Substrate working device and substrate working method

Abstract

The invention provides a substrate working apparatus and a substrate working method, which can restrain quality reduction of an electronic machine. The substrate working apparatus includes: a processor that sets a mounting angle at which a component is rotated only by a predetermined angle in a first direction with respect to a target angle; a mounting unit that mounts the component on the surface of the substrate at a mounting angle; and a screwing unit configured to rotate the screw in a second direction opposite to the first direction in a state in which the component mounted on the surface of the substrate is held by the mounting unit, and fasten the screw to the component from the back surface of the substrate.

Description

Technical Field

[0001] The technology disclosed in this specification relates to a substrate processing apparatus and a substrate processing method. Background Technology

[0002] In the manufacturing process of electronic machines, substrate assembly devices are sometimes used to fasten screws to parts mounted on the surface of a substrate. Patent Document 1 discloses a substrate assembly apparatus, which includes a first robot pressing a part placed on the surface of a substrate and a second robot fastening screws to the part from the back of the substrate.

[0003] [Existing technical documents] [Patent Literature] [Patent Document 1] Japanese Patent Application Publication No. 2019-209433 Summary of the Invention [The problem the invention aims to solve] When tightening screws on components, the tightening torque may cause the component to deviate from the target angle. If the component is not fixed at the target angle, the quality of the electronic device may be degraded.

[0004] The purpose of the technology disclosed in this specification is to suppress the degradation of the quality of electronic devices.

[0005] [Technical means to solve the problem] This specification discloses a substrate processing apparatus. The substrate processing apparatus includes: a processor that sets a mounting angle that rotates a component in a first direction by a predetermined angle relative to a target angle; a mounting unit that mounts the component on the surface of a substrate at the mounting angle; and a screwing unit that, while the component is held on the surface of the substrate by the mounting unit, rotates a screw in a second direction opposite to the first direction to fasten the screw to the component from the back of the substrate.

[0006] [The effects of the invention] According to the technology disclosed in this specification, the degradation of the quality of electronic devices is suppressed. Attached Figure Description

[0007] Figure 1 This is a perspective view of the substrate processing apparatus according to the embodiment.

[0008] Figure 2 This is a schematic diagram illustrating the mounting head of an embodiment.

[0009] Figure 3 This is a side view showing the nozzle and shaft of the embodiment.

[0010] Figure 4 This is a side view showing the nozzle of the embodiment.

[0011] Figure 5 This is a perspective view showing the internal structure of the suction nozzle in the embodiment.

[0012] Figure 6 This is a cross-sectional view showing the nozzle of the embodiment.

[0013] Figure 7 This is a cross-sectional view showing the nozzle of the embodiment.

[0014] Figure 8 This is a perspective view illustrating the installation position of the screw unit in the embodiment.

[0015] Figure 9 This is a perspective view showing the screw unit of the implementation method.

[0016] Figure 10 This is a top view showing the screw unit in the embodiment.

[0017] Figure 11 This is a perspective view of the working head of the implementation method.

[0018] Figure 12 This is a front view of the working head in the embodiment.

[0019] Figure 13 This is a cross-sectional view of the screwdriver tool used in the implementation method.

[0020] Figure 14 This is a diagram used to illustrate the function of the junction in the implementation method.

[0021] Figure 15 This is a perspective view showing the screw supply device and delivery mechanism of the embodiment.

[0022] Figure 16 This is a cross-sectional view of the main parts of the delivery mechanism in the embodiment.

[0023] Figure 17 This is a block diagram illustrating the controller used in the implementation method.

[0024] Figure 18 It is a diagram used to illustrate the behavior of parts during screw fastening operations.

[0025] Figure 19 It is a diagram used to illustrate the behavior of parts during screw fastening operations.

[0026] Figure 20 This is a flowchart illustrating a method for setting the operating conditions of a substrate working apparatus according to an embodiment.

[0027] Figure 21 This is a diagram illustrating the method for setting the operating conditions of the substrate working apparatus in the embodiment.

[0028] Figure 22 This is a diagram illustrating the method for setting the operating conditions of the substrate working apparatus in the embodiment.

[0029] Figure 23 This is a flowchart illustrating a substrate processing method for an implementation.

[0030] Figure 24 (A) to Figure 24 (D) is a diagram illustrating the substrate operation method of the embodiment.

[0031] Explanation of icon numbers 10: Installation Unit 20: Screw unit 21: Work Head 22: Mobile organization 23: Screw supply device 24: Sending organization 25: Sending path 30: Suction nozzle 31: Suction nozzle body 31A: Block part 31B, 3242: Bar section 31C: Fixed pin 31D: Sliding pin 31E, 36, 322: Coil springs 31F, 35A: Sleeves 31G, 33E, 34D: Internal flow path 32: Arm 32A: First Arm 32B: Second Arm 33, 321: Connecting structural components 33A: Casing Section 33B, 3241: Flange portion 33C: Guide slot 33D: Positioning pin 33F: Slot 34: Shaft 34A: Positioning groove 34B: Retaining Hole 34C: Concave 35: Connector Mechanism 35Aa, 64A: Small diameter portion 35Ab: Large diameter part 35B: Steel balls 37: Stop Retreat Department 38: Piping 39: Space 39A: First Space 39B: Second Space 40: Head support component 41: X-axis drive unit 41A, 42A: Lead screw 41B, 42B: Pulley mechanism 42: Y-axis drive unit 42C: Nut component 43: X-axis guide section 43A: X-beam 43B: X-line guide rail 43C, 74A: Linear slider 44: Y-axis guide section 44A: Y-linear guide 50: Tools Department 51: Z-axis drive unit 52, 160: θZ drive unit 53: Compressed Air Section 60: Handover Department 61: Maintaining Department 62: Drive Unit 62A: Bracket 63: Connecting part 64: Maintenance Room 65: Air passage 71: Installation Department 72: Movable plate 73: Z-screw 73A: Support section 74: Z-linear guide 80: Screwdriver tools 81: Screwdriver 82: Holding tube 82A: Open at the top 82B: Convex Rib 82C: Open at the bottom 83: Shell section 83A: Connector 84: Spring Component 85: Spring Bracket 91: Nozzle part 92: Adsorption Drive Unit 92A: Lifting Drive Unit 92B: Horizontal drive unit 93: Entrance retention section 94: Switching valve 95: Suction nozzle retaining component 100: Substrate processing equipment 102: Setup Department 103: Substrate transport device 104: Substrate Holding Device 106: Install head 107: Install head moving device 107a: X-axis guide rail 107b: Y-axis guide rail 109: X-Drive Department 110: Y-Drive Unit 111: Parts Identification Device 112: Suction nozzle receiving component 113: Camera 114: Base Frame 114A: Upper frame 114B: Lower frame 114C: Both ends 114D: Central Division 120: Controller 120A: Processor 120B: Main Memory 120C: Storage 120D: Interface 121: Parts Control Department 122: Substrate Control Unit 123: Installation Control Department 124: Screw fastening control unit 125: Action Condition Setting Department 126: Production Process 130: Display device 131: Input device 140: Suction nozzle moving device 150: Z-Drive Unit 200: Parts supply device 321A: First connecting structural component 321B: Second connecting structural component 322A: First helical spring 322B: Second helical spring 323, 325, SC: Screws 324: Slider 324A: First slider 324B: Second slider 326: Guiding Component 326A: First guiding component 326B: Second guiding component 370: Spring Ring A1: retreat position A2: Handover Location B1: Screw exit position B2: Delivery Location C: Parts CH: Screw hole ES: Screw setting position FL: Imaginary frame P: Substrate PJa: Parts Supply Location PJb: Work Location SA1~SA7, SB1~SB4: Steps TH: Screw insertion hole X, Y, Z: Axial directions θm: Mounting angle θr: Target angle Detailed Implementation Hereinafter, embodiments will be described with reference to the accompanying drawings. In the embodiments, an XYZ orthogonal coordinate system is set for the substrate working apparatus 100, and the positional relationships of each part will be described with reference to the XYZ orthogonal coordinate system. The direction parallel to the X-axis in the specified plane is defined as the X-axis direction. The direction parallel to the Y-axis orthogonal to the X-axis in the specified plane is defined as the Y-axis direction. The direction parallel to the Z-axis orthogonal to both the X-axis and the Y-axis is defined as the Z-axis direction. The rotation or tilt direction centered on the X-axis is defined as the θX direction. The rotation or tilt direction centered on the Y-axis is defined as the θY direction. The rotation or tilt direction centered on the Z-axis is defined as the θZ direction. The plane containing the X-axis and Y-axis is defined as the XY plane. The plane containing the Y-axis and Z-axis is defined as the YZ plane. The plane containing the Z-axis and X-axis is defined as the ZX plane. The specified plane is the XY plane. The Z-axis is orthogonal to the specified plane. In the embodiments, the specified plane is parallel to the horizontal plane. The Z-axis direction is the up-down direction. Alternatively, the specified plane may be tilted relative to the horizontal plane.

[0032] [Substrate processing equipment] Figure 1 This is a perspective view showing the substrate processing apparatus 100 according to the embodiment. Figure 1 As shown, the substrate processing apparatus 100 includes: a base frame 114; a component supply device 200 for supplying component C; a setting unit 102 for setting the component supply device 200; a substrate conveying device 103 for conveying substrate P to the working position PJb; a substrate holding device 104 for holding the substrate P conveyed to the working position PJb; a mounting unit 10 disposed above the substrate holding device 104; a screwing unit 20 disposed below the substrate holding device 104; a component identification device 111 for identifying component C; and a suction nozzle receiving member 112 for receiving a suction nozzle 30. The mounting unit 10 mounts component C onto the surface of the substrate P held by the substrate holding device 104. The screwing unit 20 fastens screws SC to component C mounted on the surface of the substrate P from the back of the substrate P.

[0033] The component supply device 200 includes a feeder that sequentially supplies multiple components C. The mounting unit 102 includes a feeder stand for mounting the feeders. The mounting unit 102, substrate conveying device 103, mounting unit 10, component identification device 111, and nozzle receiving member 112 are each supported by a base frame 114. A component supply position PJa is defined for the component supply device 200. The component supply position PJa is the position where component supply processing of components C from the component supply device 200 to the mounting unit 10 is performed.

