Spraying device and substrate processing equipment
By incorporating a switching element into the spraying device to control the mixing time of the chemical solution, the problem of inconsistent mixing time was solved, thereby improving the substrate treatment effect and achieving efficient utilization of the chemical solution.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ACM RES (SHANGHAI) INC
- Filing Date
- 2024-11-04
- Publication Date
- 2026-05-12
AI Technical Summary
In the prior art, the mixing time of the mixture is difficult to control, resulting in poor substrate processing effect.
Design a spraying device that controls the mixing and discharge time of the liquid by setting the inner core of the switching element to move in the cavity, so as to ensure that the mixed liquid is supplied to the substrate surface after a predetermined time.
This achieves optimal treatment of the mixed solution on the substrate surface, improves adhesive removal efficiency, and saves on the amount of solution used.
Smart Images
Figure CN122028672A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a spraying device and substrate processing equipment. Background Technology
[0002] In semiconductor substrate processing, SPM (Sulfuric Acid Hydrogen Peroxide Mixture) is commonly used to remove photoresist. A mixture of sulfuric acid and hydrogen peroxide is sprayed onto the substrate surface. When sulfuric acid and hydrogen peroxide are mixed, carboxylic acid is generated. Carboxylic acid has very strong oxidizing power, which can oxidize the photoresist, thereby removing it. Research suggests that, when sulfuric acid and hydrogen peroxide are mixed for a predetermined time, the temperature at which the SPM solution is formed and the concentration of carboxylic acid in the SPM solution are more conducive to achieving better photoresist removal results.
[0003] Therefore, it is necessary to provide a spraying device and a substrate processing equipment to solve the problem of how to mix the liquid (SPM solution) for a predetermined time so as to supply it to the substrate surface to achieve a better substrate processing effect. Summary of the Invention
[0004] The purpose of this application is to solve the problem in the prior art of how to mix the liquid for a predetermined time so as to supply it to the substrate surface to achieve a better substrate treatment effect.
[0005] To address the aforementioned problems, one embodiment of this application provides a spraying device, comprising:
[0006] The body has an internal cavity, and also has a liquid inlet and a liquid outlet. The liquid inlet is used to introduce at least two kinds of medicinal liquids into the cavity; the liquid outlet is used to discharge the mixture of at least two kinds of medicinal liquids from the cavity.
[0007] A switching element, including an inner core movably disposed in a cavity, for opening or closing the liquid outlet;
[0008] The spray system is configured as follows:
[0009] With the inner core's liquid outlet closed, at least two kinds of medicinal liquids are introduced into the cavity through the liquid inlet to mix the at least two kinds of medicinal liquids to form a mixture; and
[0010] When the mixing time of the mixture reaches the predetermined time, the inner core opens the outlet to discharge the mixture.
[0011] Another embodiment of this application provides a substrate processing apparatus, including:
[0012] A chamber for accommodating the substrate;
[0013] The aforementioned spraying device is used to supply a mixture to the substrate inside the chamber.
[0014] The spraying device proposed in this application is equipped with a switching element, the inner core of which is movably disposed in the cavity to open or close the liquid outlet, so that at least two kinds of liquids are mixed in the cavity of the body to form a mixture, and the mixture is discharged when the mixing time of the mixture reaches a predetermined time. Therefore, the spraying device can make the mixture mix for a predetermined time so as to supply it to the substrate surface to achieve a better substrate treatment effect.
[0015] The substrate processing equipment provided in this application includes the above-mentioned spraying device, which supplies a mixed liquid in the spraying device for a predetermined mixing time to the substrate surface to achieve a better substrate processing effect.
[0016] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application. Attached Figure Description
[0017] Figure 1 This is a three-dimensional structural diagram of the spray device according to Embodiment 1 of this application;
[0018] Figure 2 This is a schematic cross-sectional view of the spray device in Embodiment 1 of this application when the liquid outlet of the inner core is closed.
[0019] Figure 3 This is a cross-sectional structural diagram of the spray device in Embodiment 1 of this application when the inner core opens the liquid outlet.
