Object stage for probe station

Abstract

The invention is suitable for semiconductor detection equipment, and provides an objective table for a probe station, which comprises an objective table body, a driving unit, a precision guarantee unit and a central control module, the driving unit is in transmission connection with the objective table body and is used for driving the objective table body to realize multi-degree-of-freedom movement; the precision guarantee unit is sequentially arranged along a motion transmission path and comprises a flexible self-adaptive transmission module, a real-time error detection and compensation module and a multi-dimensional cooperative calibration module; according to the flexible self-adaptive transmission module, the first module is a flexible self-adaptive transmission module, and a transmission pair gap is eliminated through an elastic pre-tightening mechanism; the second module is a real-time error detection and compensation module which constructs a dynamic compensation model based on a laser interference measurement signal; thirdly, a multi-dimensional cooperative calibration module is used for realizing depth correction of a space attitude and a motion track; through the progressive compensation design, the positioning error of the objective table is reduced from the micron level to the nano level, and the accuracy and stability of semiconductor device detection are effectively improved.

Description

Technical Field

[0001] This invention pertains to semiconductor testing equipment, and more particularly to a stage for a probe station. Background Technology

[0002] The probe station is a core piece of equipment in the semiconductor device testing process. The positioning accuracy of the stage used in the probe station directly determines the accuracy of the contact between the probe and the device pins, thus affecting the reliability of the test results. As semiconductor technology advances towards the micro- and nano-scale, the requirements for the positioning accuracy of the stage used in the probe station are increasingly stringent. The positioning accuracy of current mainstream probe station stages is insufficient to meet the testing needs of advanced process devices. Existing technologies face the following problems that urgently need to be addressed:

[0003] Basic positioning deviation caused by transmission backlash: Existing probe stages mostly use mechanical transmission structures such as lead screws and guide rails, and backlash is unavoidable between transmission pairs. During the start-up, stop-up, and reversal of the stage, backlash will cause motion lag and positioning deviation, resulting in the probe being unable to accurately align with the device pins, affecting detection efficiency and accuracy. The fixed pre-tightening method used in the existing technology cannot adaptively adjust according to the dynamic changes in the backlash. Excessive pre-tightening force will easily lead to increased transmission resistance and accelerated wear of components, while insufficient pre-tightening force will not effectively eliminate the backlash.

[0004] Accuracy degradation caused by dynamic errors and environmental interference: During the movement of the probe stage, dynamic displacement errors and attitude deviations will occur due to factors such as vibration of the drive motor, load changes, and temperature fluctuations. Existing error compensation technologies are mostly static compensation, that is, fixed value compensation based on a preset error model, which cannot respond to dynamically changing errors in real time. For example, changes in ambient temperature will cause thermal expansion and contraction of the stage body and transmission components, resulting in additional positioning errors. These errors change dynamically with temperature, and static compensation cannot achieve accurate correction.

[0005] Insufficient overall accuracy due to spatial attitude deviation: The accuracy assurance of existing probe stage is mostly focused on single-dimensional displacement compensation, ignoring the spatial attitude changes of the stage during movement (such as pitch, tilt, rotation, etc.). When there is attitude deviation of the stage, even if the single-dimensional displacement accuracy meets the standard, it will cause the reference plane of the workpiece to be inspected to be non-parallel to the probe detection surface, thus resulting in detection deviation. The lack of a multi-dimensional collaborative calibration mechanism for spatial attitude in the existing technology has become a key bottleneck restricting the improvement of the accuracy of probe stage.

[0006] Therefore, a stage for the probe station is needed to solve the above problems. Summary of the Invention

[0007] The purpose of this invention is to provide a stage for a probe station to solve the problems mentioned in the background art.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] The probe stage includes the stage body, drive unit, accuracy assurance unit and central control module;

[0010] The drive unit is connected to the stage body for driving the stage body to achieve multi-degree-of-freedom motion.

[0011] The accuracy assurance unit is arranged sequentially along the motion transmission path, including a flexible adaptive transmission module, a real-time error detection and compensation module, and a multi-dimensional collaborative calibration module;

[0012] The flexible adaptive transmission module is connected in series between the drive unit and the stage body to eliminate gaps in the drive transmission process.