[0034] The substrate transport device 103 transports the substrate P to the working position PJb. The working position PJb is the position where the mounting operation of the component C on the substrate P and the tightening operation of the screw SC for the component C are performed. The substrate transport device 103 has a transport belt for transporting the substrate P. A pair of transport belts are provided along the Y-axis direction. One transport belt supports the +Y side end of the back surface of the substrate P. The other transport belt supports the -Y side end of the back surface of the substrate P. The transport belts include seamless belts. By rotating the transport belts while supporting the substrate P, the substrate P is transported along the X-axis direction.

[0035] The substrate holding device 104 holds the end of the substrate P in the transport path of the substrate transport device 103. The substrate holding device 104 holds the substrate P in the working position PJb. The position of the substrate P held by the substrate holding device 104 is fixed in the working position PJb. The substrate holding device 104 includes a clamping mechanism that clamps the end of the substrate P. The substrate holding device 104 holds the substrate P by clamping it from both ends in the Y-axis direction. The substrate holding device 104 holds the substrate P such that its surface and back surface are parallel to the XY plane, respectively. The surface of the substrate P faces upwards. The back surface of the substrate P faces downwards. The normal direction of the surface of the substrate P is the Z-axis direction.

[0036] The mounting unit 10 includes: a mounting head 106 including a suction nozzle 30; a mounting head moving device 107 capable of moving the mounting head 106; and a suction nozzle moving device 140 capable of moving the suction nozzle 30.

[0037] The mounting head 106 mounts part C onto the surface of substrate P held by substrate holding device 104. The suction nozzle 30 releasably holds part C. The mounting head 106 is movable in the XY plane including part supply position PJb and working position PJb. The mounting head 106 uses the suction nozzle 30 to hold part C supplied from part supply device 200 and mounts it onto the surface of substrate P positioned at working position PJb.

[0038] The mounting head moving device 107 moves the mounting head 106 above the substrate P, the part supply device 200, the part identification device 111, and the nozzle receiving member 112, which are respectively arranged at the working position PJb. The mounting head moving device 107 is capable of moving the mounting head 106 in the XY plane that includes the part supply position PJa and the working position PJb.

[0039] The mounting head moving device 107 includes an X-axis guide rail 107a, a Y-axis guide rail 107b, an X-drive unit 109, and a Y-drive unit 110.

[0040] The mounting head 106 is supported on the X-axis guide rail 107a. The X-axis guide rail 107a guides the mounting head 106 along the X-axis direction. The X-drive unit 109 includes an actuator such as a motor. The X-drive unit 109 generates power to move the mounting head 106, supported on the X-axis guide rail 107a, along the X-axis direction. Through the operation of the X-drive unit 109, the mounting head 106 moves along the X-axis direction while being guided by the X-axis guide rail 107a.

[0041] X-axis guide rail 107a is supported on Y-axis guide rail 107b. Y-axis guide rail 107b guides X-axis guide rail 107a along the Y-axis direction. Y-drive unit 110 includes an actuator such as a motor. Y-drive unit 110 generates power for moving mounting head 106 along the Y-axis direction. Y-drive unit 110 also generates power for moving X-axis guide rail 107a, supported on Y-axis guide rail 107b, along the Y-axis direction. Through the operation of Y-drive unit 110, X-axis guide rail 107a moves along the Y-axis direction while being guided by Y-axis guide rail 107b. As X-axis guide rail 107a moves along the Y-axis direction, mounting head 106 moves along the Y-axis direction.

[0042] The part recognition device 111 detects the three-dimensional shape of the part C held by the suction nozzle 30. The part recognition device 111 detects the three-dimensional shape of the part C held by the suction nozzle 30 based on a phase-shifting method. The part recognition device 111 includes an emission device that emits patterned light of varying brightness and an imaging device that captures an image of the part C onto which the patterned light is projected. The part recognition device 111 calculates the three-dimensional shape of the part C based on the image data of the part C captured by the imaging device.

[0043] Component C, mounted on substrate P, is secured to substrate P by screws SC. Component C has screw holes CH into which screws SC are inserted. Three-dimensional data representing the three-dimensional shape of component C detected by component identification device 111 includes the three-dimensional data of the screw holes CH of component C. Screws SC are inserted into the screw holes CH of component C, which is mounted on the surface of substrate P via mounting unit 10, using screw fastening unit 20.

[0044] The nozzle receiving member 112 houses multiple nozzles 30. The mounting head 106 is capable of replacing the nozzles 30. The mounting head 106 replaces the nozzles 30 within the nozzle receiving member 112. The types of nozzles 30 housed in the nozzle receiving member 112 are different. The nozzles 30 are replaced according to the type of component C mounted on the substrate P. The nozzles 30 are mounted to the mounting head 106 according to the type of component C mounted on the substrate P. The type of nozzle 30 includes its shape and size. The type of component C includes its shape and size.

[0045] [Installation Unit] Figure 2 This is a schematic diagram illustrating the mounting head 106 of the embodiment. The mounting head 106 has a suction nozzle 30 that releasably holds the part C. The suction nozzle 30 holds the part C supplied from the part supply device 200 in the part supply position PJa. After holding the part C in the part supply position PJa, the suction nozzle 30 conveys it to the working position PJb and mounts it on the surface of the substrate P. After mounting the part C on the substrate P in the working position PJb and tightening the screw SC on the part C, the suction nozzle 30 releases the part C. Thus, the part C is fixed to the substrate P by the screw SC.

[0046] The mounting head 106 has a nozzle moving device 140 capable of moving the nozzle 30 along the Z-axis and θZ-axis. The nozzle 30 is movable relative to the mounting head 106 along the Z-axis and θZ-axis. The nozzle moving device 140 includes a Z-drive unit 150 for moving the nozzle 30 along the Z-axis and an θZ-drive unit 160 for rotating the nozzle 30 in the θZ-axis. The Z-drive unit 150 includes an actuator such as a motor. The Z-drive unit 150 generates power for moving the nozzle 30 along the Z-axis. The θZ-drive unit 160 includes an actuator such as a motor. The θZ-drive unit 160 generates power for moving (rotating) the nozzle 30 in the θZ-axis.

[0047] The suction nozzle 30, via the mounting head moving device 107 and the suction nozzle moving device 140, can move along four directions: the X-axis, Y-axis, Z-axis, and θZ-axis. Alternatively, the suction nozzle 30 can also move along six directions: the X-axis, Y-axis, Z-axis, θX-axis, θY-axis, and θZ-axis.

[0048] A camera 113 is provided in the mounting head 106. The camera 113 captures images of the surface of the substrate P from above. The camera 113 also captures images of the part C mounted on the surface of the substrate P from above.

[0049] Figure 3 This is a side view showing the suction nozzle 30 and shaft 34 of the embodiment. Figure 4 This is a side view showing the nozzle 30 of the embodiment. Figure 5This is a perspective view showing the internal structure of the suction nozzle 30 in the embodiment. Figure 6 This is a cross-sectional view of the suction nozzle 30 according to the embodiment. Figure 7 This is a cross-sectional view of the suction nozzle 30 according to the embodiment. Figure 3 This is a side view of the nozzle 30 and shaft 34 viewed from the -Y side. Figure 4 This is a side view of the nozzle 30 viewed from the -X side. Figure 5 This is a perspective view of the nozzle 30 viewed from the -X side. Figure 6 This is a cross-sectional view of the suction nozzle 30, which is parallel to the YZ plane. Figure 7 This is a cross-sectional view of the nozzle 30, which is parallel to the ZX plane.

[0050] In this embodiment, the suction nozzle 30 is a chuck suction nozzle that holds the part C. The suction nozzle 30 is mounted on the lower end of the shaft 34. The shaft 34 extends along the Z-axis. The central axis of the shaft 34 is parallel to the Z-axis. The suction nozzle 30 is detachable relative to the shaft 34. The shaft 34 is movable along the Z-axis and the θZ-direction. The Z-drive unit 150 moves the shaft 34 along the Z-axis. The θZ-drive unit 160 moves (rotates) the shaft 34 along the θZ-direction. The suction nozzle moving device 140 moves the suction nozzle 30 along the Z-axis and the θZ-direction by moving the shaft 34 along the Z-axis and the θZ-direction.

[0051] The suction nozzle 30 includes a suction nozzle body 31, an arm 32 connected to the suction nozzle body 31, and a connecting member 33 connected to the suction nozzle body 31. The suction nozzle 30 is attached to and detached from the shaft 34 via a connector mechanism 35. As described above, a plurality of suction nozzles 30 are housed in a suction nozzle housing member 112. The suction nozzles 30 mounted on the shaft 34 are replaced according to the type of part C mounted on the substrate P. The suction nozzles 30 are mounted on the shaft 34 via the connector mechanism 35 according to the type of part C mounted on the substrate P.

[0052] The nozzle body 31 has a block portion 31A and a rod portion 31B. The rod portion 31B protrudes upward from the upper surface of the block portion 31A. The block portion 31A and the rod portion 31B are fixed together by a retaining pin 31C.

[0053] A pair of arms 32 are provided. The pair of arms 32 hold the part C in place. The arms 32 include a first arm 32A and a second arm 32B disposed on the +X side of the first arm 32A. The lower ends of the first arm 32A and the second arm 32B are disposed below the lower surface of the block portion 31A. The first arm 32A and the second arm 32B are movable in directions toward each other and in directions away from each other. The arms 32 are connected to the block portion 31A of the suction nozzle body 31 via a connecting member 321 and a coil spring 322.

[0054] The connecting member 321 is fixed to the arm 32 by screws 323. A pair of connecting members 321 are provided in such a way that they correspond to a pair of arms 32 respectively. The connecting member 321 includes a first connecting member 321A fixed to the first arm 32A and a second connecting member 321B fixed to the second arm 32B.

[0055] A helical spring 322 is disposed between the block portion 31A and the connecting member 321. A pair of helical springs 322 are provided, each corresponding to a pair of connecting members 321. The helical springs 322 include a first helical spring 322A disposed between the block portion 31A and the first connecting member 321A, and a second helical spring 322B disposed between the block portion 31A and the second connecting member 321B.