[0020] Figure 4 The concentration-time curve of caloic acid generated in Example 1 of this application;
[0021] Figure 5 This is a three-dimensional structural diagram of the spray device according to Embodiment 2 of this application;
[0022] Figure 6 This is a schematic cross-sectional view of the spray device in Embodiment 2 of this application when the liquid outlet of the inner core is closed;
[0023] Figure 7 This is a schematic cross-sectional view of the spray device of Embodiment 2 of this application when the inner core has its liquid outlet open; and
[0024] Figure 8 This is a schematic diagram of the substrate processing apparatus provided in Embodiment 3 of this application. Detailed Implementation
[0025] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived based on the claims of this application. To provide a thorough understanding of this application, many specific details will be included in the following description. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details will be omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.
[0026] It should be noted that in this specification, similar reference numerals and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0027] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0028] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0030] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.
[0031] Example 1:
[0032] Figure 1 This is a three-dimensional structural diagram of the spray device according to Embodiment 1 of this application; Figure 2 This is a schematic cross-sectional view of the spray device in Embodiment 1 of this application when the liquid outlet of the inner core is closed. Figure 3 This is a cross-sectional structural diagram of the spray device in Embodiment 1 of this application when the inner core opens the liquid outlet.
[0033] See Figures 1 to 3 The spraying device 100 provided in this application includes a body 10 and a switching element 20. The body 10 has an interior cavity 11, and also has an inlet 13 and an outlet 15. The inlet 13 is used to introduce at least two kinds of medicinal liquids into the cavity 11; the outlet 15 is used to discharge a mixture of at least two kinds of medicinal liquids from the cavity 11. The switching element 20 includes an inner core 21, which is movably disposed in the cavity 11 to open or close the outlet 15. In this embodiment, the inner core 21 moves vertically within the cavity 11. The spraying device 100 is configured to: with the outlet 15 closed by the inner core 21, introduce at least two kinds of medicinal liquids into the cavity 11 through the inlet 13 to mix the at least two kinds of medicinal liquids to form a mixture; and when the mixing time of the mixture reaches a predetermined time, open the outlet 15 by the inner core 21 to discharge the mixture. In this embodiment, the liquid inlet 13 includes a first liquid inlet 131 and a second liquid inlet 132, used to respectively introduce two different liquid solutions, such as sulfuric acid (H2SO4) and hydrogen peroxide (H2O2), to form SPM (Sulfuric Acid Hydrogen Peroxide Mixture) solution in the cavity 11. When sulfuric acid and hydrogen peroxide are mixed together, the following chemical reaction occurs:
[0034] H₂SO₄ + H₂O₂ → H₂SO₅ + H₂O
[0035] As shown in the above chemical equation, sulfuric acid and hydrogen peroxide react to form peroxysulfuric acid, also known as carboxylic acid (H2SO5). Carboxylic acid has a very strong oxidizing power and can easily react with organic compounds such as benzene and phenol, decomposing them into products such as carbon dioxide, thereby achieving a removal effect. This strong ability to remove organic matter makes the mixture of sulfuric acid and hydrogen peroxide (SPM solution) suitable for removing photoresist. The photoresist removal effect of the SPM solution is related to the concentration of carboxylic acid and the temperature of the SPM solution. In this embodiment, the sulfuric acid introduced into cavity 11 can be at an ultra-high temperature of 170°C or higher, such as 180°C or 190°C. After mixing with room temperature hydrogen peroxide in cavity 11, the ultra-high temperature sulfuric acid above 170°C will rise to a temperature higher than 170°C, such as above 200°C. SPM solution at this temperature can significantly improve the photoresist removal effect and help save sulfuric acid usage. At the same time, within a reasonable range, the higher the temperature of the SPM solution, the faster the carboxylic acid is generated. The formation of carboxylic acid is accompanied by decomposition, and the decomposition rate increases with increasing temperature. The reaction process is represented as follows:
[0036] H2SO4+H2O2→H2SO5→H2SO4+1 / 2O2
[0037] Figure 4 The concentration versus time curve for the formation of carboxylic acid is shown, as follows: Figure 4 The peak value of the curve and the range near the peak value represent the optimal working range for achieving the maximum degumming effect. The predetermined time t for sulfuric acid and hydrogen peroxide to remain and mix within cavity 11 is also considered. a The range is: minimum scheduled duration t a_min ≤Pre-order duration t a ≤Maximum booking duration t a_max Scheduled duration t a The value can be adjusted according to the SPM solution temperature required by the process. For example, the predetermined time t a The time t represents the mixing time of sulfuric acid and hydrogen peroxide, ranging from a few seconds to a few minutes. This is achieved by controlling the predetermined mixing time t of sulfuric acid and hydrogen peroxide within cavity 11. a This allows for control of the SPM solution to reach a target state, such as when the carboxylic acid concentration is close to or even reaches its peak, the SPM solution temperature is optimal, the SPM solution has the lowest gas content, or other desired process parameters. At this state, the SPM solution is applied to the substrate surface, ultimately achieving the best adhesive removal effect in the shortest process time and with the lowest solution cost. Specifically, this application incorporates a switching element 20, whose inner core 21 is movably disposed within the cavity 11 to open or close the outlet 15. This ensures that the mixing time of sulfuric acid and hydrogen peroxide within the cavity 11 of the spray device 100 body reaches a predetermined time t. aAt the same time, the spraying device 100 supplies SPM solution containing carboxylic acid to the substrate to achieve a better adhesive removal effect.
