Force / torque sensor with extended sensing area and method for manufacturing a force / torque sensor

Abstract

According to an embodiment of the disclosure, a force / torque sensor can include a main body, a substrate connected to the main body, a first electrode connected to the main body, and a second electrode connected to the substrate to correspond to the first electrode, wherein the substrate moves when a force or torque is applied to the main body, and the second electrode moves relative to the first electrode, and the first electrode and the second electrode are opposite in at least two different directions.

Description

Technical Field

[0001] This disclosure relates to a force / torque sensor and a method for manufacturing the force / torque sensor. Background Technology

[0002] With the development of robotics technology, traditional position-based control techniques have been further improved, and applications based on force / torque control are gradually emerging. These applications utilize force / torque data to achieve various methods and forms that were previously difficult to implement, such as fine gripping and assembly operations, and interaction with the external environment. Furthermore, due to the miniaturization of robots and the continuous expansion of sensor applications in recent years, the demand for micro-sensors has been increasing. Micro-sensors are needed not only in robotic hands and grippers, but also in various fields such as surgical robots and virtual reality haptics.

[0003] However, traditional six-axis force / torque sensors utilize strain gauges, requiring the strain gauges to be bonded together. This makes sensor fabrication and miniaturization difficult, while increasing costs. Furthermore, an additional amplifier is needed externally to collect the strain gauge signals, adding to the inconvenience.

[0004] To improve this, capacitive sensors are being developed. Capacitive sensors measure forces and torques applied to the sensor by the change in capacitance caused by the displacement of the substrate. Therefore, increasing the area of ​​the electrodes that sense the capacitance change or the displacement between the electrodes increases the sensor's sensitivity. However, the electrode area and displacement between the electrodes are directly related to the sensor's size, thus conflicting with the goals of sensor miniaturization and weight reduction.

[0005] The information in the background section above is intended only to enhance the understanding of the background of this invention and may therefore include information that does not constitute prior art. Summary of the Invention

[0006] Technical issues

[0007] The force / torque sensor and the method for manufacturing the force / torque sensor as defined in the embodiments of this disclosure can increase the electrode area capable of sensing the displacement of the main body without increasing the sensor size, thereby improving the sensitivity of the sensor.

[0008] However, the technical problems that this invention aims to solve are not limited to those described above, and those skilled in the art can clearly understand other unmentioned problems through the following description of this invention.

[0009] Technical solution

[0010] According to embodiments of this disclosure, a force / torque sensor may include: a body; a substrate connected to the body; a first electrode connected to the body; and a second electrode connected to the substrate to correspond to the first electrode, wherein the substrate moves when a force or torque is applied to the body, and the second electrode moves relative to the first electrode, the first electrode and the second electrode being opposite each other in at least two different directions.

[0011] The first electrode and the second electrode may each be in the shape of a comb, including a plurality of protrusions and grooves, and at least a portion of the plurality of protrusions and grooves are inserted into each other.

[0012] When the second electrode moves relative to the first electrode, the distance between the opposing regions of the first and second electrodes can be reduced or increased, and the first and second electrodes may not be in contact.

[0013] Each of the first electrode and the second electrode may include a plurality of protrusions and a plurality of slots located between the plurality of protrusions, and may have any of the following states: the plurality of protrusions of the first electrode are inserted into the plurality of slots of the second electrode or the plurality of protrusions of the second electrode are inserted into the plurality of slots of the first electrode.

[0014] The plurality of protrusions may be needle-shaped, and the plurality of grooves may be formed between adjacent plurality of protrusions.

[0015] The plurality of protrusions may be spaced apart radially and circumferentially along the force / torque sensor, and are in a block shape.

[0016] The main body may include: a support portion having an opening on its inner side; a displacement portion concentric with the support portion and located at the opening, and connected to the substrate; and a bridging member connecting the support portion and the displacement portion, wherein when the displacement portion is displaced, the capacitance formed between the plurality of first electrodes and the plurality of second electrodes changes.

[0017] The plurality of first electrodes may be arranged on the inner peripheral surface of the support portion, and the plurality of second electrodes are arranged on the substrate to correspond to the plurality of first electrodes, and the plurality of protrusions extend radially along the inner peripheral surface of the support portion.

[0018] The number of protrusions included in the plurality of first electrodes and the plurality of second electrodes may be different, and the protrusions located on the outer edge of any electrode that includes more protrusions may surround the outer surface of other electrodes.

[0019] The end of each of the plurality of protrusions included in the plurality of first electrodes and the plurality of second electrodes may be radially opposite to the plurality of grooves included in the plurality of first electrodes and the plurality of second electrodes.

[0020] The main body may further include: a stepped portion extending from the inner periphery of the support portion toward the displacement portion, and having an end portion spaced apart from the displacement portion, wherein the plurality of first electrodes are respectively mounted on the stepped portion.

[0021] The end of each of the plurality of protrusions included in the plurality of first electrodes and the plurality of second electrodes may be respectively opposite to the plurality of grooves included in the plurality of first electrodes and the plurality of second electrodes along the height direction.

[0022] When no force or torque is applied to the force / torque sensor, the plurality of protrusions may be eccentrically located in the plurality of slots.

[0023] The first electrode and the second electrode may overlap in at least one of the height direction, circumferential direction and radial direction of the force / torque sensor.

[0024] According to embodiments of this disclosure, a method for manufacturing a force / torque sensor may include: applying an adhesive to a stepped portion of a body; placing a first electrode on the stepped portion; applying an adhesive to a mounting area of ​​a substrate; placing a second electrode on the mounting area; and connecting the substrate to a displacement portion of the body, and connecting the body and the substrate such that the first electrode and the second electrode are opposite each other in at least two different directions, wherein the steps of applying the adhesive to the stepped portion and applying the adhesive to the mounting area may be performed simultaneously or either step is performed first, and the steps of placing the first electrode and placing the second electrode may be performed simultaneously or either step is performed first.

[0025] Beneficial effects

[0026] The force / torque sensor and its manufacturing method according to embodiments of the present disclosure increase the sensing area of ​​the electrodes, thereby improving the sensing accuracy and / or sensitivity of the sensor. The force / torque sensor increases the area of ​​the opposing sensing areas by inserting at least a portion of the first and second electrodes into each other. The force / torque sensor includes protrusions for inserting the first and second electrodes into grooves in each other, and can sensitively sense changes in capacitance formed between the first and second electrodes as the second electrode is displaced.

[0027] However, the effects of the present invention are not limited to those described above, and those skilled in the art will clearly understand other technical effects not mentioned in the following description of the present invention. Attached Figure Description

[0028] The accompanying drawings illustrate embodiments of the invention and, together with the following description of the invention, are intended to enhance understanding of the inventive concept. The invention should not be construed as being limited to what is depicted in the drawings.

[0029] Figure 1 The illustration schematically depicts a robot including a force / torque sensor according to an embodiment of the present disclosure.

[0030] Figure 2 A side view of a force / torque sensor according to an embodiment of the present disclosure is shown.

[0031] Figure 3 A front view of a force / torque sensor according to an embodiment of the present disclosure is shown.

[0032] Figure 4 An exploded perspective view of a force / torque sensor according to an embodiment of the present disclosure is shown.

[0033] Figure 5 The body and first electrode according to an embodiment of the present disclosure are shown.

[0034] Figure 6 A substrate and a second electrode according to an embodiment of the present disclosure are shown.

[0035] Figure 7 The insertion states of the first and second electrodes according to embodiments of the present disclosure are shown.

[0036] Figure 8 The displacements of the first and second electrodes according to embodiments of this disclosure are shown.

[0037] Figure 9 Various configurations of the first electrode according to embodiments of the present disclosure are shown.