[0056] A pair of sliders 324 are disposed in the block portion 31A. At least a portion of the sliders 324 is disposed in the internal space of the block portion 31A. A sleeve 31F is disposed in the internal space of the block portion 31A. The sliders 324 include a flange portion 3241 that slides on the inner surface of the sleeve 31F and a rod portion 3242 that protrudes from the flange portion 3241. The sliders 324 are fixed to the connecting member 321 by screws 325. A pair of sliders 324 are provided in such a way that they correspond to a pair of connecting members 321 respectively. The sliders 324 include a first slider 324A fixed to the first connecting member 321A and a second slider 324B fixed to the second connecting member 321B. The first slider 324A and the second slider 324B are movable in a direction of approaching each other and in a direction of moving away from each other. A first helical spring 322A and a second helical spring 322B generate an elastic force to move the first slider 324A and the second slider 324B away from each other.

[0057] A pair of guide members 326 are fixed to the block portion 31A. The guide members 326 guide the slider 324 along the X-axis direction. The guide members 326 have guide holes for the rod portion 3242 of the slider 324 to be inserted. The guide members 326 include a first guide member 326A for guiding the first slider 324A and a second guide member 326B for guiding the second slider 324B.

[0058] Connecting member 33 is connected to rod 31B. For example... Figure 6 and Figure 7 As shown, the connecting member 33 is inserted into the recess 34C located at the lower part of the shaft 34. The recess 34C is formed such that it is recessed upward from the lower surface of the shaft 34. The connecting member 33 is connected to the shaft 34. The connecting member 33 connects the nozzle body 31 and the shaft 34.

[0059] The connecting member 33 has a sleeve portion 33A and a flange portion 33B. The flange portion 33B is disposed in the middle portion of the sleeve portion 33A in the Z-axis direction. The flange portion 33B protrudes from the outer surface of the sleeve portion 33A toward the outside of the sleeve portion 33A. The rod portion 31B is inserted into the inside of the sleeve portion 33A.

[0060] The connecting member 33 movably supports the rod portion 31B. The connecting member 33 and the rod portion 31B are movable relative to each other along the Z-axis. The rod portion 31B is movable relative to the connecting member 33 along the Z-axis. A sliding pin 31D is provided in the rod portion 31B. The sliding pin 31D is fixed to the rod portion 31B. The sliding pin 31D protrudes from the outer surface of the rod portion 31B toward the outside of the rod portion 31B. A guide groove 33C is provided in the sleeve portion 33A. The guide groove 33C extends along the Z-axis. At least a portion of the sliding pin 31D is disposed inside the guide groove 33C. The guide groove 33C guides the sliding pin 31D along the Z-axis. The nozzle body 31 can move relative to the connecting member 33 along the Z-axis while being guided by the sliding pin 31D. As the nozzle body 31 moves relative to the connecting member 33 along the Z-axis, the lower surface of the sleeve portion 33A and the upper surface of the block portion 31A approach or move away from each other.

[0061] The guide groove 33C defines the movable range of the nozzle body 31 relative to the connecting member 33. The nozzle body 31 is positioned at the lower end of its movable range by contacting the upper end of the guide groove 33C via the sliding pin 31D. The nozzle body 31 is positioned at the upper end of its movable range by contacting the lower end of the guide groove 33C via the sliding pin 31D.

[0062] A helical spring 31E is disposed on the small-diameter portion of the upper part of the rod 31B. The helical spring 31E is disposed around the small-diameter portion of the upper part of the rod 31B. The lower end of the helical spring 31E contacts the upper surface of the large-diameter portion of the rod 31B, which is located at the lower part of the small-diameter portion. The upper end of the helical spring 31E contacts the support surface provided on the inner surface of the connecting member 33. The helical spring 31E generates an elastic force, causing the suction nozzle body 31 to move downward relative to the connecting member 33. The helical spring 31E exerts a force on the suction nozzle body 31 downward relative to the connecting member 33.

[0063] like Figure 7As shown, an internal flow path 34D is formed within the shaft 34. An internal flow path 33E is formed within the connecting member 33. A pipe 38 is disposed inside the rod portion 31B. The lower end of the pipe 38 is fixed to the block portion 31A. The lower end of the pipe 38 is connected to the internal flow path 31G of the block portion 31A. The internal flow path 31G is connected to the space 39 between the flange portion 3241 and the guide member 326. The space 39 includes a first space 39A between the flange portion 3241 of the first slider 324A and the first guide member 326A, and a second space 39B between the flange portion 3241 of the second slider 324B and the second guide member 326B.

[0064] Air is supplied to the internal flow path 34D of the shaft 34 via an air supply source (not shown), bringing the first arm 32A and the second arm 32B closer together. The air supplied to the internal flow path 34D via the air supply source (not shown) is then supplied to the internal flow path 31G of the block portion 31A via the internal flow path 33E of the connecting member 33 and the internal flow path of the pipe 38. The air supplied to the internal flow path 31G is then supplied to the space 39 between the flange portion 3241 and the guide member 326. By supplying air to the space 39, the pressure in the space 39 increases. Figure 7 In the process, as the pressure in the first space 39A increases, the first slider 324A overcomes the elastic force of the first helical spring 322A and moves in the +X direction. As the pressure in the second space 39B increases, the second slider 324B overcomes the elastic force of the second helical spring 322B and moves in the -X direction. That is, as the pressure in space 39 increases, the first slider 324A and the second slider 324B approach each other. As the first slider 324A and the second slider 324B approach each other, the first arm 32A and the second arm 32B also approach each other.

[0065] By stopping the air supply from the air supply source, the first arm 32A and the second arm 32B move away from each other. By stopping the air supply from the air supply source, the pressure in space 39 decreases. Figure 7 In the first space 39A, as the pressure decreases, the first connecting structural member 321A moves in the -X direction by means of the elastic force of the first helical spring 322A. As the pressure decreases in the second space 39B, the second connecting structural member 321B moves in the +X direction by means of the elastic force of the second helical spring 322B. That is, as the pressure decreases in space 39, the first connecting structural member 321A and the second connecting structural member 321B move further apart. As the first connecting structural member 321A and the second connecting structural member 321B move further apart, the first arm 32A and the second arm 32B also move further apart.

[0066] With part C positioned between the first arm 32A and the second arm 32B, part C is held in arm 32 by the first arm 32A and the second arm 32B approaching each other. As the first arm 32A and the second arm 32B move away from each other, part C held in arm 32 is released from arm 32.

[0067] When part C is mounted on the surface of substrate P, with part C held by arm 32 facing the surface of substrate P, shaft 34 moves in the -Z direction. By moving shaft 34 in the -Z direction, part C held by arm 32 is pressed against the surface of substrate P. When part C held by arm 32 is pressed against the surface of substrate P, nozzle body 31 moves relative to connecting member 33 in the Z-axis direction, so that the upper surface of nozzle body 31 approaches the lower surface of sleeve portion 33A. Nozzle body 31 moves against the elastic force of helical spring 31E to approach connecting member 33. When part C is pressed against the surface of substrate P, nozzle body 31 moves relative to connecting member 33 in the Z-axis direction, thus suppressing impact application or excessive stress acting on part C and substrate P.

[0068] The connector mechanism 35 connects the nozzle 30 to the connecting member 33 and the shaft 34. The connector mechanism 35 has a sleeve 35A and a steel ball 35B. The sleeve 35A is disposed around the lower part of the shaft 34. The steel ball 35B is held within a retaining hole 34B provided in the sleeve 35A. The retaining hole 34B is formed such that it penetrates the inner surface of the recess 34C and the outer surface of the shaft 34. The steel ball 35B is disposed inside the sleeve 35A. A groove 33F is provided in the upper part of the connecting member 33. By inserting the steel ball 35B into the groove 33F of the connecting member 33, the connecting member 33 is installed to the shaft 34 via the connector mechanism 35.

[0069] The sleeve 35A and the shaft 34 are movable relative to each other along the Z-axis. The sleeve 35A is movable relative to the shaft 34 in the Z-axis direction. The inner surface of the sleeve 35A includes a small-diameter portion 35Aa and a large-diameter portion 35Ab disposed below the small-diameter portion 35Aa. By moving the sleeve 35A downward relative to the shaft 34, the small-diameter portion 35Aa is positioned radially outward of the steel ball 35B. The small-diameter portion 35Aa pushes the steel ball 35B radially inward, causing the steel ball 35B held in the retaining hole 34B to move to the inside of the recess 34C. The steel ball 35B, pushed radially inward by the small-diameter portion 35Aa, is inserted into the groove 33F of the connecting member 33. The small-diameter portion 35Aa presses the steel ball 35B radially inward, preventing the steel ball 35B inserted into the groove 33F from dislodging radially outward. Thus, the connecting member 33 is mounted on the shaft 34.

[0070] A helical spring 36 is disposed above the sleeve 35A. The helical spring 36 is disposed around the shaft 34. A retaining portion 37 is provided above the helical spring 36. The retaining portion 37 is annular. The retaining portion 37 is disposed around the shaft 34. A spring ring 370 is disposed above the retaining portion 37. The spring ring 370 is embedded in a groove provided on the outer surface of the shaft 34. The position of the retaining portion 37 on the outer surface of the shaft 34 is fixed by the spring ring 370. The lower end of the helical spring 36 contacts the upper surface of the sleeve 35A. The upper end of the helical spring 36 contacts the lower surface of the retaining portion 37. The helical spring 36 generates an elastic force to move the sleeve 35A downward relative to the shaft 34. The helical spring 36 applies a force to the sleeve 35A downward relative to the shaft 34.

[0071] When the connecting member 33 of the suction nozzle 30 is installed onto the shaft 34, the mounting head 106 moves above the suction nozzle receiving member 112. After the mounting head 106 moves above the suction nozzle receiving member 112, the shaft 34 descends to approach the suction nozzle 30 housed in the suction nozzle receiving member 112. As the shaft 34 descends, the upper part of the connecting member 33 is inserted into the recess 34C of the shaft 34. When the upper part of the connecting member 33 is inserted into the recess 34C of the shaft 34, the steel ball 35B is inserted into the groove 33F provided on the upper part of the connecting member 33. Since the sleeve 35A is subjected to downward force by the helical spring 36, after the steel ball 35B is inserted into the groove 33F, the small diameter portion 35Aa of the sleeve 35A is positioned around the retaining hole 34B. The small diameter portion 35Aa prevents the steel ball 35B from dislodging from the groove 33F. Thus, the connecting member 33 is installed onto the shaft 34 via the joint mechanism 35.

