Workpiece loading mechanism and vacuum processing apparatus

Abstract

The application belongs to the technical field of vacuum processing, and discloses a workpiece loading mechanism and a vacuum processing device. The workpiece loading mechanism comprises a support, a connecting arm, a support piece and an adjusting assembly. The connecting arm is connected with the support. The support piece is arranged between two adjacent connecting arms, and is used for placing a workpiece. The adjusting assembly is arranged between the connecting arm and the support piece, and is used for driving the support piece to rotate. Through the application, the workpiece loading mechanism can realize angle adjustment of the workpiece, improve the quality and consistency of vacuum processing such as film coating, and can also adapt to different types of workpieces, thereby improving the adaptability.

Description

Technical Field

[0001] This invention relates to the field of vacuum processing technology, and more particularly to workpiece loading mechanisms and vacuum processing equipment. Background Technology

[0002] In vacuum processing processes such as vacuum coating, the workpiece loading mechanism primarily serves to support and secure the workpiece. It stably positions and transports the workpiece into the vacuum processing chamber, ensuring uniform vacuum treatment and achieving high-quality vacuum processing results.

[0003] With the development of vacuum processing equipment, the demand for adjustable workpiece angles during vacuum processing is increasing.

[0004] Currently, the workpieces in some existing workpiece loading mechanisms often cannot be angled, resulting in poor adaptability. Summary of the Invention

[0005] The purpose of this invention is to provide a workpiece loading mechanism and a vacuum processing device for adjusting the angle of the workpiece and improving its adaptability.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] The workpiece loading mechanism includes:

[0008] support;

[0009] Connecting arm, connected to the bracket;

[0010] A support member is disposed between two adjacent connecting arms, and the support member is used to place the workpiece;

[0011] An adjustment component is provided between the connecting arm and the support member, and the adjustment component is used to drive the support member to rotate.

[0012] As an alternative to the workpiece loading mechanism, the adjustment assembly includes a drive member and an adjustment member. The adjustment member is rotatably connected to the connecting arm. The drive member is used to push the adjustment member and cause the adjustment member to rotate, thereby driving the support member to rotate.

[0013] As an alternative to the workpiece loading mechanism, the adjusting assembly further includes a fixed seat fixed on the connecting arm. The adjusting member includes a first end, a second end, and a connecting shaft. The first end is fixedly connected to the support member, and the connecting shaft is hinged to the fixed seat. The two ends of the connecting shaft are fixedly connected to the first end and the second end, respectively. The driving member pushes the second end to make the first end rotate around the axis of the connecting shaft.

[0014] As an alternative to the workpiece loading mechanism, the driving component is a screw rod screwed to the fixed base, and the end of the screw rod can be pushed by turning the screw rod.

[0015] As an alternative solution for a workpiece loading mechanism, a guide groove is provided on the second end, the guide groove extends along the rotation direction of the second end, and a locking bolt is screwed onto the fixed seat, the locking bolt passing through the guide groove, the locking bolt having a first state of locking the second end and a second state of unlocking.

[0016] As an alternative to the workpiece loading mechanism, the workpiece loading mechanism further includes an operating component. The outer periphery of the operating component is connected to the bracket via multiple support arms. The operating component is used to cooperate with a robot arm and to transfer the workpiece loading mechanism via the robot arm.

[0017] As an alternative to the workpiece loading mechanism, at least a portion of the structure of the bracket and / or at least a portion of the structure of the connecting arm forms an operating element, which is used to cooperate with a robot and transfer the workpiece loading mechanism via the robot.

[0018] As an optional solution for the workpiece loading mechanism, the bracket is also provided with multiple hangers, and the multiple hangers are distributed at intervals along the circumference of the bracket. The workpiece loading mechanism is connected to the rotary table through the hangers.

[0019] As an alternative to the workpiece loading mechanism, the hook is L-shaped.