[0038] Figure 10 A method for manufacturing a force / torque sensor according to an embodiment of the present disclosure is shown.

[0039] Figure 11 Another force / torque sensor according to an embodiment of this disclosure is shown.

[0040] Figure 12 An exploded view of another force / torque sensor according to an embodiment of the present disclosure is shown.

[0041] Best mode

[0042] According to embodiments of this disclosure, a force / torque sensor may include: a body; a substrate connected to the body; a first electrode located on the body; and a second electrode located on the substrate to correspond to the first electrode, wherein the substrate moves when a force or torque is applied to the body, thereby moving the second electrode relative to the first electrode, and at least a portion of the first electrode and the second electrode are inserted into each other. Detailed Implementation

[0043] The embodiments of this disclosure and their implementation methods can be more readily understood by referring to the accompanying drawings and detailed description of the examples. Hereinafter, embodiments are described in further detail with reference to the accompanying drawings. However, the described embodiments are not limited thereto and can be modified in various ways and implemented in other forms. Furthermore, each feature of the various embodiments of this disclosure can be combined with, partially combined with, or entirely combined with each other, and can be technically linked and driven in various ways. Each embodiment can be implemented independently of each other or in combination. The described embodiments are intended to complete this disclosure and fully convey the technical concept of this disclosure to those skilled in the art. It should be understood that this disclosure covers all modifications and equivalents, and these can be substituted within the technical concept and scope of this disclosure. Therefore, for a complete understanding of the various aspects of this disclosure, processes, components, and techniques unnecessary for those skilled in the art may not be described.

[0044] Unless otherwise stated, the same reference numerals, letters, or combinations thereof may denote the same constituent elements in the accompanying drawings and overall description, and their descriptions are omitted. Furthermore, irrelevant parts may be omitted from the description of embodiments for clear illustration.

[0045] The relative dimensions of elements, layers, and regions in the accompanying drawings may be enlarged to make them clearer. Furthermore, shading and / or highlighting in the drawings are generally used to clearly indicate boundaries between adjacent elements. Therefore, the presence or absence of shading or highlighting does not express or indicate a particular material, material properties, size, scale, commonalities between the elements shown, or a preference or requirement for other features, attributes, etc., unless otherwise stated.

[0046] In this specification, various embodiments are described with reference to cross-sectional views, which are schematic examples of embodiments and / or intermediate structures. Therefore, the shapes in the figures may vary due to factors such as manufacturing processes and / or tolerances. Furthermore, the specific structural or functional descriptions disclosed in this specification are merely examples for describing embodiments based on the concepts of this disclosure. Therefore, the embodiments disclosed in this specification are not limited to the shapes shown in the drawings and should be understood to include, for example, shape deviations caused by manufacturing processes.

[0047] The areas shown in the accompanying drawings are schematic in nature and their shapes are not intended to illustrate or limit the actual shape of the device area. Furthermore, as will be understood by those skilled in the art, various modifications can be made to the described embodiments without departing from the technical concept or scope of this disclosure.

[0048] Various specific details are provided in this specification to provide a complete understanding of the various embodiments. However, the various embodiments may be implemented without specific specific details or by including at least one specific detail. In other instances, known structures or devices are shown in block diagram form to avoid unnecessarily obscuring the various embodiments.

[0049] As illustrated in the accompanying drawings, for ease of description, spatially relative terms such as "down," "up," "below," and "above" will be used to describe the relationship between one element or feature and other elements or features. These spatially relative terms are intended to encompass the orientations shown in the drawings and the various orientations of the equipment being used or operated. For example, if the equipment in the drawings is inverted, other elements or features described as "down" or "below" are oriented "above" of other elements or features. Therefore, as exemplary terms, "down" and "below" can both include "up" and "below." The equipment may be oriented in other directions (e.g., rotated 90 degrees or other directions), and the spatially relative descriptions used in this specification should be interpreted accordingly. Similarly, if a first part is said to be "above" a second part, it means that the first part is located above or below the second part.

[0050] Furthermore, the expression "viewed in a plane" means when viewing an object from above, and "in a schematic sectional view" means when an object is cut vertically or horizontally to obtain a schematic sectional view. The term "viewed from the side" means that the first object can be located above, below, or to the side of the second object, or vice versa. Additionally, the terms "overlapping" or "superimposed" can include layers, stacked layers, surfaces, extensions, covers, or partial covers, or any other suitable terms understood and comprehended by a person skilled in the art. The expression "not overlapping" can include meanings such as "from ~ away" or "from ~ separated," and any other suitable equivalents recognized and understood by a person skilled in the art. The terms "surface" and "surface" can refer to the first object and the second object being directly or indirectly opposite each other. When a third object is located between the first and second objects, it can be understood that the first and second objects are facing each other but indirectly opposite each other.

[0051] When describing an element, layer, region, or constituent element as "formed in," "connected to," or "combined with" other elements, layers, regions, or constituent elements, it can refer to its direct formation on, or its formation on, or its indirect formation, connection, or combination with other elements, layers, regions, or constituent elements. Furthermore, "formed," "connected," or "combined" can collectively refer to the direct or indirect combination, or the integral or non-integral combination or connection of elements, layers, regions, or constituent elements, to ensure the existence of at least one element, layer, region, or constituent element. For example, when describing an element, layer, region, or constituent element as "electrically connected" or "electrically combined" with other elements, layers, regions, or constituent elements, it can refer to a direct electrical connection or combination with other elements, layers, regions, or constituent elements, and the presence of other elements, layers, regions, or constituent elements. However, "direct connection" or "direct combination" refers to a constituent element being connected or combined with other constituent elements, or situated on top of another constituent element, in the absence of an intermediate constituent element. Furthermore, in this specification, when a portion of a layer, film, region, guide plate, etc., is formed on other portions, the forming direction is not limited to the top, but includes cases where the portion is formed on the side or bottom. Conversely, when a portion of a layer, film, region, guide plate, etc., is formed "below" other portions, this includes not only the portion being "directly below" other portions, but also cases where there is another portion between the portion and the other portion. Additionally, other expressions describing the relationship between constituent elements, such as "between," "immediately between two," "immediately adjacent," and "directly adjacent," can also be interpreted with similar meanings. Furthermore, when describing an element or layer as being located "between" two elements or layers, it may mean that there is a unique element between the two elements or layers, or that there are other elements between them.

[0052] For the purposes of this specification, expressions such as "at least one" or "any one" do not limit the order of individual elements. For example, "at least one of X, Y, and Z," "at least one of X, Y, or Z," and "at least one selected from the group consisting of X, Y, and Z" can include a single X, a single Y, a single Z, or any combination of two or more of X, Y, and Z. Similarly, expressions such as "at least one of A and B" and "at least one of A or B" can include A, B, or A and B. In this specification, the term "and / or" generally includes all combinations of at least one related list item. For example, expressions such as "A and / or B" can include A, B, or A and B.

[0053] The terms "first," "second," "third," etc., are used in this specification to describe various elements, constituent elements, regions, layers, and / or sections, but these elements, constituent elements, regions, layers, and / or sections are not limited by these terms. These terms are used to distinguish elements, constituent elements, regions, layers, or sections from other elements, constituent elements, regions, layers, or sections. Therefore, the first element, constituent element, region, layer, or section described below may be referred to as the second element, constituent element, region, layer, or section without departing from the technical concept and scope of the invention. Describing an element as a "first" element may not require or imply the existence of a second element or other elements. In this specification, the terms "first," "second," etc., are used to distinguish different categories or sets of elements. For clarity, the terms "first," "second," etc., may respectively represent "first category (or first set)," "second category (or second set)," etc.