[0072] A locating pin 33D is provided on the upper part of the connecting member 33. The locating pin 33D is fixed to the upper part of the sleeve portion 33A. The locating pin 33D protrudes from the outer surface of the sleeve portion 33A toward the outside of the sleeve portion 33A. A locating groove 34A is formed at the lower end of the recess 34C of the shaft 34. The connecting member 33 is installed to the shaft 34 by inserting the locating pin 33D into the locating groove 34A. By inserting the locating pin 33D into the locating groove 34A, the connecting member 33 and the shaft 34 are positioned, at least in the θZ direction. By positioning the locating pin 33D in the locating groove 34A, the shaft 34 and the suction nozzle 30 are positioned in the rotational direction centered on the Z-axis. By positioning the locating pin 33D in the locating groove 34A, the relative rotation of the shaft 34 and the suction nozzle 30 in the rotational direction centered on the Z-axis is suppressed.

[0073] When the connecting member 33 of the suction nozzle 30 is disassembled from the shaft 34, the sleeve 35A moves upward relative to the shaft 34. As the sleeve 35A moves upward, its large-diameter portion 35Ab is positioned around the retaining hole 34B. By positioning the large-diameter portion 35Ab around the retaining hole 34B, the steel ball 35B can be dislodged from the groove 33F. With the steel ball 35B dislodged from the groove 33F, the connecting member 33 is disassembled from the shaft 34.

[0074] [Screw unit] The screw unit 20 of the implementation method will be described next. Figure 8 This is a perspective view illustrating the installation position of the screw unit 20 in the embodiment.

[0075] The screw unit 20 is supported on the base frame 114. The screw unit 20 is disposed below the substrate transport device 103 and the substrate holding device 104. The base frame 114 includes an upper frame 114A and a lower frame 114B. The upper frame 114A is disposed above the lower frame 114B. The upper frame 114A is disposed at both ends of the lower frame 114B in the X-axis direction. The upper frame 114A is a wall-like structure along the YZ plane. The upper frame 114A has a gate-shaped shape with openings that serve as the transport inlet and outlet for the substrate P. Figure 1 As shown, the mounting unit 10 is supported on the upper frame 114A. The lower frame 114B has two ends 114C in the X-axis direction and a central portion 114D between the two ends 114C. The substrate transport device 103 and the substrate holding device 104 are each arranged to span over the two ends 114C via the central portion 114D. The fastening unit 20 is disposed in the central portion 114D. The fastening unit 20 is disposed below the working position PJb of the substrate P. The fastening unit 20 fastens the screw SC to the part C mounted on the surface of the substrate P from below the substrate P held by the substrate holding device 104.

[0076] Figure 9 This is a perspective view showing the screw unit 20 of the embodiment. Figure 10 This is a top view showing the screw unit 20 of the embodiment.

[0077] The screw fastening unit 20 includes a working head 21, a moving mechanism 22 for moving the working head 21 to the screw mounting position, a screw supply device 23, and a feeding mechanism 24 for feeding the screw SC to the working head 21 via a feeding path 25 (refer to the two-point chain line). The screw mounting position is the position where the screw hole CH of part C is located. The working head 21 uses a screwdriver tool 80 to fasten the screw SC to part C. The working head 21 holds the screwdriver tool 80. The screwdriver tool 80 is held in the working head 21 in a manner facing the back side of the substrate P held by the substrate holding device 104. The working head 21 holds the screwdriver tool 80 with its front end facing the back side of the substrate P. The screw SC is disposed at the front end of the screwdriver tool 80. The screw fastening unit 20 fastens the screw SC disposed at the front end of the screwdriver tool 80 from the back side of the substrate P to part C.

[0078] <Mobile Organization> The moving mechanism 22 can move the working head 21 along a direction parallel to the XY plane on the back side of the substrate P. The moving mechanism 22 moves the working head 21 so that the XY coordinates of the screwdriver tool 80 are aligned with the XY coordinates of the screw hole CH of the part C, i.e., the screw installation position.

[0079] In this embodiment, the moving mechanism 22 is an orthogonal robot (XY robot) that moves the working head 21 in the XY plane. The moving mechanism 22 has a head support member 40 that supports the working head 21, an X-axis drive unit 41 that moves the working head 21 along the X-axis direction, a Y-axis drive unit 42 that moves the working head 21 along the Y-axis direction, an X-axis guide unit 43 that guides the head support member 40 along the X-axis direction, and a Y-axis guide unit 44 that guides the X-axis guide unit 43 along the Y-axis direction.

[0080] The head support member 40 supports the working head 21. While supporting the working head 21, the head support member 40 can move along both the X-axis and Y-axis directions. The head support member 40 is supported by the X-axis guide portion 43.

[0081] The X-axis guide portion 43 has an X-beam 43A and an X-linear guide rail 43B. The X-beam 43A is long in the X-axis direction. The +X and -X ends of the X-beam 43A are supported by the Y-axis guide portion 44. The X-linear guide rail 43B is a guide rail fixed to the X-beam 43A and extends linearly in the X-axis direction. A linear slider 43C fixed to the head support member 40 is slidably mounted on the X-linear guide rail 43B. The head support member 40 is guided in the X-axis direction by the X-linear guide rail 43B.

[0082] The X-axis drive unit 41 generates power to move the head support member 40 along the X-axis direction. The X-axis drive unit 41 is an actuator, and in this embodiment includes an electric motor. The power generated by the X-axis drive unit 41 is transmitted to the head support member 40 via a power transmission mechanism. Figure 9 and Figure 10 In the example shown, the power transmission mechanism is a lead screw 41A. The lead screw 41A extends linearly along the X-axis. The +X and -X ends of the lead screw 41A are rotatably supported by an X-beam 43A. An X-axis drive unit 41 is located at the -X end of the X-beam 43A, causing the lead screw 41A, which is connected to the output shaft via a pulley mechanism 41B, to rotate. A nut member (not shown) fixed to the head support member 40 is mounted on the lead screw 41A. The nut member engaging with the lead screw 41A is fed along the X-axis. As a result, the head support member 40 moves along the X-axis while being guided by the X-axis guide unit 43, due to the operation of the X-axis drive unit 41. The working head 21 moves along the X-axis due to the movement of the head support member 40. The position of the working head 21 in the X-axis direction is determined by the driving amount of the X-axis drive unit 41.

[0083] The Y-axis guide section 44 has a pair of Y-linear guides 44A. The pair of Y-linear guides 44A are guides extending linearly along the Y-axis direction. The pair of Y-linear guides 44A respectively support the +X side end and the -X side end of the X-beam 43A. Linear sliders (not shown) fixed to the X-beam 43A are slidably mounted on each of the pair of Y-linear guides 44A. The X-beam 43A is guided along the Y-axis direction by the pair of Y-linear guides 44A.

[0084] The Y-axis drive unit 42 generates power to move the head support member 40 along the Y-axis direction. The Y-axis drive unit 42 is an actuator, and in this embodiment includes an electric motor. The power generated by the Y-axis drive unit 42 is transmitted to the X-beam 43A via a power transmission mechanism. Figure 9 and Figure 10In the example shown, the power transmission mechanism includes a lead screw 42A and a pulley mechanism 42B. The lead screw 42A is disposed between a pair of Y-linear guides 44A and extends linearly along the Y-axis. The +Y and -Y ends of the lead screw 42A are rotatably supported by supports (not shown) fixed to the base frame 114. The Y-axis drive unit 42 is supported on the base frame 114 and connected to the +Y end of the lead screw 42A via the pulley mechanism 42B. A nut member 42C fixed to the X-beam 43A is mounted on the lead screw 42A. By rotating the lead screw 42A, the nut member 42C, which engages with the lead screw 42A, is fed along the Y-axis. As a result, by operating the Y-axis drive unit 42, the X-beam 43A moves along the Y-axis while being guided by the Y-axis guide 44. The head support member 40 moves along the X-axis while being guided by the X-axis guide 43. The working head 21 moves along the Y-axis direction by moving the X-beam 43A. The position of the working head 21 in the Y-axis direction is determined by the driving amount of the Y-axis drive unit 42.

[0085] <Workhead> Figure 11 This is a perspective view of the working head 21 in the embodiment. Figure 12 This is a front view showing the working head 21 of the implementation method.

[0086] The working head 21 is supported by the head support member 40. The working head 21 has a tool part 50 with a fastening screw SC, a junction part 60, a Z-axis drive part 51, a θZ drive part 52, and a pneumatic part 53. The tool part 50, the junction part 60, the Z-axis drive part 51, the θZ drive part 52, and the pneumatic part 53 are supported by the head support member 40.

[0087] The tool section 50 has a mounting section 71 for attaching and detaching a screwdriver 80. The tool section 50 holds the screwdriver 80 in the mounting section 71. The tool section 50 holds the screwdriver 80 with its front end facing upwards. The mounting section 71 detachably holds the bottom end of the screwdriver 80. The tool section 50 can accommodate various screwdrivers 80 with different front end shapes. The tool section 50 is mounted on a movable plate 72.

[0088] The θZ drive unit 52 generates power to rotate the screwdriver tool 80 in the θZ direction. The θZ drive unit 52 is an actuator, and in this embodiment includes an electric motor. The central axis of the screwdriver tool 80 is parallel to the Z-axis. The θZ drive unit 52 rotates the screwdriver tool 80, which is mounted on the mounting portion 71, in the θZ direction around its central axis. The θZ drive unit 52 is located on the lower surface of the movable plate 72. The output shaft of the θZ drive unit 52 is connected to the mounting portion 71. The θZ drive unit 52 rotates the screwdriver tool 80 in the θZ direction by rotating its output shaft. By rotating the screwdriver tool 80, on which the screw SC is mounted, in the θZ direction, the screw SC is tightened on the part C.

