Liquid verification tool and method after processing of spray header of semiconductor CVD (Chemical Vapor Deposition) equipment

Abstract

The invention discloses a tool and method for verifying liquid after processing of a spraying head of semiconductor CVD equipment, and relates to the technical field of semiconductor manufacturing, and the tool comprises a liquid conveying assembly, a liquid filtering assembly and a detection tool; the liquid conveying assembly comprises a booster pump, a stop valve, a pressure reducing valve, a pressure gauge and a flow meter which are sequentially connected through a pipeline; the liquid filtering assembly comprises a filter arranged at the output end of the flow meter; the detection tool comprises an upper cover tool, a sealing gasket, a spraying disc and a fixing piece, the spraying head is fixed between the upper cover tool and the spraying disc through the fixing piece, the sealing gasket is arranged between the spraying disc and the spraying head, the upper cover tool is connected with the filter through a pipeline, uniform flow holes are distributed in the spraying disc, and a liquid flow uniformity detection unit is arranged below the spraying disc. The whole process integration from liquid supply, filtering to detection is realized, the liquid flow uniformity after the spray header is processed can be effectively verified, and a key guarantee is provided for the quality of a semiconductor CVD (Chemical Vapor Deposition) process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology. Background Technology

[0002] In the semiconductor manufacturing field, chemical vapor deposition (CVD) equipment is a crucial core component. The spray head, as a key part of the CVD equipment, directly affects the uniformity and quality of the deposited thin film, as well as the final performance of the semiconductor device. With the rapid development of the semiconductor industry, the performance requirements for CVD spray heads are increasingly stringent.

[0003] Currently, CVD spray heads are generally disc-shaped, divided into upper and lower layers, and have a porous structure. After the CVD spray head is machined, the inspection method is to detect the aperture through optical equipment. Since the quality of the small holes determines the quality of the gas at the spray head outlet, dimensional inspection cannot represent the overall performance of the spray head. It often lacks systematicness and specificity, and cannot comprehensively and accurately detect and evaluate key performance indicators such as gas flow distribution of the spray head under actual working conditions, such as the surface quality, form and position tolerances, and burrs of the small holes inside the spray disc. It cannot guarantee that the machined spray head can meet the stringent requirements of semiconductor CVD processes, which may affect the quality of the entire CVD equipment and the yield of semiconductor manufacturing. Summary of the Invention

[0004] To address the aforementioned technical problems, this invention provides a fixture for verifying the liquid processed by the spray head of a semiconductor CVD equipment.

[0005] To achieve the above objectives, the present invention specifically adopts the following technical solution: A liquid verification fixture after processing by the spray head of a semiconductor CVD equipment includes a liquid delivery assembly, a liquid filtration assembly, and a detection fixture; The liquid delivery assembly includes a booster pump, a shut-off valve, a pressure reducing valve, a pressure gauge, and a flow meter connected in sequence via pipelines. The liquid filtration assembly includes a filter located at the output end of the flow meter; The testing fixture includes an upper cover fixture, a sealing gasket, a spray plate, and a fixing component. The spray head is fixed between the upper cover fixture and the spray plate by the fixing component. The sealing gasket is disposed between the spray plate and the spray head. The upper cover fixture is connected to the filter by a pipe. The spray plate has uniformly distributed flow holes. A liquid flow uniformity detection unit is provided below the spray plate. The above scheme constructs a complete liquid verification fixture system: the liquid delivery component provides stable pressure through a booster pump, and fluid parameters are precisely regulated by shut-off and pressure reducing valves; pressure gauges and flow meters monitor the system status in real time; the filtration component ensures the cleanliness of the liquid entering the testing fixture; the testing fixture forms a sealed testing environment through the top cover fixture, sealing gasket, and fixing components, allowing the liquid to flow uniformly out of the micropores below the spray head after passing through it, and finally, the distribution performance is evaluated by the liquid flow uniformity detection unit. This scheme achieves end-to-end integration from liquid supply and filtration to detection, effectively verifying the uniformity of liquid flow after spray head processing, and providing key assurance for the quality of semiconductor CVD processes.