[0054] The terminology used in this application is for describing specific embodiments only and is not intended to limit the invention. As used herein, singular expressions include plural expressions, and plural expressions include singular expressions, unless the context clearly specifies otherwise. The terms "comprising," "having," and "possessing" designate the presence of features, integers, and steps specified herein. These expressions do not preclude the presence or addition of at least one other function, step, operation, constituent element, and / or combination thereof.

[0055] When at least one embodiment can be implemented in different forms, a particular process can be performed in a different order. For example, two processes described consecutively can be performed virtually simultaneously, or in the reverse order.

[0056] The terms “actually,” “approximately,” “probably,” and similar terms are not terms indicating degree, but rather terms indicating approximation and indicating a potential range of deviations (e.g., a range of deviations due to limitations of the measurement system) from the measured or calculated value. For example, “approximately” can refer to at least one standard deviation or a range of ±30%, ±20%, ±10%, or ±5% of the specified value.

[0057] Any term used herein, including technical or scientific terms, shall have the same meaning as commonly understood by one of ordinary skill in the art, unless otherwise defined. Terms such as those defined in common dictionaries shall be interpreted as having the same meaning as in the relevant technical and / or the context of this specification, and shall not be idealized or interpreted as having an overly formal meaning, unless otherwise expressly defined.

[0058] Figure 1 This illustration schematically depicts a robot 1 including a force / torque sensor 10 according to an embodiment of the present disclosure. Figure 2 A side view of a force / torque sensor 10 according to an embodiment of the present disclosure is shown. Figure 3 A front view of a force / torque sensor 10 according to an embodiment of the present disclosure is shown. Figure 4 An exploded perspective view of a force / torque sensor 10 according to an embodiment of the present disclosure is shown. Figure 5 The main body 300 and the first electrode 500 according to an embodiment of the present disclosure are shown. Figure 6 This illustration shows a substrate 400 and a second electrode 600 according to an embodiment of the present disclosure. Figure 7 The insertion states of the first electrode 500 and the second electrode 600 according to embodiments of the present disclosure are shown. Figure 8 The displacements of the first electrode 500 and the second electrode 600 according to embodiments of the present disclosure are shown. Figure 9 Various configurations of the first electrode 500 according to embodiments of the present disclosure are shown. Figure 10 A method for manufacturing a force / torque sensor 10 according to an embodiment of the present disclosure is shown.

[0059] Robot 1 may include force / torque sensor 10. For example, such as Figure 1 As shown, the force / torque sensor 10 can be connected to the joints of robot 1. Robot 1 can be an industrial robot used for assembling or processing objects or a manipulator that performs master actions. Alternatively, robot 1 can be a collaborative robot capable of handling, sorting objects, or mimicking user actions. By including the force / torque sensor 10 in its joints, robot 1 can measure the applied force and / or torque in real time during movement. Robot 1 can be fixed to a work area or can be a bipedal robot, quadrupedal robot, or a mobile robot including wheels or tracks.

[0060] Robot 1 may also include a robot arm 20 and a controller 30. The robot arm 20 is a component for performing actions of robot 1 and may have multiple rotational axes. For example, the robot arm 20 may have 6 or 7 degrees of freedom and be mounted in a work area. A force / torque sensor 10 may be located on a joint connected to the robot arm 20. Alternatively, the robot arm 20 may be mounted on a vehicle such as a trolley for movement. The robot arm 20 may be connected to the controller 30 via wired or wireless means, thereby receiving instructions from the controller 30 to perform actions. The controller 30 may include a processor, memory, communication devices, etc., to control the actions of robot 1. The controller 30 can control the actions of the robot arm 20, such as rotation and position. For example, the controller 30 can move the robot arm 20 toward an object by sending a signal to it. The controller 30 may be located outside or inside robot 1, for example, inside the robot arm 20. The controller 30 can calculate the magnitude and direction of the force or torque applied to the force / torque sensor 10 based on the capacitive displacement received from the force / torque sensor 10.

[0061] Controller 30 may use a direct circuit structure, wherein each control function is performed by at least one microprocessor or other control device, such as a memory, processor, logic circuitry, and look-up table. Controller 30 may be implemented as part of a module, program, or code including at least one executable instruction (for performing a specific logical function). Controller 30 may include, or be executed by, a processor such as a central processing unit for performing each function or microprocessor. Controller 30 may include communication devices capable of sending and receiving data with external devices. The communication devices may include at least one combination of a digital modem, an RF modem, antenna circuitry, a Wi-Fi chip, and associated software and / or firmware.

[0062] Force / torque sensor 10 can be mounted on the joints of robot arm 20 to measure the force and / or torque applied by robot 1 during operation in real time and transmit it to controller 30. Force / torque sensor 10 can have a cylindrical shape. For example, as Figure 2 As shown, the force / torque sensor 10 can be mounted on the end of a robotic arm 20, on which an end-of-arm tool (EOAT) is mounted. Alternatively, the force / torque sensor 10 may comprise a plurality of force / torque sensors 10 mounted on the joints of the robotic arm 20. The force / torque sensor 10 can measure the force / torque experienced by the EOAT when interacting with an object, or the force / torque applied to the joints, etc., when the robotic arm 20 moves. The force / torque sensor 10 can be a flat cylinder, but can also have various shapes and sizes depending on the shape and size of the robotic arm 20. The force / torque sensor 10 can be a capacitive sensor. The force / torque sensor 10 can sense the capacitance change formed between electrodes due to an externally applied force or torque, and sense the force or torque. For example, the force / torque sensor 10 can sense the force or torque by measuring the capacitance change based on the displacement of the contained electrodes.

[0063] The force / torque sensor 10 may include a main body 300, a substrate 400, a first electrode 500, and a second electrode 600.

[0064] The main body 300 can be displaced by a force or torque applied externally to the force / torque sensor 10. For example, as Figure 2As shown, the main body 300 is a flattened cylinder located at the joint of the robot arm 20. When the robot arm 20 moves, at least a portion of the main body 300 is displaced by a force or torque. The main body 300 can support a substrate 400. For example, the substrate 400 can be mounted in a movable portion of the main body 300, and a first electrode 500 can be located in a fixed portion of the main body 300, corresponding to a second electrode 600 located on the substrate 400. Therefore, the substrate 400 moves when a force or torque is applied to the main body 300, thereby changing the capacitance formed between the first electrode 500 and the second electrode 600. The main body 300 can be used as a ground electrode. That is, a predetermined potential (e.g., a negative potential or a positive potential) can be applied to the entire main body 300, and the same potential can be applied to the first electrode 500, which is electrically connected to the main body 300. Furthermore, the first electrode 500 and its corresponding second electrode 600 can form a cell as a sensing area. The entirety or part of the main body 300 can include conductive materials such as metal.

[0065] like Figure 4 and Figure 5 As shown, the main body 300 may include a support part 310, a displacement part 320, a bridging member 330, and a step part 340.

[0066] The support portion 310 can support other structures of the main body 300, such as the displacement portion 320, the bridging member 330, and the step portion 340. For example, the support portion 310 can be annular and supported by the inner surface of the joint of the robot arm 20. The support portion 310 includes an opening on its inner side, and the displacement portion 320, the bridging member 330, and the step portion 340 can be located within the opening. For example, as... Figure 4 and Figure 5 As shown, the displacement portion 320 is spaced apart from the inner peripheral surface of the support portion 310, and the bridging member 330 can connect the inner peripheral surface of the support portion 310 and the displacement portion 320. Furthermore, the step portion 340 can be located on the inner peripheral surface of the support portion 310 and extend towards the displacement portion 320. The support portion 310 can be a non-moving and fixed (or non-deformable) part of the main body 300 when the force / torque sensor 10 receives force or torque from the outside. Therefore, the support portion 310 can serve as a standard for the displacement of movable parts (e.g., the displacement portion 320) in the main body 300.