[0089] The Z-axis drive unit 51 generates power to move the screwdriver tool 80 in the Z-axis direction. The Z-axis drive unit 51 is an actuator, and in this embodiment includes an electric motor. The Z-axis drive unit 51 is fixed to the head support member 40. The output shaft of the Z-axis drive unit 51 is connected to the Z-screw 73. The Z-screw 73 extends linearly along the Z-axis direction. The +Z and -Z sides of the Z-screw 73 are rotatably supported by a support 73A fixed to the head support member 40. A nut member fixed to a movable plate 72 is mounted on the Z-screw 73. Rotation of the Z-screw 73 feeds the movable plate 72 in the Z-axis direction. The movable plate 72 is provided with a linear slider 74A. The linear slider 74A is slidably mounted on a Z-linear guide rail 74 fixed to the head support member 40. The Z-linear guide rail 74 is a guide rail extending linearly along the Z-axis direction. The tool section 50 (screwdriver 80), the θZ drive section 52, and the movable plate 72 each move along the Z-axis linear guide 74 in the Z-axis direction. The Z-axis position of the screwdriver 80 is determined by the driving amount of the Z-axis drive section 51. The Z-axis drive section 51 moves the screwdriver 80 in the vertical direction. The Z-axis drive section 51 moves the screwdriver 80 to a position where the front end of the screwdriver 80 is positioned lower than the junction 60 and higher than the junction 60.

[0090] Screwdriver Tools Figure 13This is a cross-sectional view of a screwdriver tool 80 according to an embodiment. The screwdriver tool 80 has a screwdriver 81 and a retaining sleeve 82 disposed around the screwdriver 81. The screwdriver 81 is disposed inside the retaining sleeve 82. An upper opening 82A is provided at the upper end of the retaining sleeve 82. On the inner surface of the retaining sleeve 82, which is lower than the upper end, an annular rib 82B is formed, protruding toward the center of the retaining sleeve 82. The inner diameter of the portion forming the rib 82B is smaller than the outer diameter of the screw head SC and larger than the outer diameter of the screwdriver 81. The inner diameter of the retaining sleeve 82 from the rib 82B to the upper opening 82A is larger than the outer diameter of the screw head SC. The retaining sleeve 82 holds the screw SC by the screw head being inserted into the rib 82B. The screw SC is held with its shaft facing upward and its head inserted into the rib 82B. As a result, the head of the screw SC is positioned directly above the front end of the screwdriver 81.

[0091] The lower end of the retaining sleeve 82 is inserted into the inner side of the housing portion 83. A lower end opening 82C is provided at the lower end of the retaining sleeve 82. The screwdriver 81 passes through the lower end opening 82C and is supported relative to it in the θZ direction by a bearing disposed in the housing portion 83. The lower end of the screwdriver 81 is supported by the mounting portion 71. The mounting portion 71 rotates in the θZ direction via the θZ drive portion 52, thereby causing the screwdriver 81 and the mounting portion 71 to rotate integrally in the θZ direction. The housing portion 83 and the retaining sleeve 82 do not rotate.

[0092] The lower opening 82C of the retaining cylinder 82 communicates with the interior of the housing portion 83. The housing portion 83 is provided with a connector 83A for connection to the air compressor 53. Negative pressure is supplied to the retaining cylinder 82 from the air compressor 53 via the housing portion 83. Air is drawn into the retaining cylinder 82 through the upper opening 82A by the negative pressure. The portion of the retaining cylinder 82 with the annular rib 82B is blocked by the head of the screw SC. The retaining cylinder 82 can use the negative pressure to draw in the screw SC embedded in the rib 82B and fix it in place.

[0093] The retaining sleeve 82 and the screwdriver 81 are movable relative to each other along the Z-axis. The retaining sleeve 82 is subjected to upward force by a spring member 84 disposed within the housing portion 83. The spring member 84 is a compression coil spring. The lower end of the spring member 84 is supported by a spring bracket 85 fixed to the housing portion 83.

[0094] When the screwdriver tool 80 moves upward via the Z-axis drive unit 51, the retaining cylinder 82 contacts the back side of the substrate P. As the screwdriver tool 80 continues to move upward, the spring member 84 is compressed by the reaction force from the substrate P, thereby maintaining the retaining cylinder 82 in a stationary position. During the compression of the spring member 84, the screwdriver 81 and the housing 83 continue to move upward, so the front end of the screwdriver 81 engages with the screw SC held in the rib 82B of the retaining cylinder 82, and thus moves upward via the inner circumferential side of the rib 82B. As a result, the screw SC is installed onto the front end of the screwdriver 81 and inserted into the screw hole CH of the part C. Furthermore, the screwdriver 81 moves upward while rotating via the θZ drive unit 52. Therefore, when the screwdriver 81 contacts the head of the screw SC, the engagement groove of the screw SC head is in phase with the rotation of the front end of the screwdriver 81, and the engagement groove engages with the front end.

[0095] <Transfer Department> Figure 14 This diagram illustrates the function of the junction 60 in the embodiment. (For example...) Figure 11 As shown, the junction 60 is disposed on the upper part of the head support member 40. The junction 60 is connected to the feed mechanism 24 via the feed path 25. The junction 60 picks up the screw SC fed from the feed path 25. The junction 60 sets the picked-up screw SC onto the front end of the screwdriver 80 of the tool section 50. Therefore, as Figure 14 As shown, the junction 60 is positioned above the screwdriver tool 80, which is located at the screw setting position ES. Additionally, Figure 11 This indicates the raised position when the screwdriver tool 80 is tightening the screw SC. Therefore, Figure 11 In the middle, the front end of the screwdriver tool 80 is located higher than the junction 60.

[0096] like Figure 11 As shown, the junction 60 has a retaining part 61 that releasably holds the screw SC, a drive part 62 that moves the retaining part 61 to the junction position, and a connecting part 63 connected to the delivery path 25. The end of the delivery path 25 is connected to the connecting part 63. The retaining part 61 receives the screw SC delivered from the delivery path 25 via the connecting part 63. The retaining part 61 is connected to the pneumatic unit 53 via an air pipe (not shown). The retaining part 61 holds the screw SC by pressure supplied from the pneumatic unit 53. By stopping the pressure supply, the screw SC is released from its holding position. The drive part 62 movably holds the retaining part 61 via a bracket 62A. The drive part 62 is an actuator, such as a cylinder. The drive part 62 is connected to the pneumatic unit 53 via an air pipe (not shown). The drive part 62 moves the retaining part 61 by pressure supplied from the pneumatic unit 53. The drive unit 62 moves the holding unit 61 back and forth between the engagement position A2 and the retraction position A1 by the forward and backward movement of the piston rod. Figure 14 As shown, the handover position A2 is the position where the screw SC is handed over to the screwdriver tool 80. The retraction position A1 is the position where the retaining part 61 retracts when the tool part 50 (screwdriver tool 80) moves upward via the Z-axis drive part 51 for screw fastening.

[0097] like Figure 14 As shown, the retaining part 61 has a retaining chamber 64 for the screw SC. The retaining chamber 64 is a space that conforms to the shape of the screw SC, and its lower end opens on the lower surface of the retaining part 61. The lower surface opening of the retaining chamber 64 faces the opening of the connecting part 63 vertically. The connecting part 63 is disposed directly below the retaining part 61 in the retracted position A1 and is supported by the head support member 40. The connecting part 63 is a cylindrical connector connected to the end of the delivery path 25. The connecting part 63 is connected to the delivery path 25 at its lower end and receives the screw SC from its lower end opening. The connecting part 63 transfers the received screw SC from its upper end opening to the retaining chamber 64. The retaining part 61 receives the screw SC into the retaining chamber 64 from its lower surface side.

[0098] The screw SC is fed into the holding chamber 64 from the delivery path 25 with its shaft facing forward in the direction of travel and its head facing backward in the direction of travel. The upper part of the holding chamber 64 forms a small-diameter portion 64A for the shaft of the screw SC to be inserted. The holding part 61 has an air passage 65 connected to the small-diameter portion 64A. The air passage 65 is connected to the air compressor 53. The holding part 61 draws the shaft of the screw SC received in the holding chamber 64 by supplying negative pressure to the air passage 65, thereby holding the screw SC in the holding chamber 64. The lower surface of the holding chamber 64 is open, but the screw SC is held in place and will not fall out of the holding chamber 64 during the suction by negative pressure.

[0099] The retaining part 61, holding the screw SC, moves from the retracted position A1 to the engagement position A2 via the driving part 62. In the engagement position A2, the lower surface opening of the retaining chamber 64 faces the upper end opening 82A of the retaining sleeve 82 of the screwdriver tool 80. By stopping the negative pressure supply from the pneumatic unit 53 to the air passage 65, the screw SC is released, and the retaining part 61 causes the screw SC to fall from the retaining chamber 64. At this time, the screw fastening unit 20 supplies positive pressure to the air passage 65 via the pneumatic unit 53. With positive pressure, the screw SC can smoothly fall from the air passage 65. The screw SC is held with its head facing downwards into the upper end opening 82A of the retaining sleeve 82 and is held in place by being embedded in the annular rib 82B. Thus, in the engagement position A2, the retaining part 61 positions the screw SC at the front end of the screwdriver tool 80. During the tightening process using the screwdriver tool 80, the next screw SC to be used is supplied from the feed mechanism 24 to the holding chamber 64. By supplying the next screw SC to be used to the holding chamber 64 in advance during the tightening process, the tightening time can be shortened.

[0100] After the screw SC is positioned, the retaining part 61 moves from the receiving position A2 to the retracted position A1 via the driving part 62. The retracted position A1 is located outside the movable range of the tool part 50 (screwdriver 80). With the retaining part 61 in the retracted position A1, the tool part 50 performs a screw-fastening operation using the screwdriver 80. As a result, the screw-fastening unit 20 can acquire the screw SC and perform a screw-fastening operation without changing the posture (or orientation) of the screwdriver 80.