[0038] In this embodiment, the number of inlets 13 corresponds to the number of different types of liquids, which can be determined according to actual needs. Optionally, one inlet 13 can be provided, where at least two liquids, such as sulfuric acid and hydrogen peroxide, first converge outside the body 10, and then enter the cavity 11 of the body 10 through the inlet 13 and remain there for a certain period of time. After a certain period, the inner core 21 opens the outlet 15 to discharge the SPM liquid. In some other embodiments, the spray device 100 is also suitable for liquids at room temperature.
[0039] In some embodiments, cavity 11 includes a first cavity 111 and a second cavity 112. The inner core 21 includes a movable end 211 and a through portion 212. The movable end 211 is located in the first cavity 111 and serves to divide the first cavity 111 into a first pressure regulating chamber 101 and a second pressure regulating chamber 102. The first pressure regulating chamber 101 is located above the second pressure regulating chamber 102. The first end of the through portion 212 is connected to the movable end 211, and the through portion 212 extends from the first cavity 111 into the second cavity 112. The second cavity 112 is provided with an inlet 13 and an outlet 15, with the inlet 13 located above the outlet 15. The second end of the through portion 212 is used to open or close the outlet 15. The first pressure regulating chamber 101 has a first opening 113 on its side wall, and the second pressure regulating chamber 102 has a second opening 114 on its side wall. The pressure inside the first and second pressure regulating chambers 101 and 102 is adjusted by introducing or discharging fluid into the first and second openings 113 and 114 respectively, causing the movable end 211 to move the through portion 212 relative to the outlet 15. In this embodiment, the movable end 211 moves up and down along the side wall of the first cavity 111, and this structure guides the movement of the inner core 21. A sealing element, such as a sealing ring, is provided between the movable end 211 and the side wall of the first cavity 111 to prevent fluid leakage, thereby maintaining the pressure difference between the first and second pressure regulating chambers 101 and 102.
[0040] Specifically, in Figure 2 and Figure 3 In the example shown, firstly, fluid, such as nitrogen, is introduced into the first opening 113, and fluid, such as nitrogen, is discharged from the second opening 114. Under the pressure difference between the first pressure regulating chamber 101 and the second pressure regulating chamber 102, the inner core 21 moves downwards and closes the liquid outlet 15 (e.g., Figure 2If the second opening 114 is the first outlet for fluid discharge, the discharged fluid is air; then, the first inlet 131 and the second inlet 132 respectively introduce sulfuric acid and hydrogen peroxide into the cavity 11, and the sulfuric acid and hydrogen peroxide mix to form SPM solution; next, wait for a predetermined time; finally, fluid such as nitrogen is introduced into the second opening 114, and fluid such as nitrogen is discharged from the first opening 113. Under the pressure difference between the first pressure regulating chamber 101 and the second pressure regulating chamber 102, the inner core 21 moves upward and opens the outlet 15 (e.g., ...). Figure 3 The SPM solution is discharged to the substrate surface to remove photoresist. It should be noted that during the period from opening the outlet 15 to the end of the photoresist cleaning process, the volume of the solution in cavity 11 during the process can be obtained based on the outlet flow rate of the solution and the predetermined mixing time of the solution in cavity 11. The structural dimensions of cavity 11 are then designed based on this solution volume. By designing the structural dimensions of cavity 11, a balanced solution supply is ensured. This balanced solution supply is achieved when the outlet flow rate of the solution in outlet 15 equals the inlet flow rate of the solution in inlet 13, while maintaining a constant solution level in cavity 11. This ensures that subsequent new SPM solution entering cavity 11 can always mix for the predetermined time, allowing the spray device 100 to continuously supply SPM solution to the substrate surface to achieve the aforementioned target state for the photoresist cleaning process.