[0006] Furthermore, the filter adopts a multi-stage filtration structure, including a coarse filter layer, a fine filter layer, and an ultrafiltration layer. The coarse filter layer filters out particles with a diameter greater than 5 μm, the fine filter layer retains impurities with a diameter between 1 and 5 μm, and the ultrafiltration layer retains impurities with a diameter less than 1 μm. The above-described scheme employs a multi-stage filtration structure consisting of a coarse filter layer, a fine filter layer, and an ultrafiltration layer to sequentially remove particulate impurities larger than 5μm, 1-5μm, and smaller than 1μm. This staged filtration design progressively improves liquid cleanliness, avoiding the problems of clogging or low efficiency associated with single-stage filtration. It protects the delicate micropores of downstream spray heads and ensures that test results are not affected by particulate contamination, significantly improving the reliability of validation data and process consistency.

[0007] Furthermore, the flow uniformity detection unit includes a flow uniformity test bench, which includes a frame and a guide platform, a collection platform, and a collection measuring cylinder fixed on the frame. The guide platform is rotatably connected to the collection platform, and a flow positioning and dividing component is provided between the guide platform and the collection platform. Several collection measuring cylinders are provided and distributed at the lower end of the collection platform and are adapted to the flow positioning and dividing component. The above scheme achieves flow guidance switching between the guide platform and the collection platform through a rotating connection, while the collection cylinder, in conjunction with the flow positioning and dividing component, enables zoned sampling. During operation, the guide platform directs the liquid flowing from the spray head into zones, and the collection platform rotates to align the connecting pipe with a specific drain pipe, achieving precise collection and measurement of liquid in designated areas. This structure enables multi-point synchronous sampling and dynamic area selection, improving detection efficiency and spatial resolution, and providing a quantitative basis for evaluating the uniformity of the spray head's liquid flow distribution.

[0008] Furthermore, the flow positioning and division component includes several flow zones distributed on the flow guide platform, each flow zone is provided with a drain pipe below it, the collection platform is rotatably connected to the frame, the collection platform is provided with several connecting pipes, the collection measuring cylinder is located below the collection platform and corresponds one-to-one with the connecting pipes, the collection platform is provided with an opening in the middle, and a drain trough is provided below the opening. The above scheme uses a flow guide platform with drainage pipes in different zones. The collection platform switches the connection between the connecting pipe and the collection cylinder by rotation. The central opening and drainage trough are used to remove non-sampling liquid. This design allows operators to selectively collect samples from specific areas, avoiding cross-contamination. At the same time, non-sampling liquid can be quickly discharged, ensuring test continuity and data accuracy. It is especially suitable for the zoned verification needs of large-size spray heads.

[0009] Furthermore, the guide platform is provided with a rotating bracket and a bearing, and the collection platform is rotatably connected to the rotating bracket through the bearing. The above-described scheme achieves smooth rotation of the collection platform through a rotating bracket and bearings. This structure ensures the stability and repeatability of the collection platform when switching sampling positions, reducing sampling errors caused by mechanical vibration or offset.

[0010] Furthermore, the flow meter employs a communication module that enables real-time data transmission. The above solution enables flow data to be uploaded to the monitoring system or PLC in real time, achieving remote monitoring, data recording, and dynamic adjustment, thus reducing human reading errors.

