spraying with DPT-5D developer and allowing it to stand for 15-20 minutes. Defects such as cracks larger than 0.5 mm and pores larger than 0.3 mm are repaired by remelting.

[0052] In some embodiments of this application, the manufacturing method of the pump component further includes: before placing the cladding material in the cladding area, machining the cladding area to thin it by 0.2 mm to 0.4 mm. By thinning the cladding area, the cladding area becomes concave relative to other parts of the substrate, thereby forming a groove. During laser cladding, the cladding material is placed in the groove and melted within the groove, metallurgically bonding with the substrate to form a cladding layer filling the groove. The thinning of the cladding area also provides machining allowance for subsequent processing of the cladding layer. Machining the cladding area to thin it by 0.2 mm to 0.4 mm results in a groove depth of 0.2 mm to 0.4 mm. As an example, the groove depth is 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, or 0.4 mm.

[0053] In some embodiments of this application, the method for manufacturing the pump component further includes: pre-treating the cladding zone before placing the cladding material in the cladding zone. The pre-treating includes degreasing, derusting, and roughening. After roughening, the surface roughness Ra of the cladding zone is 0.8 μm to 3.2 μm.

[0054] Based on the principle of "like dissolves like," anhydrous ethanol is used to clean the surface of the cladding area to remove oil stains. A rust remover (such as WD40) is then used to scrub the surface of the cladding area to remove rust and activate the surface. Finally, the substrate surface is roughened by sanding or sandblasting.

[0055] Pre-treatment of the cladding zone can improve the bonding effect between the substrate and the cladding layer.

[0056] In some embodiments of this application, the manufacturing method of the pump component further includes: after processing, using a sealant to seal and cure the cladding layer to form a sealing layer on the surface of the cladding layer. Through the synergistic effect of the cladding layer and the sealing layer, the cladding layer remains unflaked and unoxidized at a high temperature of 300°C, and its corrosion resistance remains unchanged, meeting the requirements of ultra-high temperature operation of vacuum pumps. When the cladding layer itself has strong corrosion resistance, and the sealing layer fills the pores of the cladding layer, it can be used in corrosive media environments such as dry etching.

[0057] In some embodiments of this application, the sealant includes at least one of a silicone resin sealant and a polyimide sealant. The silicone resin sealant has a temperature resistance range of -60℃ to 500℃, and the polyimide sealant has a temperature resistance range of -100℃ to 550℃, both possessing resistance to acids, alkalis, and organic solvents.

[0058] In some embodiments of this application, the sealing and curing treatment includes a coating process and a curing process. Specifically, the sealant can be applied to the surface of the cladding layer by brushing or ordinary spraying. Taking spraying as an example, the nozzle diameter is 0.8mm~1.2mm, the spraying pressure is 0.2MPa~0.3MPa, the spraying distance is 150mm~200mm, and multiple coats (e.g., two coats) are applied with an interval of 15min~20min between each coat to ensure a uniform coating without sagging. The curing process may vary depending on the type of sealant. As an example, silicone resin sealants can be cured at room temperature for 24 hours, or cured at 80℃~100℃ for 2~3 hours with a heating rate of 5℃ / min; polyimide sealants can be cured at room temperature for 24 hours, or staged curing can be used, first pre-curing at 80℃ for 1 hour, and then finally curing at 120℃ for 1 hour.

[0059] In some embodiments of this application, the thickness of the sealing layer is 1.5 μm to 2.5 μm. As examples, the thickness of the sealing layer is 1.5 μm, 1.7 μm, 1.9 μm, 2.1 μm, 2.3 μm, or 2.5 μm.

[0060] This application also provides a vacuum pump, including a pump component manufactured by the above-described pump component manufacturing method.

[0061] By cladding the surface of pump components with cladding material, the pump components have a cladding layer with strong bonding force, strong high temperature resistance and strong corrosion resistance. At the same time, the deformation after cladding is small, which can meet the high precision requirements of the rotor and stator in vacuum pumps.

[0062] In some embodiments of this application, the vacuum pump is a dry vacuum pump.

[0063] A dry pump, also known as a dry vacuum pump, is a vacuum-generating device that does not use any liquid (such as oil or water) as a medium within its working chamber. This means that during the pumping process, the gas being pumped will not come into contact with lubricating oil, thus avoiding oil vapor contamination of the vacuum system. This makes dry pumps the preferred choice for high-cleanliness industries such as semiconductors.