[0041] In some embodiments, reference Figure 2 and Figure 3 The switching element 20 also includes an elastic seal 22 disposed on the outer periphery of the through portion 212. The first end of the elastic seal 22 is connected to the movable end 211, and the second end of the elastic seal 22 is connected to the bottom of the first cavity 111. This prevents airflow between the first cavity 111 and the second cavity 112, such as preventing impurities in the first cavity 111 from entering the second cavity 112 and contaminating the SPM solution, thus ensuring the high cleanliness of the SPM solution. It also prevents acid mist generated by the SPM solution from entering the first cavity 111, causing crystallization and resulting in jamming of the movable end 211. Specifically, a through hole 109 is provided at the bottom of the first cavity 111, and the second end of the elastic seal 22 is connected to the side wall of the through hole 109. The elastic seal 22 can be, for example, a bellows, with both ends connected to the movable end 211 and the side wall of the through hole 109 by welding or other means.
[0042] In some embodiments, reference Figure 2 and Figure 3The main body 10 also has a limiting member 16, which is disposed in the second pressure regulating chamber 102 and located below the movable end 211, for abutting against the movable end 211. It should be noted that the design height of the limiting member 16 should meet the following requirements: during the downward movement of the inner core 21, the design height of the limiting member 16 should ensure that the inner core 21 does not block the second opening 114, while allowing the inner core 21 to close the liquid outlet 15, and the inner core 21 does not abnormally squeeze the liquid outlet 15.
[0043] In some embodiments, reference Figure 2 and Figure 3 The main body 10 also has a cover 104, on the side of the cover 104 facing the cavity 11, a first limiting part 105 is provided, and a second limiting part 201 is provided on the movable end 211. The first limiting part 105 and the second limiting part 201 are matched with each other. The spray device 100 is configured such that when the movable end 211 of the inner core 21 drives the through part 212 to move relative to the liquid outlet 15, the second limiting part 201 is always limited in the first limiting part 105 to prevent the inner core 21 from rotating around the axis of the inner core 21. Figure 2 and Figure 3 In the example shown, the inner core 21 moves up and down. This example uses the shape design of the first limiting part 105 and the second limiting part 201 to prevent the inner core 21 from rotating around its axis during vertical movement. The first limiting part 105 is a groove, and the second limiting part 201 is a protrusion; alternatively, the first limiting part 105 is a protrusion, and the second limiting part 201 is a groove, with the protrusion matching the groove. The groove and protrusion can be square, elliptical, or other shapes. This application does not particularly limit the shape of the groove and protrusion, as long as the purpose of preventing the inner core 21 from rotating around its axis is achieved.
[0044] In some embodiments, reference Figure 2 and Figure 3 The outlet 15 of the body 10 is funnel-shaped, with the upper opening diameter of the outlet 15 being larger than the lower opening diameter, so as to stably supply the mixture through the outlet 15. In other embodiments, the cross-sectional shape of the outlet 15 of the body is an inverted trapezoid, with the diameter of the outlet 15 gradually decreasing from its upper opening to its lower opening, which also facilitates the stable supply of the mixture through the outlet 15.
[0045] In some embodiments, reference Figure 2 and Figure 3 The body 10 also has an exhaust port 17 for discharging gases from the second cavity 112, such as gases produced during the reaction of sulfuric acid and hydrogen peroxide. Figure 2 and Figure 3 In the example shown, the size of the first cavity 111 is smaller than the size of the second cavity 112, and the exhaust port 17 is located on the top wall of the second cavity 112 and is on the opposite side of the liquid inlet 13.