[0011] A verification method using the above-mentioned tooling includes the following steps: Step S1: Assemble the testing device, connect the upper cover fixture to the filter, set the inlet pressure as needed, perform preliminary adjustment of the inlet and outlet flow rates, and test the compatibility of each instrument and valve; Step S2: Match the corresponding sealing gasket according to the area to be tested, fix the spray head to be tested on the testing fixture through the clamping assembly, and calibrate the lower guide platform and the sampling area to be tested below the spray head; Step S3: Turn on the liquid supply system and the booster pump. After filtering, the liquid is introduced into the upper cover fixture. The liquid from the spray head falls into the collection tray along the corresponding flow zone and the drain pipe, and then falls into the drain trough through the opening. When the liquid appears as a jet at each small hole at the spray head outlet, rotate the collection tray to open it. The liquid enters the corresponding flow zone from the guide platform and flows along the lower drain pipe. At this time, the connecting pipe on the collection tray is aligned with the drain pipe. The flow rate of the corresponding area of ​​the spray head is collected and falls into the collection cylinder below the collection tray. Then, the volume of the collection cylinder is recorded at a specific time. Step S4: After collection is complete, rotate the collection tray. At this time, the connecting pipe and the drain pipe on the collection tray will be misaligned. The liquid from the spray head will fall into the collection tray along the corresponding flow zone and drain pipe, and then fall into the drain tank through the opening and be discharged away. This liquid is not included in the statistics. Step S5: Repeat steps S3 and S4 to collect data from the measuring cylinder multiple times, and perform quality inspection of the spray head. Calculate the average and variance of the liquid quality data collected from several spray head zones, and compare them with the preset standard values ​​to determine whether the spray head is qualified. The above-described scheme systematically evaluates the uniformity of spray head liquid flow through assembly and debugging, sealing and fitting, liquid flow guidance, zone sampling, and repeated testing. This method closely integrates tooling hardware with operational procedures, ensuring the standardization and repeatability of testing. Multiple sampling in multiple areas improves statistical significance, and finally, data comparison determines the quality of the spray head, providing a basis for production process decisions.

[0012] Furthermore, in step S2, the sampling area to be tested below the lower guide platform and the spray head is calibrated. Specifically, the multi-hole area of ​​the spray head is divided to align the upper flow area of ​​the guide platform with the corresponding area on the spray head.

[0013] The above method aligns the porous area of ​​the spray head with the flow area of ​​the guide platform. This partitioning ensures that each sampling area corresponds to a specific group of holes in the spray head, avoiding sampling deviations caused by area misalignment, improving spatial resolution and the representativeness of the detection results, and is especially suitable for spray heads with complex hole distributions.

[0014] Furthermore, in step S5, before data processing, the collected data is filtered. The median filtering algorithm is used to remove random noise from the data to ensure the authenticity and validity of the data. At the same time, the pre-set standard value is obtained by conducting multiple repeated tests on the standard spray head under the same test conditions, and statistical analysis and fitting optimization of the test data are performed. In addition, a reasonable fluctuation range is set in combination with the actual requirements of the semiconductor CVD process for the liquid flow performance.

[0015] The above approach employs median filtering to remove random noise before data processing, and optimizes the set standard values ​​through standard sprinkler head experiments. This method improves the data signal-to-noise ratio and reliability. The standard values ​​are set based on actual process requirements and statistical models, making the qualification judgment more scientific and engineering-applicable, and reducing the risk of misjudgment.

[0016] Furthermore, in step S5, if the average value is within ±5% of the set standard average value and the variance is less than the set maximum variance value, then the spray head is deemed qualified; if the above conditions are not met, then the spray head is deemed unqualified.

[0017] The above method ensures that the average deviation is within ±5% and the variance is less than the threshold. This quantitative standard combines central tendency and dispersion assessment, which can capture both overall flow deviation and identify distribution inhomogeneity, ensuring that the spray head has good uniformity while meeting the average flow requirements, thus meeting the stringent requirements of semiconductor CVD processes for coating consistency.