[0013] The real-time error detection and compensation module is connected to the stage body and is used to detect the real-time motion error of the stage body and output a compensation signal.

[0014] The multi-dimensional collaborative calibration module is signal-connected to the real-time error detection and compensation module, and is used to perform spatial attitude calibration on the compensated motion trajectory.

[0015] The drive unit and the precision assurance unit are both connected to the central control module. The central control module implements progressive control of the movement of the stage body based on the feedback signals from the three modules.

[0016] In a further technical solution, the flexible adaptive transmission module includes a transmission connector, an elastic pre-tightening component, and a gap detection component;

[0017] The elastic preload assembly is disposed inside the transmission connector, and the gap detection component is used to detect the gap value between the transmission connector and the output end of the drive unit. The preload force of the elastic preload assembly satisfies the formula: ,in, The target preload force required for the elastic preload assembly. The stiffness coefficient of the elastic preload assembly. This refers to the gap between the transmission connector and the output end of the drive unit. This is the initial preload.

[0018] In a further technical solution, the elastic pretensioning component includes an elastic element, an adjusting element, and a pressure detection element; the adjusting element is adapted to and connected to the transmission connector, the elastic element is sleeved on the adjusting element, and the pressure detection element is set at the contact end between the elastic element and the transmission connector, for real-time acquisition of the actual value of the pretensioning force and feedback to the central control module.

[0019] In a further technical solution, the real-time error detection and compensation module includes a straight-line error detection component, an attitude error detection component, and a compensation execution component;

[0020] The linear error detection device is used to detect the linear motion error of the stage body, and the attitude error detection device is used to collect the attitude error of the stage body.

[0021] The central control module constructs a dynamic compensation model based on the detected signals, and the compensation amount satisfies the formula. Where Δ is the total compensation amount for dynamic motion. The linear motion error of the stage body. The attitude error of the stage body, This is the amount used for environmental disturbance compensation and correction.

[0022] A further technical solution involves obtaining the environmental interference compensation correction amount by collecting the difference in environmental parameters between the stage body and the environment using an environmental detection device. The specific formula is as follows: ,in, This is the amount used for environmental disturbance compensation and correction. The characteristic coefficient of the stage body material is . The effective movement length of the stage body. This represents the difference in environmental parameters between the stage and the environment.

[0023] In a further technical solution, the compensation actuator is a high-precision telescopic drive, which is connected to the stage body, and its telescopic range corresponds linearly to the compensation range output by the central control module.

[0024] A further technical solution is that the multi-dimensional collaborative calibration module includes a positioning and recognition component, a spatial attitude detection component, and a collaborative calibration execution component;

[0025] The positioning and recognition component is used to collect the reference mark position information of the workpiece to be detected on the stage body, and the spatial attitude detection component is used to collect the spatial attitude parameters of the stage body.

[0026] Based on the above information, the central control module constructs a spatial coordinate system, and the calibration values ​​satisfy the formula: ,in, This represents the total spatial attitude calibration value. This represents the spatial displacement deviation of the stage body in the x-direction. This represents the spatial displacement deviation of the stage body in the y-direction. For the stage body in Spatial displacement deviation in direction This represents the attitude angle deviation of the stage body.

[0027] In a further technical solution, the positioning and recognition component includes an image acquisition device and an optical magnification device, wherein the image acquisition device is used to achieve high-precision recognition of the reference mark.

[0028] In a further technical solution, the central control module includes a signal processing unit and a motion control unit; the signal processing unit is used to realize real-time processing of the signals of the three modules and the calculation of compensation and calibration amounts; the motion control unit is used to realize motion control of the drive unit and each execution component.

[0029] A further technical solution is that the stage body is made of a high-rigidity, low-expansion-coefficient material, and its surface is precision-machined; the stage body is provided with a workpiece fixing structure for fixing the workpiece to be tested.

[0030] Compared with the prior art, the beneficial effects of the present invention are:

[0031] This invention achieves dynamic elimination of transmission backlash through a flexible adaptive transmission module. The gap detection component in this module collects the transmission gap value in real time, and the central control module calculates the required preload based on the gap value. It then controls the movement of the adjusting component of the elastic preload assembly, causing the elastic component to output the corresponding preload, thus adaptively eliminating the transmission backlash. Compared to the fixed preload method in existing technologies, this module can adjust the preload in real time according to the dynamic changes in the gap, avoiding increased transmission resistance and component wear caused by excessive preload, and also avoiding gap residue caused by insufficient preload, thereby improving the basic positioning accuracy of the probe stage.