[0101] like Figure 11 As shown, the air compressor 53 supplies pressure to the junction 60. The air compressor 53 is mounted on the head support member 40 and moves with it. The air compressor 53 is connected to an air compressor source, such as an air pump (not shown). The air compressor 53 supplies pressure to the holding part 61 and the tool part 50 (screwdriver tool 80). The air compressor 53 detects the holding and release of the screw SC in the holding part 61 based on the increase in negative pressure supplied to it. The air compressor 53 also detects the holding and release of the screw SC in the holding cylinder 82 based on the increase in negative pressure supplied to it. These pressure fluctuations in the air compressor 53 are monitored by the controller 120.

[0102] <Sending Organization> Figure 15 This is a perspective view showing the screw supply device 23 and the delivery mechanism 24 of the embodiment. Figure 16 This is a cross-sectional view of the main part of the delivery mechanism 24 in the embodiment. Figure 16 The XZ section of the suction section 91 of the delivery mechanism 24 is shown.

[0103] The screw supply device 23 and the feeding mechanism 24 are supported on the base frame 114. The screw supply device 23 and the feeding mechanism 24 are positioned outside the range of movement of the moving mechanism 22 relative to the working head 21. The screw supply device 23 and the feeding mechanism 24 are positioned on the -Y direction side relative to the moving mechanism 22. The screw supply device 23 and the feeding mechanism 24 are positioned higher than the moving mechanism 22. The screw supply device 23 and the feeding mechanism 24 are arranged along the X-axis direction.

[0104] The screw supply device 23 stores a plurality of screws SC and supplies them one by one to the screw outlet position B1. The screw supply device 23 includes: a screw storage section with a screw inlet; a stirring mechanism for stirring the screws SC contained in the screw storage section; a track section for arranging the screws SC contained in the screw storage section into a row and feeding them out; and a cutting section for cutting the screws SC one by one from the row of screws SC advancing on the track section and moving them to the screw outlet position B1.

[0105] The delivery mechanism 24 uses air pressure to press the screw SC into the delivery path 25. The delivery mechanism 24 includes a suction nozzle 91, a suction drive 92 for moving the suction nozzle 91, and an inlet holding part 93 for holding the entrance to the delivery path 25. Additionally, Figure 15 The diagram of delivery path 25 is omitted. The suction nozzle 91 is connected to a switching valve 94 via an air compressor pipe, etc. The switching valve 94 is connected to an air compressor source, such as an air pump (not shown). The switching valve 94 can selectively supply positive and negative pressure to the suction nozzle 91, and can also stop the pressure supply. The suction nozzle 91, when supplied with negative pressure, picks up the screw SC positioned at the screw delivery position B1. The suction nozzle 91, when supplied with positive pressure, delivers the picked-up screw SC from the delivery position B2 to the delivery path 25.

[0106] The suction drive unit 92 reciprocates the suction nozzle 91 between the screw outlet position B1 and the delivery position B2 toward the delivery path 25. The suction drive unit 92 includes a lifting drive unit 92A and a horizontal drive unit 92B. The lifting drive unit 92A supports the suction nozzle 91 via a suction nozzle holding member 95, causing the suction nozzle 91 to move linearly up and down. The horizontal drive unit 92B supports the suction nozzle 91 and the lifting drive unit 92A, causing the suction nozzle 91 and the lifting drive unit 92A to move linearly along the X-axis between the screw outlet position B1 and the delivery position B2. Both the lifting drive unit 92A and the horizontal drive unit 92B are actuators, such as cylinders. The lifting drive unit 92A and the horizontal drive unit 92B are operated by pressure supplied from the switching valve 94.

[0107] like Figure 16As shown, the suction nozzle 91 is held in the suction nozzle holding member 95 with its suction and ejection opening facing downwards. When the suction nozzle 91 is positioned in the raised position by the lifting drive unit 92A, it moves between the screw delivery position B1 and the delivery position B2 by the horizontal drive unit 92B. The suction nozzle 91 moves downwards from above the screw delivery position B1, thereby contacting the head of the screw SC disposed at the screw delivery position B1. The suction nozzle 91 uses negative pressure to suction the head of the screw SC and moves it upwards, thereby removing a screw SC from the screw supply device 23.

[0108] The suction nozzle 91, holding the head of the screw SC, moves downward from above the delivery position B2, thereby inserting the screw SC into the inlet opening of the inlet retainer 93. The inlet retainer 93 is a cylindrical connector attached to the end of the delivery path 25. Positive pressure is supplied to the delivery path 25 via the suction nozzle 91 through the inlet retainer 93, thereby using air pressure to transport the screw SC to the junction 60 of the working head 21. The suction nozzle 91 then feeds the screw SC into the inlet of the delivery path 25 with the shaft of the screw SC facing forward in the direction of travel.

[0109] The delivery path 25 is a conduit open at both ends. The delivery path 25 may include, for example, a flexible air tube. One end of the delivery path 25 is connected to the delivery mechanism 24, and the other end is connected to the working head 21. As described above, one end of the delivery path 25 is held in the inlet holding portion 93 of the delivery mechanism 24. The other end of the delivery path 25 is held in the connecting portion 63 of the junction portion 60. The delivery path 25 is flexible enough to deform as the working head 21 moves. The inner diameter of the delivery path 25 is designed to correspond to the maximum outer diameter of the screw SC, i.e., the outer diameter of the screw SC head. The delivery path 25 has an inner diameter slightly larger than the maximum outer diameter of the screw SC, so that the posture of the screw SC, pressed by air pressure, does not change midway. Therefore, the screw SC is delivered into the holding chamber 64 with the retaining shaft positioned forward in the direction of travel and the head positioned backward in the direction of travel, without changing orientation during transport.

[0110] [Controller] Figure 17This is a block diagram illustrating the controller 120 in an embodiment. The board processing apparatus 100 includes the controller 120. The controller 120 controls the board processing apparatus 100. The controller 120 includes a computer. The controller 120 includes a processor 120A such as a central processing unit (CPU), a main memory 120B including non-volatile memory such as read-only memory (ROM) and volatile memory such as random access memory (RAM), a memory 120C, and an interface 120D including input / output circuitry and communication circuitry. The controller 120 functions as a computer program stored in the memory 120C. The processor 120A reads the computer program from the memory 120C and expands it into the main memory 120B, executing processing according to the computer program. Alternatively, the computer program can also be distributed to the controller 120 via a network.

[0111] The component identification device 111, camera 113, display device 130, and input device 131 are each connected to the controller 120. The display device 130 displays display data. The display device 130 provides the display data to the user of the substrate processing device 100. Examples of the display device 130 include flat panel displays such as liquid crystal displays or organic electroluminescence (EL) displays. The input device 131 generates input data through operation by the user of the substrate processing device 100. The input data generated in the input device 131 is sent to the controller 120. Examples of the input device 131 include computer keyboards, mice, buttons, switches, and touch panels.

[0112] The processor 120A includes a component control unit 121, a substrate control unit 122, a mounting control unit 123, a screwing control unit 124, and an operation condition setting unit 125.

[0113] The storage device 120C stores a production program representing the operating conditions of the substrate working device 100. The production program 126 includes data used for the mounting process of part C. The production program 126 includes target position data representing the target position of part C fixed to substrate P, target angle data representing the target angle θr of part C fixed to substrate P, mounting angle data representing the mounting angle θm of part C when it is mounted on the surface of substrate P, screw mounting position data representing the position of the screw hole CH of part C mounted on the surface of substrate P, and target torque data representing the target torque when tightening screw SC on part C.

[0114] The parts control unit 121 outputs control commands to control the parts supply device 200. The parts control unit 121 controls the parts supply device 200 to sequentially supply multiple parts C to the parts supply position PJa.

[0115] The substrate control unit 122 outputs control commands to control the substrate transport device 103 and the substrate holding device 104. The substrate control unit 122 controls the substrate transport device 103 to transport the substrate P to the working position PJb. The substrate control unit 122 controls the substrate holding device 104 to hold the substrate P that has been transported to the working position PJb.

[0116] The mounting control unit 123 outputs control commands to control the mounting unit 10. The mounting control unit 123 mounts the part C onto the surface of the substrate P based on the production process 126.

[0117] The screw fastening control unit 124 outputs control commands to control the screw fastening unit 20. Based on the production process 126, the screw fastening control unit 124 fastens the screws SC to the part C mounted on the surface of the substrate P from the back side of the substrate P.

[0118] The mounting control unit 123 outputs control commands to keep the nozzle 30 of the mounting unit 10 holding the part C until the screwing unit 20 finishes tightening the screw SC. While the part C, which is mounted on the surface of the substrate P, is held by the nozzle 30 of the mounting unit 10, the screwing unit 20 tightens the screw SC onto the part C from the back of the substrate P.

[0119] The screw tightening control unit 124 terminates the tightening of the screw SC when the tightening torque reaches a predetermined target torque. As described above, the target torque is predetermined in the production process 126. The screw tightening control unit 124 controls the drive current used to drive the θZ drive unit 52, which is an electric motor. The screw tightening control unit 124 can calculate the tightening torque of the screw SC based on the current value used to drive the θZ drive unit 52.

[0120] The mounting control unit 123 controls the mounting unit 10 based on the production process 126 to sequentially mount multiple parts C onto the substrate P. The screwing control unit 124 controls the screwing unit 20 based on the production process 126 to sequentially tighten screws SC onto the parts C mounted on the substrate P. After holding the parts C at the part supply position PJ1 using the suction nozzle 30, the mounting head 106 moves to the working position PJb to mount it onto the substrate P. The screwing unit 20 picks up the screws SC directly below the screw mounting position of the mounted parts C and places them on the screwdriver tool 80. The screwing unit 20 moves the screwdriver tool 80 upward to insert the screws SC into the screw holes CH and rotates the screwdriver 81 to tighten the screws SC onto the parts C. The mounting head 106 continues to hold the parts C mounted on the surface of the substrate P until the screwing unit 20 finishes tightening the screws SC. The mounting head 106 bears the tightening torque applied to the parts C during the screw tightening operation.

[0121] After fastening the screws SC to the component C mounted on the surface of the substrate P, the mounting unit 10 moves to the component supply position PJa and uses the suction nozzle 30 to hold the new component C. After holding the new component C with the suction nozzle 30 at the component supply position PJa, the mounting head 106 moves to the working position PJb and mounts it on the substrate P. The screw fastening unit 20 moves to the screw mounting position of the newly mounted component C and fastens the screws SC to the component C. In this way, the mounting unit 10 and the screw fastening unit 20 cooperate to sequentially mount multiple components C and fasten the screws SC.