[0018] The beneficial effects of this invention are as follows: 1. This invention features a simple structure. The liquid delivery component provides stable pressure via a booster pump, and fluid parameters are precisely regulated by a shut-off valve and a pressure reducing valve. A pressure gauge and flow meter monitor the system status in real time. The filtration component ensures the cleanliness of the liquid entering the testing fixture. The testing fixture forms a sealed testing environment through a top cover fixture, a sealing gasket, and fasteners, allowing the liquid to flow uniformly out of the micropores below the spray head after passing through it. Finally, the distribution performance is evaluated by a liquid flow uniformity detection unit. This solution achieves full-process integration from liquid supply and filtration to testing, effectively verifying the uniformity of liquid flow after spray head processing, and providing crucial assurance for the quality of semiconductor CVD processes. 2. The flow guide platform and the collection platform are connected by a rotation to switch the liquid flow direction. The collection cylinder, in conjunction with the flow positioning and dividing component, enables zoned sampling. During operation, the flow guide platform directs the liquid flowing from the spray head into zones, and the collection platform rotates to align the connecting pipe with a specific drain pipe, achieving precise collection and measurement of liquid in designated areas. This structure enables multi-point synchronous sampling and dynamic area selection, improving detection efficiency and spatial resolution, and providing a quantitative basis for evaluating the uniformity of liquid flow distribution from the spray head. 3. Through assembly and debugging, sealing and fitting, fluid flow guidance, zone sampling, and repeated testing, the uniformity of the spray head's fluid flow is systematically evaluated. This method closely integrates tooling hardware with the operating process, ensuring the standardization and repeatability of the test. Multiple sampling in multiple areas improves statistical significance, and finally, data comparison determines the quality of the spray head, providing a basis for production process decisions. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the system structure of the present invention; Figure 2 This is a cross-sectional view of the testing tooling used in this application; Figure 3 This is a partial structural diagram of the fluid flow uniformity test bench in this application; Figure 4 This is a partial cross-sectional structural diagram of the fluid flow uniformity test bench of this application; Figure 5 This is a partial exploded structural diagram of the fluid flow uniformity test rig of this application. Reference numerals: 10. Testing fixture; 11. Booster pump; 12. Shut-off valve; 13. Pressure reducing valve; 14. Pressure gauge; 15. Flow meter; 16. Filter; 17. Top cover fixture; 18. Sealing gasket; 19. Spray tray; 20. Flow orifice; 21. Liquid flow uniformity test bench; 22. Frame; 23. Guide platform; 24. Collection platform; 25. Collection measuring cylinder; 26. Flow zone; 27. Drain pipe; 28. Connecting pipe; 29. ​​Drain trough; 30. Rotating bracket; 31. Bearing. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0022] Example 1 like Figures 1 to 5 As shown, this embodiment provides a liquid verification fixture after processing by the spray head of a semiconductor CVD equipment, including a liquid delivery assembly, a liquid filtration assembly, and a detection fixture 10; The liquid delivery assembly includes a booster pump 11, a shut-off valve 12, a pressure reducing valve 13, a pressure gauge 14, and a flow meter 15 connected in sequence via pipelines. The pressure gauge 14 has two parts, which are respectively located on both sides of the pressure reducing valve 13. The liquid filtration assembly includes a filter 16 located at the output end of the flow meter 15; The testing fixture 10 includes an upper cover fixture 17, a sealing gasket 18, a spray plate 19, and a fixing component. The spray head is fixed between the upper cover fixture 17 and the spray plate 19 by the fixing component. An interface is provided on the upper cover fixture 17. In this embodiment, the fixing component is fixed by bolts and nuts. The sealing gasket 18 is placed between the spray plate 19 and the spray head. The upper cover fixture 17 is connected to the filter 16 by a pipe. The spray plate 19 has uniformly distributed flow holes 20. A liquid flow uniformity testing unit is provided below the spray plate 19. The flow uniformity testing unit includes a flow uniformity test bench 21. The flow uniformity test bench 21 includes a frame 22 and a guide platform 23, a collection platform 24, and a collection measuring cylinder 25 fixed on the frame 22. The guide platform 23 and the collection platform 24 are rotatably connected. A flow positioning and dividing component is provided between the guide platform 23 and the collection platform 24. Several collection measuring cylinders 25 are provided and distributed at the lower end of the collection platform 24 and are adapted to the flow positioning and dividing component. In this embodiment, 72 collection measuring cylinders 25 are provided.