[0032] This invention achieves real-time correction of dynamic errors through a real-time error detection and compensation module. Linear error detection and attitude error detection components collect linear motion errors and attitude errors in real time, while environmental detection components collect environmental parameter differences. The central control module calculates the environmental interference compensation correction amount and the total compensation amount, controlling the high-precision telescopic drive component to extend and retract in real time, thus achieving synchronous compensation for dynamic errors and environmental interference errors. This module, employing real-time detection and dynamic compensation, compared to the static compensation in existing technologies, can accurately respond to dynamic errors and environmental changes during motion, further improving the positioning accuracy and stability of the probe stage.

[0033] This invention achieves in-depth correction of spatial attitude and motion trajectory through a multi-dimensional collaborative calibration module; the image acquisition component and optical magnification component of the positioning and recognition component accurately identify the spatial position of the workpiece reference mark, the spatial attitude detection component acquires the attitude angle deviation of the stage, and the central control module calculates the total calibration amount and controls multiple micro-drive components to work together to achieve synchronous calibration of multi-directional displacement deviation and attitude angle deviation; this module makes up for the shortcomings of single-dimensional compensation in the prior art, realizes multi-dimensional collaborative calibration, and ultimately enables the positioning accuracy of the probe stage to meet the high-precision requirements of micro-nano-scale semiconductor device detection.

[0034] To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0035] Figure 1 This is a block diagram of the stage body of the present invention;

[0036] Figure 2 This is a block diagram of the internal modules of the accuracy assurance unit of the present invention;

[0037] Figure 3 This is a block diagram of the internal modules of the central control module of the present invention;

[0038] Figure 4 This is a module connection diagram of the central control module of the present invention;

[0039] Figure 5 This is a module connection diagram of the platform of the present invention.

[0040] In the diagram: 1. Stage body; 11. Workpiece fixing structure; 2. Drive unit; 3. Precision assurance unit; 31. Flexible adaptive transmission module; 311. Transmission connector; 312. Elastic pre-tightening component; 3121. Elastic component; 3122. Adjustment component; 3123. Pressure detection component; 313. Gap detection component; 32. Real-time error detection and compensation module; 321. Linear error detection component; 322. Attitude error detection component; 323. Compensation execution component; 324. Environmental detection component; 33. Multi-dimensional collaborative calibration module; 331. Positioning recognition component; 3311. Image acquisition component; 3312. Optical magnification component; 332. Spatial attitude detection component; 333. Collaborative calibration execution component; 4. Central control module; 41. Signal processing unit; 42. Motion control unit. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0042] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0043] like Figure 1-5 As shown, this embodiment of the invention provides a stage for a probe station, including a stage body 1, a drive unit 2, a precision assurance unit 3, and a central control module 4;

[0044] The drive unit 2 is connected to the stage body 1 via a transmission, and is used to drive the stage body 1 to achieve multi-degree-of-freedom motion.

[0045] The precision assurance unit 3 is arranged sequentially along the motion transmission path, including a flexible adaptive transmission module 31, a real-time error detection and compensation module 32, and a multi-dimensional collaborative calibration module 33;

[0046] The flexible adaptive transmission module 31 is connected in series between the drive unit 2 and the stage body 1 to eliminate the gap in the drive transmission process;

[0047] The real-time error detection and compensation module 32 is connected to the stage body 1 and is used to detect the real-time motion error of the stage body 1 and output a compensation signal.

[0048] The multi-dimensional collaborative calibration module 33 is signal-connected to the real-time error detection and compensation module 32, and is used to perform spatial attitude calibration on the compensated motion trajectory.

[0049] Both the drive unit 2 and the precision assurance unit 3 are connected to the central control module 4. The central control module 4 implements progressive control of the movement of the stage body 1 based on the feedback signals from the three modules.