[0020] As an alternative to the workpiece loading mechanism, the support members are provided in multiple ways along the circumference of the bracket.

[0021] A vacuum processing device includes a conveying assembly, a workpiece loading mechanism as described in any of the above embodiments, and a vacuum processing chamber, wherein the conveying assembly is capable of conveying the workpiece loading mechanism into the vacuum processing chamber.

[0022] Beneficial effects:

[0023] In the first aspect of the invention, the rotation of the workpiece on the support is achieved by adjusting the component. The workpiece loading mechanism can adjust the angle of the workpiece. The angle adjustment of the workpiece can not only ensure that the coating material and other working substances of vacuum treatment are uniformly applied to various parts of the workpiece, thereby improving the quality and consistency of vacuum treatment such as coating, but also further adapt to different types of workpieces and improve adaptability.

[0024] In a second aspect of the present invention, the vacuum processing equipment based on the workpiece loading mechanism can realize the angle adjustment of the workpiece, improve the quality and consistency of vacuum processing such as coating, and further adapt to different types of workpieces, thereby improving adaptability. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the workpiece loading mechanism provided in an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of the adjusting member provided in an embodiment of the present invention;

[0027] Figure 3 This is a schematic diagram of the adjustment component provided in an embodiment of the present invention from a first perspective;

[0028] Figure 4 This is a schematic diagram of the second perspective of the adjustment component provided in an embodiment of the present invention;

[0029] Figure 5 This is a structural schematic diagram of the adjustment component provided in an embodiment of the present invention from a third perspective.

[0030] In the picture:

[0031] 100. Workpiece;

[0032] 1. Bracket; 11. Mounting connector;

[0033] 2. Connecting arm;

[0034] 3. Support components;

[0035] 4. Adjustment component; 41. Drive component; 42. Adjustment component; 421. First end; 422. Second end; 4221. Guide groove; 423. Connecting shaft; 43. Fixing seat; 431. Locking bolt;

[0036] 5. Operating components; 51. Support arm. Detailed Implementation

[0037] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0038] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0040] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0041] Please see the appendix Figure 1 - Appendix Figure 5 The first aspect of this embodiment relates to a workpiece loading mechanism that can be applied in a vacuum processing equipment. The workpiece loading mechanism is a key component of the vacuum processing equipment, and its main function is to place the workpiece 100 to be processed. Specifically, the workpiece loading mechanism plays a supporting and fixing role in vacuum processing such as vacuum coating, so as to ensure that the workpiece 100 can stably receive the coating material or other working substances for vacuum processing.

[0042] Specifically, the workpiece loading mechanism includes a bracket 1, a connecting arm 2, a support member 3, and an adjusting assembly 4. The connecting arm 2 is connected to the bracket 1; the support member 3 is located between two adjacent connecting arms 2 and is used to place the workpiece 100; the adjusting assembly 4 is located between the connecting arm 2 and the support member 3 and is used to drive the support member 3 to rotate.

[0043] In this embodiment, the support 1 is ring-shaped or plate-shaped. The specific shape can be selected according to the weight and cost of the entire workpiece loading mechanism. This application takes a ring-shaped support 1 as an example to introduce the specific structure and connection relationship of the workpiece loading mechanism. Specifically, the support 1 is a metal ring structure with a relatively large diameter, and the cross-sectional shape of the support 1 is quadrilateral or polygonal. The connecting arm 2 is a long strip-shaped rod, which can be straight or bent. One end of the connecting arm 2 is connected to the bracket 1, either by non-removable means such as welding or by detachable means such as screwing. The connecting arm 2 and the bracket 1 can even be an integral structure. In other embodiments, the connecting arm 2 is not limited to a strip-shaped rod; it can also be a plate-shaped or block-shaped component. The support member 3 is a disc-shaped component adapted to the shape of the workpiece 100. Connecting arms 2 are provided on both sides of the support member 3. One end of the support member 3 along a diameter direction can be hinged to one of the connecting arms 2, or one end of the support member 3 along a diameter direction can be opposite to the connecting arm 2 but the two are not connected, while the other side is connected to the other connecting arm 2 via an adjusting component 4.