[0046] In some embodiments, the body 10 and the inner core 21 are made of one or any combination of PTFE (polytetrafluoroethylene), PCTFE (polychlorotrifluoroethylene), PVDF (polyvinylidene fluoride), ETFE (ethylene-tetrafluoroethylene copolymer) or ECTFE (ethylene-chlorotrifluoroethylene copolymer).
[0047] Example 2:
[0048] Figure 5 This is a three-dimensional structural diagram of the spray device according to Embodiment 2 of this application; Figure 6 This is a schematic cross-sectional view of the spray device in Embodiment 2 of this application when the liquid outlet of the inner core is closed; Figure 7 This is a cross-sectional structural diagram of the spray device in Embodiment 2 of this application when the inner core opens the liquid outlet.
[0049] The spray device 100 provided in this embodiment 2 differs from that in embodiment 1 in that the inner core 21' of the spray device 100 moves by electromagnetic drive, thereby achieving the purpose of opening or closing the liquid outlet 15.
[0050] refer to Figures 5 to 7 The switching element 20 includes an inner core 21' and an electromagnet 24. The inner core 21' includes a permanent magnet 213. The spray device 100 is configured such that the inner core 21' opens or closes the liquid outlet 15 by the attraction or repulsion between the electromagnet 24 and the permanent magnet 213. In this embodiment, the electromagnet 24 is disposed outside the body 10. The permanent magnet 213 is made of a high-temperature resistant permanent magnet material, such as neodymium iron boron magnets, samarium cobalt magnets, ferrite magnets, or alnico magnets.
[0051] Specifically, in Figure 6 and Figure 7 In the example shown, firstly, the electromagnet 24 is energized, repelling the inner core 21'. The inner core 21' moves downward and closes the liquid outlet 15 (as shown). Figure 6 Then, sulfuric acid and hydrogen peroxide are introduced into the cavity 11 through the first inlet 131 and the second inlet 132, respectively, and the sulfuric acid and hydrogen peroxide mix to form SPM solution; then, wait for a predetermined time; finally, the electromagnet 24 is energized to reverse the current, attracting the inner core 21', causing the inner core 21' to move upward and open the outlet 15 (as shown in the image). Figure 7The SPM solution is discharged to the substrate surface to remove photoresist. Similar to Example 1, during the period from opening the outlet 15 to the end of the photoresist cleaning process, the volume of the solution in the cavity 11 during the process can be obtained based on the solution outlet flow rate in the outlet 15 and the predetermined mixing time of the solution in the cavity 11. The structural dimensions of the cavity 11 are then designed based on this solution volume. By designing the structural dimensions of the cavity 11, a balanced solution supply is ensured. This balanced solution supply is achieved when the solution outlet flow rate in the outlet 15 is equal to the solution inlet flow rate in the inlet 13, while maintaining a constant solution level in the cavity 11. This ensures that subsequent new SPM solutions entering the cavity 11 can always mix for a predetermined time, allowing the spray device 100 to continuously supply SPM solutions that have reached the aforementioned target state to the substrate surface for photoresist cleaning. For the target state described in this embodiment, please refer to the description of the target state in Example 1.
[0052] In some embodiments, reference Figures 5 to 7 The spray device 100 also includes a receiving cavity 25, which is located outside the main body 10. The electromagnet 24 is housed in the receiving cavity 25. The receiving cavity 25 is provided with an air inlet 251 and an air outlet 252. The air inlet 251 is used to introduce a cooling medium, such as CDA (Clean Dry Air) or nitrogen, into the receiving cavity 25. The air outlet 252 is used to discharge the cooling medium from the receiving cavity 25, thereby cooling the electromagnet 24 and ensuring the stability of the magnetic field generated by the electromagnet 24.
[0053] In some embodiments, reference Figure 6 and Figure 7 The switching element 20 also includes an elastic guide 26, which connects the inner core 21' and the side wall of the cavity 11. Specifically, the elastic guide 26 is a thin sheet, which guides the movement of the inner core 21' through elastic deformation. Two elastic guides 26 are provided. The material used for the elastic guide 26 is glass fiber reinforced fluoroplastic.
[0054] In some embodiments, reference Figure 6 and Figure 7 The body 10 also has an exhaust port 17, which is located on the top wall of the cavity 11, for discharging gases from the cavity 11, such as gases produced during the reaction of sulfuric acid and hydrogen peroxide.