[0050] In this embodiment, a progressive precision control framework is established through the architecture design of "drive unit 2 + precision assurance unit 3 + central control module 4". The overall effect is to achieve precise control of the multi-degree-of-freedom motion of the stage. Through the sequential connection of the three modules along the transmission path, a full-process precision assurance chain is formed from basic transmission, dynamic motion to spatial attitude, providing structural support for subsequent precision optimization at each level and ensuring that the stage for the probe station has the core potential to break through the nanometer-level positioning accuracy.

[0051] Specifically, the flexible adaptive transmission module 31 includes a transmission connector 311, an elastic preload assembly 312, and a gap detection component 313;

[0052] The elastic preload assembly 312 is disposed inside the transmission connector 311, and the gap detection component 313 is used to detect the gap value between the transmission connector 311 and the output end of the drive unit 2. The preload force of the elastic preload assembly 312 satisfies the formula: ,in, The target preload force required for the elastic preload assembly. The stiffness coefficient of the elastic preload assembly (preset by the material and structural parameters of the elastic element). This refers to the gap between the transmission connector and the output end of the drive unit. This is the initial preload (to ensure that transmission stability can still be maintained when the clearance is 0).

[0053] In this embodiment, dynamic and adaptive elimination of transmission gap is achieved. The gap value is collected in real time by the gap detection component 313 and the preload is precisely controlled by the formula. This solves the problem that the existing fixed preload method cannot match the dynamic changes of the gap. The basic positioning deviation is eliminated from the source of transmission, and the basic motion positioning accuracy of the probe stage is improved to the micrometer level or above, laying the foundation for subsequent high-precision compensation.

[0054] Specifically, the elastic pretensioning component 312 includes an elastic element 3121, an adjusting element 3122, and a pressure detection element 3123; the adjusting element 3122 is adapted to and connected to the transmission connector 311, the elastic element 3121 is sleeved on the adjusting element 3122, and the pressure detection element 3123 is set at the contact end between the elastic element 3121 and the transmission connector 311, for real-time acquisition of the actual value of the pretensioning force and feedback to the central control module 4.

[0055] In this embodiment, a closed-loop control system for preload is constructed. The pressure detection element 3123 provides real-time feedback on the actual value of the preload, ensuring that the compression amount of the adjusting element 3122 on the elastic element 3121 is accurately matched with the target preload. This avoids the increase in transmission resistance caused by excessive preload or the gap residue caused by insufficient preload, further improving the stability and reliability of module gap elimination.

[0056] Specifically, the real-time error detection and compensation module 32 includes a straight line error detection component 321, an attitude error detection component 322, and a compensation execution component 323;

[0057] The linear error detection component 321 is used to detect the linear motion error of the stage body 1, and the attitude error detection component 322 is used to collect the attitude error of the stage body 1.

[0058] Central control module 4 constructs a dynamic compensation model based on the detected signals, and the compensation amount satisfies the formula: Where Δ is the total compensation amount for dynamic motion. The linear motion error of the stage body. The attitude error of the stage body is denoted as . This is the amount used for environmental disturbance compensation and correction.

[0059] In this embodiment, the precise quantification and real-time correction of dynamic motion errors are achieved. The linear motion error and attitude error are collected by the linear error detector 321 and the attitude error detector 322 respectively. The total compensation amount is calculated by combining the dynamic compensation model. This breaks the limitation of the existing static compensation that cannot respond to dynamic errors, so that the stage can offset the accuracy attenuation caused by vibration, load change and other factors in real time during the movement.

[0060] Specifically, the environmental interference compensation correction amount is obtained by collecting the difference in environmental parameters between the stage body 1 and the environment through environmental detection component 324. The specific formula is as follows: ,in, This is the amount used for environmental disturbance compensation and correction. It is the characteristic coefficient (coefficient of thermal expansion) of the stage material. The effective movement length of the stage body. This represents the difference in environmental parameters (temperature difference) between the stage body and the environment.

[0061] In this embodiment, precise compensation for environmental interference is achieved. The difference in environmental parameters is collected by the environmental detection component 324 and the thermal expansion and contraction error caused by environmental factors such as temperature is quantified by the formula. The impact of environmental interference on positioning accuracy is minimized, ensuring that the stage can maintain a stable level of accuracy under different environmental conditions.

[0062] Specifically, the compensation actuator 323 is a high-precision telescopic drive, which is connected to the stage body 1, and its telescopic range corresponds linearly to the compensation range output by the central control module 4.

