On-chip temperature sensing method for integrated circuit heat distribution monitoring

By embedding a multi-layered microstructure thermal response unit and data assimilation algorithm into an integrated circuit, the problems of insufficient spatiotemporal resolution and excessive system overhead in the prior art are solved, realizing real-time monitoring of temperature field with high spatiotemporal resolution and improving the accuracy and adaptability of heat distribution monitoring.

CN122062809AActive Publication Date: 2026-05-19CHENGDU POLYTECHNIC
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Patent Information

Application Number
CN202610542595.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-04-23
Publication Date
2026-05-19
Estimated Expiration
2046-04-23

AI Technical Summary

Technical Problem

Existing on-chip temperature sensing methods face a dilemma in pursuing high spatial resolution and low system overhead. The mismatch between the sensing mechanism and the dynamic characteristics of the thermal field in the spatiotemporal dimension leads to insufficient spatiotemporal resolution, significant thermal blind zone and excessive system overhead.

Method used

A multi-layered on-chip temperature sensing method, including a basic sensing layer, a regional aggregation layer, and a global coordination layer, is adopted. The thermal time constant of the microstructure thermal response unit is used as a dynamic sensing parameter. Combined with pulse heating-cooling timing measurement and a data assimilation algorithm based on partial differential equations, high spatiotemporal resolution thermal distribution monitoring is achieved.

Benefits of technology

It achieves real-time monitoring of three-dimensional temperature fields with sub-millimeter spatial and microsecond temporal resolution, eliminating thermal blind spots, improving the accuracy and physical consistency of thermal field reconstruction, and controlling hardware resource consumption.

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Abstract

The invention discloses an on-chip temperature sensing method for monitoring heat distribution of an integrated circuit, belongs to the technical field of semiconductors, and aims to solve the problems of insufficient temporal-spatial resolution, large thermal field reconstruction deviation, high hardware overhead and the like in the prior art. According to the method, a microstructure thermal response unit composed of a high-thermal-conductivity metal layer and a low-thermal-capacity dielectric layer is embedded in a chip, a thermal time constant of the microstructure thermal response unit serves as a dynamic sensing parameter, and a three-level framework of a basic sensing layer, a regional polymerization layer and a global coordination layer is constructed; and in combination with pulse heating-cooling time sequence measurement, weighted fusion based on heat flow continuity constraint and a data assimilation algorithm based on partial differential equation constraint, high-precision real-time reconstruction of the three-dimensional temperature field is realized. According to the scheme, additional process masks are not needed, the area overhead is lower than 0.5%, and the submillimeter-level space resolution and the microsecond-level time resolution are both achieved.
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