[0067] The displacement portion 320 can be located at the opening of the support portion 310. For example, the displacement portion 320 can be coaxial with the support portion 310 and can be annular with a diameter smaller than that of the support portion 310. The displacement portion 320 is the part that directly receives force when the robot arm 20 moves. If a force or torque generated when the robot arm 20 moves is applied, the displacement portion 320 can move. The displacement portion 320 can be connected to the substrate 400. For example, the substrate 400 can be mounted on the opposite side of the displacement portion 320 that receives force or torque from the joint. The substrate 400 can be attached to the displacement portion 320 by screws or welding, etc. When the displacement portion 320 moves, the substrate 400 moves, and the second electrode 600 mounted on the substrate 400 also moves, thereby changing the capacitance between the first electrode 500 and the second electrode 600. The displacement portion 320 can be a movable (or deformable) part of the main body 300 when the force / torque sensor 10 receives force or torque from the outside.

[0068] The bridging member 330 can connect the support portion 310 and the displacement portion 320. For example, the bridging member 330 can extend from the inner circumference of the support portion 310 to the displacement portion 320, with a first end connected to the inner circumferential surface of the support portion 310 and a second end connected to the outer circumferential surface of the displacement portion 320. The stiffness of the bridging member 330 can be lower than that of the support portion 310 or the displacement portion 320. For example, the bridging member 330 can have a stiffness that temporarily deforms slightly under the action of a force or torque applied from outside the force / torque sensor 10. Therefore, the bridging member 330 is temporarily deformed by the force or torque applied to the displacement portion 320, thereby causing the displacement portion 320 to move. If the applied force or torque disappears, the bridging member 330 returns to its original state, and the displacement portion 320 can also return to its original position. That is, the bridging member 330 can be a component that allows the displacement portion 320 to be displaced by an external force or torque.

[0069] The bridging member 330 can have two parallel rod structures. For example, as Figure 5 As shown, the bridging member 330 may have a pair of rod structures extending side-by-side from different points of the support portion 310 and connected to the displacement portion 320. With respect to the displacement portion 320, the bridging member 330 may be located vertically, horizontally, or vertically (within a certain distance). Figure 5(Referring to) 4 points. For example, four bridging members 330 can be arranged symmetrically about the center of the displacement portion 320. Each bridging member 330 can have two parallel rod structures and allow the displacement portion 320 to undergo displacement to the extent of measurable capacitance change, while preventing excessive torsion or permanent deformation under strong external forces. A gap can be formed between the two rods of the bridging member 330 to connect the support portion 310 and the displacement portion 320 at multiple points. The bridging member 330 can have a fixed cross-sectional area, or a shape where the cross-sectional area varies towards the support portion 310 or the displacement portion 320. Four bridging members 330 are shown in the figure, but this is only an example; the number of bridging members 330 can be two, three, five, or more. For example, the number of bridging members 330 can be six. In addition, besides the two parallel rod structures, the bridging members 330 can have various shapes. For example, the bridging member 330 can have a single rod structure.

[0070] The stepped portion 340 is the region where the first electrode 500 is located, and it can extend from the inner peripheral surface of the support portion 310. For example, as Figure 5 As shown, a space is formed between two circumferentially adjacent bridging members 330, and a step portion 340 may be located within this space. The step portion 340 may be located at the center between the two bridging members 330. For example, the step portion 340 may form an angle with the adjacent bridging member 330. ,angle The angle can vary depending on the number of bridging elements 330 and the first electrode 500. That is, when there are four bridging elements 330 and four first electrodes 500, the angle... It can be 45 degrees. Although four steps 340 are shown in the accompanying drawings, the number of steps 340 can vary depending on the number of first electrodes 500. For example, the number of steps 340 can be two, three, five, or more. For example, the number of steps 340 can be six, and six first electrodes 500 can be located in each step 340. Figure 5 As shown, the four stepped portions 340 are quasi-symmetrical about the center of the support portion 310. The first electrode 500 can be located on one side of the stepped portion 340, and the first electrode 500 can be opposite to the second electrode 600 of the substrate 400. The size of the stepped portion 340 can be the same as or smaller than the size of the first electrode 500. Alternatively, the size of the stepped portion 340 can be larger than the size of the first electrode 500. The end of the stepped portion 340 can be spaced apart from the outer peripheral surface of the displacement portion 320.

[0071] The main body 300 may include an opening at its center. For example, as Figure 4As shown, the support portion 310, the displacement portion 320, and the bridging member 330 can all be located coaxially and include openings that communicate with each other internally. These openings can also be formed on the substrate 400. Therefore, components such as rotating shafts, wires, and cables can be inserted into or pass through these openings.

[0072] The substrate 400 can be connected to the main body 300 and can be used as a sensing unit for sensing changes in capacitance. Furthermore, the substrate 400 can transmit the sensed capacitance changes to an external device such as a controller 30, or directly calculate the applied force or torque through internal computing circuitry. For example, the substrate 400 can be connected to the displacement unit 320 of the main body 300, thereby moving together with the displacement unit 320. The substrate 400 can be a conventional PCB.

[0073] The mounting area 420 and the component 430 may be located on the mounting surface 410 of the substrate 400. For example, as Figure 4 As shown, the mounting surface 410 of the substrate 400 can be the surface facing the stepped portion 340 where the first electrode 500 is located. Various circuits can be formed on the mounting surface 410 of the substrate 400 for sensing capacitance changes, amplifying signals, and controlling noise. The mounting region 420 can include a plurality of mounting regions 420 mounted on the mounting surface 410, and the number of mounting regions 420 can be the same as the number of second electrodes 600. For example, as Figure 6 As shown, the total number of mounting areas 420 can be four. The mounting areas 420 can be made of a conductive material such as metal, and their dimensions are the same as or larger than the second electrode 600. Component 430 includes a plurality of components 430 mounted on the mounting surface 410 of the substrate 400, and can be components used to implement sensing operations of the substrate 400. Alternatively, component 430 can be a communication component for sending and receiving signals or data with external devices such as the controller 30.

[0074] The first electrode 500 can be located on the main body 300 and can form a capacitor between it and the second electrode 600. For example, the first electrode 500 can include metals or metal alloys such as aluminum, copper, and silver as conductive materials. The first electrode 500 can be located on a fixed portion of the main body 300 and can remain in place when the displacement portion 320 moves. Therefore, the substrate 400 moves with the displacement portion 320, thereby displacing the second electrode 600 relative to the first electrode 500. The substrate 400 can sense the capacitance change caused by the displacement of the second electrode 600, thereby measuring the force or torque applied from the outside. The first electrodes 500 can be located on the stepped portions 340 of the main body 300. For example, four first electrodes 500 can be located on four stepped portions 340 respectively.

[0075] The second electrode 600 may be located on the substrate 400. For example, the second electrode 600 may include metals or metal alloys such as aluminum, copper, and silver as conductive materials. Furthermore, the second electrode 600 may be located in the mounting region 420 of the substrate 400 and move with the displacement portion 320. For example, four second electrodes 600 may be located in four different mounting regions 420. Except for location, the second electrode 600 may include the same configuration as the first electrode 500, and the following description of the first electrode 500 can replace the description of the second electrode 600.