[0023] Therefore, this device constructs a complete liquid verification fixture system: the liquid delivery component provides stable pressure through the booster pump 11, and the fluid parameters are precisely regulated by the shut-off valve 12 and the pressure reducing valve 13; the pressure gauge 14 and the flow meter 15 monitor the system status in real time; the filtration component ensures the cleanliness of the liquid entering the testing fixture 10; the testing fixture 10 forms a sealed testing environment through the upper cover fixture 17, the sealing gasket 18, and the fixing components, allowing the liquid to flow uniformly out of the micropores below the spray head after passing through it, and finally the distribution performance is evaluated by the liquid flow uniformity detection unit. The flow guide platform 23 and the collection platform 24 are connected by rotation to realize the liquid flow guidance switching, and the collection measuring cylinder 25 works with the flow positioning and dividing component to realize zone sampling. During operation, the flow guide platform 23 guides the liquid flowing out of the spray head to the zone, and the collection platform 24 rotates to align the connecting pipe 28 with the specific drain pipe 27, realizing the accurate collection and measurement of liquid in the designated area. This structure realizes multi-point synchronous sampling and dynamic area selection, improves detection efficiency and spatial resolution, and provides a quantitative basis for evaluating the uniformity of liquid distribution in the spray head. This solution integrates the entire process from liquid supply and filtration to detection, effectively verifying the uniformity of liquid flow after spray head processing, and providing key assurance for the quality of semiconductor CVD processes.

[0024] Reference Figure 2 and Figure 5The flow positioning and partitioning component includes several flow zones 26 distributed on the flow guide platform 23. Each flow zone 26 has a drain pipe 27 below it. The collection platform 24 is rotatably connected to the frame 22. Several connecting pipes 28 are provided on the collection platform 24. A collecting cylinder 25 is located below the collection platform 24 and corresponds one-to-one with the connecting pipes 28. The number of connecting pipes 28, flow zones 26, and drain pipes 27 is the same as that of the collecting cylinder 25, which is 72 in total. An opening is provided in the middle of the collection platform 24, and a drain trough 29 is provided below the opening. A rotating bracket 30 and a bearing 31 are provided on the flow guide platform 23. The collection platform 24 is rotatably connected to the rotating bracket 30 through the bearing 31. Therefore, the flow guide platform 23 is partitioned with drain pipes 27. The collection platform 24 switches the connection state between the connecting pipes 28 and the collecting cylinder 25 by rotation. The middle opening and the drain trough 29 are used to discharge non-sampling liquid. The smooth rotation of the collection platform 24 is achieved by the rotating bracket 30 and the bearing 31. This structure ensures the stability and repeatability of the collection station 24 when switching sampling positions, reducing sampling errors caused by mechanical vibration or offset. This design allows operators to selectively collect samples from specific areas, avoiding cross-contamination, while non-sampling liquids can be quickly discharged, ensuring test continuity and data accuracy, and is particularly suitable for the zonal validation needs of large-size spray heads.

[0025] Reference Figure 1 The flow meter 15 employs a communication module with real-time data transmission capabilities. This design allows flow data to be uploaded to a monitoring system or PLC in real time, enabling remote monitoring, data recording, and dynamic adjustment, thus reducing human error in readings. The filter 16 utilizes a multi-stage filtration structure, including a coarse filter layer, a fine filter layer, and an ultrafiltration layer. The coarse filter layer removes particles larger than 5 μm, the fine filter layer retains impurities with a particle size between 1 and 5 μm, and the ultrafiltration layer retains impurities with a particle size smaller than 1 μm. This multi-stage filtration structure sequentially removes particles larger than 5 μm, particles between 1 and 5 μm, and particles smaller than 1 μm. This graded filtration design progressively improves liquid cleanliness, avoiding the clogging or low efficiency issues of single-stage filtration. It protects the delicate micropores of downstream spray heads and ensures that test results are not interfered with by particulate contamination, significantly improving the reliability of validation data and process consistency.