[0063] In this embodiment, to ensure the accurate implementation of the compensation amount, the extension and retraction of the high-precision telescopic drive component corresponds linearly with the compensation amount, enabling precise extension and retraction adjustment at the micron or even nanometer level. This transforms the compensation amount calculated by the module into actual motion correction actions, ensuring the effectiveness and accuracy of dynamic error compensation.

[0064] Specifically, the multi-dimensional collaborative calibration module 33 includes a positioning and recognition component 331, a spatial attitude detection component 332, and a collaborative calibration execution component 333;

[0065] The positioning and recognition component 331 is used to collect the reference mark position information of the workpiece to be inspected on the stage body 1, and the spatial attitude detection component 332 is used to collect the spatial attitude parameters of the stage body 1.

[0066] Based on the above information, the central control module 4 constructs a spatial coordinate system, and the calibration values ​​satisfy the formula: ,in, This represents the total spatial attitude calibration value. This represents the spatial displacement deviation of the stage body in the x-direction. This represents the spatial displacement deviation of the stage body in the y-direction. For the stage body in Spatial displacement deviation in direction This refers to the attitude angular deviation of the stage body (including pitch angle, tilt angle, rotation angle, etc.).

[0067] In this embodiment, depth correction of spatial attitude and motion trajectory is achieved. The three-dimensional displacement deviation and attitude angle deviation are collected by the positioning and recognition component 331 and the spatial attitude detection component 332. The total calibration amount is calculated by combining the formula, which solves the problem that the existing single-dimensional compensation cannot cover the spatial attitude deviation and eliminates the residual error after the first two compensations.

[0068] Specifically, the positioning and recognition component 331 includes an image acquisition component 3311 and an optical magnification component 3312. The image acquisition component 3311 is used to achieve high-precision recognition of the reference mark.

[0069] In this embodiment, the accuracy of the reference mark positioning is improved. The combination of the optical magnifier 3312 and the image acquisition device 3311 can realize high-definition recognition and accurate positioning of the tiny reference mark, ensuring the accuracy of the three-dimensional displacement deviation calculation and providing reliable position data support for the multi-dimensional calibration of the module.

[0070] Specifically, the central control module 4 includes a signal processing unit 41 and a motion control unit 42; the signal processing unit 41 is used to realize the real-time processing of the signals of the three modules and the calculation of compensation and calibration amounts; the motion control unit 42 is used to realize the motion control of the drive unit 2 and each actuator.

[0071] In this embodiment, the entire system achieves coordinated and efficient control. The signal processing unit 41 ensures the real-time processing of the detection signals of each module and the accurate calculation of the compensation and calibration quantities. The motion control unit 42 realizes the synchronous control of each execution component. The two work together to make the accuracy assurance unit 3 form an organic whole, avoiding the accuracy loss caused by the lag in coordination between modules.

[0072] Specifically, the stage body 1 is made of a high-rigidity, low-expansion-coefficient material and its surface is precision machined; the stage body 1 is provided with a workpiece fixing structure 11 for fixing the workpiece to be tested.

[0073] In this embodiment, positioning accuracy is ensured at the level of basic components. High-rigidity, low-expansion-coefficient materials can reduce the effects of deformation and thermal expansion and contraction. Precision-machined surfaces ensure flatness, and workpiece fixing structure 11 prevents workpiece displacement. This provides a stable basic carrier for the function of all subsequent accuracy assurance modules, avoids accuracy attenuation caused by problems with the main body itself, and ensures that the core bearing components of the probe stage have high-precision adaptation capabilities.

[0074] Working principle and usage process of this invention:

[0075] The workflow is divided into five core stages: startup initialization, basic transmission backlash elimination, dynamic error real-time compensation, spatial attitude collaborative calibration, and detection completion reset. Each stage is closely linked and works in coordination. Through the linkage between the precision assurance unit 3 and the central control module 4, high-precision positioning control of the stage is achieved. The specific working process of each stage is described in detail below:

[0076] Start-up initialization phase: This phase is the preparation stage for the entire workflow. The core objective is to ensure that all components are in the preset initial state to guarantee the accuracy of subsequent precision control.