[0076] The first electrode 500 may include a plurality of protrusions and recesses. The first electrode 500 may include portions of different dimensions (length, width, height) and / or shapes. For example, the first electrode 500 may include a plurality of protrusions and grooves. The first electrode 500 may be comb-shaped. The plurality of protrusions and recesses or protrusions and grooves of the first electrode 500 may be inserted into the plurality of protrusions and recesses or protrusions and grooves of the second electrode 600, thereby allowing the first electrode 500 and the second electrode 600 to have a shape in which a portion is inserted into each other. Therefore, the first electrode 500 and the second electrode 600 may be arranged such that two or more surfaces face each other, rather than only one surface facing each other. That is, the first electrode 500 and the second electrode 600 may face each other in at least two different directions. With this structure, the area of ​​the opposing region of the first electrode 500 and the second electrode 600 can be increased, thereby improving the sensitivity of the force / torque sensor 10. For example, the first electrode 500 and the second electrode 600 may overlap in at least one of the height direction, circumferential direction, and radial direction of the force / torque sensor 10.

[0077] When the second electrode 600 moves relative to the first electrode 500, the distance between the opposing areas of the first electrode 500 and the second electrode 600 can be reduced or increased, and the first electrode 500 and the second electrode 600 may not be in contact.

[0078] Each of the first electrode 500 and the second electrode 600 may include a plurality of protrusions and a plurality of slots located between the plurality of protrusions, and may have either of the following states: the plurality of protrusions of the first electrode 500 are inserted into the plurality of slots of the second electrode 600 or the plurality of protrusions of the second electrode 600 are inserted into the plurality of slots of the first electrode 500.

[0079] For example, the first electrode 500 may include a plurality of protrusions 510 and grooves 520. Figure 7 and Figure 9 As shown in (a), on one side of the first electrode 500, along (along) Figure 7A plurality of protrusions 510 can be formed (with the height direction pointing upwards). The plurality of protrusions 510 can be spaced apart circumferentially, and a groove 520 can be formed between each protrusion 510. The plurality of protrusions 510 and grooves 520 can be arranged alternately circumferentially. The plurality of protrusions 510 and grooves 520 can extend continuously radially along the force / torque sensor 10.

[0080] For example, the protrusion 510 can have a width W1, and the groove 520 can have a width W2, with the width W2 being greater than the width W1. Therefore, the protrusion 610 of the second electrode 600, which has the same shape as the first electrode 500, can be stably inserted into the groove 520 without contacting it. For example, the width W1 can be 30% to 90% of the width W2. When the width W1 is less than 30% of the width W2, the distance between the first electrode 500 and the second electrode 600 is too large, thus reducing the capacitance change amplitude and consequently decreasing the sensitivity of the force / torque sensor 10. When the width W1 is greater than 90% of the width W2, the first electrode 500 and the second electrode 600 can contact each other due to the insertion position of the first electrode 500 and the second electrode 600 and the action of external force. Alternatively, the width W1 can be 35% to 85% of the width W2.

[0081] In the initial state where the first electrode 500 and the second electrode 600 are inserted into each other, that is, in the state where no force or torque is applied to the force / torque sensor 10 from the outside, each protrusion 510, 610 may be eccentrically located in the slots 520, 620. For example, as Figure 7 As shown, with the protrusion 610 of the second electrode 600 inserted into the groove 520 of the first electrode 500, the distance between one side of the protrusion 610 and the groove 520 can be C1, and the distance between the other side of the protrusion 610 and the groove 520 can be C2. Furthermore, C1 can be greater than C2. The protrusion 510 of the first electrode 500 and the groove 620 of the second electrode 600 can also be arranged identically. That is, the centers of the protrusions 510 and 610 can be separated from the centers of the grooves 520 and 620. As described above, each protrusion 510 and 610 is eccentrically located in the grooves 520 and 620, allowing for more sensitive measurement of the capacitance change formed between the second electrode 600 and the first electrode 500, even if the second electrode 600 moves in any direction. However, the arrangement of the first electrode 500 and the second electrode 600 is not limited to this; the centers of the protrusions 510 and 610 can be located at the centers of the grooves 520 and 620.

[0082] In the initial state where the first electrode 500 and the second electrode 600 are inserted into each other, that is, in the state where no force or torque is applied to the force / torque sensor 10 from the outside, the distance between the end of the protrusion 510 and the mounting surface of the second electrode 600 (e.g., mounting area 420) can be L1, and the distance between the end of the protrusion 610 and the mounting surface of the first electrode 500 (e.g., step 340) can be L2. When the first electrode 500 and the second electrode 600 have the same shape and size, L1 and L2 can be the same. L1 and L2 can each be 3% to 50% of the height of the first electrode 500 and the second electrode 600. When it is less than 3%, the first electrode 500 and the second electrode 600 are inserted too deeply into each other, which may cause them to come into contact due to externally applied force or torque. When it is greater than 50%, the first electrode 500 and the second electrode 600 are inserted too shallowly into each other, which may reduce the sensing area. Alternatively, L1 and L2 can each be 5% to 40% of the height of the first electrode 500 and the second electrode 600.

[0083] In the initial state where the first electrode 500 and the second electrode 600 are inserted into each other, that is, in the state where no force or torque is applied to the force / torque sensor 10 from the outside, the distance between the end of the protrusion 510 and the groove 620 can be D1, and the distance between the end of the protrusion 610 and the groove 520 can be D2. When the first electrode 500 and the second electrode 600 have the same shape and size, D1 and D2 can be the same. D1 and D2 can be 3% to 50% of the height of the protrusions 510 and 610, respectively. When it is less than 3%, the first electrode 500 and the second electrode 600 are inserted too deeply into each other, and thus may come into contact due to externally applied force or torque. When it is greater than 50%, the first electrode 500 and the second electrode 600 are inserted too shallowly into each other, and thus the sensing area may be reduced. Alternatively, D1 and D2 can be 5% to 40% of the height of the protrusions 510 and 610, respectively.

[0084] Figure 8 This illustrates a situation where the second electrode 600 is displaced due to an externally applied force or torque. For example, when a downward force or torque is applied to the body 300 along the height direction, the second electrode 600 moves closer to the first electrode 500, such as... Figure 8As shown in (a), each protrusion 510, 610 is inserted deeper into each groove 520, 620. Furthermore, the distance between the protrusion 510 and the groove 620 is reduced to D1', and the distance between the protrusion 610 and the groove 520 is reduced to D2'. As the distance between the protrusions 510, 610 and the grooves 520, 620 decreases, the distance between the ends of the protrusions 510, 610 and the bottom surfaces of the grooves 520, 620 (opposite to the ends) also decreases, resulting in a change in capacitance. Furthermore, the deeper insertion of the protrusions 510, 610 into the grooves 520, 620 increases the area of ​​the region where the sides of the protrusions 510, 610 face the sides of the grooves 520, 620, thus similarly resulting in a change (increase) in capacitance. The substrate 400 can sense externally applied force or torque by sensing the capacitance change as described above, or transmit the capacitance change to the outside (e.g., controller 30). The substrate 400 can be individually connected to the protrusions 610 and grooves 620 of the second electrode 600. For example, the substrate 400 can be individually connected to a plurality of protrusions 610 and a plurality of grooves 620, thereby allowing individual sensing of capacitance changes formed by each protrusion 610, groove 620 and the first electrode 500.

[0085] The accompanying drawings illustrate how a first electrode 500 and a second electrode 600 can be brought closer together by applying a downward force or torque along the height direction. Conversely, force or torque can also be sensed by sensing changes in capacitance in the same way. That is, when the second electrode 600 moves upward along the height direction, the area of ​​the opposing region between the first electrode 500 and the second electrode 600 decreases, thereby causing a change (decrease) in capacitance. The substrate 400 can sense externally applied force or torque by sensing the capacitance change as described above, or transmit the capacitance change to an external source (e.g., a controller 30).