[0026] Reference Figures 1 to 5 A verification method using the above-mentioned tooling includes the following steps: Step S1: Assemble the testing device, connect the top cover fixture 17 and the filter 16, set the inlet pressure as needed, perform preliminary adjustment of the inlet and outlet flow rates, and test the compatibility of each instrument and valve; Step S2: Match the corresponding sealing gasket 18 according to the area to be tested, fix the spray head to be tested on the testing fixture 10 through the clamping assembly, and calibrate the lower guide platform 23 and the sampling area to be tested below the spray head; Step S3: Turn on the liquid supply system and turn on the booster pump 11. After filtering, the liquid is introduced into the upper cover fixture 17. The liquid from the spray head falls into the collection tray along the corresponding flow zone 26 and the drain pipe 27, and then falls into the drain trough 29 through the opening. When the liquid in each small hole at the outlet of the spray head appears as a jet, rotate the collection tray to open it. The liquid enters the corresponding flow zone 26 from the guide platform 23 and flows along the lower drain pipe 27. At this time, the connecting pipe 28 on the collection tray is aligned with the drain pipe 27. The flow rate of the corresponding area of ​​the spray head is collected and falls into the collection cylinder 25 below the collection tray. Then, the volume of the collection cylinder 25 is recorded at a specific time. Step S4: After collection is complete, rotate the collection tray. At this time, the connecting pipe 28 and the drain pipe 27 on the collection tray are misaligned. The liquid from the spray head falls into the collection tray along the corresponding flow area 26 and the drain pipe 27, and then falls into the drain tank 29 through the opening and is discharged away, not included in the statistics. Step S5: Repeat steps S3 and S4 to collect data from the measuring cylinder 25 multiple times. Perform quality inspection on the spray head. Calculate the average and variance of the liquid quality data collected from several spray head zones and compare them with the preset standard values ​​to determine whether the spray head is qualified.

[0027] By systematically evaluating the uniformity of spray head liquid flow through assembly and debugging, sealing and fitting, liquid flow guidance, zone sampling, and repeated testing, this method closely integrates tooling hardware with operational procedures, ensuring the standardization and repeatability of testing. Multiple sampling in multiple areas improves statistical significance, and finally, data comparison determines the quality of the spray head, providing a basis for production process decisions.

[0028] In step S2, the lower guide platform 23 is aligned with the sampling area to be tested below the spray head. Specifically, the porous area of ​​the spray head is divided to align the upper flow area 26 of the guide platform 23 with the corresponding area on the spray head. This partitioning and matching ensures that each sampling area corresponds to a specific group of holes in the spray head, avoiding sampling deviations caused by area misalignment, improving spatial resolution and the representativeness of the detection results, and is particularly suitable for spray heads with complex hole distributions.

[0029] In step S5, before data processing, the collected data is filtered using a median filtering algorithm to remove random noise and ensure the data's authenticity and validity. Simultaneously, the pre-set standard values ​​are derived by conducting multiple repeated tests on a standard spray head under the same test conditions, statistically analyzing and optimizing the test data. A reasonable fluctuation range is set based on the actual requirements of the semiconductor CVD process for fluid flow performance. In step S5, if the average value is within ±5% of the set standard average value and the variance is less than the set maximum variance value, the spray head is deemed qualified; otherwise, it is deemed unqualified. Median filtering removes random noise before data processing, and the standard values ​​are optimized through standard spray head experiments. This method improves the data signal-to-noise ratio and reliability. The standard values ​​are set based on actual process requirements and statistical models, making the qualification judgment more scientific and engineering-applicable, reducing the risk of misjudgment, and ensuring the average deviation is within ±5% and the variance is less than the threshold. This quantitative standard combines central tendency and dispersion assessment, which can capture both overall flow deviation and identify distribution inhomogeneity, ensuring that the spray head has good uniformity while meeting the average flow requirements, thus meeting the stringent requirements of semiconductor CVD processes for coating consistency.