[0044] The workpiece loading mechanism enables the angle adjustment of the workpiece 100. This angle adjustment not only ensures that the coating material or other working substances for vacuum treatment act evenly on all parts of the workpiece 100, improving the quality and consistency of vacuum treatment, but also further adapts to different types of workpieces 100, thereby enhancing the adaptability to different types of workpieces 100.

[0045] In this embodiment, multiple connecting arms 2 can be directly connected to the inward side wall of the bracket 1 to form a relatively compact spoke-shaped structure, or they can be directly connected to the outward side wall of the bracket 1 to form a radial umbrella-shaped structure with a slightly larger outward structural size. Those skilled in the art can make targeted selections according to the specific usage space. This embodiment mainly takes the example of multiple connecting arms 2 being directly connected to the inward side wall of the bracket 1 for specific details.

[0046] Optionally, the adjustment assembly 4 includes a drive member 41 and an adjustment member 42. The adjustment member 42 is rotatably connected to the connecting arm 2. The drive member 41 is used to push the adjustment member 42 and make the adjustment member 42 rotate to drive the support member 3 to rotate.

[0047] In this embodiment, the drive member 41 can be selectively driven manually or electrically, so that the drive member 41 pushes the adjustment member 42, and the adjustment member 42 drives the support member 3 to rotate, thereby realizing the rotation of the workpiece 100 on the support member 3.

[0048] The cooperation structure between the drive component 41 and the adjustment component 42 is simple and does not require a complex transmission mechanism. This allows the adjustment component 4 to have a smaller structure, reducing its complexity and volume, thereby improving the compactness of the entire workpiece loading mechanism.

[0049] Optionally, a blind plate (not shown in the figure) is provided on the top of the bracket 1 or a blind plate is provided on the hollow part of the bracket 1.

[0050] Specifically, a blind plate is installed above the support 1. The blind plate can be detachably connected to the annular top wall of the support 1. In addition, blind plates can be detachably installed on the hollow parts of the support 1 to collect coating materials or other working substances for vacuum treatment and limit the diffusion of coating materials or other working substances for vacuum treatment in the vacuum treatment chamber.

[0051] Optionally, multiple support members 3 are provided along the circumference of the bracket 1.

[0052] In this embodiment, the internal space of the bracket 1 can accommodate three support members 3. The three support members 3 are arranged along the circumference, and each support member 3 is provided with a connecting arm 2 on both sides, that is, six connecting arms 2 are adaptively provided in the circumference of the bracket 1.

[0053] Those skilled in the art will understand that by reasonably designing the size of the bracket 1, and provided that the connection strength permits, the number of support members 3 can be adjusted to suit the efficiency of vacuum processing, and is not limited to the three provided in this embodiment.

[0054] Please see the appendix Figure 2 - Appendix Figure 5 Optionally, the adjustment assembly 4 further includes a fixed seat 43 fixed on the connecting arm 2. The adjustment member 42 includes a first end 421, a second end 422 and a connecting shaft 423. The first end 421 is fixedly connected to the support member 3. The connecting shaft 423 is hinged to the fixed seat 43. The two ends of the connecting shaft 423 are fixedly connected to the first end 421 and the second end 422 respectively. The driving member 41 pushes the second end 422 to make the first end 421 rotate around the axis of the connecting shaft 423.