[0086] For example, when a force or torque is applied to the body 300 along the circumferential (or planar) direction, the second electrode 600 moves circumferentially to one side relative to the first electrode 500, such as... Figure 8 As shown in (b), each protrusion 510, 610 is closer to any adjacent protrusion 510, 610 and further away from the other adjacent protrusion 510, 610. For example, as shown in the figure, when the second electrode 600 moves to the right, the distance between one side of protrusion 610 and one side of an adjacent protrusion 610 can decrease to C2', and the distance between the other side of protrusion 610 and one side of an adjacent protrusion 610 can increase to C1'. According to this distance change, a capacitance change occurs between the first electrode 500 and the second electrode 600, and the substrate 400 can sense the force or torque applied from the outside by sensing this change, or transmit the capacitance change to the outside (e.g., controller 30). The figure shows the second electrode 600 approaching the first electrode 500 in the left direction; conversely, force or torque can also be sensed by sensing the capacitance change in the same way.

[0087] As described above, the sensing sensitivity of the force / torque sensor 10 can be improved by increasing the relative sensing area of ​​the first electrode 500 and the second electrode 600. That is, the relative sensing area can be increased by inserting at least a portion of the first electrode 500 and the second electrode 600 into each other.

[0088] Either the first electrode 500 or the second electrode 600 can serve as a ground electrode, and the other as a sensing electrode. For example, the first electrode 500 (or the entire body 300 electrically connected to the first electrode 500) can serve as a ground electrode, and the second electrode 600 can serve as a sensing electrode. Corresponding potentials can be applied to the sensing electrode and the ground electrode. For example, a (-) potential can be applied to the first electrode 500, and a (+) potential can be applied to the second electrode 600. Alternatively, potentials of opposite signs can be applied. The magnitude and sign of the potentials can vary.

[0089] Each end of the plurality of protrusions 510, 610 included in the plurality of first electrodes 500 and the plurality of second electrodes 600 may be opposite to the plurality of grooves 520, 620 included in the plurality of first electrodes 500 and the plurality of second electrodes 600 in the height direction, respectively.

[0090] The first electrode 500 may have other shapes. For example, as described above, with the first electrode 500 mounted on the stepped portion 340, a plurality of protrusions 510 and grooves 520 may be arranged side by side radially. Figure 9 (a)). Conversely, as Figure 9 As shown in (b), the protrusions 510 and grooves 520 in the first electrode 500 can be arranged differently. That is, a plurality of protrusions 510 and grooves 520 can be arranged side by side in a direction perpendicular to the radial direction (i.e., circumferential direction).

[0091] For example, such as Figure 9 As shown in (c), the first electrode 500 may have a plurality of pin-shaped protrusions 510. The protrusions 510 may be arranged in a plurality of rows radially and circumferentially. Furthermore, the protrusions 510 may be cylindrical or elliptical cylinders, or polyprisms such as triangular or quadrangular prisms. Alternatively, the protrusions 510 may have a composite shape comprising both planar and curved surfaces. A plurality of grooves 520 may be formed between the plurality of protrusions 510. The plurality of grooves 520 may be formed between adjacent plurality of protrusions 510. For example, a plurality of grooves 520 may be formed in the region between circumferentially and / or radially adjacent plurality of protrusions 510. The figures show a plurality of protrusions 510 arranged side-by-side, but the plurality of protrusions may be arranged in an alternating manner. For example, the plurality of protrusions 510 contained in any row arranged radially may be located between protrusions 510 contained in an adjacent row.

[0092] The first electrode 500 may include a plurality of protrusions 510 separated from each other. For example, as Figure 9 As shown in (d), a plurality of protrusions 510 may be spaced apart radially and circumferentially along the force / torque sensor 10 and are block-shaped. The plurality of protrusions 510 may be elongated in one direction (e.g., radially). Furthermore, grooves 520 may be formed between circumferentially adjacent protrusions 510. Alternatively, the protrusions 510 shown in the figures may have a radially extending shape, but the protrusions 510 may have a shape that extends longer circumferentially. Alternatively, the protrusions 510 may have a shape inclined at a predetermined angle to the radial direction, rather than a shape perpendicular to the radial direction. Alternatively, the protrusions 510 may be polygonal or elliptical, such as triangles, pentagons, etc., other than rectangles.

[0093] like Figure 9 As shown in (e), the protrusions 510 of the first electrode 500 can be arranged alternately with each other.

[0094] The second electrode 600 can also have the same shape and arrangement as the first electrode 500 described above. In addition, the first electrode 500 can have various shapes that can increase the sensing area between it and the second electrode 600.

[0095] The following is for reference Figure 10 A method for manufacturing the force / torque sensor 10 is described.

[0096] First, place the main body 300 in the appropriate position ( Figure 10 (a)). For example, the main body 300 can be placed on a flat ground with the step portion 340 facing upwards.

[0097] Then, adhesive A is applied to the upper surface of the step portion 340. Figure 10 (b)). Adhesive A can be a conductive adhesive such as silver epoxy resin.

[0098] Then, the first electrode 500 is placed on the stepped portion 340 coated with adhesive A. Figure 10 (c)).

[0099] Then, place the substrate 400 in the appropriate position. For example, the substrate 400 can be placed on a flat surface with the mounting area 420 facing upwards. Then, apply adhesive A to the mounting area 420 of the substrate 400. Figure 10 (d)

[0100] Then, the second electrode 600 is placed in the mounting area 420 coated with adhesive A. Figure 10 (e)).

[0101] Then, connect the main body 300 and the substrate 400 ( Figure 10(f) For example, the substrate 400 can be connected to the displacement portion 320 of the body 300 by means of screws or welding. Furthermore, the body 300 and the substrate 400 can be connected such that the first electrode 500 located on the body 300 and the second electrode 600 located on the substrate 400 overlap each other, that is, at least a portion of the first electrode 500 is inserted into at least a portion of the second electrode 600. For example, the body 300 and the substrate 400 can be connected such that the protrusion 510 of the first electrode 500 is inserted into the groove 620 of the second electrode 600, and the protrusion 610 of the second electrode 600 is inserted into the groove 520 of the first electrode 500. That is, the body 300 and the substrate 400 can be connected such that a plurality of protrusions 510 of the first electrode 500 and a plurality of protrusions 610 of the second electrode 600 are staggered and do not contact each other.

[0102] The steps of applying adhesive A to the main body 300 and placing the first electrode 500, and applying adhesive A to the substrate 400 and placing the second electrode 600, can be performed simultaneously or either step can be performed first.

[0103] Figure 11 Another form of force / torque sensor 10A is shown.

[0104] according to Figure 11 The force / torque sensor 10A may include a main body 300, a substrate 400, a first electrode 500, and a second electrode 600. The main body 300 may include a support portion 310 and a displacement portion 320. These components may be the same as the support portion 310 and displacement portion 320 of the force / torque sensor 10 described above, and detailed descriptions will be omitted. The main body 300 may not include the stepped portion 340.

[0105] The main body 300 may include bridging members 330. A plurality of bridging members 330 may be equidistantly located between the inner peripheral surface of the support portion 310 and the outer peripheral surface of the displacement portion 320. For example, the number of bridging members 330 may be six, arranged at a 60-degree angle. The bridging members 330 may have a shape in which the cross-sectional area gradually increases from the inner peripheral surface of the support portion 310 to the outer peripheral surface of the displacement portion 320. The bridging members 330 have a larger area in the portion adjacent to the displacement portion 320 where a force or torque is directly applied, thereby enabling them to withstand deformation or damage caused by the repeated movement of the displacement portion 320.