[0064] The following description is based on specific embodiments.

[0065] Example 1 This embodiment provides a dry pump stator, the manufacturing process of which includes the following steps: S01. Machining the blank before cladding: For the dry pump stator blank made of ductile iron, a milling machine is used to process the cladding position, and a cladding layer allowance of 0.3mm is reserved on the basis of achieving the forming size.

[0066] S02. Pretreatment before cladding: Wipe the cladding area with alcohol, then wipe away rust with WD40, and then perform sandblasting. Use 80-mesh glass beads, sandblasting pressure 0.6MPa, and the surface roughness Ra after sandblasting is 1.6μm.

[0067] S03. Temperature-Controlled Laser Cladding: A semiconductor laser cladding equipment is used, employing cladding material powder with the composition shown in Table 1. The laser power is 2000W, the scanning speed is 10mm / s, the spot diameter is 2mm, the powder feed rate is 10L / min, and the argon protection flow rate is 10L / min. The dry pump stator blank is mounted on a temperature-controlled fixture using a special clamp. Temperature is controlled by the circulation and flow rate regulation of cooling water. Thermocouples are used to monitor the temperature, maintaining the surface temperature of the dry pump stator blank at 80℃, with an initial cladding layer thickness of 1.2mm.

[0068] S04. Penetrant testing after cladding: Dye penetrant testing is used, with a sensitivity of level 2, and the test is qualified.

[0069] S05. Finishing after cladding: Finishing is performed using a milling machine, and the cladding layer thickness is retained to be 0.3mm.

[0070] S06. Sealing agent curing: Apply polyimide sealing agent by brush and cure at room temperature for 24 hours. The thickness of the sealing layer is 2μm.

[0071] Table 1: Composition of Cladding Materials

[0072] Example 2 This embodiment provides a dry pump stator. The manufacturing process of the dry pump stator is described in Embodiment 1, except that the composition of the cladding material in step S03 is described in Table 2.

[0073] Table 2: Composition of Cladding Materials

[0074] Example 3 This embodiment provides a dry pump stator. The manufacturing process of the dry pump stator is described in Embodiment 1, except that the surface temperature of the dry pump stator blank is controlled to be 70°C in step S03.

[0075] Example 4 This embodiment provides a dry pump stator. The manufacturing process of this dry pump stator is described in Embodiment 1, except that the surface temperature of the dry pump stator blank is controlled to be 90°C in step S03.

[0076] Example 5 This embodiment provides a dry pump stator. The manufacturing process of this dry pump stator can be found in Embodiment 1, except that step S06 is omitted.

[0077] Comparative Example 1 This comparative example provides a dry pump stator. The manufacturing process of this dry pump stator is described in Example 1, except that the surface temperature of the dry pump stator blank is controlled to be 65°C in step S03.

[0078] Comparative Example 2 This comparative example provides a dry pump stator. The manufacturing process of this dry pump stator is described in Example 1, except that the surface temperature of the dry pump stator blank is controlled to be 95°C in step S03.

[0079] The following performance tests were performed on the dry pump stators provided in Examples 1-5, Comparative Examples 1 and 2: 1. Test the bonding strength between the cladding layer and the substrate; 2. Corrosion resistance test; 3. Deformation test.

[0080] The test results are shown in Table 3.

[0081] Table 3

[0082] The test results in Table 3 show that: The difference between Example 1 and Example 2 lies in the different cladding materials. The results showed that the two had slight differences in bonding strength, corrosion resistance and deformation. The bonding strength of Example 1 was lower than that of Example 2, and the deformation of Example 1 was greater than that of Example 2. However, the corrosion resistance of Example 1 was better than that of Example 2.

[0083] The difference between Example 1 and Example 5 is that Example 5 did not perform a sealing and curing treatment on the dry pump stator after laser cladding. As a result, it was found that the corrosion resistance of Example 5 was significantly lower than that of Example 1. This is because using a sealing agent to seal and cure the cladding layer can form a sealing layer on the surface of the cladding layer. The sealing layer fills the pores of the cladding layer and can prevent corrosive media from entering the cladding layer, thereby reducing the corrosion rate of the cladding layer and improving its corrosion resistance.