[0055] Specifically, the fixing seat 43 is a block structure. The fixing seat 43 can be integrally formed on the connecting arm 2, or it can be fixed to the connecting arm 2 by threaded fasteners. The fixing seat 43 is provided with a hinge hole, through which the connecting shaft 423 passes. The connecting shaft 423 can rotate inside the hinge hole. Furthermore, a first end 421 and a second end 422 are fixedly connected to both sides of the connecting shaft 423 respectively. The first end 421 is fixedly connected to the support member 3 by threaded fasteners. The second end 422 forms an eccentric wheel structure with the axis of the connecting shaft 423 as the rotation center. The eccentric wheel structure of the second end 422 cooperates with the driving member 41. That is, the driving member 41 pushes the second end 422, thereby the second end 422 drives the connecting shaft 423 to rotate, and further causes the first end 421 and the entire support member 3 to rotate.

[0056] In this embodiment, the adjusting member 42, which is formed by the fixed connection of the first end 421, the second end 422 and the connecting shaft 423, has a simple structure and can be rotated by the single drive mode of the driving member 41. The adjusting member 42 and the driving member 41 occupy a very small volume, which ensures the compactness of the structure.

[0057] Optionally, the driving component 41 is a screw screwed to the fixed base 43, and its end can push the second end 422 by turning the screw.

[0058] Specifically, the driving component 41 can be a screw. A threaded hole is provided on the fixed base 43, and the screw is screwed into the threaded hole. By turning the screw, the screw moves back and forth relative to the fixed base 43, thereby pressing and pushing the second end 422. When the screw is screwed in, the end of the screw continuously presses the second end 422, thereby driving the second end 422 and the connecting shaft 423 to rotate, which in turn makes the first end 421 and the support 3 rotate. The rotation angle range can be comprehensively set according to the actual needs of vacuum processing processes such as coating, as well as the size of the second end 422 and the rotation stroke. This embodiment does not make specific limitations.

[0059] In this embodiment, the driving component 41 adopts a simple screw structure, which not only facilitates manual driving by the user but also ensures a simple and compact overall structure. Furthermore, by using the screw-type driving component 41 to push the adjusting component 42, the adjusting component 42 further drives the support component 3 to rotate, thereby realizing the rotation of the workpiece 100 on the support component 3. This makes the rotation accuracy of the workpiece 100 highly controllable.

[0060] Of course, in other embodiments, if space permits, the drive unit 41 can be directly set as a linear motor, and the linear motor can be used to directly squeeze and drive the second end 422 to rotate, so as to improve the automation level of the entire workpiece loading mechanism and vacuum processing equipment.

[0061] In this embodiment, the other side (non-driving side) of the support member 3 is hinged to the connecting arm 2 on the other side. The hinge shaft can be directly set on the non-driving side of the support member 3 to hinge to the connecting arm 2 on the other side, or the non-driving side of the support member 3 can be set with a structure that is roughly the same as the driving side. For example, an adjusting member 42 composed of a first end 421, a second end 422 and a connecting shaft 423 and a fixing seat 43 fixed on the connecting arm 2 are symmetrically arranged on the non-driving side of the support member 3. The second end 422 is fixed to the non-driving side of the support member 3 by screwing. The non-driving side is only a driven structure. The roughly symmetrical structure of the driving side and the non-driving side can ensure that the service life of both sides is roughly the same, so as to facilitate the overall maintenance of each part of the workpiece loading mechanism in the same maintenance cycle.

[0062] Furthermore, a guide groove 4221 is provided on the second end 422, the guide groove 4221 extends along the rotation direction of the second end 422, and a locking bolt 431 is screwed onto the fixing seat 43. The locking bolt 431 passes through the guide groove 4221 and has a first state of locking the second end 422 and a second state of unlocking.

[0063] In this embodiment, the guide groove 4221 is an arc-shaped strip groove. When the angle of the workpiece 100 needs to be adjusted, the locking bolt 431 should be in the second unlocked state. At this time, the driving member 41 can squeeze and push the second end 422 to make the adjusting member 42 rotate. When the workpiece 100 reaches the preset adjustment angle, the second end 422 is locked on the fixed seat 43 by tightening the locking bolt 431. Specifically, a vertical plate is provided on the fixed seat 43. The locking bolt 431 passes through the guide groove 4221 and is screwed onto the vertical plate. The locking bolt 431 can conveniently realize the locking and unlocking of the adjusting member 42. Moreover, the structure is simple and the locking is reliable.