[0077] The specific process is as follows: The central control module 4 first receives the detection task instruction issued by the host computer. The instruction contains core information such as the model of the workpiece to be detected, the detection position coordinates, and the motion trajectory parameters. After parsing the instruction, the central control module 4 issues initialization instructions to all components of the drive unit 2 and the precision assurance unit 3. The stage body 1 returns to the mechanical origin under the drive of the drive unit 2. At the same time, the workpiece fixing structure 11 (such as a vacuum adsorption device or elastic clamp) starts self-checking to confirm that the clamping / adsorption function is normal and is ready to receive the workpiece to be detected. The elastic pre-tightening component 312 of the flexible adaptive transmission module 31 returns to the initial extension position, and the pressure detection component 3123 completes zero-position calibration. Real-time error detection... Each detection component (linear error detection component 321, attitude error detection component 322, and environmental detection component 324) of the measurement and compensation module 32 initiates self-testing, transmits initial detection signals, and feeds them back to the central control module 4. The central control module 4 performs zero-point calibration on each detection signal to eliminate initial errors. The positioning and recognition component 331 (image acquisition component 3311 and optical magnification component 3312) of the multi-dimensional collaborative calibration module 33 is activated to complete lens focusing and parameter initialization, and the spatial attitude detection component 332 completes the reference attitude calibration. After the initialization of each component is completed, a "ready" signal is fed back to the central control module 4. After the central control module 4 summarizes the signals, it determines that the initialization is complete and enters the next working stage.

[0078] Basic transmission backlash elimination stage: The core objective of this stage is to eliminate the backlash between the drive unit 2 and the stage body 1, laying the foundation for subsequent high-precision motion. This stage is a triple precision protection.

[0079] The specific process is as follows: The operator places the workpiece to be inspected on the preset position of the stage body 1. After receiving the workpiece placement signal, the central control module 4 controls the workpiece fixing structure 11 to move, and fixes the workpiece firmly with a preset fixing force to prevent displacement during movement. Subsequently, the central control module 4 sends an "initial movement" command to the drive unit 2, and the drive unit 2 drives the stage body 1 to start making small trial movements along the preset trajectory. During this process, the gap detection component 313 (such as a laser displacement sensor) of the flexible adaptive transmission module 31 collects the gap value between the transmission connector 311 and the output end of the drive unit 2 (such as a lead screw and nut pair) in real time, and transmits it to the signal processing unit 41 of the central control module 4 in the form of a high-frequency signal. After filtering and noise reduction of the gap value, the signal processing unit 41 calls the preset preload calculation model and calculates the elimination of noise using the formula. The target preload force required for the current gap (where is the stiffness coefficient of the elastic preload component 312, preset by the material and structural parameters of the elastic element 3121; is the initial preload force, ensuring that transmission stability can still be maintained when the gap is 0); after the calculation is completed, the motion control unit 42 of the central control module 4 sends a control signal to the drive mechanism of the adjustment component 3122 of the elastic preload component 312, driving the adjustment component 3122 to move along the preset direction, compressing the elastic element 3121 until the actual preload force collected by the pressure detection component 3123 reaches the target preload force; the pressure detection component 3123 feeds back the actual preload force signal to the central control module 4 in real time, forming a closed-loop control, ensuring that the preload force accurately matches the current gap value, and completely eliminating the transmission gap; after the gap is eliminated, the central control module 4 controls the drive unit 2 to stop the trial movement, and the stage body 1 is in a ready state to move to the detection area.

[0080] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A stage for a probe station, characterized in that: It includes a stage body (1), a drive unit (2), a precision assurance unit (3), and a central control module (4). The drive unit (2) is connected to the stage body (1) for driving the stage body (1) to achieve multi-degree-of-freedom motion; The accuracy assurance unit (3) is arranged sequentially along the motion transmission path, including a flexible adaptive transmission module (31), a real-time error detection and compensation module (32), and a multi-dimensional collaborative calibration module (33). The flexible adaptive transmission module (31) is connected in series between the drive unit (2) and the stage body (1) to eliminate gaps in the drive transmission process; The real-time error detection and compensation module (32) is connected to the stage body (1) and is used to detect the real-time motion error of the stage body (1) and output a compensation signal. The multi-dimensional collaborative calibration module (33) is signal-connected to the real-time error detection and compensation module (32) and is used to perform spatial attitude calibration on the compensated motion trajectory; The drive unit (2) and the precision assurance unit (3) are both connected to the central control module (4) by signal. The central control module (4) implements progressive control of the movement of the platform body (1) based on the feedback signals of the three modules.