[0084] Compared with Examples 1, 3-4, and Comparative Examples 1-2, the difference lies in the different surface temperatures of the dry pump stator blanks during laser cladding. The results showed that as the temperature increased, the bonding strength between the cladding layer and the substrate on the dry pump stator first increased and then stabilized, improving the corrosion resistance of the dry pump stator. However, the deformation of the dry pump stator increased with increasing temperature, especially significantly above 90°C. It can be seen that below 70°C, the bonding strength between the cladding layer and the substrate on the dry pump stator is low and the corrosion resistance is poor; above 90°C, the bonding strength between the cladding layer and the substrate is high and the corrosion resistance is good, but the deformation of the dry pump stator is large.

[0085] The manufacturing method of a pump component and a vacuum pump provided in the embodiments of this application have been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A method for manufacturing a pump component, characterized in that, include: A substrate and a cladding material are provided for manufacturing pump components, the pump components including at least one of a stator and a rotor of a vacuum pump, the substrate having a cladding zone and a protection zone; The cladding material is placed in the cladding zone, and the cladding material is melted and fused with the substrate by laser cladding to form a cladding layer. During the laser cladding process, the temperature of the protected zone is controlled to be 70℃~90℃. The substrate and the cladding layer are processed to obtain the pump component.

2. The method for manufacturing a pump component according to claim 1, characterized in that, The initial thickness of the cladding layer obtained after the laser cladding process is 0.8 mm to 1.5 mm; and / or, After the aforementioned processing, the thickness of the cladding layer is 0.2 mm to 0.4 mm; and / or, After the aforementioned processing, the surface roughness Ra of the cladding layer is ≤1.6μm.

3. The method for manufacturing a pump component according to claim 1, characterized in that, The particle size distribution of the cladding material is 53μm~150μm; and / or, The loose density of the cladding material is ≥4.0 g / cm³. 3 ; and / or, The flowability of the cladding material is ≤16s / 50g; and / or, The purity of the cladding material is ≥99.9%.

4. The method for manufacturing a pump component according to claim 1, characterized in that, The cladding material, by weight percentage, comprises: Cr 20.0wt%~23.0wt%, Ni≥61.0wt%, Mo 8.0wt%~10.0wt%, Nb 3.15wt%~4.15wt%, Fe≤5.0wt%; or, The composition of the cladding material, by mass percentage, includes: Ni ≥ 57.0 wt%, Mo 15.0 wt%~17.0 wt%, Cr 15.0 wt%~16.0 wt%, Fe ≤ 5.0 wt%, and W 3.0 wt%~4.5 wt%.

5. The method for manufacturing a pump component according to claim 1, characterized in that, During the laser cladding process, the temperature of the protected area is controlled by using a temperature control device. The temperature control device includes: a cooling radiator, a temperature monitoring module, a switch module, and a control module. The temperature monitoring module and the switch module are electrically connected to the control module. The cooling radiator is used to support the substrate, and a cooling channel for supplying coolant flow is formed within the cooling radiator. The temperature monitoring module is used to detect the temperature of the protected area, and the switch module is used to control the opening and closing of the cooling channel.

6. The method for manufacturing a pump component according to claim 1, characterized in that, The processing includes cooling treatment and finishing treatment, wherein the cooling rate of the cooling treatment is ≤5℃ / min.

7. The method for manufacturing a pump component according to any one of claims 1 to 6, characterized in that, The method for manufacturing the pump component further includes: Before placing the cladding material in the cladding zone, the cladding zone is machined to reduce its thickness by 0.2 mm to 0.4 mm; and / or, The method for manufacturing the pump component further includes: Before placing the cladding material in the cladding zone, the cladding zone is pretreated. The pretreatment includes degreasing, derusting, and roughening. After the roughening treatment, the surface roughness Ra of the cladding zone is 0.8 μm to 3.2 μm.

8. The method for manufacturing a pump component according to any one of claims 1 to 6, characterized in that, The method for manufacturing the pump component further includes: After the processing, a sealing agent is used to seal and cure the cladding layer to form a sealing layer on the surface of the cladding layer.

9. The method for manufacturing a pump component according to claim 8, characterized in that, The sealing agent includes at least one of silicone resin sealing agents and polyimide sealing agents; and / or, The sealing and curing treatment includes a coating process and a curing process; and / or, The thickness of the sealing layer is 1.5μm to 2.5μm.

10. A vacuum pump, characterized in that, This includes pump components manufactured by the method of manufacturing pump components as described in any one of claims 1 to 9.

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