[0064] Optionally, the workpiece loading mechanism also includes an operating member 5. The outer periphery of the operating member 5 is connected to the bracket 1 through multiple support arms 51. The operating member 5 is used to cooperate with the robot and transfer the workpiece loading mechanism through the robot.

[0065] In this embodiment, the operating component 5 is disc-shaped, with a diameter smaller than that of the support 1. The center of the operating component 5 coincides with the center of the support 1. The bottom wall of the operating component 5 is connected to one end of a plurality of support arms 51, while the other ends of the support arms 51 are respectively connected to the inner wall of the support 1. Furthermore, the operating component 5 is provided with a plurality of holes and connecting bosses for cooperating with the robot arm. When the robot arm moves above the operating component 5, it clamps and engages with the operating component 5, thereby realizing the transfer of the entire workpiece loading mechanism.

[0066] By placing the operating component 5 at the center of the entire support 1, the structure that cooperates with the robotic arm is avoided from being placed on the large-diameter support 1, thereby making the size of the robotic arm and other conveying mechanisms smaller and more compact. Where space permits, when the connecting arm 2 extends radially outward along the outer wall of the support 1, the operating component 5 can also be connected to the outside of the support 1.

[0067] In this embodiment, the bracket 1, connecting arm 2, operating component 5, and support arm 51 can be connected by non-removable means such as welding, or by detachable means such as screwing.

[0068] Optionally, at least a portion of the structure of the support 1 and / or at least a portion of the structure of the connecting arm 2 forms the operating element 5, which is used to cooperate with the robot and transfer the workpiece loading mechanism via the robot. Of course, any two or more of the support 1, the connecting arm 2, and the operating element 5 can be an integral structure to reduce the number of parts and assembly steps.

[0069] Optionally, the end of the connecting arm 2 away from the bracket 1 is connected to the operating element 5.

[0070] In this embodiment, the other end of the connecting arm 2 can be fixed to the operating member 5 by threaded fasteners, thereby further reinforcing the operating member 5 and ensuring the stability of the connecting arm 2 itself.

[0071] Optionally, the bracket 1 is also provided with a plurality of hangers 11, and the plurality of hangers 11 are distributed at intervals along the circumference of the bracket 1. The workpiece loading mechanism is connected to the rotary table through the hangers 11.

[0072] In this embodiment, the entire workpiece loading mechanism needs to be attached to the rotating disk. The rotating disk can drive the entire workpiece loading mechanism to rotate, thereby improving the uniformity of vacuum processing such as coating. In this embodiment, three hanging parts 11 are set along the circumference, that is, one hanging part 11 is set every 120°, so as to cooperate with the docking structure on the rotating disk to achieve stable attachment and reliable rotation.

[0073] Furthermore, the connector 11 is L-shaped.

[0074] In this embodiment, the hook 11 is an inverted L-shape. One end of the hook 11 is screwed onto the bracket 1, while the other end is fitted with a screw to form a complete hook structure. After the hook 11 is attached to the docking structure of the rotary table, the hook portion can be closed by tightening the screw to ensure the stability of the attachment. It should be noted that... Figure 1In this design, the rotation axes of the multiple support members 3 are approximately located circumferentially on the rotation axis of the orbital disk. This allows the workpiece loading mechanism of this application to effectively control the uniformity of vacuum treatment of the workpiece 100 in the circumferential direction of the orbital disk by utilizing the orbital disk's rotation, and also to effectively control the uniformity of vacuum treatment of the workpiece 100 in the radial direction of the orbital disk's rotation axis by utilizing the rotation of the support members 3, thereby improving the quality of vacuum treatment.