[0106] At least one first electrode 500 may be located on the inner circumferential surface of the support portion 310. For example, the first electrode 500 may be located between two circumferentially adjacent bridging members 330, and extend from the inner circumferential surface of the support portion 310 to the displacement portion 320, and be spaced apart from the displacement portion 320. The first electrode 500 may be integrally formed with the body 300. For example, the first electrode 500 may be machined integrally with the body 300, rather than being separately manufactured from the body 300 and then adhered or assembled. That is, the first electrode 500 and the body 300 may be manufactured as a single unit. Therefore, there is no need to worry about the first electrode 500 detaching from the body 300, and there is no need to provide an additional stepped portion 340 on the body 300 for supporting the first electrode 500.

[0107] The first electrode 500 may include a plurality of protrusions 510 and a plurality of slots 520. Furthermore, the plurality of protrusions 510 and slots 520 may be arranged radially along the force / torque sensor 10A (or radially along the body 300). That is, unlike the arrangement of the plurality of protrusions 510 and slots 520 of the first electrode 500 along the height direction of the force / torque sensor 10 (or the height direction or Z-axis direction of the body 300), according to... Figure 11 The plurality of protrusions 510 and the plurality of grooves 520 of the first electrode 500 can extend radially toward the center of the second electrode 600. For example, six first electrodes 500 can be arranged at equal angles.

[0108] The second electrode 600 may be located on the substrate 400 to correspond to the first electrode 500. Similar to the first electrode 500, the second electrode 600 may include a plurality of protrusions 610 and a plurality of grooves 620. For example, as... Figure 11 As shown, with the main body 300 and the substrate 400 combined, the protrusions 510 and grooves 520 of the first electrode 500 can overlap with the protrusions 610 and grooves 620 of the second electrode 600 in the radial and circumferential directions. This increases the sensing area between the first electrode 500 and the second electrode 600, thereby improving the sensitivity of the force / torque sensor 10A. For example, six second electrodes 600 can be arranged at equal angles.

[0109] The second electrode 600 may include a mating hole 630. For example, as Figure 11 As shown, the second electrode 600 may include at least one bonding hole 630 on the opposite side of the first electrode 500. The second electrode 600 can be connected to the substrate 400 by inserting bolts or the like into the bonding hole 630 without the need for additional conductive adhesive. Figure 6 As shown, the second electrode 600 can be located in the mounting area 420 of the substrate 400.

[0110] Compared to the force / torque sensor 10 described above, the insertion form of the first electrode 500 and the second electrode 600 of the force / torque sensor 10A and / or the extension direction of the second electrode 600 may be different. For example, as Figure 11 As shown, the first electrode 500 can be located on the inner peripheral surface of the support portion 310, and the second electrode 600 is arranged on the substrate 400 to correspond to the first electrode 500, and a plurality of protrusions 610 can extend radially along the inner peripheral surface of the support portion 310. Furthermore, the plurality of protrusions 610 of the second electrode 600 can be inserted between a plurality of slots 520 of the first electrode 500, and the plurality of protrusions 510 of the first electrode 500 can be inserted between a plurality of slots 620 of the second electrode 600.

[0111] Unlike the plurality of protrusions 610 of the second electrode 600 of the force / torque sensor 10, which extend along the height direction of the force / torque sensor 10, the plurality of protrusions 610 of the second electrode 600 may extend radially along the force / torque sensor 10A. Each end of the plurality of protrusions 510, 610 included in the plurality of first electrodes 500 and the plurality of second electrodes 600 may be radially opposite to the plurality of grooves 520, 620 included in the plurality of first electrodes 500 and the plurality of second electrodes 600, respectively.

[0112] Therefore, when the second electrode 600 is inserted into the first electrode 500 in the vertical direction, the length of overlap between the plurality of protrusions 610 of the second electrode 600 and the first electrode 500 is limited to the height of the first electrode 500. However, in the force / torque sensor 10A, the plurality of protrusions 610 of the second electrode 600 are radially inserted into the plurality of slots 520 of the first electrode 500, thereby increasing the relative area of ​​the first electrode 500 and the second electrode 600. Therefore, the sensing sensitivity and accuracy of the force / torque sensor 10A can be improved.

[0113] The number of protrusions 510 of the first electrode 500 and the number of protrusions 610 of the second electrode 600 may be different. The number of protrusions included in the plurality of first electrodes 500 and the plurality of second electrodes 600 may be different, and the protrusions located at the outer edge of any electrode (e.g., the first electrode 500 or the second electrode 600) that includes more protrusions may surround the outer surface of other electrodes (e.g., the second electrode 600 or the first electrode 500).

[0114] For example, such as Figure 11As shown, the number of protrusions 610 of the second electrode 600 (e.g., 5) can be more than the number of protrusions 510 of the first electrode 500 (e.g., 4), so that the second electrode 600 surrounds the first electrode 500. Therefore, the two protrusions 610 located at the outer edge can face the outer surface of the first electrode 500, further increasing the overlapping area of ​​the first electrode 500 and the second electrode 600. Alternatively, the number of protrusions 510 of the first electrode 500 can be more than the number of protrusions 610 of the second electrode 600. The two protrusions located at the outer edge (i.e., surrounding the other electrodes) can have a longer length than the other protrusions. That is, the length of the multiple protrusions located at the outer edge is not limited to the depth of the groove of the opposite side electrode, and therefore has a longer length than the other protrusions, thereby increasing the overlapping area between the first electrode 500 and the second electrode 600. For example, as... Figure 11 As shown, compared to the other protrusions 610, the two protrusions 610 located at the outer edge of the plurality of protrusions 610 of the second electrode 600 can extend radially longer. Alternatively, when the first electrode 500 surrounds the second electrode 600, the two protrusions 510 located at the outer edge of the plurality of protrusions 510 can extend radially longer compared to the other protrusions 510.

[0115] according to Figure 11 The manufacturing method of the force / torque sensor 10A shown is as follows.

[0116] First, place the substrate 400 in a suitable position. For example, the substrate 400 can be placed on a flat surface with the mounting area 420 facing upwards.

[0117] Then, the second electrode 600 is placed on the substrate 400. The second electrode 600 may be located in the mounting area 420 of the substrate 400 and may be fixed to the substrate 400 by bolts or the like.

[0118] Then, the main body 300 and the substrate 400 are connected. For example, the substrate 400 can be connected to the displacement portion 320 of the main body 300 by means of screws or welding. Furthermore, the main body 300 and the substrate 400 can be connected such that the first electrode 500 located on the main body 300 and the second electrode 600 located on the substrate 400 overlap each other, that is, at least a portion of the first electrode 500 is inserted into at least a portion of the second electrode 600. For example, the main body 300 and the substrate 400 can be connected such that the protrusion 510 of the first electrode 500 is inserted into the groove 620 of the second electrode 600, and the protrusion 610 of the second electrode 600 is inserted into the groove 520 of the second electrode 600. That is, the main body 300 and the substrate 400 can be connected such that the plurality of protrusions 510 of the first electrode 500 and the plurality of protrusions 610 of the second electrode 600 are staggered and do not contact each other.

[0119] For example, such as Figure 12 As shown, the force / torque sensor 10B may also include a housing 100 and a cover 200.

[0120] The housing 100 can accommodate and support other structures of the force / torque sensor 10B, such as the body 300, the substrate 400, the first electrode 500, and the second electrode 600. For example, as... Figure 12 As shown, the housing 100 is cylindrical and may include an internal space for accommodating the main body 300 and the substrate 400. The housing 100 can be connected to the inner side of the joint of the robot arm 20 and support the main body 300. For example, the side of the housing 100 into which the main body 300 and the substrate 400 are inserted may be open, and the main body 300 and the substrate 400 are inserted through the open side. Furthermore, the main body 300 may be accommodated within the housing 100 such that the outer peripheral surface of the main body 300 contacts the inner peripheral surface of the housing 100. In addition, the housing 100 may fix at least a portion of the main body 300. For example, the support portion 310 of the main body 300 may be fixed to the inner side of the housing 100, and in this state, the displacement portion 320 may be located inside the support portion 310. The substrate 400 may be located at the displacement portion 320, and when a force or torque is applied from the outside, the displacement portion 320 may be displaced while the support portion 310 is fixed, and the substrate 400 and the second electrode 600 located on the substrate 400 may also be displaced. Furthermore, the substrate 400 can measure the force and / or torque applied to the force / torque sensor 10B based on the capacitance change between the first electrode 500 and the second electrode 600.