[0122] The operation condition setting unit 125 sets the operation conditions of the substrate working device 100. The operation condition setting unit 125 can create or update the production program 126 that represents the operation conditions of the substrate working device 100.

[0123] [How to set action conditions] Figure 18 and Figure 19 These are diagrams illustrating the behavior of part C during the screw fastening process. Figure 18 and Figure 19 These are images showing the substrate P positioned at the working location PJb, viewed from above. A screw through-hole TH is formed on the substrate P. The screw through-hole TH is formed through both the surface and back surface of the substrate P. Figure 18 and Figure 19 In the example shown, the screw insertion hole TH is longer in the Y-axis direction.

[0124] Component C is mounted on the surface of substrate P such that at least a portion of component C is positioned above the screw insertion hole TH. A screw hole CH is formed on the lower surface of component C. Component C is mounted on the surface of substrate P such that the screw hole CH aligns with the screw insertion hole TH. After the screw SC is inserted from the back side of substrate P into the screw insertion hole TH, it is tightened into the screw hole CH.

[0125] The target position and target angle θr of part C, which is fixed to substrate P, are predetermined. The target position of part C refers to its respective target position in the X-axis and Y-axis directions after screw SC is tightened. The target angle θr of part C refers to its target angle in the θZ direction (rotation direction) after screw SC is tightened. Figure 18 and Figure 19 The diagram shows a hypothetical frame FL representing the target position and target angle θr of part C. After screws SC are tightened on part C, part C is fixed to the surface of substrate P with its outline aligned with the hypothetical frame FL. Figure 18 This example illustrates the process after part C is mounted on the surface of substrate P at a target position and target angle θr via mounting head 106, and before screw SC is tightened. Figure 18 In the example shown, after part C is mounted and before screw SC is tightened, the outline of part C is consistent with the imaginary frame FL.

[0126] Japanese 0104 Figure 19 Indicates from Figure 18 The state shown is that part C has had screw SC inserted into screw hole CH of part C and screw SC tightened. (See diagram) Figure 19 As shown, the tightening torque of the screw SC may cause the component C to deviate from the target angle θr. That is, even if the mounting head 106 mounts the component C on the surface of the substrate P at the target angle θr, the tightening of the screw SC after mounting the component C may cause the component C to rotate, thereby causing the component C to not be fixed to the surface of the substrate P at the target angle θr. Figure 19 This illustrates an example where screw SC rotates in a second direction (e.g., counterclockwise), and due to the tightening torque of screw SC, part C also rotates in the second direction. If part C is not fixed at the target angle θr, the quality of the electronic device may deteriorate.

[0127] According to the inventors, the size difference between the positioning groove 34A of the shaft 34 and the positioning pin 33D of the connecting member 33 of the nozzle 30 may cause the part C to rotate. The shaft 34 and the nozzle 30 are respectively configured such that, in the rotational direction (θZ direction), the size of the positioning groove 34A is larger than the size of the positioning pin 33D, so that the positioning pin 33D smoothly inserts into the positioning groove 34A. That is, in the rotational direction, a small gap is formed between the positioning groove 34A and the positioning pin 33D. Therefore, even when the screw SC is tightened while the part C is mounted on the surface of the substrate P at a target angle θr and held by the mounting unit 10, the gap between the positioning pin 33D and the positioning groove 34A may cause the part C to rotate slightly.

[0128] In this embodiment, the operation condition setting unit 125 sets the mounting angle θm by taking into account the rotation of the part C caused by the tightening torque of the screw SC. When the part C rotates in a second direction (e.g., counterclockwise) due to the tightening torque of the screw SC, the operation condition setting unit 125 sets a mounting angle θm that causes the part C to rotate only a predetermined angle relative to the target angle θr in a first direction opposite to the second direction (e.g., clockwise).

[0129] Figure 20 This is a flowchart illustrating the method for setting the operating conditions of the substrate working apparatus 100 according to the embodiment. Figure 21 and Figure 22 These are diagrams illustrating the method for setting the operating conditions of the substrate working apparatus 100 according to the embodiment. When the screw SC is tightened to the component C by rotating it in a second direction (e.g., counterclockwise), as... Figure 21 As shown, the operation condition setting unit 125 sets a mounting angle θm such that part C rotates only a predetermined angle relative to the target angle θr in a first direction opposite to the second direction. As described above, the screwing unit 20 ends the tightening of screw SC when the tightening torque of screw SC reaches a predetermined target torque. The operation condition setting unit 125 sets the mounting angle θm so that at the point where the tightening of screw SC ends, part C reaches the target angle θr.

[0130] The operation condition setting unit 125 sets the initial value of the mounting angle θm (step SA1). The operation condition setting unit 125 can also set the initial value arbitrarily. The operation condition setting unit 125 can also set the initial value of the mounting angle θm based on the input data generated by the user operation input device 131. The user of the substrate working device 100 can also operate the input device 131 to input the initial value of the mounting angle θm of part C when the mounting head 106 mounts part C on the surface of substrate P.

[0131] The mounting control unit 123 controls the mounting unit 10 to mount the part C on the surface of the substrate P with the initial value of the mounting angle θm set in step SA1 (step SA2).

[0132] The screw fastening control unit 124 controls the screw fastening unit 20 to fasten the screw SC to the component C mounted on the surface of the substrate P. The screw fastening control unit 124 calculates the fastening torque of the screw SC based on the current value of the drive current used to drive the θZ drive unit 52. The screw fastening control unit 124 ends the fastening of the screw SC when the fastening torque of the screw SC reaches the predetermined target torque (step SA3).

[0133] The action condition setting unit 125 uses the camera 113 to capture part C at the time point when the tightening of screw SC ends (step SA4).

[0134] The action condition setting unit 125 determines whether the angle of part C after the screw SC is tightened is the target angle θr based on the image data of part C captured by the camera 113 (step SA5).

[0135] The meaning of the actual angle of part C after tightening screw SC being the target angle θr includes: the actual angle is consistent with the target angle θr, and the actual angle converges within the pre-defined allowable angle range based on the target angle θr.

[0136] The motion condition setting unit 125 can also compare the actual image of part C captured by camera 113 with the ideal image of part C positioned at the target angle θr to determine whether the angle of part C after tightening screw SC is the target angle θr. That is, the motion condition setting unit 125 can also use a template matching method to determine whether the angle of part C after tightening screw SC is the target angle θr. In addition, the motion condition setting unit 125 can also extract the edge of part C from the image data of part C captured by camera 113, and determine whether the angle of part C after tightening screw SC is the target angle θr based on the edge of part C.

[0137] Alternatively, the image data of part C captured by camera 113 can be displayed on display device 130. The user of the board working device 100 can also confirm the part C displayed on display device 130 to determine whether the angle of part C after tightening screw SC is the target angle θr. The user's determination result can also be input from input device 131. The operation condition setting unit 125 can also determine whether the angle of part C after tightening screw SC is the target angle θr based on the input data from input device 131.

[0138] In step SA5, if it is determined that the angle of part C after tightening screw SC is not the target angle θr (step SA5: No), the operation condition setting unit 125 changes the mounting angle θm (step SA6). After changing the mounting angle θm, the mounting control unit 123 controls the mounting unit 10 to mount part C on the surface of substrate P at the mounting angle θm set in step SA7 (step SA2).

[0139] Then, repeat the process from step SA2 to step SA6 until it is determined that the angle of part C after the screw SC is tightened is the target angle θr.

[0140] In step SA5, if it is determined that the angle of part C after the screw SC is tightened is the target angle θr (step SA5: yes), then the operation condition setting unit 125 generates or updates the production program 126 based on the initial value of the set mounting angle θm (step SA7). Figure 22 This is an example of a part C with the target angle θr after the screw SC has been tightened.

[0141] Furthermore, as described above, according to the inventor's understanding, the dimensional difference between the positioning groove 34A of the shaft 34 and the positioning pin 33D of the connecting member 33 of the nozzle 30 may cause the part C to rotate. Even when the screw SC is tightened while the part C is held by the mounting unit 10, the gap between the positioning pin 33D and the positioning groove 34A may still cause the part C to rotate. Therefore, the operation condition setting unit 125 may also set the mounting angle θm based on the size of the gap between the positioning pin 33D and the positioning groove 34A in the rotation direction (θZ direction). The mounting angle θm may also be set as the angle obtained by rotating the target angle θr in the first direction by an angle equivalent to the size of the gap between the positioning pin 33D and the positioning groove 34A.

[0142] [Substrate Processing Method] Figure 23 This is a flowchart illustrating a substrate processing method for an implementation. Figure 24 (A) to Figure 24 (D) is a diagram illustrating the substrate operation method of the embodiment.

[0143] The mounting control unit 123 mounts part C onto the surface of substrate P based on production program 126. The operation condition setting unit 125 presets a mounting angle θm that causes part C to rotate only a predetermined angle relative to a target angle θr in a first direction, and stores this as production program 126. The mounting control unit 123 controls the mounting unit 10 to mount part C onto the surface of substrate P at the mounting angle θm specified by production program 126. (See reference...) Figure 21As explained, the mounting unit 10 mounts the part C onto the surface of the substrate P by rotating the part C relative to the target angle θr in the first direction by a predetermined mounting angle θm (step SB1).

[0144] The screw fastening control unit 124 initiates the fastening operation of the screw SC for part C from the back of the substrate P based on the production process 126. In the case of fastening the screw SC for part C, as follows... Figure 24 As shown in (A), the screw-fastening control unit 124 controls the screw-fastening unit 20 to position the screwdriver tool 80 directly below the screw mounting position. The screw mounting position is the location of the screw hole CH of part C. The screw-fastening control unit 124 moves the working head 21 in the XY plane via the moving mechanism 22 to position the screwdriver tool 80 directly below the screw mounting position.