[0075] The second aspect of this embodiment also relates to a vacuum processing apparatus, which includes a conveying component, the above-mentioned workpiece loading mechanism, and a vacuum processing chamber, wherein the conveying component can convey the workpiece loading mechanism into the vacuum processing chamber.

[0076] Specifically, the conveying assembly includes a robotic arm that can clamp and engage with the operating component 5, thereby transferring the workpiece loading mechanism to the vacuum processing chamber under the drive of the robotic arm for vacuum treatment such as vacuum coating. Understandably, in some embodiments, this vacuum processing equipment is a vacuum processing equipment with automated workpiece conveying function 100.

[0077] Based on this workpiece loading mechanism, the vacuum processing equipment can achieve workpiece angle adjustment, improve the quality and consistency of vacuum processing such as coating, and further adapt to different types of workpieces, thus enhancing its adaptability.

[0078] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A workpiece loading mechanism, characterized in that, include: Frame (1); Connecting arm (2) is connected to the bracket (1); A support member (3) is provided between two adjacent connecting arms (2), and the support member (3) is used to place the workpiece (100); Adjustment component (4) is disposed between the connecting arm (2) and the support member (3), and the adjustment component (4) is used to drive the support member (3) to rotate.

2. The workpiece loading mechanism according to claim 1, characterized in that, The adjustment component (4) includes a drive member (41) and an adjustment member (42). The adjustment member (42) is rotatably connected to the connecting arm (2). The drive member (41) is used to push the adjustment member (42) and make the adjustment member (42) rotate to drive the support member (3) to rotate.

3. The workpiece loading mechanism according to claim 2, characterized in that, The adjustment assembly (4) further includes a fixed seat (43) fixed on the connecting arm (2). The adjustment member (42) includes a first end (421), a second end (422), and a connecting shaft (423). The first end (421) is fixedly connected to the support member (3). The connecting shaft (423) is hinged to the fixed seat (43). The two ends of the connecting shaft (423) are fixedly connected to the first end (421) and the second end (422) respectively. The driving member (41) pushes the second end (422) to make the first end (421) rotate around the axis of the connecting shaft (423).

4. The workpiece loading mechanism according to claim 3, characterized in that, The driving component (41) is a screw screwed to the fixed base (43), and by screwing the screw screw, its end can push the second end (422).

5. The workpiece loading mechanism according to claim 3, characterized in that, The second end (422) is provided with a guide groove (4221), which extends along the rotation direction of the second end (422). A locking bolt (431) is also screwed onto the fixing seat (43). The locking bolt (431) passes through the guide groove (4221) and has a first state of locking the second end (422) and a second state of unlocking.

6. The workpiece loading mechanism according to claim 1, characterized in that, The workpiece loading mechanism also includes an operating component (5), the outer periphery of which is connected to the bracket (1) via multiple support arms (51). The operating component (5) is used to cooperate with the robot arm and transfer the workpiece loading mechanism through the robot arm.

7. The workpiece loading mechanism according to claim 1, characterized in that, At least a portion of the structure of the support (1) and / or at least a portion of the structure of the connecting arm (2) forms an operating element (5), the operating element (5) being used to cooperate with a robot and to transfer the workpiece loading mechanism via the robot.

8. The workpiece loading mechanism according to claim 1, characterized in that, The bracket (1) is also provided with a plurality of hangers (11), and the plurality of hangers (11) are distributed at intervals along the circumference of the bracket (1). The workpiece loading mechanism is connected to the rotary table through the hangers (11).

9. The workpiece loading mechanism according to claim 8, characterized in that, The mounting bracket (11) is L-shaped.

10. The workpiece loading mechanism according to any one of claims 1-9, characterized in that, The support member (3) is provided in multiple parts along the circumference of the bracket (1).

11. A vacuum processing device, characterized in that, It includes a conveying assembly, a workpiece loading mechanism as described in any one of claims 1-10, and a vacuum processing chamber, wherein the conveying assembly is capable of conveying the workpiece loading mechanism into the vacuum processing chamber.

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