[0030] Implementation Principle: This invention features a simple structure. The liquid delivery component provides stable pressure via a booster pump 11, and fluid parameters are precisely regulated by a shut-off valve 12 and a pressure reducing valve 13. A pressure gauge 14 and a flow meter 15 monitor the system status in real time. The filtration component ensures the cleanliness of the liquid entering the testing fixture 10. The testing fixture 10 forms a sealed testing environment through a top cover fixture 17, a sealing gasket 18, and fasteners, allowing the liquid to flow uniformly out of the micropores below the spray head after passing through it. Finally, the distribution performance is evaluated by a liquid flow uniformity detection unit. The flow guide platform 23 and the collection platform 24 are connected by rotation to achieve liquid flow guidance switching. The collection measuring cylinder 25, in conjunction with the flow positioning and dividing component, enables zoned sampling. During operation, the flow guide platform 23 guides the liquid flowing out of the spray head into zones, and the collection platform 24 rotates to align the connecting pipe 28 with a specific drain pipe 27, achieving precise collection and measurement of liquid in designated areas. This solution achieves full-process integration from liquid supply and filtration to detection, effectively verifying the uniformity of liquid flow after spray head processing, and providing key assurance for the quality of semiconductor CVD processes.

[0031] It should be noted that the connection relationships of components not specifically mentioned in this application are all assumed to be based on existing technology. Since they do not involve the inventive point and are commonly used in existing technology, the structural connection relationships are not described in detail.

Claims

1. A fixture for verifying liquid processed by a spray head in a semiconductor CVD equipment, characterized in that, Includes liquid delivery components, liquid filtration components and testing fixtures (10); The liquid delivery assembly includes a booster pump (11), a shut-off valve (12), a pressure reducing valve (13), a pressure gauge (14), and a flow meter (15) connected in sequence via pipelines; The liquid filtration assembly includes a filter (16) located at the output end of the flow meter (15); The testing fixture (10) includes an upper cover fixture (17), a sealing gasket (18), a spray plate (19), and a fixing member. The spray head is fixed between the upper cover fixture (17) and the spray plate (19) by the fixing member. The sealing gasket (18) is disposed between the spray plate (19) and the spray head. The upper cover fixture (17) is connected to the filter (16) by a pipe. The spray plate (19) has uniformly distributed flow holes (20). A liquid flow uniformity detection unit is disposed below the spray plate (19).

2. The liquid verification fixture after processing by the spray head of a semiconductor CVD equipment according to claim 1, characterized in that, The filter (16) adopts a multi-stage filtration structure, including a coarse filter layer, a fine filter layer and an ultrafiltration layer. The coarse filter layer filters out particles with a diameter greater than 5 μm, the fine filter layer retains impurities with a diameter between 1 and 5 μm, and the ultrafiltration layer retains impurities with a diameter less than 1 μm.

3. The liquid verification fixture after processing by the spray head of a semiconductor CVD equipment according to claim 1, characterized in that, The flow uniformity detection unit includes a flow uniformity test bench (21). The flow uniformity test bench (21) includes a frame (22) and a guide platform (23), a collection platform (24), and a collection measuring cylinder (25) fixed on the frame (22). The guide platform (23) is rotatably connected to the collection platform (24). A flow positioning and dividing component is provided between the guide platform (23) and the collection platform (24). Several collection measuring cylinders (25) are provided and distributed at the lower end of the collection platform (24) and are adapted to the flow positioning and dividing component.