[0055] Example 3:
[0056] Figure 8 This is a schematic diagram of the substrate processing apparatus provided in Embodiment 3 of this application.
[0057] refer to Figure 8The substrate processing apparatus 1000 provided in this embodiment includes a chamber 200 and a spraying device. The chamber 200 is used to accommodate a substrate 300. The spraying device adopts the spraying device 100 in Embodiment 1 or Embodiment 2, and is used to supply a mixing liquid to the substrate 300 in the chamber 200. This embodiment achieves a better substrate processing effect by supplying the mixing liquid in the spraying device 100 for a predetermined mixing time to the surface of the substrate 300.
[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A spraying device, characterized in that, include: The body has an internal cavity, and the body also has a liquid inlet and a liquid outlet, wherein the liquid inlet is used to introduce at least two kinds of medicinal liquids into the cavity; The outlet is used to discharge the mixture of at least two medicinal solutions from the cavity; A switching element includes an inner core movably disposed in the cavity to open or close the liquid outlet; The spraying device is configured as follows: With the inner core closed at the outlet, at least two medicinal solutions are introduced into the cavity through the inlet to mix them and form a mixture; and When the mixing time of the mixture reaches the predetermined time, the inner core opens the outlet to discharge the mixture.
2. The spraying device according to claim 1, characterized in that, The cavity includes a first cavity and a second cavity. The inner core includes a movable end and a through portion. The movable end is located in the first cavity and is used to divide the first cavity into a first pressure regulating cavity and a second pressure regulating cavity. The first pressure regulating cavity is located above the second pressure regulating cavity. The first end of the through portion is connected to the movable end. The through portion extends from the first cavity into the second cavity. The second cavity is provided with the liquid inlet and the liquid outlet. The liquid inlet is located above the liquid outlet. The second end of the through portion is used to open or close the liquid outlet. The first pressure regulating chamber has a first opening on its side wall, and the second pressure regulating chamber has a second opening on its side wall. The spraying device is configured to adjust the pressure inside the first pressure regulating chamber and the second pressure regulating chamber by introducing or discharging fluid into the first opening and the second opening, respectively, so that the movable end drives the through portion to move relative to the liquid outlet.
3. The spraying device according to claim 2, characterized in that, The switching element further includes: An elastic seal is disposed on the outer periphery of the through portion, with a first end of the elastic seal connected to the movable end and a second end of the elastic seal connected to the bottom of the first cavity.
4. The spraying device according to claim 2, characterized in that, The body also has: A limiting member is disposed in the second pressure regulating chamber and located below the movable end, for abutting against the movable end.
5. The spraying device according to claim 2, characterized in that, The body also has: The cover has a first limiting part on the side facing the cavity, and a second limiting part on the movable end, wherein the first limiting part and the second limiting part match each other. The spray device is configured such that when the movable end of the inner core drives the through portion to move relative to the liquid outlet, the second limiting portion is always limited in the first limiting portion to prevent the inner core from rotating around the inner core axis.
6. The spraying device according to claim 1, characterized in that, The switching element further includes an electromagnet, and the inner core includes a permanent magnet; The spraying device is configured such that the inner core opens or closes the liquid outlet by means of the attraction or repulsion between the electromagnet and the permanent magnet.
7. The spraying device according to claim 6, characterized in that, It also includes a receiving cavity, in which the electromagnet is housed. The receiving cavity is provided with an air inlet and an air outlet. The air inlet is used to introduce a cooling medium into the receiving cavity, and the air outlet is used to discharge the cooling medium from the receiving cavity.
8. The spraying device according to claim 6, characterized in that, The switching element further includes an elastic guide that connects the inner core and the sidewall of the cavity.
9. The spraying device according to claim 1, characterized in that, The body also has: An exhaust port is used to discharge gas from the cavity.
10. The spraying device according to claim 1, characterized in that, The at least two solutions include sulfuric acid and hydrogen peroxide, and the inlet includes a first inlet and a second inlet for respectively introducing the sulfuric acid and the hydrogen peroxide.
11. A substrate processing apparatus, characterized in that, include: A chamber for accommodating the substrate; The spraying apparatus according to any one of claims 1 to 10 is used to supply the mixture to the substrate in the chamber.