[0145] The screw fastening control unit 124 controls the screw supply device 23 and the feeding mechanism 24 to feed the screw SC to the working head 21. For example... Figure 16 As shown, the screw supply device 23 positions a screw SC at the screw delivery position B1. The delivery mechanism 24 absorbs the screw SC positioned at the screw delivery position B1 by supplying negative pressure to the suction nozzle 91. The delivery mechanism 24 moves the suction nozzle 91 to the delivery position B2 by the suction drive unit 92. The delivery mechanism 24 feeds the absorbed screw SC into the delivery path 25 by supplying positive pressure to the suction nozzle 91. The delivery mechanism 24, using the positive pressure supplied from the suction nozzle 91, transports the screw SC to the working head 21 via the delivery path 25.

[0146] The screw fastening control unit 124 controls the working head 21 (transfer section 60) to acquire and hold the screw SC delivered from the feed mechanism 24. The screw fastening control unit 124 controls the pneumatic unit 53 to supply negative pressure to the air passage 65 of the holding section 61. Figure 14 As shown, when the retaining part 61 is in the retracted position A1, it receives the screw SC delivered by the delivery mechanism 24 into the retaining chamber 64. When the shaft portion of the screw SC reaches the small diameter portion 64A of the retaining chamber 64, the screw SC is retained by the negative pressure supplied to the small diameter portion 64A via the air passage 65.

[0147] When the screw SC is not placed in the holding chamber 64, the air compressor 53 only draws in air and is at a pressure corresponding to atmospheric pressure. However, the negative pressure increases sharply because the shaft of the screw SC reaches the small diameter section 64A. The screw fastening control unit 124 can detect whether the screw SC has been held in the holding section 61 based on the change in the pressure value supplied from the air compressor 53 to the air passage 65 (the increase in negative pressure).

[0148] The screw-locking control unit 124 controls the transfer unit 60 to place the screw SC into the retaining sleeve 82 of the screwdriver tool 80 and to retract the retaining part 61. The screw-locking control unit 124, via the drive unit 62, moves the retaining part 61 holding the screw SC to the transfer position A2. The screw-locking control unit 124 controls the air compressor 53 to stop the negative pressure supply to the air passage 65 of the retaining part 61, while simultaneously supplying negative pressure to the retaining sleeve 82 of the screwdriver tool 80. The retaining part 61 releases the screw SC from the negative pressure supply. Under the influence of gravity, the screw SC falls from the lower opening of the retaining chamber 64 into the upper opening 82A of the retaining sleeve 82. Because the head of the screw SC, near the center of gravity, is located on the lower side, it maintains this posture as it falls and embeds itself into the annular rib 82B of the retaining sleeve 82, blocking the inner opening of the rib 82B. Screw SC is fixed to rib 82B because the head of the plug rib 82B is sucked by negative pressure.

[0149] With the inner opening of the rib 82B open, the air compressor 53 only draws in air, thus operating at a pressure corresponding to atmospheric pressure. However, the negative pressure increases sharply because the head of the screw SC blocks the inner opening of the rib 82B. The screw fastening control unit 124 can detect whether the screw has been accurately positioned within the retaining sleeve 82 based on the change in pressure value of the air compressor 53 (the increase in negative pressure). After the screw SC is positioned, the screw fastening control unit 124 moves the retaining part 61 from the engagement position A2 to the retraction position A1 via the drive unit 62.

[0150] The screw fastening control unit 124 controls the working head 21 so that, while the part C, mounted on the surface of the substrate P, is held by the mounting unit 10, the screwdriver 81 is rotated while the tool part 50 is moved upward (step SB2). The screwdriver 81 rotates in a second direction opposite to the first direction. The screw fastening control unit 124 outputs a control command to the θZ drive unit 52 to rotate the screwdriver 81. The θZ drive unit 52 rotates the screwdriver 81 in a second direction centered on the Z-axis. The screw fastening control unit 124 outputs a control command to the Z-axis drive unit 51 to move the tool part 50 upward (in the +Z direction). The Z-axis drive unit 51 moves the movable plate 72 upward by rotating the Z-screw 73. The screwdriver tool 80 (screwdriver 81 and retainer 82) mounted on the movable plate 72 and the θZ drive unit 52 move upward together. By moving the screwdriver tool 80 upward, the tool part 50 moves upward as follows: Figure 24 As shown in (A), the upper end of the retaining cylinder 82 contacts the back side of the substrate P held in the working position PJb.

[0151] After the retaining sleeve 82 has contacted the back side of the substrate P, the screw-fastening control unit 124 continues to move upward via the Z-axis drive unit 51. The screwdriver 81 and housing 83 continue to move upward together with the movable plate 72. Although the housing 83 moves further upward, the retaining sleeve 82 is maintained in its Z-axis position by compression from the spring member 84. Thus, as Figure 24 As shown in (B), the screwdriver 81 moves upward within the retaining sleeve 82 and contacts the head of the screw SC, which is embedded in the protrusion 82B. The engagement groove of the screw SC head is in phase with the rotation of the front end of the screwdriver 81, and the front end engages with the engagement groove. Thus, the screw SC is installed onto the front end of the screwdriver 81. By installing the screw SC onto the front end of the screwdriver 81, the screw SC rotates together with the screwdriver 81 in the second direction.

[0152] By rotating the screwdriver 81 while moving it upwards, thus... Figure 24 As shown in (C), the screw SC passes through the screw insertion hole TH of the substrate P and is inserted into the screw hole CH of the part C.

[0153] The screw fastening control unit 124 controls the working head 21 to fasten the screw SC inserted into the screw hole CH to the part C while the part C is held on the surface of the substrate P by the mounting unit 10. The screw fastening control unit 124 rotates the screw SC inserted into the screw hole CH in the second direction to fasten it to the part C from the back of the substrate P (step SB3).

[0154] The screw fastening control unit 124 controls the θZ drive unit 52 and the Z-axis drive unit 51 to rotate the screwdriver 81 while applying an upward force toward the screw hole CH. The mounting control unit 123 controls the mounting unit 10 that holds the part C to support the upward external force acting on the part C.

[0155] The screw fastening control unit 124 calculates the tightening torque of the screw SC based on the current value of the drive current of the drive unit θZ 52. The screw fastening control unit 124 determines whether the tightening torque of the screw SC has reached the target torque (step SB4).

[0156] In step SB4, if it is determined that the tightening torque of screw SC has not yet reached the target torque (step SB4: No), the screw tightening control unit 124 continues the rotation of screw SC. In step SB4, if it is determined that the tightening torque of screw SC has reached the target torque (step SB4: Yes), the screw tightening control unit 124 determines that the tightening of screw SC is complete, and stops the θZ drive unit 52 and the Z-axis drive unit 51. Thus, as... Figure 24 As shown in (D), screw SC is tightened into screw hole CH, and part C is fixed to substrate P. (Refer to...) Figure 22As explained, when the mounting unit 10 holds the part C mounted on the surface of the substrate P at a mounting angle θm, the screw unit 20 rotates the screw SC in a second direction opposite to the first direction and tightens the screw SC on the part C from the back of the substrate P, thereby setting the part C at the target angle θr at the time point when the screw SC is tightened.

[0157] After the screw SC is tightened, the tightening control unit 124 controls the Z-axis drive unit 51 to move the tool unit 50 downward. The tightening control unit 124 moves the movable plate 72 downward until the upper end of the retaining sleeve 82 reaches the screw setting position ES, which is below the retaining part 61 of the junction 60. Thus, the tightening operation of one screw SC is completed.

[0158] When a part C has multiple screw mounting positions (when part C has multiple screw holes CH), the screw fastening control unit 124 repeats the process from step SB2 to step SB4.

[0159] [Effect] As described above, the substrate working apparatus 100 of the embodiment includes: a processor 120A having an operation condition setting unit 125, the operation condition setting unit 125 setting a mounting angle θm such that the part C is rotated by a predetermined angle in a first direction relative to a target angle θr; a mounting unit 10 for mounting the part C on the surface of the substrate P at the mounting angle θm; and a screwing unit 20 for rotating a screw SC in a second direction opposite to the first direction while the part C is held on the surface of the substrate P by the mounting unit 10, thereby fastening the screw SC to the part C from the back of the substrate P.

[0160] According to the embodiment, when tightening screw SC onto component C, if the tightening torque of screw SC may cause component C to deviate from the target angle θr, a mounting angle θm is set. This mounting angle θm takes into account the deviation angle caused by the tightening torque of screw SC, measured from the target angle θr. After mounting component C onto substrate P at the set mounting angle θm, screw SC is tightened onto component C. Thus, in the state where screw SC tightening is complete, component C fixes screw SC to substrate P at the target angle θr. Because component SC is fixed to substrate P at the target angle θr, degradation of the electronic device's quality is suppressed.

Claims

1. A substrate processing apparatus, comprising: The processor sets a mounting angle that causes the part to rotate only a predetermined angle relative to the target angle in a first direction; The mounting unit mounts the component onto the surface of the substrate at the mounting angle. as well as The screw unit, while the component mounted on the surface of the substrate is held in place by the mounting unit, rotates the screw in a second direction opposite to the first direction to fasten the screw to the component from the back of the substrate.

2. The substrate processing apparatus according to claim 1, wherein The fastening unit terminates the tightening of the screw when the tightening torque of the screw reaches a predetermined target torque. The processor sets the mounting angle so that the part reaches the target angle at the point when the screw tightening is completed.

3. The substrate processing apparatus according to claim 2, comprising: The camera captures the moment when the screw tightening is completed on the component. The processor sets the mounting angle based on image data of the part captured by the camera.

4. The substrate processing apparatus according to claim 2, wherein The installation unit has: A shaft capable of moving along the normal direction of the surface of the substrate; and The suction nozzle is detachable from the shaft and holds the part. The suction nozzle has a positioning pin. The shaft has a positioning groove for locating the positioning pin. The processor sets the mounting angle based on the size of the gap between the positioning pin and the positioning groove.

5. A substrate processing method, comprising: Set a mounting angle that rotates the part by a specified angle relative to the target angle in a first direction; The component is mounted on the surface of the substrate at the stated mounting angle; and With the component mounted on the surface of the substrate held in place, the screw is rotated in a second direction opposite to the first direction, thereby tightening the screw onto the component from the back of the substrate.

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