4. The liquid verification fixture after processing by the spray head of a semiconductor CVD equipment according to claim 1, characterized in that, The flow positioning and division component includes several flow zones (26) distributed on the flow guide platform (23), each flow zone (26) is provided with a drain pipe (27) below it, the collection platform (24) is rotatably connected to the frame (22), the collection platform (24) is provided with several connecting pipes (28), the collection measuring cylinder (25) is located below the collection platform (24) and corresponds one-to-one with the connecting pipes (28), the collection platform (24) is provided with an opening in the middle, and a drain trough (29) is provided below the opening.

5. The liquid verification fixture after spray head processing in a semiconductor CVD equipment according to claim 4, characterized in that, The guide platform (23) is provided with a rotating bracket (30) and a bearing (31), and the collection platform (24) is rotatably connected to the rotating bracket (30) through the bearing (31).

6. The liquid verification fixture after processing by the spray head of a semiconductor CVD equipment according to claim 1, characterized in that, The flow meter (15) uses a communication module that has real-time data transmission capabilities.

7. A verification method using the tooling described in any one of claims 1 to 6, characterized in that, Includes the following steps: Step S1: Assemble the testing device, connect the upper cover fixture (17) and the filter (16), set the inlet pressure as needed, preliminarily adjust the inlet and outlet flow rates, and test the compatibility of each instrument and valve; Step S2: Match the corresponding sealing gasket (18) according to the area to be tested, fix the spray head to be tested on the testing fixture (10) through the clamping assembly, and calibrate the lower guide platform (23) and the sampling area to be tested below the spray head; Step S3: Turn on the liquid supply system and turn on the booster pump (11). After filtering, the liquid is introduced into the upper cover fixture (17). The liquid from the spray head falls into the collection tray along the corresponding flow area (26) and the drain pipe (27), and then falls into the drain trough (29) through the opening. When the liquid appears as a jet at each small hole at the outlet of the spray head, rotate the collection tray to open it. The liquid enters the corresponding flow area (26) from the guide platform (23) and flows along the lower drain pipe (27). At this time, the connecting pipe (28) on the collection tray is aligned with the drain pipe (27). The flow rate of the corresponding area of ​​the spray head is collected and falls into the collection cylinder (25) below the collection tray. Then, the capacity of the collection cylinder (25) is recorded at a specific time. Step S4: After collection is complete, rotate the collection tray. At this time, the connecting pipe (28) and the drain pipe (27) on the collection tray are misaligned. The liquid from the spray head falls into the collection tray along the corresponding flow zone (26) and drain pipe (27), and then falls into the drain trough (29) through the opening and is discharged away. It is not included in the statistics. Step S5: Repeat steps S3 and S4 to collect data from the measuring cylinder (25) multiple times, and perform quality inspection of the spray head. Calculate the average value and variance of the liquid quality data of several spray head zones collected, and compare them with the preset standard values ​​to determine whether the spray head is qualified.

8. A method for verifying liquid processed by a spray head in a semiconductor CVD equipment according to claim 7, characterized in that, In step S2, the lower guide platform (23) and the sampling area to be tested below the spray head are calibrated. Specifically, the multi-hole area of ​​the spray head is divided to make the upper flow area (26) of the guide platform (23) aligned with the corresponding area on the spray head.

9. A method for verifying the liquid processed by the spray head of a semiconductor CVD equipment according to claim 7, characterized in that, In step S5, before data processing, the collected data is filtered. The median filtering algorithm is used to remove random noise from the data to ensure the authenticity and validity of the data. At the same time, the pre-set standard value is obtained by conducting multiple repeated tests on the standard spray head under the same test conditions, and statistical analysis and fitting optimization of the test data are performed. In addition, a reasonable fluctuation range is set in combination with the actual requirements of the semiconductor CVD process for the liquid flow performance.

10. A method for verifying the liquid processed by the spray head of a semiconductor CVD equipment according to claim 9, characterized in that, In step S5, if the average value is within ±5% of the set standard average value and the variance is less than the set maximum variance value, the sprinkler head is deemed qualified; if the above conditions are not met, the sprinkler head is deemed unqualified.

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