[0121] For example, such as Figure 12 As shown, the housing 100 may have a protrusion 110 at the opposite end of the open side. The protrusion 110 is the portion that connects to the joint of the robot arm 20, and its diameter may be smaller than the diameter of other portions of the housing 100. The protrusion 110 can be mounted on the joint of the robot arm 20. Furthermore, a placement surface 120 may be formed on the inner side of the housing 100 adjacent to the protrusion 110. The placement surface 120 can provide an annular support surface, and one side of the body 300 may be located on the placement surface 120. The body 300 (e.g., support 310) can be fixed to the placement surface 120 by means of screws or welding.

[0122] The cover 200 can cover the open side of the housing 100, thereby preventing the main body 300 and substrate 400 located inside the housing 100 from being exposed. For example, the cover 200 can be connected to the inner surface of a joint. The cover 200 can transmit forces and torques applied from the outside to the main body 300. For example, at least a portion of the cover 200 can be connected to the main body 300. The connection between the cover 200 and the main body 300 can be achieved by screwing, welding, or other mechanical clamping methods. When the cover 200 undergoes slight displacement or deformation, the displacement portion 320 of the main body 300 connected to the cover 200 may be displaced. Furthermore, the substrate 400 located at the displacement portion 320 also displaces, and consequently the second electrode 600 moves relative to the first electrode 500 fixed to the support portion 310 in the main body 300, thereby causing a change in capacitance between the first electrode 500 and the second electrode 600.

[0123] like Figure 12 As shown, the cover 200 may include a plate 210 and a connecting portion 220. The plate 210 may be disc-shaped and located on one side of the open housing 100. Although not shown in the figures, the housing 100 may include a flange portion connected to the plate 210, which may be connected to a joint by means of screws or welding, thereby covering the open side of the housing 100. The connecting portion 220 may be formed on one side of the plate 210 and connected to the body 300. For example, the body 300 and the substrate 400 are located inside the housing 100, and the cover 200 is connected to the open side of the housing 100. In this state, the connecting portion 220 and the displacement portion 320 of the body 300 may be connected by means of screws or welding. Therefore, when a force or torque is applied to the cover 200, the displacement portion 320 is displaced, thereby causing a capacitance change between the first electrode 500 and the second electrode 600.

[0124] The housing 100 and the cover 200 protect the main body 300, substrate 400, first electrode 500, and second electrode 600 from external impacts and prevent foreign objects from entering them. However, the housing 100 and the cover 200 are not essential components, and the force / torque sensor 10 can be implemented without them.

[0125] As described above, the invention has been illustrated with reference to the embodiments in the accompanying drawings, but these are merely exemplary. Various modifications and equivalent embodiments that can be made from the embodiments will be apparent to those skilled in the art. Therefore, the true scope of protection of this invention should be determined by the appended claims.

[0126] Industrial applicability

[0127] The force / torque sensor and its manufacturing method according to embodiments of this disclosure can be applied to the fields of robotics and sensors.

Claims

1. A force / torque sensor, comprising: main body; A substrate connected to the body; A plurality of first electrodes connected to the body; as well as A plurality of second electrodes are connected to the substrate, each corresponding to one of the plurality of first electrodes. When a force or torque is applied to the main body, the substrate moves, and consequently, the plurality of second electrodes move relative to the plurality of first electrodes. The plurality of first electrodes and the plurality of second electrodes are respectively positioned opposite each other in at least two different directions.

2. The force / torque sensor according to claim 1, wherein, The plurality of first electrodes and the plurality of second electrodes are respectively comb-shaped, including a plurality of protrusions and grooves, and at least a portion of the plurality of protrusions and grooves are inserted into each other.

3. The force / torque sensor according to claim 2, wherein, When the plurality of second electrodes move relative to the plurality of first electrodes, the distance between the opposing regions of the plurality of first electrodes and the plurality of second electrodes decreases or increases, and the plurality of first electrodes and the plurality of second electrodes do not contact each other.

4. The force / torque sensor according to claim 1, wherein, Each of the plurality of first electrodes and the plurality of second electrodes includes a plurality of protrusions and a plurality of grooves located between the plurality of protrusions, and has any of the following states: The state in which a plurality of protrusions of the first electrode are inserted into a plurality of slots of the second electrode or the state in which a plurality of protrusions of the second electrode are inserted into a plurality of slots of the first electrode.

5. The force / torque sensor according to claim 4, wherein, The plurality of protrusions are needle-shaped, and the plurality of grooves are formed between adjacent plurality of protrusions.

6. The force / torque sensor according to claim 4, wherein, The plurality of protrusions are spaced apart radially and circumferentially along the force / torque sensor and are block-shaped.

7. The force / torque sensor according to claim 4, wherein, The subject includes: A support portion, which includes an opening on its inner side; A displacement portion, concentric with the support portion and located at the opening, and connected to the substrate; and A bridging component connects the support portion and the displacement portion. When the displacement part is displaced, the capacitance formed between the plurality of first electrodes and the plurality of second electrodes changes.

8. The force / torque sensor according to claim 7, wherein, The plurality of first electrodes are arranged on the inner circumferential surface of the support. The plurality of second electrodes are arranged on the substrate to correspond to the plurality of first electrodes, and the plurality of protrusions extend radially along the inner circumferential surface of the support.

9. The force / torque sensor according to claim 7, wherein, The plurality of first electrodes and the plurality of second electrodes include different numbers of protrusions. The protrusions located at the outer edge of any electrode, which includes more protrusions, surround the outer surface of the other electrodes.

10. The force / torque sensor according to claim 7, wherein, The end of each of the plurality of protrusions included in the plurality of first electrodes and the plurality of second electrodes is radially opposite to the plurality of grooves included in the plurality of first electrodes and the plurality of second electrodes.

11. The force / torque sensor according to claim 7, wherein, The subject also includes: A stepped portion extends from the inner periphery of the support portion towards the displacement portion, and its end is spaced apart from the displacement portion. The plurality of first electrodes are respectively installed on the stepped portion.

12. The force / torque sensor according to claim 11, wherein, The end of each of the plurality of protrusions included in the plurality of first electrodes and the plurality of second electrodes is respectively opposite to the plurality of grooves included in the plurality of first electrodes and the plurality of second electrodes along the height direction.

13. The force / torque sensor according to claim 1, wherein, When no force or torque is applied to the force / torque sensor, the plurality of protrusions are eccentrically located in the plurality of slots.

14. The force / torque sensor according to claim 1, wherein, The first electrode and the second electrode overlap in at least one of the height direction, circumferential direction and radial direction of the force / torque sensor.

15. A method for manufacturing a force / torque sensor, comprising: Apply adhesive to the stepped areas of the main body; The first electrode is placed in the stepped portion; Apply adhesive to the mounting area of ​​the substrate; Place the second electrode in the mounting area; as well as The substrate is connected to the displacement portion of the main body, and the main body and the substrate are connected so that the first electrode and the second electrode are opposite each other in at least two different directions. The steps of applying adhesive to the stepped portion and applying adhesive to the mounting area can be performed simultaneously or either step can be performed first. The steps of placing the first electrode and placing the second electrode can be performed simultaneously or either step can be performed first.

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