2. The stage for the probe station according to claim 1, characterized in that: The flexible adaptive transmission module (31) includes a transmission connector (311), an elastic preload assembly (312), and a gap detection component (313). The elastic preload assembly (312) is disposed inside the transmission connector (311), and the gap detection component (313) is used to detect the gap value between the transmission connector (311) and the output end of the drive unit (2). The preload force of the elastic preload assembly (312) satisfies the formula: ,in, The target preload force required for the elastic preload assembly. The stiffness coefficient of the elastic preload assembly. This refers to the gap between the transmission connector and the output end of the drive unit. This is the initial preload.

3. The stage for the probe station according to claim 2, characterized in that: The elastic pretensioning assembly (312) includes an elastic element (3121), an adjusting element (3122), and a pressure detection element (3123). The adjusting element (3122) is adapted to the transmission connector (311), the elastic element (3121) is sleeved on the adjusting element (3122), and the pressure detection element (3123) is set at the contact end between the elastic element (3121) and the transmission connector (311) for real-time acquisition of the actual value of the pretensioning force and feedback to the central control module (4).

4. The stage for the probe station according to claim 1, characterized in that: The real-time error detection and compensation module (32) includes a straight line error detection component (321), an attitude error detection component (322), and a compensation execution component (323). The linear error detection device (321) is used to detect the linear motion error of the stage body (1), and the attitude error detection device (322) is used to collect the attitude error of the stage body (1). The central control module (4) constructs a dynamic compensation model based on the detection signal, and the compensation amount satisfies the formula: Where Δ is the total compensation amount for dynamic motion. The linear motion error of the stage body. The attitude error of the stage body is denoted as . This is the amount used for environmental disturbance compensation and correction.

5. The stage for the probe station according to claim 4, characterized in that: The environmental interference compensation correction amount is obtained by collecting the difference in environmental parameters between the stage body (1) and the environment through the environmental detection device (324). The specific formula is as follows: ,in, This is the amount used for environmental disturbance compensation and correction. The characteristic coefficient of the stage body material is . The effective movement length of the stage body. This represents the difference in environmental parameters between the stage and the environment.

6. The stage for the probe station according to claim 4, characterized in that: The compensation actuator (323) is a high-precision telescopic drive. The high-precision telescopic drive is connected to the stage body (1), and its telescopic amount corresponds linearly to the compensation amount output by the central control module (4).

7. The stage for the probe station according to claim 1, characterized in that: The multi-dimensional collaborative calibration module (33) includes a positioning and identification component (331), a spatial attitude detection component (332), and a collaborative calibration execution component (333). The positioning and recognition component (331) is used to collect the reference mark position information of the workpiece to be detected on the stage body (1), and the spatial attitude detection component (332) is used to collect the spatial attitude parameters of the stage body (1). The central control module (4) constructs a spatial coordinate system based on the above information, and the calibration quantity satisfies the formula: ,in, This represents the total spatial attitude calibration value. This represents the spatial displacement deviation of the stage body in the x-direction. This represents the spatial displacement deviation of the stage body in the y-direction. For the stage body in Spatial displacement deviation in direction This represents the attitude angle deviation of the stage body.

8. The stage for the probe station according to claim 7, characterized in that: The positioning and recognition component (331) includes an image acquisition component (3311) and an optical magnification component (3312). The image acquisition component (3311) is used to achieve high-precision recognition of the reference mark.

9. The stage for the probe station according to claim 1, characterized in that: The central control module (4) includes a signal processing unit (41) and a motion control unit (42); the signal processing unit (41) is used to realize the real-time processing of the triple module signals and the calculation of compensation and calibration quantities; the motion control unit (42) is used to realize the motion control of the drive unit (2) and each execution component.

10. The stage for the probe station according to claim 1, characterized in that: The stage body (1) is made of a high-rigidity, low-expansion-coefficient material and its surface is precision machined. The stage body (1) is provided with a workpiece fixing structure (11) for fixing the workpiece to be tested.

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